Cooling structure for high-temperature cavity

Abstract

The invention relates to the technical field of high-temperature cavities, in particular to a cooling structure for a high-temperature cavity, which comprises a cooling sleeve sleeved outside a combustion cavity. A spiral channel is formed in the inner wall of the cooling sleeve in the circumferential direction of the cooling sleeve, and a spiral cooling channel for cooling water to pass through is formed between the spiral channel and the outer wall of the combustion cavity. The spiral channel is formed in the inner side wall of the cooling sleeve, the cooling sleeve can meet the requirements for uniformity of the cooling effect of the combustion cavity and stability of flowing of cooling water, and the spiral cooling channel is adopted for the cooling structure in consideration that the combustion cavity is cylindrical and large in length diameter ratio. And the flow guide assembly is arranged in the spiral cooling channel, so that cooling water flows in the spiral cooling channel and is closer to the inner wall of the combustion cavity, the heat dissipation efficiency of the cooling system is improved, and the heat exchange efficiency and the uniformity of the cooling effect are greatly improved.

Description

Technical Field

[0001] The present invention relates to the technical field of high temperature cavities, and in particular to a cooling structure for a high temperature cavity. Background Art

[0002] The combustion chamber in the semiconductor exhaust treatment system is a high-temperature chamber. In the semiconductor exhaust treatment system, the combustion chamber is generally cooled by providing an annular cooling sleeve wall on the outside of the combustion chamber, and a plurality of water inlet pipes are spaced apart on the outside of the cooling sleeve in the axial direction perpendicular to the cooling sleeve. In the existing system, a plurality of spaced-apart water inlet pipes are generally provided on the axial direction of the outer wall of the cooling sleeve. The cooling water is filled in the water inlet pipe between the cooling sleeve and the combustion chamber to form a water-cooled wall that can cool the combustion chamber. That is, the water-cooled wall plays a vital role in the cooling process of the combustion chamber. However, the water flow from different heights of the traditional cooling wall is uneven, and the heat taken away from the corresponding cooling place is correspondingly different, and the water will splash directly, which will cause the existing cooling wall to often have problems such as insufficient cooling intensity and uneven cooling, resulting in excessively high temperature inside the combustion chamber, increasing safety hazards such as explosion. Specifically, the traditional water-cooled wall does not have good heat dissipation efficiency. When the heat dissipation burden is heavy, the increase in water velocity will greatly increase energy consumption and affect economy. At the same time, the traditional combustion chamber water-cooled wall will have uneven heat dissipation due to the uneven water flow in the water outlet pipe, which will cause heat accumulation and explosion, resulting in losses. Summary of the invention

[0003] In view of the above-mentioned shortcomings and deficiencies of the prior art, the present invention provides a cooling structure for a high-temperature cavity, which solves the technical problems of insufficient cooling intensity, uneven cooling, etc., which lead to excessively high temperature inside the combustion chamber and increase safety hazards such as explosion.

[0004] In order to achieve the above object, the main technical solutions adopted by the present invention include:

[0005] An embodiment of the present invention provides a cooling structure for a high-temperature cavity, comprising a cooling sleeve sleeved outside a combustion chamber;

[0006] The inner wall of the cooling sleeve is provided with a spiral channel along its circumference, and a spiral cooling channel for cooling water to pass through is formed between the spiral channel and the outer wall of the combustion chamber.

[0007] Optionally, flow guide components are arranged at intervals in the spiral cooling channel;

[0008] The flow guide assembly can make the cooling water close to the outer wall of the combustion chamber.

[0009] Optionally, the guide assembly includes a plurality of guide plate units, each of which is arranged in the spiral cooling channel of each layer, and the guide plate unit includes a plurality of guide plates arranged at intervals along the circumference of the spiral cooling channel.

[0010] Optionally, the guide plates are arranged at intervals along the circumference of the spiral cooling channel.

[0011] Optionally, the guide plate is bent toward the outer wall of the combustion chamber to form an arc-shaped structural member, and the bending arc of the guide plate is 120°-135°.

[0012] Optionally, the helix angle of the spiral cooling channel is α, the axial height of the cooling sleeve is H, the helix length is L, and α=arcsin(H / L).

[0013] Optionally, the cooling sleeve includes a coaxially arranged inner sleeve, an outer sleeve sleeved on the outside of the inner sleeve, and an annular sealing end cover for sealing the inner sleeve and both ends of the outer sleeve up and down, and there is an annular gap between the inner sleeve and the outer sleeve, and the gap serves as a cooling chamber for cold air to cool the inner sleeve.

[0014] Optionally, a water inlet and a water outlet connected to the spiral cooling channel are respectively formed at the upper and lower ends of the outer wall of the inner sleeve.

[0015] Optionally, an air inlet and an air outlet connected to the spiral cooling channel are respectively formed at upper and lower ends of the outer wall of the cooling sleeve.

[0016] Optionally, the cooling sleeve is made of copper.

[0017] The beneficial effects of the present invention are as follows: a cooling structure for a high-temperature cavity of the present invention can make the cooling sleeve satisfy the uniformity of the cooling effect and the stability of the cooling water flow for the combustion chamber by providing a spiral channel on the inner wall of the cooling sleeve. Considering that the combustion chamber is cylindrical and has a relatively large length-to-diameter ratio, the cooling structure adopts a spiral cooling channel. A flow guide component is arranged inside the spiral cooling channel, so that the cooling water flows in the spiral cooling channel closer to the inner wall of the combustion chamber, thereby improving the heat dissipation efficiency of the cooling system. Compared with the existing annular water-cooled wall, the cooling structure reduces the influence of gravity and centrifugal force on the cooling water during the flow process by providing a flow guide component, and reduces the adhesion effect to a certain extent, so that the cooling water is evenly distributed in the spiral cooling channel close to the inner wall of the combustion chamber, greatly improving the heat exchange efficiency and the uniformity of the cooling effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the cooling structure for a high-temperature cavity of the present invention;

[0019] Figure 2 for Figure 1 Schematic diagram of the inclined three-dimensional structure;

[0020] Figure 3 for Figure 1 The structure is shown as an angled top view;

[0021] Figure 4 Figure 1 Schematic diagram of the cross-section structure in ;

[0022] Figure 5 for Figure 1 The cross-sectional structure is shown in top view.

[0023] Description of Reference Numerals

[0024] 1: cooling sleeve; 11: inner sleeve; 12: outer sleeve; 13: cooling chamber;

[0025] 2: spiral channel;

[0026] 3: guide assembly; 31: guide plate;

[0027] 4: Air inlet;

[0028] 5: air outlet;

[0029] 6: Water inlet;

[0030] 7: Water outlet. DETAILED DESCRIPTION

[0031] In order to better explain the present invention and facilitate understanding, the present invention is described in detail below through specific implementation modes in conjunction with the accompanying drawings.

[0032] See attached Figure 1-2 As shown, a cooling structure for a high temperature cavity proposed in an embodiment of the present invention is Figure 4 The position of the middle air inlet 4 is defined as "lower" relative to the position of the outer sleeve 12. It includes a cooling sleeve 1 sleeved outside the combustion chamber. The inner wall of the cooling sleeve 1 is provided with a spiral channel 2 along its circumference, and a spiral cooling channel for cooling water to pass through is formed between the spiral channel and the outer wall of the combustion chamber.

[0033] Furthermore, flow guide components 3 are arranged at intervals in the spiral cooling channel. The flow guide components 3 can make the cooling water close to the outer wall of the combustion chamber.

[0034] In this embodiment, a cooling structure for a high-temperature cavity, specifically, a new type of inner cavity structure combustion cavity water cooling structure with high efficiency and uniform heat dissipation, is provided with a spiral channel 2 on the inner wall of the cooling sleeve 1, so that the cooling sleeve 1 can meet the uniformity of the cooling effect and the stability of the cooling water flow for the combustion cavity. Considering that the combustion cavity is cylindrical and has a relatively large length-to-diameter ratio, the cooling structure adopts a spiral cooling channel. And a guide component 3 is arranged inside the spiral cooling channel, so that the cooling water flows in the spiral cooling channel closer to the inner wall of the combustion cavity, thereby improving the heat dissipation efficiency of the cooling system. Compared with the existing annular water-cooled wall, the cooling structure reduces the influence of gravity and centrifugal force on the cooling water during the flow process by setting the guide component, and reduces the adhesion effect to a certain extent, so that the cooling water is evenly distributed in the spiral cooling channel close to the inner wall of the combustion cavity, greatly improving the heat exchange efficiency and the uniformity of the cooling effect. Specifically, through the spiral channel 2 and the guide component 3 arranged in the spiral channel 2. Changing the movement state of cooling water can achieve uniform cooling and further increase the cooling intensity, ultimately achieving the purpose of reducing the temperature inside the combustion chamber to prevent heat accumulation and explosion. This solves the problem that the traditional water-cooled wall does not have good heat dissipation efficiency. When the heat dissipation burden is heavy, the increase in water velocity will greatly increase energy consumption and affect economic efficiency. At the same time, the traditional combustion chamber water-cooled wall will have uneven heat dissipation, causing heat accumulation and explosion, resulting in losses.

[0035] Furthermore, the guide assembly 3 includes a plurality of guide plate units, each of which is arranged in the spiral channel 2 of each layer, and the guide plate unit includes a plurality of guide plates 31 arranged at intervals along the circumference of the spiral channel 2. It should be noted that the guide plates are arranged inside the spiral water channel so that the cooling water flows closer to the inner wall of the water channel in the cooling water channel, thereby improving the heat dissipation efficiency of the cooling system. Compared with the existing spiral water-cooled wall, this cooling structure reduces the influence of gravity and centrifugal force on the cooling water during the flow process, and reduces the adhesion effect to a certain extent, so that the cooling water is evenly distributed in the cooling water channel close to the inner wall of the combustion chamber, which greatly improves the heat exchange efficiency and the uniformity of the cooling effect.

[0036] Furthermore, four guide plates 31 are arranged at intervals along the circumference of the spiral cooling channel. Each layer of the spiral channel 2 is provided with four guide plates, which can play a good role in changing the flow direction of the cooling water. The cooling water is evenly distributed in the cooling water channel close to the inner wall of the combustion chamber, which greatly improves the heat exchange efficiency and the uniformity of the cooling effect.

[0037] Further, the guide plate 31 is an arc-shaped structural member. Further, the guide plate 31 is bent toward the outer wall of the combustion chamber. Further, the curvature of the guide plate 31 is 120°-135°.

[0038] Furthermore, the helix angle of the spiral cooling channel is α, the axial height of the cooling sleeve 1 is H, the helix length is L, and α=arcsin(H / L).

[0039] Furthermore, the cooling sleeve 1 includes a coaxially arranged inner sleeve 11, an outer sleeve 12 sleeved outside the inner sleeve 11, and an annular sealing end cap (not shown in the figure) for sealing the inner sleeve 11 and the outer sleeve 12 at both ends. There is an annular gap between the inner sleeve 11 and the outer sleeve 12, and the gap serves as a cooling chamber 13 for cold air to cool the inner sleeve 11. The purpose of the outer sleeve 12 is to avoid contact with the outside world and to avoid injuries to the operator. Of course, the outer sleeve 12 and the inner sleeve 11 can be integrally formed to save processing costs. And a temperature control automatic alarm system is added to the outer wall of the outer sleeve 12. It is convenient for the operator to understand the internal cooling situation immediately.

[0040] The inner sleeve 11 has a water inlet 4 and a water outlet 5 at the upper and lower ends of its outer wall, respectively, which are connected to the spiral cooling channel.

[0041] Furthermore, the upper and lower ends of the outer wall of the outer sleeve 12 are respectively provided with an air inlet 4 and an air outlet 5 connected to the cooling chamber 13. In this embodiment, it is equivalent to using an external compressor to compress air and pass it into the cooling chamber 13 for secondary cooling, and it can also prevent the circulating water of the inner sleeve 11 from leaking.

[0042] Furthermore, the cooling sleeve 1 is made of copper, which increases the contact area between the water-cooled wall copper inner sleeve and the cooling water to improve the cooling strength.

[0043] It should also be noted that, in this embodiment, the attack angle and shape of the flow guide plate inside the water-cooled wall of the combustion chamber are improved, and cooling structures with different structures are designed for different heat sources.

[0044] In the description of the present invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0045] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] In the present invention, unless otherwise clearly specified and limited, when a first feature is “on” or “below” a second feature, it may be that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, when a first feature is “above”, “above” or “above” a second feature, it may be that the first feature is directly above or obliquely above the second feature, or it may simply mean that the first feature is higher in level than the second feature. When a first feature is “below”, “below” or “below” a second feature, it may be that the first feature is directly below or obliquely below the second feature, or it may simply mean that the first feature is lower in level than the second feature.

[0047] In the description of this specification, the description of the terms "one embodiment", "some embodiments", "embodiment", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0048] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may alter, modify, replace and modify the above embodiments within the scope of the present invention.

Claims

1. A cooling structure for a high temperature cavity, characterized in that: It comprises a cooling sleeve (1) sleeved outside the combustion chamber; The inner wall of the cooling sleeve (1) is provided with a spiral channel (2) along its circumference, and a spiral cooling channel for cooling water to pass through is formed between the spiral channel and the outer wall of the combustion chamber.

2. The cooling structure for a high temperature cavity according to claim 1, characterized in that: Flow guide components (3) are arranged at intervals in the spiral cooling channel; The flow guide component (3) can allow the cooling water to be close to the outer wall of the combustion chamber.

3. The cooling structure for a high temperature cavity according to claim 2, characterized in that: The guide assembly (3) comprises a plurality of guide plate units, each of which is arranged in the spiral cooling channel of each layer, and the guide plate unit comprises a plurality of guide plates (31) arranged at intervals in the circumferential direction of the spiral cooling channel.

4. The cooling structure for a high temperature cavity according to claim 3, characterized in that: Four guide plates (31) are arranged at intervals along the circumference of the spiral cooling channel.

5. The cooling structure for a high temperature cavity according to claim 4, characterized in that: The guide plate (31) is bent toward the outer wall of the combustion chamber to form an arc-shaped structural member, and the curvature of the guide plate (31) is 120°-135°.

6. The cooling structure for a high temperature cavity according to claim 1, characterized in that: The helix angle of the spiral cooling channel is α, the axial height of the cooling sleeve (1) is H, the helix length is L, and α=arcsin(H / L).

7. The cooling structure for a high temperature cavity according to claim 1, characterized in that: The cooling sleeve (1) comprises a coaxially arranged inner sleeve (11), an outer sleeve (12) sleeved outside the inner sleeve (11), and an annular sealing end cover for sealing the inner sleeve (11) and the outer sleeve (12) at both ends, wherein an annular gap is provided between the inner sleeve (11) and the outer sleeve (12), and the gap serves as a cooling chamber (13) for cold air to cool the inner sleeve (11).

8. The cooling structure for a high temperature cavity according to claim 7, characterized in that: The upper and lower ends of the outer wall of the inner sleeve (11) are respectively provided with a water inlet (4) and a water outlet (5) which are connected to the spiral cooling channel.

9. The cooling structure for a high temperature cavity according to claim 7, characterized in that: An air inlet (4) and an air outlet (5) which are in communication with the cooling cavity (13) are respectively provided at the upper and lower ends of the outer wall of the outer sleeve (12).

10. The cooling structure for a high temperature cavity according to claim 1, characterized in that: The cooling sleeve (1) is made of copper.

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