Insulation device applied to plasma surface treatment equipment

Abstract

The invention discloses an insulation device applied to plasma surface treatment equipment, and relates to the field of insulation devices of plasma surface treatment equipment. The insulating device applied to the plasma surface treatment equipment comprises a mounting plate and an electrode plate, insulating plates are connected to the mounting plate in a sliding mode, an adjusting unit is arranged between the insulating plates, and a mounting unit and a supporting unit are arranged on each insulating plate. According to the insulation device applied to the plasma surface treatment equipment, under the rebound of the first springs, the distances between the multiple insulation plates are limited to be the same, adjustment of the distance between the electrode plates is completed, the stability and the treatment effect of plasmas can be improved by reducing the distance between the electrode plates, and the insulation device can be conveniently suitable for different treatment requirements; the electrode plates are clamped in the insulating plate through movement of the extrusion blocks, the effect of the plasma surface treatment equipment is improved by adjusting the multiple layers of electrode plates, meanwhile, the electrode plates are located on the appropriate layer number, the insulation performance of the electrodes is prevented from being affected, and the reliability and stability of the equipment are guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of insulating devices of plasma surface treatment equipment, and in particular to an insulating device applied to plasma surface treatment equipment. Background Art

[0002] The insulation device of plasma surface treatment equipment is a key component to ensure the safe and stable operation of the equipment.

[0003] In the process of plasma surface treatment, the insulation performance of the electrode is very important. If the insulation performance of the electrode is poor, it may cause arc discharge, short circuit and other phenomena, which will not only destroy the stability of the plasma, but also affect the treatment effect and even damage the equipment.

[0004] In the prior art, the insulation performance of the electrode is improved by selecting suitable insulating materials for connection with the electrode plates and changing the positions of the electrode plates on the mounting plate to adjust the spacing between the electrode plates. However, the spacing between the electrode plates is limited by the mounting grooves on the mounting plate and cannot be adjusted arbitrarily according to demand, thereby failing to achieve optimal stability and treatment effect of the plasma. At the same time, when the thickness of the electrode plates needs to be changed, different insulating plates need to be replaced, resulting in the need to prepare multiple insulating plates, which has poor practicality. Therefore, we propose an insulating device for use in plasma surface treatment equipment. Summary of the invention

[0005] In view of the deficiencies in the prior art, the present invention provides an insulating device applied to plasma surface treatment equipment, which solves the problem that the spacing between electrode plates is limited according to the mounting grooves on the mounting plates and cannot be adjusted arbitrarily according to demand, thereby failing to enable the plasma to achieve optimal stability and treatment effect. At the same time, when the thickness of the electrode plates needs to be changed, different insulating plates need to be replaced, resulting in the need to prepare multiple insulating plates, which has poor practicality.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: an insulating device applied to plasma surface treatment equipment, comprising a mounting plate and an electrode plate, wherein the mounting plate is slidably connected with an insulating plate, the electrode plate is located between the insulating plates, an adjustment unit is arranged between the insulating plates, and a mounting unit and a supporting unit are arranged on the insulating plate. The adjustment unit comprises a sliding seat and a first spring, wherein the sliding seat is fixedly connected to a corresponding insulating plate, and the first spring is fixedly connected between two adjacent sliding seats; The mounting unit comprises a socket, the socket is plugged into the inner wall of the insulating plate, an extrusion block is slidably connected to the inner wall of the socket, the extrusion block is fitted with one side of the electrode plate, and the other side of the electrode plate is fitted with the inner wall of the insulating plate; The support unit comprises a support plate, the support plate is slidably connected to the inner wall of the insulating plate, and the top end surface of the support plate is in contact with the electrode plate.

[0007] Preferably, a sliding groove is provided on the inner wall of the mounting plate, the sliding seat is slidably connected to the inner wall of the sliding groove, and the insulating plate slides in the sliding groove through the sliding seat.

[0008] Preferably, a first telescopic rod is fixedly connected between adjacent sliding seats, and the first telescopic rod is located in a first spring.

[0009] Preferably, sliding rods are fixedly connected to the outer walls of the insulating plates on both sides of the inner wall of the mounting plate, and the sliding rods are slidably connected to the inner wall of the mounting plate.

[0010] Preferably, one end of the sliding rod located on the outer wall of the mounting plate is fixedly connected to a connecting seat, and a clamp is provided on the connecting seat, which is fixed to the mounting plate through the clamp.

[0011] Preferably, a threaded rod is rotatably connected to the inner wall of the socket, the threaded rod is rotatably connected to the extrusion block, and a handle is fixedly connected to one end of the threaded rod outside the socket.

[0012] Preferably, the extrusion block and the support plate are both provided with a soft pad on one side in contact with the electrode plate.

[0013] Preferably, a second spring and a second telescopic rod are fixedly connected to the bottom end surface of the support plate, the second spring is sleeved on the outer peripheral wall of the second telescopic rod, and the second spring and the second telescopic rod are fixedly connected to the inner wall of the insulating plate on one side away from the support plate.

[0014] The present invention discloses an insulation device applied to plasma surface treatment equipment, which has the following beneficial effects: 1. The insulating device applied to plasma surface treatment equipment, when one of the insulating plates moves, drives the sliding seat to slide on the inner wall of the slide groove, at this time the sliding seat compresses the first spring, the compression degree of the first springs between the multiple insulating plates is the same, and then under the rebound of the first spring, the spacing between the multiple insulating plates is limited to be the same, and the spacing between the electrode plates is adjusted. By reducing the spacing between the electrode plates, the stability and treatment effect of the plasma can be improved, which is convenient for adapting to different treatment requirements.

[0015] 2. The insulating device applied to plasma surface treatment equipment places different numbers of electrode plates in the same insulating plate, so that the threaded rod rotates along the inner wall of the socket, and at the same time, the threaded rod rotates on the outer wall of the extrusion block. Since the extrusion block slides on the socket, the threaded rod rotates, driving the extrusion block to slide on the socket. The electrode plate is clamped in the insulating plate by the movement of the extrusion block, and the electrode plate is limited. A large number of electrode plates are fixed in the insulating plate, and a multi-layer structure is adopted to further enhance the effect of the electrode. The multi-layer electrode plate is adjusted to improve the effect of the plasma surface treatment equipment. At the same time, the electrode plates are in a suitable number of layers to avoid affecting the insulation performance of the electrode, thereby ensuring the reliability and stability of the equipment.

[0016] 3. The insulating device applied to plasma surface treatment equipment is implemented by placing an electrode plate in a socket, and then plugging the socket into an insulating plate. At this time, the electrode plate contacts and squeezes the support plate, pushing the support plate to compress the second spring. Under the rebound of the second spring, the electrode plate is supported, and the electrode plate is confined between the insulating plate and the socket to ensure the stability of the electrode plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the structural connection of the mounting plate of the present invention; Figure 3 This is a schematic diagram of the internal structure of the connecting plate of the present invention; Figure 4 This is a schematic diagram of the connection of the insulating board structure of the present invention; Figure 5 This is a schematic diagram of the structure of the insulation board of the present invention; Figure 6 This is a schematic diagram of the installation unit structure of the present invention; Figure 7 It is a schematic diagram of the support unit structure of the present invention.

[0019] In the figure: 1. mounting plate; 101. slide groove; 2. electrode plate; 3. insulating plate; 4. adjusting unit; 401. sliding seat; 402. first spring; 403. first telescopic rod; 5. mounting unit; 501. plug-in seat; 502. extrusion block; 503. threaded rod; 504. handle; 6. supporting unit; 601. supporting plate; 602. second spring; 603. second telescopic rod; 7. connecting seat; 701. sliding rod. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] The embodiment of the present application provides an insulating device applied to a plasma surface treatment device, which solves the problem that the spacing of the electrode plates 2 is limited according to the mounting groove on the mounting plate 1 and cannot be adjusted arbitrarily according to the needs, so that the plasma cannot achieve the best stability and treatment effect. At the same time, when the thickness of the electrode plate 2 needs to be changed, different insulating plates 3 need to be replaced, resulting in the need to prepare multiple insulating plates 3, which has poor practicality. When one of the insulating plates 3 moves, it drives the sliding seat 401 to slide on the inner wall of the slide groove 101. At this time, the sliding seat 401 compresses the first spring 402, and the compression degree of the first springs 402 between the multiple insulating plates 3 is the same. Then, under the rebound of the first spring 402, the spacing of the multiple insulating plates 3 is limited to be the same, and the adjustment of the spacing of the electrode plates 2 is completed. By reducing the spacing of the electrode plates 2, the stability and treatment effect of the plasma can be improved, which is convenient for adapting to different treatment needs. By placing different numbers of electrode plates 2 in the same insulating plate 3, the threaded rod 503 is rotated along the inner wall of the socket 501, and the threaded rod 503 rotates on the outer wall of the extrusion block 502. Since the extrusion block 502 slides on the socket 501, the threaded rod 503 rotates, driving the extrusion block 502 to slide on the socket 501. The electrode plate 2 is clamped in the insulating plate 3 by the movement of the extrusion block 502, and the electrode plate 2 is limited. A large number of electrode plates 2 are fixed in the insulating plate 3, and a multi-layer structure is adopted to further enhance the effect of the electrode. The multi-layer electrode plate 2 is adjusted to improve the effect of the plasma surface treatment equipment. At the same time, the electrode plate 2 is in a suitable number of layers to avoid affecting the insulation performance of the electrode, thereby ensuring the reliability and stability of the equipment. By placing the electrode plate 2 in the socket 501, and then plugging the socket 501 into the insulating plate 3, the electrode plate 2 contacts and squeezes the support plate 601, pushing the support plate 601 to compress the second spring 602. Under the rebound of the second spring 602, the electrode plate 2 is supported, and the electrode plate 2 is confined between the insulating plate 3 and the socket 501, ensuring the stability of the electrode plate 2.

[0022] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0023] An embodiment of the present invention discloses an insulation device applied to plasma surface treatment equipment.

[0024] According to the attached Figure 1-7 As shown, it includes a mounting plate 1 and an electrode plate 2, an insulating plate 3 is slidably connected to the mounting plate 1, the electrode plate 2 is located between the insulating plates 3, an adjustment unit 4 is arranged between the insulating plates 3, and a mounting unit 5 and a supporting unit 6 are arranged on the insulating plates 3. The adjustment unit 4 includes a sliding seat 401 and a first spring 402. The sliding seat 401 is fixedly connected to the corresponding insulating plate 3. The first spring 402 is fixedly connected between two adjacent sliding seats 401. Further, when one of the insulating plates 3 moves, the sliding seat 401 is driven to slide on the inner wall of the slide groove 101. At this time, the sliding seat 401 compresses the first spring 402. The compression degree of the first spring 402 between the multiple insulating plates 3 is the same. Then, under the rebound of the first spring 402, the spacing between the multiple insulating plates 3 is limited to be the same, and the spacing between the electrode plates 2 is adjusted. By reducing the spacing between the electrode plates 2, the stability and treatment effect of the plasma can be improved, which is convenient for adapting to different treatment requirements; The mounting unit 5 includes a socket 501, which is plugged into the inner wall of the insulating plate 3. An extrusion block 502 is slidably connected to the inner wall of the socket 501. The extrusion block 502 is fitted with one side of the electrode plate 2, and the other side of the electrode plate 2 is fitted with the inner wall of the insulating plate 3. Further, by placing different numbers of electrode plates 2 in the same insulating plate 3, the electrode plates 2 can be limited by the extrusion block 502, and a large number of electrode plates 2 can be fixed in the insulating plate 3. A multi-layer structure is adopted to further enhance the effect of the electrode, and the multi-layer electrode plate 2 is adjusted to improve the effect of the plasma surface treatment equipment. At the same time, the electrode plates 2 are in a suitable number of layers to avoid affecting the insulation performance of the electrode, thereby ensuring the reliability and stability of the equipment; The support unit 6 includes a support plate 601, which is slidably connected to the inner wall of the insulating plate 3. The top end surface of the support plate 601 is in contact with the electrode plate 2. When the electrode plate 2 is placed in the socket 501, the socket 501 is plugged into the insulating plate 3. At this time, the electrode plate 2 contacts and squeezes the support plate 601, pushing the support plate 601 to compress the second spring 602. Under the rebound of the second spring 602, the electrode plate 2 is supported, and the electrode plate 2 is confined between the insulating plate 3 and the socket 501 to ensure the stability of the electrode plate 2.

[0025] A slide groove 101 is provided on the inner wall of the mounting plate 1, and a sliding seat 401 is slidably connected to the inner wall of the slide groove 101. The insulating plate 3 slides in the slide groove 101 through the sliding seat 401. Under the action of the slide groove 101, the movement path of the insulating plate 3 in the mounting plate 1 is relatively stable.

[0026] A first telescopic rod 403 is fixedly connected between adjacent sliding seats 401, and the first telescopic rod 403 is in the first spring 402. It is particularly disclosed that when one of the insulating plates 3 moves, the sliding seat 401 is driven to slide on the inner wall of the slide groove 101. At this time, the sliding seat 401 compresses the first spring 402, and the first telescopic rod 403 is extended and retracted. Under the action of the first telescopic rod 403, the compression path of the first spring 402 is stable; At this time, under the rebound of the first spring 402, the sliding seat 401 and the insulating plate 3 adjacent to the first spring 402 are pushed to move. At this time, the insulating plate 3 moves to compress the first spring 402 on the other side until the first telescopic rod 403 between the multiple insulating plates 3 is compressed to the same degree, and then under the rebound of the first spring 402, the spacing between the multiple insulating plates 3 is limited to be the same, and the spacing between the electrode plates 2 is adjusted. By reducing the spacing between the electrode plates 2, the stability and treatment effect of the plasma can be improved, which is convenient for adapting to different treatment requirements.

[0027] Sliding rods 701 are fixedly connected to the outer walls of the insulating plates 3 on both sides of the inner wall of the mounting plate 1. The sliding rods 701 are slidably connected to the inner wall of the mounting plate 1. It is particularly disclosed that the sliding rods 701 are moved to push the insulating plates 3 to slide on the inner wall of the mounting plate 1. By adjusting the sliding rods 701 on the insulating plates 3 on both sides to move them at equal distances, multiple insulating plates 3 are adjusted to the center position of the mounting plate 1, thereby ensuring that the electrode plate 2 is in the best effect.

[0028] The sliding rod 701 is located at one end of the outer wall of the mounting plate 1 and is fixedly connected to a connecting seat 7. A clamp is provided on the connecting seat 7 and fixed to the mounting plate 1 through the clamp. It should be particularly emphasized that by adjusting the connecting seat 7 to move relative to the mounting plate 1, the sliding rod 701 is pushed to drive the insulating plate 3 to move, and the spacing of the electrode plates 2 is adjusted. When the electrode plates 2 are adjusted to a suitable spacing, the connecting seat 7 is fixed relative to the mounting plate 1 through the clamp, and the positions of the insulating plate 3 and the electrode plate 2 are limited, thereby improving the stability of the plasma and the treatment effect.

[0029] A threaded rod 503 is rotatably connected to the inner wall of the socket 501, and the threaded rod 503 is rotatably connected to the extrusion block 502. One end of the threaded rod 503 outside the socket 501 is fixedly connected to a handle 504. It should be particularly emphasized that the threaded rod 503 is driven to rotate by rotating the handle 504, so that the threaded rod 503 rotates along the inner wall of the socket 501, and at the same time, the threaded rod 503 rotates on the outer wall of the extrusion block 502. Since the extrusion block 502 slides on the socket 501, the threaded rod 503 rotates at this time, driving the extrusion block 502 to slide on the socket 501, and the electrode plate 2 is clamped in the insulating plate 3 by the movement of the extrusion block 502, so as to limit the electrode plate 2; By placing different numbers of electrode plates 2 in the same insulating plate 3, the electrode plates 2 can be limited by the extrusion block 502, and a large number of electrode plates 2 can be fixed in the insulating plate 3. A multi-layer structure is adopted to further enhance the effect of the electrode. The multi-layer electrode plates 2 are adjusted to improve the effect of the plasma surface treatment equipment. At the same time, the electrode plates 2 are in the appropriate number of layers to avoid affecting the insulation performance of the electrode, thereby ensuring the reliability and stability of the equipment.

[0030] The sides of the extrusion block 502 and the support plate 601 that are in contact with the electrode plate 2 are both provided with soft pads, and the electrode plate 2 is protected by the soft pads.

[0031] The bottom end surface of the support plate 601 is fixedly connected with a second spring 602 and a second telescopic rod 603, and the second spring 602 is sleeved on the outer peripheral wall of the second telescopic rod 603. The second spring 602 and the second telescopic rod 603 are fixedly connected to the inner wall of the insulating plate 3 on the side away from the support plate 601. When the electrode plate 2 is placed in the socket 501, the socket 501 is plugged into the insulating plate 3. At this time, the electrode plate 2 contacts and squeezes the support plate 601, pushing the support plate 601 to compress the second spring 602. Under the rebound of the second spring 602, the electrode plate 2 is supported, and the electrode plate 2 is confined between the insulating plate 3 and the socket 501 to ensure the stability of the electrode plate 2.

[0032] The insulating device applied to plasma surface treatment equipment drives the sliding seat to slide on the inner wall of the slide groove when one of the insulating plates moves. At this time, the sliding seat compresses the first spring, and the compression degree of the first springs between the multiple insulating plates is the same. Then, under the rebound of the first spring, the spacing between the multiple insulating plates is limited to be the same, and the spacing between the electrode plates is adjusted. By reducing the spacing between the electrode plates, the stability and treatment effect of the plasma can be improved, and it is convenient to adapt to different treatment requirements.

[0033] The insulating device applied to plasma surface treatment equipment places different numbers of electrode plates in the same insulating plate, so that the threaded rod rotates along the inner wall of the socket, and at the same time the threaded rod rotates on the outer wall of the extrusion block. Since the extrusion block slides on the socket, the threaded rod rotates, driving the extrusion block to slide on the socket, and the electrode plate is clamped in the insulating plate by the movement of the extrusion block, and the electrode plate is limited, and a large number of electrode plates are fixed in the insulating plate. A multi-layer structure is adopted to further enhance the effect of the electrode, and the multi-layer electrode plate is adjusted to improve the effect of the plasma surface treatment equipment. At the same time, the electrode plates are in a suitable number of layers to avoid affecting the insulation performance of the electrode, thereby ensuring the reliability and stability of the equipment.

[0034] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. An insulating device for use in a plasma surface treatment device, comprising a mounting plate (1) and an electrode plate (2), characterized in that: The mounting plate (1) is slidably connected to an insulating plate (3), and the electrode plate (2) is located between the insulating plates (3); An adjustment unit (4) is provided between the insulating plates (3); The insulating plate (3) is provided with a mounting unit (5) and a supporting unit (6); The adjustment unit (4) comprises a sliding seat (401) and a first spring (402), the sliding seat (401) being fixedly connected to a corresponding insulating plate (3), and the first spring (402) being fixedly connected between two adjacent sliding seats (401); The mounting unit (5) comprises a socket (501), the socket (501) being plugged into the inner wall of the insulating plate (3), an extrusion block (502) being slidably connected to the inner wall of the socket (501), the extrusion block (502) being in contact with one side of the electrode plate (2), and the other side of the electrode plate (2) being in contact with the inner wall of the insulating plate (3); The support unit (6) comprises a support plate (601), the support plate (601) being slidably connected to the inner wall of the insulating plate (3), and the top end surface of the support plate (601) being in contact with the electrode plate (2).

2. The insulating device used in plasma surface treatment equipment according to claim 1, characterized in that: A sliding groove (101) is provided on the inner wall of the mounting plate (1), the sliding seat (401) is slidably connected to the inner wall of the sliding groove (101), and the insulating plate (3) slides in the sliding groove (101) via the sliding seat (401).

3. The insulating device used in plasma surface treatment equipment according to claim 2, characterized in that: A first telescopic rod (403) is fixedly connected between adjacent sliding seats (401), and the first telescopic rod (403) is located in the first spring (402).

4. The insulating device used in plasma surface treatment equipment according to claim 3, characterized in that: Sliding rods (701) are fixedly connected to the outer walls of the insulating plates (3) on both sides of the inner wall of the mounting plate (1), and the sliding rods (701) are slidably connected to the inner wall of the mounting plate (1).

5. The insulating device used in plasma surface treatment equipment according to claim 4, characterized in that: One end of the sliding rod (701) located on the outer wall of the mounting plate (1) is fixedly connected to a connecting seat (7), and a clamping member is provided on the connecting seat (7) and is fixed to the mounting plate (1) via the clamping member.

6. The insulating device used in plasma surface treatment equipment according to claim 1, characterized in that: A threaded rod (503) is rotatably connected to the inner wall of the socket (501), the threaded rod (503) is rotatably connected to the extrusion block (502), and one end of the threaded rod (503) outside the socket (501) is fixedly connected to a handle (504).

7. The insulating device used in plasma surface treatment equipment according to claim 6, characterized in that: A soft pad is provided on the side of the extrusion block (502) and the support plate (601) that contacts the electrode plate (2).

8. The insulating device used in plasma surface treatment equipment according to claim 7, characterized in that: The bottom end surface of the support plate (601) is fixedly connected to a second spring (602) and a second telescopic rod (603), and the second spring (602) is sleeved on the outer peripheral wall of the second telescopic rod (603).

9. The insulating device used in plasma surface treatment equipment according to claim 8, characterized in that: The second spring (602) and the second telescopic rod (603) are fixedly connected to the inner wall of the insulating plate (3) at a side away from the support plate (601).

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