Vacuum protection circuit for mass spectrometer

Abstract

The invention discloses a vacuum protection circuit for a mass spectrometer, and relates to the technical field of mass spectrometers, the vacuum protection circuit comprises a high vacuum gauge protection circuit and a low vacuum gauge protection circuit, and the low vacuum gauge protection circuit monitors the working state of the high vacuum gauge protection circuit; the high vacuum gauge protection circuit comprises a high vacuum gauge power supply switch control circuit, a high vacuum gauge comparison circuit and a high vacuum gauge output interface. The low vacuum gauge protection circuit comprises a low vacuum gauge power supply switch control circuit, a low vacuum gauge output interface, a short circuit resistor, a quasi generation circuit and a low vacuum gauge comparison circuit. According to the invention, each discrete module circuit board is redesigned to optimize a circuit, and discrete modules are fused into a control circuit board with a high integration level, so that the real-time performance and reliability of data acquisition are further improved.

Description

Technical Field

[0001] The invention relates to the technical field of mass spectrometer instruments, and in particular to a vacuum protection circuit for a mass spectrometer. Background Art

[0002] There are many analog voltages that need to be monitored in real time in the control process of the time-of-flight mass spectrometer. If several ADC chips are used to directly collect signals, the entire circuit system will be very large and complex. In addition, the mass spectrometer is a high-precision instrument. During normal operation, the instrument needs to precisely control the output voltages of multiple high-voltage power supplies, which requires the front-end control circuit to have low noise.

[0003] The analyzer of the mass spectrometer needs to work properly in a high vacuum environment, and it also needs a high voltage of 20KV as the acceleration voltage of the ions. The high vacuum environment ensures that the analyzer can work normally on the one hand, and on the other hand, the high vacuum also ensures the discharge distance of the accelerating electrode, ensuring that the instrument will not have high-voltage discharge. However, it may still occur during the use of the instrument, such as damage to the fore-stage oil pump or the vacuum molecular pump, causing insufficient vacuum in the instrument; finally, the instrument discharges, and other conditions may occur such as the circuit board or power supply being broken down by high voltage. Summary of the invention

[0004] The present invention aims at solving the problems in the prior art and provides a vacuum protection circuit for a mass spectrometer.

[0005] To achieve the above purpose, the technical solution adopted by the present invention is as follows:

[0006] A vacuum protection circuit for a mass spectrometer comprises a high vacuum gauge protection circuit and a low vacuum gauge protection circuit, wherein the low vacuum gauge protection circuit monitors the working state of the high vacuum gauge protection circuit; the high vacuum gauge protection circuit comprises a high vacuum gauge power supply switch control circuit, a high vacuum gauge comparison circuit and a high vacuum gauge output interface, wherein the high vacuum gauge power supply switch control circuit outputs a real-time vacuum analog signal to the high vacuum gauge comparison circuit through the high vacuum gauge output interface; the low vacuum gauge protection circuit comprises a low vacuum gauge power supply switch control circuit, a low vacuum gauge output interface, a short-circuit resistor, a quasi-generation circuit and a low vacuum gauge comparison circuit, wherein the low vacuum gauge power supply switch control circuit is started to supply power to the low vacuum gauge protection circuit, a signal is output from the low vacuum gauge output interface to an interface of an externally connected FPGA system control board, and then a vacuum value is fed back to a reference generation circuit and a low vacuum gauge comparison circuit in sequence through the low vacuum gauge output interface.

[0007] Based on the above technical solution, further, the high vacuum gauge power supply switch control circuit includes a first photocoupler and a first switch, one end of the first photocoupler is connected to a first resistor, the first resistor is connected to an output pin of an externally arranged single-chip microcomputer to output the signal, and the first photocoupler is also connected to the first switch, wherein one pin of the first switch is also connected to the second resistor, the second resistor is connected to the third resistor and the gate of the first MOS tube, the source of the first MOS tube is connected to the third resistor, the first capacitor, and the second capacitor, the drain of the first MOS tube is connected to the first inductor and the third capacitor, the third capacitor is connected to the fourth capacitor, the fifth capacitor, another pin of the first switch, the cathode of the first photosensitive diode, and the first diode, the first diode is connected to the fourth resistor, the fifth capacitor, the fourth capacitor and the first inductor, wherein the fourth resistor is connected to the anode of the first photosensitive diode.

[0008] Based on the above technical solution, further, the high vacuum gauge comparison circuit includes a first operational amplifier, wherein the first operational amplifier is connected to one end of the fifth resistor, the other end of the fifth resistor is connected to the base of the first triode, the emitter of the first triode is grounded, the collector of the first triode is connected to the sixth resistor, the sixth resistor is connected to the second photocoupler, the second photocoupler is connected to the emitter of the second triode, the collector of the second triode is connected to the power supply voltage, the base of the second triode is connected to the seventh resistor, the seventh resistor is connected to the eighth resistor and the output pin of the first operational amplifier, the eighth resistor is connected to the ninth resistor, the first operational amplifier, the tenth resistor and the sixth capacitor, wherein the tenth resistor and the sixth capacitor are both grounded, and the ninth resistor is connected to the reference voltage.

[0009] Based on the above technical solution, further, the high vacuum gauge protection circuit also includes a seventh capacitor, one end of the seventh capacitor is grounded, and the other end is connected to the power supply voltage, and the seventh capacitor is a filter capacitor.

[0010] Based on the above technical solution, further, the high vacuum gauge comparison circuit also includes a second diode, the second diode is connected to the eleventh resistor and the twelfth resistor, the twelfth resistor is connected to the second diode and the eighth capacitor, the eighth capacitor is connected to the ninth capacitor and the reference voltage, one end of the eighth capacitor and the ninth capacitor is grounded together, the second diode is connected to the thirteenth resistor and the fourteenth resistor, and one end of the thirteenth resistor is connected to the power supply.

[0011] Based on the above technical solution, further, the low vacuum gauge power supply switch control circuit includes a third photoelectric coupler, wherein one end of the third photoelectric coupler is connected to the fifteenth resistor, the fifteenth resistor is connected to an output pin of the single-chip computer to output the signal, the third photoelectric coupler is also connected to the second switch, a pin of the second switch is also connected to the sixteenth resistor, the sixteenth resistor is connected to the seventeenth resistor and the gate of the second MOS tube, the source of the second MOS tube is connected to the seventeenth resistor, the seventeenth resistor is connected to the cathode of the third diode, the tenth capacitor, and the eleventh capacitor, the other ends of the tenth capacitor and the eleventh capacitor in parallel are grounded together, and the anode of the third diode is grounded; the drain of the second MOS tube is connected to the second inductor and the twelfth capacitor, the twelfth capacitor is connected to the thirteenth capacitor, the fourteenth capacitor, the second switch, the cathode of the second photosensitive diode, and the fourth diode, the fourth diode is connected to the eighteenth resistor, the fourteenth capacitor, the thirteenth capacitor and the second inductor, and the eighteenth resistor is connected to the anode of the second photosensitive diode.

[0012] Based on the above technical solution, further, the low vacuum gauge comparison circuit includes a second operational amplifier, wherein the inverting input terminal of the second operational amplifier is connected to the nineteenth resistor, the nineteenth resistor is connected to the twentieth resistor, the same-direction input terminal of the second operational amplifier is connected to the twenty-first resistor, the twenty-second resistor and the second operational amplifier, the twenty-first resistor is connected to the reference voltage and the twenty-third resistor, the twenty-third resistor is connected to the twenty-fourth resistor, and the twenty-fourth resistor is grounded; the second operational amplifier is connected to the twenty-fifth resistor, the twenty-fifth resistor is connected to the base of the third transistor, the collector of the third transistor is connected to the power supply, and the emitter of the third transistor is connected to the power supply. The fourth photocoupler is connected to the fourth photocoupler, the fourth photocoupler is also connected to the twenty-eighth resistor, the twenty-eighth resistor is connected to the collector of the fourth triode, the emitter of the fourth triode is grounded, and the base of the fourth triode is connected to the twentieth resistor; the fourth photocoupler is also connected to the twenty-sixth resistor, the collector of the fifth triode, and the collector of the sixth triode, wherein the emitter of the sixth triode is grounded, the base of the sixth triode is connected to the twenty-seventh resistor, and the twenty-seventh resistor is connected to an output pin of the single-chip computer to output the signal; the base of the fifth triode is connected to the twenty-ninth resistor, and the twenty-ninth resistor is connected to an output pin of the single-chip computer to output the signal.

[0013] Based on the above technical solution, further, the low vacuum gauge protection circuit also includes a fifteenth capacitor, one end of the fifteenth capacitor is grounded, and the other end is connected to the power supply, and the fifteenth capacitor is a filter capacitor.

[0014] Based on the above technical solution, further, the externally connected FPGA system control board is provided with an FPGA main control circuit, wherein the FPGA main control circuit includes a power supply generation circuit and a power supply input port, and the power supply input port supplies power to the power supply generation circuit.

[0015] Based on the above technical solution, further, the power supply generating circuit includes a switching power supply, the switching power supply is connected to the capacitor component, the cathode of the fifth diode and the third inductor, the anode of the fifth diode is grounded, the third inductor is connected to the switching power supply, the sixteenth capacitor, the seventeenth capacitor, the eighteenth capacitor and the power supply, and the eighteenth capacitor is connected to the seventeenth capacitor, the sixteenth capacitor, the ground and the switching power supply.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] (1) In order to ensure that the high-voltage power supply is turned off, the present invention also sets up a vacuum protection circuit in the circuit. The basic idea is to compare the vacuum signal with the preset reference voltage through the operational amplifier. When the vacuum degree is insufficient, the power supply of the high-voltage power supply is immediately turned off, thereby turning off the high voltage quickly and protecting the instrument.

[0018] (2) The present invention has a higher degree of integration, reduces the use of wires, improves the aesthetics of the instrument, and improves the reliability of the instrument; the lower computer has a faster operating speed and more reliable performance; improves the utilization rate of existing materials and reduces the requirements for material procurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a comparison circuit diagram of a high vacuum gauge of the present invention;

[0020] Figure 2 This is a power switch control circuit diagram of the high vacuum gauge of the present invention;

[0021] Figure 3 This is the output interface circuit diagram of the high vacuum gauge of the present invention;

[0022] Figure 4 A comparison threshold reference circuit diagram of a high vacuum gauge of the present invention;

[0023] Figure 5 is an eighth capacitor circuit diagram of the present invention;

[0024] Figure 6 This is a circuit diagram of the power switch control circuit of the low vacuum gauge of the present invention;

[0025] Figure 7 This is the output interface circuit diagram of the low vacuum gauge of the present invention;

[0026] Figure 8 This is a circuit diagram of a fifteenth capacitor C68 of the present invention;

[0027] Fig. 9 It is the short-circuit resistor circuit diagram of the present invention;

[0028] Fig.10 generating a circuit diagram for the present invention benchmark;

[0029] Fig.11 The comparison circuit diagram of the low vacuum gauge of the present invention;

[0030] Fig.12 This is the circuit diagram of the power supply input port of the present invention;

[0031] Fig.13 A circuit diagram is generated for powering the present invention. DETAILED DESCRIPTION

[0032] The present invention is further described and illustrated below in conjunction with the accompanying drawings and specific embodiments. The technical features of each embodiment of the present invention can be combined accordingly without conflicting with each other.

[0033] In order to make the above-mentioned purpose, features and advantages of the present invention more obvious and easy to understand, the specific implementation mode of the present invention is described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below. The technical features in each embodiment of the present invention can be combined accordingly without conflicting with each other.

[0034] In the description of the present invention, it is to be understood that when an element is considered to be "connected" to another element, it may be directly connected to the other element or indirectly connected, i.e., there is an intermediate element. On the contrary, when an element is said to be "directly" connected to another element, there is no intermediate element. In the description of the present invention, it is to be understood that the terms "first" and "second" are only used to distinguish the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features.

[0035] Example

[0036] In the present embodiment, a vacuum protection circuit for a mass spectrometer is provided, which includes a high vacuum gauge protection circuit and a low vacuum gauge protection circuit, and the low vacuum gauge protection circuit monitors the working state of the high vacuum gauge protection circuit. Specifically, vacuum protection is divided into a high vacuum gauge protection circuit and a low vacuum gauge protection circuit. In the present embodiment, the PC mass spectrometer needs to work in a high vacuum environment. In order to maintain the high vacuum environment, the instrument adopts a working combination of a front pump and a molecular pump; the front pump provides a suitable working air pressure for the molecular pump, and the molecular pump is used to maintain a high vacuum environment. The working condition of the molecular pump is that the outlet vacuum degree needs to be lower than 100Pa, and the low vacuum gauge protection circuit is used to monitor whether the working conditions of the molecular pump are met. If not, the molecular pump needs to be turned off to avoid damage to the molecular pump. The PC mass spectrometer has a high voltage of 20KV when collecting spectra normally, and a high vacuum gauge protection circuit is needed to keep the power supply from discharging. The high vacuum gauge protection circuit is used to monitor the vacuum environment of the current instrument in real time. Once the vacuum environment is damaged due to other reasons, the module immediately turns off the high voltage power supply to protect the power supply, the instrument and the safety of personnel. Among them, it should be noted in this embodiment that the letters, symbols or names connected to the circuit element connection ends are the same, that is, different circuit elements are connected to the same end. For example, some different circuit elements are connected to +24VIN3, then these circuit elements can be connected to the same end.

[0037] In this embodiment, combined with Figure 1-Figure 5 As shown, the high vacuum gauge protection circuit includes a high vacuum gauge power supply switch control circuit, a high vacuum gauge comparison circuit and a high vacuum gauge output interface. The high vacuum gauge power supply switch control circuit outputs the real-time vacuum analog signal to the high vacuum gauge comparison circuit through the high vacuum gauge output interface; the low vacuum gauge protection circuit includes a low vacuum gauge power supply switch control circuit, a low vacuum gauge output interface, a short resistor, a quasi-generation circuit and a low vacuum gauge comparison circuit. The low vacuum gauge power supply switch control circuit is started to supply power to the low vacuum gauge protection circuit, and the signal is output from the low vacuum gauge output interface to the interface of the externally connected FPGA system control board, and then the vacuum value is fed back to the reference generation circuit and the low vacuum gauge comparison circuit in sequence through the low vacuum gauge output interface.

[0038] Specifically, combined Figure 5 The seventh capacitor C72 is a +24V power supply. The seventh capacitor C72 is a filter capacitor, one end of which is grounded and the other end is connected to the power supply voltage +24VIN3; Figure 1 It is a high vacuum gauge comparison circuit, which is a vacuum analog signal of the high vacuum gauge and a set threshold comparison circuit, and the control signal is finally output to the +24V power supply control circuit of the externally set high voltage power supply; specifically, Figure 1The high vacuum gauge comparison circuit includes a first operational amplifier U6, wherein pin 2 of the first operational amplifier U6 is connected to the tenth acquisition channel AD10 of the 1:16 analog switch and one end of the fifth resistor R71, and the other end of the fifth resistor R71 is connected to the base of the first transistor Q9, the emitter of the first transistor Q9 is grounded, and the collector of the first transistor Q9 is connected to the sixth resistor R69, and the sixth resistor R69 is connected to the second photocoupler U36, and the second photocoupler U36 is connected to the emitter of the second transistor Q8, and the collector of the second transistor Q8 is connected to the power supply voltage +24VIN3, and the base of the second transistor Q8 is connected to the seventh resistor R64, and the seventh resistor R64 is connected to the eighth resistor R61 and the output pin 6 of the first operational amplifier U6, and the eighth resistor R61 is connected to the ninth resistor R60, the pin 3 of the first operational amplifier U6, the tenth resistor R53 and the sixth capacitor C110, wherein the tenth resistor R53 and the sixth capacitor C110 are both grounded, and the ninth resistor R60 is connected to the reference voltage +10Verf. Combined with Figure 4 The circuit shown is Figure 1 The part of the high vacuum gauge comparison circuit includes a second diode D17, a pin 1 of which is connected to one end of the eleventh resistor R57 and one end of the twelfth resistor R65, the other end of the twelfth resistor R65 is connected to pin 2 of the second diode D17 and the eighth capacitor C118, the eighth capacitor C118 is connected to the ninth capacitor C128 and the reference voltage Ctrl_+10Vref, one end of the eighth capacitor C118 and the ninth capacitor C128 is connected to AGND in common, a pin 3 of the second diode D17 is connected to the thirteenth resistor R56 and the fourteenth resistor R57, and one end of the thirteenth resistor R56 is connected to the positive 24VIN3 power supply.

[0039] The working principle of the high vacuum gauge comparison circuit is as follows: according to the vacuum gauge output voltage and vacuum correspondence table provided by the high vacuum gauge manufacturer, the corresponding voltage value is calculated according to the designed vacuum requirements, such as according to the provided reference manual, etc., and this value is used as a reference point for comparison with the actual vacuum value of the instrument. When the actual vacuum value is lower than the comparison threshold, the instrument can be started and operated normally, otherwise the high vacuum gauge comparison circuit is forced to be closed.

[0040] Figure 2 and Figure 3 They represent the high vacuum gauge power switch control circuit and the high vacuum gauge output interface, from which the real-time vacuum simulation signal is output to Figure 1Specifically, the high vacuum gauge power supply switch control circuit includes a first photocoupler U35 and a first switch SW6, one end of the first photocoupler U35 is connected to a first resistor R62, the first resistor R62 is connected to an output pin Aal_IO_B2 of an externally set single-chip microcomputer to output a signal, the first photocoupler U35 is also connected to pins 1 and 2 of the first switch SW6, wherein a pin 2 of the first switch SW6 is also connected to a second resistor R50, the second resistor R50 is connected to a third resistor R47 and the gate of the first MOS tube, and the first photocoupler U35 is connected to a third resistor R47 and the gate of the first MOS tube. The source of a MOS tube is connected to the third resistor R47, the first capacitor C23, and the second capacitor C33. The drain of the first MOS tube is connected to the first inductor L15 and the third capacitor C79. The third capacitor C79 is connected to the fourth capacitor C91, the fifth capacitor C80, the other pin 1 of the first switch SW6, the cathode of the first photosensitive diode D16, and the first diode D15. The first diode D15 is connected to the fourth resistor R48, the fifth capacitor C80, the fourth capacitor C91 and the first inductor L15, wherein the fourth resistor R48 is connected to the anode of the first photosensitive diode D16.

[0041] Combination Figure 6-Figure 11 The entire circuit shown is a low vacuum gauge protection circuit, which includes a low vacuum gauge power supply switch control circuit, a low vacuum gauge output interface, a short resistor, a quasi-generation circuit, and a low vacuum gauge comparison circuit. The low vacuum gauge power supply switch control circuit is started to power the low vacuum gauge protection circuit, and the signal is output from the low vacuum gauge output interface to the interface of the FPGA system control board, and then the vacuum value is fed back to the reference generation circuit and the low vacuum gauge comparison circuit in sequence through the low vacuum gauge output interface. The comparison result signal is finally used to enable the power supply switch output of the front-stage baffle valve. The details are as follows:

[0042] Figure 6What is shown is a low vacuum gauge power supply switch control circuit; specifically, it includes a third photocoupler U44, one end of which is connected to a fifteenth resistor R82, the fifteenth resistor R82 is connected to the microcontroller pin output signal V4_IO_B2, and one end is connected to the power supply VCC, the third photocoupler U44 is also connected to pins 1 and 2 of the second switch SW7, wherein pin 2 of the second switch SW7 is also connected to a sixteenth resistor R79, the sixteenth resistor R79 is connected to a seventeenth resistor R76 and the gate of the second MOS tube, the source of the second MOS tube is connected to the seventeenth resistor R76 and +24VIN3, the seventeenth resistor R76 is connected to the cathode of the third diode D20 and the tenth capacitor C37 and the eleventh capacitor C35 in parallel, the other ends of the tenth capacitor C37 and the eleventh capacitor C35 in parallel are grounded together, and the anode of the third diode D20 is grounded. The drain of the second MOS tube is connected to the second inductor L20 and the twelfth capacitor C143, the twelfth capacitor C143 is connected to the thirteenth capacitor C144, the fourteenth capacitor C139, the pin 1 of the second switch SW7, the cathode of the second photosensitive diode D23, and the fourth diode D22, the fourth diode D22 is connected to the eighteenth resistor R77, the fourteenth capacitor C139, the thirteenth capacitor C144 and the second inductor L20, wherein the eighteenth resistor R77 is connected to the anode of the second photosensitive diode D23. Figure 7 Shown is the low vacuum gauge output interface; Figure 8 Shown is the fifteenth capacitor C68, which is a filter capacitor for the input +24V; Fig. 9 Shown is the shorting resistor R52 between the analog ground and the power ground; Fig.10 It represents the +10V reference generation circuit. The +10V reference voltage is output to Fig.11 In the circuit shown, specifically, pin 1 of the reference voltage chip D14 is connected to resistors R45 and R46, resistor R45 is connected to resistor R44 and pin 3 of the reference voltage chip D14, resistor R44 is connected to +24VIN3, pin 3 of the reference voltage chip D14 is also connected to the reference voltage, capacitor C71, and capacitor C69, one end of the capacitor C71 and capacitor C69 are grounded together, and capacitor C69 is connected to pin 2 of the reference voltage chip D14.

[0043] Combination Fig.11 The low vacuum gauge comparison circuit shown is a circuit comparing the vacuum analog signal of the low vacuum gauge with the set threshold value, which provides a comparison reference for the circuit. The real-time vacuum signal of the low vacuum gauge is Figure 7The interface input of the circuit shown. Specifically, it includes a second operational amplifier U24, wherein the inverting input terminal of the second operational amplifier U24 is connected to the 19th resistor R33, the 19th resistor R33 is connected to the 9th acquisition channel AD9 of the 1:16 analog switch and the 20th resistor R51, the same-direction input terminal of the second operational amplifier U24 is connected to the 21st resistor R28, the 22nd resistor R38 and the output terminal pin 6 of the second operational amplifier U24, the 21st resistor R28 is connected to the reference voltage and the 23rd resistor R31, the 23rd resistor R31 is connected to the 24th resistor R30, and the 24th resistor R30 is grounded. The output pin 6 of the second operational amplifier U24 is connected to the twenty-fifth resistor R32, the twenty-fifth resistor R32 is connected to the base of the third transistor Q13, the collector of the third transistor Q13 is connected to the +24VIN3 power supply, the emitter of the third transistor Q13 is connected to the fourth photocoupler U22, the fourth photocoupler U22 is also connected to the twenty-eighth resistor R17, the twenty-eighth resistor R17 is connected to the collector of the fourth transistor Q7, the emitter of the fourth transistor Q7 is grounded, the base of the fourth transistor Q7 is connected to the twenty-eighth resistor R17, and the emitter of the fourth transistor Q7 is grounded. Resistor R51; the fourth photocoupler U22 is also connected to the twenty-sixth resistor R14, the collector of the fifth transistor Q11, and the collector of the sixth transistor Q12, wherein the emitter of the sixth transistor Q12 is grounded, and the base of the sixth transistor Q12 is connected to the twenty-seventh resistor R40, and the twenty-seventh resistor R40 is connected to the single-chip microcomputer pin output signal N5_IO_B2; the base of the fifth transistor Q11 is connected to the twenty-ninth resistor R18, and the twenty-ninth resistor R18 is connected to the single-chip microcomputer pin output signal T5_IO_B2. The working principle of the low vacuum gauge comparison circuit is: according to the vacuum gauge output voltage and vacuum correspondence table provided by the low vacuum gauge manufacturer, the corresponding voltage value is calculated according to the designed vacuum requirement, and this value is used as a reference point to compare with the actual vacuum value of the instrument. When the actual vacuum value is lower than the comparison threshold, the instrument can be started and operated normally, and the vacuum baffle valve is opened to start the molecular pump. Otherwise, the molecular pump is closed to protect the molecular pump.

[0044] Combination Figure 6-Figure 11 ,Will Figure 7 The interface shown is output to the low vacuum gauge comparison circuit, and the low vacuum gauge comparison circuit then passes Figure 7 The interface shown feeds the vacuum value to Fig.11 The circuit shown is Fig.10 The reference shown is compared to generate a control signal to the next module, and the remaining modules are filter capacitors.

[0045] Combination Fig.12 and Fig.13 The 3.3V power supply generation circuit that constitutes the main control FPGA is specifically: Fig.12 It is the power supply input port of the FPGA system control board; Fig.13 It is a 3.3V power supply generation circuit for the main control FPGA; pins 3 and 6 of the switching power supply U16 are grounded, and pin 1 is connected to a capacitor component, which includes capacitor C56, capacitor C54, capacitor C52, capacitor C51 and capacitor C59. One end of the capacitor component is grounded, and the other end is connected to a 5V input network name, that is, +5VIN, wherein capacitor C56, capacitor C54, capacitor C52, capacitor C51 and capacitor C59 are arranged in parallel, and pin 2 of the switching power supply U16 is connected to the cathode of the fifth diode D13 and the third inductor L6, the anode of the fifth diode D13 is grounded, the third inductor L6 is connected to pin 4 of the switching power supply U16, the sixteenth capacitor C44, the seventeenth capacitor C46, ​​the eighteenth capacitor C48 and the power supply VCC, and the eighteenth capacitor C48 is connected to the seventeenth capacitor C46, ​​the sixteenth capacitor C44, ground and pin 5 of the switching power supply U16.

[0046] In this embodiment, the signal is transmitted to the single chip microcomputer and then distributed to each module, and each module is relatively independent.

[0047] Finally, it should be noted that the above content is only used to illustrate the technical solution of the present invention, rather than to limit the scope of protection of the present invention. Simple modifications or equivalent substitutions of the technical solution of the present invention by ordinary technicians in this field do not deviate from the essence and scope of the technical solution of the present invention.

Claims

1. A vacuum protection circuit for a mass spectrometer, characterized in that: It includes a high vacuum gauge protection circuit and a low vacuum gauge protection circuit, and the low vacuum gauge protection circuit monitors the working state of the high vacuum gauge protection circuit; The high vacuum gauge protection circuit includes a high vacuum gauge power switch control circuit, a high vacuum gauge comparison circuit and a high vacuum gauge output interface. The high vacuum gauge power switch control circuit outputs a real-time vacuum analog signal to the high vacuum gauge comparison circuit through the high vacuum gauge output interface. The low vacuum gauge protection circuit includes a low vacuum gauge power supply switch control circuit, a low vacuum gauge output interface, a short resistor, a quasi-generation circuit and a low vacuum gauge comparison circuit. The low vacuum gauge power supply switch control circuit is started to supply power to the low vacuum gauge protection circuit, and the signal is output from the low vacuum gauge output interface to the interface of the externally connected FPGA system control board, and then the vacuum value is fed back to the reference generation circuit and the low vacuum gauge comparison circuit in sequence through the low vacuum gauge output interface.

2. A vacuum protection circuit for a mass spectrometer according to claim 1, characterized in that: The high vacuum gauge power supply switch control circuit includes a first photocoupler and a first switch, one end of the first photocoupler is connected to a first resistor, the first resistor is connected to an output pin of an externally arranged single-chip computer to output a signal, the first photocoupler is also connected to the first switch, wherein one pin of the first switch is also connected to a second resistor, the second resistor is connected to a third resistor and a gate of a first MOS tube, the source of the first MOS tube is connected to the third resistor, a first capacitor, and a second capacitor, the drain of the first MOS tube is connected to a first inductor and a third capacitor, the third capacitor is connected to a fourth capacitor, a fifth capacitor, another pin of the first switch, a cathode of a first photosensitive diode, and a first diode, the first diode is connected to a fourth resistor, a fifth capacitor, a fourth capacitor, and a first inductor, wherein the fourth resistor is connected to a positive electrode of the first photosensitive diode.

3. The vacuum protection circuit for a mass spectrometer according to claim 1, characterized in that: The high vacuum gauge comparison circuit includes a first operational amplifier, wherein the first operational amplifier is connected to one end of a fifth resistor, the other end of the fifth resistor is connected to the base of a first triode, the emitter of the first triode is grounded, the collector of the first triode is connected to a sixth resistor, the sixth resistor is connected to a second photocoupler, the second photocoupler is connected to the emitter of a second triode, the collector of the second triode is connected to a power supply voltage, the base of the second triode is connected to a seventh resistor, the seventh resistor is connected to an eighth resistor and an output pin of the first operational amplifier, the eighth resistor is connected to a ninth resistor, the first operational amplifier, a tenth resistor and a sixth capacitor, wherein the tenth resistor and the sixth capacitor are both grounded, and the ninth resistor is connected to a reference voltage.

4. A vacuum protection circuit for a mass spectrometer according to claim 3, characterized in that: The high vacuum gauge protection circuit also includes a seventh capacitor, one end of the seventh capacitor is grounded, and the other end is connected to the power supply voltage, and the seventh capacitor is a filter capacitor.

5. The vacuum protection circuit for a mass spectrometer according to claim 3, characterized in that: The high vacuum gauge comparison circuit also includes a second diode, the second diode is connected to the eleventh resistor and the twelfth resistor, the twelfth resistor is connected to the second diode and the eighth capacitor, the eighth capacitor is connected to the ninth capacitor and the reference voltage, one end of the eighth capacitor and the ninth capacitor is grounded in common, the second diode is connected to the thirteenth resistor and the fourteenth resistor, and one end of the thirteenth resistor is connected to the power supply.

6. The vacuum protection circuit for a mass spectrometer according to claim 1, characterized in that: The low vacuum gauge power supply switch control circuit includes a third photoelectric coupler, wherein one end of the third photoelectric coupler is connected to a fifteenth resistor, the fifteenth resistor is connected to an output pin of the single-chip computer to output a signal, the third photoelectric coupler is also connected to a second switch, a pin of the second switch is also connected to a sixteenth resistor, the sixteenth resistor is connected to the seventeenth resistor and the gate of the second MOS tube, the source of the second MOS tube is connected to the seventeenth resistor, the seventeenth resistor is connected to the cathode of the third diode, the tenth capacitor, and the eleventh capacitor, the other ends of the tenth capacitor and the eleventh capacitor connected in parallel are grounded together, and the anode of the third diode is grounded; the drain of the second MOS tube is connected to the second inductor and the twelfth capacitor, the twelfth capacitor is connected to the thirteenth capacitor, the fourteenth capacitor, the second switch, the cathode of the second photosensitive diode, and the fourth diode, the fourth diode is connected to the eighteenth resistor, the fourteenth capacitor, the thirteenth capacitor, the second inductor, and the eighteenth resistor is connected to the anode of the second photosensitive diode.

7. The vacuum protection circuit for a mass spectrometer according to claim 1, characterized in that: The low vacuum gauge comparison circuit includes a second operational amplifier, wherein the reverse input end of the second operational amplifier is connected to a nineteenth resistor, the nineteenth resistor is connected to a twentieth resistor, the same-direction input end of the second operational amplifier is connected to a twenty-first resistor, a twenty-second resistor and the second operational amplifier, the twenty-first resistor is connected to a reference voltage and a twenty-third resistor, the twenty-third resistor is connected to a twenty-fourth resistor, and the twenty-fourth resistor is grounded; the second operational amplifier is connected to a twenty-fifth resistor, the twenty-fifth resistor is connected to a base of a third triode, the collector of the third triode is connected to a power supply, and the emitter of the third triode is connected to a fourth photoelectric The fourth photocoupler is also connected to the twenty-eighth resistor, the twenty-eighth resistor is connected to the collector of the fourth triode, the emitter of the fourth triode is grounded, and the base of the fourth triode is connected to the twentieth resistor; the fourth photocoupler is also connected to the twenty-sixth resistor, the collector of the fifth triode, and the collector of the sixth triode, wherein the emitter of the sixth triode is grounded, the base of the sixth triode is connected to the twenty-seventh resistor, and the twenty-seventh resistor is connected to an output pin of the single-chip computer to output the signal; the base of the fifth triode is connected to the twenty-nine resistor, and the twenty-ninth resistor is connected to an output pin of the single-chip computer to output the signal.

8. The vacuum protection circuit for a mass spectrometer according to claim 1, characterized in that: The low vacuum gauge protection circuit also includes a fifteenth capacitor, one end of the fifteenth capacitor is grounded, and the other end is connected to a power supply, and the fifteenth capacitor is a filter capacitor.

9. The vacuum protection circuit for a mass spectrometer according to claim 1, characterized in that: The externally connected FPGA system control board is provided with an FPGA main control circuit, wherein the FPGA main control circuit includes a power supply generation circuit and a power supply input port, and the power supply input port supplies power to the power supply generation circuit.

10. A vacuum protection circuit for a mass spectrometer according to claim 9, characterized in that: The power supply generating circuit includes a switching power supply, which is connected to a capacitor component, a cathode of a fifth diode and a third inductor, a cathode of the fifth diode is grounded, a third inductor is connected to the switching power supply, a sixteenth capacitor, a seventeenth capacitor, an eighteenth capacitor and a power supply, and an eighteenth capacitor is connected to the seventeenth capacitor, the sixteenth capacitor, ground and the switching power supply.

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