Coil connecting piece, electrode coil connecting structure and semiconductor process equipment

Abstract

The invention provides a coil connecting piece, an electrode coil connecting structure and semiconductor process equipment, and the coil connecting piece comprises a plurality of support arms; the flow equalizing part is provided with a first end and a second end which are oppositely arranged, and the second end of the supporting arm is connected to the second end of the flow equalizing part; the current sharing part is further provided with a peripheral wall, the peripheral wall of the current sharing part extends from the first end of the current sharing part to the second end of the current sharing part, all the supporting arms are distributed at intervals in the circumferential direction of the peripheral wall of the current sharing part, and the current sharing part is used for dispersing current output by the radio frequency source so that the current can be evenly distributed to the supporting arms. According to the coil connecting piece, the current sharing part is arranged, so that the distance between the current sharing part and each support arm is basically the same, the current can be uniformly shunted to each support arm, and the uniformity of the current part of the electrode coil is improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a coil connector, an electrode coil connection structure and semiconductor process equipment. Background Art

[0002] Deep silicon etching has important applications in integrated circuits, micro-electromechanical systems, and advanced packaging, and is a very important process in industrial production. With the rapid development of semiconductor component manufacturing technology, the requirements for component performance and integration are getting higher and higher. Inductively coupled plasma sources are widely used in the field of microelectronics processing due to their advantages of high selectivity, high anisotropy, and high etching rate.

[0003] In the prior art, the upper electrode coil of the etching machine uses an inner and outer double-layer coil to provide radio frequency current, and the double-layer coil structure is located above the ceramic window surface. The electrode coil connection structure is between the upper electrode coil and the matcher, which is used to connect the coil and the upper electrode matcher.

[0004] The existing upper electrode coil connection structure uses coil connectors 10' to form four links to achieve the connection between the matching device 1 and the electrode coil. Figure 1 As shown, the matcher 1 is connected to the inner coil 4 through the first link 2 and the second link 3 to form a loop, and the matcher 1 is connected to the outer coil 7 through the third link 5 and the fourth link 6 to form a loop.

[0005] like Figure 2 The schematic diagram of the structure of the four coil connectors 10' shown in the figure, the four coil connectors 10' respectively form four links, each coil connector includes a mainstream arm 11' and four branch arms 12', the mainstream arm 11' is connected to the input end or output end of the matching device 1, and the four branch arms 12' are respectively connected to the corresponding electrode coils to achieve the shunt of the radio frequency current. That is to say, after the radio frequency current flows out from the output interface of the matching device 1, it is divided into four branch arms 12' and flows into the coil assembly symmetrically after passing through the mainstream arm 11'.

[0006] However, due to the unreasonable arrangement of the coil connector in the prior art, the current flowing into the electrode coil is asymmetric, which ultimately causes asymmetry in plasma etching. Therefore, how to distribute the current more evenly to each arm 12' is an urgent problem to be solved in the art. Summary of the invention

[0007] The present invention aims to solve the problem in the prior art that when current is shunted to the electrode coil, more current flows on the branch arm close to the main flow arm, resulting in uneven current flowing into the electrode coil.

[0008] In order to solve the above problems, according to a first aspect of the present invention, a coil connector is disclosed, which is used to connect a radio frequency source and an electrode coil, and the coil connector includes: a support arm, which is multiple, and the first end of each support arm is used to be electrically connected to the electrode coil; a current balancing portion, which has a first end and a second end that are relatively arranged, and the first end of the current balancing portion is used to be electrically connected to the radio frequency source, and the second ends of the support arms are all connected to the second end of the current balancing portion; the current balancing portion also has an outer peripheral wall, and all the support arms are circumferentially spaced along the outer peripheral wall of the current balancing portion, and the current balancing portion is used to disperse the current output by the radio frequency source so that the current is evenly distributed to the support arms.

[0009] Furthermore, the flow balancing portion is cylindrical, and the axis of the flow balancing portion is perpendicular to all the support arms.

[0010] Furthermore, the second ends of all the support arms converge at the second end of the flow balancing portion.

[0011] Furthermore, the flow balancing portion has a through avoidance channel along its axial direction, and the extension lines of all the support arms intersect on the axis of the flow balancing portion.

[0012] Furthermore, the coil connector further includes: a main flow arm, the main flow arm is connected to the first end of the current balancing part, and the current balancing part is electrically connected to the radio frequency source through the main flow arm.

[0013] Furthermore, the angles formed between all adjacent supporting arms are equal.

[0014] According to a second aspect of the present invention, an electrode coil connection structure is also disclosed, comprising: the above-mentioned coil connector; a shielding shell, the shielding shell having a accommodating cavity, the shielding shell being electrically connected to the return end of the radio frequency source, and the coil connector being arranged in the accommodating cavity.

[0015] Further, the electrode coil includes a first electrode coil, and the coil connector includes: a first coil connector, which is arranged in the accommodating cavity, and is used to connect the first output end of the radio frequency source with the receiving end of the first electrode coil; the electrode coil connection structure also includes: a first plug-in post, which is passed through the shielding shell, and the first coil connector is electrically connected to the first plug-in post, and the first coil connector is electrically connected to the receiving end of the first electrode coil through the first plug-in post; a second plug-in post, which is electrically connected to the shielding shell, and is used to be electrically connected to the output end of the first electrode coil, and the radio frequency source forms a current loop between the first coil connector, the first plug-in post, the second plug-in post and the shielding shell and the first electrode coil.

[0016] Furthermore, the first coil connector includes: a first arm, a first end of the first arm is electrically connected to the first plug-in column; a first current balancing part, the first current balancing part is cylindrical, the first end of the first current balancing part is used to be electrically connected to the first output end of the RF source, and the second end of the first arm is connected to the second end of the first current balancing part.

[0017] Furthermore, the shielding shell includes a cylinder, a first end of the cylinder is electrically connected to the return end of the RF source; a shielding plate, the shielding plate is connected to the second end of the cylinder, the cylinder and the shielding plate form the accommodating cavity, the shielding plate is electrically connected to the cylinder, the first plug-in column is inserted into the shielding plate, and the second plug-in column is electrically connected to the shielding plate.

[0018] Furthermore, the electrode coil also includes a second electrode coil, the first electrode coil is located inside the second electrode coil, and the coil connector also includes: a second coil connector, the second coil connector is used to connect the second output end of the RF source with the receiving end of the second electrode coil; the electrode coil connection structure also includes: a third plug-in post, the third plug-in post is inserted into the shielding shell, the second coil connector is electrically connected to the third plug-in post, and the second coil connector is electrically connected to the receiving end of the second electrode coil through the third plug-in post; the second plug-in post is also used to connect the return end of the RF source with the output end of the second electrode coil, so that a current loop is formed between the RF source and the second electrode coil through the second coil connector, the third plug-in post, the second plug-in post and the shielding shell.

[0019] Furthermore, the second coil connector includes: a second arm, a first end of the second arm being used to be electrically connected to the third plug-in column; a second current balancing part, the second current balancing part is cylindrical, a first end of the second current balancing part is used to be electrically connected to the second output end of the RF source, and a second end of the second arm is connected to a second end of the second current balancing part; the second current balancing part is sleeved on the outside of the first current balancing part, and a gap is formed between the second current balancing part and the first current balancing part.

[0020] Furthermore, the electrode coil connection structure also includes: a mounting seat, the mounting seat is passed through the shielding shell and connected to the shielding shell, the first plug-in column passes through the mounting seat and the shielding shell at the same time, the first plug-in column is connected to the mounting seat, and the first plug-in column and the shielding shell are insulated by the mounting seat.

[0021] Furthermore, the electrode coil includes a first electrode coil, and the coil connector includes: a first coil connector, which is used to connect the first output end of the RF source and the receiving end of the first electrode coil; and a third coil connector, which is used to connect the return end of the RF source and the output end of the first electrode coil to form a current loop between the RF source and the first electrode coil.

[0022] Furthermore, the first coil connector includes: a first arm, a first end of the first arm being used to be electrically connected to a receiving end of the first electrode coil; a first current equalizing portion, the first current equalizing portion being cylindrical, a first end of the first current equalizing portion being used to be electrically connected to a first output end of the RF source, and a second end of the first arm being connected to a second end of the first current equalizing portion.

[0023] Furthermore, the third coil connecting member includes: a third arm, a first end of the third arm is used to be electrically connected to the output end of the first electrode coil; a third current balancing part, the third current balancing part is cylindrical, the first end of the third current balancing part is used to be electrically connected to the return end of the RF source, and the second end of the third arm is connected to the second end of the third current balancing part; the third current balancing part is sleeved on the outside of the first current balancing part, and a gap is formed between the third current balancing part and the first current balancing part.

[0024] Furthermore, the electrode coil also includes a second electrode coil, the first electrode coil is located inside the second electrode coil, and the coil connector also includes: a second coil connector, the second coil connector is used to connect the second output end of the RF source with the receiving end of the second electrode coil, the first electrode coil is located inside the second electrode coil; the third coil connector is also used to connect the return end of the RF source with the output end of the second electrode coil to form a current loop between the RF source and the second electrode coil.

[0025] Furthermore, the second coil connecting member includes: a second arm, a first end of the second arm is used to be electrically connected to the receiving end of the second electrode coil; a second current balancing part, the second current balancing part is cylindrical, the first end of the second current balancing part is used to be electrically connected to the second output of the RF source, and the second end of the second arm is connected to the second end of the second current balancing part; the second current balancing part is sleeved on the outside of the third current balancing part, and a gap is formed between the second current balancing part and the third current balancing part; the first end of the third arm is also used to be electrically connected to the output end of the second electrode coil.

[0026] According to a third aspect of the present invention, a semiconductor process equipment is also disclosed, comprising: a shell, the shell being provided with an installation cavity; and the above-mentioned electrode coil connection structure, the electrode coil connection structure being arranged in the installation cavity.

[0027] The coil connector of the present invention is provided with a current balancing portion. After the coil connector is assembled, the RF current output by the RF source enters the current balancing portion and flows from the first end to the second end of the current balancing portion. Due to the skin effect, the RF current will diffuse along the outer wall of the current balancing portion during the process of flowing to the second end. Moreover, since each branch arm is connected to the second end of the current balancing portion and is circumferentially spaced on the outer wall of the current balancing portion, the distance between the current balancing portion and each branch arm is substantially the same, so that the current can be evenly distributed to each branch arm, thereby improving the uniformity of the current portion of the electrode coil. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of an electrode coil connection structure in the prior art;

[0029] Figure 2 It is a structural schematic diagram of a coil connecting member in the prior art;

[0030] Figure 3 It is an assembly diagram of an electrode coil connection structure in the prior art;

[0031] Figure 4 is a current distribution diagram of a coil connecting piece in the prior art;

[0032] Figure 5 This is a schematic structural diagram of a coil connector according to a first embodiment of the present invention;

[0033] Figure 6 It is a structural schematic diagram of a coil connecting member according to a second embodiment of the present invention;

[0034] Figure 7 is a top view of a coil connector according to a second embodiment of the present invention;

[0035] Figure 8 Schematic diagram of the structure of the electrode coil connection structure of the third embodiment of the present invention;

[0036] Fig. 9 Schematic diagram of the structure of the electrode coil connection structure of the fourth embodiment of the present invention;

[0037] Fig.10 An exploded view of the electrode coil connection structure of the fourth embodiment of the present invention;

[0038] Fig.11 It is an assembly diagram of a cylinder and a shielding plate of an electrode coil connection structure according to a fourth embodiment of the present invention;

[0039] Fig.12 It is an assembly diagram of a shielding plate, a mounting seat and a coil connector of an electrode-coil connection structure according to a fourth embodiment of the present invention;

[0040] Fig.13 It is a cross-sectional view of the electrode coil connection structure of the fourth embodiment of the present invention, and an assembly view of the shielding plate, the mounting seat, the first plug-in post, the second plug-in post and the third plug-in post;

[0041] Fig.14 is an equivalent circuit diagram of the electrode coil connection structure of the fourth embodiment of the present invention;

[0042] Fig.15 is a cross-sectional view of an electrode coil connection structure according to a fourth embodiment of the present invention;

[0043] Fig.16a is the etching rate data of the etcher in the prior art;

[0044] Fig.16b This is an etching rate data diagram of a semiconductor process equipment using the electrode coil connection structure of the fourth embodiment of the present invention;

[0045] Fig.17a is the eccentricity data of the etching machine in the prior art;

[0046] Fig.17b The eccentricity data of the semiconductor process equipment using the electrode-coil connection structure of the fourth embodiment of the present invention;

[0047] Fig.18 This is a structural schematic diagram of an electrode coil connection structure according to a fifth embodiment of the present invention;

[0048] Fig.19 Schematic diagram of the structure of the electrode coil connection structure of the sixth embodiment of the present invention;

[0049] List of reference numerals:

[0050] 10. Coil connector; 11. Support arm; 12. Current equalizing part; 121. Avoidance channel; 13. Main stream arm; 10a. First coil connector; 11a. First support arm; 12a. First current equalizing part; 10b. Second coil connector; 11b. Second support arm; 12b. Second current equalizing part; 121b. Second avoidance channel; 13b. Second main stream arm; 10c. Third coil connector; 11c. Third support arm; 12c. Third current equalizing part; 121c. Third avoidance channel; 20. Matcher; 30. Electrode coil; 31. First electrode coil; 32. Second electrode coil; 40. Shielding shell; 41. Cylinder; 42. Shielding plate; 50. First plug-in post; 60. Second plug-in post; 70. Third plug-in post; 80. Mounting seat. DETAILED DESCRIPTION

[0051] In order to enable those skilled in the art to better understand the technical solution of the present invention, the coil connector, electrode coil connection structure and semiconductor process equipment provided by the present invention are described in detail below with reference to the accompanying drawings.

[0052] The existing upper electrode coil connection structure uses coil connectors to form four links to achieve the connection between the matching device 1 and the electrode coil. Figure 1 As shown, the matcher 1 is connected to the inner coil 4 through the first link 2 and the second link 3 to form a loop, and the matcher 1 is connected to the outer coil 7 through the third link 5 and the fourth link 6 to form a loop.

[0053] Figure 2 There are four coil connectors 10' used to form four links, and each coil connector 10' forms a link. Each coil connector includes a mainstream arm 11' and four branch arms 12'. The mainstream arm 11' is connected to the input end or the output end of the matcher 1, and the four branch arms 12' are respectively connected to the corresponding electrode coils to achieve uniform current diversion. After the RF current flows out from the output interface of the matcher 1, it is divided into four branch arms 12' after passing through the mainstream arm 11' and flows symmetrically into the coil assembly. However, due to the unreasonable setting of the coil connector in the prior art, the current flowing into the coil is asymmetric, which ultimately causes asymmetry in plasma etching.

[0054] After research, it is found that the reason why the coil connector 10' is not set properly in the prior art is that: Figure 3 As shown in FIG. 1 , during assembly, the coil connectors need to be stacked. In order to avoid other coil connectors 10 ′, the main flow arm 11 ′ is set to one side. This results in different distances between the main flow arm 11 ′ and the four support arms 12 ′. In other words, Figure 4 As shown, after being set to one side, the mainstream arm 11' will be close to two of the four branch arms 12' and away from the other two. In this case, when the current flowing out of the output port of the matcher 1 is diverted to the branch arms 12' through the mainstream arm 11', the current on the two branch arms 12' close to the mainstream arm 11' is larger, and the current on the two branch arms 12' far from the mainstream arm 11' is smaller, resulting in asymmetry in the current flowing into the coil, and ultimately causing asymmetry in plasma etching.

[0055] In order to solve the above problems, Figure 5 and Figure 6 As shown, the present invention discloses a coil connector for connecting a radio frequency source and an electrode coil.

[0056] The coil connector includes: a support arm 11 and a current equalizing part 12. There are multiple support arms 11, and the first end of each support arm 11 is used to be electrically connected to the electrode coil 30; the current equalizing part 12 has a first end and a second end that are arranged opposite to each other, and the first end of the current equalizing part 12 is used to be electrically connected to the radio frequency source, and the second end of the support arm 11 is connected to the second end of the current equalizing part 12.

[0057] The current balancing portion 12 also has an outer peripheral wall, which extends from the first end to the second end of the current balancing portion 12. All the arms 11 are circumferentially spaced along the outer peripheral wall of the current balancing portion 12. The current balancing portion 12 is used to disperse the current output by the RF source so that the current is evenly distributed to the arms 11.

[0058] like Figure 5 and Figure 6 As shown, after the coil connector is assembled, the RF current output by the RF source enters the current balancing portion 12 and flows from the first end to the second end of the current balancing portion 12. Moreover, since each branch arm 11 is connected to the second end of the current balancing portion 12 and is circumferentially spaced on the outer wall of the current balancing portion 12, the distance between the current balancing portion 12 and each branch arm 11 is substantially the same, so that the current can be evenly distributed to each branch arm 11, thereby improving the uniformity of the current portion of the electrode coil 30.

[0059] The coil connector of the present invention will be described in detail below with reference to specific embodiments.

[0060] like Figure 5 The first embodiment of the present invention shown in the figure discloses a coil connector including: a support arm 11 and a current equalizing part 12. The current equalizing part 12 is cylindrical, and the cylindrical current equalizing part 12 has a first end and a second end that are arranged opposite to each other. The first end of the cylindrical current equalizing part 12 is electrically connected to the matcher 20, and the first end of the current equalizing part 12 is connected to the RF source through the matcher 20, and the second end is used to connect with the support arm 11. There are four support arms 11, and the first end of each support arm 11 is used to be electrically connected to the electrode coil 30, and the second end of each support arm 11 is connected to the second end of the cylindrical current equalizing part 12. The support arms 11 are arranged at intervals along the outer wall of the cylindrical current equalizing part 12, and each support arm 11 is perpendicular to the current equalizing part 12. In other words, the second ends of the four support arms 11 meet at the second end of the current equalizing part 12 to form an X-shaped structure. The axis of the current equalizing part 12 is perpendicular to the plane where the X-shaped structure is located, thereby reducing the generation of displacement current components and improving the uniformity of the shunting. Furthermore, in order to ensure that the current enters the electrode coil more evenly, the arms are arranged symmetrically with each other.

[0061] like Figure 6The second embodiment of the present invention shown in FIG. 1 also discloses a coil connector, which is basically the same as the first embodiment, except that, in this embodiment, the flow equalizing portion 12 is also cylindrical, but is thicker than the flow equalizing portion 12 of the first embodiment, and the flow equalizing portion 12 has a through avoidance channel 121 along its axial direction. In other words, it can also be understood that in this embodiment, the flow equalizing portion 12 is cylindrical, and has a through avoidance channel 121 inside. Figure 7 As shown, four arms 11 are arranged on the outer wall of the cylindrical flow equalizing portion 12 at intervals along the circumference of the flow equalizing portion 12 . At the same time, the axis of the flow equalizing portion 12 is perpendicular to all the arms 11 , and the extension lines of all the arms 11 intersect on the axis of the flow equalizing portion 12 .

[0062] In addition, in this embodiment, the coil connector also includes a main flow arm 13, such as Figure 6 As described above, the main flow arm 13 is connected to the first end of the current balancing part 12 , and the current balancing part 12 is electrically connected to the matcher 20 through the main flow arm 13 .

[0063] After assembly, the RF current flows into the current equalizing part 12 along the mainstream arm 13, and flows from the first end to the second end of the cylindrical current equalizing part 12. The axis of the current equalizing part 12 is perpendicular to all the arms 11, and the extension lines of all the arms 11 intersect on the axis of the current equalizing part 12, so that the distance between the current equalizing part 12 and each arm 11 is basically the same, thereby improving the uniformity of the current distribution. In this way, the current can be evenly distributed to each arm 11, thereby improving the uniformity of the current part of the electrode coil 30. In addition, by setting the avoidance channel 121, other current equalizing parts 12 can be avoided during assembly to avoid mutual interference.

[0064] It should be noted that in order to minimize the generation of displacement current components, in this embodiment, the axial length of the current balancing portion 12 must be at least 3 times the radial cross-sectional diameter of the current balancing portion 12 to ensure that the current can have a sufficient axial distance to diffuse evenly on the outer wall surface of the current balancing portion 12.

[0065] In addition, in the above embodiment, the number of arms 11 is 4, and they are symmetrically distributed, but this is not restrictive. In terms of quantity, the number of arms 11 can also be any one of 3-6, and it is not necessarily symmetrical. For example: when the number of arms 11 is 6, the angles between adjacent arms 11 are all 60°, and at this time, the arms 11 are symmetrical with each other. However, when the number of arms 11 is 3, the angles between adjacent arms 11 are all 120°. At this time, the arms 11 are no longer symmetrical. For another example: the number of arms 11 can also be 5, and the angles between adjacent arms 11 are all 72°, which is also asymmetric. In other words, in order to ensure that the current enters the electrode coil more evenly, the angles formed between all adjacent arms 11 are equal, which can also be understood as all arms 11 being distributed at equal intervals along the circumferential direction of the outer peripheral wall of the current equalizing portion 12. Therefore, as long as the angles formed between all adjacent arms 11 are equal, they are within the protection scope of the present invention.

[0066] It should also be noted that in the above-mentioned second embodiment, the current balancing unit 12 is electrically connected to the matching device 20 through the main flow arm 13, but this is not restrictive. In some other embodiments not shown in the figure, the current balancing unit 12 can be directly electrically connected to the matching device 20. In other words, as long as it is directly or indirectly connected to the matching device 20 through the current balancing unit 12, it is within the protection scope of the present invention.

[0067] According to the second aspect of the present invention, an electrode coil connection structure is also disclosed, including the above-mentioned coil connector and a shielding shell 40, the shielding shell 40 has a accommodating cavity, the shielding shell 40 is electrically connected to the return end of the radio frequency source, and the coil connector is arranged in the accommodating cavity.

[0068] The electrode coil connection structure is further described below in conjunction with specific embodiments.

[0069] like Figure 8 The third embodiment of the present invention shown in FIG. 1 discloses an electrode coil connection structure, which is mainly used for Figure 8 The electrode coil 30 shown is a case of a single first electrode coil 31 .

[0070] In this embodiment, the coil connector 10 includes: a first coil connector 10 a , and the electrode coil connection structure further includes: a shielding shell 40 , a first plug-in post 50 and a second plug-in post 60 .

[0071] The shielding shell 40 has a receiving cavity and is electrically connected to the return end of the matching device 20. The first coil connector 10a is disposed in the receiving cavity and is used to connect the first output end of the matching device 20 and the receiving end of the first electrode coil 31.

[0072] The first plug-in post 50 is inserted into the shielding shell 40 , the first coil connector 10 a is electrically connected to the first plug-in post 50 , and the first coil connector 10 a is electrically connected to the receiving end of the first electrode coil 31 through the first plug-in post 50 .

[0073] The second plug-in post 60 is electrically connected to the shielding shell 40, and the second plug-in post 60 is used to electrically connect to the output end of the first electrode coil 31. The matcher 20 forms a current loop with the first electrode coil 31 through the first coil connector 10a, the first plug-in post 50, the second plug-in post 60 and the shielding shell 40.

[0074] The electrode coil connection structure of the present invention electrically connects the second plug-in column 60 with the shielding shell 40, and then electrically connects the shielding shell 40 with the return end of the matcher 20, so that the first electrode coil 31 and the matcher 20 are connected through the shielding shell 40. On the basis of the shielding effect of the shielding shell 40, a part of the current loop can also be formed to lead the current loop of the first electrode coil 31 back to the matcher 20, eliminating a layer of link, making the electrode coil connection structure more simple in structure, and is a typical multi-purpose item.

[0075] In this embodiment, the structure of the first coil connector 10a is the same as that of the coil connector 10 in the first embodiment, that is, the first coil connector 10a includes a first arm 11a and a first current equalizing portion 12a.

[0076] The first current balancing part 12a is cylindrical, and has a first end and a second end that are oppositely disposed, and the first end of the first current balancing part 12a is used to be electrically connected to the first output end of the matcher 20. There are four first arms 11a, and the first end of the first arm 11a is electrically connected to the first plug-in column 50, and the second end of the first arm 11a is connected to the second end of the first current balancing part 12a.

[0077] The first arms 11a are spaced apart along the outer side wall of the first current equalizing portion 12a, and each first arm 11a is perpendicular to the current equalizing portion 12. In other words, the second ends of the four first arms 11a meet at the second end of the first current equalizing portion 12a to form an X-shaped structure. The axis of the first current equalizing portion 12a is perpendicular to the plane where the X-shaped structure is located, thereby reducing the generation of displacement current components and improving the uniformity of current distribution.

[0078] In this embodiment, the shielding shell 40 includes a barrel 41 and a shielding plate 42. The first end of the barrel 41 is electrically connected to the return end of the matcher 20. The shielding plate 42 is connected to the second end of the barrel 41. The barrel 41 is buckled on the shielding plate 42. The barrel 41 and the shielding plate 42 form a receiving cavity. The shielding plate 42 is electrically connected to the barrel 41. The first plug-in column 50 is passed through the shielding plate 42, and the second plug-in column 60 is electrically connected to the shielding plate 42. By using the barrel 41 to symmetrically lead the current loop of the first electrode coil 31 back to the matcher 20, a layer of link is omitted, and the electrode coil connection structure is more concise in structure, which is a typical one-item-multiple-purpose.

[0079] It should be noted that in the present embodiment, the cross-section of the cylinder 41 is circular, but this is not restrictive. In some other embodiments not shown in the figure, the cross-section of the cylinder can also be a rectangular, polygonal or other structure. As long as it can cooperate with the second plug-in column 60 so that the current can flow back evenly, it is within the protection scope of the present invention.

[0080] like Figures 9 to 14 The fourth embodiment of the present invention shown in FIG. 1 also discloses an electrode coil connection structure, which is mainly used for Fig. 9 The case of two electrode coils 30 shown in the figure, that is, the electrode coil 30 includes a first electrode coil 31 and a second electrode coil 32, and the first electrode coil 31 is located inside the second electrode coil 32. The first output end of the matcher 20 is electrically connected to the receiving end of the first electrode coil 31, and the second output end of the matcher 20 is electrically connected to the receiving end of the second electrode coil 32.

[0081] like Fig. 9 As shown, in this embodiment, the coil connector 10 includes: a first coil connector 10a and a second coil connector 10b; the electrode coil connection structure includes: a shielding shell 40, a first plug-in post 50, a second plug-in post 60, a third plug-in post 70 and a mounting seat 80.

[0082] The shielding shell 40 has a receiving cavity, and the shielding shell 40 is electrically connected to the return end of the matching device 20. Specifically, Fig.10 As shown, the shielding shell 40 includes a cylinder 41 and a shielding plate 42. The first end ( Fig.10 The shielding plate 42 is connected to the second end of the cylinder 41, that is, Fig.11 As shown, the barrel 41 is buckled on the shielding plate 42 , the barrel 41 and the shielding plate 42 form a receiving cavity, and the shielding plate 42 is electrically connected to the barrel 41 .

[0083] like Fig.12 and Fig.13As shown, the mounting seat 80 is passed through the shielding plate 42 and fixedly connected to the shielding plate 42, the second plug-in column 60 is located outside the accommodating cavity, and its first end is plugged into the mounting seat 80 and fixed by the mounting seat 80, and at the same time, the first end of the second plug-in column 60 is electrically connected to the shielding plate 42; the second end of the second plug-in column 60 is divided into two connecting ends, one connecting end is used to be electrically connected to the output end of the first electrode coil 31, and the other connecting end is used to be electrically connected to the output end of the second electrode coil 32.

[0084] It can be seen that Fig.14 As shown, output1 represents the first output end of the matcher 20, output2 represents the second output end of the matcher 20, the first output end of the matcher 20 is electrically connected to the receiving end of the first electrode coil 31, the second output end of the matcher 20 is electrically connected to the receiving end of the second electrode coil 32, the shielding plate 42 is electrically connected to the output end of the first electrode coil 31 and the output end of the second electrode coil 32 through the second plug-in column 60, when the cylinder 41 is buckled on the shielding plate 42, the output end of the first electrode coil 31 is connected to the return end of the matcher 20 through the second plug-in column 60, the shielding plate 42, and the cylinder 41 in sequence, and the output end of the second electrode coil 32 is also connected to the return end of the matcher 20 through the second plug-in column 60, the shielding plate 42, and the cylinder 41 in sequence, forming the following Fig.14 The equivalent circuit diagram is shown.

[0085] The electrode coil connection structure of the present invention electrically connects the second plug-in column 60 with the shielding shell 40, so that the first electrode coil 31 and the matcher 20, and the second electrode coil 32 and the matcher 20 are connected through the shielding shell 40, so that the radio frequency current of the first electrode coil 31 and the second electrode coil 32 is symmetrically led back to the matcher 20 through the shielding shell 40. It can be seen that the shielding shell 40 of the present invention can also serve as a part of the current loop on the basis of the shielding function, eliminating a layer of link, making the electrode coil connection structure more concise in structure, which is a typical one-item-multiple-purposes.

[0086] like Fig.15 As shown, the first plug-in post 50 is used to connect the first coil connector 10a and the receiving end of the first electrode coil 31 , and the second plug-in post 60 is used to connect the second coil connector 10b and the receiving end of the second electrode coil 32 .

[0087] The first plug-in post 50 and the third plug-in post 70 pass through the mounting seat 80 and the shielding shell 40 at the same time. The first plug-in post 50 and the third plug-in post 70 are fixedly connected to the mounting seat 80 respectively. In the present embodiment, the mounting seat 80 is an insulating material (for example, rubber). Therefore, the first plug-in post 50 and the shielding plate 42 are insulated by the mounting seat 80, and the third plug-in post 70 and the shielding plate 42 are also insulated by the mounting seat 80. In other words, the mounting seat 80 has the functions of fixing and insulating, and is a typical multi-purpose item.

[0088] like Fig.15 As shown, the first coil connector 10a is disposed in the accommodating cavity, and the first coil connector 10a is used to connect the first output end of the matcher 20 with the receiving end of the first electrode coil 31. The first coil connector 10a is electrically connected to the first plug-in post 50, and the first coil connector 10a is electrically connected to the receiving end of the first electrode coil 31 through the first plug-in post 50.

[0089] The matcher 20 forms a current loop with the first electrode coil 31 through the first coil connector 10 a , the first plug-in post 50 , the second plug-in post 60 and the shielding shell 40 .

[0090] In this embodiment, the structure of the first coil connector 10a is the same as the coil connector 10 in the first embodiment, that is, the first coil connector 10a includes a first arm 11a and a first current equalizing portion 12a. The first current equalizing portion 12a is cylindrical, and the cylindrical first current equalizing portion 12a has a first end and a second end that are oppositely arranged. The first end of the first current equalizing portion 12a is used to be electrically connected to the first output end of the matcher 20. There are four first arms 11a, such as Fig.14 As shown, the first end of the first arm 11 a is electrically connected to the first plug-in column 50 , and the second end of the first arm 11 a is connected to the second end of the first current equalizing portion 12 a .

[0091] The first arms 11a are spaced apart along the outer side wall of the first current equalizing portion 12a, and each first arm 11a is perpendicular to the first current equalizing portion 12a. In other words, the second ends of the four first arms 11a meet at the second end of the first current equalizing portion 12a to form an X-shaped structure. The axis of the first current equalizing portion 12a is perpendicular to the plane where the X-shaped structure is located, thereby reducing the generation of displacement current components and improving the uniformity of current distribution.

[0092] like Fig.15 As shown, in this embodiment, the second coil connector 10b is disposed in the accommodating cavity, and the second coil connector 10b is used to connect the second output end of the matcher 20 with the receiving end of the second electrode coil 32. It should be noted that the second coil connector 10b is electrically connected to the third plug-in post 70, and the second coil connector 10b is electrically connected to the receiving end of the second electrode coil 32 through the third plug-in post 70.

[0093] A current loop is formed between the matcher 20 and the second electrode coil 32 via the second coil connector 10 b , the third plug-in post 70 , the second plug-in post 60 and the shielding shell 40 .

[0094] In this embodiment, the structure of the second coil connector 10b is the same as that of the coil connector 10 in the second embodiment, that is, the second coil connector 10b includes: a second branch arm 11b, a second current balancing portion 12b and a second main flow arm 13b.

[0095] like Fig.15 As shown, the second current balancing part 12b is cylindrical, and has a first end and a second end that are relatively arranged. The first end of the second current balancing part 12b is connected to the second mainstream arm 13b, and is electrically connected to the second output end of the matcher 20 through the second mainstream arm 13b. There are four second branch arms 11b, and the first end of the second branch arm 11b is electrically connected to the third plug-in column 70, and the second end of the second branch arm 11b is connected to the second end of the second current balancing part 12b.

[0096] The second branch arms 11b are arranged at intervals along the outer side wall of the second flow balancing portion 12b, and each second branch arm 11b is perpendicular to the axis of the second flow balancing portion 12b. In other words, the four second branch arms 11b are arranged at intervals along the circumferential direction of the second flow balancing portion 12b on the cylindrical outer wall. At the same time, the axis of the second flow balancing portion 12b is perpendicular to all the second branch arms 11b, and the extension lines of all the second branch arms 11b converge on the axis of the second flow balancing portion 12b, thereby improving the uniformity of the flow diversion.

[0097] like Fig.15 As shown, the second current equalizing portion 12b is sleeved on the outside of the first current equalizing portion 12a, and a gap is formed between the second current equalizing portion 12b and the first current equalizing portion 12a. In other words, the second current equalizing portion 12b has a second avoidance channel 121b running from the first end to the second end, and the first current equalizing portion 12a is arranged to run through the second avoidance channel 121b.

[0098] The electrode coil connection structure of the present invention is provided with a second current equalizing part 12b. After assembly, the second current equalizing part 12b can not only conduct the matching device 20 and the first electrode coil 31, but also avoid the first current equalizing part 12a through the second avoidance channel 121b, thereby avoiding mutual interference with the first current equalizing part 12a, making the distance between the first current equalizing part 12a and each first branch arm 11a equal, thereby ensuring the uniformity of the current of the first electrode coil 31 and the second electrode coil 32. The eccentricity difference of the etching rate caused by the electrode coil connection structure is effectively solved.

[0099] like Fig.16a and Fig.16b As shown, in Fig.16a16a is the etching rate data of the etcher in the prior art, and 16b is the etching rate data of the semiconductor process equipment (etcher) adopting the electrode coil structure of the present invention.

[0100] Fig.16a and Fig.16b The sampling methods of the two are the same, with multiple sampling points distributed on the wafer. Except for the central sampling point, the other sampling points are divided into 3 groups and distributed in a ring from the inside to the outside. In the same group of sampling points, the distance from the sampling point to the center of the wafer is the same. In other words, each group of sampling points can reflect whether the etching rate in the circumferential direction is the same when the distance from the center of the wafer is equal. In an ideal situation, the more uniform the etching rate in the circumferential direction, the easier it is to control, and the better the etching effect in the circumferential direction.

[0101] Taking the sampling points in the annular area A as an example, the area A is located within the etching range of the first electrode coil 31. Fig.16a As shown, due to the problem of uneven current distribution in the electrode coil structure used in the prior art, the current distribution in the first electrode coil 31 is also uneven, which leads to different etching rates at different positions in the circumferential direction of the A region. Fig.16a It can be clearly seen that the etching rate in the upper left part of area A is significantly greater than that in the lower right part.

[0102] like Fig.16b As shown, due to the electrode coil structure of the present invention, the current can be evenly distributed to the first electrode coil 31 through the first coil connector 10a, so that the etching rate distribution is more uniform, thereby Fig.16b The etching rate of area A is basically the same as that of area B. Fig.16b It can be clearly seen that the etching rate in the upper left part of area A is basically the same as the etching rate in the lower right part, and the uniformity of the etching rate has been significantly improved.

[0103] In order to more clearly reflect the improvement effect of the present invention on the etching rate, the present invention also provides Fig.17a and Fig.17b The eccentricity data shown in the figure, Fig.17a 17a is the eccentricity data of the etcher in the prior art, and 17b is the eccentricity data of the semiconductor process equipment (etcher) adopting the electrode coil structure of the present invention.

[0104] and Fig.16a and Fig.16b The sampling method is the same as Fig.17a and Fig.17b There are also multiple sampling points distributed on the wafer. Except for the central sampling point, the other sampling points are divided into 3 groups and distributed in a ring from the inside to the outside. In the same group of sampling points, the distance from the sampling point to the center of the wafer is the same. Fig.16a and Fig.16b Based on the data of all sampling points, the average etching rate is calculated by summing the data of all sampling points, and the average etching rate is subtracted from the etching rate of each sampling point to obtain Fig.17a and Fig.17b data, that is, Fig.17a and Fig.17b It can reflect the gap between the etching rate of each sampling point and the average etching rate. Ideally, the smaller the gap, the better.

[0105] like Fig.17a As shown, due to the problem of uneven current distribution in the electrode coil structure used in the prior art, the current distribution in the first electrode coil 31 is also uneven, which leads to different etching rates at different circumferential positions in region A, and the difference between each sampling point and the average etching rate is large, ranging from -4 to 4.

[0106] like Fig.17b As shown, due to the electrode coil structure of the present invention, the current can be evenly distributed to the first electrode coil 31 through the first coil connector 10a, so that the etching rate distribution is more uniform, thereby Fig.17b The etching rate in area A is basically the same as that in area B, and the difference between each sampling point and the average etching rate is small, between -1 and 1.

[0107] from Fig.16a and Fig.16b The comparison and Fig.17a and Fig.17b It can be seen from the comparison that the electrode coil connection structure of the present invention can not only make the etching rate more uniform, but also greatly reduce the eccentricity difference, thereby greatly improving the etching effect and improving the yield rate.

[0108] like Fig.18 The fifth embodiment of the present invention shown in FIG. 1 also discloses an electrode coil connection structure, which is mainly used for Fig.18 The electrode coil 30 shown is a case of a single first electrode coil 31 .

[0109] In this embodiment, the shielding shell 40 has a receiving cavity, the shielding shell 40 is electrically connected to the return end of the RF source, and the coil connector is arranged in the receiving cavity. The coil connector 10 includes: a first coil connector 10a and a third coil connector 10c, the first coil connector 10a is used to connect the first output end of the matcher 20 and the receiving end of the first electrode coil 31; the third coil connector 10c is used to connect the return end of the matcher 20 and the output end of the first electrode coil 31, so that a current loop is formed between the matcher 20 and the first electrode coil 31.

[0110] In this embodiment, the structure of the first coil connector 10a is the same as that of the coil connector 10 in the first embodiment, that is, the first coil connector 10a includes a first arm 11a and a first current equalizing portion 12a.

[0111] The first current balancing part 12a is cylindrical, and has a first end and a second end that are oppositely disposed, and the first end of the first current balancing part 12a is used to be electrically connected to the first output end of the matcher 20. There are four first arms 11a, and the first end of the first arm 11a is electrically connected to the first plug-in column 50, and the second end of the first arm 11a is connected to the second end of the first current balancing part 12a.

[0112] The first arms 11a are spaced apart along the outer side wall of the first current equalizing portion 12a, and each first arm 11a is perpendicular to the current equalizing portion 12. In other words, the second ends of the four first arms 11a meet at the second end of the first current equalizing portion 12a to form an X-shaped structure. The axis of the first current equalizing portion 12a is perpendicular to the plane where the X-shaped structure is located, thereby reducing the generation of displacement current components and improving the uniformity of current distribution.

[0113] In this embodiment, the structure of the third coil connector 10c is the same as that of the coil connector 10 in the second embodiment, that is, the third coil connector 10c includes: a third arm 11c and a third current equalizing portion 12c.

[0114] The third current balancing part 12c is cylindrical, and has a first end and a second end that are relatively set. The first end of the third current balancing part 12c is used to be electrically connected to the return end of the matcher 20. There are four third arms 11c, and the first end of the third arm 11c is used to be electrically connected to the output end of the first electrode coil 31. The second end of the third arm 11c is connected to the second end of the third current balancing part 12c.

[0115] It can be seen that the first output end of the matcher 20 is electrically connected to the receiving end of the first electrode coil 31 through the first coil connector 10a, and the output end of the first electrode coil 31 is electrically connected to the return end of the matcher 20 through the third coil connector 10c, thereby forming a current loop between the matcher 20 and the first electrode coil 31.

[0116] The third arms 11c are arranged at intervals along the outer side wall of the third current balancing part 12c, and each third arm 11c is perpendicular to the axis of the third current balancing part 12c. In other words, the four arms 11 are arranged at intervals along the circumferential direction of the third current balancing part 12c on the cylindrical outer wall. At the same time, the axis of the third current balancing part 12c is perpendicular to all the third arms 11c, and the extension lines of all the third arms 11c converge on the axis of the third current balancing part 12c, thereby reducing the generation of displacement current components and improving the uniformity of current diversion.

[0117] In order to avoid mutual interference between the first current equalizing part 12a and the third current equalizing part 12c, the third current equalizing part 12c is sleeved outside the first current equalizing part 12a, and a gap is formed between the third current equalizing part 12c and the first current equalizing part 12a. In other words, the third current equalizing part 12c has a third avoidance channel 121c running from the first end to the second end, and the first current equalizing part 12a runs through the third avoidance channel 121c. The electrode coil connection structure of the present invention is provided with the third current equalizing part 12c. After assembly, the third current equalizing part 12c can avoid the first current equalizing part 12a through the third avoidance channel 121c while playing the role of connecting the matching device 20 and the first electrode coil 31, thereby avoiding mutual interference with the first current equalizing part 12a, making the distance between the first current equalizing part 12a and each first branch arm 11a equal, thereby ensuring the uniformity of the current of the first electrode coil 31 and the third electrode coil 30.

[0118] like Fig.14 The sixth embodiment of the present invention shown in FIG. 1 also discloses an electrode coil connection structure, which is mainly used for Fig.14 The illustrated case is one of two electrode coils 30 , that is, the electrode coil 30 includes a first electrode coil 31 and a second electrode coil 32 , and the first electrode coil 31 is located inside the second electrode coil 32 .

[0119] In this embodiment, the electrode coil connection structure is basically the same as that of the fifth embodiment, except that the coil connector 10 also includes: a second coil connector 10b, the second coil connector 10b is used to connect the second output end of the matcher 20 with the receiving end of the second electrode coil 32, and the first electrode coil 31 is located inside the second electrode coil 32.

[0120] The third coil connector 10c is also used to connect the return end of the matcher 20 and the output end of the second electrode coil 32. That is, the first end of the third arm 11c of the third coil connector 10c is also used to electrically connect to the output end of the second electrode coil 32 to form a current loop between the matcher 20 and the second electrode coil 32.

[0121] In this embodiment, the structure of the second coil connector 10b is the same as that of the coil connector 10 in the second embodiment, that is, the second coil connector 10b includes: a second arm 11b and a second current equalizing portion 12b.

[0122] The second current balancing part 12b is cylindrical and has a first end and a second end that are relatively arranged. The first end of the second current balancing part 12b is used to be electrically connected to the second output end of the matcher 20. There are four second arms 11b. The first end of the second arm 11b is used to be electrically connected to the receiving end of the second electrode coil 32. The second end of the second arm 11b is connected to the second end of the second current balancing part 12b.

[0123] The second branch arms 11b are arranged at intervals along the outer side wall of the second current balancing portion 12b, and each second branch arm 11b is perpendicular to the axis of the second current balancing portion 12b. In other words, the four second branch arms 11b are arranged at intervals along the circumferential direction of the second current balancing portion 12b on the cylindrical outer wall. At the same time, the axis of the second current balancing portion 12b is perpendicular to all the second branch arms 11b, and the extension lines of all the second branch arms 11b converge on the axis of the second current balancing portion 12b, thereby reducing the generation of displacement current components and improving the uniformity of current diversion.

[0124] It can be seen that the second output end of the matcher 20 is electrically connected to the receiving end of the second electrode coil 32 through the second coil connector 10b, and the output end of the second electrode coil 32 is electrically connected to the return end of the matcher 20 through the third coil connector 10c, thereby forming a current loop between the matcher 20 and the first electrode coil 31.

[0125] In order to avoid interference between the second current equalizing portion 12b and the third current equalizing portion 12c, the second current equalizing portion 12b is arranged on the outside of the third current equalizing portion 12c, and a gap is formed between the second current equalizing portion 12b and the third current equalizing portion 12c. In other words, the second current equalizing portion 12b has a second avoidance channel 121b running from the first end to the second end, and the third current equalizing portion 12c is arranged to run through the second avoidance channel 121b.

[0126] The electrode coil connection structure of the present invention is provided with a second current equalizing portion 12b. After assembly, the second current equalizing portion 12b can not only play the role of connecting the matcher 20 and the first electrode coil 31, but also avoid the third current equalizing portion 12c through the second avoidance channel 121b, thereby avoiding interference with the third current equalizing portion 12c, making the distance between the third current equalizing portion 12c and each first arm 11a equal, thereby ensuring uniform return of current.

[0127] The electrode coil connection structure of the present invention is provided with a second coil connection member 10b and a third coil connection member 10c, and the third current equalizing part 12c is provided inside the second current equalizing part 12b, so as to avoid mutual interference between the second coil connection member 10b and the third coil connection member 10c. The output end of the first electrode coil 31 and the return end of the matcher 20, and the output end of the second electrode coil 32 and the return end of the matcher 20 can be conducted through the third coil connection member 10c, and then the radio frequency current of the first electrode coil 31 and the second electrode coil 32 is symmetrically led back to the matcher 20 through the third coil connection member 10c. It can be seen that through the above structure, the present invention merges the original two return links into one return link, eliminating a layer of links, and structurally makes the electrode coil connection structure more concise, which is a typical one-item-multiple-purpose.

[0128] It should be noted that in the above-mentioned embodiments 1 to 6, the RF source is the matcher 20, and the return end of the matcher 20 is the housing of the matcher 20, but this is not restrictive. In some other embodiments not shown in the figure, the RF source can be a power distributor, and the matcher is connected to the power distributor, and the RF current of the matcher is distributed to the two electrode coils 30 through the power distributor. In other words, as long as it is a device that can output RF energy, it is within the protection scope of the invention.

[0129] According to another aspect of the present invention, a semiconductor process equipment is disclosed, comprising: a housing and the above-mentioned electrode-coil connection structure, wherein the housing is provided with a mounting cavity; and the electrode-coil connection structure is arranged in the mounting cavity.

[0130] It is understandable that in the above embodiment, the semiconductor process equipment is an etcher. The etcher of the present invention, by adopting the above electrode coil connection structure, can not only make the etching rate more uniform, but also greatly reduce the eccentricity difference, thereby greatly improving the etching effect and improving the yield rate.

[0131] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A coil connector for connecting a radio frequency source and an electrode coil (30), characterized in that: The coil connecting member (10) comprises: A support arm (11), wherein the support arms (11) are multiple, and the first end of each support arm (11) is used for being electrically connected to the electrode coil (30); A current balancing portion (12), the current balancing portion (12) having a first end and a second end arranged opposite to each other, the first end of the current balancing portion (12) being used for being electrically connected to the radio frequency source, and the second ends of the support arms (11) being connected to the second end of the current balancing portion (12); The current balancing portion (12) further comprises an outer peripheral wall, and all the support arms (11) are circumferentially spaced apart along the outer peripheral wall of the current balancing portion (12). The current balancing portion (12) is used to disperse the current output by the radio frequency source so that the current is evenly distributed to the support arms (11).

2. The coil connecting member according to claim 1, characterized in that: The flow balancing portion (12) is cylindrical, and the axis of the flow balancing portion (12) is perpendicular to all the supporting arms (11).

3. The coil connecting member according to claim 2, characterized in that: The second ends of all the support arms (11) converge at the second end of the flow balancing portion (12).

4. The coil connecting member according to claim 2, characterized in that: The flow balancing portion (12) has a through avoidance channel (121) along its axial direction, and the extension lines of all the support arms (11) intersect on the axis of the flow balancing portion (12).

5. The coil connecting member according to claim 1, characterized in that: The coil connecting member (10) further comprises: A main flow arm (13), wherein the main flow arm (13) is connected to a first end of the current balancing portion (12), and the current balancing portion (12) is electrically connected to the radio frequency source through the main flow arm (13).

6. The coil connecting member according to claim 1, characterized in that: The included angles formed between all adjacent supporting arms (11) are equal.

7. An electrode coil connection structure, characterized in that: include: The coil connecting member according to any one of claims 1 to 6; A shielding shell (40), the shielding shell (40) having a receiving cavity, the shielding shell (40) being electrically connected to a return end of the radio frequency source, and the coil connecting member being arranged in the receiving cavity.

8. The electrode coil connection structure according to claim 7, characterized in that: The electrode coil (30) comprises a first electrode coil (31), and the coil connector (10) comprises: A first coil connector (10a), the first coil connector (10a) being arranged in the accommodating cavity, the first coil connector (10a) being used to connect a first output end of the radio frequency source and a receiving end of the first electrode coil (31); The electrode coil connection structure also includes: A first plug-in post (50), wherein the first plug-in post (50) is inserted into the shielding shell (40), the first coil connector (10a) is electrically connected to the first plug-in post (50), and the first coil connector (10a) is electrically connected to a receiving end of the first electrode coil (31) via the first plug-in post (50); A second plug-in post (60), the second plug-in post (60) is electrically connected to the shielding shell (40), and the second plug-in post (60) is used to electrically connect to the output end of the first electrode coil (31), and the radio frequency source forms a current loop between the first electrode coil (31) and the shielding shell (40) via the first coil connector (10a), the first plug-in post (50), the second plug-in post (60), and the first electrode coil (31).

9. The electrode coil connection structure according to claim 8, characterized in that: The first coil connecting member (10a) comprises: A first support arm (11a), wherein a first end of the first support arm (11a) is electrically connected to the first plug-in column (50); A first current balancing part (12a), wherein the first current balancing part (12a) is cylindrical, a first end of the first current balancing part (12a) is used to be electrically connected to a first output end of the radio frequency source, and a second end of the first arm (11a) is connected to a second end of the first current balancing part (12a).

10. The electrode coil connection structure according to claim 8, characterized in that: The shielding shell (40) comprises A cylinder (41), wherein a first end of the cylinder (41) is electrically connected to a return end of the radio frequency source; A shielding plate (42), wherein the shielding plate (42) is connected to the second end of the cylinder (41), the cylinder (41) and the shielding plate (42) enclose the accommodating cavity, the shielding plate (42) is electrically connected to the cylinder (41), the first plug-in column (50) is passed through the shielding plate (42), and the second plug-in column (60) is electrically connected to the shielding plate (42).

11. The electrode coil connection structure according to claim 9, characterized in that: The electrode coil (30) further comprises a second electrode coil (32), the first electrode coil (31) is located inside the second electrode coil (32), and the coil connector (10) further comprises: A second coil connector (10b), the second coil connector (10b) being used to connect a second output end of the radio frequency source and a receiving end of the second electrode coil (32); The electrode coil connection structure also includes: a third plug-in post (70), the third plug-in post (70) being inserted into the shielding shell (40), the second coil connector (10b) being electrically connected to the third plug-in post (70), and the second coil connector (10b) being electrically connected to the receiving end of the second electrode coil (32) via the third plug-in post (70); The second plug-in post (60) is also used to connect the return end of the radio frequency source and the output end of the second electrode coil (32), so that a current loop is formed between the radio frequency source and the second electrode coil (32) through the second coil connector (10b), the third plug-in post (70), the second plug-in post (60) and the shielding shell (40).

12. The electrode coil connection structure according to claim 11, characterized in that: The second coil connecting member (10b) comprises: A second support arm (11b), wherein a first end of the second support arm (11b) is used for being electrically connected to the third plug-in column (70); A second current balancing part (12b), the second current balancing part (12b) is cylindrical, a first end of the second current balancing part (12b) is used to be electrically connected to a second output end of the radio frequency source, and a second end of the second arm (11b) is connected to a second end of the second current balancing part (12b); The second current balancing portion (12b) is sleeved on the outside of the first current balancing portion (12a), and a gap is formed between the second current balancing portion (12b) and the first current balancing portion (12a).

13. The electrode coil connection structure according to claim 8, characterized in that: The electrode coil connection structure also includes: The mounting seat (80) is passed through the shielding shell (40) and connected to the shielding shell (40); the first plug-in column (50) passes through the mounting seat (80) and the shielding shell (40) at the same time; the first plug-in column (50) is connected to the mounting seat (80); the first plug-in column (50) and the shielding shell (40) are insulated by the mounting seat (80).

14. The electrode coil connection structure according to claim 7, characterized in that: The electrode coil (30) comprises a first electrode coil (31), and the coil connector (10) comprises: A first coil connector (10a), the first coil connector (10a) being used to connect a first output end of the radio frequency source and a receiving end of the first electrode coil (31); A third coil connector (10c), the third coil connector (10c) being used to connect the return end of the radio frequency source and the output end of the first electrode coil (31), so as to form a current loop between the radio frequency source and the first electrode coil (31).

15. The electrode coil connection structure according to claim 14, characterized in that: The first coil connecting member (10a) comprises: A first support arm (11a), wherein a first end of the first support arm (11a) is used for being electrically connected to a receiving end of the first electrode coil (31); A first current balancing part (12a), wherein the first current balancing part (12a) is cylindrical, a first end of the first current balancing part (12a) is used to be electrically connected to a first output end of the radio frequency source, and a second end of the first arm (11a) is connected to a second end of the first current balancing part (12a).

16. The electrode coil connection structure according to claim 15, characterized in that: The third coil connecting member (10c) comprises: A third arm (11c), wherein a first end of the third arm (11c) is used to be electrically connected to an output end of the first electrode coil (31); A third current balancing portion (12c), the third current balancing portion (12c) being cylindrical, the first end of the third current balancing portion (12c) being used to be electrically connected to the return end of the radio frequency source, and the second end of the third branch arm (11c) being connected to the second end of the third current balancing portion (12c); The third current balancing portion (12c) is sleeved on the outside of the first current balancing portion (12a), and a gap is formed between the third current balancing portion (12c) and the first current balancing portion (12a).

17. The electrode coil connection structure according to claim 16, characterized in that: The electrode coil (30) further comprises a second electrode coil (32), the first electrode coil (31) is located inside the second electrode coil (32), and the coil connector (10) further comprises: a second coil connector (10b), the second coil connector (10b) being used to connect a second output end of the radio frequency source and a receiving end of the second electrode coil (32), the first electrode coil (31) being located inside the second electrode coil (32); The third coil connector (10c) is also used to connect the return end of the radio frequency source and the output end of the second electrode coil (32), so as to form a current loop between the radio frequency source and the second electrode coil (32).

18. The electrode coil connection structure according to claim 17, characterized in that: The second coil connecting member (10b) comprises: A second arm (11b), wherein a first end of the second arm (11b) is used for being electrically connected to a receiving end of the second electrode coil (32); A second current balancing part (12b), the second current balancing part (12b) is cylindrical, a first end of the second current balancing part (12b) is used to be electrically connected to a second output of the radio frequency source, and a second end of the second branch arm (11b) is connected to a second end of the second current balancing part (12b); The second current balancing portion (12b) is sleeved on the outside of the third current balancing portion (12c), and a gap is formed between the second current balancing portion (12b) and the third current balancing portion (12c); The first end of the third arm (11c) is also used to be electrically connected to the output end of the second electrode coil (32).

19. A semiconductor process equipment, characterized in that: include: A housing, wherein the housing is provided with a mounting cavity; The electrode coil connection structure according to any one of claims 7 to 18, wherein the electrode coil connection structure is arranged in the installation cavity.

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