Cold trap device for ALD equipment

Abstract

The invention belongs to the technical field of tail gas cold trap treatment, and relates to a cold trap device for ALD (Atomic Layer Deposition) equipment, which comprises a cold trap shell for containing a reaction substance; the cold trap shell is provided with an air inlet pipe, a containing cavity and an air outlet pipe, and the containing cavity is communicated with the air inlet pipe and the air outlet pipe; the cold trap inner cavity is used for accommodating a cooling substance; the cold trap inner cavity is arranged in the accommodating cavity, and the opening edge of the cold trap inner cavity is hermetically connected with the opening edge of the cold trap shell; the cooling pipe is used for containing cooling liquid; and the cooling pipe is arranged in the cold trap inner cavity and is connected with the cold trap shell. According to the cold trap device for the ALD equipment, the design of the cold trap inner cavity and the cold trap outer cavity is adopted, the temperature uniformity of a cooling medium is better improved, the powder collecting cavity is formed in the bottom, and the convenience of powder discharging is improved; the device has the excellent characteristic that excessive precursors and reaction byproducts are fully cooled so as to effectively capture the byproducts contained in the tail gas.

Description

Technical Field

[0001] The present invention relates to the technical field of tail gas cold trap treatment, and in particular to a cold trap device for ALD equipment. Background Art

[0002] Atomic layer deposition (ALD) is a special chemical vapor deposition technology. During the growth process of the ALD process, the gas delivery system can deliver one or more gaseous precursors into the chamber for reaction. After the reaction, the excess precursors and reaction by-products are discharged to the exhaust gas treatment device through a mechanical pump. Excessive precursors and reaction by-products involve toxic materials, flammable and explosive materials, or corrosive materials, which often cause the exhaust gas generated during the process to contain low-melting-point by-products.

[0003] The low-melting-point byproducts contained in the tail gas generated by the ALD vacuum process are very likely to contaminate the mechanical pump rotor and pump oil, causing the rotor to get stuck and the pump oil to fail due to contamination. In severe cases, it may even cause the entire process line to shut down, which has a great impact on process production. Moreover, these byproducts enter the tail gas treatment device after passing through the mechanical pump, which greatly increases the difficulty of tail gas treatment.

[0004] The existing cooling treatment device has a poor structural rationality, which not only leads to insufficient cooling effect, but also makes it difficult to clean the deposits after cooling. Summary of the invention

[0005] In view of this, the present invention provides a cold trap device for ALD equipment.

[0006] Specifically, the present invention is achieved through the following technical solutions:

[0007] According to a first aspect of the present invention, there is provided a cold trap device for an ALD device, comprising:

[0008] A cold trap shell is used to contain the reaction material; the cold trap shell has an air inlet pipe, a containing cavity and an air outlet pipe, and the containing cavity is respectively connected to the air inlet pipe and the air outlet pipe;

[0009] A cold trap inner cavity, used to accommodate cooling material; the cold trap inner cavity is arranged in the accommodating cavity, and the opening edge of the cold trap inner cavity is sealed and connected to the opening edge of the cold trap shell;

[0010] A cooling pipe is used to contain cooling liquid; the cooling pipe is arranged in the inner cavity of the cold trap and connected to the cold trap shell.

[0011] Optionally, the opening sealing cover of the cold trap housing is provided with a cold trap cover plate, and the end of the cooling pipe is arranged on the cold trap cover plate and extends out of the cold trap cover plate.

[0012] Optionally, the opening of the cold trap inner cavity is connected to the cold trap cover plate.

[0013] Optionally, the air inlet pipe is arranged on the side wall of the cold trap shell, and an air inlet filter plate is arranged in the air inlet pipe.

[0014] Optionally, the air outlet pipe is arranged on the side wall of the cold trap shell, and an air outlet filter plate is arranged in the air outlet pipe.

[0015] Optionally, the bottom of the cold trap shell protrudes downward to form a powder collection chamber, and the powder collection chamber is communicated with the accommodating chamber.

[0016] Optionally, a powder discharge port is provided at the bottom of the powder collection chamber.

[0017] Optionally, the powder discharge port is detachably sealed and provided with a blind plate.

[0018] Optionally, the liquid inlet of the cooling tube is sleeved with a liquid inlet ferrule joint, and the liquid outlet of the cooling tube is sleeved with a liquid outlet ferrule joint, and the liquid inlet ferrule joint and the liquid outlet ferrule joint are arranged on the cold trap cover plate.

[0019] Optionally, the cooling tube extends in a spiral shape within the inner cavity of the cold trap.

[0020] The technical solution provided by the present invention brings at least the following beneficial effects:

[0021] A cold trap device for ALD equipment provided in the present application adopts a cold trap inner and outer cavity design, which better improves the temperature uniformity of the cooling medium, and has a powder collection cavity at the bottom, which improves the convenience of powder discharge; the present application has the excellent characteristic of fully cooling excess precursors and reaction by-products to effectively capture the by-products contained in the exhaust gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or related technical descriptions are briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0024] Figure 1 A schematic side view of a cold trap device for an ALD device provided in an embodiment of the present invention;

[0025] Figure 2A schematic diagram of the structure of a cooling tube in a cold trap device for an ALD device provided in an embodiment of the present invention;

[0026] Figure 3 A schematic top view of a cold trap device for an ALD device provided in an embodiment of the present invention;. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] Figure 1 A cold trap device for an ALD device applicable to an embodiment of the present invention is schematically shown.

[0029] Reference Figure 1-3 As shown, the present application provides a cold trap device for an ALD device, comprising:

[0030] The cold trap housing 10 is used to contain the reaction material; the cold trap housing 10 has an air inlet pipe 11, a receiving chamber 12 and an air outlet pipe 13, and the receiving chamber 12 is connected to the air inlet pipe 11 and the air outlet pipe 13 respectively;

[0031] The cold trap inner cavity 20 is used to accommodate cooling material; the cold trap inner cavity 20 is arranged in the accommodating cavity 12, and the opening edge of the cold trap inner cavity 20 is sealed and connected with the opening edge of the cold trap housing 10;

[0032] The cooling pipe 30 is used to contain cooling liquid; the cooling pipe 30 is disposed in the cold trap inner cavity 20 and connected to the cold trap housing 10 .

[0033] In an embodiment of the present application, the inner wall of the cold trap housing 10 and the outer wall of the cold trap inner cavity 20 are in direct contact with the exhaust gas. To reduce gas resistance, they can be set to an electrolytically polished surface that has been polished. The cold trap inner cavity 20 is filled with cooling medium, and the cooling pipe 30 is fed with liquid cooling medium. The air inlet pipe 11 and the air outlet pipe 13 are located on both sides of the cold trap inner cavity 20, forming the same horizontal straight line. The cold trap inner cavity 20 and the cooling pipe 30 are connected by a clamp or welding. The cooling pipe 30 and the cold trap inner cavity 20 are both made of heat-conducting materials, and the heat-conducting materials can be selected from corrosion-resistant metal materials, ceramics or graphite, etc. For example, stainless steel is preferably used in this embodiment. The cooling pipe 30 can be made of stainless steel or oxygen-free copper, that is, it can be formed by bending a stainless steel pipe or a copper pipe in one piece. To reduce fluid flow resistance, the inner wall of the cooling pipe 30 can be set to a polished surface that has been polished. The present application adopts an inner and outer double-cavity cold trap structure. The cooling medium in the cold trap inner cavity 20 has a higher specific heat capacity, and the liquid cooling medium in the cooling tube 30 has better cooling performance. In this way, the cooperation between the two can also multiply the thermal conductivity, so that the overall cooling effect of the cold trap is significantly improved.

[0034] Exemplarily, the opening sealing cover of the cold well housing 10 is provided with a cold well cover plate 14 , and the end of the cooling pipe 30 is arranged on the cold well cover plate 14 and extends out of the cold well cover plate 14 .

[0035] In the embodiment of the present application, the cooling pipe 30 is located inside the cold trap cavity 20, and the ends of both sides are connected by the cold trap cover 14. The cold trap shell 10 and the cold trap cover 14 are both made of stainless steel or aluminum alloy material, and the two are connected by clamps or welding.

[0036] Exemplarily, the opening of the cold trap inner cavity 20 is connected to the cold trap cover plate 14 .

[0037] In the embodiment of the present application, the cold trap inner cavity 20 and the cold trap cover plate 14 are connected by means of a clamp.

[0038] Exemplarily, the air intake pipe 11 is disposed on a side wall of the cold trap housing 10 , and an air intake filter plate 15 is disposed in the air intake pipe 11 .

[0039] In the embodiment of the present application, the air intake filter plate 15 is used to filter substances entering through the air intake pipe 11 .

[0040] Exemplarily, the air outlet pipe 13 is disposed on a side wall of the cold trap housing 10 , and an air outlet filter plate 16 is disposed in the air outlet pipe 13 .

[0041] In the embodiment of the present application, the air outlet filter plate 16 is used to filter the substances discharged through the air outlet pipe 13 , and the substances that cannot be discharged are gathered in the cold trap housing 10 .

[0042] Exemplarily, the bottom of the cold trap housing 10 protrudes downward to form a powder collection chamber 17 , and the powder collection chamber 17 is communicated with the accommodating chamber 12 .

[0043] In the embodiment of the present application, a powder collecting chamber 17 is provided at the bottom of the cold trap housing 10, and the powder collecting chamber 17 is used to collect the powdered material obtained after cooling.

[0044] Exemplarily, a powder discharge port 18 is provided at the bottom of the powder collecting chamber 17 .

[0045] In the embodiment of the present application, the powder in the powder collecting chamber 17 is discharged through the powder discharge port 18 .

[0046] Exemplarily, the powder discharge port 18 is detachably sealed and provided with a blind plate 19 .

[0047] In the embodiment of the present application, the opening of the powder discharge port 18 is sealed by a blind plate 19, and the blind plate 19 can be removed when it needs to be opened.

[0048] Exemplarily, the liquid inlet 31 of the cooling tube 30 is sleeved with a liquid inlet ferrule joint 32 , and the liquid outlet 33 of the cooling tube 30 is sleeved with a liquid outlet ferrule joint 34 . The liquid inlet ferrule joint 32 and the liquid outlet ferrule joint 34 are arranged on the cold trap cover plate 14 .

[0049] In an embodiment of the present application, industrial cooling water, cooling gel or liquid nitrogen is used as a refrigerant in the cooling tube 30. The refrigerant enters the cooling tube 30 in the cold trap inner cavity 20 through the liquid inlet 31. After the refrigerant contacts the cooling medium in the cold trap inner cavity 20 in the cooling tube 30 and fully exchanges heat, it is discharged from the liquid outlet 33.

[0050] Exemplarily, the cooling pipe 30 extends in the cold trap inner cavity 20 in a spiral shape.

[0051] In the embodiment of the present application, the cooling tube 30 is made of a material with high thermal conductivity (such as copper, iron or alloy) and has a spiral structure. The cooling tube 30 has a double helix structure, the purpose of which is, on the one hand, to increase the contact area between the cooling tube 30 and the cold trap cavity 20, to multiply the thermal conductivity, and to significantly improve the overall cooling effect of the cold trap; on the other hand, the cooling tube 30 and the cold trap cover plate 14 are connected by a ferrule, which is convenient for disassembly and cleaning of the cooling tube 30, and reduces maintenance costs. The use of a spiral cooling tube 30 can provide a larger surface contact area than cooling tubes of other structures such as a columnar structure, so that the coolant in the cold trap cavity 20 can fully contact the cooling tube 30, providing better thermal conductivity.

[0052] In the embodiment of the present application, the outside of the cooling outer cavity is fixed by three feet 110 .

[0053] A cold trap device for ALD equipment provided in the present application adopts a cold trap inner and outer cavity design, which better improves the temperature uniformity of the cooling medium, and has a powder collection cavity at the bottom, which improves the convenience of powder discharge; the present application has the excellent characteristic of fully cooling excess precursors and reaction by-products to effectively capture the by-products contained in the exhaust gas.

[0054] It should be noted that, in the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0055] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

[0056] In addition, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0057] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, "plurality" means two or more.

[0058] The foregoing is merely a specific embodiment of the present invention, which enables those skilled in the art to understand or implement the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A cold trap device for ALD equipment, characterized in that: include: A cold trap shell is used to contain the reaction material; the cold trap shell has an air inlet pipe, a containing cavity and an air outlet pipe, and the containing cavity is respectively connected to the air inlet pipe and the air outlet pipe; A cold trap inner cavity, used to accommodate cooling material; the cold trap inner cavity is arranged in the accommodating cavity, and the opening edge of the cold trap inner cavity is sealed and connected to the opening edge of the cold trap shell; A cooling pipe is used to contain cooling liquid; the cooling pipe is arranged in the inner cavity of the cold trap and connected to the cold trap shell.

2. The cold trap device for ALD equipment according to claim 1, characterized in that: The opening sealing cover of the cold trap housing is provided with a cold trap cover plate, and the end of the cooling pipe is arranged on the cold trap cover plate and extends out of the cold trap cover plate.

3. The cold trap device for ALD equipment according to claim 2, characterized in that: The opening of the cold trap inner cavity is connected to the cold trap cover plate.

4. The cold trap device for ALD equipment according to claim 1, characterized in that: The air inlet pipe is arranged on the side wall of the cold trap shell, and an air inlet filter plate is arranged in the air inlet pipe.

5. The cold trap device for ALD equipment according to claim 1, characterized in that: The air outlet pipe is arranged on the side wall of the cold trap shell, and an air outlet filter plate is arranged in the air outlet pipe.

6. The cold trap device for ALD equipment according to claim 1, characterized in that: The bottom of the cold trap shell protrudes downward to form a powder collection chamber, and the powder collection chamber is communicated with the accommodating chamber.

7. The cold trap device for ALD equipment according to claim 6, characterized in that: A powder discharge port is provided at the bottom of the powder collecting chamber.

8. The cold trap device for ALD equipment according to claim 7, characterized in that: The powder discharge port is detachably sealed and provided with a blind plate.

9. The cold trap device for ALD equipment according to claim 2, characterized in that: The liquid inlet of the cooling tube is sleeved with a liquid inlet ferrule joint, and the liquid outlet of the cooling tube is sleeved with a liquid outlet ferrule joint. The liquid inlet ferrule joint and the liquid outlet ferrule joint are arranged on the cold trap cover plate.

10. The cold trap device for ALD equipment according to claim 1, characterized in that: The cooling pipe extends in a spiral shape in the inner cavity of the cold trap.

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