Diamond film manufacturing device and method

Abstract

The diamond film manufacturing device comprises a manufacturing main body box, a preparation cavity and a cleaning cavity are formed in the manufacturing main body box, a partition plate is fixedly arranged between the preparation cavity and the cleaning cavity, a through hole is formed in the middle of the partition plate, and a movable frame used for containing a substrate is movably inserted into the through hole; a clamping block is fixedly arranged on the other side of the moving frame, a moving assembly is arranged in the cleaning cavity, a collecting assembly is arranged at the bottom of the manufacturing main body box, a cleaning assembly is fixedly arranged on the top of the manufacturing main body box, and a draught fan is arranged on the side face of the manufacturing main body box. Air in the preparation cavity can be pumped out in advance while entering gas is filtered, so that the preparation environment is guaranteed, the preparation quality is guaranteed, diamond preparation, cleaning and drying are completed through the same device, diamond film preparation is completed, the preparation efficiency is improved, and time and labor are saved.

Description

Technical Field

[0001] The invention relates to the technical field of diamond film manufacturing devices, in particular to a diamond film manufacturing device and a manufacturing method thereof. Background Art

[0002] Diamond film refers to a diamond film artificially synthesized by low-pressure or normal-pressure chemical vapor deposition. Diamond film has excellent performance in wear resistance and scratch resistance. It can be used for tool coatings and mold surface coatings in mechanical processing, which can significantly improve the service life and processing accuracy of tools. It has a high thermal conductivity, about 5 times that of copper. It is an excellent thermal conductive material and has great application potential in the field of heat dissipation of electronic equipment. For example, it can be used as a heat dissipation film for high-performance chips such as CPU and GPU. It can quickly conduct the heat generated by the chip to ensure the stable operation of electronic equipment. It has high optical transmittance from ultraviolet to infrared light bands and can be used for the manufacture of optical components such as optical windows and lenses. It has important applications in high-power laser systems, infrared imaging and other fields. It can form semiconductor materials through doping, which makes it possible for its application in the field of semiconductor devices, such as for the manufacture of high-power and high-frequency electronic devices. It has good chemical stability and corrosion resistance, and can remain stable in some harsh chemical environments. It can be used for corrosion-resistant coatings in chemical, petroleum and other industries.

[0003] The traditional diamond film preparation structure and preparation method usually use a simple single structure and a single preparation method to prepare the diamond film, and the prepared diamond film cannot be cleaned, and it is not convenient to visually inspect the prepared diamond film. During the manufacturing process of the diamond film, the preparation quality of the diamond film is easily affected by various factors, such as gas source and gas ratio, carbon source concentration, hydrogen content, auxiliary gas and deposition process parameter control, such as temperature; temperature is very critical for chemical vapor deposition of diamond film, and it is necessary to select a suitable hot wire temperature and substrate temperature range to deposit high-quality diamond film, gas pressure: The gas pressure in the deposition chamber determines the density of the gas on the substrate and the collision probability between gases, deposition time: The length of the deposition time will affect the thickness and quality of the diamond film, so there is an urgent need for a manufacturing device that can meet the control of multiple factors and can clean the prepared diamond film. Summary of the invention

[0004] The object of the present invention is to provide a manufacturing device for a diamond film, so as to solve the problem that the traditional diamond film preparation structure and preparation method proposed in the above background technology usually use a simple single structure with a single preparation method to prepare the diamond film, and it is impossible to clean the prepared diamond film, and it is inconvenient to visually inspect the prepared diamond film.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a manufacturing device for diamond film, comprising a manufacturing main box, a preparation chamber and a cleaning chamber are arranged inside the manufacturing main box, partitions are fixedly arranged in the preparation chamber and the cleaning chamber, a through hole is opened in the middle of the partition, a movable rack for placing a substrate is movably inserted inside the through hole, a card block is fixedly arranged on the other side of the movable rack, a movable component is arranged inside the cleaning chamber, a collection component is arranged at the bottom of the manufacturing main box, a cleaning component is fixedly arranged on the top of the manufacturing main box, and a fan is arranged on the side of the manufacturing main box.

[0006] Preferably, the moving assembly includes a first guide rail, a second guide rail, a fixed vertical plate, an electric push cylinder, a fixed frame, a driving motor, a screw block, and a screw rod. Two first guide rails are fixedly and symmetrically arranged on the top surface of the bottom wall of the cleaning chamber. The top ends of the two first guide rails are slidably connected to two second guide rails. The clamping block is slidably clamped inside the second guide rail. A fixed vertical plate is fixedly arranged on the end of the second guide rail away from the partition. An electric push cylinder is fixedly installed on one side of the fixed vertical plate. The telescopic end of the electric push cylinder is fixedly connected to the partition. A fixed frame is symmetrically arranged on the bottom wall of the cleaning chamber. A screw rod is passed through the frame body of the fixed frame. A screw block is sleeved on the outer side of the screw rod body. The top end of the screw block is fixedly connected to the bottom surface of the second guide rail, and one end of the screw is fixedly connected to a driving motor with a controller.

[0007] Preferably, the collecting assembly comprises a collecting box and a water outlet pipe, the collecting box is arranged at the bottom of the manufacturing main body box, and the water outlet pipe is installed at the bottom of the collecting box.

[0008] Preferably, the cleaning component includes a mixing water tank, a cleaning liquid storage tank, a flow control valve, an infusion pipe, a mounting plate, a water pump, a water pipe, and a nozzle. The mixing water tank is fixedly arranged on the top of the manufacturing main box, the cleaning liquid storage tank is fixedly arranged on the top of the mixing water tank, one side of the cleaning liquid storage tank is connected to an infusion pipe with a flow control valve, a mounting plate is fixedly arranged on one side of the manufacturing main box, a water pump is fixedly installed on the top of the mounting plate, one end of the water pump is connected to a water pipe connected to the mixing water tank, and nozzles arranged equidistantly are fixedly arranged on the bottom wall of the manufacturing main box, and the nozzles are connected to the mixing water tank.

[0009] Preferably, a control box is fixedly installed on the other side of the manufacturing main box, an operation panel is fixedly installed on the side of the control box, a temperature sensor and a pressure sensor are installed on the top wall of the preparation chamber, and the temperature sensor and the pressure sensor are connected to the control box through control lines.

[0010] Preferably, heating wires are arranged at equal intervals inside the preparation chamber, and a plasma reactor for activating reaction gas is fixedly installed on an inner wall of one side of the preparation chamber.

[0011] Preferably, an air intake pipe is fixedly provided on the back of the manufacturing main box, a flow valve is fixedly installed on the outside of the air intake pipe body, one end of the air intake pipe away from the manufacturing main box is fixedly connected to a filter box, and one end of the filter box is screwed with an air pipe joint.

[0012] Preferably, the internal components of the manufacturing main body box are made of materials with high sealing, high temperature resistance and corrosion resistance. The bottom end of the manufacturing main body box is symmetrically provided with legs, and the bottom ends of the legs are fixedly provided with anti-slip pads.

[0013] Preferably, an observation window is provided on the front of the manufacturing main box, a heat insulating pad is laid on the inner wall of the cleaning chamber, and a box door is hinged on the front of the cleaning chamber.

[0014] A method for manufacturing a diamond film comprises the following steps:

[0015] S1. Connect the air inlet pipe; take a gas tank with another air pipe that stores the gas required for diamond film manufacturing, connect the air pipe on the gas tank to the air pipe joint, remove the air pipe joint from the filter box, place the filter layer that can further filter the gas inside the gas tank into the filter box, and then screw the air pipe joint to the filter box to fix the filter layer inside the filter box, and connect one of the air pipe joints to the vacuum extraction device used in conjunction with it;

[0016] S2, placing the substrate; controlling the electric push cylinder to retract, the electric push cylinder retracts to drive the movable frame to slide along the second guide rail, so that the movable frame enters the cleaning chamber from the preparation chamber, and then controlling the driving motor to rotate, the driving motor rotation drives the screw to rotate, the screw rotation is screwed with the screwing block, so that the screwing block drives the second guide rail and the fixed vertical plate to slide along the first guide rail until the movable frame moves to a contactable position, at this time, the box door is opened, and the substrate is placed on the movable frame, and then the driving motor is controlled to rotate in the opposite direction, driving the screw rotation to screw with the screwing block, so that the screwing block drives the second guide rail and the fixed vertical plate to slide in the opposite direction along the first guide rail until the movable frame corresponds to the position of the through hole, and then the electric push cylinder is controlled to extend, and the movable frame is pushed to slide along the second guide rail until the movable frame enters the preparation chamber, and the through hole is sealed at the same time;

[0017] S3, preparing diamond film; extracting the air in the reaction chamber through the vacuum extraction device to form a vacuum or low pressure environment, opening the flow valve on the air inlet pipe body, providing methane, hydrogen and other gases required for synthesizing diamond through the air inlet pipe, and controlling the gas flow rate at the same time. The gas is filtered after passing through the filter box, so that the gas purity is improved to ensure the quality of the diamond, and then the control box controls the heating wire to preheat the preparation chamber, and adjusts the heating temperature according to the data displayed on the control box. The temperature and pressure inside the preparation chamber are monitored in real time by the temperature sensor and the pressure sensor, and then transmitted to the control box through the control line. After data processing, it is intuitively displayed on the display screen on the operation panel, and then the pressure and temperature inside the preparation chamber are adjusted. At the same time, the methane, hydrogen and other gases entering the preparation chamber are activated by the plasma reactor to produce a chemical reaction, so that the diamond film is deposited on the substrate, and the internal reaction situation is observed through the observation window;

[0018] S4, cleaning and drying the formed diamond film; using the same operation steps as placing the substrate to move the mobile rack into the cleaning chamber, open the cleaning liquid storage tank, add an appropriate amount of cleaning liquid into the cleaning liquid storage tank, connect the water supply pipe to the water pump end, control the water pump to pump water into the mixing water tank, and add an appropriate amount of cleaning liquid into the mixing water tank through the flow control valve. After mixing, the cleaning water is sprayed out from the nozzle to clean the surface of the diamond film on the mobile rack. After cleaning, turn off the water pump and the flow control valve, stop the water supply, and then control the heating wire to continue heating and the fan to work, so that the temperature inside the manufacturing main box increases and the fan discharges the air with a high moisture content inside the cleaning chamber, so that the air humidity inside the cleaning chamber is reduced, and the cleaned diamond film is dried. After drying, open the box door, control the drive motor to rotate, the drive motor rotation drives the screw to rotate, the screw rotation and the screw block are screwed together, so that the screw block drives the second guide rail and the fixed vertical plate to slide along the first guide rail until the mobile rack moves to a contactable position, and the diamond film on the mobile rack is removed;

[0019] S5. Clean wastewater discharge: another water pipe is connected to the end of the outlet pipe to guide the wastewater to the discharge position. During the spray cleaning process of the diamond film, the clean water flows downward into the collection box and is discharged along the outlet pipe.

[0020] When manufacturing diamond film, a high temperature environment needs to be provided inside the preparation chamber. The setting of the heat insulation pad is used to reduce the influence of the heating wire on the internal parts of the cleaning chamber and the external parts of the manufacturing main box.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] The device is provided with a temperature sensor, a pressure sensor and a control line that cooperates with an operation panel to realize command control, and cooperates with a filter box, a vent pipe and a connected vacuum pump, so that under the unified deployment of the control box, the temperature and pressure of the preparation chamber in the manufacturing main box can be regulated, the gas entering the reaction can be filtered, and the air inside the preparation chamber can be extracted in advance to ensure the preparation environment, thereby ensuring the preparation quality;

[0023] By using a movable mobile rack, after the temperature in the preparation chamber has cooled down, the mobile rack and the substrate can be moved to the inside of the cleaning chamber, and the prepared diamond film can be cleaned through the designed mixing water tank, cleaning liquid storage tank, flow control valve, infusion tube, mounting plate, water pump, water pipe and nozzle. At the same time, the cleaning chamber is heated and dried by a heating wire and a fan so that the diamond film is dried, which makes it easier to observe the finished product. The same device is used to complete the preparation, cleaning and drying of diamonds, and the process of preparing diamond films is completed in one stop, which improves preparation efficiency and saves time and manpower. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0025] Figure 2 This is a schematic diagram of the position distribution of the fixed vertical plates of the present invention;

[0026] Figure 3 It is a schematic diagram of the position distribution of the electric push cylinder of the present invention;

[0027] Figure 4 For the present invention Figure 3 A schematic diagram of the partially enlarged structure at center A;

[0028] Figure 5 This is a schematic diagram of the distribution of through-hole positions of the present invention;

[0029] Figure 6 This is a schematic diagram of the position distribution of the heating wire and the plasma reactor of the present invention;

[0030] Figure 7 Schematic diagram of the nozzle position distribution of the present invention.

[0031] In the figure: 1, manufacturing main box; 2, preparation chamber; 3, cleaning chamber; 4, partition; 5, through hole; 6, moving frame; 7, substrate; 8, heating wire; 9, control box; 10, temperature sensor; 11, pressure sensor; 12, air intake pipe; 13, control line; 14, operation panel; 15, air pipe joint; 16, support leg; 17, flow valve; 18, filter box; 19, first guide rail; 20, second guide rail; 2 1. Fixed vertical plate; 22. Electric push cylinder; 23. Fixed frame; 24. Driving motor; 25. Screw block; 26. Screw; 27. Mixing water tank; 28. Cleaning liquid storage tank; 29. ​​Flow control valve; 30. Infusion pipe; 31. Mounting plate; 32. Water pump; 33. Water pipe; 34. Fan; 35. Observation window; 36. Collection box; 37. Water outlet pipe; 38. Block; 39. Insulation layer; 40. Nozzle. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0033] See also Figure 1-7 The present invention provides a manufacturing device for a diamond film, comprising a manufacturing main body box 1, wherein a preparation chamber 2 and a cleaning chamber 3 are arranged inside the manufacturing main body box 1, a partition 4 is fixedly arranged in the preparation chamber 2 and the cleaning chamber 3, a through hole 5 is opened in the middle of the partition 4, a moving frame 6 for placing a substrate 7 is movably inserted inside the through hole 5, one end of the moving frame 6 can seal the through hole 5, a block 38 is fixedly arranged on the other side of the moving frame 6, the block 38 can limit the moving path of the moving frame 6 so that it slides along the second guide rail 20, and the moving assembly comprises a first guide rail 19, a second guide rail 20, a fixed vertical plate 21, an electric push cylinder 22, a fixed frame 23, a driving motor 24, a screw block 25, and a screw 26 , two first guide rails 19 are fixedly and symmetrically arranged on the top surface of the bottom wall of the cleaning chamber 3, and two second guide rails 20 are slidably connected to the top ends of the two first guide rails 19, and the clamping block 38 is slidably clamped inside the second guide rail 20, and a fixed vertical plate 21 is fixedly arranged on one end of the second guide rail 20 away from the partition 4, and an electric push cylinder 22 is fixedly installed on one side of the fixed vertical plate 21, and the telescopic end of the electric push cylinder 22 is fixedly connected to the partition 4, and a fixed frame 23 is symmetrically arranged on the bottom wall of the cleaning chamber 3, and a screw rod 26 is passed through the frame body of the fixed frame 23, and a screw block 25 is sleeved on the outer side of the screw 26 rod body, and the top end of the screw block 25 is fixedly connected to the bottom surface of the second guide rail 20, and one end of the screw 26 is fixedly connected to a driving motor 24 with a controller;

[0034] When in use, the electric push cylinder 22 is controlled to contract and drive the movable rack 6 to slide along the second guide rail 20, so that the movable rack 6 enters the cleaning chamber 3 from the preparation chamber 2, and then the drive motor 24 is controlled to rotate to drive the screw 26 to rotate, and the screw 26 rotates and screws with the screwing block 25, and the screwing block 25 drives the second guide rail 20 and the fixed vertical plate 21 to slide along the first guide rail 19 until the movable rack 6 moves to a contactable position, the box door is opened, and the substrate 7 is placed on the movable rack 6, and then the drive motor 24 is controlled to rotate in the opposite direction, and the movable rack 6 enters the preparation chamber 2 according to the reverse operation steps, and the through hole 5 is sealed at the same time.

[0035] A moving component is arranged inside the cleaning chamber 3, a collecting component is arranged at the bottom of the manufacturing main box 1, the collecting component includes a collecting box 36 and a water outlet pipe 37, a collecting box 36 is arranged at the bottom of the manufacturing main box 1, a water outlet pipe 37 is installed at the bottom of the collecting box 36, a cleaning component is fixedly arranged on the top of the manufacturing main box 1, a fan 34 is arranged on the side of the manufacturing main box 1, the cleaning component includes a mixing water tank 27, a cleaning liquid storage tank 28, a flow control valve 29, a liquid infusion pipe 30, a mounting plate 31, a water pump 32, a water infusion pipe 33, a nozzle 40, and a mixing water tank is fixedly arranged on the top of the manufacturing main box 1 27, another pump body is arranged in the mixing water tank 27, and the cleaning water in the mixing water tank 27 is pressed out from the nozzle 40, a cleaning liquid storage tank 28 is fixedly arranged on the top of the mixing water tank 27, and a liquid infusion pipe 30 with a flow control valve 29 is connected to one side of the cleaning liquid storage tank 28, a mounting plate 31 is fixedly arranged on one side of the manufacturing main body box 1, a water pump 32 is fixedly installed on the top of the mounting plate 31, and one end of the water pump 32 is connected to a water infusion pipe 33 connected to the mixing water tank 27, and nozzles 40 arranged equidistantly are fixedly arranged on the bottom wall of the manufacturing main body box 1, and the nozzles 40 are connected to the mixing water tank 27;

[0036] When in use, open the cleaning liquid storage tank 28, add a proper amount of cleaning liquid into the cleaning liquid storage tank 28, connect the water supply pipeline to the water pump 32 pumping end, control the water pump 32 to pump water into the mixing water tank 27, and add a proper amount of cleaning liquid into the mixing water tank 27 through the flow control valve 29. After mixing, the cleaning water is sprayed out from the nozzle 40 to clean the surface of the diamond film on the mobile frame 6. After cleaning is completed, turn off the water pump 32 and the flow control valve 29 to stop the water supply, and then control the heating wire 8 to continue heating and the fan 34 to work. The temperature inside the manufacturing main box 1 is increased and the fan 34 discharges the air with high moisture content inside the cleaning chamber 3, so that the air humidity inside the cleaning chamber 3 is reduced, and the cleaned diamond film is dried. After the drying is completed, the box door is opened, and the drive motor 24 is controlled to rotate. The drive motor 24 rotates to drive the screw 26 to rotate. The screw 26 rotates and screws with the screw-in block 25, so that the screw-in block 25 drives the second guide rail 20 and the fixed vertical plate 21 to slide along the first guide rail 19 until the movable frame 6 moves to a contactable position, and the diamond film on the movable frame 6 is removed.

[0037] A control box 9 is fixedly arranged on the other side of the manufacturing main box 1, and an operation panel 14 is fixedly arranged on the side of the control box 9. A controller for controlling driving parts such as an electric push cylinder 22, a driving motor 24, a flow control valve 29, a water pump 32, and a fan 34 is integrated inside the control box 9. A temperature sensor 10 and a pressure sensor 11 are arranged on the top wall of the preparation chamber 2. The temperature sensor 10 and the pressure sensor 11 are connected to the control box 9 through a control line 13. Heating wires 8 are equidistantly laid inside the preparation chamber 2. A plasma reactor for activating the reaction gas is fixedly installed on the inner wall of one side of the preparation chamber 2. The back of the manufacturing main box 1 An air intake pipe 12 is fixedly arranged, and a flow valve 17 is fixedly installed on the outside of the air intake pipe 12. The end of the air intake pipe 12 away from the manufacturing main box 1 is fixedly connected to a filter box 18, and an air pipe joint 15 is screwed on one end of the filter box 18. The internal components of the manufacturing main box 1 are made of materials with high sealing and high temperature and corrosion resistance. Support legs 16 are symmetrically arranged at the bottom of the manufacturing main box 1, and anti-slip pads are fixedly arranged at the bottom of the support legs 16 to provide stable support for the manufacturing main box 1. An observation window 35 is arranged on the front of the manufacturing main box 1, and an inner wall of the cleaning chamber 3 is paved with a heat insulation layer 39, and a box door is hinged on the front of the cleaning chamber 3.

[0038] A method for manufacturing a diamond film comprises the following steps:

[0039] S1, connect the air inlet pipe 12; take a gas tank with another air pipe that stores the gas required for diamond film manufacturing, connect the air pipe on the gas tank to the air pipe joint 15, remove the air pipe joint 15 from the filter box 18, place the filter layer that can further filter the gas inside the gas tank into the filter box 18, then screw the air pipe joint 15 to the filter box 18, fix the filter layer inside the filter box 18, and connect one of the air pipe joints 15 to the vacuum extraction device used in conjunction with it;

[0040] S2, placing the substrate 7; controlling the electric push cylinder 22 to retract, the electric push cylinder 22 retracts and drives the movable frame 6 to slide along the second guide rail 20, so that the movable frame 6 enters the cleaning chamber 3 from the preparation chamber 2, and then controlling the driving motor 24 to rotate, the driving motor 24 rotates and drives the screw rod 26 to rotate, the screw rod 26 rotates and screws with the screwing block 25, the screwing block 25 drives the second guide rail 20 and the fixed vertical plate 21 to slide along the first guide rail 19 until the movable frame 6 moves to a contactable position, at this time, the box door is opened, and the substrate 7 is placed on the movable frame 6, and then the driving motor 24 is controlled to rotate in the opposite direction, driving the screw rod 26 to rotate and screw with the screwing block 25, so that the screwing block 25 drives the second guide rail 20 and the fixed vertical plate 21 to slide in the opposite direction along the first guide rail 19 until the movable frame 6 corresponds to the position of the through hole 5, and then controlling the electric push cylinder 22 to extend, pushing the movable frame 6 to slide along the second guide rail 20 until the movable frame 6 enters the preparation chamber 2, and at the same time realizes the sealing of the through hole 5;

[0041] S3, preparing diamond film; the air in the reaction chamber is extracted by a vacuum extraction device to form a vacuum or low pressure environment, the flow valve 17 on the air inlet pipe 12 is opened, and the methane, hydrogen and other gases required for synthesizing diamond are provided through the air inlet pipe 12, and the gas flow is controlled at the same time. The gas passes through the filter box 18 and is filtered, so that the gas purity is improved to ensure the quality of the diamond, and then the heating wire 8 is controlled by the control box 9 to preheat the preparation chamber 2, and the heating temperature is adjusted according to the data displayed by the control box 9. The temperature and pressure inside the preparation chamber 2 are monitored in real time by the temperature sensor 10 and the pressure sensor 11, and then transmitted to the control box 9 through the control line 13. After data processing, it is intuitively displayed on the display screen on the operation panel 14, and then the pressure and temperature inside the preparation chamber 2 are adjusted. At the same time, the methane, hydrogen and other gases entering the preparation chamber 2 are activated by the plasma reactor to produce a chemical reaction, so that the diamond film is deposited on the substrate 7, and the internal reaction situation is observed through the observation window 35;

[0042] S4, cleaning and drying the formed diamond film; using the same operation S as that of placing the substrate 7, the mobile rack 6 is moved into the cleaning chamber 3, the cleaning liquid storage tank 28 is opened, and a proper amount of cleaning liquid is added to the cleaning liquid storage tank 28, and the water supply pipeline is connected to the water pumping end of the water pump 32, and the water pump 32 is controlled to pump water into the mixing water tank 27, and at the same time, a proper amount of cleaning liquid is added to the mixing water tank 27 through the flow control valve 29. After the mixing is completed, the cleaning water is sprayed from the nozzle 40 to clean the surface of the diamond film on the mobile rack 6. After the cleaning is completed, the water pump 32 and the flow control valve 29 are closed to stop the water supply. Then, the heating wire 8 is controlled to continue heating and the fan 34 is operated, so that the temperature inside the manufacturing main box 1 is increased and the fan 34 discharges the air with high moisture content inside the cleaning chamber 3, so that the air humidity inside the cleaning chamber 3 is reduced, and the cleaned diamond film is dried. After the drying is completed, the box door is opened, and the driving motor 24 is controlled to rotate. The driving motor 24 rotates to drive the screw 26 to rotate. The screw 26 rotates and screws with the screwing block 25, so that the screwing block 25 drives the second guide rail 20 and the fixed vertical plate 21 to slide along the first guide rail 19 until the movable frame 6 moves to a contactable position, and the diamond film on the movable frame 6 is removed;

[0043] S5, clean wastewater discharge; another water pipe is connected to the end of the outlet pipe 37 to guide the wastewater to the discharge position. During the spray cleaning process of the diamond film, the clean water flows downward into the collection box 36, and the clean water is discharged along the outlet pipe 37;

[0044] When manufacturing diamond film, a high temperature environment needs to be provided inside the preparation chamber 2. The heat insulation layer 39 is provided to reduce the influence of the heating wire 8 on the internal parts of the cleaning chamber 3 and the external parts of the manufacturing main box 1 when heating.

[0045] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A diamond film manufacturing device, comprising a manufacturing main box (1), characterized in that: The manufacturing main body box (1) is provided with a preparation chamber (2) and a cleaning chamber (3) inside, and a partition (4) is fixedly provided in the preparation chamber (2) and the cleaning chamber (3), a through hole (5) is provided in the middle of the partition (4), a movable frame (6) for placing a substrate (7) is movably inserted inside the through hole (5), a block (38) is fixedly provided on the other side of the movable frame (6), a movable component is provided inside the cleaning chamber (3), a collecting component is provided at the bottom of the manufacturing main body box (1), a cleaning component is fixedly provided at the top of the manufacturing main body box (1), and a fan (34) is provided on the side of the manufacturing main body box (1).

2. The manufacturing device of a diamond thin film according to claim 1, characterized in that: The moving assembly comprises a first guide rail (19), a second guide rail (20), a fixed vertical plate (21), an electric push cylinder (22), a fixed frame (23), a driving motor (24), a screw block (25), and a screw rod (26); two first guide rails (19) are fixedly and symmetrically arranged on the top surface of the bottom wall of the cleaning chamber (3); the top ends of the two first guide rails (19) are slidably connected to two second guide rails (20); the clamping block (38) is slidably clamped inside the second guide rail (20); and one end of the second guide rail (20) away from the partition (4) is fixedly arranged A fixed vertical plate (21) is arranged, an electric push cylinder (22) is fixedly installed on one side of the fixed vertical plate (21), the telescopic end of the electric push cylinder (22) is fixedly connected to the partition (4), a fixed frame (23) is symmetrically arranged on the bottom wall of the cleaning chamber (3), a screw rod (26) is passed through the frame body of the fixed frame (23), a screw block (25) is sleeved on the outer side of the screw rod (26), the top end of the screw block (25) is fixedly connected to the bottom surface of the second guide rail (20), and one end of the screw rod (26) is fixedly connected to a driving motor (24) with a controller.

3. The manufacturing device of a diamond thin film according to claim 1, characterized in that: The collecting assembly comprises a collecting box (36) and a water outlet pipe (37); the collecting box (36) is arranged at the bottom of the manufacturing main body box (1); and the water outlet pipe (37) is installed at the bottom of the collecting box (36).

4. The manufacturing device of a diamond thin film according to claim 1, characterized in that: The cleaning assembly comprises a mixing water tank (27), a cleaning liquid storage tank (28), a flow control valve (29), a liquid infusion pipe (30), a mounting plate (31), a water pump (32), a water delivery pipe (33), and a nozzle (40). The top of the manufacturing main body box (1) is fixedly provided with a mixing water tank (27). The top of the mixing water tank (27) is fixedly provided with a cleaning liquid storage tank (28). One side of the cleaning liquid storage tank (28) is connected to a liquid infusion pipe (30) with a flow control valve (29). A mounting plate (31) is fixedly provided on one side of the manufacturing main body box (1). A water pump (32) is fixedly provided on the top of the mounting plate (31). One end of the water pump (32) is connected to a water delivery pipe (33) connected to the mixing water tank (27). The bottom wall of the manufacturing main body box (1) is fixedly provided with nozzles (40) arranged at equal intervals. The nozzles (40) are connected to the mixing water tank (27).

5. The manufacturing device of a diamond thin film according to claim 1, characterized in that: A control box (9) is fixedly arranged on the other side of the manufacturing main box (1), an operation panel (14) is fixedly arranged on the side of the control box (9), a temperature sensor (10) and a pressure sensor (11) are arranged on the top wall of the preparation chamber (2), and both the temperature sensor (10) and the pressure sensor (11) are connected to the control box (9) via a control line (13).

6. The manufacturing device of a diamond thin film according to claim 1, characterized in that: Heating wires (8) are arranged at equal intervals inside the preparation chamber (2), and a plasma reactor for activating reaction gas is fixedly installed on an inner wall of one side of the preparation chamber (2).

7. The manufacturing device of a diamond thin film according to claim 1, characterized in that: An air intake pipe (12) is fixedly arranged on the back of the manufacturing main box (1), a flow valve (17) is fixedly installed on the outside of the air intake pipe (12), one end of the air intake pipe (12) away from the manufacturing main box (1) is fixedly connected to a filter box (18), and one end of the filter box (18) is screwed with an air pipe joint (15).

8. The manufacturing device of a diamond thin film according to claim 1, characterized in that: The internal components of the manufacturing main box (1) are all made of materials with high sealing properties and high temperature resistance and corrosion resistance. The bottom end of the manufacturing main box (1) is symmetrically provided with supporting legs (16), and the bottom end of the supporting legs (16) is fixedly provided with anti-slip pads.

9. The manufacturing device of a diamond thin film according to claim 1, characterized in that: The front of the manufacturing main box (1) is provided with an observation window (35), the inner wall of the cleaning chamber (3) is paved with a heat insulation layer (39), and the front of the cleaning chamber (3) is hinged with a box door.

10. A method for manufacturing a diamond thin film according to any one of claims 1 to 9, characterized in that: The following steps are involved: S1, connecting the air inlet pipe (12); taking a gas tank storing the gas required for manufacturing the diamond film and having another air pipe, connecting the air pipe on the gas tank to the air pipe joint (15), removing the air pipe joint (15) from the filter box (18), placing a filter layer that can further filter the gas inside the gas tank into the filter box (18), then screwing the air pipe joint (15) to the filter box (18), fixing the filter layer inside the filter box (18), and connecting one of the air pipe joints (15) to a matching vacuum extraction device; S2, placing the substrate (7); controlling the electric push cylinder (22) to retract, the electric push cylinder (22) retracts to drive the movable frame (6) to slide along the second guide rail (20), so that the movable frame (6) enters the cleaning chamber (3) from the preparation chamber (2), and then controlling the driving motor (24) to rotate, the driving motor (24) rotates to drive the screw rod (26) to rotate, the screw rod (26) rotates and screws with the screwing block (25), so that the screwing block (25) drives the second guide rail (20) and the fixed vertical plate (21) to slide along the first guide rail (19), until the movable frame (6) moves to a contactable position, At this time, the box door is opened, and the substrate (7) is placed on the movable rack (6). Then, the driving motor (24) is controlled to rotate in the opposite direction, driving the screw (26) to rotate and screw with the screwing block (25), so that the screwing block (25) drives the second guide rail (20) and the fixed vertical plate (21) to slide in the opposite direction along the first guide rail (19) until the position of the movable rack (6) corresponds to the position of the through hole (5). Then, the electric push cylinder (22) is controlled to extend, pushing the movable rack (6) to slide along the second guide rail (20) until the movable rack (6) enters the preparation chamber (2), and at the same time, the through hole (5) is sealed. S3, preparing a diamond film; the air in the reaction chamber is extracted by a vacuum extraction device to form a vacuum or low pressure environment, the flow valve (17) on the air inlet pipe (12) is opened, and the methane, hydrogen and other gases required for synthesizing diamonds are provided through the air inlet pipe (12), and the flow of the gas is controlled at the same time. The gas is filtered after passing through the filter box (18), so that the gas purity is improved to ensure the quality of the diamond, and then the heating wire (8) is controlled by the control box (9) to preheat the preparation chamber (2), and the heating temperature is adjusted according to the display data of the control box (9). The sensor (10) and the pressure sensor (11) monitor the temperature and pressure inside the preparation chamber (2) in real time and transmit the data to the control box (9) through the control line (13). After data processing, the data is visually displayed on the display screen on the operation panel (14). Then, the pressure and temperature inside the preparation chamber (2) are adjusted and regulated. At the same time, the plasma reactor is used to activate the methane, hydrogen and other gases entering the preparation chamber (2) to produce a chemical reaction, so that the diamond film is deposited on the substrate (7). At the same time, the internal reaction situation is observed through the observation window (35); S4, cleaning and drying the formed diamond film; using the same operation as placing the substrate (7), the movable frame (6) is moved into the cleaning chamber (3), the cleaning liquid storage tank (28) is opened, and a proper amount of cleaning liquid is added to the cleaning liquid storage tank (28), the water supply pipeline is connected to the water pump (32) pumping end, the water pump (32) is controlled to pump water into the mixing water tank (27), and at the same time, a proper amount of cleaning liquid is added to the mixing water tank (27) through the flow control valve (29). After the mixing is completed, the cleaning water is sprayed from the nozzle (40) to clean the surface of the diamond film on the movable frame (6). After the cleaning is completed, the water pump (32) and the flow control valve (29) are closed to stop the water supply, and then the control is continued. The heating wire (8) continues to heat and the fan (34) works, so that the temperature inside the manufacturing main box (1) increases and the fan (34) discharges the air with a high moisture content inside the cleaning chamber (3), so that the humidity of the air inside the cleaning chamber (3) decreases, and the cleaned diamond film is dried. After the drying is completed, the box door is opened, and the driving motor (24) is controlled to rotate. The driving motor (24) rotates to drive the screw (26) to rotate. The screw (26) rotates and screws with the screw block (25), so that the screw block (25) drives the second guide rail (20) and the fixed vertical plate (21) to slide along the first guide rail (19) until the movable frame (6) moves to a contactable position, and the diamond film on the movable frame (6) is removed; S5, discharge of clean waste water; another water pipe is connected to the end of the outlet pipe (37) to guide the waste water to the discharge position. During the spray cleaning process of the diamond film, the clean water flows downward into the collection box (36) and is discharged along the outlet pipe (37). When manufacturing a diamond film, a high temperature environment needs to be provided inside the preparation chamber (2). The heat insulating layer (39) is provided to reduce the impact of the heating wire (8) on the internal parts of the cleaning chamber (3) and the external parts of the manufacturing main box (1).

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