Crystal cooling device and method for crystal growth in crystal furnace

Abstract

The invention relates to a crystal cooling device and method for crystal growth in a crystal furnace and relates to the related field of the crystal furnace, the crystal cooling device for crystal growth in the crystal furnace comprises a workbench, two box doors are connected to one side of an opening of the workbench, a window and a through groove are formed in one side of the workbench, the through groove is formed in the workbench, and the box doors are connected with the window. A through groove is formed in the working table, a crystal furnace body is fixed in the through groove, a cooling cavity and a processing box are arranged in the outer wall of the crystal furnace body, the processing box is fixed in the working table, and the processing box and the crystal furnace body are coaxially arranged. And the cooling liquid in the cooling cavity is gradually increased from bottom to top, so that the temperature of the top of the crystal furnace body, namely the position of the crucible, of the crystal furnace body is the highest temperature of the whole crystal furnace body, and the heating of the crucible is not influenced.

Description

Technical Field

[0001] The invention relates to the field related to crystal furnaces, and in particular to a crystal cooling device and method for crystal growth in a crystal furnace. Background Art

[0002] The crystal furnace is a furnace used to prepare single crystal silicon rods. The crystal furnace consists of a multi-layer structure, including a water cooling chamber, an insulation chamber, a heating chamber, a crucible, etc.

[0003] Among them, the water cooling chamber is a more important chamber of the crystal path, and is also called a cooling system. The heat generated inside the crystal path during operation is cooled by the water cooling chamber. Since the main raw material of the single crystal silicon rod is quartz sand, the chemical composition of quartz sand is silicon dioxide, and its melting point is about 1700°, and the furnace wall is usually made of metal, the melting point of quartz sand and furnace wall is not much different, and the furnace wall must be cooled by a cooling system, otherwise it will cause the crystal furnace to deform due to continuous heating;

[0004] A crystal furnace cooling device is disclosed through searching, with the announcement number: CN221141952U. At present, most crystal furnaces mostly adopt this type of cooling principle. The cooling system currently adopted mainly realizes cooling of the entire crystal furnace by tightly winding the conveying pipe around the furnace wall and utilizing the circulation flow of the coolant in the pipe, thereby achieving the effect of cooling. However, this cooling method will have an adverse effect on the normal growth of the crystal to a certain extent;

[0005] Specifically, the crystal growth process is carried out in a crucible inside the crystal furnace, which is achieved by heating the crucible through a heating device;

[0006] There is an insulation chamber inside the crucible, whose main function is to maintain a certain temperature level to ensure that the crystal can be kept in an ideal temperature environment during the growth process. Of course, the insulation chamber cannot be completely insulated. Its design purpose is to reduce heat loss as much as possible to prevent the temperature in the crucible from dropping rapidly, thereby affecting the growth quality of the crystal;

[0007] However, the existing cooling device will reduce the temperature of the furnace wall of the crucible while cooling the entire crystal furnace. As a result, the ambient temperature around the crucible will also drop accordingly, which may cause the temperature required for crystal growth to fail to be met, thereby affecting the normal growth of the crystal.

[0008] In addition, this type of cooling may also lead to an increase in the energy consumption of structures related to the heating system, because the system needs to consume more energy to compensate for the temperature drop caused by cooling;

[0009] After the crystal growth is completed, it needs to be cooled and shaped. In this process, temperature control is very critical, because if the cooling speed is too fast and the temperature difference is too large, the crystal may break due to the effect of thermal expansion and contraction. The existing cooling system continuously cools the entire system, so the risk of crystal breakage may increase during the cooling process. Summary of the invention

[0010] The object of the present invention is to provide a crystal cooling device and method for crystal growth in a crystal furnace to solve the problems raised in the above background technology.

[0011] To achieve the above object, the present invention provides the following technical solutions:

[0012] A crystal cooling device for crystal growth in a crystal furnace, comprising:

[0013] A workbench, wherein the open side of the workbench is connected with two box doors, and a window is provided on one side of the workbench;

[0014] A through groove, wherein the through groove is provided on the workbench, a crystal furnace body is fixed in the through groove, and a cooling cavity is provided in the outer wall of the crystal furnace body;

[0015] A processing box, wherein the processing box is fixed in the workbench and the processing box is coaxially arranged with the crystal furnace body;

[0016] A crucible support, the crucible support is rotatably mounted in the crucible support and the processing box, the crucible support passes through the bottom of the crystal furnace body and is sealed and rotatably connected to the crystal furnace body;

[0017] A cooling mechanism is installed in the workbench and the processing box, and the cooling mechanism is connected to the cooling cavity.

[0018] As a further solution of the present invention: the cooling mechanism comprises a mounting plate fixed in the processing box, a pumping assembly is mounted on the mounting plate, the cooling chamber and the processing box are connected through the pumping assembly, and the pumping assembly is connected to the crucible support;

[0019] A cooling component is installed in the processing box, and the cooling component cooperates with the pumping component.

[0020] As a further solution of the present invention: the pumping assembly comprises two piston cylinders penetrating the mounting plate and fixed to the mounting plate, and pistons are sealed and slidably mounted in both of the piston cylinders;

[0021] A crankshaft is rotatably mounted in the processing box via a crankshaft mounting frame, two transmission arms are rotatably mounted on the crankshaft, one end of the transmission arm away from the crankshaft is rotatably connected to the piston, and the crankshaft is connected to the crucible support via a No. 1 bevel gear set;

[0022] A No. 2 delivery pipe connected to the two piston cylinders is fixed on the two piston cylinders, the No. 2 delivery pipe is L-shaped, and the No. 2 delivery pipe extends to the bottom of the crystal furnace body, and a No. 1 delivery pipe connected to the top of the two piston cylinders is fixed, and the No. 1 delivery pipe is connected to the bottom of the cooling chamber;

[0023] A return pipe is fixed in the cooling chamber and passes through the bottom of the cooling chamber, one end of the return pipe is connected to the cooling chamber, and the other end is connected to the processing box, and the transmission arm is connected to a driving member installed on one side of the processing box;

[0024] A one-way valve is installed in the No. 1 delivery pipe.

[0025] As a further solution of the present invention: the height of the reflux pipe is nine-tenths of the height of the cooling chamber.

[0026] As a further solution of the present invention: the driving member includes a mounting portion arranged on one side of the processing box and formed integrally therewith, a No. 2 motor is fixed on the mounting portion outside the processing box, and the output shaft of the No. 2 motor is connected to the crucible support via a two-bevel gear set.

[0027] As a further solution of the present invention: a mixing blade is coaxially arranged at the bottom of the crucible support, the mixing blade is fixed to the crankshaft mounting frame through a transverse plate rotatably connected thereto, and the mixing blade is connected to the first bevel gear set.

[0028] As a further solution of the present invention: the crystal furnace body is formed into an outer shell and an inner tank through a cooling cavity, a plurality of fixing frames are fixed at equal intervals on the circumference of the bottom of the inner tank, and the fixing frames are fixed to the inner bottom of the outer shell.

[0029] As a further solution of the present invention: the cooling assembly includes a No. 2 copper tube fixed on the window, and a No. 1 copper tube is fixed in the processing box;

[0030] One end of the No. 1 copper tube and the No. 2 copper tube are connected by an integrated water pump, and the other end is connected by an expansion valve. The No. 1 copper tube and the No. 2 copper tube are connected by the integrated water pump and the No. 2 copper tube to form a connected closed loop;

[0031] The integrated water pump is fixed to the inner wall of the workbench through a supporting plate.

[0032] As a further solution of the present invention: a fan bracket is fixed at the window on the outside of the workbench, and the fan bracket is equipped with fan blades that rotate toward the side of the workbench. A No. 1 motor is fixed to the side of the fan bracket away from the workbench, and the output shaft of the No. 1 motor is coaxially fixed with the fan blades.

[0033] The present invention also provides a crystal cooling method for crystal growth in a crystal furnace, wherein the crystal cooling method for crystal growth in a crystal furnace adopts the crystal cooling device for crystal growth in a crystal furnace, and comprises:

[0034] Step 1: circulating the coolant in the cooling chamber and the processing box through the pumping assembly, and cooling the crystal furnace body through heat exchange between the coolant and the crystal furnace body;

[0035] Step 2: The coolant in the cooling chamber is stratified by the different water temperature differences and densities. When reflux is performed, the hotter coolant at the top of the cooling chamber is extracted so that the coolant can flow back into the processing box after completing heat exchange with the crystal furnace body.

[0036] Step 3: Cooling the coolant in the processing box by using a cooling component.

[0037] Compared with the prior art, the beneficial effects of the present invention are as follows: The differences and effects of the present invention relative to the existing cooling device are as follows:

[0038] First, the present invention provides a cooling cavity on the crystal furnace body to make the heat conduction efficiency between the coolant and the crystal furnace body higher;

[0039] Second, the present invention adds the cooled coolant to the bottom of the cooling chamber, and refluxes the coolant after heat exchange through the reflux pipe at the top of the cooling chamber;

[0040] By utilizing the characteristic that the density of liquid gradually decreases as the temperature rises, the coolant in the cooling chamber is gradually increased from bottom to top. Then, the temperature of the crystal furnace body at the top of the crystal furnace body, that is, the position of the crucible, is the highest temperature position of the entire crystal furnace body, and thus will not affect the heating of the crucible.

[0041] Among them, the difference from the prior art is that the prior art has a purely opposing defect, such as the conveying pipe is wound around the crucible position of the crystal furnace body, which causes the crucible temperature rise to be affected. If it is not wound, the crucible position of the crystal furnace body will continue to heat and deform;

[0042] The advantage of the present application with respect to this problem is that the temperature of the crystal furnace body at the crucible position is relatively high, and the temperature of the bottom thereof gradually decreases, so that the crucible position of the crystal furnace body is not affected by cooling and the crucible position of the crystal furnace body does not continue to heat up. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 It is a schematic diagram of the overall structure of a crystal cooling device used for crystal growth in a crystal furnace.

[0044] Figure 2 for Figure 1 Schematic diagram of the structure inside the workbench 1.

[0045] Figure 3 The figure is a schematic diagram of the structure of a workbench in a crystal cooling device used for crystal growth in a crystal furnace.

[0046] Figure 4 It is a schematic diagram of the structure of the cooling mechanism in the crystal cooling device used for crystal growth in a crystal furnace.

[0047] Figure 5 for Figure 4 Schematic diagram of the structure in another direction.

[0048] Figure 6 It is a cross-sectional view of a crystal furnace and a processing box in a crystal cooling device used for crystal growth in a crystal furnace.

[0049] Figure 7 A perspective view of a crystal furnace in a crystal cooling apparatus for growing crystals in the crystal furnace.

[0050] Figure 8 It is a schematic diagram of the structure of the pumping component in the cooling mechanism.

[0051] Fig. 9 It is a schematic diagram of the structure of the cooling component in the cooling mechanism.

[0052] In the figure: 1. workbench; 101. box door; 102. window; 103. through slot; 2. fan bracket; 3. No. 1 motor; 301. fan blade; 4. crystal furnace body; 401. top cover; 402. chamber sealing cover; 403. cooling chamber; 404. fixing frame; 5. processing box; 6. No. 2 motor; 7. water pump; 701. support plate; 702. No. 1 copper pipe; 703. No. 2 copper pipe; 704. expansion valve; 8. crucible bracket; 9. reflux pipe; 10. mounting plate; 11. No. 1 delivery pipe; 12. piston cylinder; 13. No. 2 delivery pipe; 14. crankshaft; 1401. crankshaft mounting frame; 1402. cross plate; 15. mixing blade; 16. No. 1 bevel gear set; 17. piston; 18. transmission arm; 19. No. 2 bevel gear set. DETAILED DESCRIPTION

[0053] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0054] In addition, when an element in the present invention is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only embodiment.

[0055] For example, see Figures 1 to 9 , a crystal cooling device for crystal growth in a crystal furnace, comprising a workbench 1, two doors 101 are connected to the open side of the workbench 1, a plurality of legs are fixed to the bottom of the workbench 1, and a window 102 is opened on one side of the workbench 1;

[0056] A through groove 103 is provided on the workbench 1, a crystal furnace body 4 is fixed in the through groove 103, a cooling cavity 403 is provided in the outer wall of the crystal furnace body 4; the top of the cooling cavity 403 is sealed by a chamber sealing cover 402, and a top cover 401 is detachably installed on the top of the crystal furnace body 4;

[0057] A processing box 5 fixed in the workbench 1, wherein the processing box 5 is coaxially arranged with the crystal furnace body 4;

[0058] The crucible support 8 is rotatably mounted on the crucible support 8 and the processing box 5, wherein the crucible support 8 passes through the bottom of the crystal furnace body 4 and is sealed and rotatably connected to the crystal furnace body 4;

[0059] A cooling mechanism is installed in the workbench 1 and the processing box 5 , and the cooling mechanism is connected to the cooling cavity 403 .

[0060] In an embodiment of the present invention, the processing box 5 and the cooling chamber 403 are filled with coolant, and the coolant is driven by the cooling mechanism to circulate between the cooling chamber 403 and the processing box 5. When the coolant enters the cooling chamber 403, the crystal furnace body 4 is cooled by the heat exchange between the coolant and the crystal furnace body 4. The coolant that completes the heat exchange will increase in temperature to a certain extent, and then will be transported to the processing box 5 for cooling, so that it will be cooled by the relevant structure in the processing box 5, and then transported to the cooling chamber 403 again, so that the crystal furnace body 4 is cooled by repeated circulation.

[0061] Embodiment 2 is distinguished from Embodiment 1 in that: the cooling mechanism comprises a mounting plate 10 fixed in the processing box 5, a pumping assembly is mounted on the mounting plate 10, the cooling chamber 403 and the processing box 5 are connected via the pumping assembly, and the pumping assembly is connected to the crucible support 8;

[0062] A cooling component is installed in the processing box 5, and the cooling component cooperates with the pumping component.

[0063] In an embodiment of the present invention, the cooling liquid is circulated and transported between the cooling chamber 403 and the processing box 5 through a pumping component. The cooling liquid that has completed heat exchange and temperature rise is cooled by a cooling component in the processing box 5 to avoid excessive temperature of the cooling liquid after multiple cycles, thereby reducing the cooling effect.

[0064] The pumping assembly includes two piston cylinders 12 that penetrate the mounting plate 10 and are fixed to the mounting plate 10, and pistons 17 are sealed and slidably mounted in the two piston cylinders 12;

[0065] A crankshaft 14 is rotatably mounted in the processing box 5 via a crankshaft mounting frame 1401, and two transmission arms 18 are rotatably mounted on the crankshaft 14. One end of the transmission arm 18 away from the crankshaft 14 is rotatably connected to a piston 17, and the crankshaft 14 is connected to a crucible support 8 via a first bevel gear set 16;

[0066] A No. 2 delivery pipe 13 connected thereto is fixed on the two piston cylinders 12, the No. 2 delivery pipe 13 is L-shaped, and the No. 2 delivery pipe 13 extends to the bottom of the crystal furnace body 4, and a No. 1 delivery pipe 11 connected thereto is fixed on the top of the two piston cylinders 12, and the No. 1 delivery pipe 11 is connected to the bottom of the cooling chamber 403;

[0067] A return pipe 9 is fixed in the cooling chamber 403 and passes through the bottom of the cooling chamber 403. One end of the return pipe 9 is connected to the cooling chamber 403, and the other end is connected to the processing box 5. The transmission arm 18 is connected to a driving member installed on one side of the processing box 5.

[0068] A one-way valve is installed in the No. 1 delivery pipe 11.

[0069] In the embodiment of the present invention, the crucible support 8 is driven to rotate by a driving member, and when the crucible support 8 rotates, the crankshaft 14 is driven to rotate through the first bevel gear set 16, and when the crankshaft 14 rotates, the piston 17 is driven to perform an upright reciprocating motion through the transmission arm 18;

[0070] When the piston 17 descends, the one-way valve in the No. 1 delivery pipe 11 can only flow out but not in, so that a negative pressure is generated in the piston cylinder 12 when the piston 17 descends. When the piston 17 descends to a level lower than the connection point between the No. 2 delivery pipe 13 and the piston cylinder 12, the coolant is sucked in by the negative pressure in the piston cylinder 12 and quickly fills the piston cylinder 12.

[0071] The rapid filling of this area can ensure that the coolant cooled by the cooling component is quickly transported to the cooling cavity 403 to the greatest extent;

[0072] After the coolant enters the piston cylinder 12, the piston 17 rises, and the coolant is delivered to the bottom of the cooling chamber 403 through the first delivery pipe 11 by the rising of the piston 17;

[0073] As the temperature increases, the gaps between water molecules increase, and thus the seal becomes lower, so that the cold water seal becomes denser than the hot water. Then, the hot water with low density will float to the top of the cooling chamber 403, while the cold water will remain at the bottom of the cooling chamber 403. In the present application, the coolant that has been treated and cooled is transported to the bottom of the cooling chamber 403 through the bottom of the cooling chamber 403. The coolant at the bottom of the cooling chamber 403 will gradually heat up with the heat exchange with the crystal furnace body 4. The heated coolant will gradually move toward the top of the cooling chamber 403. After the coolant level is above the reflux pipe 9, the hotter coolant at the top will be transported to the processing box 5 through the reflux pipe 9.

[0074] Each time the coolant is delivered to the bottom of the cooling chamber 403, the pressure of the cooling chamber 403 increases, thereby facilitating smoother delivery of the coolant from the return pipe 9 to the processing box 5.

[0075] It should be noted that the amount of the cooling liquid after being cooled and transported into the cooling chamber 403 is the same as the amount of the cooling liquid that flows back into the processing box 5 through the return pipe 9 .

[0076] The height of the return pipe 9 is nine tenths of the height of the cooling chamber 403 .

[0077] In the embodiment of the present invention, please refer to Figure 6 The "nine tenths" in this embodiment is the length of the return pipe 9 in the cooling chamber 403, through which the hotter coolant at the top of the cooling chamber 403 can be returned to the processing box 5.

[0078] The driving member includes a mounting portion which is arranged on one side of the processing box 5 and is integrally formed therewith. A second motor 6 is fixed on the mounting portion outside the processing box 5 . The output shaft of the second motor 6 is connected to the crucible support 8 via a two-bevel gear set 19 .

[0079] In the embodiment of the present invention, the second bevel gear set 19 includes two bevel gears meshing with each other, and the two bevel gears are coaxially fixed to the output shaft of the second motor 6 and the crucible support 8, respectively, and the crucible support 8 is driven to rotate through the first bevel gear set 16 when the second motor 6 is working;

[0080] Among them, the second motor 6 in this embodiment adopts a high-torque servo motor. Of course, a relatively low-torque stepper motor or DC motor can also be selected according to actual production needs, and the present invention does not make specific limitations.

[0081] A mixing blade 15 is coaxially arranged at the bottom of the crucible support 8 . The mixing blade 15 is fixed to the crankshaft mounting frame 1401 via a transverse plate 1402 rotatably connected thereto, and the mixing blade 15 is connected to the first bevel gear set 16 .

[0082] In the embodiment of the present invention, when the transmission arm 18 rotates, the crankshaft 14 and the mixing blade 15 are driven to rotate simultaneously through the first bevel gear set 16. The rotation of the mixing blade 15 can mix the cooling liquid at the bottom of the processing box 5, so that the cooling of the coolant is more uniform when the cooling component is working.

[0083] The crystal furnace body 4 is formed into an outer shell and an inner tank through the cooling cavity 403 , and a plurality of fixing frames 404 are fixed at equal intervals on the bottom circumference of the inner tank, and the fixing frames 404 are fixed to the inner bottom of the outer shell.

[0084] In the embodiment of the present invention, the temperature of the crucible inside the crystal furnace is usually relatively high, and the bottom is relatively low. When the crystal furnace is working, the internal heating part required is the crucible part, that is, the top. The low temperature of the top may affect the heating efficiency of the crucible.

[0085] The cooling of the crystal furnace is to prevent the furnace from continuously heating up and deforming;

[0086] Furthermore, the ideal state of the crystal furnace body 4 during operation is that the top temperature is higher than the bottom temperature, and the overall temperature of the crystal furnace body 4 is ensured not to continue to rise. The present invention supplies cooling liquid at the bottom of the cooling chamber 403, and the temperature of the bottom is necessarily lower than the top temperature. Through the heat conduction of the crystal furnace body 4, the crystal furnace body 4 can be made to be in a state where the top temperature is higher than the bottom temperature, and the top temperature is also reduced to a certain extent, and the temperature will not continue to rise.

[0087] It should be noted that the connection point between the No. 1 delivery pipe 11 and the cooling chamber 403 is located at the bottom of the inner tank.

[0088] The cooling assembly includes a No. 2 copper tube 703 fixed on the window 102, and a No. 1 copper tube 702 is fixed in the processing box 5;

[0089] One end of the No. 1 copper tube 702 and the No. 2 copper tube 703 are connected through the integrated water pump 7, and the other end is connected through the expansion valve 704. The No. 1 copper tube 702 and the No. 2 copper tube 703 are connected through the integrated water pump 7 and the No. 2 copper tube 703 to form a connected closed loop;

[0090] The integrated water pump 7 is fixed to the inner wall of the workbench 1 through a support plate 701 .

[0091] In the embodiment of the present invention, the embodiment is basically similar to the refrigeration principle of the air conditioner. The coolant and related gases are driven to circulate in the No. 1 copper tube 702 and the No. 2 copper tube 703 by the integrated water pump 7. When the coolant and related gases pass through the expansion valve 704, a part of the static pressure is converted into dynamic pressure, the flow rate increases sharply, and becomes turbulent flow, the fluid is disturbed, the friction resistance increases, and the static pressure decreases, so that the fluid achieves the purpose of reducing pressure and regulating flow;

[0092] The first copper tube 702 part is sublimated, and needs to absorb heat in the sublimation process to absorb the temperature of the cooling liquid in the processing box 5, thereby achieving a cooling effect;

[0093] Since this structure is a relatively mature existing technology, only the basic principle is explained here;

[0094] Among them, the compressor and other equipment required by the structure are all integrated into the integrated water pump 7.

[0095] A fan bracket 2 is fixed at the window 102 on the outside of the workbench 1 , and a fan blade 301 is installed on the fan bracket 2 to rotate toward the side of the workbench 1 . A motor No. 3 is fixed to the side of the fan bracket 2 away from the workbench 1 , and the output shaft of the motor No. 1 is coaxially fixed with the fan blade 301 .

[0096] In the embodiment of the present invention, when the No. 1 motor 3 is working, the fan blade 301 is driven to rotate through the output shaft, and when the fan blade 301 rotates, the hot air in the No. 2 copper tube 703 and the workbench 1 is extracted.

[0097] The present invention also provides a crystal cooling method for crystal growth in a crystal furnace, wherein the crystal cooling method for crystal growth in a crystal furnace adopts the crystal cooling device for crystal growth in a crystal furnace, and comprises:

[0098] Step 1: circulating the coolant in the cooling chamber 403 and the processing box 5 through the pumping assembly, and cooling the crystal furnace body 4 through heat exchange between the coolant and the crystal furnace body 4;

[0099] Step 2: The coolant in the cooling chamber 403 is stratified by the difference in water temperature density. When reflux is performed, the hotter coolant at the top of the cooling chamber 403 is extracted so that the coolant can reflux into the processing box 5 after completing the heat exchange with the crystal furnace body 4.

[0100] Step 3: cool the coolant in the processing box 5 by using a cooling component.

[0101] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0102] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A crystal cooling device for crystal growth in a crystal furnace, characterized in that: include: A workbench (1), wherein two doors (101) are connected to an open side of the workbench (1), and a window (102) is provided on one side of the workbench (1); A through groove (103), wherein the through groove (103) is provided on the workbench (1), a crystal furnace body (4) is fixed in the through groove (103), and a cooling cavity (403) is provided in an outer wall of the crystal furnace body (4); A processing box (5), wherein the processing box (5) is fixed in the workbench (1), and the processing box (5) is coaxially arranged with the crystal furnace body (4); A crucible support (8), the crucible support (8) being rotatably mounted in the crucible support (8) and the processing box (5), the crucible support (8) passing through the bottom of the crystal furnace body (4) and being sealed and rotatably connected to the crystal furnace body (4); A cooling mechanism is installed in the workbench (1) and the processing box (5), and the cooling mechanism is connected to the cooling chamber (403).

2. A crystal cooling device for crystal growth in a crystal furnace according to claim 1, characterized in that: The cooling mechanism comprises a mounting plate (10) fixed in the processing box (5), a pumping assembly being mounted on the mounting plate (10), the cooling chamber (403) and the processing box (5) being communicated with each other via the pumping assembly, and the pumping assembly being connected to the crucible support (8); A cooling component is installed in the processing box (5), and the cooling component cooperates with the pumping component.

3. A crystal cooling device for crystal growth in a crystal furnace according to claim 2, characterized in that: The pumping assembly comprises two piston cylinders (12) penetrating the mounting plate (10) and fixed to the mounting plate (10), and pistons (17) are sealed and slidably mounted in the two piston cylinders (12); A crankshaft (14) is rotatably mounted in the processing box (5) via a crankshaft mounting frame (1401), two transmission arms (18) are rotatably mounted on the crankshaft (14), one end of the transmission arm (18) away from the crankshaft (14) is rotatably connected to a piston (17), and the crankshaft (14) is connected to a crucible support (8) via a first bevel gear set (16); A No. 2 delivery pipe (13) in communication with the two piston cylinders (12) is fixed on the two piston cylinders (12), the No. 2 delivery pipe (13) is arranged in an L shape, and the No. 2 delivery pipe (13) extends to the bottom of the crystal furnace body (4), and a No. 1 delivery pipe (11) in communication with the two piston cylinders (12) is fixed on the top of the two piston cylinders (12), and the No. 1 delivery pipe (11) is in communication with the bottom of the cooling chamber (403); A return pipe (9) is fixed in the cooling chamber (403) and passes through the bottom of the cooling chamber (403); one end of the return pipe (9) is connected to the cooling chamber (403), and the other end is connected to the processing box (5); the transmission arm (18) is connected to a driving member installed on one side of the processing box (5); A one-way valve is installed in the No. 1 delivery pipe (11).

4. The crystal cooling device for crystal growth in a crystal furnace according to claim 3, characterized in that: The height of the return pipe (9) is nine-tenths of the height of the cooling chamber (403).

5. The crystal cooling device for crystal growth in a crystal furnace according to claim 3, characterized in that: The driving member comprises a mounting portion which is arranged on one side of the processing box (5) and is integrally formed therewith, a second motor (6) is fixed on the mounting portion outside the processing box (5), and an output shaft of the second motor (6) is connected to the crucible support (8) via a two-bevel gear set (19).

6. The crystal cooling device for crystal growth in a crystal furnace according to claim 3, characterized in that: A mixing blade (15) is coaxially arranged at the bottom of the crucible support (8); the mixing blade (15) is fixed to the crankshaft mounting frame (1401) via a transverse plate (1402) rotatably connected thereto, and the mixing blade (15) is connected to the first bevel gear set (16).

7. The crystal cooling device for crystal growth in a crystal furnace according to claim 3, characterized in that: The crystal furnace body (4) is formed into an outer shell and an inner shell through the cooling cavity (403), and a plurality of fixing frames (404) are fixed at equal intervals on the circumference of the bottom of the inner shell, and the fixing frames (404) are fixed to the inner bottom of the outer shell.

8. The crystal cooling device for crystal growth in a crystal furnace according to claim 3, characterized in that: The cooling component comprises a No. 2 copper tube (703) fixed on the window (102), and a No. 1 copper tube (702) is fixed in the processing box (5); One end of the No. 1 copper tube (702) and the No. 2 copper tube (703) are connected via an integrated water pump (7), and the other end is connected via an expansion valve (704); the No. 1 copper tube (702) and the No. 2 copper tube (703) are connected via the integrated water pump (7) and the No. 2 copper tube (703) to form a connected closed loop; The integrated water pump (7) is fixed to the inner wall of the workbench (1) via a support plate (701).

9. A crystal cooling device for crystal growth in a crystal furnace according to claim 8, characterized in that: A fan bracket (2) is fixed at the window (102) on the outside of the workbench (1); a fan blade (301) is rotatably mounted on the fan bracket (2) toward the side of the workbench (1); a first motor (3) is fixed to the side of the fan bracket (2) away from the workbench (1); and an output shaft of the first motor (3) is coaxially fixed to the fan blade (301).

10. A crystal cooling method for crystal growth in a crystal furnace, wherein the crystal cooling method for crystal growth in a crystal furnace adopts the crystal cooling device for crystal growth in a crystal furnace according to any one of claims 1 to 9, characterized in that: include: Step 1: circulating the coolant in the cooling chamber (403) and the processing box (5) through the pumping assembly, and cooling the crystal furnace body (4) through heat exchange between the coolant and the crystal furnace body (4); Step 2: The coolant in the cooling chamber (403) is stratified by the difference in water temperature density, and the hotter coolant at the top of the cooling chamber (403) is extracted during reflux, so that the coolant can reflux into the processing box (5) after completing heat exchange with the crystal furnace body (4); Step three: cooling the coolant in the processing box (5) by using a cooling component.

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