Slicing device

Abstract

The invention provides a wafer separating device, and belongs to silicon wafer production and manufacture, the wafer separating device comprises a wafer separating mechanism, a wafer drawing mechanism and a conveying mechanism, the wafer separating mechanism is arranged at the feeding upstream of the wafer drawing mechanism, and water is sprayed towards a wafer from the side edge; the sheet drawing mechanism converts the sheets in the vertical state into horizontally conveyed sheets in a sheet suction and arc-shaped transfer mode. The conveying mechanism is horizontally adjacent to the discharging end of the sheet drawing mechanism, and a multi-stage conveying structure is adopted for conveying the sheets in the horizontal state. According to the scheme, sheet pushing, sheet separation, suction sheet lifting and horizontal conveying are integrated, sheet separation can be well achieved through cooperation of side edge liquid blowing and sheet pushing, vertical sheets can be stably converted into horizontally-arranged sheets through suction sheet lifting, and therefore stable connection and horizontal conveying with follow-up mechanisms are achieved, the sheet separation yield is guaranteed, the conveying speed can be flexibly controlled, and the production efficiency is improved. The process rhythm is ensured, the working efficiency is improved, and popularization and application in the field of detection and production processing of sheets such as silicon wafers are facilitated.

Description

Technical Field

[0001] The invention belongs to the field of silicon wafer production and manufacturing, and specifically relates to a wafer separation device. Background Art

[0002] In the manufacturing process of photovoltaic silicon wafers, the silicon wafers must be cleaned and inserted after slicing, and the silicon wafers must be transferred before insertion. This process has problems such as poor slicing, stacking, difficulty in loading, and chipping. Therefore, it is necessary to design a new type of silicon wafer slicing device. Summary of the invention

[0003] In order to overcome the deficiencies of the prior art, the present invention provides a slicing device that can solve the above problems.

[0004] A sheet-slitting device comprises a sheet-slitting mechanism, a sheet-drawing mechanism and a conveying mechanism, wherein the sheet-slitting mechanism is arranged upstream of the sheet-drawing mechanism feed and sprays water toward the sheet from the side; the sheet-drawing mechanism converts the vertical sheet into a horizontally transported sheet by suction and arc-shaped transfer; the conveying mechanism is horizontally adjacent to the discharge end of the sheet-drawing mechanism and adopts a multi-stage conveying structure to convey the horizontal sheet.

[0005] Furthermore, the segmentation mechanism includes a side spray mounting plate, a side spray adjustment component and a side spray pipe; the side spray pipe is installed on the side spray mounting plate, and the spray angle of the side spray pipe is adjusted by the side spray adjustment component.

[0006] Furthermore, the sheet drawing mechanism includes a vertical bearing guide assembly, a water absorption plate assembly, a lifting belt assembly and an arc-shaped climbing assembly; wherein, the lifting belt assembly is arranged above the vertical bearing guide assembly, the water absorption plate assembly is embedded in the middle and lower part of the lifting belt assembly, the lower end of the arc-shaped climbing assembly is adjacent to the top of the lifting belt assembly, and the top end of the arc-shaped climbing assembly lifts the climbing sheet for horizontal output.

[0007] Furthermore, the vertical bearing guide assembly includes a small wheel mounting member and multiple groups of rust-proof wheels, the multiple groups of rust-proof wheels are installed side by side on the small wheel mounting member in the same plane, and are supported by the vertical bearing guide assembly to be vertically arranged.

[0008] Furthermore, the water absorption plate group includes a water absorption plate, on which an air source hole, an air extraction hole and a belt avoidance guide groove are opened; wherein the air extraction hole and the belt avoidance guide groove are opened on the front side of the water absorption plate.

[0009] Furthermore, the lifting belt group includes a lifting back plate, a lifting pulley, a lifting belt, a lifting bearing seat and a lifting drive unit; two sets of lifting pulleys are installed to the upper and lower ends of the lifting back plate through the lifting bearing seat, the lifting belt is installed to the lifting pulley, and the lifting drive unit drives the lifting belt to move, thereby driving the vertical sheet to be lifted.

[0010] Furthermore, the arc-shaped climbing assembly includes a crescent-shaped guide, a climbing belt, a climbing side support plate, a climbing pulley and a climbing drive module; two climbing pulleys are arranged at both ends of the crescent-shaped guide, and two climbing side support plates are supported on the two side surfaces of the climbing pulley and the crescent-shaped guide; the climbing belt is sleeved on the crescent-shaped guide through the climbing pulley, and the climbing pulley is driven by the climbing drive module.

[0011] Furthermore, the sheet extraction mechanism also includes an auxiliary climbing component, which includes a flat-head nozzle and a climbing auxiliary guide wheel group. The flat-head nozzle and the climbing auxiliary guide wheel group are installed to the lower feeding position of the arc-shaped climbing component through an auxiliary climbing bracket group, wherein the flat-head nozzle sprays obliquely upward toward the arc-shaped surface of the arc-shaped climbing component to facilitate sheet climbing and sheet extraction.

[0012] Furthermore, the sheet extraction mechanism also includes a horizontal receiving group, which is arranged at the discharge end of the arc-shaped climbing component. The horizontal receiving group adopts a pulley or a bearing mechanism to receive the sheet output from the discharge end of the arc-shaped climbing component.

[0013] Furthermore, the multi-stage conveying structure of the conveying mechanism speeds up step by step from front to back, including a debris detection module, a thickness detection module, a foreign material rejection module, a material receiving box and an air blowing module arranged along the segmented transmission line; the debris detection module and the thickness detection module are arranged upstream of the foreign material rejection module, and the material receiving box is arranged downstream of the foreign material rejection module; the air blowing module is arranged upstream and / or downstream of the foreign material rejection module.

[0014] Furthermore, the slicing device also includes a slicing drive water trough, which includes a slicing water trough body, a silicon wafer driving module, a slice pushing guide head, a roller guide rail assembly, a filter and drainage module and a water trough inlet pipe group; wherein the slice pushing guide head is connected to the end of the silicon wafer driving module and is arranged close to the middle of the bottom of the slicing water trough body; the roller guide rail assembly is arranged on both sides of the bottom of the slicing water trough body; the filter and drainage module is arranged at the bottom of the slicing water trough body, and the water trough inlet pipe group is arranged on the peripheral wall of the slicing water trough body.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: the slicing device of the present application integrates the functions of pushing, slicing, sucking and lifting, and horizontal transportation. It can slice well through side blowing and pushing, and can stably convert vertical sheets into horizontally arranged sheets through sucking and lifting, thereby ensuring stable connection and horizontal transportation with subsequent mechanisms, ensuring the slicing yield, and can flexibly control the transportation rate, ensuring the process rhythm, improving work efficiency, and facilitating promotion and application in the detection and production and processing fields of silicon wafers and other sheet materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of an example of a slicing device;

[0017] Figure 2 It is a schematic diagram of the sharding mechanism;

[0018] Figure 3 is a schematic diagram of the film extraction mechanism;

[0019] Figure 4 is a schematic diagram of a vertical bearing guide assembly;

[0020] Figure 5 is a schematic diagram of a water absorbing plate group;

[0021] Figure 6 and Figure 7 It is a schematic diagram of the lifting belt group;

[0022] Figure 8 and Fig. 9 It is a schematic diagram of an arc climbing component;

[0023] Fig.10 A schematic diagram of an auxiliary climbing component;

[0024] Fig.11 It is a partial structural schematic diagram of a slicing device including a conveying mechanism;

[0025] Fig.12 Schematic diagram of the water tank driven by the shards;

[0026] Fig.13 It is a schematic diagram of setting the inserting mechanism at the end of the slicer.

[0027] In the figure,

[0028] 100, slicing mechanism; 110, side spray mounting plate; 120, side spray adjustment assembly; 130, side spray pipe;

[0029] 200, film extraction mechanism;

[0030] 210, vertical bearing guide assembly; 211, small wheel mounting piece; 212, rust-proof wheel;

[0031] 220, water absorption plate group; 221, water absorption plate; 222, air source hole; 223, air extraction hole; 224, belt avoidance guide groove;

[0032] 230, lifting belt assembly; 231, lifting back plate; 232, lifting pulley; 233, lifting belt; 234, lifting bearing seat; 235, lifting drive unit; 236, belt support block; 237, lifting mounting piece;

[0033] 240, arc climbing assembly; 241, crescent-shaped guide; 242, climbing belt; 243, climbing side support plate; 244, climbing pulley; 245, climbing drive module; 246, climbing tension roller; 247, belt idler;

[0034] 250, auxiliary climbing assembly; 251, flat head nozzle; 252, climbing auxiliary guide wheel set; 253, auxiliary climbing bracket set; 254, climbing sheet sensor;

[0035] 260, horizontal receiving group;

[0036] 300, conveying mechanism; 310, segmented transmission line; 320, debris detection module; 330, thickness detection module; 340, foreign material rejection module; 350, material receiving box; 360, air blowing module;

[0037] 400, slice drive water tank; 410, slice water tank body; 420, silicon chip drive module; 430, slice push guide head; 440, roller guide assembly; 450, filter drainage module; 460, water tank water inlet pipe assembly; 470, slice overflow baffle; 480, water distribution level device;

[0038] 500. Insert mechanism. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0040] A slicing device, see Figure 1-Figure 13The sheet-slitting device includes a sheet-slitting mechanism 100, a sheet-drawing mechanism 200 and a conveying mechanism 300, wherein the sheet-slitting mechanism 100 is arranged upstream of the sheet-drawing mechanism 200 for feeding, and sprays water toward the sheet from the side; the sheet-drawing mechanism 200 uses sheet suction and arc-shaped transfer to convert the vertical sheet into a horizontally transported sheet; the conveying mechanism 300 is horizontally adjacent to the discharge end of the sheet-drawing mechanism 200, and uses a multi-stage conveying structure to convey the horizontal sheet.

[0041] Among them, the slicing mechanism 100 includes a side spray mounting plate 110, a side spray adjustment component 120 and a side spray pipe 130; the side spray pipe 130 is installed on the side spray mounting plate 110, and the spray angle of the side spray pipe 130 is adjusted by the side spray adjustment component 120.

[0042] For a specific example, see Figure 2 , two side nozzles 130 are relatively mounted on the two ends of the side nozzle mounting plate 110. One end of the hollow tube body of the side nozzle 130 is blocked and the other end is open. The open end is connected to external high-pressure water, and a plurality of water spray holes or water spray grooves are opened on the outer peripheral surface of the hollow tube body. In a specific example, four parallel long slots are opened, two long in the middle and two short on the outside. Of course, there can also be multiple rows of water spray holes. The outer circumference of the cross-section of the hollow tube body is circular or polygonal. The side spray adjustment assembly 120 includes a nozzle adapter and an arc groove adapter, which are used to relatively mount the two side nozzles 130 on the two ends of the side spray mounting plate 110.

[0043] See also Figure 3-Figure 10 The sheet extraction mechanism 200 includes a vertical bearing guide assembly 210, a water absorption plate assembly 220, a lifting belt assembly 230 and an arc climbing assembly 240. Arrangement relationship: the lifting belt assembly 230 is arranged above the vertical bearing guide assembly 210, the water absorption plate assembly 220 is embedded in the middle and lower part of the lifting belt assembly 230, the lower end of the arc climbing assembly 240 is adjacent to the top of the lifting belt assembly 230, and the top end of the arc climbing assembly 240 lifts the climbing sheet and outputs it horizontally.

[0044] The vertical bearing guide assembly 210 includes a small wheel mounting member 211 and a plurality of groups of rust-proof wheels 212 . The plurality of groups of rust-proof wheels 212 are installed side by side on the same plane on the small wheel mounting member 211 , and are supported by the vertical bearing guide assembly 210 to be arranged vertically.

[0045] The small wheel mounting member 211 adopts a small wheel mounting plate structure with multiple small wheel mounting seats, and the rust-proof wheel 212 adopts plastic bearings, ceramic bearings, etc. Multiple rust-proof wheels 212 are coaxially spaced on each small wheel mounting seat.

[0046] The back side of the small wheel mounting member 211 is mounted on the side spray mounting plate 110 of the slicer mechanism 100 .

[0047] The water absorption plate group 220 includes a water absorption plate 221 , on which an air source hole 222 , an air extraction hole 223 and a belt avoidance guide groove 224 are provided; wherein the air extraction hole 223 and the belt avoidance guide groove 224 are provided on the front side of the water absorption plate 221 .

[0048] The air source hole 222 can be opened on any surface of the water absorption plate 221, as long as it is suitable for the installation environment. A water absorption plate installation hole is opened on the back of the water absorption plate 221, which is used to install the water absorption plate 221 to the middle and lower part of the lifting belt group 230. The water absorption plate 221 adopts a single-piece structure or a multi-piece combined structure.

[0049] Among them, the lifting belt group 230 includes a lifting back plate 231, a lifting pulley 232, a lifting belt 233, a lifting bearing seat 234 and a lifting drive unit 235; two sets of lifting pulleys 232 are installed to the upper and lower ends of the lifting back plate 231 through the lifting bearing seat 234, the lifting belt 233 is installed to the lifting pulley 232, and the lifting drive unit 235 drives the lifting belt 233 to move, thereby driving the vertical sheet to be lifted.

[0050] Furthermore, a belt support block 236 is provided in the middle of the lifting back plate 231, and a belt guide groove is provided on the belt support block 236.

[0051] Furthermore, the lifting belt set 230 is mounted to the side fixing plate of the sheet extraction mechanism 200 through the lifting mounting member 237. In a specific example, the lifting mounting member 237 is a mounting shaft, and both ends are fixedly connected to the side fixing plates on both sides through flanges. The shaft section of the mounting shaft is connected to the back side of the lifting back plate 231, thereby supporting the entire lifting belt set 230.

[0052] Principle of sheet lifting: The water absorption plate group 220 is installed to the lower middle part of the lifting back plate 231, providing an adsorption force to pull the sheet toward the lifting belt 233, and the lifting belt 233 moves upward to lift the adsorbed sheet.

[0053] The arc climbing assembly 240 includes a crescent-shaped guide member 241, a climbing belt 242, a climbing side support plate 243, a climbing pulley 244 and a climbing drive module 245;

[0054] Two climbing pulleys 244 are arranged at the two ends of the crescent-shaped guide 241, and two climbing side support plates 243 are supported on the two side surfaces of the climbing pulley 244 and the crescent-shaped guide 241; the climbing belt 242 is sleeved on the crescent-shaped guide 241 through the climbing pulley 244, and the climbing pulley 244 is driven by the climbing drive module 245.

[0055] The arc climbing assembly 240 also includes a climbing tension roller 246 and a belt idler pulley 247. The climbing tension roller 246 and the belt idler pulley 247 are arranged on the concave surface of the crescent-shaped guide member 241, and the arc convex surface thereof is the sheet abutment conveying surface.

[0056] In a specific example, a structure with adjustable installation position is provided at one end or both ends of the climbing tensioning roller 246 , such as an adjustment plate with grooves, a height adjustment nut assembly, etc., so as to adjust the tension of the climbing belt 242 .

[0057] Referring to the attached drawings, the climbing tension roller 246 adopts a smooth wheel axle structure, while the two belt idler wheels 247 adopt groove wheels with multiple guide grooves arranged side by side longitudinally.

[0058] Furthermore, both the climbing drive module 245 and the lifting drive unit 235 adopt a motor and a synchronous belt structure to ensure the stability of the slice separation and extraction.

[0059] Furthermore, the sheet extraction mechanism 200 also includes an auxiliary climbing component 250, which includes a flat-head nozzle 251 and a climbing auxiliary guide wheel group 252. The flat-head nozzle 251 and the climbing auxiliary guide wheel group 252 are installed to the lower feeding position of the arc-shaped climbing component 240 through an auxiliary climbing bracket group 253, wherein the flat-head nozzle 251 sprays obliquely upward toward the arc-shaped surface of the arc-shaped climbing component 240 to facilitate sheet climbing and sheet extraction.

[0060] Furthermore, the auxiliary climbing component 250 also includes a climbing sheet sensor 254 for sensing the presence or absence of material.

[0061] The sheet extraction mechanism 200 further includes a horizontal guiding group 260 , which is disposed at the discharge end of the arc climbing component 240 . The horizontal guiding group 260 uses a pulley or bearing mechanism to receive the sheet output from the discharge end of the arc climbing component 240 .

[0062] See also Fig.11 The multi-stage conveying structure of the conveying mechanism 300 speeds up step by step from front to back, including a debris detection module 320, a thickness detection module 330, a foreign material rejection module 340, a material receiving box 350 and an air blowing module 360 ​​arranged along the segmented transmission line 310; the debris detection module 320 and the thickness detection module 330 are arranged upstream of the foreign material rejection module 340, and the material receiving box 350 is arranged downstream of the foreign material rejection module 340; the air blowing module 360 ​​is arranged upstream and / or downstream of the foreign material rejection module 340.

[0063] See also Fig.12The slicing device also includes a slicing drive water tank 400, which includes a slicing water tank body 410, a silicon wafer driving module 420, a sheet pushing guide head 430, a roller guide assembly 440, a filter and drainage module 450 and a water tank inlet pipe group 460; in terms of arrangement relationship, the sheet pushing guide head 430 is connected to the end of the silicon wafer driving module 420 and is arranged close to the middle of the bottom of the slicing water tank body 410; the roller guide assembly 440 is arranged on both sides of the bottom of the slicing water tank body 410; the filter and drainage module 450 is arranged at the bottom of the slicing water tank body 410, and the water tank inlet pipe group 460 is arranged on the peripheral wall of the slicing water tank body 410.

[0064] Furthermore, the slicing driven water tank 400 also includes a slicing overflow baffle 470 and a water dividing liquid level device 480; the slicing overflow baffle 470 is arranged on the inner side of the peripheral wall of the slicing water tank body 410 to control the overflow liquid level; the water dividing liquid level device 480 is arranged on the inner side of the peripheral wall of the slicing water tank body 410 to monitor the liquid level of the water dividing tank.

[0065] Among them, the silicon wafer driving module 420 includes a driver, a driving rail and a driving adapter. The driver and the driving rail adopt a motor slide rail assembly or a linear motor assembly. The driving adapter is arranged in an inverted U shape as a whole. The bottom of one end is set close to the bottom of the water tank and is connected to the pushing guide head 430. The pushing guide head 430 directly abuts against the silicon wafer in the flower basket, thereby pushing the silicon wafer in the flower basket to move forward in a controllable manner along the roller guide rail assembly 440 through the silicon wafer driving module 420.

[0066] See also Fig.13 , a sheet inserting mechanism 500 is also provided downstream of the sheet separating device, i.e., at the end of the conveying mechanism 300, and includes a transfer mounting plate, a transverse movement module, a lifting module, and a clamping basket. The clamping basket is mounted on the lifting module, the lifting module is mounted on the transverse movement module, and the transverse movement module is mounted on the side of the transfer mounting plate; the clamping basket is driven and controlled to move along a U-shaped path on the side of the transfer mounting plate, so as to realize the cyclical transport of empty flower basket supply and full flower basket withdrawal. When the empty flower basket moves to the end of the conveying mechanism 300, it moves up step by step, and the upward movement rhythm is synchronized with the silicon wafer conveying rhythm of the conveying mechanism 300, so as to realize the layer-by-layer insertion of the flower basket.

[0067] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A slicing device, characterized in that: The sheet separation device comprises a sheet separation mechanism (100), a sheet extraction mechanism (200) and a conveying mechanism (300), wherein the sheet separation mechanism (100) is arranged upstream of the sheet extraction mechanism (200) for feeding and spraying water from the side toward the sheet; the sheet extraction mechanism (200) uses a sheet suction and arc-shaped transfer method to convert the vertical sheet into a horizontally transported sheet; the conveying mechanism (300) is horizontally adjacent to the discharge end of the sheet extraction mechanism (200) and uses a multi-stage conveying structure to convey the horizontal sheet.

2. The slicing device according to claim 1, characterized in that: The slicing mechanism (100) comprises a side spray mounting plate (110), a side spray adjusting assembly (120) and a side spray pipe (130); the side spray pipe (130) is mounted on the side spray mounting plate (110), and the spraying angle of the side spray pipe (130) is adjusted by the side spray adjusting assembly (120).

3. The slicing device according to claim 1, characterized in that: The sheet extraction mechanism (200) comprises a vertical bearing guide assembly (210), a water absorption plate assembly (220), a lifting belt assembly (230) and an arc-shaped climbing assembly (240); wherein the lifting belt assembly (230) is arranged above the vertical bearing guide assembly (210), the water absorption plate assembly (220) is embedded in the middle and lower part of the lifting belt assembly (230), the lower end of the arc-shaped climbing assembly (240) is adjacent to the top of the lifting belt assembly (230), and the top end of the arc-shaped climbing assembly (240) outputs the lifted and climbed sheet horizontally.

4. The slicing device according to claim 3, characterized in that: The vertical bearing guide assembly (210) comprises a small wheel mounting member (211) and a plurality of groups of rust-proof wheels (212); the plurality of groups of rust-proof wheels (212) are mounted side by side on the small wheel mounting member (211) in the same plane, and the plurality of groups of rust-proof wheels (212) are supported by the vertical bearing guide assembly (210) to be arranged vertically.

5. The slicing device according to claim 3, characterized in that: The water absorption plate group (220) comprises a water absorption plate (221), on which an air source hole (222), an air extraction hole (223) and a belt avoidance guide groove (224) are provided; wherein the air extraction hole (223) and the belt avoidance guide groove (224) are provided on the front side of the water absorption plate (221).

6. The slicing device according to claim 3, characterized in that: The lifting belt set (230) comprises a lifting back plate (231), a lifting pulley (232), a lifting belt (233), a lifting bearing seat (234) and a lifting drive unit (235); two sets of lifting pulleys (232) are installed to the upper and lower ends of the lifting back plate (231) through the lifting bearing seat (234), the lifting belt (233) is installed to the lifting pulley (232), and the lifting drive unit (235) drives the lifting belt (233) to move, thereby driving the vertical sheet to be lifted.

7. The slicing device according to claim 3, characterized in that: The arc-shaped climbing component (240) comprises a crescent-shaped guide member (241), a climbing belt (242), a climbing side support plate (243), a climbing pulley (244) and a climbing drive module (245); Two climbing pulleys (244) are arranged at both ends of the crescent-shaped guide member (241), and two climbing side support plates (243) are supported on the two side surfaces of the climbing pulley (244) and the crescent-shaped guide member (241); the climbing belt (242) is sleeved on the crescent-shaped guide member (241) through the climbing pulley (244), and drives the climbing pulley (244) through a climbing drive module (245).

8. The slicing device according to claim 3, characterized in that: The sheet extraction mechanism (200) further comprises an auxiliary climbing component (250), the auxiliary climbing component (250) comprising a flat-head nozzle (251) and an auxiliary climbing guide wheel group (252), the flat-head nozzle (251) and the auxiliary climbing guide wheel group (252) being mounted to a lower loading position of the arc-shaped climbing component (240) via an auxiliary climbing bracket group (253), wherein the flat-head nozzle (251) sprays obliquely upwards toward the arc-shaped surface of the arc-shaped climbing component (240), thereby facilitating sheet climbing extraction.

9. The slicing device according to claim 1, characterized in that: The multi-stage conveying structure of the conveying mechanism (300) is accelerated step by step from front to back, and comprises a debris detection module (320), a thickness detection module (330), a foreign material rejection module (340), a material receiving box (350) and an air blowing module (360) arranged along the segmented transmission line (310); the debris detection module (320) and the thickness detection module (330) are arranged upstream of the foreign material rejection module (340), and the material receiving box (350) is arranged downstream of the foreign material rejection module (340); and the air blowing module (360) is arranged upstream and / or downstream of the foreign material rejection module (340).

10. The slicing device according to claim 1, characterized in that: The slicing device also includes a slicing drive water tank (400), and the slicing drive water tank (400) includes a slicing water tank body (410), a silicon chip driving module (420), a sheet pushing guide head (430), a roller guide assembly (440), a filtering and draining module (450) and a water tank inlet pipe group (460); wherein the sheet pushing guide head (430) is connected to the end of the silicon chip driving module (420) and is arranged close to the middle of the bottom of the slicing water tank body (410); the roller guide assembly (440) is arranged on both sides of the bottom of the slicing water tank body (410); the filtering and draining module (450) is arranged at the bottom of the slicing water tank body (410), and the water tank inlet pipe group (460) is arranged on the peripheral wall of the slicing water tank body (410).

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