Clamp for stress-free machining of large-size silicon carbide part

Abstract

The invention relates to a clamp for stress-free machining of a large-size silicon carbide part, and relates to the technical field of machine tool clamps. Comprising a machine tool workbench, a clamp base, a refrigeration plate and a freezing disc. The clamp base is fixedly installed above a machine tool workbench, the refrigeration plate is fixedly installed above the clamp base, the side of the refrigeration plate is connected with the refrigerant supply device, the freezing disc is fixedly installed above the refrigeration plate, and the large-size silicon carbide part needing to be machined is placed above the freezing disc. The stress effect of the clamp on the clamping force of the large-size silicon carbide part in the clamping process can be avoided, so that clamping is convenient, the damage rate of the silicon carbide part is reduced, the high-precision requirements of flatness, parallelism and the like of a workpiece are met, and the stability and the production efficiency of a machine tool are improved.

Description

Technical Field

[0001] The invention relates to the technical field of machine tool fixtures, in particular to a fixture for stress-free processing of large-sized silicon carbide parts. Background Art

[0002] In the field of mechanical manufacturing, the clamping of workpieces is a key link that affects the quality and efficiency of machine tool grinding and cutting. Silicon carbide is a high-end ceramic material that is currently widely used. It has good heat resistance, corrosion resistance, wear resistance and oxidation resistance. In the semiconductor field, silicon carbide is mostly processed into electronic components, grinding discs, square mirrors, etc. But at the same time, silicon carbide is also a brittle material. When the processed parts are high-hardness and brittle materials such as large-sized silicon carbide, if traditional clamping devices such as magnetic suction cups, vacuum suction cups, pressure plates, etc. are used to clamp and fix them, pressing the workpiece will cause the parts to generate clamping force, which can easily cause deformation, edge collapse, cracking, etc. of the workpiece, seriously affecting the dimensional accuracy and mechanical properties of the workpiece.

[0003] In addition, when the silicon carbide parts are large-sized flat structures, clamping before processing and disassembly after processing are also the key to ensuring their high precision.

[0004] In the above research context, it is necessary to design a set of processing fixtures for thinner parts or large-sized silicon carbide and other high-hardness and brittle materials to replace the traditional clamping method. Summary of the invention

[0005] In order to solve at least one technical problem in the background technology, the present invention provides a fixture for stress-free processing of large-size silicon carbide parts, which can avoid the stress effect of the clamping force of the fixture on the workpiece during the clamping process, making clamping convenient, reducing the damage rate of silicon carbide parts, ensuring high-precision requirements such as workpiece flatness and parallelism, and improving the stability and production efficiency of the machine tool.

[0006] To achieve the above-mentioned purpose, the present invention provides a fixture for stress-free processing of large-sized silicon carbide parts, including: a machine tool worktable, a fixture base, a refrigeration plate and a freezing tray; the fixture base is fixedly installed above the machine tool worktable, the refrigeration plate is fixedly installed above the fixture base, the side of the refrigeration plate is connected to a refrigerant supply device, a freezing tray is fixedly installed above the refrigeration plate, and the large-sized silicon carbide parts to be processed are placed above the freezing tray.

[0007] Furthermore, the interior of the refrigeration plate is provided with multiple circles of irregular spiral flow channels, and the outer wall of the refrigeration plate is provided with a water inlet and a water outlet, one end of the water inlet and the water outlet are respectively connected to the refrigerant supply pipe, and the other end is respectively connected to the irregular spiral flow channels.

[0008] Furthermore, heat insulation cotton is arranged between the refrigeration plate and the freezing tray.

[0009] Furthermore, slots are provided on both sides of the lower side of the clamp base, and the slots are fixedly connected to the machine tool workbench by screws.

[0010] Furthermore, the middle of the clamp base is hollowed out to form a rib plate structure in the shape of a cross rib or a cross rib, and the height of the upper part of the clamp base is consistent with the height of the top of the rib plate structure.

[0011] Furthermore, the fixture base is made of cast iron.

[0012] The beneficial effects of the present invention are:

[0013] 1) Stress-free clamping: The clamping fixture of the present invention forms a frozen film on the surface of the workpiece through freezing technology, which plays a role in fixing the workpiece and avoids the problem of clamping stress generated in the workpiece in traditional clamping methods.

[0014] 2) High degree of automation: The base of the fixture can cooperate with the machine tool to realize automatic clamping, which improves production efficiency and manufacturing quality.

[0015] 3) Simple operation: The generation and removal time of the frozen film can be easily controlled through the control device, and large-sized silicon carbide workpieces can be disassembled at room temperature, which simplifies the operation process.

[0016] 4) Wide scope of application: The present invention is applicable to various types of workpieces, avoiding the probability of damage to parts during processing, and can achieve zero-stress processing of large-size silicon carbide parts with good flatness and smoothness, and has broad application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional schematic diagram of the overall structure of the fixture for stress-free processing of silicon carbide parts of the present invention;

[0018] Figure 2 This is a schematic diagram of the structure of a fixture base in a fixture for stress-free processing of silicon carbide parts according to the present invention;

[0019] Figure 3 This is a schematic diagram of the structure of the cooling plate in the fixture for stress-free processing of silicon carbide parts of the present invention;

[0020] Figure 4 This is a schematic diagram of the structure of the freezing plate in the fixture for stress-free processing of silicon carbide parts of the present invention;

[0021] Figure 5 This is a right side view of the silicon carbide part after the silicon carbide part is placed on the fixture for stress-free processing of the silicon carbide part of the present invention.

[0022] Among them, in the figure: 1-machine tool workbench; 2-fixture base; 3-refrigeration plate; 4-water inlet; 5-water outlet; 6-freezing plate; 7-silicon carbide parts. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequential order. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present application described here. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0025] In the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0026] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

[0027] In addition, the terms "installed", "set", "provided with", "connected", "connected", and "socketed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0028] To achieve the above purpose, Figure 1-5As shown, the present invention provides a fixture for stress-free processing of large-sized silicon carbide parts, including: a machine tool workbench 1, a fixture base 2, a refrigeration plate 3 and a freezing tray 6; the fixture base 2 is fixedly installed above the machine tool workbench 1, the refrigeration plate 3 is fixedly installed above the fixture base 2, the side of the refrigeration plate 3 is connected to a refrigerant supply device, a freezing tray 6 is fixedly installed above the refrigeration plate 3, and a silicon carbide part 7 to be processed is placed above the freezing tray 6.

[0029] During processing, low-temperature adhesive is sprinkled around the silicon carbide part 7 on the freezing plate 6. Under the action of gravity of the silicon carbide part 7, the low-temperature adhesive gradually penetrates into the joint surface between the silicon carbide part 7 and the freezing plate 6; after standing for a period of time, refrigerant is circulated in the refrigeration plate 3 to condense the low-temperature adhesive into a film to fix the silicon carbide part 7. Since the refrigerant is constantly circulating, the frozen film formed by the low-temperature adhesive can stably fix the silicon carbide part 7. The formation and removal of the frozen film can be controlled by an external control device. This invention device can ensure that the silicon carbide part 7 does not generate stress during the processing through freezing technology, thereby improving the overall processing accuracy and processing efficiency.

[0030] To further optimize the technical solution, a plurality of circles of irregular spiral flow channels are arranged on the inner upper surface of the refrigeration plate 3, and a water inlet 4 and a water outlet 5 are arranged on the outer wall of the refrigeration plate 3. One ends of the water inlet 4 and the water outlet 5 are respectively connected to the refrigerant supply pipe, and the other ends are respectively connected to the irregular spiral flow channels. When the refrigeration plate 3 and the freezing plate 6 are fixedly connected, the refrigerant can be ensured to flow in the irregular spiral flow channels, thereby achieving a continuous cooling effect and better heat transfer with the freezing plate 6 above.

[0031] To further optimize the technical solution, heat insulation cotton is arranged around the connection between the refrigeration plate 3 and the freezing tray 6, which can not only achieve a sealing effect, but also reduce the heat loss between the connection surfaces around the refrigeration plate 3 and the freezing tray 6.

[0032] To further optimize the technical solution, slots are provided on both sides of the lower side of the clamp base 2, and the slots are fixedly connected to the machine tool workbench 1 by means of screws or the like. In order to ensure rigidity, the contact area between the upper side of the clamp base 2 and the refrigeration plate 3 should not be too large.

[0033] To further optimize the technical solution, the middle of the clamp base 2 is hollowed out to form a rib plate structure in the shape of a cross rib or a cross rib, and the height of the upper part of the clamp base 2 is consistent with the height of the top of the rib plate structure.

[0034] To further optimize the technical solution, the clamp base 2 is made of cast iron.

[0035] The present invention can achieve stress-free clamping: the clamping fixture of the present invention forms a layer of frozen film on the surface of the workpiece through freezing technology, which plays the role of temporarily fixing the workpiece and avoids the problem of clamping stress generated in the workpiece in the traditional clamping method. High degree of automation: the base of the fixture can cooperate with the machine tool to achieve automatic clamping, thereby improving production efficiency and manufacturing quality. Simple operation: the generation and removal time of the frozen film can be conveniently controlled by the control device, and the silicon carbide parts can be disassembled at room temperature, which simplifies the operation process. Wide scope of application: the present invention is suitable for various types of workpieces, reduces the probability of damage to the workpiece during processing, can achieve zero-stress processing of large-size silicon carbide parts with good flatness and smoothness, and has broad application prospects.

[0036] Working principle of the present invention:

[0037] Place a clean large-sized silicon carbide part 7 at natural room temperature on a clean freezing plate 6, and sprinkle some low-temperature adhesive around the silicon carbide part 7. After standing for a period of time, turn on the refrigerant supply device connected to the outside of the refrigeration plate 3, and the low-temperature refrigerant in the refrigerant supply device flows into the refrigeration plate 3 from the water inlet 4 through the supply pipe. When the refrigerant fills the flow channel, the heat on the freezing plate 6 and the clamp base 2 is taken away by the refrigerant, and finally the temperature of the refrigeration plate 3 is in the range of minus 15°C to minus 5°C. Under the action of the refrigerant, the low-temperature adhesive on the freezing plate 6 solidifies to form a freezing film, and fixes the silicon carbide part 7. Since the inside of the clamp base 2 is a rib plate structure and the upper surface is a plane with an orifice, the connection rigidity of the clamp base 2 and the refrigeration plate 3 is ensured, and the refrigeration plate 3 and the freezing plate 6 are safely supported; it also reduces the contact area between the upper surface of the clamp base 2 and the lower surface of the refrigeration plate 3, reduces the heat on the clamp base 2 Transfer to the refrigeration plate 3, and affects the refrigeration effect of the refrigerant in the refrigeration plate 3.

[0038] The fluid takes away the heat downward from the freezing plate 6, achieving a continuous cooling effect. Figure 4 and Figure 5 As shown, the upper part of the freezing plate 6 is fixedly connected to the refrigeration plate 3 by screws. When the silicon carbide part 7 is placed on the upper surface of the freezing plate 6, some low-temperature adhesive is sprinkled around the workpiece. Since the refrigerant in the refrigeration plate 3 takes away the heat of the freezing plate 6, the liquid under the silicon carbide part 7 solidifies to form a freezing film. The silicon carbide part 7 is firmly fixed on the freezing plate 6. At this time, the clamping stress of the silicon carbide part 7 is zero, and the machine tool can perform grinding processing on it.

[0039] The refrigerant enters the refrigeration plate 3 and begins to circulate. The freezing time of the entire clamping process is about 60 seconds. After the processing is completed, the refrigerant supply device is turned off, and the workpiece is in the thawing process. In order to speed up the thawing process, some warm water can be sprinkled on the freezing plate 6. When the frozen film is completely melted, the silicon carbide part 7 is removed and wiped clean. The present invention can avoid cutting fluid processing, save energy and protect the environment, and is easy to operate. It can also extend the service life of machine tool tools and grinding wheels. It is also very easy to clean the parts after the processing is completed.

[0040] The above description is only a preferred embodiment of the present invention and does not limit the technical scope of the present invention. Therefore, any slight modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A fixture for stress-free processing of large-sized silicon carbide parts, characterized in that: include: A machine tool workbench, a fixture base, a refrigeration plate and a freezing tray; the fixture base is fixedly installed above the machine tool workbench, the refrigeration plate is fixedly installed above the fixture base, the side of the refrigeration plate is connected to a refrigerant supply device, a freezing tray is fixedly installed above the refrigeration plate, and large-sized silicon carbide parts to be processed are placed above the freezing tray.

2. A fixture for stress-free processing of large-sized silicon carbide parts as claimed in claim 1, characterized in that: The interior of the refrigeration plate is provided with a plurality of circles of irregular spiral flow channels, and the outer wall of the refrigeration plate is provided with a water inlet and a water outlet, one end of the water inlet and the water outlet are respectively connected to the refrigerant supply pipe, and the other end is respectively connected to the irregular spiral flow channels.

3. A fixture for stress-free processing of large-sized silicon carbide parts as claimed in claim 2, characterized in that: Heat insulation cotton is arranged between the refrigeration plate and the freezing tray.

4. A fixture for stress-free processing of large-sized silicon carbide parts as described in claim 1 or 3, characterized in that: Slots are arranged on both sides of the lower side of the clamp base, and the slots are fixedly connected to the machine tool workbench by screws.

5. A fixture for stress-free processing of large-sized silicon carbide parts as claimed in claim 4, characterized in that: The middle of the clamp base is hollowed out to form a rib plate structure in the shape of a cross rib or a cross rib, and the height of the upper part of the clamp base is consistent with the height of the top of the rib plate structure.

6. A fixture for stress-free processing of large-sized silicon carbide parts as claimed in claim 5, characterized in that: The fixture base is made of cast iron material.

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