Cross-chamber feeding device and method for vacuum coating

Abstract

The invention relates to a cross-chamber feeding device for vacuum coating, which comprises a chamber A, a chamber B, a carrier, a transfer device and a transfer adjusting mechanism, a transfer channel for transferring workpieces is arranged between the chamber A and the chamber B, and an opening and closing assembly for adjusting the communication state of the transfer channel is arranged at the transfer channel; a guiding and conveying assembly A used for supporting the transfer device is arranged in the cavity A, a guiding and conveying assembly B used for supporting the transfer device is arranged in the cavity B, the guiding and conveying assembly A and the guiding and conveying assembly B are arranged at intervals, the transfer device, the guiding and conveying assembly A and the guiding and conveying assembly B are in movable guiding fit in the direction A, and the direction A is the length direction of the guiding and conveying assembly A and the guiding and conveying assembly B; the transfer device and the carrier are detachably matched in an inserted mode in the A direction, and a carrying mechanism used for enabling the carrier to stay in the A cavity is arranged on the A cavity. According to the scheme, the feeding requirement for large-weight workpieces can be met, and the workpiece feeding stability is improved.

Description

Technical Field

[0001] The invention relates to the field of vacuum coating, and in particular to a cross-chamber feeding device and method for vacuum coating. Background Art

[0002] In the field of vacuum coating equipment, the process chamber and the discharge chamber are separated by double chambers. The current cross-chamber uses magnetic arms or electromagnets for loading and unloading. The magnetic or electromagnetic connection torque is limited and cannot withstand high temperatures. For heavier workpieces, such as tungsten steel die-casting molds, it is easy to cause the connecting rod to deform or break away and fail, affecting the stability of cross-chamber material transportation. Summary of the invention

[0003] The object of the present invention is to provide a cross-chamber feeding device for vacuum coating, which can realize the transfer of workpieces with large mass between chambers.

[0004] To achieve the above object, the present invention is implemented according to the technical solution described below.

[0005] A cross-chamber feeding device for vacuum coating, characterized in that it includes: a chamber A providing a place for vacuum coating of workpieces, a chamber B providing a place for loading and unloading workpieces, a carrier for supporting the workpieces, a transfer device for transferring the carrier, and a transfer adjustment mechanism for adjusting the movement of the transfer device. A transfer channel for workpiece transfer is provided between chamber A and chamber B, and an opening and closing component for adjusting the connectivity of the transfer channel is provided at the transfer channel. An A guide component for supporting the transfer device is provided in chamber A, and a B guide component for supporting the transfer device is provided in chamber B. The A guide component and the B guide component are arranged in a sequential interval, and the transfer device and the A guide component and the B guide component form an active guiding fit along the A direction, and the A direction is the length direction of the A guide component and the B guide component. The transfer device and the carrier form a detachable plug-in fit along the A direction, and a supporting mechanism for allowing the carrier to stay in chamber A is provided on chamber A.

[0006] A further solution is: the transfer device includes a transfer trolley and an A plug-in portion arranged on the transfer trolley, and the carrier has a B plug-in portion, and the A plug-in portion and the B plug-in portion form a detachable plug-in fit.

[0007] The A guiding assembly is composed of a horizontally arranged A guiding assembly, and the B guiding assembly is composed of a horizontally arranged B guiding assembly. The transfer trolley and the A guiding assembly and the B guiding assembly are rollingly or slidingly assembled.

[0008] The structures of the A guiding component and the B guiding component are the same. The A guiding component has an A guiding channel in the shape of a closed groove. The transfer trolley is constrained to move within the A guiding channel, and the A plug-in portion is located outside the A guiding channel.

[0009] The transfer trolley is provided with A1 roller and A2 roller for rolling assembly with the A guide component. The center line of the A1 roller is arranged horizontally, and the center line of the A2 roller is arranged vertically. A3 rollers are arranged at intervals along the A direction at the bottom of the A guide channel, and the center line of the A3 roller is arranged horizontally. The transfer trolley and the A guide component are connected by a rolling assembly through the A1 roller, A2 roller and A3 rollers.

[0010] The A plug-in portion includes a connecting fork with a U-shaped fork opening. The connecting fork is composed of a plate member, and the plate member is arranged vertically in the direction of its thickness. The thickness of the plates at both ends of the fork opening gradually increases along the reverse direction of A, and the spacing between the two ends of the fork opening gradually decreases along the reverse direction of A. The connecting fork is assembled and connected to the middle part of the transfer trolley through a connecting piece, and the reverse direction of A is the direction in which the mobile trolley moves from chamber A to chamber B.

[0011] The B chamber is provided with an assembly cavity arranged along the A direction, and the transport adjustment mechanism includes an electric push rod arranged in the assembly cavity, and the electric push rod is connected to the A connecting piece through a universal connector.

[0012] An A1 detection sensor and an A2 detection sensor are arranged in the A chamber or the B chamber. The A1 detection sensor and the A2 detection sensor are respectively used to detect and judge whether the transfer vehicle has reached the starting and ending positions of the moving path. An A3 detection sensor for detecting the positional relationship between the carrier and the connecting fork is arranged on the A plug-in part. The A1 detection sensor, the A2 detection sensor and the A3 detection sensor transmit the detection signals to the control device for analysis and processing. The control device adjusts the operating status of each device according to the results of the analysis and processing.

[0013] The carrier is provided with plug-in positioning holes arranged in the vertical direction, and the supporting mechanism includes a rotating lifting platform, which is rotatably and liftably installed in chamber A, and is connected to a lifting and rotating adjustment mechanism for adjusting its rotation and lifting, and a plug-in positioning pin for detachable assembly connection with the plug-in positioning hole is provided in the middle of the rotating table; a heating device for heating the workpiece is also provided in chamber A, and the heating component includes an annular heating component, which is located on the outside of the rotating lifting platform and the two are arranged concentrically, and the annular heating component is liftably installed in chamber A, and is connected to a heating and lifting adjustment mechanism for adjusting its lifting.

[0014] The present invention also provides a cross-chamber feeding method for vacuum coating, which includes the following operations.

[0015] S1: Adjust the transfer trolley to be located in chamber B. The A1 detection sensor detects that the transfer trolley is in the initial position. The A3 detection sensor detects that the carrier is in the fork of the connecting fork. The connecting fork lifts the carrier and places the workpiece to be processed on the carrier. The internal environment of chambers A and B is adjusted to meet the requirements. The transfer channel is adjusted to be in a connected state. The electric push rod is started to push the transfer trolley into chamber A. When the A2 detection sensor detects that the transfer trolley has moved to the terminal position, the electric push rod stops pushing and the rotating lifting platform is adjusted to lift it. The rotating lifting platform lifts the carrier, and the electric push rod pulls the transfer trolley back to chamber A. The A3 detection sensor detects that the carrier and the connecting fork are separated, until the A1 detection sensor detects that the transfer trolley has moved back to the initial position, and the transfer channel is adjusted to be in a closed state.

[0016] S2: Adjust the annular heating component in chamber A to rise and arrange it corresponding to the carrier, and perform process processing on the workpiece according to the preset. After the process processing is completed, adjust the annular heating component to return to the initial position, adjust the transfer channel to be in a connected state, start the electric push rod to push the transfer cart to move into chamber A, and when the A2 detection sensor detects that the transfer cart moves to the terminal position, the electric push rod stops pushing, and the A3 detection sensor detects that the carrier is located in the fork of the connecting fork, adjusts the rotary lifting platform to descend, and the carrier is lifted by the connecting fork. When the rotary lifting platform descends to the initial position, the electric push rod pulls the transfer cart back to chamber B until the A1 detection sensor detects that the transfer cart returns to the initial position, and then adjusts the transfer channel to be in a closed state to take the workpiece out of chamber B.

[0017] The above-mentioned solution provided by the present invention supports the transfer device by setting the A guide component and the B guide component to avoid the carrier being in an overhanging state for transfer, thereby meeting the feeding needs of heavy workpieces and improving the stability of workpiece feeding. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the feeding device.

[0019] Figure 2 for Figure 1 main view.

[0020] Figure 3 It is a schematic diagram of the assembly of the transfer device on the A guide component.

[0021] Figure 4 It is a schematic diagram of the structure of the transfer device.

[0022] Figure 5 A cross-sectional view of the vehicle.

[0023] Figure 6 It is a schematic diagram of the structure of the connecting fork.

[0024] Explanation of the drawing numbers: 00-workpiece, 01-A chamber, 02-B chamber, 03-rotating lifting platform, 04-plug-in positioning pin, 05-annular heating component, 06-lifting and rotating adjustment mechanism, 07-heating lifting and lowering adjustment mechanism, 08-transfer channel, 09-assembly cavity, 10-carrier, 11-A1 body, 12-A2 body, 13-annular mounting groove, 14-annular plug-in groove, 15-heat conduction hole, 16-plug-in positioning hole, 17-annular recess, 20-transfer trolley, 21-connecting fork, 22-A3 detection sensor, 23-A1 roller, 24-A2 roller, 25-universal connector, 26-connector, 27-A guide component, 28-A3 roller, 29-B guide component, 31-A1 detection sensor, 32-A2 detection sensor. DETAILED DESCRIPTION

[0025] In order to make the purpose and advantages of the present invention more clearly understood, the present invention is specifically described below in conjunction with embodiments. It should be understood that the following text is only used to describe one or several specific embodiments of the present invention, and does not strictly limit the scope of protection of the specific claims of the present invention.

[0026] As used herein, the terms "parallel," "perpendicular," and the like are not limited to their strict geometric definitions, but include tolerances for reasonable and inconsistent machining or human errors.

[0027] like Figures 1 to 3 As shown, a cross-chamber feeding device for vacuum coating includes chamber A 01 for providing a place for vacuum coating treatment of workpiece 00, chamber B 02 for providing a place for loading and unloading workpiece 00, a carrier 10 for carrying workpiece 00, a transfer device for transferring carrier 10, and a transfer adjustment mechanism for adjusting the movement of transfer device. A transfer channel 08 for transferring workpiece 00 is provided between chamber A 01 and chamber B 02, and an opening and closing component for adjusting the connection state of transfer channel 08 is provided at transfer channel 08. An A guide assembly 27 for supporting the transfer device is provided in chamber 01, and a B guide assembly 29 for supporting the transfer device is provided in chamber B 02. The A guide assembly 27 and the B guide assembly 29 are arranged in a sequential manner. The transfer device and the A guide assembly 27 and the B guide assembly 29 form a movable guide fit along the A direction. The A direction is the length direction of the A guide assembly 27 and the B guide assembly 29. The transfer device and the carrier 10 form a detachable plug-in fit along the A direction. The A chamber 01 is provided with a supporting mechanism for allowing the carrier 10 to stay in the A chamber 01. The opening and closing assembly can be specifically constituted by a gate valve provided on the transfer channel 08. The transfer device is supported by the provided A guide assembly 27 and the B guide assembly 29 to prevent the carrier 10 from being in an overhanging state for transfer, thereby meeting the feeding requirements for heavy workpieces 00.

[0028] The structure of the carrier 10 is as follows Figure 5 As shown, it includes a carrier 10 body, on which an A1 plug-in portion, an A2 plug-in portion and a supporting portion are provided. The supporting portion is used to support the workpiece 00, and the A1 plug-in portion is used to form a detachable plug-in fit with the transfer device. The transfer device is used to transport the carrier 10 along direction A, which is a horizontal direction. The A2 plug-in portion is used to form a detachable plug-in fit with the supporting mechanism along direction B. The supporting assembly is used to support the carrier 10 transported by the transfer device, and direction B is a direction arranged in a cross shape with direction A. By providing two plug-in structures in different directions, the transfer requirements of the carrier 10 can be well met, and the transfer operation is simple, which can meet the assembly requirements of the coating environment.

[0029] Specifically: Direction B is the direction of vertical arrangement. Direction B is set to be arranged vertically, so that the existing support platform in the coating chamber can be used for improvement and assembly, simplifying the equipment cost and simplifying the structure of the coating equipment. A heat conducting part is also provided on the carrier 10 body, and the heat conducting part is used to conduct heat to heat the workpiece 00 on the carrier 10 body. The setting of the heat conducting part is mainly to improve the heating effect of the workpiece 00 and improve the efficiency of the coating treatment of the workpiece 00. The supporting part is composed of an annular mounting groove 13 provided on the upper surface of the carrier 10 body, and the notch of the annular mounting groove 13 is arranged upward, and the groove width size of the annular mounting groove 13 matches the size of the workpiece 00. Through the annular groove provided, the assembly requirements of the workpiece 00 such as tungsten steel die pressing mold can be well met, the assembly operation of the workpiece 00 is simple, and the workpiece 00 can be assembled in multiples, until the rotation in the coating chamber is stable. The A1 plug-in part is composed of an annular support platform provided at the lower part of the carrier 10 body. Preferably, the carrier 10 body is a cylindrical structure, and the A1 plug-in portion is composed of an annular plug-in groove 14 provided on the side wall of the carrier 10 body. The annular plug-in groove 14 and the carrier 10 body are arranged concentrically, and the notch of the annular plug-in groove 14 points in the same radial direction as the carrier 10 body.

[0030] A more detailed solution is: the heat-conducting part is composed of heat-conducting holes 15 arranged on the bottom of the annular mounting groove 13, and the heat-conducting holes 15 are arranged at intervals along the circumference of the carrier 10 body. This embodiment can improve the heat conduction effect and reduce the weight of the carrier 10. The carrier 10 body is composed of an A1 body 11 and an A2 body 12 arranged at the upper and lower parts. The outer diameter of the A1 body 11 is larger than the outer diameter of the A2 body 12. The annular mounting groove 13 is arranged on the upper surface of the A1 body 11, and the annular plug-in groove 14 is arranged on the side wall of the A2 body 12 and adjacent to the A2 body 12. The heat-conducting holes 15 are located on the outside of the A2 body 12. The groove width of the annular plug-in groove 14 is greater than the thickness of the plate body inserted into the annular plug-in groove 14 on the connecting fork 21. Thereby ensuring the reliability of the transfer of the carrier 10. The A2 plug-in part is composed of a plug-in positioning hole 16 set in the middle of the carrier 10 body, and the length direction of the plug-in positioning hole 16 is consistent with the height direction of the carrier 10 body. The plug-in positioning hole 16 and the body of the carrier 10 are arranged concentrically, and the lower end of the plug-in positioning hole 16 is set to be an expanded hole shape. An annular recessed portion 17 is also set on the upper surface of the body of the carrier 10, and the annular recessed portion 17 is located between the annular receiving groove 13 and the plug-in positioning hole 16. The setting of the annular recessed portion 17 can reduce the weight of the carrier 10 and increase the strength of the carrier 10. The lower end of the plug-in positioning hole 16 is set to be an expanded hole shape, which is convenient for the assembly connection between the plug-in positioning pin 04 and the plug-in positioning hole 16. The upper end of the corresponding plug-in positioning pin 04 can also be set to be a pointed cone shape.

[0031] like Figure 1 , 3As shown: the transfer device includes a transfer trolley 20 and an A plug-in portion provided on the transfer trolley 20, and a B plug-in portion is provided on the carrier 10, and the A plug-in portion and the B plug-in portion form a detachable plug-in fit. Through the detachable plug-in fit, the carrier 10 and the transfer trolley 20 can be quickly and conveniently assembled and separated, meeting the operation requirements of the coating internal environment. The A guide component 27 is composed of a horizontally arranged A guide component 27, and the B guide component 29 is composed of a horizontally arranged B guide component 29. The transfer trolley 20 and the A guide component 27 and the B guide component 29 are rolled or slidably assembled. The A guide component 27 and the B guide component 29 have the same structure, and the A guide channel in the shape of a closed groove is provided on the A guide component 27. The transfer trolley 20 is constrained to move in the A guide channel, and the A plug-in portion is located outside the A guide channel. Specifically: the transfer trolley 20 is provided with A1 rollers 23 and A2 rollers 24 for rolling assembly with the A guide assembly 27. The center line of the A1 roller 23 is arranged horizontally, and the center line of the A2 roller 24 is arranged vertically. A3 rollers 28 are arranged at intervals along the A direction at the bottom of the A guide channel. The center line of the A3 rollers 28 is arranged horizontally. The transfer trolley 20 and the A guide assembly 27 are connected by rolling assembly through the A1 rollers 23, A2 rollers 24, and A3 rollers 28. The A guide assembly 27 can be composed of two L-shaped A guide rails arranged opposite to each other at intervals. The bottom vacant area between the two A guide rails is used to install the A3 roller 28. A strips are respectively arranged on the upper part of the A guide rails. The two A strips and the two A guide rails enclose a closed groove-shaped A guide channel. The transfer trolley 20 can be specifically composed of a plate. The A guide assembly 27 and the B guide assembly 29 of the above structure can well meet the requirements of the mobile guide of the transfer device, and can provide reliable support assembly for the connecting fork 21, so that the connecting fork 21 can carry out heavy lifting. The A1 roller 23 and the A2 roller 24 are respectively rolled and assembled with the horizontal guide surface and the vertical guide surface on the L-shaped A guide rail.

[0032] like Figure 6 As shown: the A plug-in portion includes a connecting fork 21, which has a U-shaped fork opening. The connecting fork 21 is composed of a plate member, and the plate member is arranged vertically in the direction of the plate thickness. The plate thickness at both ends of the fork opening gradually increases along the reverse direction of A, and the spacing between the two ends of the fork opening gradually decreases along the reverse direction of A. The connecting fork 21 is assembled and connected to the middle part of the transfer trolley 20 through a connecting member 26. The reverse direction A is the direction in which the mobile trolley moves from chamber A 01 to chamber B 02.

[0033] like Figure 1 , 2 As shown, the B chamber 02 is provided with an assembly cavity 09 arranged along the A direction, and the transport adjustment mechanism includes an electric push rod arranged in the assembly cavity 09, and the electric push rod is connected to the A connection piece 26 through a universal connector 25. The electric push rod can also be composed of an electric cylinder or other components with the same function. Figure 3 , 4 As shown, an A1 detection sensor 31 and an A2 detection sensor 32 are arranged in the A chamber 01 or the B chamber 02. The A1 detection sensor 31 and the A2 detection sensor 32 are used to detect and judge whether the transfer vehicle 20 has reached the starting and ending positions of the moving path, respectively. An A3 detection sensor 22 is arranged on the A plug-in portion to detect the positional relationship between the carrier 10 and the connecting fork 21. The A1 detection sensor 31, the A2 detection sensor 32 and the A3 detection sensor 22 transmit the detected signals to the control device for analysis and processing, and the control device adjusts the operating status of each device according to the results of the analysis and processing. The A1 detection sensor 31 and the A2 detection sensor 32 can be specifically arranged in the B chamber 02, and can be specifically arranged at both ends of the A guide assembly 27. The A1 detection sensor 31 and the A2 detection sensor 32 are arranged in the B chamber 02, and will not be affected by the high temperature heat radiation of the A chamber 01, so the control process is more reliable. The A3 detection sensor 22 can be specifically arranged on the connecting fork 21. When the carrier 10 moves into the fork of the connecting fork 21, the A3 detection sensor 22 will be triggered to detect a signal. By setting various sensors and control devices, the automatic and reliable regulation of the movement of the transfer device can be achieved. The position of the transfer trolley 20 is determined by the electric push rod in conjunction with various sensors, and there is no need to use a vacuum servo cylinder, which saves costs. The electric push rod and the transfer trolley 20 are connected using a universal connector 25. When the transfer trolley 20 is spatially displaced, the electric push rod can be protected to prevent its deformation.

[0034] The carrier 10 is provided with plug-in positioning holes 16 arranged in the vertical direction. The supporting mechanism includes a rotating lifting platform 03. The rotating lifting platform 03 is installed in the A chamber 01 in a rotating and lifting manner. The rotating lifting platform 03 is connected to a lifting and rotating adjustment mechanism 06 for adjusting its rotation and lifting. A plug-in positioning pin 04 for detachable assembly connection with the plug-in positioning hole 16 is provided in the middle of the rotating platform. A heating device for heating the workpiece 00 is also provided in the A chamber 01. The heating component includes an annular heating component 05. The annular heating component 05 is located outside the rotating lifting platform 03 and the two are arranged concentrically. The annular heating component 05 is installed in the A chamber 01 in a lifting manner. The annular heating component 05 is connected to a heating lifting adjustment mechanism 07 for adjusting its lifting. In detail, the rotating lifting platform 03 and the annular heating component 05 are located on the outside of the end of the B guide component 29 away from the A guide component 27. The carrier 10 delivered is received by the rotating lifting platform 03 to achieve reliable transfer of the carrier 10. The heating device is mainly used to achieve heating treatment of the workpiece 00 and improve the heating efficiency. The lifting and rotating adjustment mechanism 06 can be implemented according to the existing coating equipment, that is, it is composed of an A1 lifting and adjusting cylinder and an A rotating adjusting motor located outside the A chamber 01. The A1 lifting and adjusting cylinder and the A rotating adjusting motor are connected to the rotating lifting shaft installed on the lower side of the rotating lifting platform 03 through a transmission mechanism. The heating lifting and adjusting mechanism 07 is composed of two heating lifting and adjusting units, which are respectively placed on both sides of the lifting and rotating adjustment mechanism 06. The two heating lifting and adjusting units are respectively composed of heating lifting cylinders located on the lower side of the A chamber 01. The annular heating component 05 is installed on the heating bracket, and the piston rod of each heating lifting cylinder is connected to the heating lifting bracket. By adjusting the lifting and lowering movement of the rotating lifting platform 03 and the annular heating component 05, the entry and exit of the carrier 10 are facilitated.

[0035] The present invention also provides a cross-chamber feeding method for vacuum coating, which includes the following operations.

[0036] S1: Adjust the transfer trolley 20 to be located in the B chamber 02, the A1 detection sensor 31 detects that the transfer trolley 20 is in the initial position, the A3 detection sensor 22 detects that the carrier 10 is located in the fork of the connecting fork 21, the connecting fork 21 lifts the carrier 10, and the workpiece 00 to be processed is placed on the carrier 10, and the internal environment of the A chamber 01 and the B chamber 02 are adjusted to meet the requirements, and the transfer channel 08 is adjusted to be in a connected state, and the electric push rod is started to push the transfer trolley 20 into the A chamber 01. When the A2 detection sensor 32 detects that the transfer trolley 20 moves to the terminal position, the electric push rod stops pushing, and the rotating lifting platform 03 is adjusted to lift, the rotating lifting platform 03 lifts the carrier 10, and the electric push rod pulls the transfer trolley 20 back to the A chamber 01. The A3 detection sensor 22 detects that the carrier 10 and the connecting fork 21 are separated, until the A1 detection sensor 31 detects that the transfer trolley 20 moves back to the initial position, and the transfer channel 08 is adjusted to be in a closed state.

[0037] S2: Adjust the annular heating component 05 in the A chamber 01 to rise and arrange it corresponding to the carrier 10, and perform process processing on the workpiece 00 according to the preset. After the process processing is completed, adjust the annular heating component 05 to return to the initial position, adjust the transfer channel 08 to be in a connected state, start the electric push rod to push the transfer cart 20 to move into the A chamber, and when the A2 detection sensor 32 detects that the transfer cart 20 moves to the terminal position, the electric push rod stops pushing, and the A3 detection sensor 22 detects that the carrier 10 is located in the fork of the connecting fork 21, adjust the rotating lifting platform 03 to descend, and the carrier 10 is supported by the connecting fork 21. When the rotating lifting platform 03 descends to the initial position, the electric push rod pulls the transfer cart 20 back to the B chamber 02 until the A1 detection sensor 31 detects that the transfer cart 20 returns to the initial position, and then adjusts the transfer channel 08 to be in a closed state, and takes the workpiece 00 out of the B chamber 02.

[0038] In conclusion, the above-mentioned solution provided by the present invention can effectively improve the feeding stability of the workpiece 00 and meet the feeding demand for heavy-weight workpiece 00.

[0039] The above is only a preferred embodiment of the present invention. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principles of the present invention, and these improvements and modifications should also be considered as the protection scope of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to the conventional means in the art unless otherwise specified and limited.

Claims

1. A cross-chamber feeding device for vacuum coating, characterized in that: It includes chamber A which provides a place for vacuum coating treatment of workpieces, chamber B which provides a place for loading and unloading workpieces, a carrier for supporting the workpieces, a transfer device for transferring the carrier, and a transfer adjustment mechanism for adjusting the movement of the transfer device. A transfer channel for transferring workpieces is arranged between chamber A and chamber B, and an opening and closing component for adjusting the connectivity of the transfer channel is arranged at the transfer channel. An A guiding component for supporting the transfer device is arranged in chamber A, and a B guiding component for supporting the transfer device is arranged in chamber B. The A guiding component and the B guiding component are arranged in a sequential interval, and the transfer device and the A guiding component and the B guiding component form a movable guiding fit along direction A, and direction A is the length direction of the A guiding component and the B guiding component. The transfer device and the carrier form a detachable plug-in fit along direction A, and a supporting mechanism for allowing the carrier to stay in chamber A is arranged on chamber A.

2. The cross-chamber feeding device for vacuum coating according to claim 1, characterized in that: The transfer device comprises a transfer trolley and an A plug-in portion arranged on the transfer trolley, and a B plug-in portion is provided on the carrier, and the A plug-in portion and the B plug-in portion form a detachable plug-in fit.

3. The cross-chamber feeding device for vacuum coating according to claim 2, characterized in that: The A guiding assembly is composed of a horizontally arranged A guiding assembly, and the B guiding assembly is composed of a horizontally arranged B guiding assembly. The transfer trolley and the A guiding assembly and the B guiding assembly are rollingly or slidingly assembled.

4. The cross-chamber feeding device for vacuum coating according to claim 3, characterized in that: The structures of the A guiding component and the B guiding component are the same. The A guiding component has an A guiding channel in the shape of a closed groove. The transfer trolley is constrained to move within the A guiding channel, and the A plug-in portion is located outside the A guiding channel.

5. The cross-chamber feeding device for vacuum coating according to claim 4, characterized in that: The transfer trolley is provided with A1 roller and A2 roller for rolling assembly with the A guide component. The center line of the A1 roller is arranged horizontally, and the center line of the A2 roller is arranged vertically. A3 rollers are arranged at intervals along the A direction at the bottom of the A guide channel, and the center line of the A3 roller is arranged horizontally. The transfer trolley and the A guide component are connected by a rolling assembly through the A1 roller, A2 roller and A3 rollers.

6. The cross-chamber feeding device for vacuum coating according to claim 4, characterized in that: The A plug-in portion includes a connecting fork with a U-shaped fork opening. The connecting fork is composed of a plate member, and the plate member is arranged vertically in the direction of its thickness. The thickness of the plates at both ends of the fork opening gradually increases along the reverse direction of A, and the spacing between the two ends of the fork opening gradually decreases along the reverse direction of A. The connecting fork is assembled and connected to the middle part of the transfer trolley through a connecting piece, and the reverse direction of A is the direction in which the mobile trolley moves from chamber A to chamber B.

7. The cross-chamber feeding device for vacuum coating according to claim 4, characterized in that: The B chamber is provided with an assembly cavity arranged along the A direction, and the transport adjustment mechanism includes an electric push rod arranged in the assembly cavity, and the electric push rod is connected to the A connecting piece through a universal connector.

8. The cross-chamber feeding device for vacuum coating according to claim 4, characterized in that: An A1 detection sensor and an A2 detection sensor are arranged in the A chamber or the B chamber. The A1 detection sensor and the A2 detection sensor are respectively used to detect and judge whether the transfer vehicle has reached the starting and ending positions of the moving path. An A3 detection sensor for detecting the positional relationship between the carrier and the connecting fork is arranged on the A plug-in part. The A1 detection sensor, the A2 detection sensor and the A3 detection sensor transmit the detection signals to the control device for analysis and processing. The control device adjusts the operating status of each device according to the results of the analysis and processing.

9. The cross-chamber feeding device for vacuum coating according to claim 4, characterized in that: The carrier is provided with plug-in positioning holes arranged in the vertical direction, and the supporting mechanism includes a rotating lifting platform, which is rotatably and liftably installed in chamber A, and is connected to a lifting and rotating adjustment mechanism for adjusting its rotation and lifting, and a plug-in positioning pin for detachable assembly connection with the plug-in positioning hole is provided in the middle of the rotating table; a heating device for heating the workpiece is also provided in chamber A, and the heating component includes an annular heating component, which is located on the outside of the rotating lifting platform and the two are arranged concentrically, and the annular heating component is liftably installed in chamber A, and is connected to a heating and lifting adjustment mechanism for adjusting its lifting.

10. A cross-chamber feeding method for vacuum coating, comprising the following operations: S1: The transfer trolley is adjusted to be located in chamber B. The A1 detection sensor detects that the transfer trolley is in the initial position. The A3 detection sensor detects that the carrier is located in the fork of the connecting fork. The connecting fork lifts the carrier and places the workpiece to be processed on the carrier. The internal environment of chambers A and B is adjusted to meet the requirements. The transfer channel is adjusted to be in a connected state. The electric push rod is started to push the transfer trolley into chamber A. When the A2 detection sensor detects that the transfer trolley has moved to the terminal position, the electric push rod stops pushing, the rotary lifting platform is adjusted to lift, the rotary lifting platform lifts the carrier, and the electric push rod pulls the transfer trolley back to chamber A. The A3 detection sensor detects that the carrier and the connecting fork are separated, until the A1 detection sensor detects that the transfer trolley has moved back to the initial position, and the transfer channel is adjusted to be in a closed state. S2: Adjust the annular heating component in chamber A to rise and arrange it corresponding to the carrier, and perform process processing on the workpiece according to the preset. After the process processing is completed, adjust the annular heating component to return to the initial position, adjust the transfer channel to be in a connected state, start the electric push rod to push the transfer cart to move into chamber A, and when the A2 detection sensor detects that the transfer cart moves to the terminal position, the electric push rod stops pushing, and the A3 detection sensor detects that the carrier is located in the fork of the connecting fork, adjusts the rotary lifting platform to descend, and the carrier is lifted by the connecting fork. When the rotary lifting platform descends to the initial position, the electric push rod pulls the transfer cart back to chamber B until the A1 detection sensor detects that the transfer cart returns to the initial position, and then adjusts the transfer channel to be in a closed state to take the workpiece out of chamber B.

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