Bonding device

Abstract

The invention relates to a bonding device comprising a main body which is provided with an accommodating channel in a penetrating manner along a first direction; the shaft body is movably arranged in the accommodating channel in a penetrating manner; the flexible part comprises a first supporting part, a second supporting part and a movable part, the first supporting part and the second supporting part are arranged on the two opposite sides of the movable part and are both connected with the main body, and the movable part is connected with the shaft body and is spaced from the main body; the bonding head is connected to the movable part; the movable part is configured to be capable of driving the shaft body to move in the first direction under the pressure effect of the bonding head. The movable part can deform in the first direction and drive the shaft body to move in the first direction, the first supporting part and the second supporting part can enhance the rigidity of the flexible part in the direction intersecting with the first direction, and the probability that the flexible part deviates in the direction intersecting with the first direction is reduced; therefore, the pressure applied to the target piece in the bonding process is more stable, and the precision of a bonded product is improved.

Description

Technical Field

[0001] The present application relates to the technical field of bonding process, and in particular to a bonding device. Background Art

[0002] The bonding process refers to a process of bonding an IC (integrated circuit chip) or other structure with a COF (Chip OnFlex) film. This process requires taking the IC and then hot-pressing and bonding the IC to the COF cable to achieve fixation between the two.

[0003] However, during the hot pressing process, the process pressure is often unstable and difficult to control. Once the pressure changes or deviates due to various factors, it will affect the accuracy of the product after bonding. Summary of the invention

[0004] Based on this, it is necessary to provide a bonding device to address the problem that the process pressure is unstable and difficult to control during the bonding process.

[0005] In a first aspect, the present application provides a bonding device, comprising:

[0006] The main body has an accommodating channel extending through the main body along a first direction;

[0007] an axis body, movably disposed in the accommodating channel along the first direction;

[0008] A flexible member, comprising a first supporting portion, a second supporting portion and a movable portion, wherein the first supporting portion and the second supporting portion are arranged on opposite sides of the movable portion along a direction intersecting the first direction and are both connected to the main body, and the movable portion is connected to the shaft and is spaced apart from the main body in the first direction; and

[0009] A bonding head connected to the movable part and used for taking and placing the target part to be bonded;

[0010] Wherein, the movable portion is configured to be able to drive the shaft body to move along the first direction under the pressure of the binding head.

[0011] In some embodiments, the first supporting portion and the second supporting portion both have a supporting surface disposed toward the main body, the supporting surface abutting against the surface of the main body, the movable portion has a connecting surface disposed toward the main body and connected to the shaft, and in the first direction, the connecting surface is spaced apart from the main body.

[0012] In some embodiments, the flexible member also includes a transition portion connected between the first supporting portion and the movable portion and / or between the second supporting portion and the movable portion, and an avoidance groove is provided on a surface of the transition portion on one side facing the main body, and the avoidance groove is used to provide deformation space for the movable portion to move in the first direction.

[0013] In some embodiments, the avoidance groove includes a first sub-groove and a second sub-groove, the first sub-groove is opened at the connection position between the transition part and the first support part or the second support part, and the second sub-groove is opened at the connection position between the transition part and the movable part.

[0014] In some embodiments, the shaft has a first end and a second end disposed opposite to each other along the first direction, the first end is used to connect with the bungee, and the flexible member is connected to the first end and / or the second end.

[0015] In some embodiments, the flexible member includes a first sub-member and a second sub-member, the first sub-member is connected to the first end, and the second sub-member is connected to the second end; the first supporting portion, the movable portion, and the second supporting portion of the first sub-member are sequentially arranged along the second direction, and the first supporting portion, the movable portion, and the second supporting portion of the second sub-member are sequentially arranged along the third direction;

[0016] The first direction, the second direction and the third direction are arranged to intersect each other.

[0017] In some embodiments, the bonding device further includes a pre-pressing component, which is disposed on a side of the second sub-component away from the second end and is used to provide pre-pressing force for the second sub-component and the shaft along the first direction.

[0018] In some embodiments, the pre-stressing assembly includes a support member and a pressure member, the support member is arranged on the side of the second sub-member away from the second end and is spaced apart from the second sub-member, and the pressure member is movably arranged on the support member along the first direction to adjust the pre-stressing force applied to the second sub-member and the shaft.

[0019] In some embodiments, the pressure member includes a mating sub-member and an adjusting sub-member, one of the mating sub-member and the adjusting sub-member is provided with a first connecting portion, and the other is provided with a second connecting portion, and the first connecting portion and the second connecting portion are movably mated and connected along the first direction so that the mating sub-member and the adjusting sub-member can move relative to each other along the first direction.

[0020] In some embodiments, a mating groove extending along the first direction is provided on the mating sub-component, a first thread is provided on a groove wall of the mating groove, and a second thread matching the first thread is provided on an outer peripheral surface of the adjusting sub-component.

[0021] In some embodiments, the pre-pressing assembly further includes a buffer component, which is connected between the mating component and the supporting component and is used to provide a buffer force along the first direction.

[0022] In some embodiments, the bonding device further includes a dynamometer, which is connected between the pre-stressing assembly and the second sub-component along the first direction, and is used to measure the pre-stressing force and transmit the pre-stressing force to the second sub-component and the shaft.

[0023] In some embodiments, the bonding device also includes a driving member and a control member, wherein the driving member is connected to the main body for driving, and the control member is respectively communicated with the force gauge and the driving member for receiving the measurement result of the force gauge and controlling the driving member to drive the main body to move along the first direction according to the measurement result.

[0024] In some embodiments, the bonding device further includes a heat insulating member disposed between the first sub-component and the bonding head.

[0025] In the above-mentioned bonding device, after the bonding head takes the target part to be bound, the target part is hot-pressed. Under the pressure of the bonding head, the movable part of the flexible part can be deformed along the first direction and drive the shaft to move along the first direction. At the same time, the first support part and the second support part play a supporting role on the opposite sides of the movable part, which can enhance the rigidity of the flexible part in the direction intersecting with the first direction, reduce the probability of the flexible part offset in the direction intersecting with the first direction, so that the flexible part can be more stably deformed along the first direction, and the deformation is converted into the movement of the shaft in the first direction, so that the pressure applied to the target part during the bonding process is more stable, thereby improving the accuracy of the product after bonding. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] FIG. 1 is a schematic diagram of the overall structure of a bonding device according to one or more embodiments.

[0027] FIG. 2 is a cross-sectional schematic diagram of a bonding device according to one or more embodiments.

[0028] FIG. 3 is a schematic diagram of a structure of a flexible member in a bonding device according to one or more embodiments.

[0029] FIG. 4 is a schematic diagram of a structure of a flexible member in a bonding device according to one or more embodiments.

[0030] 5 is a cross-sectional schematic diagram of a bonding device according to one or more embodiments.

[0031] 6 is a cross-sectional schematic diagram of a bonding device according to one or more embodiments.

[0032] FIG. 7 is a schematic diagram of the structure of a matching sub-component and an adjusting sub-component in a bonding device according to one or more embodiments.

[0033] FIG. 8 is a schematic diagram of the structure of a bonding head in a bonding device according to one or more embodiments.

[0034] Explanation of the reference numerals in the accompanying drawings: 100, bonding device; 10, main body; 20, shaft body; 30, flexible part; 40, bonding head; 50, pre-stressing assembly; 60, dynamometer; 70, thermal insulation part; 11, accommodating channel; 21, first end; 22, second end; 31, first supporting part; 32, second supporting part; 33, movable part; 34, supporting surface; 35, connecting surface; 36, transition part; 37, avoidance groove; 38, first sub-component; 39, second sub-component; 41, adsorption surface; 42, adsorption hole; 51, supporting part; 52, pressure part; 53, buffer part; 371, first sub-groove; 372, second sub-groove; 521, matching sub-component; 522, adjusting sub-component; 523, matching groove; a, first direction; b, second direction; c, third direction. DETAILED DESCRIPTION

[0035] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0036] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0037] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0038] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0039] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0040] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0041] Please refer to FIG. 1, FIG. 2 and FIG. 3 together. An embodiment of the present application provides a bonding device 100, including a main body 10, a shaft body 20, a flexible member 30 and a bonding head 40. The main body 10 is provided with a receiving channel 11 along a first direction a, and the shaft body 20 is movably arranged in the receiving channel 11 along the first direction a. The flexible member 30 includes a first support portion 31, a second support portion 32 and a movable portion 33. The first support portion 31 and the second support portion 32 are arranged on opposite sides of the movable portion 33 along a direction intersecting with the first direction a, and are both connected to the main body 10. The movable portion 33 is connected to the shaft body 20 and is spaced apart from the main body 10 in the first direction a. The bonding head 40 is connected to the movable portion 33 and is used to pick up and place the target part to be bonded. Among them, the movable portion 33 is configured to be able to drive the shaft body 20 to move along the first direction a under the pressure of the bonding head 40.

[0042] It should be noted that the bonding device 100 refers to a device for hot pressing and bonding an IC to a COF cable. The main body 10 refers to a structure in the bonding device 100 for providing a mounting and supporting basis for other structures. The shape of the main body 10 can be set to be rectangular or cylindrical or other shapes, and a receiving channel 11 is provided on the main body 10 along a first direction a. Specifically, the first direction a can be set to be a vertical direction, that is, the receiving channel 11 extends along the vertical direction and penetrates the main body 10. In this way, the receiving channel 11 can form an installation space.

[0043] Furthermore, the shaft body 20 is extended in the vertical direction and is inserted into the receiving channel 11. That is, one end of the shaft body 20 in the longitudinal direction thereof extends into an opening on one side of the receiving channel 11 and extends out from an opening on the other side, so that the shaft body 20 is inserted into the receiving channel 11. At this time, the shaft body 20 can move in the vertical direction in the receiving channel 11.

[0044] The flexible part 30 refers to a structure that can undergo elastic deformation to drive the shaft body 20 to move in the vertical direction. The flexible part 30 includes a first support part 31, a second support part 32 and a movable part 33. The first support part 31 and the second support part 32 are arranged on opposite sides of the movable part 33 along a direction perpendicular to the first direction a, that is, when the first direction a is set to a vertical direction, the first support part 31 and the second support part 32 are arranged on opposite sides of the movable part 33 along the first horizontal direction.

[0045] Specifically, in the vertical direction, the positions of the first support portion 31 and the second support portion 32 correspond to the positions of the main body 10, so that the first support portion 31 and the second support portion 32 can be connected to the main body 10 respectively, that is, the first support portion 31 and the second support portion 32 are supported on the main body 10 in the vertical direction. At the same time, the movable portion 33 is located between the first support portion 31 and the second support portion 32, and the position of the movable portion 33 corresponds to the position of the shaft body 20, so that the movable portion 33 can be connected to the shaft body 20, so that the movable portion 33 can smoothly drive the shaft body 20 to move in the vertical direction.

[0046] Furthermore, the movable part 33 is spaced apart from the main body 10 in the vertical direction, that is, in the vertical direction, the space formed between the movable part 33 and the main body 10 can provide a certain deformation space for the movable part 33. When the movable part 33 is deformed in the vertical direction under the action of external force, it can smoothly drive the shaft body 20 to move in the vertical direction.

[0047] In addition, the bonding head 40 refers to a structure that is actually connected to the target part to be bonded, i.e., the IC, and is used to apply pressure to the IC so as to hot-press the IC onto the COF cable. The bonding head 40 is disposed at the bottom of the bonding device 100 to facilitate taking or putting down the IC. The bonding head 40 is connected to the movable part 33. When the IC is hot-pressed, the pressure is transmitted to the movable part 33 through the bonding head 40, causing the movable part 33 to deform in the vertical direction, thereby driving the shaft 20 to move in the vertical direction. As a result, the pressure applied to the IC is buffered, which can effectively protect the structure of the IC and the COF cable during the hot-pressing process.

[0048] Through the above structure, under the pressure of the bonding head 40, the movable part 33 of the flexible part 30 can be deformed along the first direction a, and drive the shaft body 20 to move along the first direction a. At the same time, the first support part 31 and the second support part 32 play a supporting role on the opposite sides of the movable part 33, which can strengthen the rigidity of the flexible part 30 in the direction intersecting with the first direction a, reduce the probability of the flexible part 30 deviating in the direction intersecting with the first direction a, so that the flexible part 30 can be more stably deformed along the first direction a, and the deformation is converted into the movement of the shaft body 20 in the first direction a, so that the pressure applied to the target part during the bonding process is more stable, and the accuracy of the product after bonding is improved.

[0049] As shown in Figures 3 and 4, in some embodiments, the first support portion 31 and the second support portion 32 both have a support surface 34 disposed toward the main body 10, and the support surface 34 abuts against the surface of the main body 10. The movable portion 33 has a connecting surface 35 disposed toward the main body 10 and connected to the shaft body 20. In the first direction a, the connecting surface 35 is spaced apart from the main body 10.

[0050] Specifically, the side surfaces of the first support portion 31 and the second support portion 32 disposed toward the main body 10 are configured as support surfaces 34. In the vertical direction, the support surface 34 of the first support portion 31 is at the same height as the support surface 34 of the second support portion 32. In this way, the support surface 34 of the first support portion 31 and the support surface 34 of the second support portion 32 can abut against and cooperate with the lower surface of the main body 10, thereby forming a more stable support.

[0051] A side surface of the movable portion 33 disposed toward the main body 10 is configured as a connecting surface 35 , and the connecting surface 35 is connected to the shaft body 20 , so that the movable portion 33 can smoothly drive the shaft body 20 to move in the vertical direction.

[0052] In the vertical direction, the support surfaces 34 of the first support portion 31 and the second support portion 32 are respectively supported against the lower surface of the main body 10. At the same time, the connection surface 35 of the movable portion 33 is spaced from the lower surface of the main body 10, providing a certain deformation space for the movable portion 33.

[0053] As a specific embodiment, the distance between the connection surface 35 and the lower surface of the main body 10 can be set to 1 mm. Of course, in some other embodiments, the distance between the connection surface 35 and the lower surface of the main body 10 can also be adjusted according to actual conditions to meet the pressure required during the hot pressing process, which will not be repeated here.

[0054] Through the above structure, a certain deformation space is formed between the connecting surface 35 and the main body 10. At the same time, the first support part 31 and the second support part 32 can be stably supported by the support surface 34 and the main body 10 to strengthen the rigidity of the overall structure of the flexible part 30 in the horizontal direction, so that the movable part 33 can be deformed more stably in the vertical direction, making the pressure in the vertical direction more stable.

[0055] In some embodiments, the flexible member 30 also includes a transition portion 36 connected between the first support portion 31 and the movable portion 33 and / or between the second support portion 32 and the movable portion 33, and a avoidance groove 37 is provided on a surface of the transition portion 36 on one side facing the main body 10, and the avoidance groove 37 is used to provide a deformation space for the movable portion 33 to move in the first direction a.

[0056] Specifically, the transition portion 36 serves as a connection between the first support portion 31 and the movable portion 33 and between the second support portion 32 and the movable portion 33. Thus, when the movable portion 33 is deformed smoothly in the vertical direction, the first support portion 31 and the second support portion 32 can provide the movable portion 33 with higher rigidity in the horizontal direction, so that the deformation of the movable portion 33 in the vertical direction is more stable.

[0057] Furthermore, an avoidance groove 37 is provided on a side surface of the transition portion 36 facing the main body 10, that is, the avoidance groove 37 is provided on the same side surface of the transition portion 36 as the support surface 34 and the connection surface 35, and the opening of the avoidance groove 37 faces the main body 10. When the movable portion 33 deforms and moves in the vertical direction under the action of an external force, the avoidance groove 37 provides a deformation space for the movable portion 33, so that the first support portion 31 and the second support portion 32 are not affected and can be supported on the main body 10 more stably.

[0058] Therefore, by providing the avoidance groove 37 , a deformation space is provided for the movable portion 33 to deform and move in the first direction a, so that when the movable portion 33 is deformed, the first support portion 31 and the second support portion 32 can be stably supported on the main body 10 .

[0059] In some embodiments, the avoidance groove 37 includes a first sub-groove 371 and a second sub-groove 372 . The first sub-groove 371 is opened at the connection position between the transition portion 36 and the first support portion 31 or the second support portion 32 , and the second sub-groove 372 is opened at the connection position between the transition portion 36 and the movable portion 33 .

[0060] Specifically, the openings of the first sub-groove 371 and the second sub-groove 372 are arranged relative to each other so that the first sub-groove 371 is located at the connection between the transition portion 36 and the first support portion 31, and the second sub-groove 372 is located at the connection between the transition portion 36 and the movable portion 33, or the first sub-groove 371 is located at the connection between the transition portion 36 and the second support portion 32, and the second sub-groove 372 is located at the connection between the transition portion 36 and the movable portion 33.

[0061] Through the above structure, the movable portion 33 can be deformed more stably along the first direction a, and drive the shaft body 20 to move along the first direction a.

[0062] As shown in Figures 2, 5 and 6, in some embodiments, the shaft 20 has a first end 21 and a second end 22 arranged opposite to each other along a first direction a, the first end 21 is used to connect with the bungee 40, and the flexible member 30 is connected to the first end 21 and / or the second end 22.

[0063] Specifically, the shaft body 20 has a first end 21 and a second end 22 that are arranged opposite to each other. The first end 21 of the shaft body 20 is arranged downward and is inserted into the accommodating channel 11 until it extends out of the accommodating channel 11 and is connected to the bottom header 40, while the second end 22 is located at the other end of the accommodating channel 11.

[0064] The flexible member 30 can be provided as one and connected to the first end 21 or the second end 22. That is, when the flexible member 30 is provided as one, it can be provided at the top end of the shaft body 20 or at the bottom end of the shaft body 20. When the flexible member 30 is provided at the bottom end of the shaft body 20, the flexible member 30 is actually connected between the bungee 40 and the shaft body 20.

[0065] Of course, two flexible members 30 can also be provided, and the two flexible members 30 are respectively connected to the first end 21 and the second end 22. That is, one flexible member 30 is provided at the top of the shaft body 20, and the other flexible member 30 is provided between the bungee 40 and the shaft body 20.

[0066] In this way, the flexible member 30 can uniformly transmit pressure along the first direction a, so that the shaft body 20 can stably move along the first direction a. Among them, two flexible members 30 are provided to cooperate with each other, which can further improve stability.

[0067] Please refer to FIG. 1 and FIG. 2 again. In some embodiments, the flexible member 30 includes a first sub-member 38 and a second sub-member 39. The first sub-member 38 is connected to the first end 21, and the second sub-member 39 is connected to the second end 22. The first supporting portion 31, the movable portion 33, and the second supporting portion 32 of the first sub-member 38 are sequentially arranged along the second direction b, and the first supporting portion 31, the movable portion 33, and the second supporting portion 32 of the second sub-member 39 are sequentially arranged along the third direction c. Among them, the first direction a, the second direction b, and the third direction c are arranged to intersect each other.

[0068] Specifically, the flexible component 30 is provided with two parts, namely a first sub-component 38 and a second sub-component 39 , wherein the first sub-component 38 is provided at the first end 21 of the shaft body 20 , that is, provided between the shaft body 20 and the bungee 40 , and the second sub-component 39 is provided at the second end 22 of the shaft body 20 , that is, provided at the top end of the shaft body 20 .

[0069] When the first direction a is set as a vertical direction, the second direction b can be set as a first horizontal direction, and the third direction c can be set as a second horizontal direction, wherein the first horizontal direction and the second horizontal direction are perpendicular to each other.

[0070] When the first supporting portion 31, the movable portion 33 and the second supporting portion 32 of the first sub-component 38 are sequentially arranged along the first horizontal direction, the first supporting portion 31, the movable portion 33 and the second supporting portion 32 of the second sub-component 39 are sequentially arranged along the second horizontal direction. In other words, the arrangement directions of the first supporting portion 31, the movable portion 33 and the second supporting portion 32 of the first sub-component 38 and the first supporting portion 31, the movable portion 33 and the second supporting portion 32 of the second sub-component 39 are perpendicular to each other in the horizontal plane.

[0071] In this way, in the vertical direction, the movable portion 33 of the first sub-component 38 and the movable portion 33 of the second sub-component 39 can be arranged relative to each other and stably transmit pressure in the vertical direction. At the same time, the first support portion 31 and the second support portion 32 of the first sub-component 38 and the first support portion 31 and the second support portion 32 of the second sub-component 39 can form a more stable support in the horizontal direction, strengthen the rigidity in the horizontal direction, and reduce the probability of the flexible component 30 being offset in the horizontal direction.

[0072] In some embodiments, the bonding device 100 further includes a pre-pressing component 50 , which is disposed on a side of the second component 39 away from the second end 22 and is used to provide pre-pressing force for the second component 39 and the shaft body 20 along the first direction a.

[0073] Specifically, the pre-pressing component 50 refers to a structure that can provide a certain pre-pressure along the first direction a. The pre-pressing component 50 is arranged on the side of the second sub-component 39 away from the second end 22 of the shaft body 20. Before the hot pressing operation, the pre-pressure is first set according to the required pressure. For example, when the required pressure is 450N, the pre-pressure can be set to 440N. Then, during the hot pressing, the movable part 33 is deformed in the vertical direction under the action of pressure, thereby driving the shaft body 20 to move in the vertical direction, causing the pressure on the pre-pressing component 50 to change, and the pressure actually applied to the IC during the operation is controlled according to the change value.

[0074] In this way, a certain pre-pressure is provided by the pre-pressing component 50, so that the range of pressure adjustment is smaller and more precise, and the accuracy of pressure control during the hot pressing process can be improved.

[0075] As shown in FIG. 2 and FIG. 5 , in some embodiments, the pre-pressing assembly 50 includes a support member 51 and a pressure member 52. The support member 51 is disposed on a side of the second sub-member 39 away from the second end 22 and is spaced apart from the second sub-member 39. The pressure member 52 is movably disposed on the support member 51 along the first direction a to adjust the pre-pressing force applied to the second sub-member 39 and the shaft body 20.

[0076] Specifically, the support member 51 can be but is not limited to being set as a support frame, which is mounted on the side of the second sub-component 39 away from the second end 22, wherein the support frame is supported on the first support portion 31 and the second support portion 32 of the second sub-component 39, and the middle position of the support frame is spaced apart from the second sub-component 39.

[0077] The pressure piece 52 is arranged on the support piece 51, and the pressure piece 52 can move in the vertical direction relative to the support piece 51. In this way, through the movement of the pressure piece 52 in the vertical direction, pre-pressure can be applied to the shaft body 20 through the second sub-component 39, and the size of the pre-pressure applied to the shaft body 20 can be adjusted by the specific position of the movement of the pressure piece 52.

[0078] In some embodiments, the pressure member 52 includes a mating sub-member 521 and an adjusting sub-member 522, one of the mating sub-member 521 and the adjusting sub-member 522 is provided with a first connecting portion (not shown in the figure), and the other is provided with a second connecting portion (not shown in the figure), and the first connecting portion and the second connecting portion are movably mated and connected along a first direction a, so that the mating sub-member 521 and the adjusting sub-member 522 can move relative to each other along the first direction a.

[0079] Specifically, the first connecting portion can be set on the matching sub-component 521, and the second connecting portion is set on the adjusting sub-component 522. At this time, the first connecting portion and the second connecting portion are matched and connected, and the two can move relative to each other along the first direction a, thereby driving the matching sub-component 521 and the adjusting sub-component 522 to move relative to each other along the vertical direction.

[0080] Of course, in some other embodiments, the first connection portion may also be disposed on the adjusting sub-component 522, and the second connection portion is disposed on the matching sub-component 521, and the two are matched and connected with each other.

[0081] In this way, the pressure member 52 can move relative to the support member 51 in the vertical direction, thereby adjusting the pre-pressure applied by the pressure member 52 to the second sub-member 39 and the shaft body 20 .

[0082] As shown in FIG. 7 , in some embodiments, a mating groove 523 extending along a first direction a is provided on the mating sub-component 521 , a first thread is provided on the groove wall of the mating groove 523 , and a second thread matching the first thread is provided on the outer peripheral surface of the adjusting sub-component 522 .

[0083] Specifically, the matching sub-component 521 can be set as a connecting bolt, and a matching groove 523 extending along the first direction a is provided on the connecting bolt, and the groove opening of the matching groove 523 is opened upward. In addition, a first thread is provided on the inner wall of the matching groove 523.

[0084] Furthermore, the adjusting sub-component 522 can be configured as an adjusting screw that cooperates with the connecting bolt, and a second thread matching the first thread is provided on the outer peripheral surface of the adjusting screw, wherein the first thread is an internal thread and the second thread is an external thread.

[0085] The adjusting screw is inserted into the matching groove 523, and the adjusting screw is rotated so that the adjusting screw and the connecting bolt are connected through the first thread and the second thread. When the adjusting screw is screwed in, the adjusting screw and the connecting bolt are used as an integral structure, and their total length in the vertical direction becomes smaller, that is, the preload applied to the second sub-component 39 and the shaft body 20 is reduced. When the adjusting screw is unscrewed, the adjusting screw and the connecting bolt are used as an integral structure, and their total length in the vertical direction becomes larger, that is, the preload applied to the second sub-component 39 and the shaft body 20 is increased. In this way, the preload applied to the second sub-component 39 and the shaft body 20 can be adjusted simply and quickly.

[0086] It can be understood that in some other embodiments, the mating sub-component 521 and the adjusting sub-component 522 can also be set as other mutually cooperating structures. For example, a slot and a block are respectively set on the mating sub-component 521 and the adjusting sub-component 522. By engaging the block with the slots at different positions, the relative position between the mating sub-component 521 and the adjusting sub-component 522 can be adjusted, thereby realizing the movement of the pressure component 52 in the vertical direction.

[0087] As shown in FIG. 2 , FIG. 5 and FIG. 6 , in some embodiments, the pre-pressing assembly 50 further includes a buffer member 53 , which is connected between the matching sub-member 521 and the supporting member 51 and is used to provide a buffer force along the first direction a.

[0088] Specifically, the buffer member 53 can be, but is not limited to, a spring, which is sleeved on the outer periphery of the matching sub-member 521, and the spring is located between the matching sub-member 521 and the support member 51. In this way, during the process of the pre-pressing assembly 50 providing pre-pressure to the second sub-member 39 and the shaft body 20, and during the hot pressing operation of the bungee 40, the spring can provide a certain buffer force in the vertical direction.

[0089] In some embodiments, the bonding device 100 further includes a dynamometer 60 , which is connected between the preload assembly 50 and the second sub-component 39 along the first direction a, and is used to measure the preload and transfer the preload to the second sub-component 39 and the shaft 20 .

[0090] Specifically, the dynamometer 60 can be, but is not limited to, set as a pressure sensor. The dynamometer 60 is set between the mating sub-component 521 and the second sub-component 39. The dynamometer 60 can transfer the pre-pressure formed between the mating sub-component 521 and the adjusting sub-component 522 to the second sub-component 39 and the shaft 20, and during the transfer process, the dynamometer 60 can measure the pre-pressure in real time.

[0091] Thus, the pressure can be better adjusted according to the size of the pre-pressure fed back by the dynamometer 60. In addition, during the hot pressing operation, the movable portion 33 is deformed and drives the shaft 20 to move in the vertical direction, so that the shaft 20 presses the dynamometer 60 upward. At this time, the force on the dynamometer 60 changes. The dynamometer 60 can quickly measure the change in force and judge the actual pressure applied to the IC according to the size of the change, so as to more accurately adjust the pressure and achieve high-precision control.

[0092] In some embodiments, the bonding device 100 also includes a driving member (not shown in the figure) and a control member (not shown in the figure), the driving member is connected to the main body 10, and the control member is respectively communicated with the dynamometer 60 and the driving member, and is used to receive the measurement results of the dynamometer 60 and control the driving member to drive the main body 10 to move along the first direction a according to the measurement results.

[0093] Specifically, the driving member may be, but is not limited to, a servo motor, and the servo motor drives the main body 10 to move in the vertical direction to perform the hot pressing operation.

[0094] Furthermore, the control member can be a controller, and is respectively connected to the dynamometer 60 and the driving member. During the hot pressing operation, the dynamometer 60 measures the actual pressure in real time and transmits the measurement result to the control member, and the control member controls the driving member in time according to the measurement result to drive the main body 10 to move in the vertical direction, thereby achieving high-precision control of the pressure.

[0095] In some embodiments, the bonding device 100 further includes a heat insulating member 70 disposed between the first sub-member 38 and the bonding head 40 .

[0096] It should be noted that during the hot pressing operation, the bonding head 40 is connected to the IC and needs to provide heat and pressure to the IC, wherein the pressure is usually controlled between 10N-500N and the temperature needs to reach 500°C.

[0097] Based on this, a heat insulating member 70 is provided between the first sub-assembly 38 and the bungee 40 to isolate the heat on the bungee 40, thereby preventing the heat from being further transferred and reducing the probability of damage to the first sub-assembly 38 and other structures in a high temperature environment.

[0098] The heat insulating member 70 may be made of inorganic heat insulating material, and its heat resistant temperature needs to reach 500°C.

[0099] As shown in FIG. 8 , in some embodiments, a suction surface 41 is provided on a side of the binding head 40 away from the movable portion 33 , and suction holes 42 are provided on the suction surface 41 for suctioning the target part.

[0100] Specifically, the side surface of the bungee 40 facing away from the movable part 33 is the bottom surface of the bungee 40, and an adsorption surface 41 is provided on the bottom surface. An adsorption hole 42 is provided on the adsorption surface 41, and an inner cavity connected to the adsorption hole 42 can be provided inside the bungee 40. By drawing negative pressure into the inner cavity, adsorption between the adsorption surface 41 and the IC can be achieved, thereby achieving adsorption of the IC by the bungee 40.

[0101] After the bonding head 40 adsorbs the IC onto the adsorption surface 41 , it can drive the IC to move and position the IC to a designated position on the COF cable for heat pressing operation.

[0102] According to one or more embodiments, in the actual application process of the present application, the IC is firstly adsorbed onto the adsorption surface 41 of the bonding head 40, and the bonding head 40 is used to position the IC to a designated position on the COF cable.

[0103] Furthermore, the pre-pressure applied to the second sub-component 39 and the shaft body 20 is adjusted by adjusting the specific position between the adjusting screw and the connecting bolt by screwing in or out the adjusting screw according to the pressure required during the hot pressing operation.

[0104] At the same time, the dynamometer 60 is between the second sub-component 39 and the connecting bolt, and can measure the pre-pressure in real time, so as to better adjust the size of the pre-pressure.

[0105] After the pre-pressure is adjusted, the temperature of the bonding head 40 is adjusted according to the temperature required for the hot pressing operation, and the IC is hot pressed onto the COF cable through the bonding head 40. At this time, under the action of pressure, the movable portion 33 of the first sub-component 38 is deformed upward, and drives the shaft body 20 to move upward. The second end 22 of the shaft body 20 presses against the movable portion 33 of the second sub-component 39, drives the movable portion 33 of the second sub-component 39 to deform upward, and transmits the pressure to the dynamometer 60. The dynamometer 60 can measure the pressure in real time, and feed back the measurement results to the control component, and then adjust the output torque of the driving component according to the measurement results, so as to achieve high-precision control of the pressure and improve the accuracy of the product after bonding.

[0106] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0107] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A bonding device, characterized in that: include: The main body has an accommodating channel extending through the main body along a first direction; an axis body, movably disposed in the accommodating channel along the first direction; A flexible member, comprising a first supporting portion, a second supporting portion and a movable portion, wherein the first supporting portion and the second supporting portion are arranged on opposite sides of the movable portion along a direction intersecting the first direction and are both connected to the main body, and the movable portion is connected to the shaft and is spaced apart from the main body in the first direction; and A bonding head connected to the movable part and used for taking and placing the target part to be bonded; Wherein, the movable portion is configured to be able to drive the shaft body to move along the first direction under the pressure of the binding head.

2. The bonding device according to claim 1, characterized in that: The first supporting portion and the second supporting portion both have a supporting surface disposed toward the main body, the supporting surface abutting against the surface of the main body, the movable portion has a connecting surface disposed toward the main body and connected to the shaft, and in the first direction, the connecting surface is spaced apart from the main body.

3. The bonding device according to claim 2, characterized in that: The flexible member also includes a transition portion connected between the first supporting portion and the movable portion and / or between the second supporting portion and the movable portion, and an avoidance groove is provided on a surface of the transition portion on one side facing the main body, and the avoidance groove is used to provide deformation space for the movable portion to move in the first direction.

4. The bonding device according to claim 3, characterized in that: The avoidance groove includes a first sub-groove and a second sub-groove, the first sub-groove is opened at a connection position between the transition portion and the first supporting portion or the second supporting portion, and the second sub-groove is opened at a connection position between the transition portion and the movable portion.

5. The bonding device according to claim 1, characterized in that: The shaft body has a first end and a second end that are arranged opposite to each other along the first direction, the first end is used to be connected to the bungee, and the flexible member is connected to the first end and / or the second end.

6. The bonding device according to claim 5, characterized in that: The flexible component includes a first subcomponent and a second subcomponent, the first subcomponent is connected to the first end, and the second subcomponent is connected to the second end; the first supporting portion, the movable portion, and the second supporting portion of the first subcomponent are sequentially arranged along the second direction, and the first supporting portion, the movable portion, and the second supporting portion of the second subcomponent are sequentially arranged along the third direction; The first direction, the second direction and the third direction are arranged to intersect each other.

7. The bonding device according to claim 6, characterized in that: The bonding device further comprises a pre-pressing component, which is arranged on a side of the second sub-component away from the second end and is used to provide pre-pressing force for the second sub-component and the shaft body along the first direction.

8. The bonding device according to claim 7, characterized in that: The pre-stressing assembly includes a support member and a pressure member. The support member is arranged on the side of the second sub-member away from the second end and is spaced apart from the second sub-member. The pressure member is movably arranged on the support member along the first direction to adjust the pre-stressing force applied to the second sub-member and the shaft.

9. The bonding device according to claim 8, characterized in that: The pressure member includes a matching sub-member and an adjusting sub-member, one of the matching sub-member and the adjusting sub-member is provided with a first connecting portion, and the other is provided with a second connecting portion, and the first connecting portion and the second connecting portion are movably matched and connected along the first direction so that the matching sub-member and the adjusting sub-member can move relative to each other along the first direction.

10. The bonding device according to claim 9, characterized in that: The matching sub-component is provided with a matching groove extending along the first direction, a groove wall of the matching groove is provided with a first thread, and an outer peripheral surface of the adjusting sub-component is provided with a second thread matching the first thread.

11. The bonding device according to claim 9, characterized in that: The pre-pressing assembly further includes a buffer component, which is connected between the matching component and the supporting component and is used to provide a buffer force along the first direction.

12. The bonding device according to claim 7, characterized in that: The bonding device further comprises a dynamometer, which is connected between the pre-stressing assembly and the second sub-component along the first direction, and is used for measuring the pre-stressing force and transmitting the pre-stressing force to the second sub-component and the shaft.

13. The bonding device according to claim 12, characterized in that: The bonding device also includes a driving member and a control member, wherein the driving member is connected to the main body for driving, and the control member is respectively connected to the dynamometer and the driving member for communicating, and is used to receive the measurement result of the dynamometer and control the driving member to drive the main body to move along the first direction according to the measurement result.

14. The bonding device according to claim 6, characterized in that: The bonding device further comprises a heat insulating member, and the heat insulating member is arranged between the first sub-member and the bonding head.

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