Transmission electron microscope detection sample grinding equipment and grinding method thereof

Abstract

The invention relates to transmission electron microscope detection sample grinding equipment and a grinding method thereof, and belongs to the technical field of metallurgical test detection sample preparation in the metallurgical industry. According to the technical scheme, a motor (5) is in driving connection with a sample grinding disc (6), the sample grinding disc (6) is rotationally connected to a base (1), the upper end of an air pipe rod (8) is in threaded connection with a feeding knob (13), the lower end of the air pipe rod (8) is connected with a suction cup (3), a vacuum pump (4) is connected with the suction cup (3) through an air pipe (9) and the air pipe rod (8), the air pipe rod (8) is rotationally connected to a rotating support (21), and the upper end of a rotating rod (19) is fixed to the rotating support (21). The lower end of the rotating rod (19) is inserted into a rotating sleeve (18), the rotating sleeve (18) is fixed on the base (1), and the sucking disc (3) is positioned on the sample grinding disc (6). Errors and damage caused by manual grinding can be avoided, the sample grinding quality is improved, and the machining time is shortened.

Description

Technical Field

[0001] The invention relates to a transmission electron microscope detection sample grinding device and a grinding method thereof, belonging to the technical field of metallurgical test detection sample preparation in the metallurgical industry. Background Art

[0002] Before the steel block sample is tested by transmission electron microscope, it is necessary to prepare the sample. The prepared transmission sample must be transparent to the electron beam, that is, the electron beam can penetrate the sample, and there must be a thin area that can be characterized by the transmission electron microscope. The thickness of the thin area is required to be less than 100nm and the diameter is 3mm. The sample preparation steps are cutting sampling, grinding, and ion thinning. The quality of grinding determines the quality of subsequent ion thinning.

[0003] The grinding of the sample is to use sandpaper of different mesh sizes, from coarse to fine, to grind and polish the sample from 0.5mm to about 30-40 microns. At present, the commonly used grinding method is to place a flat glass plate on the table, and cover the glass plate with sandpaper of different mesh sizes. The operator presses the sample on the coarse sandpaper with his hand to grind it. The thickness is continuously measured during the grinding process. When it is close to the required thickness, the fine sandpaper is replaced and the grinding is continued to the required thickness. Manual grinding is prone to problems such as uneven force on the sample, resulting in uneven thickness, unqualified samples, too long grinding time, and easy abrasion of fingers. In order to improve the quality of sample grinding, shorten the processing time, and protect the health of the operator, it is necessary to design a grinding method for transmission electron microscopy samples. Summary of the invention

[0004] The purpose of the present invention is to provide a transmission electron microscope detection sample grinding device and a grinding method thereof, which can avoid errors and damages caused by manual grinding, improve sample grinding quality, shorten processing time, and solve the problems existing in the background technology.

[0005] The technical solution of the present invention is: A transmission electron microscope detection sample grinding device comprises a base, a suction cup, a vacuum pump, a motor, an air pipe rod, an air pipe, a feed knob, a rotating sleeve, a rotating rod and a rotating bracket. The motor is drivingly connected to a grinding sample disk, the grinding sample disk is rotatably connected to the base, the upper end of the air pipe rod is threadedly connected to the feed knob, the lower end of the air pipe rod is connected to the suction cup, the vacuum pump is connected through the air pipe, the air pipe rod and the suction cup, the air pipe rod is rotatably connected to the rotating bracket, the upper end of the rotating rod is fixed to the rotating bracket, the lower end of the rotating rod is inserted in the rotating sleeve, and the rotating sleeve is fixed to the base.

[0006] The grinding sample disc is pasted with sandpaper matching with the sample to be detected by transmission electron microscope.

[0007] The size of the suction cup matches the size of the sample to be detected by the transmission electron microscope.

[0008] The suction cup is located above the sample grinding plate.

[0009] The base is also provided with a vacuum pump switch connected to the vacuum pump, a motor switch connected to the motor and a speed regulating knob.

[0010] A method for grinding a sample for transmission electron microscopy detection uses a transmission electron microscopy detection sample grinding device as defined above and is operated according to the following steps: Step 1: Stick the coarse sandpaper on the grinding plate, turn on the vacuum pump switch, and place the sample on the suction cup; Step 2: Turn the feed knob to bring the sample close to the coarse sandpaper; Step 3: Start the motor, the grinding disc starts to rotate, and the sample is ground; Step 4: After the sample is ground to a certain degree, replace the coarse sandpaper on the grinding plate with fine sandpaper and repeat the above steps until the sample meets the test requirements.

[0011] The beneficial effects of the present invention are: (1) Easy to operate and highly maneuverable. The sample adopts vacuum negative pressure adsorption method to achieve non-destructive clamping of ultra-thin samples, avoiding errors and damage caused by manual contact; (2) The present invention has high processing accuracy and can realize the processing of ultra-thin samples of 0.040±0.001mm; (3) The present invention realizes the visualization of the thickness reduction during the sample processing process, avoids repeated measurement of the sample, and greatly improves the sample processing efficiency; (4) The grinding wheel of the present invention is equipped with a speed regulation function, which can achieve stepless speed change from 0 to 7200 rpm, and can be adjusted according to the hardness and thickness of the sample material to improve the sample processing efficiency and quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a structural schematic diagram of the present invention; In the figure: base 1, screw feed 2, suction cup 3, vacuum pump 4, motor 5, sample grinding plate 6, fixing screw 7, air pipe rod 8, air pipe 9, vacuum pump switch 10, motor switch 11, speed knob 12, feed knob 13, switch button 14, unit switching button 15, reset button 16, display screen 17, rotating sleeve 18, rotating rod 19, power cord 20, rotating bracket 21. DETAILED DESCRIPTION

[0013] The present invention will be further described below by way of examples with reference to the accompanying drawings.

[0014] Refer to the attached Figure 1A transmission electron microscope sample grinding device comprises a base 1, a suction cup 3, a vacuum pump 4, a motor 5, an air pipe rod 8, an air pipe 9, a feed knob 13, a rotating sleeve 18, a rotating rod 19 and a rotating bracket 21. The motor 5 is drivingly connected to a grinding sample disk 6, and the grinding sample disk 6 is rotatably connected to the base 1. The upper end of the air pipe rod 8 is threadedly connected to the feed knob 13, and the lower end of the air pipe rod 8 is connected to the suction cup 3. The vacuum pump 4 is connected to the air pipe 9, the air pipe rod 8 and the suction cup 3. The air pipe rod 8 is rotatably connected to the rotating bracket 21, the upper end of the rotating rod 19 is fixed to the rotating bracket 21, the lower end of the rotating rod 19 is inserted into the rotating sleeve 18, and the rotating sleeve 18 is fixed to the base 1.

[0015] In this embodiment, refer to the attached Figure 1 In the present invention, the block sample is first processed into a square or round sample by wire cutting, the diameter of the round sample is 8mm~10mm, the side length of the square sample is 8mm~10mmm, and the thickness is 0.3mm~0.5mm, and then the sample is ground by grinding equipment.

[0016] The grinding device comprises a base 1 and a spiral feed 2. A vacuum pump switch 10, a motor switch 11, a speed control knob 12, and a power cord 20 are arranged on the side of the base 1. A vacuum pump 4 and a motor 5 are arranged inside the base 1. A grinding sample disk 6 and a rotating sleeve 18 are arranged on the upper platform of the base 1. A rotating rod 19 is inserted into the rotating sleeve 18. The rotating rod 19 is fixed on a rotating bracket 21. The spiral feed 2 is fixed on the rotating bracket 21. The spiral feed 2 comprises a feed knob 13, a display screen 17, a switch button 14, a unit switching button 15, and a reset button 16. An air pipe 9 is connected to the side of an air pipe rod 8. A suction cup 3 is installed at the lower end of the air pipe rod 8. The upper end of the air pipe rod 8 is threadedly connected to the feed knob 13. The speed control knob 12 can steplessly adjust the rotation speed of the grinding sample disk 6, and the speed range is 0-7200 rpm.

[0017] As shown in the figure, the outer diameter of the grinding sample disk 6 is 90mm~95mm, and the inner diameter is 30mm~32mm. It is fixed by fixing screws 7, and sandpaper of different particle sizes can be pasted on the grinding sample disk 6.

[0018] As shown in the figure, the diameter of the suction cup 3 is 6mm~8mm.

[0019] As shown in the figure, when the feed knob 13 is rotated, the downward movement distance is displayed in real time on the display screen 17 during the process of driving the tracheal rod 8 to move downward, and the downward movement distance of the minimum scale of the feed knob 13 is 0.001 mm.

[0020] As shown in the figure, the rotating rod 19 and the rotating bracket 21 can rotate freely around the rotating sleeve 18.

[0021] The use process of the present invention is as follows: Taking X80 steel plate as an example, grinding equipment accessories are made. The outer diameter of the grinding sample plate 6 is 95mm, the inner diameter is 32mm, and the diameter of the suction cup 3 is 8mm. After assembling the grinding equipment, the steel plate is first processed by wire cutting into a circular sample with a diameter of 10mm and a thickness of 0.5mm.

[0022] Place the grinding device on a stable table, stick a hollow coarse sandpaper with an outer diameter of 95mm and an inner diameter of 32mm with adhesive backing on the grinding sample plate 6, and plug the power cord 20 into the socket; Turn on the vacuum pump switch 10, and put the sample on the suction cup 3 by hand so that the sample is firmly adsorbed; Rotate the rotating rod 19 to make the sample reach above the grinding sample plate 6, and rotate the feed knob 13 downward to make the sample close to the sandpaper; Turn on the motor switch 11, the grinding plate 6 starts to rotate, and adjust the speed knob 12 to a suitable speed; Turn the feed knob 13 to make the sample drop down and contact the sandpaper, then turn on the switch button 14, press the reset button 16 to make the display screen 17 show 0.000mm, continue to turn the feed knob 13 to grind the sample, and rotate the rotating rod 19 to grind the sample evenly on the sandpaper; Observe the value on the display screen 17. When the total grinding amount is displayed as 0.40 mm, turn off the motor switch 11, remove the fixing screw 7, and replace the coarse sandpaper grinding disc with a fine sandpaper grinding disc; Repeat the above operation to continue fine grinding. The total grinding amount of fine grinding is displayed as 0.06mm. Remove the sample and measure the sample thickness. When it is 0.035mm~0.038mm, the thickness is uniform. Turn off the motor switch 11 and the vacuum pump switch 10, remove the sample, and the sample grinding before ion thinning is completed. The total time from wire cutting to grinding is 40 minutes, which is highly efficient.

Claims

1. A transmission electron microscope sample grinding device, characterized in that: The invention comprises a base (1), a suction cup (3), a vacuum pump (4), a motor (5), an air pipe rod (8), an air pipe (9), a feed knob (13), a rotating sleeve (18), a rotating rod (19) and a rotating bracket (21), wherein the motor (5) is drivingly connected to the sample grinding disc (6), the sample grinding disc (6) is rotatably connected to the base (1), the upper end of the air pipe rod (8) is threadedly connected to the feed knob (13), the lower end of the air pipe rod (8) is connected to the suction cup (3), the vacuum pump (4) is connected via the air pipe (9), the air pipe rod (8) and the suction cup (3), the air pipe rod (8) is rotatably connected to the rotating bracket (21), the upper end of the rotating rod (19) is fixed to the rotating bracket (21), the lower end of the rotating rod (19) is inserted into the rotating sleeve (18), and the rotating sleeve (18) is fixed to the base (1).

2. The transmission electron microscope sample grinding device according to claim 1, characterized in that: Sandpaper matching the sample to be detected by the transmission electron microscope is pasted on the sample grinding disc (6).

3. The transmission electron microscope sample grinding device according to claim 1, characterized in that: The size of the suction cup (3) matches the size of the sample to be detected by the transmission electron microscope.

4. The transmission electron microscope sample grinding device according to claim 1, characterized in that: The suction cup (3) is located above the sample grinding disc (6).

5. The transmission electron microscope sample grinding device according to claim 1, characterized in that: The base (1) is also provided with a vacuum pump switch (10) connected to the vacuum pump (4), a motor switch (11) connected to the motor (5), and a speed regulating knob (12).

6. A method for grinding samples for transmission electron microscopy, characterized in that: A transmission electron microscope sample grinding device as defined in claims 1 to 5 is used and operated according to the following steps: Step 1: Paste the coarse sandpaper on the grinding plate (6), turn on the vacuum pump switch (10), and place the sample on the suction cup (3); Step 2: Rotate the feed knob (13) to bring the sample close to the coarse sandpaper; Step 3: Start the motor (5), the grinding disc 6 starts to rotate, and the sample is ground; Step 4: After the sample is ground to a certain degree, replace the coarse sandpaper on the grinding plate (6) with fine sandpaper and repeat the above steps until the sample meets the test requirements.

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