Empty basket detection docking device

Abstract

The invention provides an empty basket detection docking device, which belongs to the field of silicon wafer production and manufacturing and comprises an empty basket tooth detection return line and an empty basket appearance detection flow line. The empty basket appearance detection streamline is arranged at the downstream of the empty basket tooth detection return line; wherein a line scanning camera used for detecting the empty basket teeth is arranged above the empty basket tooth detection return line, and an area array camera used for detecting the appearance of the empty basket is arranged above the empty basket appearance detection streamline. And the butt-joint section flower basket transfer module adopts a robot or a clamping jaw which is arranged on the rack and moves in an overhead space, and is used for space transfer of the empty flower basket. The docking device can detect empty baskets before the empty baskets are transferred to the upstream in the subsequent working section, the automation degree of empty basket backflow is high, the empty basket quality detection procedure is added, the appearance quality of the empty baskets is guaranteed, and the docking device is convenient to apply and popularize in the field of silicon wafer manufacturing and processing.

Description

Technical Field

[0001] The invention belongs to the field of silicon wafer production and processing, and particularly relates to an empty basket detection docking device. Background Art

[0002] After the existing silicon wafer debonding, wafer insertion, and cleaning processes, in order to improve efficiency, the cleaning machine will be docked with subsequent process flows, such as silicon wafer sorting machines. The existing docking method only transports full baskets of silicon wafers to the downstream sorting machine, but cannot realize the reflux of empty baskets, which leads to reduced efficiency. Therefore, in order to improve the automation of the utilization of empty baskets, it is necessary to design a docking section for empty basket reflux. Summary of the invention

[0003] In order to overcome the deficiencies of the prior art, an object of the present invention is to provide an empty basket detection docking device which can solve the above-mentioned problems.

[0004] An empty basket detection docking device comprises an empty basket tooth detection return flow line and an empty basket shape detection streamline; the empty basket shape detection streamline is arranged downstream of the empty basket tooth detection return flow line; wherein a line scan camera for empty basket tooth detection is arranged above the empty basket tooth detection return flow line, and an area array camera for empty basket shape detection is arranged above the empty basket shape detection streamline.

[0005] Optionally, the empty basket tooth detection return line includes a basket tooth detection frame and a lifting and transverse movement assembly, wherein the basket tooth detection frame adopts a double-layer flat frame design, and the lifting and transverse movement assembly is arranged at the double-layer flat frame of the basket tooth detection frame for lifting and transversely moving the flower basket.

[0006] Optionally, the basket gear detection frame includes a basket gear detection external frame, an upper supporting flat frame and a lower transverse supporting flat frame; the upper supporting flat frame is horizontally arranged on the top layer of the basket gear detection external frame, and the lower transverse supporting flat frame is horizontally arranged below the upper supporting flat frame, and the height difference between the two is adapted to the height of the flower basket; a plurality of flower basket guides and flower basket sensors are arranged on the upper supporting flat frame for supporting and sensing the flower basket.

[0007] Optionally, the lifting and transverse movement assembly includes a lifting flat frame, a lifting cylinder assembly, a transverse movement carrier plate, a transverse movement guide rail assembly and an empty basket translation drive assembly; the transverse movement carrier plate is slidably arranged on the lower transverse movement support flat frame of the basket gear detection frame through the transverse movement guide rail assembly, the empty basket translation drive assembly is connected to the transverse movement carrier plate, the lifting cylinder assembly is arranged between the lifting flat frame and the transverse movement carrier plate, and the outer width of the lifting flat frame is smaller than the inner width of the upper support flat frame.

[0008] Optionally, the empty basket shape detection streamline includes an empty basket shape detection frame, an empty basket shape detection belt assembly, an empty basket temporary storage conveyor belt assembly and a shape detection section basket guide; the empty basket shape detection belt assembly and the empty basket temporary storage conveyor belt assembly are arranged on the same horizontal plane on the empty basket shape detection frame, and the shape detection section basket guide is arranged above the empty basket temporary storage conveyor belt assembly; the area array camera is arranged above the empty basket shape detection belt assembly.

[0009] Optionally, the empty basket detection docking device also includes a docking section flower basket transfer module, which uses a robot or a clamping claw that moves in the overhead space set on the frame for spatial transfer of the empty flower basket.

[0010] Compared with the prior art, the beneficial effects of the present invention are: the docking device of the present application can take into account the inspection of the empty flower baskets before they are transported upstream in the subsequent work section, and the empty basket reflux has a high degree of automation, and an empty basket quality inspection process is added to ensure the appearance quality of the empty flower baskets, which is convenient for promotion and application in the field of silicon wafer manufacturing and processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 A schematic diagram of an example of an empty basket detection docking device of the present invention;

[0012] Figure 2 It is a schematic diagram of the return line of the empty basket tooth detection;

[0013] Figure 3 It is a schematic diagram of the lifting and traversing assembly;

[0014] Figure 4 A schematic diagram of the basket transfer path for the empty basket tooth detection return line;

[0015] Figure 5 This is a streamline diagram of the empty basket shape detection;

[0016] Figure 6 It is a schematic diagram showing that the empty basket teeth detection return flow line and the empty basket shape detection flow line are arranged in the same straight line;

[0017] Figure 7 It is a schematic diagram of an empty basket detection docking device provided with a docking section flower basket transfer module.

[0018] In the figure,

[0019] 400, docking section flower basket transfer module;

[0020] 500, empty basket tooth detection return line; 510, basket tooth detection frame; 511, basket tooth detection external frame; 512, upper support flat frame; 513, lower horizontal support flat frame; 520, lifting and horizontal movement assembly; 521, lifting flat frame; 522, lifting cylinder assembly; 523, horizontal movement carrier plate; 524, horizontal movement guide rail assembly; 525, empty basket horizontal movement drive assembly; 526, lifting and lifting guide assembly; 530, flower basket guide; 540, flower basket sensor;

[0021] 600, empty basket shape detection streamline; 610, empty basket shape detection frame; 620, empty basket shape detection belt assembly; 630, empty basket temporary storage conveyor belt assembly; 640, shape detection section basket guide;

[0022] 700, Line scan camera;

[0023] 800, Area Array Camera. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] An empty basket detection docking device, see Figure 1-Figure 7 The empty basket detection docking device includes an empty basket tooth detection return flow line 500 and an empty basket shape detection streamline 600; the empty basket shape detection streamline 600 is arranged downstream of the empty basket tooth detection return flow line 500; wherein, a line scan camera 700 for empty basket tooth detection is arranged above the empty basket tooth detection return flow line 500, and an area array camera 800 for empty basket shape detection is arranged above the empty basket shape detection streamline 600.

[0026] Among them, see Figure 2-Figure 4 The empty basket tooth detection return line 500 includes a basket tooth detection frame 510 and a lifting and transverse movement assembly 520, wherein the basket tooth detection frame 510 adopts a double-layer flat frame design, and the lifting and transverse movement assembly 520 is arranged at the double-layer flat frame of the basket tooth detection frame 510, and is used to lift and transversely move the flower basket.

[0027] The basket gear detection frame 510 includes a basket gear detection outer frame 511, an upper support flat frame 512 and a lower transverse support flat frame 513; the upper support flat frame 512 is horizontally arranged on the top layer of the basket gear detection outer frame 511, and the lower transverse support flat frame 513 is horizontally arranged below the upper support flat frame 512, and the height difference between the two is adapted to the height of the flower basket; a plurality of flower basket guides 530 and a flower basket sensor 540 are arranged on the upper support flat frame 512 for supporting and sensing the flower basket.

[0028] In the illustrated example, the flower basket guide 530 is an oblique support seat with a guide notch, and the flower basket sensor 540 is a photoelectric sensor disposed on an adapter plate.

[0029] Specifically, six pairs of basket guides 530 and six basket sensors 540 are provided. The first four pairs of basket guides 530 are basket buffering positions, and the fifth and sixth pairs of basket guides 530 are line scanning detection positions for detecting whether the basket teeth of an empty basket are damaged.

[0030] The lifting and transverse movement assembly 520 includes a lifting flat frame 521, a lifting cylinder assembly 522, a transverse movement carrier plate 523, a transverse movement guide rail assembly 524 and an empty basket translation drive assembly 525; the transverse movement carrier plate 523 is slidably arranged on the lower transverse support flat frame 513 of the basket gear detection frame 510 through the transverse movement guide rail assembly 524, the empty basket translation drive assembly 525 is connected to the transverse movement carrier plate 523, the lifting cylinder assembly 522 is arranged between the lifting flat frame 521 and the transverse movement carrier plate 523, and the outer width of the lifting flat frame 521 is smaller than the inner width of the upper support flat frame 512.

[0031] Furthermore, the bottom of the cylinder body of the lifting cylinder assembly 522 is fixed to the transverse carrier plate 523, and the piston rod of the lifting cylinder assembly 522 is connected to the bottom surface of the lifting flat frame 521 through a lifting plate. In the illustrated example, a set of lifting cylinder assemblies 522 is used, and a plurality of lifting and lifting guide assemblies 526 are also provided between the lifting flat frame 521 and the transverse carrier plate 523. The lifting and lifting guide assemblies 526 use guide shafts and guide sleeve assemblies, and can also use slide rail slider assemblies. In the illustrated example, four sets of lifting and lifting guide assemblies 526 are provided and arranged in four directions of the transverse carrier plate 523.

[0032] Furthermore, a plurality of flower basket guides 530 are provided on the two side beams of the lifting flat frame 521. In the illustrated example, a guide plate with a supporting notch is used.

[0033] The empty basket translation drive assembly 525 has various forms, such as a linear motor assembly, a motor slide assembly, a motor rack and pinion assembly, or a motor belt assembly as shown in the figure.

[0034] When working, see Figure 4The lifting and transverse movement assembly 520 moves in a "U"-shaped space as a whole, lifting, transversely moving, and lowering the flower basket on the flower basket buffer position of the basket tooth detection frame 510 to the line scan detection position, and the line scan camera 700 above the line scan detection position collects line scan images of the flower basket, and the processor performs image processing to determine whether the basket teeth of the flower basket are damaged.

[0035] Among them, see Figure 5 The empty basket shape detection streamline 600 includes an empty basket shape detection frame 610, an empty basket shape detection belt assembly 620, an empty basket temporary storage conveying belt assembly 630 and a shape detection section basket guide 640; the empty basket shape detection belt assembly 620 and the empty basket temporary storage conveying belt assembly 630 are arranged on the empty basket shape detection frame 610 at the same horizontal plane, and the shape detection section basket guide 640 is arranged above the empty basket temporary storage conveying belt assembly 630; the area array camera 800 is arranged above the empty basket shape detection belt assembly 620.

[0036] The empty basket shape detection belt assembly 620 and the empty basket temporary storage conveying belt assembly 630 may be the same belt assembly or two separate belt groups. In the case of two belt groups, they may be synchronously driven by one power source or independently driven by two power sources.

[0037] Of course, it is not limited to belt conveyor, but for better appearance detection, the belt conveyor mode is preferred, and the belt is generally a white belt.

[0038] See also Figure 7 The empty basket detection docking device also includes a docking section flower basket transfer module 400. The docking section flower basket transfer module 400 uses a robot or a top-mounted space-moving clamp set on a rack for spatial transfer of empty flower baskets.

[0039] Specifically, in the illustrated example, the docking section flower basket transfer module 400 uses a clamp that moves in the overhead space on the frame, so as to transport the empty flower baskets that have been taken from the downstream sorting machine to the empty basket tooth detection return line 500, and transport the empty baskets that have passed the OK inspection on the empty basket shape inspection streamline 600 to the external empty basket return line, and return them from the empty basket return line to the upstream insert section, and the empty flower baskets that have passed the NG inspection are manually repaired.

[0040] The arrangement of the empty basket teeth detection return line 500 and the empty basket shape detection streamline 600 can be: Figure 1 and Figure 7 The vertical arrangement can also be Figure 6 The specific form is not limited, as long as it meets the rationality of the layout space of upstream and downstream transfer and other mechanisms in the docking device.

[0041] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An empty basket detection docking device, characterized in that: The empty basket detection docking device comprises an empty basket tooth detection return flow line (500) and an empty basket shape detection streamline (600); the empty basket shape detection streamline (600) is arranged downstream of the empty basket tooth detection return flow line (500); wherein a line scan camera (700) for empty basket tooth detection is arranged above the empty basket tooth detection return flow line (500), and an area array camera (800) for empty basket shape detection is arranged above the empty basket shape detection streamline (600).

2. The empty basket detection docking device according to claim 1, characterized in that: The empty basket tooth detection return line (500) comprises a basket tooth detection frame (510) and a lifting and transverse movement assembly (520), wherein the basket tooth detection frame (510) adopts a double-layer flat frame design, and the lifting and transverse movement assembly (520) is arranged at the double-layer flat frame of the basket tooth detection frame (510) and is used to lift and transversely move the flower basket.

3. The empty basket detection docking device according to claim 2, characterized in that: The basket gear detection frame (510) comprises a basket gear detection external frame (511), an upper support flat frame (512) and a lower transverse support flat frame (513); the upper support flat frame (512) is horizontally arranged on the top layer of the basket gear detection external frame (511), and the lower transverse support flat frame (513) is horizontally arranged below the upper support flat frame (512), and the height difference between the two is adapted to the height of the flower basket; a plurality of flower basket guides (530) and flower basket sensors (540) are arranged on the upper support flat frame (512) for supporting and sensing the flower basket.

4. The empty basket detection docking device according to claim 3, characterized in that: The lifting and transverse movement assembly (520) comprises a lifting flat frame (521), a lifting cylinder assembly (522), a transverse movement carrier plate (523), a transverse movement guide rail assembly (524) and an empty basket translation drive assembly (525); the transverse movement carrier plate (523) is slidably arranged on the lower transverse movement support flat frame (513) of the basket gear detection frame (510) through the transverse movement guide rail assembly (524), the empty basket translation drive assembly (525) is connected to the transverse movement carrier plate (523), the lifting cylinder assembly (522) is arranged between the lifting flat frame (521) and the transverse movement carrier plate (523), and the outer width of the lifting flat frame (521) is smaller than the inner width of the upper support flat frame (512).

5. The empty basket detection docking device according to claim 1, characterized in that: The empty basket shape detection streamline (600) comprises an empty basket shape detection frame (610), an empty basket shape detection belt assembly (620), an empty basket temporary storage conveying belt assembly (630) and a shape detection section basket guide (640); the empty basket shape detection belt assembly (620) and the empty basket temporary storage conveying belt assembly (630) are arranged on the empty basket shape detection frame (610) at the same horizontal plane, and the shape detection section basket guide (640) is arranged above the empty basket temporary storage conveying belt assembly (630); and the area array camera (800) is arranged above the empty basket shape detection belt assembly (620).

6. The empty basket detection docking device according to claim 1, characterized in that: The empty basket detection docking device also includes a docking section flower basket transfer module (400). The docking section flower basket transfer module (400) uses a robot or a clamping claw arranged on the top space of a frame to move in space for the empty flower basket to be transferred.

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