High-precision air floatation linear motion platform

Abstract

The invention discloses a high-precision air floatation linear motion platform, and relates to the field of automation equipment, the high-precision air floatation linear motion platform comprises a workbench, a transverse moving mechanism, transverse moving beams, longitudinal moving mechanisms and longitudinal moving beams, the two longitudinal moving beams are fixedly installed on the two sides of the top of the workbench respectively, and the surfaces of the longitudinal moving beams are slidably connected with the longitudinal moving mechanisms; a transverse moving beam is connected between the two longitudinal moving mechanisms and slidably connected with the transverse moving mechanisms, a plurality of air floating sliding blocks are arranged in the moving mechanisms and communicate with an air supply unit through air pipes, and high-pressure air forms an air interlayer between the air floating sliding blocks and air floating guide rails, so that friction resistance of the moving mechanisms during moving is reduced, and the air floating effect is improved. And the linear motor assembly drives the moving mechanism to move, the grating ruler assembly accurately detects the displacement distance of the moving mechanism, and the linear motor is matched with the air floating sliding block, so that the displacement control precision is improved.

Description

Technical Field

[0001] The invention relates to the technical field of automation equipment, in particular to a high-precision air-floating linear motion platform. Background Art

[0002] Semiconductor wafer inspection is a crucial link in the semiconductor manufacturing process. It is mainly used to ensure the quality and performance of wafers in production. It mainly identifies defects on the wafer surface, such as scratches, stains and particles, or measures the size of the wafer. In this process, a high-precision linear motion platform is required to carry the semiconductor wafer to move and collect relevant data. The high-precision linear motion platform can achieve high-precision displacement control to ensure accurate positioning of the wafer during the inspection process.

[0003] The linear motion platforms currently used are mostly composed of ball screws or linear motors with ball sliders and linear guides. Long-term operation between the sliders and guides will increase the friction, which will cause the positioning accuracy of the moving mechanism to decrease. After long-term use, it will also reduce the service life of the equipment and increase maintenance costs. Therefore, a high-precision air-floating linear motion platform is proposed to solve the above problems. Summary of the invention

[0004] In order to solve the above technical problems, a high-precision air-floating linear motion platform is provided. This technical solution solves the problem that a motion platform using a ball slider easily leads to a decrease in the positioning accuracy of the moving mechanism and low control accuracy.

[0005] In order to achieve the above purpose, the technical solution adopted by the present invention is: A high-precision air-floating linear motion platform, comprising a workbench, a transverse movement mechanism, a transverse movement beam, a longitudinal movement mechanism and a longitudinal movement beam, wherein two longitudinal movement beams are provided and are respectively fixedly installed on both sides of the top of the workbench, the surfaces of the longitudinal movement beams are slidably connected with the longitudinal movement mechanisms, the opposite sides of the two longitudinal movement mechanisms are fixedly connected with transverse movement beams, the peripheral sides of the transverse movement beams are slidably connected with the transverse movement mechanism, an air supply unit is provided below the workbench, a power distribution cabinet is provided on one side of the air supply unit, and the air supply unit and the power distribution cabinet are installed on a supporting steel frame provided below the workbench; The traverse mechanism includes: An installation frame, wherein the installation frame is sleeved on the outside of the transverse moving beam, a detection component fixing platform for placing the detection component is fixedly installed on the top of the installation frame, and an electrical connection board is connected to one side of the detection component fixing platform; A plurality of first transverse air-floating sliders, the plurality of first transverse air-floating sliders are respectively mounted on the upper and lower inner walls of the mounting frame, the opposite sides of the plurality of first transverse air-floating sliders are slidably connected to the transverse moving beam, and the first transverse air-floating sliders are connected to the air supply unit through an air pipe; A plurality of first longitudinal air-floating sliders, the plurality of first longitudinal air-floating sliders are respectively installed on the left and right inner walls of the installation frame, the opposite sides of the plurality of first longitudinal air-floating sliders are slidably connected to the transverse moving beam, and the first longitudinal air-floating sliders are connected to the air supply unit through an air pipe; The transverse moving beam includes a transverse air-floating guide rail, a groove is arranged on the top of the transverse air-floating guide rail, a first linear motor assembly is installed inside the groove, and a moving end of the first linear motor assembly is fixedly connected to the top inner wall of the installation frame.

[0006] Preferably, a dust-free drag chain is provided on one side of the mounting frame, one end of the dust-free drag chain is fixedly connected to the mounting frame, and the other end of the dust-free drag chain is fixedly connected to the workbench, an air pipe connected to the first horizontal air-floating slider and the first longitudinal air-floating slider is placed inside the dust-free drag chain, and a plurality of hydraulic buffers are installed on both sides of the mounting frame through connecting seats, and the buffer heads of the plurality of hydraulic buffers are respectively arranged toward the longitudinal movement mechanisms on both sides.

[0007] Preferably, the longitudinal movement mechanism comprises: A first mounting plate, which is arranged above the longitudinal moving beam, and one end of the longitudinal moving mechanism extending to the outside of the longitudinal moving beam is fixedly connected to the transverse air-floating guide rail; A second mounting plate, wherein the second mounting plate is fixedly connected to the lower end of the first mounting plate, and buffer blocks are fixedly connected to both sides of the second mounting plate, and the buffer blocks are matched with the hydraulic buffer; A second transverse air-floating slider, the second transverse air-floating slider is fixedly mounted on one side of the first mounting plate and the second mounting plate opposite to each other, the second transverse air-floating slider is slidably connected to the surface of the longitudinal moving beam, and the second transverse air-floating slider is connected to the air supply unit through an air pipe; The second longitudinal air-floating slider is installed on one side of the second mounting plate, the side of the second longitudinal air-floating slider away from the second mounting plate is slidably connected to the longitudinal moving beam, and the second longitudinal air-floating slider is connected to the air supply unit through an air pipe.

[0008] Preferably, the longitudinal movable beam comprises: A longitudinal air-floating guide rail, the longitudinal air-floating guide rail is fixedly connected to the top of the workbench, a second slot-shaped photoelectric switch is installed on the top of the longitudinal air-floating guide rail, and the second slot-shaped photoelectric switch is arranged corresponding to a second baffle connected to one side of the first mounting plate; A second linear motor assembly is installed on one side of the longitudinal air-floating guide rail, and a moving end of the second linear motor assembly is fixedly connected to the bottom of the first mounting plate.

[0009] Preferably, the transverse moving beam further comprises a first slot-shaped photoelectric switch, which is fixedly mounted at both ends of the transverse air-floating guide rail, and is arranged corresponding to first baffles fixedly connected to both ends of the mounting frame.

[0010] Preferably, a grating scale assembly for detecting the position of the mounting frame is provided inside the mounting frame, and the grating scale assembly includes a grating reading head fixed to the inner wall of the mounting frame and a grating scale installed on one side of the transverse air-floating guide rail.

[0011] Preferably, a grating scale assembly is installed between the first mounting plate and the longitudinal air-floating guide rail, and the grating scale assembly includes a grating reading head fixed to the inner wall of the first mounting plate and a grating scale installed on one side of the longitudinal air-floating guide rail.

[0012] Preferably, hydraulic buffers are provided at both ends of the longitudinal moving beam, the hydraulic buffers are fixedly connected to the upper end of the workbench through a mounting seat, and the buffer heads of the hydraulic buffers are arranged toward the second mounting plate.

[0013] Preferably, the hydraulic buffer includes a cylinder, an impact rod, a piston and an adjusting knob, a main oil chamber is provided inside the cylinder, the impact rod is provided inside the main oil chamber, one end of the impact rod located inside the main oil chamber is fixedly connected with a piston, the piston is slidably connected to the inner wall of the main oil chamber, the adjusting knob is rotatably connected to the end of the cylinder away from the impact rod, one side of the adjusting knob is fixedly connected with an adjusting rod, the other end of the adjusting rod extends to the inside of the main oil chamber and is provided with a V-shaped groove, the notch of the V-shaped groove is arranged from small to large, an overflow oil chamber is provided between the main oil chamber and the cylinder, the overflow oil chamber is connected to the main oil chamber through an overflow hole, the overflow hole is arranged above the V-shaped groove, a damping spring is provided inside the main oil chamber, one end of the damping spring abuts against the piston, and the other end of the damping spring abuts against the inner wall of the main oil chamber.

[0014] Preferably, vertical plates are fixedly connected to both sides of the top of the workbench, a transversely arranged crossbeam is fixedly connected to the top of the vertical plates, vibration-damping blocks are arranged at the four corners of the lower end of the workbench, the vibration-damping blocks are fixedly connected to the supporting steel frame, and a supporting leg is fixedly connected to the lower end of the supporting steel frame.

[0015] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention is provided with a transverse moving mechanism and a longitudinal moving mechanism, and a plurality of air-floating sliders are arranged inside the transverse moving mechanism and the longitudinal moving mechanism. The air-floating sliders are connected with the air supply unit through air pipes. High-pressure gas is introduced through the air-floating sliders to form an air layer between the air-floating sliders and the air-floating guide rails, so that the air-floating sliders and the air-floating guide rails are not in contact with each other, thereby reducing the friction resistance when the moving mechanism moves, making it easier to finely control the displacement of the moving mechanism, reducing the wear between the structures, and improving the service life of the equipment.

[0016] 2. The present invention adopts a linear motor assembly to drive the displacement of the lateral moving mechanism and the longitudinal moving mechanism, and accurately detects the displacement distance of the moving mechanism through the grating ruler assembly, and then the feedback processing unit obtains the current position of the fixed platform of the detection part, and improves the accuracy of displacement control by cooperating with the linear motor and the air floating slider.

[0017] 3. The present invention is provided with hydraulic buffers at both ends of the mounting frame and the longitudinal moving beam. When the electrical limit formed by the slot-type photoelectric switch and the baffle fails, the internal structure of the moving mechanism can be protected by absorbing the impact force. The absorption characteristics of the hydraulic buffer to the impact force can be adjusted by turning the adjustment knob on the hydraulic buffer, and the appropriate buffer strength can be adjusted according to the operating speed or the weight of the moving mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the present invention; Figure 2 It is a left-side structural schematic diagram of the present invention; Figure 3 It is a structural schematic diagram of the workbench in the present invention; Figure 4 It is a structural schematic diagram of the transverse movement mechanism and the transverse movement beam in the present invention; Figure 5 It is a cross-sectional structural schematic diagram of the transverse movement mechanism and the transverse movement beam in the present invention; Figure 6 It is a structural schematic diagram of the longitudinal movement mechanism and the longitudinal movement beam in the present invention; Figure 7 It is a rear view structural schematic diagram of the longitudinal movement mechanism and the longitudinal movement beam in the present invention; Figure 8 It is a cross-sectional structural schematic diagram of the hydraulic buffer in the present invention; Fig. 9 for Figure 8 A local enlarged schematic diagram of point A in the middle.

[0019] The numbers in the figure are: 1. Workbench; 11. Vertical board; 12. Crossbeam; 13. Support steel frame; 131. Support leg; 14. Vibration damping block; 15. Air supply unit; 16. Power distribution cabinet; 2. Transverse movement mechanism; 21. Mounting frame; 211. Test piece fixing platform; 212. Electrical connection plate; 213. First baffle; 22. Dust-free drag chain; 23. First transverse air-floating slider; 24. First longitudinal air-floating slider; 3. Transverse moving beam; 31. Transverse air-floating guide rail; 311. First slot-type photoelectric switch; 32. First linear motor assembly; 4. longitudinal movement mechanism; 41. first mounting plate; 411. second baffle; 42. second mounting plate; 421. buffer block; 43. second transverse air-floating slider; 44. second longitudinal air-floating slider; 5. longitudinal moving beam; 51. longitudinal air-floating guide rail; 511. second slot-type photoelectric switch; 52. second linear motor assembly; 6. Hydraulic buffer; 61. Cylinder; 611. Main oil chamber; 612. Overflow oil chamber; 62. Impact rod; 63. Piston; 64. Adjustment knob; 65. Adjustment rod; 651. V-shaped groove; 66. Overflow hole; 67. Damping spring; 7. Grating scale assembly. DETAILED DESCRIPTION

[0020] For example, certain words are used in the specification and claims to refer to specific components. Those skilled in the art should understand that hardware manufacturers may use different terms to refer to the same component. This specification and claims do not use differences in names as a way to distinguish components, but use differences in the functions of components as the criteria for distinction. As mentioned throughout the specification and claims, "including" is an open term, so it should be interpreted as "including but not limited to". The subsequent description of the specification is a preferred embodiment of implementing the present application, but the description is for the purpose of illustrating the general principles of the present application, and is not used to limit the scope of the present application. The scope of protection of the present application shall be determined by the definition of the attached claims.

[0021] like Figure 1-5As shown, a high-precision air-floating linear motion platform comprises a workbench 1, a transverse movement mechanism 2, a transverse movement beam 3, a longitudinal movement mechanism 4 and a longitudinal movement beam 5. Two longitudinal movement beams 5 are provided and are fixedly installed on both sides of the top of the workbench 1. The surfaces of the longitudinal movement beams 5 are slidably connected with the longitudinal movement mechanisms 4. The opposite sides of the two longitudinal movement mechanisms 4 are fixedly connected with the transverse movement beams 3. The peripheral sides of the transverse movement beams 3 are slidably connected with the transverse movement mechanism 2. An air supply unit 15 is provided below the workbench 1. A power distribution cabinet 16 is provided on one side of the air supply unit 15. The air supply unit 15 and the power distribution cabinet 16 are installed on a supporting steel frame 13 provided below the workbench 1. By adjusting the transverse movement mechanism 2 The lateral movement mechanism 2 is moved in the plane of the workbench 1 by moving with the lateral movement beam 3. Vertical plates 11 are fixedly connected to both sides of the top of the workbench 1. A horizontal beam 12 is fixedly connected to the top of the vertical plate 11. Vibration-damping blocks 14 are arranged at the four corners of the lower end of the workbench 1. The vibration-damping blocks 14 absorb the vibration generated on the workbench 1 to reduce the influence of the vibration generated during the movement of each mechanism on the displacement accuracy. The vibration-damping blocks 14 are fixedly connected to the supporting steel frame 13. The lower end of the supporting steel frame 13 is fixedly connected to the supporting leg 131. The lateral movement mechanism 2 includes: a mounting frame 21, a first horizontal air-floating slider 23 and a first longitudinal air-floating slider 24. The mounting frame 21 is provided with a sleeve On the outside of the transverse moving beam 3, a detection piece fixing table 211 for placing the detection piece is fixedly installed on the top of the installation frame 21, and an electrical connection board 212 is connected to one side of the detection piece fixing table 211. The electrical connection board 212 is used to connect the information acquisition equipment and control the detection piece fixing table 211. A plurality of first transverse air-floating sliders 23 are respectively installed on the upper and lower inner walls of the installation frame 21, and the opposite sides of the plurality of first transverse air-floating sliders 23 are slidably connected to the transverse moving beam 3. The first transverse air-floating sliders 23 are connected to the air supply unit 15 through an air pipe. A plurality of first longitudinal air-floating sliders 24 are respectively installed on the left and right inner walls of the installation frame 21. The opposite side of the air-floating slider 24 is slidably connected to the transverse moving beam 3. The first longitudinal air-floating slider 24 is connected to the air supply unit 15 through an air pipe. The air pipes connecting the multiple first transverse air-floating sliders 23 and the first longitudinal air-floating slider 24 are divided into two groups, which are connected to the pressure-regulating valve in the air supply unit 15 after being gathered into one through a joint. The pressure-regulating valve is connected to the filter pressure reducing valve through a bus, and the bus is connected to a pressure sensor to detect the air pressure in the pipe. High-pressure gas is ejected from the first transverse air-floating slider 23 and the first longitudinal air-floating slider 24 to form an air layer between the transverse moving beam 3, thereby reducing the friction resistance during sliding, facilitating precise control, and improving the life of the equipment.

[0022] The transverse moving beam 3 includes a transverse air-floating guide rail 31, a groove is provided on the top of the transverse air-floating guide rail 31, a first linear motor assembly 32 is installed inside the groove, and the moving end of the first linear motor assembly 32 is fixedly connected to the top inner wall of the mounting frame 21. This solution adopts the TE-UM beam 12N type coreless motor, which has the characteristics of high precision and strong load capacity. Other linear motors that can achieve the same function are all acceptable, and the transverse moving mechanism 2 is driven to move through the first linear motor assembly 32.

[0023] like Figure 4 and 5 As shown, the transverse moving beam 3 also includes a first slot-type photoelectric switch 311, which is fixedly installed at both ends of the transverse air-floating guide rail 31. The first slot-type photoelectric switch 311 is correspondingly arranged with the first baffle 213 fixedly connected at both ends of the mounting frame 21. When the first baffle 213 moves into the groove of the first slot-type photoelectric switch 311, the light of the first slot-type photoelectric switch 311 will be blocked, and then the first slot-type photoelectric switch 311 will send a feedback signal to the processing terminal, so that the current position of the transverse moving mechanism 2 can be determined, and the transverse moving mechanism 2 can be electrically limited according to the position of the first slot-type photoelectric switch 311. A grating ruler assembly 7 for detecting the position of the mounting frame 21 is arranged inside the mounting frame 21. The grating ruler assembly 7 includes a grating reading head fixed to the inner wall of the mounting frame 21 and a grating ruler installed on one side of the transverse air-floating guide rail 31. The grating reading head can determine the displacement distance by detecting the change of the grating stripes, and then the position information of the current mounting frame 21 can be accurately fed back, and the first linear motor assembly 32 can be cooperated to drive the mounting frame 21 to move to achieve high-precision displacement.

[0024] Please refer to Figure 4 A dust-free drag chain 22 is arranged on one side of the mounting frame 21, one end of the dust-free drag chain 22 is fixedly connected to the mounting frame 21, and the other end of the dust-free drag chain 22 is fixedly connected to the workbench 1. An air pipe connected to the first horizontal air-floating slider 23 and the first longitudinal air-floating slider 24 is placed inside the dust-free drag chain 22. The dust-free drag chain 22 is a dust-free flexible rubber drag chain, and the external drag chain sleeve adopts Teflon film, which has a low friction coefficient and excellent weather resistance. A plurality of hydraulic buffers 6 are installed on both sides of the mounting frame 21 through connecting seats, and the buffer heads of the plurality of hydraulic buffers 6 are respectively arranged toward the longitudinal movement mechanisms 4 on both sides. By setting the hydraulic buffers 6, when the mounting frame 21 exceeds the electrical limit, the mounting frame 21 and the detection component fixing platform 211 are protected by absorbing the impact force.

[0025] The structure of the longitudinal movement mechanism 4 is as follows: Figure 6 and 7As shown, it includes a first mounting plate 41, a second mounting plate 42, a second transverse air-floating slider 43 and a second longitudinal air-floating slider 44. The first mounting plate 41 is arranged above the longitudinal moving beam 5. The longitudinal moving mechanism 4 extends to one end outside the longitudinal moving beam 5 and is fixedly connected to the transverse air-floating guide rail 31. The second mounting plate 42 is fixedly connected to the lower end of the first mounting plate 41. Buffer blocks 421 are fixedly connected on both sides of the second mounting plate 42. The buffer blocks 421 are matched with the hydraulic buffer 6. If the transverse moving mechanism 2 moves beyond the electrical limit, the buffer head of the hydraulic buffer 6 arranged on the transverse moving mechanism 2 hits the second longitudinal air-floating slider 44 to absorb the impact force. The second transverse air-floating slider 43 is fixedly installed on the first mounting plate 41 and the second mounting plate 42, respectively. On the opposite side, the second transverse air-floating slider 43 is slidably connected to the surface of the longitudinal moving beam 5, the second transverse air-floating slider 43 is connected to the air supply unit 15 through an air pipe, the second longitudinal air-floating slider 44 is installed on one side of the second mounting plate 42, the second longitudinal air-floating slider 44 is slidably connected to the longitudinal moving beam 5 on the side away from the second mounting plate 42, the second longitudinal air-floating slider 44 is connected to the air supply unit 15 through an air pipe, the second transverse air-floating slider 43 and the second longitudinal air-floating slider 44 are both connected to the air supply unit 15 through an air pipe, and high-pressure gas is blown between the second transverse air-floating slider 43 and the longitudinal air-floating guide rail 51 and between the second longitudinal air-floating slider 44 and the longitudinal air-floating guide rail 51 to form an air layer, which reduces the friction when the longitudinal moving mechanism 4 moves, and can achieve more precise displacement control.

[0026] Among them, the longitudinal moving beam 5 includes a longitudinal air-floating guide rail 51 and a second linear motor assembly 52. ​​The longitudinal air-floating guide rail 51 is fixedly connected to the top of the workbench 1. A second slot-type photoelectric switch 511 is installed on the top of the longitudinal air-floating guide rail 51. The second slot-type photoelectric switch 511 is correspondingly arranged with a second baffle 411 connected to one side of the first mounting plate 41. The electrical limitation of the displacement of the longitudinal moving mechanism 4 is realized through the second baffle 411 and the second slot-type photoelectric switch 511. The second linear motor assembly 52 is installed on one side of the longitudinal air-floating guide rail 51. The moving end of the second linear motor assembly 52 is fixedly connected to the bottom of the first mounting plate 41. 52 drives the longitudinal movement mechanism 4 to perform precise displacement. A grating scale assembly 7 is installed between the first mounting plate 41 and the longitudinal air-floating guide rail 51. The grating scale assembly 7 includes a grating reading head fixed to the inner wall of the first mounting plate 41 and a grating scale installed on one side of the longitudinal air-floating guide rail 51. Hydraulic buffers 6 are provided at both ends of the longitudinal moving beam 5. The hydraulic buffer 6 is fixedly connected to the upper end of the workbench 1 through a mounting seat. The buffer head of the hydraulic buffer 6 is arranged toward the second mounting plate 42. When the longitudinal movement mechanism 4 moves beyond the electrical limit, the second mounting plate 42 hits the buffer head of the hydraulic buffer 6 to absorb the impact force, thereby reducing damage to the internal structure of the longitudinal movement mechanism 4.

[0027] like Figure 8 and 9 As shown, the hydraulic buffer 6 includes a cylinder 61, a striking rod 62, a piston 63 and an adjusting knob 64. A main oil chamber 611 is arranged inside the cylinder 61. The main oil chamber 611 is filled with hydraulic oil. The striking rod 62 is arranged inside the main oil chamber 611. One end of the striking rod 62 located inside the main oil chamber 611 is fixedly connected with a piston 63. The piston 63 is slidably connected to the inner wall of the main oil chamber 611. The adjusting knob 64 is rotatably connected to the end of the cylinder 61 away from the striking rod 62. An adjusting rod 65 is fixedly connected to one side of the adjusting knob 64. The other end of the adjusting rod 65 extends to the inside of the main oil chamber 611 and is provided with a V-shaped groove 651. The notch of the V-shaped groove 651 is arranged from small to large. An overflow oil chamber 612 is arranged between the main oil chamber 611 and the cylinder 61. The overflow oil chamber 612 is connected to the main oil chamber 611 through an overflow hole 66. The flow hole 66 is arranged above the V-groove 651, and a damping spring 67 is arranged inside the main oil chamber 611. One end of the damping spring 67 abuts against the piston 63, and the other end of the damping spring 67 abuts against the inner wall of the main oil chamber 611. When the buffer head of the hydraulic buffer 6 is hit, the impact rod 62 pushes the piston 63 to squeeze the hydraulic oil and the damping spring 67 inside the main oil chamber 611. The damping spring 67 is compressed, and the hydraulic oil is squeezed into the overflow oil chamber 612 through the overflow hole 66. During the movement of the hydraulic oil and the damping spring 67, the impact force of the impact rod 62 is absorbed. By turning the adjusting knob 64, the slot size of the V-groove 651 below the overflow hole 66 can be adjusted, and the speed at which the hydraulic oil in the main oil chamber 611 is squeezed into the overflow oil chamber 612 can be controlled, thereby adjusting the absorption characteristics of the hydraulic buffer 6 to the impact force.

[0028] The principle of the present invention is as follows: when using the motion platform, the wafer to be inspected is placed on the inspection component fixing table 211 and fixed, and the air supply unit 15 introduces high-pressure gas to the first transverse air-floating slider 23, the first longitudinal air-floating slider 24, the second transverse air-floating slider 43 and the second longitudinal air-floating slider 44, so that the first transverse air-floating slider 23, the first longitudinal air-floating slider 24, the second transverse air-floating slider 43 and the second longitudinal air-floating slider 44 form an air sandwich with the track therebetween, thereby reducing the friction during sliding, and the first linear motor assembly 32 is used to drive the mounting frame 21 to move, and the second linear motor assembly 52 is used to drive the first mounting plate 41 and the second mounting plate 42 to move, so as to realize the movement of the inspection component fixing table 211 on the horizontal plane. In this scheme, the displacement of the current mounting frame 21 and the first mounting plate 41 is detected by the grating ruler assembly 7, and the feedback is fed back to the processing terminal. , the current position of the detection part fixing platform 211 can be determined, and a first slot-type photoelectric switch 311 and a second slot-type photoelectric switch 511 are respectively provided at both ends of the transverse air-floating guide rail 31 and the longitudinal air-floating guide rail 51. The movement of the mounting frame 21 and the first mounting plate 41 is limited by the first slot-type photoelectric switch 311 and the second slot-type photoelectric switch 511. If the limit failure occurs, the hydraulic buffer 6 arranged on both sides of the mounting frame 21 and at both ends of the longitudinal air-floating guide rail 51 will absorb the impact force generated by the collision to buffer and protect the internal structure of each moving mechanism. In summary, an air layer is generated between the moving mechanism and the guide rail through the air-floating slider, which reduces the friction during the sliding process and facilitates displacement control. The transverse movement mechanism 2 and the longitudinal movement mechanism 4 are driven to move by the linear motor, and the displacement distance is detected by the grating ruler assembly 7, thereby improving the displacement control accuracy.

[0029] Finally, it should be noted that when describing the position of each component and the matching relationship between them, the present invention usually takes one / a pair of components as an example. However, those skilled in the art should understand that such position, matching relationship, etc. are also applicable to other components / other pairs of components.

[0030] The above description is merely an exemplary embodiment of the present invention and is not intended to limit the protection scope of the present invention. The protection scope of the present invention is determined by the appended claims.

Claims

1. A high-precision air-floating linear motion platform, characterized in that: The invention comprises a workbench (1), a transverse movement mechanism (2), a transverse movement beam (3), a longitudinal movement mechanism (4) and a longitudinal movement beam (5), wherein two longitudinal movement beams (5) are provided and are respectively fixedly installed on both sides of the top of the workbench (1), the surfaces of the longitudinal movement beams (5) are slidably connected to the longitudinal movement mechanisms (4), the opposite sides of the two longitudinal movement mechanisms (4) are fixedly connected to the transverse movement beams (3), the peripheral sides of the transverse movement beams (3) are slidably connected to the transverse movement mechanism (2), an air supply unit (15) is provided below the workbench (1), a power distribution cabinet (16) is provided on one side of the air supply unit (15), and the air supply unit (15) and the power distribution cabinet (16) are installed on a supporting steel frame (13) provided below the workbench (1); The transverse movement mechanism (2) comprises: An installation frame (21), the installation frame (21) being sleeved on the outside of the transverse moving beam (3), a detection component fixing platform (211) for placing detection components being fixedly installed on the top of the installation frame (21), and an electrical connection plate (212) being connected to one side of the detection component fixing platform (211); A plurality of first transverse air-floating sliders (23), the plurality of first transverse air-floating sliders (23) being respectively mounted on the upper and lower inner walls of the mounting frame (21), the opposite side of the plurality of first transverse air-floating sliders (23) being slidably connected to the transverse moving beam (3), and the first transverse air-floating sliders (23) being connected to the air supply unit (15) via an air pipe; A plurality of first longitudinal air-floating sliders (24), the plurality of first longitudinal air-floating sliders (24) being respectively mounted on the left and right inner walls of the mounting frame (21), the opposite sides of the plurality of first longitudinal air-floating sliders (24) being slidably connected to the transverse moving beam (3), and the first longitudinal air-floating sliders (24) being connected to the air supply unit (15) via an air pipe; The transverse moving beam (3) comprises a transverse air-floating guide rail (31), a groove is provided at the top of the transverse air-floating guide rail (31), a first linear motor assembly (32) is installed inside the groove, and a moving end of the first linear motor assembly (32) is fixedly connected to the top inner wall of the installation frame (21).

2. A high-precision air-floating linear motion platform according to claim 1, characterized in that: A dust-free drag chain (22) is provided on one side of the installation frame (21), one end of the dust-free drag chain (22) is fixedly connected to the installation frame (21), and the other end of the dust-free drag chain (22) is fixedly connected to the workbench (1), and an air pipe connected to a first transverse air-floating slider (23) and a first longitudinal air-floating slider (24) is placed inside the dust-free drag chain (22), and a plurality of hydraulic buffers (6) are installed on both sides of the installation frame (21) via connecting seats, and the buffer heads of the plurality of hydraulic buffers (6) are respectively arranged toward the longitudinal movement mechanisms (4) on both sides.

3. The high-precision air-floating linear motion platform according to claim 1, characterized in that: The longitudinal movement mechanism (4) comprises: A first mounting plate (41) is arranged above the longitudinal moving beam (5), wherein one end of the longitudinal moving mechanism (4) extending to the outside of the longitudinal moving beam (5) is fixedly connected to the transverse air-floating guide rail (31); a second mounting plate (42), the second mounting plate (42) being fixedly connected to the lower end of the first mounting plate (41), buffer blocks (421) being fixedly connected to both sides of the second mounting plate (42), the buffer blocks (421) being arranged to match the hydraulic buffer (6); a second transverse air-floating slider (43), the second transverse air-floating slider (43) being fixedly mounted on a side opposite to the first mounting plate (41) and the second mounting plate (42), the second transverse air-floating slider (43) being slidably connected to a surface of the longitudinal moving beam (5), and the second transverse air-floating slider (43) being connected to an air supply unit (15) via an air pipe; A second longitudinal air-floating slider (44), the second longitudinal air-floating slider (44) being mounted on one side of the second mounting plate (42), the side of the second longitudinal air-floating slider (44) away from the second mounting plate (42) being slidably connected to the longitudinal moving beam (5), and the second longitudinal air-floating slider (44) being connected to the air supply unit (15) via an air pipe.

4. The high-precision air-floating linear motion platform according to claim 1, characterized in that: The longitudinal movable beam (5) comprises: A longitudinal air-floating guide rail (51), the longitudinal air-floating guide rail (51) being fixedly connected to the top of the workbench (1), a second slot-shaped photoelectric switch (511) being installed on the top of the longitudinal air-floating guide rail (51), the second slot-shaped photoelectric switch (511) being arranged corresponding to a second baffle (411) connected to one side of the first mounting plate (41); A second linear motor assembly (52), the second linear motor assembly (52) being mounted on one side of the longitudinal air-floating guide rail (51), the moving end of the second linear motor assembly (52) being fixedly connected to the bottom of the first mounting plate (41).

5. The high-precision air-floating linear motion platform according to claim 1, characterized in that: The transverse moving beam (3) further comprises a first slot-shaped photoelectric switch (311), the first slot-shaped photoelectric switch (311) being fixedly mounted at both ends of the transverse air-floating guide rail (31), the first slot-shaped photoelectric switch (311) being arranged corresponding to a first blocking piece (213) fixedly connected to both ends of the mounting frame (21).

6. The high-precision air-floating linear motion platform according to claim 1, characterized in that: A grating ruler assembly (7) for detecting the position of the mounting frame (21) is arranged inside the mounting frame (21), and the grating ruler assembly (7) comprises a grating reading head fixed to the inner wall of the mounting frame (21) and a grating ruler installed on one side of the transverse air-floating guide rail (31).

7. The high-precision air-floating linear motion platform according to claim 3, characterized in that: A grating scale assembly (7) is installed between the first mounting plate (41) and the longitudinal air-floating guide rail (51), and the grating scale assembly (7) comprises a grating reading head fixed to the inner wall of the first mounting plate (41) and a grating scale installed on one side of the longitudinal air-floating guide rail (51).

8. The high-precision air-floating linear motion platform according to claim 1, characterized in that: Hydraulic buffers (6) are provided at both ends of the longitudinal moving beam (5); the hydraulic buffers (6) are fixedly connected to the upper end of the workbench (1) via a mounting seat; and the buffer heads of the hydraulic buffers (6) are arranged toward the second mounting plate (42).

9. The high-precision air-floating linear motion platform according to claim 2, characterized in that: The hydraulic buffer (6) comprises a cylinder (61), a striking rod (62), a piston (63) and an adjusting knob (64); a main oil chamber (611) is arranged inside the cylinder (61); the striking rod (62) is arranged inside the main oil chamber (611); one end of the striking rod (62) located inside the main oil chamber (611) is fixedly connected to the piston (63); the piston (63) is slidably connected to the inner wall of the main oil chamber (611); the adjusting knob (64) is rotatably connected to one end of the cylinder (61) away from the striking rod (62); one side of the adjusting knob (64) is fixedly connected to an adjusting rod (65); the adjusting rod (65) is fixedly connected to the ...); the adjusting rod (65) is fixedly connected to the adjusting rod (65); the adjusting rod (65) is fixedly connected to the adjusting rod (65); the adjusting rod (65) is fixedly connected to the adjusting rod (65); the adjusting rod (65) is fixedly connected to the adjusting rod (65) The other end of the piston (65) extends into the main oil chamber (611) and is provided with a V-shaped groove (651). The notch of the V-shaped groove (651) is arranged from small to large. An overflow oil chamber (612) is arranged between the main oil chamber (611) and the cylinder (61). The overflow oil chamber (612) is connected to the main oil chamber (611) through an overflow hole (66). The overflow hole (66) is arranged above the V-shaped groove (651). A damping spring (67) is arranged inside the main oil chamber (611). One end of the damping spring (67) abuts against the piston (63), and the other end of the damping spring (67) abuts against the inner wall of the main oil chamber (611).

10. The high-precision air-floating linear motion platform according to claim 1, characterized in that: Both sides of the top of the workbench (1) are fixedly connected to vertical plates (11), the upper part of the vertical plates (11) is fixedly connected to a transversely arranged crossbeam (12), and vibration-damping blocks (14) are arranged at the four corners of the lower end of the workbench (1), the vibration-damping blocks (14) are fixedly connected to a supporting steel frame (13), and the lower end of the supporting steel frame (13) is fixedly connected to a supporting leg (131).

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