Convenient-to-maintain electrical cabinet for semiconductor equipment and control system thereof

Abstract

The invention relates to the field of semiconductor electrical cabinets, and particularly discloses a convenient-to-maintain electrical cabinet for semiconductor equipment, which comprises a cabinet body, shutters and a cabinet door, and is characterized in that a knocking mechanism, a rotating mechanism, a linkage mechanism and a pushing mechanism are arranged in the cabinet body. When a semiconductor electrical cabinet is in a cold environment, a layer of ice crystal is attached to each of a cabinet door and a cabinet body of the semiconductor electrical cabinet, and if the semiconductor electrical cabinet breaks down at the moment, emergency maintenance is needed, and the cabinet door is difficult to open. At the moment, a tool is used for knocking the knocking mechanism, the knocking mechanism acts through the linkage mechanisms, the two linkage mechanisms drive the two rotating mechanisms to act respectively, the two rotating mechanisms drive the two shutters to be opened, and the ice crystal layer on the side wall of the cabinet body is broken. The two rotating mechanisms can drive the two pushing mechanisms to push the two cabinet doors, so that ice crystal layers on the cabinet doors are broken, the ice layers on the cabinet doors and the cabinet body are rapidly removed, the interior of the semiconductor electrical cabinet is conveniently overhauled, and the overhauling efficiency is improved.

Description

Technical Field

[0001] The invention relates to the field of semiconductor electrical cabinets, in particular to an electrical cabinet for semiconductor equipment and a control system thereof which is easy to maintain. Background Art

[0002] Semiconductor electrical cabinet is a device used for semiconductor equipment control and protection, which is widely used in semiconductor manufacturing, semiconductor testing, semiconductor packaging and other related industries. It usually contains components such as electrical components, controllers, protection devices and power distribution equipment to provide stable power supply and protect electronic equipment.

[0003] The installation locations of semiconductor electrical cabinets include indoors and outdoors. In outdoor installations, semiconductor electrical cabinets are usually installed in the following places: power substations, telecommunication base stations, and industrial application sites. In outdoor environments, in severe cold weather or in severe cold regions, a layer of ice crystals will condense on the cabinet of the semiconductor electrical cabinet. When the semiconductor electrical cabinet suddenly fails and needs emergency repair, it is necessary to quickly open the semiconductor electrical cabinet for repair. However, due to ice on the cabinet of the semiconductor electrical cabinet, it is difficult to quickly open the cabinet door for repair, which delays the time for emergency repair and makes the efficiency of emergency repair low.

[0004] Therefore, we propose an electrical cabinet for semiconductor equipment that is easy to maintain to solve the above problems. Summary of the invention

[0005] The object of the present invention is to provide an electrical cabinet for semiconductor equipment that is easy to maintain, so as to solve the problem of low repair efficiency of a faulty semiconductor electrical cabinet proposed in the above background technology.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] An electrical cabinet for semiconductor equipment that is easy to maintain, comprising a cabinet body, shutters rotatably mounted on two side walls of the cabinet body, and two cabinet doors rotatably mounted on one side of the cabinet body, wherein a knocking mechanism, a rotating mechanism, a linkage mechanism, and a pushing mechanism are respectively arranged in the cabinet body;

[0008] The knocking mechanism is arranged on the cabinet body on the side opposite to the cabinet door, and the rotating mechanism, the linkage mechanism and the pushing mechanism are each arranged in two groups, and the two groups of the rotating mechanisms are respectively arranged on the side of the cabinet body corresponding to the shutters, so as to drive the corresponding shutters to rotate;

[0009] The two groups of linkage mechanisms are respectively arranged between the knocking mechanism and the corresponding rotating mechanism, and are used to make the knocking mechanism and the rotating mechanism transmission connected;

[0010] The two groups of pushing mechanisms are respectively arranged on one side of the shutter away from the corresponding linkage mechanism, and one part of the pushing mechanism is transmission-connected with the corresponding rotating mechanism, and the other part is connected with the corresponding cabinet door;

[0011] The knocking mechanism can drive the two groups of rotating mechanisms to move through the two groups of linkage mechanisms, so that the two groups of rotating mechanisms respectively drive the two shutters to rotate, and when the two groups of rotating mechanisms are in motion, they can push the two cabinet doors to rotate through the corresponding pushing mechanisms.

[0012] By adopting the above technical solution, when the semiconductor electrical cabinet is in a cold environment, a layer of ice crystals is attached to the cabinet door and cabinet body of the semiconductor electrical cabinet. If the semiconductor electrical cabinet fails and needs emergency repair, it is difficult to open the cabinet door. At this time, a tool is used to knock the knocking mechanism, and the knocking mechanism will act through the linkage mechanism, so that the two sets of linkage mechanisms respectively drive the two sets of rotating mechanisms to act, and the two sets of rotating mechanisms will drive the two shutters to open, so that the ice crystal layer on the side wall of the cabinet body is broken. The two sets of rotating mechanisms will also drive the two sets of pushing mechanisms to push the two cabinet doors, so that the ice crystal layer on the cabinet doors is broken, so as to quickly remove the ice layer on the cabinet door and the cabinet body, so as to facilitate the maintenance of the interior of the semiconductor electrical cabinet and improve the maintenance efficiency.

[0013] In a further embodiment, the knocking mechanism includes a mounting plate, a knocking column, a rotating drum, a rotating disk, a pawl, a ratchet and a driving gear, wherein the mounting plate is fixedly mounted on the inner side wall of the cabinet, and the knocking column is slidably arranged on the mounting plate and the side wall of the cabinet, and the two ends are respectively arranged to penetrate the cabinet and the mounting plate;

[0014] The rotating drum is rotatably mounted on the mounting plate, one end of the knocking column extends into the rotating drum, the sliding direction of the knocking column is coaxial with the rotating axis of the rotating drum, and a first spiral guide groove is provided on the outer peripheral wall of the knocking column, and a first guide rod extending into the first guide groove is fixed on the inner peripheral wall of the rotating drum;

[0015] The rotating disk is sleeved and fixed outside the rotating drum, the pawl is installed on the rotating disk and at least partially extends outside the rotating disk, the ratchet is rotatably mounted on the mounting plate, and the ratchet and the rotating disk are coaxially arranged, the pawl can drive the ratchet to rotate in one direction, and the driving gear is coaxially sleeved and fixed outside the ratchet;

[0016] The linkage mechanism includes a moving component and a reversing component. The driving gear can drive the moving part of the moving component to move, so that the moving component drives the rotating mechanism to rotate through the reversing component.

[0017] By adopting the above technical solution, when it is necessary to break the ice crystal layer on the cabinet body and the cabinet door, a tool is used to hammer the knocking column, and the knocking column moves toward the inside of the cabinet body under the force of the hammer. During the movement, the first guide rod moves in the first guide groove. Since the direction of the first guide groove is spiral, the first guide rod rotates, causing the rotating drum to rotate;

[0018] The rotation of the drum will drive the turntable to rotate, and the rotation of the turntable will drive the pawl to rotate. Since the pawl can lock the ratchet in one direction, that is, when the pawl rotates in a certain direction, it can drive the ratchet to rotate together, and when the pawl rotates in the other direction, it will not drive the ratchet to rotate together;

[0019] When the turntable rotates, the pawl rotates, and the pawl drives the ratchet wheel to rotate, and the ratchet wheel drives the driving gear to rotate. The rotation of the driving gear realizes the linkage control of the rotating mechanism through the moving component and the reversing component, so that the rotating mechanism drives the blinds to rotate and open the blinds, thereby breaking the ice crystal layer on the side wall of the cabinet where the blinds are located;

[0020] The rotating mechanism can also drive the pushing mechanism to move, so that the pushing mechanism drives the cabinet door to rotate a certain angle, thereby quickly breaking the ice crystal layer on the cabinet door and realizing the rapid opening of the cabinet door, thereby facilitating rapid repair of the semiconductor electrical cabinet and improving the efficiency of the repair.

[0021] In a further embodiment, a first reset member is sleeved on the body of the knocking column and is used to drive the end of the knocking column extending out of the outer wall of the cabinet to move in a direction away from the outer wall of the cabinet.

[0022] By adopting the above technical solution, the second reset member can drive the knocking column to reset after the hammering, so as to facilitate repeated hammering of the knocking column, so as to make the blinds and cabinet doors rotate slightly, thereby breaking the ice crystal layer on the cabinet body and cabinet door. The advantage of this design is also reflected in that the blinds and cabinet doors rotate at a smaller angle during each hammering process, reducing the possibility of damage to the entire mechanism due to excessive rotation angle.

[0023] In a further embodiment, the moving assembly includes a first rack, a connecting plate, a slide cylinder and a first slide rod, the two first racks in the two groups of the moving assemblies are parallel to each other and respectively mesh with the upper and lower tooth surfaces of the driving gear, the connecting plate is fixedly mounted on an end of the first rack away from the driving gear, the slide cylinder is fixedly mounted on a side of the connecting plate away from the first rack, and the length direction of the slide cylinder is consistent with the moving direction of the first rack;

[0024] One end of the first slide bar is rotatably mounted on the side wall of the cabinet, and the other end is slidably inserted into an end of the slide cylinder away from the connecting plate. The rod body of the first slide bar is transmission connected to the reversing assembly. A second spiral guide groove is provided on the outer peripheral wall of the first slide bar, and a second guide rod extending into the second guide groove is fixedly mounted on the inner peripheral wall of the slide cylinder.

[0025] By adopting the above technical solution, when the driving gear rotates, it will drive the first rack to move, and the first rack will drive the slide cylinder to slide through the connecting plate, so that the slide cylinder drives the second guide rod to rotate through the second guide groove, and the rotating second guide rod drives the rotating mechanism to rotate through the reversing assembly, so that the rotating mechanism drives the shutter to open, and the rotating mechanism drives the pushing mechanism to move.

[0026] In a further embodiment, a second reset member for driving the first rack to move in a direction away from the first sliding rod is disposed on the mounting plate.

[0027] By adopting the above technical solution, the second reset member can drive the first rack to move in a direction away from the first slide rod, thereby cooperating with the first reset member to reset the entire mechanism, facilitating the next hammering operation.

[0028] In a further embodiment, the reversing assembly includes a first driven gear, a second driven gear, a third driven gear, a fourth driven gear and a second rack, the first driven gear is coaxially sleeved and fixed on the rod body of the first slide bar, the second driven gear, the third driven gear and the fourth driven gear are all rotatably mounted on the side wall of the cabinet and the rotation axes are parallel to each other;

[0029] The second driven gear is meshed with the first driven gear, the third driven gear is meshed with the second driven gear, the fourth driven gear is coaxially fixed with the third driven gear, the second rack is slidably mounted on the inner wall of the cabinet where the blinds are located, and the fourth driven gear is meshed with the second rack, and the second rack can drive the rotating mechanism to rotate when moving, so that the corresponding blinds rotate.

[0030] By adopting the above technical solution, when the second guide rod rotates, it will drive the first driven gear to rotate, the first driven gear will drive the second driven gear to rotate, the second driven gear will drive the third driven gear to rotate, the third driven gear will drive the fourth driven gear to rotate, and the fourth driven gear will drive the second rack to move, so that the second rack drives the rotating mechanism to move.

[0031] In a further embodiment, the rotating mechanism includes a rotating shaft and a second sliding rod, the rotating shaft is rotatably mounted on the inner wall of the cabinet, the shutter is fixedly connected to the rotating shaft and uses the rotating shaft as a rotating axis;

[0032] The rotating shaft is hollow, the second sliding rod is slidably installed in the rotating shaft and both ends pass through the rotating shaft respectively, a third guide groove is spirally arranged on the outer peripheral wall of the second sliding rod, a third guide rod extending into the third guide groove is fixedly installed on the inner peripheral wall of the rotating shaft, one end of the second sliding rod is fixedly connected to the end of the second rack, and the other end is transmission connected to the pushing mechanism.

[0033] By adopting the above technical solution, when the second rack moves, it will drive the second slide bar to move, and the third guide groove on the second slide bar will drive the third guide bar to rotate, causing the rotating shaft to rotate, so that the shutter can be opened to a certain angle.

[0034] In a further embodiment, a third reset member is sleeved on the rod body of the second sliding rod and is used to drive the second sliding rod to move toward a direction close to the fourth driven gear.

[0035] By adopting the above technical solution, the third reset member can drive the second slide rod to move toward the direction close to the fourth driven gear, so that the cabinet door can be opened conveniently without knocking, reducing the influence of the pushing mechanism on the opening and closing of the cabinet door.

[0036] In a further embodiment, the pushing mechanism includes a third rack, a fifth driven gear, a sixth driven gear, a first connecting rod, a second connecting rod and a fixed plate, the end of the third rack is fixedly connected to an end of the second slide bar away from the second rack, the fifth driven gear and the sixth driven gear are both rotatably mounted on the inner side wall of the cabinet, and the fifth driven gear is meshed with the third rack, and the sixth driven gear is meshed with the fifth driven gear;

[0037] One end of the first connecting rod is fixedly mounted on the side of the sixth driven gear, and the other end is rotatably connected to the end of the second connecting rod. The fixing plate is rotatably connected to the end of the second connecting rod away from the first connecting rod, and the fixing plate is fixedly connected to the cabinet door.

[0038] By adopting the above technical solution, when the second sliding rod moves, it will drive the third rack to move, the third rack will drive the fifth driven gear to actively drive the fifth driven gear to rotate, the fifth driven gear will drive the sixth driven gear to rotate, so that the sixth driven gear drives the first connecting rod to rotate, and the first connecting rod drives the second connecting rod to rotate, so that the second connecting rod pushes the cabinet door through the fixed plate, breaking the ice crystal layer on the cabinet door, thereby quickly opening the cabinet door.

[0039] The present invention also provides a semiconductor electrical cabinet control system, including an electrical cabinet for semiconductor equipment that is easy to maintain and is applied to the above-mentioned.

[0040] Compared with the prior art, the present invention has the following beneficial effects:

[0041] The knocking mechanism in the present invention can drive the linkage mechanism to move, so that the two linkage mechanisms respectively drive the two rotating mechanisms to move, and the two rotating mechanisms will drive the two shutters to open, so that the ice crystal layer on the side wall of the cabinet body is broken. The two rotating mechanisms will also drive the two pushing mechanisms to push the two cabinet doors, so that the ice crystal layer on the cabinet doors is broken, so as to quickly remove the ice layer on the cabinet doors and the cabinet body, so as to facilitate the maintenance of the interior of the semiconductor electrical cabinet and improve the maintenance efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 This is a schematic diagram of the overall structure of the electrical cabinet from a first perspective in an embodiment of the present application;

[0043] Figure 2 This is a schematic diagram of the overall structure of the electrical cabinet from a second viewing angle in an embodiment of the present application;

[0044] Figure 3 A top view of the internal structure of the electrical cabinet in the embodiment of the present application;

[0045] Figure 4 for Figure 3 A partial structural diagram of the striking mechanism;

[0046] Figure 5 for Figure 3 The overall structural diagram of the striking mechanism, linkage mechanism, rotating mechanism and pushing mechanism;

[0047] Figure 6 for Figure 5 Schematic diagram of some structures of the striking mechanism, linkage mechanism, rotating mechanism and pushing mechanism.

[0048] In the figure: 1, cabinet; 11, shutter; 12, cabinet door; 2, knocking mechanism; 21, mounting plate; 211, second reset member; 22, knocking column; 221, knocking plate; 222, first guide groove; 223, first reset member; 23, rotating drum; 24, rotating disk; 25, ratchet; 26, ratchet; 27, driving gear; 3, linkage mechanism; 31, moving assembly; 311, first rack; 312, connecting plate; 313, slide cylinder; 314, first slide rod; 3141, Second guide groove; 32, reversing assembly; 321, first driven gear; 322, second driven gear; 323, third driven gear; 324, fourth driven gear; 325, second rack; 4, rotating mechanism; 41, rotating shaft; 42, second slide bar; 421, third guide groove; 422, third reset member; 5, pushing mechanism; 51, third rack; 52, fifth driven gear; 53, sixth driven gear; 54, first connecting rod; 55, second connecting rod; 56, fixing plate. DETAILED DESCRIPTION

[0049] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0050] See also Figure 1-Figure 6 The present application provides an electrical cabinet for semiconductor equipment that is easy to maintain, including a cabinet body 1, shutters 11 rotatably mounted on two side walls of the cabinet body 1, and two cabinet doors 12 rotatably mounted on one side of the cabinet body 1, and a knocking mechanism 2, a rotating mechanism 4, a linkage mechanism 3 and a pushing mechanism 5 are respectively arranged in the cabinet body 1.

[0051] For details, see Figure 1 , Figure 2 and Figure 3 The knocking mechanism 2 is arranged on the cabinet body 1 on the side opposite to the cabinet door 12, and the rotating mechanism 4, the linkage mechanism 3 and the pushing mechanism 5 are each provided with two groups, and the two groups of rotating mechanisms 4 are respectively arranged on the side of the cabinet body 1 where the corresponding shutter 11 is located, for driving the corresponding shutter 11 to rotate;

[0052] Two sets of linkage mechanisms 3 are respectively arranged between the knocking mechanism 2 and the corresponding rotating mechanism 4, and are used to make the knocking mechanism 2 and the rotating mechanism 4 transmission connected;

[0053] The two groups of pushing mechanisms 5 are respectively arranged on one side of the shutter 11 away from the corresponding linkage mechanism 3, and one part of the pushing mechanism 5 is transmission-connected with the corresponding rotating mechanism 4, and the other part is connected with the corresponding cabinet door 12;

[0054] The knocking mechanism 2 can drive the two sets of rotating mechanisms 4 to move through the two sets of linkage mechanisms 3, so that the two sets of rotating mechanisms 4 respectively drive the two shutters 11 to rotate, and when the two sets of rotating mechanisms 4 are in motion, they can push the two cabinet doors 12 to rotate through the corresponding pushing mechanisms 5.

[0055] See also Figure 3 and Figure 4 The knocking mechanism 2 includes a mounting plate 21, a knocking column 22, a rotating drum 23, a rotating disk 24, a pawl 25, a ratchet 26 and a driving gear 27. The mounting plate 21 is fixedly mounted on the inner wall of the cabinet 1. The knocking column 22 is slidably arranged on the mounting plate 21 and the side wall of the cabinet 1, and the two ends are respectively arranged to penetrate the cabinet 1 and the mounting plate 21. The end of the knocking column 22 is welded and fixed with a knocking disk 221;

[0056] The rotating drum 23 is rotatably mounted on the mounting plate 21, one end of the knocking column 22 extends into the rotating drum 23, the sliding direction of the knocking column 22 is coaxial with the rotation axis of the rotating drum 23, and a first spiral guide groove 222 is provided on the outer peripheral wall of the knocking column 22, and a first guide rod extending into the first guide groove 222 is fixed on the inner peripheral wall of the rotating drum 23;

[0057] The rotating disk 24 is sleeved and fixed outside the rotating drum 23, the pawl 25 is installed on the rotating disk 24 and at least partially extends outside the rotating disk 24, the ratchet 26 is rotatably installed on the mounting plate 21, and the ratchet 26 and the rotating disk 24 are coaxially arranged, the pawl 25 can drive the ratchet 26 to rotate in one direction, and the driving gear 27 is coaxially sleeved and fixed outside the ratchet 26;

[0058] See also Figure 3 , Figure 5 and Figure 6 The linkage mechanism 3 includes a moving component 31 and a reversing component 32 . The driving gear 27 can drive the moving part of the moving component 31 to move, so that the moving component 31 drives the rotating mechanism 4 to rotate through the reversing component 32 .

[0059] A first reset member 223 is mounted on the body of the knocking column 22 and is used to drive the end of the knocking column 22 extending out of the outer wall of the cabinet 1 to move away from the outer wall of the cabinet 1. The first reset member 223 adopts a spring, and one end of the first reset member 223 is welded and fixed to the knocking plate 221, and the other end abuts against the outer wall of the cabinet 1.

[0060] For further information, see Figure 3 and Figure 5 The moving assembly 31 includes a first rack 311, a connecting plate 312, a slide 313 and a first slide bar 314. The two first racks 311 in the two groups of moving assemblies 31 are parallel to each other and mesh with the upper and lower tooth surfaces of the driving gear 27 respectively. The connecting plate 312 is fixedly mounted on one end of the first rack 311 away from the driving gear 27. The slide 313 is fixedly mounted on the side of the connecting plate 312 away from the first rack 311, and the length direction of the slide 313 is consistent with the moving direction of the first rack 311.

[0061] One end of the first slide bar 314 is rotatably mounted on the side wall of the cabinet 1, and the other end is slidably inserted into the end of the slide cylinder 313 away from the connecting plate 312. The rod body of the first slide bar 314 is transmission connected to the reversing assembly 32. A spiral second guide groove 3141 is opened on the outer peripheral wall of the first slide bar 314, and a second guide rod extending into the second guide groove 3141 is fixedly installed on the inner peripheral wall of the slide cylinder 313.

[0062] The mounting plate 21 is provided with a second reset member 211 for driving the first rack 311 to move away from the first slide bar 314 . The second reset member 211 also adopts a spring. One end of the second reset member 211 is fixedly connected to the first rack 311 , and the other end is fixedly connected to the mounting plate 21 .

[0063] See also Figure 3 , Figure 5 and Figure 6 The reversing assembly 32 includes a first driven gear 321, a second driven gear 322, a third driven gear 323, a fourth driven gear 324 and a second rack 325. The first driven gear 321 is coaxially sleeved and fixed on the rod body of the first slide bar 314. The second driven gear 322, the third driven gear 323 and the fourth driven gear 324 are all rotatably mounted on the side wall of the cabinet 1 and the rotation axes are parallel to each other.

[0064] The second driven gear 322 is meshed with the first driven gear 321, the third driven gear 323 is meshed with the second driven gear 322, the fourth driven gear 324 is coaxially fixed with the third driven gear 323, the second rack 325 is slidably mounted on the inner wall of the cabinet 1 where the shutter 11 is located, and the fourth driven gear 324 and the second rack 325 are meshed with each other, and the second rack 325 can drive the rotating mechanism 4 to rotate when moving, so that the corresponding shutter 11 rotates.

[0065] See also Figure 5 and Figure 6 The rotating mechanism 4 includes a rotating shaft 41 and a second sliding rod 42. The rotating shaft 41 is rotatably mounted on the inner wall of the cabinet 1. The shutter 11 is fixedly connected to the rotating shaft 41 and takes the rotating shaft 41 as the rotating axis.

[0066] The rotating shaft 41 is hollow, the second slide rod 42 is slidably installed in the rotating shaft 41 and the two ends respectively pass through the rotating shaft 41, a third guide groove 421 is spirally arranged on the outer peripheral wall of the second slide rod 42, and a third guide rod extending into the third guide groove 421 is fixedly installed on the inner peripheral wall of the rotating shaft 41, one end of the second slide rod 42 is fixedly connected to the end of the second rack 325, and the other end is transmission connected to the pushing mechanism 5.

[0067] A third reset member 422 is sleeved on the rod body of the second slide rod 42 for driving the second slide rod 42 to move toward the fourth driven gear 324. The third reset member 422 still adopts a spring. One end of the third reset member 422 is fixedly connected to the end of the second rack 325, and the other end is fixedly connected to the rod body of the second slide rod 42.

[0068] See also Figure 5 and Figure 6The pushing mechanism 5 includes a third rack 51, a fifth driven gear 52, a sixth driven gear 53, a first connecting rod 54, a second connecting rod 55 and a fixing plate 56. The end of the third rack 51 is fixedly connected to an end of the second slide bar 42 away from the second rack 325. The fifth driven gear 52 and the sixth driven gear 53 are both rotatably mounted on the inner wall of the cabinet 1, and the fifth driven gear 52 is meshed with the third rack 51, and the sixth driven gear 53 is meshed with the fifth driven gear 52.

[0069] One end of the first connecting rod 54 is fixedly mounted on the side of the sixth driven gear 53 , and the other end is rotatably connected to the end of the second connecting rod 55 . The fixing plate 56 is rotatably connected to the end of the second connecting rod 55 away from the first connecting rod 54 , and the fixing plate 56 is fixedly connected to the cabinet door 12 .

[0070] When the second slide bar 42 moves, it will drive the third rack 51 to move, and the third rack 51 will drive the fifth driven gear 52 to actively drive the fifth driven gear 52 to rotate, so that the sixth driven gear 53 drives the first connecting rod 54 to rotate, and the first connecting rod 54 drives the second connecting rod 55 to rotate, so that the second connecting rod 55 pushes the cabinet door 12 through the fixed plate 56, so that the ice crystal layer on the cabinet door 12 is broken, thereby quickly opening the cabinet door 12.

[0071] When the striking plate 221 is not hammered, under the action of the third reset member 422, the second slide rod 42 drives the end of the third rack 51 to move away from the fifth driven gear 52, so that the end of the third rack 51 is temporarily separated from the fifth driven gear 52. At this time, when the cabinet door 12 is opened, other mechanisms will not hinder the opening and closing of the cabinet door 12.

[0072] The present application also provides a control system applied to an electrical cabinet for semiconductor equipment that is easy to maintain. The control system includes a constant temperature control mechanism for performing constant temperature control on the interior of the cabinet 1 .

[0073] The working principle of an electrical cabinet for semiconductor equipment that is easy to maintain in the present application is as follows: when the semiconductor electrical cabinet is in a cold environment, a layer of ice crystals is attached to the cabinet door 12 and the cabinet body 1 of the semiconductor electrical cabinet. If the semiconductor electrical cabinet fails and needs emergency repair at this time, it is difficult to open the cabinet door 12;

[0074] The knocking plate 221 is struck with a tool, and the knocking plate 221 drives the knocking column 22 to move toward the inside of the cabinet 1, which causes the first guide rod to move in the first guide groove 222, causing the first guide rod to rotate, thereby causing the rotating drum 23 to rotate;

[0075] The rotation of the drum 23 drives the rotating disk 24 to rotate, and the rotation of the rotating disk 24 drives the pawl 25 to rotate. When the rotating disk 24 rotates, the pawl 25 rotates, and the pawl 25 drives the ratchet 26 to rotate, and the ratchet 26 drives the driving gear 27 to rotate;

[0076] When the driving gear 27 rotates, it drives the first rack 311 to move, and the first rack 311 drives the slide 313 to slide through the connecting plate 312, so that the slide 313 drives the second guide rod to rotate through the second guide groove 3141;

[0077] When the second guide rod rotates, the first driven gear 321 is driven to rotate, the first driven gear 321 drives the second driven gear 322 to rotate, the second driven gear 322 drives the third driven gear 323 to rotate, the third driven gear 323 drives the fourth driven gear 324 to rotate, and the fourth driven gear 324 drives the second rack 325 to move;

[0078] When the second rack 325 moves, it drives the second slide bar 42 to move, and the third guide groove 421 on the second slide bar 42 drives the third guide bar to rotate, so that the rotating shaft 41 rotates, so that the shutter 11 is opened to a certain angle, so that the ice crystal layer on the side wall of the cabinet 1 where the shutter 11 is located is broken;

[0079] At the same time, when the second slide rod 42 moves, it will also drive the third rack 51 to move, and the third rack 51 will drive the fifth driven gear 52 to actively drive the fifth driven gear 52 to rotate, so that the sixth driven gear 53 drives the first connecting rod 54 to rotate, and the first connecting rod 54 drives the second connecting rod 55 to rotate, so that the second connecting rod 55 pushes the cabinet door 12 through the fixed plate 56, so that the ice crystal layer on the cabinet door 12 is broken, thereby quickly opening the cabinet door 12.

[0080] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0081] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. An electrical cabinet for semiconductor equipment that is easy to maintain, characterized in that: The cabinet comprises a cabinet body (1), shutters (11) rotatably mounted on two side walls of the cabinet body (1), and two cabinet doors (12) rotatably mounted on one side of the cabinet body (1); a knocking mechanism (2), a rotating mechanism (4), a linkage mechanism (3), and a pushing mechanism (5) are respectively arranged in the cabinet body (1); The knocking mechanism (2) is arranged on the cabinet body (1) on the side opposite to the cabinet door (12); the rotating mechanism (4), the linkage mechanism (3) and the pushing mechanism (5) are each provided with two groups; the two groups of the rotating mechanisms (4) are respectively arranged on the side of the cabinet body (1) corresponding to the location of the shutter (11), and are used to drive the corresponding shutter (11) to rotate; The two groups of linkage mechanisms (3) are respectively arranged between the knocking mechanism (2) and the corresponding rotating mechanism (4), and are used to achieve transmission connection between the knocking mechanism (2) and the rotating mechanism (4); The two groups of the pushing mechanisms (5) are respectively arranged on a side of the shutter (11) away from the corresponding linkage mechanism (3), and a part of the pushing mechanism (5) is transmission-connected to the corresponding rotating mechanism (4), and the other part is connected to the corresponding cabinet door (12); The knocking mechanism (2) can drive the two sets of rotating mechanisms (4) to operate through the two sets of linkage mechanisms (3), so that the two sets of rotating mechanisms (4) respectively drive the two shutters (11) to rotate, and when the two sets of rotating mechanisms (4) operate, they can drive the two cabinet doors (12) to rotate through the corresponding pushing mechanisms (5).

2. The electrical cabinet for semiconductor equipment that is easy to maintain according to claim 1, characterized in that: The knocking mechanism (2) comprises a mounting plate (21), a knocking column (22), a rotating drum (23), a rotating disk (24), a ratchet (25), a ratchet wheel (26) and a driving gear (27); the mounting plate (21) is fixedly mounted on the inner side wall of the cabinet (1); the knocking column (22) is slidably arranged on the mounting plate (21) and the side wall of the cabinet (1), and two ends thereof are respectively arranged to penetrate the cabinet (1) and the mounting plate (21); The rotating cylinder (23) is rotatably mounted on the mounting plate (21), one end of the knocking column (22) extends into the rotating cylinder (23), the sliding direction of the knocking column (22) is coaxial with the rotation axis of the rotating cylinder (23), and a first spiral guide groove (222) is provided on the outer peripheral wall of the knocking column (22), and a first guide rod extending into the first guide groove (222) is fixed on the inner peripheral wall of the rotating cylinder (23); The rotating disk (24) is sleeved and fixed outside the rotating cylinder (23); the ratchet (25) is mounted on the rotating disk (24) and at least partially extends outside the rotating disk (24); the ratchet (26) is rotatably mounted on the mounting plate (21); the ratchet (26) and the rotating disk (24) are coaxially arranged; the ratchet (25) can drive the ratchet (26) to rotate in one direction; and the driving gear (27) is coaxially sleeved and fixed outside the ratchet (26); The linkage mechanism (3) comprises a moving component (31) and a reversing component (32), and the driving gear (27) can drive the moving part of the moving component (31) to move, so that the moving component (31) drives the rotating mechanism (4) to rotate through the reversing component (32).

3. The electrical cabinet for semiconductor equipment that is easy to maintain according to claim 2, characterized in that: A first reset member (223) is sleeved and mounted on the body of the knocking column (22) and is used to drive the end of the knocking column (22) extending out of the outer wall of the cabinet (1) to move in a direction away from the outer wall of the cabinet (1).

4. The electrical cabinet for semiconductor equipment that is easy to maintain according to claim 2, characterized in that: The moving assembly (31) comprises a first rack (311), a connecting plate (312), a slide cylinder (313) and a first slide bar (314); the two first racks (311) in the two groups of the moving assemblies (31) are parallel to each other and respectively mesh with the upper and lower tooth surfaces of the driving gear (27); the connecting plate (312) is fixedly mounted on an end of the first rack (311) away from the driving gear (27); the slide cylinder (313) is fixedly mounted on a side of the connecting plate (312) away from the first rack (311); and the length direction of the slide cylinder (313) is consistent with the moving direction of the first rack (311); One end of the first slide bar (314) is rotatably mounted on the side wall of the cabinet (1), and the other end is slidably inserted into the end of the slide cylinder (313) away from the connecting plate (312). The rod body of the first slide bar (314) is transmission-connected to the reversing assembly (32). A second spiral guide groove (3141) is provided on the outer peripheral wall of the first slide bar (314), and a second guide rod extending into the second guide groove (3141) is fixedly mounted on the inner peripheral wall of the slide cylinder (313).

5. The electrical cabinet for semiconductor equipment that is easy to maintain according to claim 4, characterized in that: The mounting plate (21) is provided with a second reset member (211) for driving the first rack (311) to move in a direction away from the first sliding rod (314).

6. The electrical cabinet for semiconductor equipment that is easy to maintain according to claim 4, characterized in that: The reversing assembly (32) comprises a first driven gear (321), a second driven gear (322), a third driven gear (323), a fourth driven gear (324) and a second rack (325); the first driven gear (321) is coaxially sleeved and fixed on the rod body of the first sliding rod (314); the second driven gear (322), the third driven gear (323) and the fourth driven gear (324) are all rotatably mounted on the side wall of the cabinet (1) and the rotation axes are parallel to each other; The second driven gear (322) is meshed with the first driven gear (321), the third driven gear (323) is meshed with the second driven gear (322), the fourth driven gear (324) is coaxially fixed with the third driven gear (323), the second rack (325) is slidably mounted on the inner wall of the cabinet (1) where the blinds (11) are located, and the fourth driven gear (324) and the second rack (325) are meshed with each other, and the second rack (325) can drive the rotating mechanism (4) to rotate when moving, so that the corresponding blinds (11) rotate.

7. The electrical cabinet for semiconductor equipment that is easy to maintain according to claim 6, characterized in that: The rotating mechanism (4) comprises a rotating shaft (41) and a second sliding rod (42); the rotating shaft (41) is rotatably mounted on the inner wall of the cabinet (1); the shutter (11) is fixedly connected to the rotating shaft (41) and takes the rotating shaft (41) as a rotating shaft; The rotating shaft (41) is hollow, the second slide bar (42) is slidably mounted in the rotating shaft (41) and its two ends respectively pass through the rotating shaft (41), a third guide groove (421) is spirally arranged on the outer peripheral wall of the second slide bar (42), a third guide rod extending into the third guide groove (421) is fixedly mounted on the inner peripheral wall of the rotating shaft (41), one end of the second slide bar (42) is fixedly connected to the end of the second rack (325), and the other end is drivingly connected to the pushing mechanism (5).

8. The electrical cabinet for semiconductor equipment that is easy to maintain according to claim 7, characterized in that: A third reset member (422) is sleeved on the rod body of the second slide rod (42) and is used to drive the second slide rod (42) to move in a direction close to the fourth driven gear (324).

9. The electrical cabinet for semiconductor equipment that is easy to maintain according to claim 7, characterized in that: The pushing mechanism (5) comprises a third rack (51), a fifth driven gear (52), a sixth driven gear (53), a first connecting rod (54), a second connecting rod (55) and a fixing plate (56); an end of the third rack (51) is fixedly connected to an end of the second sliding rod (42) away from the second rack (325); the fifth driven gear (52) and the sixth driven gear (53) are both rotatably mounted on the inner side wall of the cabinet (1); the fifth driven gear (52) is meshed with the third rack (51); and the sixth driven gear (53) is meshed with the fifth driven gear (52); One end of the first connecting rod (54) is fixedly mounted on the side of the sixth driven gear (53), and the other end is rotatably connected to the end of the second connecting rod (55); the fixing plate (56) is rotatably connected to the end of the second connecting rod (55) away from the first connecting rod (54); and the fixing plate (56) is fixedly connected to the cabinet door (12).

10. A semiconductor electrical cabinet control system, characterized in that: An electrical cabinet for semiconductor equipment that is easy to maintain, comprising the electrical cabinet described in any one of claims 1 to 9.

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