Coating device for preparing carbon-based diamond-like film

Abstract

The invention provides a coating device for preparing a carbon-based diamond-like film, and relates to the field of coating equipment, the coating device comprises a main body, rotating shafts are symmetrically and rotatably connected to the inner side surface of the main body, and positioning frames are fixedly connected to the inner side surfaces, away from the main body, of the rotating shafts; the two ends of the positioning frame are fixedly connected with positioning assemblies used for assisting in workpiece limiting, the middle position of the positioning frame is fixedly connected with a pneumatic telescopic rod, and the telescopic end of the pneumatic telescopic rod is fixedly connected with a swing assembly used for driving a workpiece to do reciprocating motion. The swing assembly comprises a second motor used for driving, a half gear used for meshing transmission and a reciprocating rack used for reciprocating movement. By arranging the swing assembly, the workpiece can be effectively swung in a reciprocating mode after being positioned and clamped, then the influence of blocking of the positioning clamp when the workpiece is subjected to coating operation is reduced, and the coating uniformity of the workpiece is improved.

Description

Technical Field

[0001] The invention relates to the technical field of coating equipment, in particular to a coating device for preparing a carbon-based diamond-like film. Background Art

[0002] Diamond film is an excellent artificially prepared material that developed rapidly in the mid-to-late 1980s. It is usually made of hydrocarbons such as methane and acetylene. It is grown by reaction on various substrates such as silicon, silicon carbide, tungsten carbide, alumina, quartz, glass, molybdenum, tungsten, and tantalum using technologies such as hot filament cracking, microwave plasma vapor deposition, and electron beam ion beam bombardment coating. It not only has the hardness of diamond, but also has good thermal conductivity, good optical transparency from ultraviolet to infrared, and high chemical stability. It has broad application prospects in semiconductors, optics, aerospace industry, large-scale integrated circuits, and other fields. It has been used in hard cutting tools, X-ray window materials, and protective coatings for precious soft materials.

[0003] During the coating process of the workpiece, the current diamond film coating equipment is affected by the workpiece positioning fixture, which will block a portion of the workpiece surface. As a result, the blocked portion of the workpiece will be unevenly coated during the coating operation, which will have a certain impact on the workpiece during use. Summary of the invention

[0004] 1. Technical issues to be resolved

[0005] In view of the deficiencies in the prior art, the present invention provides a coating device for preparing a carbon-based diamond-like film, which solves the problem that in the process of coating a workpiece with the current diamond film coating equipment, the positioning fixture will block a portion of the workpiece surface due to the influence of the workpiece positioning fixture. As a result, when the coating operation is performed, the blocked portion of the workpiece will be unevenly coated, which will have a certain impact on the workpiece during use.

[0006] (II) Technical solution

[0007] To achieve the above objectives, the present invention is implemented through the following technical solutions: a coating device for preparing carbon-based diamond-like thin films, including a main body, the inner surface of the main body is symmetrically rotatably connected with a rotating shaft, the inner surface of the rotating shaft away from the main body is fixedly connected with a positioning frame, the inner surface of the main body is fixedly connected with a partition and a support plate, both ends of the positioning frame are fixedly connected with positioning components for assisting workpiece limiting, the middle position of the positioning frame is fixedly connected with a pneumatic telescopic rod, the telescopic end of the pneumatic telescopic rod is fixedly connected with a swing component for driving the workpiece to reciprocate, and a driving mechanism for driving the positioning frame to rotate is installed inside the main body; the swing component includes a second motor for driving, a half gear for meshing transmission and a reciprocating rack for reciprocating movement.

[0008] Furthermore, the rocking assembly also includes a mounting seat, a connecting rod, a guide rail, a slider and a pressure plate, one end of the connecting rod is fixedly connected to the mounting seat, the other end of the connecting rod is fixedly connected to the guide rail, the slider is fixedly connected to the outer surface of the reciprocating rack, the guide rail and the slider are slidably matched, and the pressure plate is fixedly connected to the reciprocating rack.

[0009] Furthermore, the half gear is fixedly connected to the output end of the second motor, the half gear is meshed with the reciprocating rack for transmission, and the second motor is fixedly connected to the mounting base.

[0010] Furthermore, the positioning assembly includes a mounting frame, a retaining frame, a clamping wheel and an electric push rod, the electric push rod is symmetrically fixedly connected to the mounting frame, the retaining frame is fixedly connected to the telescopic end of the electric push rod, and the clamping wheel is rotatably connected to the retaining frame.

[0011] Furthermore, the driving mechanism includes a first motor, a driving sprocket, symmetrically installed driven sprockets and a chain. The first motor is fixedly connected to the support plate, and the driving sprocket and the driven sprocket are meshed and driven by the chain.

[0012] Furthermore, the driving mechanism also includes a transmission shaft, a driving bevel gear and a driven bevel gear, the driving bevel gear is fixedly connected to the top of the transmission shaft, the driven bevel gear is fixedly connected to the surface of the rotating shaft, the driving bevel gear is meshed with the driven bevel gear, and the bottom observation partition of the transmission shaft is fixedly connected to the driven sprocket.

[0013] Furthermore, a fan is fixedly connected to the inner bottom of the main body, a heater is symmetrically fixedly connected to the upper surface of the support plate, and an inlet and an outlet of the heater are both fixedly connected to an air pipe.

[0014] Furthermore, the outlet of the gas pipe away from the heater passes through the partition and is fixedly connected to an aeration plate, and the inlet of the gas pipe away from the heater passes through the support plate and is fixedly connected to the air outlet of the fan. Ventilation holes are opened on the left and right surfaces of the main body, and the vents are located below the support plate.

[0015] Furthermore, a pipe is fixedly connected to the top of the main body, a material distribution plate is fixedly connected to the bottom of the pipe extending to the inside of the main body, and a converter is fixedly connected to the top of the pipe.

[0016] Furthermore, the pneumatic telescopic rod is coaxially arranged with the rotating shaft, and the partition is located above the supporting plate.

[0017] (III) Beneficial effects

[0018] The present invention provides a coating device for preparing a carbon-based diamond-like film. It has the following beneficial effects:

[0019] 1. In this solution, by setting a swing component, the workpiece can effectively swing back and forth after positioning and clamping, which is beneficial to reduce the impact of the positioning fixture blocking the workpiece during the coating operation, and is beneficial to improve the uniformity of the workpiece coating.

[0020] 2. In this solution, by setting up the positioning component, it can effectively cooperate with the swing component, which can effectively further improve the stability of the workpiece positioning. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic diagram of the external structure of a coating device for preparing a carbon-based diamond-like thin film proposed in the present invention;

[0022] Figure 2 A schematic diagram of the internal structure of a coating device for preparing a carbon-based diamond-like film proposed in the present invention;

[0023] Figure 3 This is a left view of the external structure of a coating device for preparing a carbon-based diamond-like film proposed by the present invention;

[0024] Figure 4 A schematic diagram of the internal structure of a swing assembly of a coating device for preparing a carbon-based diamond-like film proposed in the present invention;

[0025] Figure 5 This is a schematic diagram of the structure of a positioning component of a coating device for preparing a carbon-based diamond-like film proposed by the present invention;

[0026] Figure 6 The present invention proposes Figure 2 A is an enlarged view of the middle image.

[0027] Among them, 1. main body; 2. pipeline; 3. positioning frame; 4. transmission shaft; 5. partition; 6. fan; 7. heater; 8. support plate; 9. aeration plate; 10. driving sprocket; 11. driven sprocket; 12. chain; 13. positioning assembly; 14. swing assembly; 15. rotating shaft; 16. driven bevel gear; 17. driving bevel gear; 18. pneumatic telescopic rod; 19. first motor; 1301. mounting frame; 1302. retaining frame; 1303. clamping wheel; 1304. electric push rod; 1401. mounting seat; 1402. second motor; 1403. reciprocating rack; 1404. connecting rod; 1405. guide rail; 1406. slider; 1407. half gear; 1408. pressure plate. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] like Figure 1-6 As shown, an embodiment of the present invention provides a coating device for preparing a carbon-based diamond-like film, comprising a main body 1, the inner surface of the main body 1 is symmetrically rotatably connected with a rotating shaft 15, the rotating shaft 15 is fixedly connected with a positioning frame 3 away from the inner surface of the main body 1, the inner surface of the main body 1 is fixedly connected with a partition 5 and a support plate 8, both ends of the positioning frame 3 are fixedly connected with a positioning assembly 13 for assisting the workpiece to limit the position, the middle position of the positioning frame 3 is fixedly connected with a pneumatic telescopic rod 18, the telescopic end of the pneumatic telescopic rod 18 is fixedly connected with a swing assembly 14 for driving the workpiece to reciprocate, and a driving mechanism for driving the positioning frame 3 to rotate is installed inside the main body 1; the swing assembly 14 includes a second motor 1402 for driving, a half gear 1407 for meshing transmission and a reciprocating rack 1403 for reciprocating movement.

[0030] During use, the plate workpiece to be coated is placed inside the main body 1, and the plate workpiece is ensured to pass through the mounting frame 1301 fixedly mounted on the positioning frame 3, and then the electric push rod 1304 fixedly mounted on the mounting frame 1301 is extended to drive the retaining frame 1302 to move, until the clamping wheel 1303 mounted on the retaining frame 1302 is rotated to contact the plate workpiece. The electric push rod 1304 is symmetrically mounted on the mounting frame 1301, which can effectively realize the movement of the clamping wheel 1303 from both sides to the middle, thereby assisting in positioning the plate workpiece, which is conducive to improving the reliability of positioning the plate workpiece;

[0031] By controlling the pneumatic telescopic rod 18 to extend until the pressing plate 1408 fixedly mounted on the reciprocating rack 1403 is in close contact with the side surface of the plate workpiece, the plate workpiece can be effectively further positioned and pressed. Subsequently, by using the second motor 1402 fixedly mounted on the mounting seat 1401 to drive the half gear 1407 to engage the reciprocating rack 1403, the intermittent meshing characteristics of the half gear 1407 can be effectively utilized to achieve the reciprocating motion of the reciprocating rack 1403, thereby driving the pressing plate 1408 to reciprocate, thereby controlling the plate workpiece to reciprocate. The half gear 1407 is fixedly connected to the output end of the second motor 1402, which can effectively drive the half gear 1407 to rotate.

[0032] At the same time, the slider 1406 fixed on the outer surface of the reciprocating rack 1403 slides in the guide rail 1405 during the reciprocating motion of the reciprocating rack 1403, so that the reciprocating rack 1403 is subject to the guide constraint, thereby ensuring the stability of the movement of the reciprocating rack 1403. The guide rail 1405 is fixedly connected to the bottom of the connecting rod 1404 and the top of the connecting rod 1404 is fixedly connected to the mounting seat 1401, which can effectively ensure that the position of the guide rail 1405 will not change, which is conducive to further ensuring the stability of the movement of the reciprocating rack 1403.

[0033] By using a first motor 19 fixedly mounted on the support plate 8 to drive the driving sprocket 10, and by meshing the chain 12 between the driving sprocket 10 and the driven sprocket 11, the torque generated by the first motor 19 can be transmitted to the driven sprocket 11 fixedly mounted at the bottom of the transmission shaft 4, and the driven sprocket 11 can be rotated to effectively drive the transmission shaft 4 to rotate and the driving bevel gear 17 fixedly mounted on the top of the transmission shaft 4 to rotate, so that the kinetic energy transmission operation can be effectively realized;

[0034] As the active bevel gear 17 rotates, the driven bevel gear 16 meshed with it and fixedly connected to the rotating shaft 15 will also rotate, thereby driving the rotating shaft 15 and the positioning frame 3 fixedly connected to the end of the rotating shaft 15 to rotate synchronously, which can effectively control the circular rotation of the plate workpiece being coated, which is beneficial to improving the uniformity and convenience of coating.

[0035] The coating material is transported to the interior of the main body 1 by using the pipe 2 fixedly connected to the top of the main body 1, and the coating can be evenly distributed in the space inside the main body 1 and above the partition 5 by using the material distribution plate fixedly installed at the bottom of the pipe 2, thereby realizing the coating operation on the plate workpiece;

[0036] By using a fan 6 fixedly installed at the bottom of the main body 1 to generate airflow, and by using an air pipe fixed at the air outlet of the fan 6 to transport the airflow from the inlet of the heater 7 to the inside of the heater 7, the heating operation of the airflow is realized, and then the heated airflow is discharged from the outlet of the heater 7, and is again transported to the aeration plate 9 fixed at the end of the air pipe through the air pipe, and finally discharged from the aeration plate 9 to the space above the partition 5, the high-temperature airflow can be effectively used to solidify the coating material on the surface of the plate workpiece;

[0037] The outlet of the air pipe away from the heater 7 passes through the partition 5, and the inlet of the air pipe away from the heater 7 passes through the support plate 8 and is fixedly connected to the air outlet of the fan 6. Ventilation holes are provided on the left and right surfaces of the main body 1, and the position of the ventilating holes is located below the support plate 8. The pneumatic telescopic rod 18 and the rotating shaft 15 are coaxially arranged, and the partition 5 is located above the support plate 8.

[0038] Reference Figure 2 and Figure 4 The swing assembly 14 includes a second motor 1402 for driving, a half gear 1407 for meshing transmission, and a reciprocating rack 1403 for reciprocating movement. The swing assembly 14 also includes a mounting seat 1401, a connecting rod 1404, a guide rail 1405, a slider 1406, and a pressing plate 1408. The cross-sectional shape of the mounting seat 1401 is a "U" shape. The number of connecting rods 1404 is multiple, which can effectively improve the stability of the positioning installation of the guide rail 1405. The guide rail 1405 and the slider 1406 are slidably matched together, and the guide rail 1405 is symmetrically distributed up and down.

[0039] Reference Figure 2 and Figure 5 The positioning assembly 13 includes a mounting frame 1301, a retaining frame 1302, a clamping wheel 1303 and an electric push rod 1304. The cross-sectional shape of the mounting frame 1301 is a "U" shape, and the overall shape of the retaining frame 1302 is a closed frame shape connected end to end. The electric push rod 1304 is symmetrically fixedly connected to the mounting frame 1301, which can effectively realize the auxiliary positioning operation of the plate workpiece;

[0040] Refer to the figure and Figure 6 The driving mechanism includes a first motor 19, a driving sprocket 10, a symmetrically installed driven sprocket 11 and a chain 12. The driving mechanism also includes a transmission shaft 4, a driving bevel gear 17 and a driven bevel gear 16. The transmission shaft 4 is rotatably installed on the inner surface of the main body 1 by using a connecting piece. The transmission shaft 4 passes through the partition 5 and is in rotational contact with the partition 5. The diameter of the driving sprocket 10 is greater than the diameter of the driven sprocket 11.

[0041] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A coating device for preparing a carbon-based diamond-like film, comprising a main body (1), the inner surface of the main body (1) is symmetrically connected to a rotating shaft (15), the inner surface of the rotating shaft (15) away from the main body (1) is fixedly connected to a positioning frame (3), the inner surface of the main body (1) is fixedly connected to a partition plate (5) and a support plate (8), characterized in that: The two ends of the positioning frame (3) are fixedly connected with positioning components (13) for assisting the workpiece to limit the position, the middle position of the positioning frame (3) is fixedly connected with a pneumatic telescopic rod (18), the telescopic end of the pneumatic telescopic rod (18) is fixedly connected with a swing component (14) for driving the workpiece to reciprocate, and a driving mechanism for driving the positioning frame (3) to rotate is installed inside the main body (1); the swing component (14) includes a second motor (1402) for driving, a half gear (1407) for meshing transmission, and a reciprocating rack (1403) for reciprocating movement.

2. The coating device for preparing a carbon-based diamond-like thin film according to claim 1, characterized in that: The rocking assembly (14) also includes a mounting seat (1401), a connecting rod (1404), a guide rail (1405), a slider (1406) and a pressure plate (1408), one end of the connecting rod (1404) is fixedly connected to the mounting seat (1401), the other end of the connecting rod (1404) is fixedly connected to the guide rail (1405), the slider (1406) is fixedly connected to the outer surface of the reciprocating rack (1403), the guide rail (1405) and the slider (1406) are slidably matched, and the pressure plate (1408) is fixedly connected to the reciprocating rack (1403).

3. A coating device for preparing a carbon-based diamond-like thin film according to claim 1 or 2, characterized in that: The half gear (1407) is fixedly connected to the output end of the second motor (1402), the half gear (1407) is meshed with the reciprocating rack (1403) for transmission, and the second motor (1402) is fixedly connected to the mounting base (1401).

4. The coating device for preparing a carbon-based diamond-like thin film according to claim 1, characterized in that: The positioning assembly (13) comprises a mounting frame (1301), a retaining frame (1302), a pressure wheel (1303) and an electric push rod (1304); the electric push rod (1304) is symmetrically fixedly connected to the mounting frame (1301); the retaining frame (1302) is fixedly connected to the telescopic end of the electric push rod (1304); and the pressure wheel (1303) is rotatably connected to the retaining frame (1302).

5. The coating device for preparing a carbon-based diamond-like thin film according to claim 1, characterized in that: The driving mechanism comprises a first motor (19), a driving sprocket (10), a symmetrically mounted driven sprocket (11) and a chain (12); the first motor (19) is fixedly connected to a support plate (8); and the driving sprocket (10) and the driven sprocket (11) are meshed and transmitted via the chain (12).

6. A coating device for preparing a carbon-based diamond-like thin film according to claim 1 or 5, characterized in that: The driving mechanism further comprises a transmission shaft (4), a driving bevel gear (17) and a driven bevel gear (16); the driving bevel gear (17) is fixedly connected to the top of the transmission shaft (4); the driven bevel gear (16) is fixedly connected to the surface of the rotating shaft (15); the driving bevel gear (17) is meshed with the driven bevel gear (16); and the bottom observation partition (5) of the transmission shaft (4) is fixedly connected to the driven sprocket (11).

7. The coating device for preparing a carbon-based diamond-like film according to claim 1, characterized in that: The inner bottom of the main body (1) is fixedly connected to a fan (6), the upper surface of the support plate (8) is symmetrically fixedly connected to a heater (7), and the inlet and outlet of the heater (7) are both fixedly connected to an air supply pipe.

8. The coating device for preparing a carbon-based diamond-like thin film according to claim 7, characterized in that: The outlet of the air supply pipe away from the heater (7) passes through the partition (5) and is fixedly connected to the aeration plate (9), and the inlet of the air supply pipe away from the heater (7) passes through the support plate (8) and is fixedly connected to the air outlet of the fan (6). The left and right surfaces of the main body (1) are both provided with ventilation holes, and the ventilation holes are located below the support plate (8).

9. The coating device for preparing a carbon-based diamond-like thin film according to claim 1, characterized in that: The top of the main body (1) is fixedly connected to a pipe (2), the bottom of the pipe (2) extends to the inside of the main body (1) and is fixedly connected to a material distribution plate, and the top of the pipe (2) is fixedly connected to an adapter.

10. The coating device for preparing a carbon-based diamond-like thin film according to claim 1, characterized in that: The pneumatic telescopic rod (18) and the rotating shaft (15) are coaxially arranged, and the partition plate (5) is located above the supporting plate (8).

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