Portable multi-specification wafer clamping device for gluing machine

Abstract

The invention relates to the technical field of wafer gluing equipment, in particular to a portable multi-specification wafer clamping device for a gluing machine, which comprises a first clamping seat and a second clamping seat, the end part of the first clamping seat is provided with an arc-shaped first clamping plate, and the end part of the second clamping seat is provided with an arc-shaped second clamping plate with the curvature different from that of the first clamping plate. A hollow containing groove is formed in the first clamping base, the second clamping base is embedded in the containing groove, the second clamping plate faces the first clamping plate, and the end, away from the first clamping plate, of the first clamping base is rotationally connected with the second clamping base through a rotating shaft. The first clamping seat and the second clamping seat are connected in a rotating mode, one clamp is provided with the clamping plates with two curvatures, so that wafers of two different specifications can be clamped, the clamp does not need to be replaced, only the first clamping seat needs to be rotated, and use is convenient.

Description

Technical Field

[0001] The technical field of the wafer glue coating equipment of the present application particularly relates to a convenient multi-specification wafer clamping device for a glue coating machine. Background Art

[0002] During the process of gluing semiconductor wafers, a glue spreader is often required to evenly coat the semiconductor wafers with glue to improve the quality of semiconductor wafer production.

[0003] In order to ensure the stability of the wafer during the gluing process, the wafer needs to be clamped by a fixture to improve the stability of the wafer during the gluing process. The diameter of the wafer is four to ten inches, and the size of the fixture required for wafers of different sizes is also different.

[0004] Related technology can refer to the Chinese patent with announcement number CN216988318U, which discloses a glue spreading machine for semiconductor wafer coating, including a glue spreading mechanism, a clamping mechanism and a semiconductor wafer body, the clamping mechanism is arranged on the glue spreading mechanism, the clamping mechanism includes a fixed box, the inner side of the fixed box is fixedly connected to a motor, the output shaft of the motor is fixedly connected to a driving shaft, the outer side of the driving shaft is fixedly connected to a first gear, the top of the first gear is meshed with a second gear, the inner side of the second gear is fixedly connected to a threaded rod, the outer side of the threaded rod is threadedly connected to a threaded block, the top of the threaded block is fixedly connected to a limiting block, and the top of the limiting block is fixedly connected to a movable clamping block.

[0005] When the above-mentioned glue coating machine clamps the wafer, the edge of the wafer is clamped and fixed by the movable clamping block, and the movable clamping block is driven to move by means of a threaded rod, so that wafers of different sizes can be clamped.

[0006] However, wafers of different sizes have different curvatures, while the curvature of the movable clamp is fixed. Although the movable clamp itself can change its position through linear motion to clamp wafers of different sizes, the edge curvatures of wafers of different sizes are different. When the movable clamp clamps wafers of different sizes, the fit is poor and the clamping stability of the wafer is weak.

[0007] Therefore, fixtures adapted to different curvatures are usually designed, and the ends of the fixtures are set to arcs of different curvatures to adapt to wafers of different curvatures, such as 4-inch fixtures, 6-inch fixtures, etc. However, when clamping wafers of different sizes, the corresponding fixtures need to be replaced again, which is inconvenient to use. Summary of the invention

[0008] In order to facilitate the clamping of wafers of different specifications, the present application provides a convenient multi-specification wafer clamping device for a glue coating machine.

[0009] The present application provides a portable multi-specification wafer clamping device for a glue coating machine, which adopts the following technical solution: A portable multi-specification wafer clamping device for a glue coating machine comprises a first clamping seat and a second clamping seat, wherein the end of the first clamping seat is provided with an arc-shaped first clamping plate, and the end of the second clamping seat is provided with an arc-shaped second clamping plate with a curvature different from that of the first clamping plate, the first clamping seat is provided with a hollow accommodating groove, the second clamping seat is embedded in the accommodating groove and the second clamping plate faces the first clamping plate, and the end of the first clamping seat away from the first clamping plate is rotatably connected to the second clamping seat via a rotating shaft.

[0010] By adopting the above technical solution, the second clamping seat is embedded in the receiving groove, and the first clamping plate is used to clamp a wafer of a certain specification. When the wafer specification is changed, the first clamping seat is flipped upward, and the first clamping seat is rotated to a vertical state, and the second clamping seat does not move and remains horizontal. At this time, the second clamping plate is directly opposite to the wafer and can clamp the wafer. The first clamping seat and the second clamping seat are connected by rotation. A clamp is equipped with clamping plates of two curvatures so that two wafers of different specifications can be clamped. There is no need to replace the clamp, and it can be achieved by rotating the first clamping seat, which is convenient to use.

[0011] Preferably, a rotating hole is provided on the second clamping seat, the rotating shaft is rotatably connected to the rotating hole, the rotating shaft is fixedly connected to the first clamping seat, the second clamping plate is slidably connected to the second clamping seat, a control hole is provided in the second clamping plate that is perpendicular to and connected to the rotating hole, a control rack is slidably connected to the control hole, one end of the control rack is connected to the second clamping plate, and the other end is slidably connected to the rotating hole, and a rotating gear that matches the control rack is coaxially fixed on the rotating shaft.

[0012] By adopting the above technical solution, the second clamping seat is always in a horizontal state. When the first clamping seat is in a horizontal position, the second clamping seat is embedded in the accommodating groove. The first clamping seat wraps the second clamping seat, and the first clamping plate is closer to the wafer relative to the second clamping plate, so as to clamp the wafer. When the first clamping seat is reversed upward to a vertical state and the second clamping seat is used, the rotating shaft rotates and drives the second clamping plate to move through the rotating gear and the control rack, and the second clamping plate moves forward. The second clamping plate is in the position when the first clamping plate is in a horizontal state, so as to facilitate clamping of the wafer. The control rack positions the position of the second clamping plate when it is working to ensure the clamping effect of the second clamping plate on the wafer.

[0013] Preferably, the rotating gear is an incomplete gear, including a meshing portion with a tooth groove and an idle portion with a smooth surface, and when the first clamping plate and the second clamping plate are located in the same horizontal plane, the idle portion is opposite to the control rack.

[0014] By adopting the above technical solution, when the first clamping seat rotates upward, when it rotates a certain angle first, the idle part faces the control rack and cannot drive the control rack and the second clamping plate to move. When the first clamping seat rotates a certain angle and continues to rotate, the meshing part meshes with the control rack, thereby driving the control rack and the second clamping plate to slide. This prevents the second clamping plate from being stuck in the receiving groove when the first clamping seat just rotates, thereby affecting the rotation of the first clamping seat.

[0015] Preferably, an arc-shaped limit groove is provided in the rotating hole, and a limit hole opposite to the limit groove is radially provided on the rotating shaft. A limit pin is slidably connected in the limit hole, one end of the limit pin is connected to the limit hole through a limit spring, and the other end is slidably connected to the limit groove. Concave fixing grooves are provided at both ends of the limit groove, and when the limit spring is in a natural state, the limit pin is inserted into the fixing groove.

[0016] By adopting the above technical solution, the limit groove and the limit pin limit the state of the first clamping seat. When the first clamping seat is in a horizontal state, the limit pin is inserted into the fixed groove at one end of the limit groove, thereby ensuring the stability of the first clamping seat; when the first clamping seat is in a vertical state, the limit pin is inserted into the fixed groove at the other end of the limit groove, thereby ensuring the stability of the first clamping seat and preventing it from falling.

[0017] Preferably, the fixing groove is configured to be arc-shaped, and the end of the limiting pin close to the limiting groove is configured to be arc-shaped to match the fixing groove.

[0018] By adopting the above technical solution, the limit pin is arc-shaped, which is convenient for sliding into and out of the fixed groove. When the limit slot is inserted into the fixed groove, when the operator wants to rotate the first clamping seat again, he only needs to push the clamping seat hard. The limit pin compresses the limit spring under the action of the arc structure and disengages from the fixed groove, making it convenient for the operator to use.

[0019] Preferably, a reset hole is opened in the rotating shaft, the reset hole is connected with the limiting hole, a reset rod is rotatably connected in the reset hole, a reset gear is coaxially rotatably connected on the reset rod, and a reset rack meshing with the reset gear is fixed to the end of the limiting pin away from the limiting groove.

[0020] By adopting the above technical solution, when the limit pin is stuck in the fixed groove and it is difficult to slide the limit pin out of the fixed groove by rotating the first clamping seat, the operator can rotate the reset rod, and the reset rod drives the reset rack to slide through the reset gear, thereby applying a pulling force to the limit pin and pulling it out of the fixed groove, thereby facilitating the rotation of the first clamping seat.

[0021] Preferably, a support plate for connecting to a glue coating machine is provided at the end of the second clamping seat away from the second clamping plate.

[0022] By adopting the above technical solution, the second clamping seat is connected to the glue coating machine through the support plate, thereby ensuring the stability of the second clamping seat.

[0023] Preferably, a horizontal connecting groove is opened on the side of the support plate facing the second clamping seat, a connecting block for inserting into the connecting groove is fixed on the second clamping seat, a connecting hole is vertically opened on the upper surface of the support plate, and a connecting bolt for detachably connecting to the connecting block is provided in the connecting hole.

[0024] By adopting the above technical solution, the support plate is connected to the second clamping seat in a detachable manner, so that the second clamping seat can be installed with various forms of support plates, thereby adapting to various glue coating machines with different installation methods, thereby improving the adaptability of the second clamping seat.

[0025] Preferably, a horizontal replacement groove is provided on one side of the first clamping plate facing the first clamping seat, a replacement block for inserting into the replacement groove is provided on one end of the first clamping seat facing the first clamping plate, a replacement hole connected to the replacement groove is vertically provided on the upper end surface of the first clamping plate, and a replacement bolt for detachably connecting to the replacement hole is provided in the replacement hole; the second clamping seat is also connected to the second clamping plate through the replacement block.

[0026] By adopting the above technical solution, the first clamping plate and the second clamping plate can be disassembled and replaced, so that the first clamping plate and the second clamping plate with various curvatures can be made, and the first clamping plate and the second clamping plate with different curvatures can be selected according to needs, thereby expanding the scope of application of the clamping device.

[0027] In summary, this application includes the following beneficial technical effects: Through the arrangement of the first clamping seat and the second clamping seat, when the first clamping seat is needed, the first clamping seat is rotated to a horizontal state, the second clamping seat is embedded in the accommodating groove, and the wafer is clamped and fixed by the first clamping plate; when a wafer of another specification is used, the first clamping seat is flipped to a vertical state, the second clamping seat is exposed, and the wafer is clamped by the second clamping plate. The first clamping plate and the second clamping plate have different curvatures, so that wafers of different specifications can be clamped without changing the fixture, and it is easy to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the overall structure of the embodiment; Figure 2 is a schematic diagram of the connection between the first clamping seat and the first clamping plate in the embodiment; Figure 3 is a schematic diagram of the connection between the second clamping seat and the support plate in the embodiment; Figure 4is a schematic diagram of the connection between the rotating shaft and the second clamping seat in the embodiment; Figure 5 yes Figure 4 The enlarged schematic diagram of the middle A part; Figure 6 is a schematic diagram of the connection between the reset rod and the limit pin inside the rotating shaft in the embodiment; Figure 7 Schematic diagram of the connection between the replacement block in the second clamping seat and the rotating shaft in the embodiment.

[0029] Description of reference numerals: 1. First clamping seat; 11. First clamping plate; 111. Replacement groove; 112. Replacement hole; 113. Replacement bolt; 12. Accommodation groove; 2. Second clamping seat; 21. Second clamping plate; 22. Rotation hole; 23. Control hole; 24. Limiting groove; 25. Fixed groove; 26. Connecting block; 3. Rotating shaft; 31. Rotating gear; 311. Meshing part; 312. Idle part; 32. Limiting hole; 33. Limiting pin; 34. Limiting spring; 35. Reset hole; 36. Reset rod; 37. Reset gear; 38. Reset rack; 4. Control rack; 5. Support plate; 51. Connecting groove; 52. Connecting hole; 53. Connecting bolt; 6. Replacement block. DETAILED DESCRIPTION

[0030] The present application is further described in detail below in conjunction with all the accompanying drawings.

[0031] Example

[0032] The present application embodiment discloses a portable multi-specification wafer clamping device for a glue coating machine, referring to Figure 1 , comprising a first clamping seat 1 and a second clamping seat 2, wherein a first clamping plate 11 is provided at one end of the first clamping seat 1, and a second clamping plate 21 is provided at one end of the second clamping seat 2. The first clamping plate 11 and the second clamping plate 21 have different curvatures, so that wafers of different specifications can be clamped and fixed.

[0033] Reference Figure 1 and Figure 2 A horizontal replacement groove 111 is provided on one side of the first clamping plate 11 facing the first clamping seat 1, a replacement block 6 for inserting into the replacement groove 111 is provided on one end of the first clamping seat 1 facing the first clamping plate 11, a replacement hole 112 connected to the replacement groove 111 is vertically provided on the upper end surface of the first clamping plate 11, and a replacement bolt 113 for detachably connecting to the replacement hole 112 is provided in the replacement hole 112. The second clamping seat 2 is also connected to the second clamping plate 21 through the replacement block 6.

[0034] Reference Figure 1 and Figure 2The second clamping plate 21 and the second clamping seat 2 are detachably connected, and the first clamping plate 11 and the first clamping seat 1 are detachably connected. The operator can make a plurality of first clamping plates 11 and second clamping plates 21 with different curvatures, select the corresponding first clamping plates 11 and second clamping plates 21 according to the specifications of the wafer, and install them with the first clamping seat 1 and the second clamping seat 2 respectively, thereby improving the applicable scope of the first clamping seat 1 and the second clamping seat 2.

[0035] Reference Figure 1 and Figure 3 , a support plate 5 for connecting to a glue coating machine is provided at one end of the second clamping seat 2 away from the second clamping plate 21. A horizontal connecting groove 51 is provided on the side of the support plate 5 facing the second clamping seat 2, and a connecting block 26 for inserting into the connecting groove 51 is fixed to the end of the second clamping seat 2. A connecting hole 52 communicating with the connecting groove 51 is vertically provided on the upper surface of the support plate 5, and a connecting bolt 53 for detachably connecting to the connecting block 26 is provided in the connecting hole 52. The second clamping seat 2 is detachably connected to the support plate 5 by the connecting bolt 53. Different glue coating machines and fixtures have different installation methods. The operator can make a variety of support plates 5 adapted to different types of glue coating machines. When in use, the corresponding support plate 5 is connected to the second clamping seat 2 by the connecting bolt 53 to install the second clamping seat 2, thereby improving the versatility of the second clamping seat 2.

[0036] Reference Figure 1 The width of the first clamping seat 1 is greater than that of the second clamping seat 2. The first clamping seat 1 is provided with a hollow receiving groove 12, and the second clamping seat 2 can be embedded in the receiving groove 12. When the second clamping seat 2 is embedded in the receiving groove 12, the second clamping plate 21 faces the first clamping plate 11. The second clamping seat 2 is provided with a horizontal rotation hole 22, and the first clamping seat 1 is fixed with a rotation shaft 3 that is rotatably connected to the rotation hole 22. The first clamping seat 1 is rotatably connected to the second clamping seat 2.

[0037] Reference Figures 1 to 3, the second clamping seat 2 is horizontally fixed on the glue coating machine through the support plate 5. The first clamping seat 1 is connected to the second clamping seat 2 through the rotating shaft 3. Since the curvatures of the first clamping plate 11 and the second clamping plate 21 are different, the first clamping seat 1 or the second clamping seat 2 can be selected according to the specifications of the wafer. For example, when using the first clamping seat 1, the first clamping seat 1 is rotated to a horizontal state, the second clamping seat 2 is embedded in the receiving groove 12, the first clamping seat 1 wraps the second clamping seat 2, and the first clamping plate 11 faces the wafer to clamp and fix the wafer. When using the second clamping seat 2, the first clamping seat 1 is rotated to a vertical state, the second clamping seat 2 is removed from the receiving groove 12, and the second clamping plate 21 faces the wafer to clamp and fix the wafer. When the operator applies glue to wafers of two different specifications, the operator does not need to disassemble and replace the fixture again, and only needs to rotate the first clamping seat 1 to achieve switching, which is convenient to use.

[0038] Reference Figure 4 and Figure 5 , an arc-shaped limiting groove 24 is provided in the rotating hole 22, and concave fixing grooves 25 are provided at both ends of the limiting groove 24. The arc of the limiting groove 24 is the same as the rotation arc of the first clamping seat 1. The rotating shaft 3 is provided with a limiting hole 32 facing the limiting groove 24 along the radial direction of the rotating shaft 3, and a limiting pin 33 is slidably connected in the limiting hole 32. One end of the limiting pin 33 is connected to the limiting hole 32 through a limiting spring 34, and the other end is slidably connected in the limiting groove 24. When the limiting spring 34 is in a natural state, the limiting pin 33 is inserted into the fixing groove 25.

[0039] Reference Figure 1 , Figure 4 and Figure 5 When the first clamping seat 1 is in a horizontal state, the limit pin 33 is inserted into the fixing groove 25 at one end of the limit groove 24. When the first clamping seat 1 is in a vertical state, the limit pin 33 is inserted into the fixing groove 25 at the other end of the limit groove 24. The limit groove 24 and the limit pin 33 cooperate with each other to limit and guide the movement path of the first clamping seat 1. The fixing groove 25 improves the stability of the first clamping seat 1 during operation to prevent affecting the clamping effect of the wafer.

[0040] Reference Figure 4 and Figure 5 , the fixing groove 25 is set to an arc shape, and the end of the limit pin 33 near the limit groove 24 is set to an arc shape that matches the fixing groove 25. When the first clamping seat 1 is in a horizontal state and needs to be rotated to a vertical state, the limit pin 33 needs to be pulled out of the fixing groove 25. At this time, the operator only needs to rotate the first clamping seat 1 with force, and the limit pin 33 will gradually come out of the fixing groove 25 under the action of the arc structure, which is convenient for the operator to use.

[0041] Reference Figures 4 to 6A reset hole 35 is provided in the rotating shaft 3, and the reset hole 35 is connected to the limit hole 32. A reset rod 36 is rotatably connected in the reset hole 35, and a reset gear 37 is coaxially rotatably connected to the reset rod 36. A reset rack 38 meshing with the reset gear 37 is fixed to the end of the limit pin 33 away from the limit groove 24. When the limit pin 33 is stuck in the fixed groove 25 and it is difficult to slide the limit pin 33 out of the fixed groove 25 by rotating the first clamping seat 1, the operator can rotate the reset rod 36, and the reset rod 36 drives the reset rack 38 to slide through the reset gear 37, thereby applying a pulling force to the limit pin 33, and pulling it out of the fixed groove 25, so as to facilitate the rotation of the first clamping seat 1.

[0042] Reference Figure 1 , Figure 2 and Figure 7 , the replacement block 6 on the first clamping seat 1 is fixedly connected to the first clamping seat 1. The replacement block 6 on the second clamping seat 2 is slidably connected to the second clamping seat 2, so that the second clamping plate 21 is slidably connected to the second clamping seat 2. When the first clamping seat 1 is in a horizontal state, the second clamping seat 2 is embedded in the accommodating groove 12, and the first clamping plate 11 is closer to the wafer than the second clamping plate 21. When the first clamping seat 1 is rotated to a vertical state, the second clamping plate 21 needs to be used. When the second clamping plate 21 still maintains its original position, the distance between the second clamping plate 21 and the wafer is far, and the horizontal distance of the second clamping plate 21 needs to be adjusted. Therefore, the second clamping plate 21 can be slid to put it in a position convenient for clamping the wafer.

[0043] Reference Figure 1 , Figure 2 and Figure 7 , a control hole 23 is provided in the second clamping plate 21, which is perpendicular to and connected with the rotating hole 22. A control rack 4 is fixed to the replacement block 6 in the second clamping seat 2, which is slidably connected to the control hole 23. The end of the control rack 4 away from the replacement block 6 is slidably connected to the rotating hole 22. A rotating gear 31 coaxially fixed to the rotating shaft 3 is matched with the control rack 4. The rotating gear 31 is an incomplete gear, including a meshing portion 311 with a tooth groove and an idle portion 312 with a smooth surface. When the first clamping plate 11 and the second clamping plate 21 are located in the same horizontal plane, the idle portion 312 is opposite to the control rack 4. When the first clamping plate 11 is in a vertical state, the meshing portion 311 is meshed and connected with the control rack 4.

[0044] Preferably, when the first clamping plate 11 rotates to form an angle of 30 degrees with the horizontal plane, the meshing portion 311 begins to mesh and connect with the control rack 4 .

[0045] When the first clamping seat 1 rotates upward and the rotation angle is less than 30 degrees, the idle part 312 is opposite to the control rack 4 and cannot drive the control rack 4 and the second clamping plate 21 to move. At this time, the second clamping plate 21 is stationary and will not interfere with the rotation of the first clamping seat 1. When the rotation angle of the first clamping seat 1 exceeds 30 degrees, the meshing part 311 is meshed and connected with the control rack 4, thereby driving the control rack 4 and the second clamping plate 21 to slide, and gradually driving the second clamping plate 21 to extend by itself. When the first clamping seat 1 is in a vertical state, the second clamping plate 21 also moves to the working position to clamp the wafer. The operator only needs to rotate the first clamping seat 1 to synchronously drive the second clamping plate 21 to slide, which is convenient to use and will not interfere with or affect the rotation of the first clamping seat 1. It is convenient to use.

[0046] The implementation principle of the portable multi-specification wafer clamping device for the glue coating machine of the present application is as follows: the operator selects the corresponding support plate 5 according to the model of the glue coating machine and installs it on the second clamping seat 2, and selects the corresponding first clamping plate 11 and second clamping plate 21 according to the specifications of the wafer, and respectively installs them on the first clamping seat 1 and the second clamping seat 2. Finally, when coating, when switching the specifications of the wafer, the operator realizes the switching of the clamps by rotating the first clamping seat 1, so as to facilitate the clamping of wafers of different specifications, which is convenient to use.

[0047] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A portable multi-specification wafer clamping device for a glue coating machine, characterized in that: The invention comprises a first clamping seat (1) and a second clamping seat (2); the end of the first clamping seat (1) is provided with an arc-shaped first clamping plate (11); the end of the second clamping seat (2) is provided with an arc-shaped second clamping plate (21) having a curvature different from that of the first clamping plate (11); the first clamping seat (1) is provided with a hollow receiving groove (12); the second clamping seat (2) is embedded in the receiving groove (12) and the second clamping plate (21) faces the first clamping plate (11); the end of the first clamping seat (1) away from the first clamping plate (11) is rotatably connected to the second clamping seat (2) via a rotating shaft (3).

2. The portable multi-specification wafer clamping device for a glue coating machine according to claim 1 is characterized in that: The second clamping seat (2) is provided with a rotating hole (22), the rotating shaft (3) is rotatably connected to the rotating hole (22), the rotating shaft (3) is fixedly connected to the first clamping seat (1), the second clamping plate (21) is slidably connected to the second clamping seat (2), the second clamping plate (21) is provided with a control hole (23) which is perpendicular to and connected to the rotating hole (22), the control hole (23) is slidably connected with a control rack (4), one end of the control rack (4) is connected to the second clamping plate (21), and the other end is slidably connected to the rotating hole (22), and a rotating gear (31) which matches the control rack (4) is coaxially fixed on the rotating shaft (3).

3. The portable multi-specification wafer clamping device for a glue coating machine according to claim 2 is characterized in that: The rotating gear (31) is an incomplete gear, comprising a meshing portion (311) having a tooth groove and an idle portion (312) having a smooth surface; when the first clamping plate (11) and the second clamping plate (21) are located on the same horizontal plane, the idle portion (312) is directly opposite to the control rack (4).

4. The portable multi-specification wafer clamping device for a glue coating machine according to claim 2 is characterized in that: An arc-shaped limiting groove (24) is provided in the rotating hole (22); a limiting hole (32) directly opposite to the limiting groove (24) is provided on the rotating shaft (3) in a radial direction; a limiting pin (33) is slidably connected in the limiting hole (32); one end of the limiting pin (33) is connected to the limiting hole (32) through a limiting spring (34), and the other end is slidably connected in the limiting groove (24); both ends of the limiting groove (24) are provided with inwardly concave fixing grooves (25); when the limiting spring (34) is in a natural state, the limiting pin (33) is inserted into the fixing groove (25).

5. The portable multi-specification wafer clamping device for a glue coating machine according to claim 4 is characterized in that: The fixing groove (25) is configured to be in an arc shape, and the end of the limiting pin (33) close to the limiting groove (24) is configured to be in an arc shape that matches the fixing groove (25).

6. The portable multi-specification wafer clamping device for a glue coating machine according to claim 4 is characterized in that: A reset hole (35) is provided in the rotating shaft (3), the reset hole (35) is communicated with the limiting hole (32), a reset rod (36) is rotatably connected in the reset hole (35), a reset gear (37) is coaxially rotatably connected to the reset rod (36), and a reset rack (38) meshing with the reset gear (37) is fixed to the end of the limiting pin (33) away from the limiting groove (24).

7. The portable multi-specification wafer clamping device for a glue coating machine according to claim 1 is characterized in that: The end of the second clamping seat (2) away from the second clamping plate (21) is provided with a support plate (5) for connecting to a glue coating machine.

8. The portable multi-specification wafer clamping device for a glue coating machine according to claim 7, characterized in that: A horizontal connection groove (51) is provided on one side of the support plate (5) facing the second clamping seat (2); a connection block (26) for inserting into the connection groove (51) is fixed on the second clamping seat (2); a connection hole (52) is vertically provided on the upper surface of the support plate (5); a connection bolt (53) for detachably connecting to the connection block (26) is provided in the connection hole (52).

9. The portable multi-specification wafer clamping device for a glue coating machine according to claim 1, characterized in that: A horizontal replacement groove (111) is provided on one side of the first clamping plate (1) facing the first clamping seat (1); a replacement block (6) for inserting into the replacement groove (111) is provided on one end of the first clamping seat (1) facing the first clamping plate (11); a replacement hole (112) connected to the replacement groove (111) is vertically provided on the upper end surface of the first clamping plate (11); a replacement bolt (113) for detachably connecting to the replacement hole (112) is provided in the replacement hole (112); the second clamping seat (2) is also connected to the second clamping plate (21) via the replacement block (6).

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