Two-dimensional laser scanning galvanometer device with same-height incoming light and outgoing light and use method of two-dimensional laser scanning galvanometer device

Abstract

The invention discloses a two-dimensional laser scanning galvanometer device with the same incident light and incident light height and a using method thereof.The two-dimensional laser scanning galvanometer device comprises an optical flat plate which is arranged to be a square plate, a mounting base which is arranged above one corner of the optical flat plate and is in a cube shape, and a containing hole which is formed in the front side face of the mounting base and is used for containing the incident light and the incident light, and an oblique square prism is mounted in the placement hole. According to the invention, the rhombic prismatic prism is additionally arranged at the entrance of the incident beam, so that after the incident beam is reflected by the rhombic prismatic prism, the X galvanometer and the Y galvanometer in sequence, the height of the emergent beam is still the same as that of the incident beam, and supporting seats with different heights are not required to be used; the two-dimensional laser galvanometer device can be installed and debugged in the coaxial cage type system only by rotating the two-dimensional laser galvanometer device, the debugging difficulty is greatly reduced, the space occupied by an optical path is reduced, the two-dimensional laser galvanometer device is convenient and stable to construct, and the two-dimensional laser galvanometer device can be conveniently used in the coaxial cage type system.

Description

Technical Field

[0001] The present invention specifically relates to a two-dimensional laser scanning galvanometer device with input and output light at the same height and a method for using the same. Background Art

[0002] The two-dimensional laser galvanometer device is a prism servo control system composed of a driver board and a high-speed oscillating motor. It features high precision, high speed, and high repeatability. It is widely used in laser marking, laser engraving, stage lighting control, laser welding, and other fields. Its basic principle is to control the deflection angle of the reflective lens through the combination of the driver board and the high-speed oscillating motor, thereby achieving precise guidance and scanning of the laser beam. However, in actual use of the existing two-dimensional laser galvanometer device, when the incident light and the outgoing light are parallel to the table, there will be a certain height difference between the incident light and the outgoing light. During the construction and application of the coaxial cage system, it is necessary to use support bases of different heights to fix the incident light path end and the outgoing light path end, which increases the difficulty of installation and debugging of the two-dimensional laser galvanometer device in the coaxial cage system and makes it inconvenient to use.

[0003] Therefore, it is necessary to invent a two-dimensional laser scanning galvanometer device with the same height of input and output light and a method of using the same to solve the above problems. Summary of the Invention

[0004] (1) Purpose of the invention The purpose of the present invention is to provide a two-dimensional laser scanning galvanometer device with the same height for input and output light, and a method for using the same device. By adding a rhombus-shaped prism at the entrance of the incident light beam, the incident light beam is reflected by the rhombus-shaped prism, the X galvanometer, and the Y galvanometer in succession, and the height of the output light beam remains the same as the incident light beam. There is no need to use support bases of different heights, and the two-dimensional laser galvanometer device can be installed and debugged in a coaxial cage system. The debugging difficulty is greatly reduced, the space occupied by the optical path is reduced, and the installation becomes convenient and stable, which facilitates the use of the two-dimensional laser galvanometer device in the coaxial cage system to solve the above-mentioned shortcomings in the technology.

[0005] (2) Technical solution In order to achieve the above-mentioned object, the present invention provides the following technical solution: a two-dimensional laser scanning galvanometer device with the same height of input and output light, comprising an optical flat plate, wherein the optical flat plate is configured as a square plate; A mounting seat is provided above a corner of the optical plate, and the mounting seat is provided in a cube shape; A placement hole is provided on the front side of the mounting seat, wherein a rhombus-shaped prism is installed in the placement hole; The mounting holes are formed on the rear side of the mounting base and on two side surfaces adjacent to the placement holes and located outside the optical plate; The Y-axis motor is installed in a mounting hole located on the rear side of the mounting base, and the X-axis motor is installed in another mounting hole; Among them, the Y-axis motor output shaft end is installed with a Y galvanometer, and the X-axis motor output shaft end is installed with an X galvanometer.

[0006] Preferably, observation holes are provided on the top surface, the bottom surface, and the three side surfaces adjacent to the placement hole and located inside the optical flat plate of the mounting seat.

[0007] Preferably, fixing holes are provided at four corners of the four sides of the mounting seat, and the center distance between two adjacent fixing holes on the same side is set to 30 mm.

[0008] Preferably, cage rods are installed in the four fixing holes corresponding to the X-axis motor and the four fixing holes corresponding to the Y-axis motor, and the four cage rods are arranged as a group, and each group of cage rods is interspersed with a number of support seats.

[0009] Preferably, the bottom of the support base is connected to the optical flat plate via a fastener, the mounting base is connected to the optical flat plate via the support base, and a light hole is provided on the top of each support base.

[0010] Preferably, the cross section of the rhombus-shaped prism is a parallelogram, and the acute angle is 45 degrees. The rhombus-shaped prism is installed in the placement hole with the emission surface facing inward and the second reflection surface facing downward.

[0011] Preferably, the placement hole consists of an inner hole and an outer groove, wherein the inner hole is used to engage the rhombic prism.

[0012] Preferably, a sealing plate is provided inside the outer groove, and the sealing plate is connected to the mounting seat via a fastener, and is used to limit the position of the rhombus-shaped prism.

[0013] Preferably, the angle between the initial state plane of the X galvanometer and the Y galvanometer and the horizontal plane is 45 degrees.

[0014] A method for using a two-dimensional laser scanning galvanometer device with input and output light at the same height comprises the following steps: S1. Adjust the angle and position of the incident light beam so that the incident light beam is perpendicular to the outer side surface of the rhombus prism, that is, the upper edge of the incident surface, and is vertically transmitted to the inside of the rhombus prism; S2. As the light beam continues to input, it will first illuminate the center of the top inclined surface of the rhombus prism. At this time, the light beam is reflected by the top inclined surface, that is, the first reflecting surface, at a 90-degree angle with the incident light, and continues to transmit downward along the inside of the rhombus prism; S3, after the light beam is transmitted downward for 8.4 mm, it reaches the bottom slope of the rhombus prism, which is the center of the second reflecting surface. Under the reflection of the bottom slope, it is parallel to the incident light and transmits outward along the inside of the rhombus prism. S4. The light beam propagating along a straight line will eventually be emitted through the inner side of the rhombus prism, that is, the exit surface. After transmitting a certain distance inside the mounting base, it will directly illuminate the center of the X galvanometer mirror. After being reflected by the X galvanometer mirror, the light beam will be transmitted upward to the center of the Y galvanometer mirror. After being reflected by the Y galvanometer mirror, the light beam will eventually be emitted through the observation hole located on the inner side of the optical plate at the same height as the incident light.

[0015] Compared with the prior art, the beneficial effects of the above technical solution of the present invention are: The present invention adds a rhombus-shaped prism at the entrance of the incident light beam, and the cross section of the rhombus-shaped prism is a parallelogram with an acute angle of 45 degrees. The rhombus-shaped prism is installed in a placement hole with an exit surface facing inward and a second reflection surface facing downward. Therefore, after the incident light beam is reflected by the rhombus-shaped prism, the X galvanometer, and the Y galvanometer in succession, the height of the exit light beam relative to the horizontal plane remains the same as that of the incident light beam, and there is no height difference between the two. Therefore, during the construction and application of the coaxial cage system, it is unnecessary to use support seats of different heights, and the two-dimensional laser galvanometer device can be installed and debugged in the coaxial cage system. The debugging difficulty is greatly reduced, the space occupied by the optical path is reduced, and the construction becomes convenient and stable, which facilitates the use of the two-dimensional laser galvanometer device in the coaxial cage system. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments described in the present invention. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0017] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 Schematic diagram of the connection structure between the rhombic prism and the mounting base of the present invention; Figure 3 An exploded view of the mounting base, X-axis motor, Y-axis motor, and sealing plate of the present invention; Figure 4 A schematic diagram of the connection structure between the rhombus-shaped prism and the mounting base according to another perspective of the present invention; Figure 5 It is a three-dimensional diagram of the present invention.

[0018] Description of reference numerals: 1 optical plate, 2 mounting seat, 3 placement hole, 31 inner hole, 32 outer hole, 33 sealing plate; 4 rhombic prism, 5 mounting hole, 6 Y-axis motor, 7 X-axis motor, 8 Y galvanometer, 9 X galvanometer, 10 observation hole, 11 fixing hole, 12 cage rod, 13 support base, 14 optical aperture. DETAILED DESCRIPTION

[0019] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0020] The present invention provides Figure 1-5 The two-dimensional laser scanning galvanometer device shown in the figure has the same height for input and output light, and includes an optical plate 1, which is configured as a square plate; A mounting base 2 is provided above a corner of the optical plate 1 and is in a cube shape; A placement hole 3 is provided on the front side of the mounting base 2, and a rhombus-shaped prism 4 is installed inside the placement hole 3; Mounting holes 5 are provided on the rear side of the mounting base 2 and on two side surfaces adjacent to the placement holes 3 and located outside the optical plate 1; The Y-axis motor 6 is installed in the mounting hole 5 located on the rear side of the mounting base 2, and the X-axis motor 7 is installed in the other mounting hole 5; Among them, a Y galvanometer 8 is installed at the end of the output shaft of the Y-axis motor 6, and an X galvanometer 9 is installed at the end of the output shaft of the X-axis motor 7.

[0021] In one embodiment, observation holes 10 are formed on the top surface, the bottom surface, and the three side surfaces of the mounting base 2 adjacent to the placement hole 3 and located inside the optical plate 1 .

[0022] In one embodiment, fixing holes 11 are provided at four corners of the four sides of the mounting base 2 , and the center distance between two adjacent fixing holes 11 on the same side is set to 30 mm.

[0023] In one embodiment, cage rods 12 are installed in the four fixing holes 11 corresponding to the X-axis motor 7 and the four fixing holes 11 corresponding to the Y-axis motor 6. The four cage rods 12 are arranged as a group, and each group of cage rods 12 is interspersed with several support seats 13.

[0024] In one embodiment, the bottom of the support base 13 is connected to the optical plate 1 via fasteners, the mounting base 2 is connected to the optical plate 1 via the support base 13 , and a light hole 14 is formed on the top of each support base 13 .

[0025] In one embodiment, the cross section of the rhombic prism 4 is a parallelogram, and the acute angle is 45 degrees. The rhombic prism 4 is installed in the placement hole 3 with the emission surface facing inward and the second reflection surface facing downward.

[0026] In one embodiment, the placement hole 3 consists of an inner hole 31 and an outer groove 32 , wherein the inner hole 31 is used to engage the rhombic prism 4 .

[0027] In one embodiment, a sealing plate 33 is provided inside the outer groove 32 , and the sealing plate 33 is connected to the mounting seat 2 via fasteners, and is used to limit the position of the rhombus-shaped prism 4 .

[0028] In one embodiment, the angle between the initial plane of the X galvanometer mirror 9 and the Y galvanometer mirror 8 and the horizontal plane is 45 degrees.

[0029] A method for using a two-dimensional laser scanning galvanometer device with input and output light at the same height comprises the following steps: S1. Adjust the angle and position of the incident light beam so that the incident light beam is perpendicular to the outer side surface of the rhombus prism 4, that is, the upper edge of the incident surface, and is vertically transmitted to the inside of the rhombus prism 4; S2. As the light beam continues to be input, it will first illuminate the center of the top inclined surface of the rhombus prism 4. At this time, the light beam is reflected by the top inclined surface, that is, the first reflecting surface, at a 90-degree angle with the incident light, and continues to transmit downward along the inside of the rhombus prism 4; S3, after the light beam is transmitted downward for 8.4 mm, it reaches the bottom inclined surface of the rhombus prism 4, which is the center of the second reflecting surface. After being reflected by the bottom inclined surface, it is transmitted outward along the inside of the rhombus prism 4 in parallel with the incident light. S4. The light beam propagating along a straight line will eventually be emitted through the inner side surface of the rhombus-shaped prism 4, that is, the exit surface. After transmitting a certain distance inside the mounting base 2, it will directly illuminate the center of the X-galvanometer 9. After being reflected by the X-galvanometer 9, the light beam will be transmitted upward to the center of the Y-galvanometer 8. After being reflected by the Y-galvanometer 8, the light beam will eventually be emitted through the observation hole 10 located on the inner side of the optical plate 1 at the same height as the incident light.

[0030] Implementation method: The present invention adds a rhombus prism 4 at the entrance of the incident light beam, and the rhombus prism 4 has a parallelogram cross section with an acute angle of 45 degrees, and is installed in the placement hole 3 with the exit surface facing inward and the second reflection surface facing downward, so that when the incident light beam is transmitted through the two-dimensional laser scanning galvanometer device, it will first be vertically transmitted to the inside of the rhombus prism 4, and then be reflected by the top oblique surface of the rhombus prism 4. It is vertically transmitted to the bottom oblique surface of the rhombus prism 4, and then irradiated to the X galvanometer 9 with an inclination angle of 45 degrees in a horizontal transmission route, and then vertically transmitted upward to the Y galvanometer 8. Since the Y The inclination angle of the galvanometer 8 is also 45 degrees. At this time, the outgoing light beam reflected by the Y galvanometer 8 is transmitted horizontally outward again, and after being reflected by the rhombus prism 4, the X galvanometer 9, and the Y galvanometer 8, the horizontal height of the outgoing light beam is still equal to the horizontal height of the incident light beam, and there is no height difference between the two. Therefore, during the construction and application of the coaxial cage system, there is no need to use support seats 13 of different heights. The two-dimensional laser galvanometer device can be installed and debugged in the coaxial cage system, and the difficulty is greatly reduced. The space occupied by the optical path is reduced, and the construction becomes convenient and stable, thereby facilitating the use of the two-dimensional laser galvanometer device in the coaxial cage system.

[0031] At the same time, if Figure 1 As shown, reference numeral 15 denotes an incident light beam and 16 denotes an outgoing light beam. This device is a module for optical path scanning and, when in use, serves as one part of a coaxial cage optical system. The device can be installed at a turning point of the optical path of the optical system through the through holes of the cage rods 12 with a spacing of 30 mm on the side of the galvanometer mirror. When performing light beam scanning, the X-axis motor 7 and the Y-axis motor 6 are started, so that the output shafts of the X-axis motor 7 and the Y-axis motor 6 respectively swing back and forth at high speed within the range of ±20° with their own axes as the center, thereby driving the X-galvanometer mirror 9 and the Y-galvanometer mirror 8 to swing back and forth at high speed. When the incident light is emitted after passing through the rhombus prism 4, it will first be transmitted to the X-galvanometer mirror 9, and then transmitted to the Y-galvanometer mirror 8 after reflection, until it is emitted through the inner side of the optical plate 1, that is, the observation hole 10 on the left side of the mounting seat 2. At this time, due to the high-speed reciprocating swing of the X-galvanometer mirror 9, after the light beam is emitted, it will scan a horizontal straight line in a plane parallel to the left side of the placement hole 3 in a point-to-line manner. Similarly, due to the high-speed reciprocating swing of the Y-galvanometer mirror 8, after the light beam is emitted, it will scan a longitudinal straight line in a plane parallel to the left side of the placement hole 3 in a point-to-line manner, thereby quickly performing a two-dimensional scan on the surface of the sample to be tested with a specific scanning path to complete the plane scan.

[0032] This embodiment specifically solves the problem that in the current two-dimensional laser galvanometer device in the prior art, when the incident light and the outgoing light are parallel to the desktop, there will be a certain distance height difference between the incident light and the outgoing light. During the construction and application of the coaxial cage system, it is necessary to use support seats 13 of different heights to fix the incident light path end and the outgoing light path end, which increases the difficulty of installation and debugging of the two-dimensional laser galvanometer device in the coaxial cage system and makes it inconvenient to use.

[0033] The above description is merely illustrative of certain exemplary embodiments of the present invention. It goes without saying that those skilled in the art will be able to modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and description are illustrative in nature and should not be construed as limiting the scope of protection of the claims.

Claims

1. A two-dimensional laser scanning galvanometer device with the same height of input and output light, characterized in that: include: An optical plate (1), wherein the optical plate (1) is configured as a square plate; A mounting seat (2) is arranged above a corner of the optical plate (1), and the mounting seat (2) is arranged in a cube shape; A placement hole (3) is formed on the front side of the mounting seat (2), wherein a rhombic prism (4) is installed inside the placement hole (3); A mounting hole (5) is formed on a rear side surface of the mounting seat (2) and on two side surfaces adjacent to the placement hole (3) and located outside the optical plate (1); A Y-axis motor (6) is mounted in a mounting hole (5) located on the rear side of the mounting seat (2), and an X-axis motor (7) is mounted inside another mounting hole (5); A Y galvanometer (8) is installed at the end of the output shaft of the Y-axis motor (6), and an X galvanometer (9) is installed at the end of the output shaft of the X-axis motor (7).

2. A two-dimensional laser scanning galvanometer device with the same input and output light height as claimed in claim 1, characterized in that: Observation holes (10) are provided on the top surface, the bottom surface, and three side surfaces adjacent to the placement hole (3) and located inside the optical plate (1) of the mounting seat (2).

3. The two-dimensional laser scanning galvanometer device with the same input and output light height as claimed in claim 1, characterized in that: The four corners of the four sides of the mounting seat (2) are provided with fixing holes (11), and the center distance between two adjacent fixing holes (11) on the same side is set to 30 mm.

4. The two-dimensional laser scanning galvanometer device with the same input and output light height as claimed in claim 3, characterized in that: in, Cage rods (12) are installed in the four fixing holes (11) corresponding to the X-axis motor (7) and the four fixing holes (11) corresponding to the Y-axis motor (6). Four cage rods (12) are arranged as a group, and a plurality of support seats (13) are inserted into each group of cage rods (12).

5. The two-dimensional laser scanning galvanometer device with the same input and output light height as claimed in claim 4, characterized in that: The bottom of the support seat (13) is connected to the optical plate (1) via a fastener, the mounting seat (2) is connected to the optical plate (1) via the support seat (13), and a light hole (14) is provided at the top of each support seat (13).

6. The two-dimensional laser scanning galvanometer device with the same input and output light height as claimed in claim 1, characterized in that: The cross-section of the rhombic prism (4) is a parallelogram, and the acute angle is 45 degrees. The rhombic prism (4) is installed in the placement hole (3) in a manner such that the emission surface faces inwards and the second reflection surface faces downwards.

7. The two-dimensional laser scanning galvanometer device with the same height of input and output light according to claim 6, characterized in that: The placement hole (3) consists of an inner hole (31) and an outer groove (32), wherein the inner hole (31) is used to engage the rhombic prism (4).

8. The two-dimensional laser scanning galvanometer device with the same height of input and output light according to claim 7, characterized in that: A sealing plate (33) is provided inside the outer groove (32); the sealing plate (33) is connected to the mounting seat (2) via a fastener and is used to limit the position of the rhombus-shaped prism (4).

9. The two-dimensional laser scanning galvanometer device with the same height of input and output light according to claim 1, characterized in that: The angles between the initial state planes of the X-mirror (9) and the Y-mirror (8) and the horizontal plane are both 45 degrees.

10. A method for using a two-dimensional laser scanning galvanometer device with the same input and output light heights according to any one of claims 1 to 9, comprising the following steps: S1, adjusting the angle and position of the incident light beam so that the incident light beam is perpendicular to the outer side surface of the rhombus prism (4), that is, the upper edge of the incident surface, and is vertically transmitted to the inside of the rhombus prism (4); S2. As the light beam is continuously input, it will first be irradiated at the center of the top inclined surface of the rhombus prism (4). At this time, the light beam is reflected by the top inclined surface, that is, the first reflecting surface, at 90 degrees to the incident light, and continues to be transmitted downward along the inside of the rhombus prism (4); S3, after the light beam is transmitted downward for 8.4 mm, it reaches the bottom inclined surface of the rhombus prism (4), that is, the center of the second reflection surface, and is reflected by the bottom inclined surface, parallel to the incident light, and is transmitted outward along the inside of the rhombus prism (4); S4. The light beam propagating along a straight line will eventually be emitted through the inner side surface of the rhombus-shaped prism (4), that is, the exit surface. After being transmitted for a certain distance inside the mounting base (2), it will directly illuminate the center of the X-galvanometer (9). After being reflected by the X-galvanometer (9), the light beam will be transmitted upward to the center of the Y-galvanometer (8). After being reflected by the Y-galvanometer (8), the light beam will eventually be emitted through the observation hole (10) located on the inner side of the optical plate (1) at the same height as the incident light.

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