Forced cooling mechanism of CVD furnace and cooling method thereof

Abstract

The invention discloses a forced cooling mechanism of a CVD (Chemical Vapor Deposition) furnace and a cooling method of the forced cooling mechanism. A forced cooling mechanism of a CVD (chemical vapor deposition) furnace comprises a cooling channel, the cooling channel is sequentially provided with a first thermal switch-off mechanism, a first steering cooling pipeline, a first angle valve unit, a second steering cooling pipeline, a heat exchange channel, a cooling fan unit, a third steering cooling pipeline, a second angle valve unit and a second thermal switch-off mechanism in the flow guide direction. The first thermal disconnection closing mechanism and the second thermal disconnection closing mechanism are arranged up and down, and each of the first thermal disconnection closing mechanism and the second thermal disconnection closing mechanism comprises a thermal disconnection water cooling flange, a thermal disconnection air cylinder, a thermal disconnection shutter and a thermal disconnection hard felt; a piston rod of the thermal breaking air cylinder penetrates through the thermal breaking water-cooling flange to be connected with a thermal breaking shutter, and the side, away from the thermal breaking air cylinder, of the thermal breaking shutter is connected with thermal breaking hard felt. According to the invention, rapid cooling of the CVD furnace is realized.

Description

Technical Field

[0001] The invention relates to the field of silicon carbide furnaces, and in particular to a cooling mechanism and a cooling method thereof. Background Art

[0002] During the coating process, the temperature of the CVD furnace is relatively high, about 1500°C. After the coating is completed, the cavity of the CVD furnace must be quickly forced to cool.

[0003] Currently, there is an urgent need for a device and method for rapidly cooling a CVD furnace that can accelerate the cooling rate. Summary of the invention

[0004] In view of the problems existing in the prior art, the present invention provides a forced cooling mechanism for a CVD furnace and a cooling method thereof, which have solved at least one of the above technical problems.

[0005] The technical solution of the present invention is: a forced cooling mechanism of a CVD furnace, characterized in that it comprises a cooling channel, both ends of which are detachably connected to the side wall flanges of the main furnace body of the CVD furnace;

[0006] The cooling channel is sequentially installed with a first thermal opening and closing mechanism, a first steering cooling pipeline, a first angle valve unit, a second steering cooling pipeline, a heat exchange channel, a cooling fan unit, a third steering cooling pipeline, a second angle valve unit and a second thermal opening and closing mechanism along the flow direction;

[0007] The first thermal break closing mechanism and the second thermal break closing mechanism are arranged up and down, and both the first thermal break closing mechanism and the second thermal break closing mechanism include a thermal break water-cooled flange, a thermal break cylinder, a thermal break shutter and a thermal break hard felt, the thermal break flange is provided with a cylinder body of the thermal break cylinder, the piston rod of the thermal break cylinder passes through the thermal break water-cooled flange and is connected to the thermal break shutter, and the thermal break hard felt is connected to the side of the thermal break shutter away from the thermal break cylinder;

[0008] The piston rod of the thermal cut-off cylinder is in an extended state, and the piston rod drives the thermal cut-off hard felt to block the side wall flange of the main furnace body of the CVD furnace, so that the main furnace body of the CVD furnace is isolated from the cooling channel. At this time, the first angle valve and the second angle valve are in a closed state;

[0009] The piston rod of the thermal cut-off cylinder is in a shortened state, the main furnace body of the CVD furnace and the cooling channel are connected to each other, and at this time, the first angle valve and the second angle valve are in an open state.

[0010] The present invention combines the thermal opening and closing mechanism and the angle valve to prevent the heat in the main furnace body of the CVD furnace from overflowing during the coating process, and to isolate the CVD furnace from the cooling channel. Various cooling pipelines and cooling fan units are used to achieve rapid cooling of the CVD furnace after coating.

[0011] Further preferably, the thermal cut-off water-cooling flange is detachably connected to one of the two joints that are axially connected and penetrate the water-cooling three-way joint;

[0012] A thermal cut-off water-cooling flange of the first thermal cut-off closing mechanism is detachably connected to a joint axially arranged with the first water-cooling three-way joint, and another joint axially arranged with the first water-cooling three-way joint is detachably connected to a side wall flange of the main furnace body of the CVD furnace;

[0013] The thermal cut-off water-cooling flange of the second thermal cut-off closing mechanism is detachably connected to the second water-cooling three-way joint in the axial direction, and the other axially arranged joint of the second water-cooling three-way joint is detachably connected to the side wall flange of the main furnace body of the CVD furnace.

[0014] Further preferably, the first steering cooling pipeline comprises a first water-cooling elbow, a second water-cooling elbow and a water-cooling straight pipe connected in sequence, and the first water-cooling elbow, the second water-cooling elbow and the water-cooling straight pipe are all provided with a water inlet and a water outlet for cooling water to flow through;

[0015] The first water-cooling elbow is connected to the first thermal opening and closing mechanism, and the water-cooling straight pipe is connected to the first angle valve unit;

[0016] The central axis direction of the joint between the first water-cooling elbow and the first thermal opening and closing mechanism is in the vertical direction;

[0017] The central axis direction of the joint between the water-cooling straight pipe and the first angle valve is perpendicular to the vertical direction and perpendicular to the telescopic direction of the thermal cut-off cylinder.

[0018] Further preferably, the second turning cooling pipeline is a water-cooling elbow with a 90° turn, and the water-cooling elbow is provided with a water inlet and a water outlet for cooling water to flow through;

[0019] The flow guiding direction of the water-cooling elbow is on a horizontal plane.

[0020] Further preferably, upper and lower docking flanges are provided on the same side of the outer wall of the heat exchange channel, the upper docking flange is docked with the second steering cooling pipeline, and the lower docking flange is docked with the cooling fan unit;

[0021] The heat exchange channel includes an upper cooling cavity, a middle cooling cavity and a lower cooling cavity arranged from top to bottom;

[0022] The upper cooling cavity and the lower cooling cavity are both provided with a water inlet and a water outlet for guiding cooling water;

[0023] The middle cooling cavity is installed with more than one hundred heat exchange tubes, the inner walls of the heat exchange tubes are used to connect with the upper cooling cavity and the lower cooling cavity, and the outer walls of the heat exchange tubes are provided with heat exchange guide channels for connecting with cooling water.

[0024] Further preferably, the lower cooling cavity is installed with a water leakage detection sensor, and the lower end opening of the middle cooling cavity faces the water leakage detection sensor.

[0025] Further preferably, a temperature sensor is installed at the end of the heat exchange channel adjacent to the second steering cooling pipeline and at one side of the heat exchange channel adjacent to the cooling fan unit;

[0026] An air pressure sensor is installed in the heat exchange channel.

[0027] Further preferably, the cooling fan unit comprises a mounting valve seat and cooling blades, and the mounting valve seat is provided with a first mounting flange and a second mounting flange which are vertically arranged;

[0028] The cooling blade is rotatably mounted in the mounting valve seat; the axial direction of the rotation center of the cooling blade is parallel to the central axis direction of the first mounting flange;

[0029] The first mounting flange is connected to the heat exchange channel, and the second mounting flange is connected to the third steering cooling pipeline;

[0030] The third steering cooling pipeline includes a third water-cooling three-way joint and a water-cooling connecting pipe connected in sequence, the upper joint of the third water-cooling three-way joint is connected to the second mounting flange, one of the two axially connected joints of the third water-cooling three-way joint is sealed, and the other joint is connected to the water-cooling connecting pipe.

[0031] Further preferably, the first angle valve unit and the second angle valve unit each include a water-cooled valve seat, an angle valve connecting plate, an angle valve cylinder and a valve plate, the angle valve cylinder is mounted on the angle valve connecting plate, and a telescopic rod of the angle valve cylinder passes through the angle valve connecting plate and is connected to the valve plate;

[0032] The water-cooled valve seat is provided with a first flange opening and a second flange opening, wherein the first flange opening faces the valve plate;

[0033] The angle valve connecting plate and the first flange opening are respectively arranged on opposite sides of the water-cooled valve seat in the axial direction, and the central axis direction of the second flange opening is perpendicular to the central axis direction of the first flange opening.

[0034] Further preferably, the first flange port of the first angle valve unit is connected to the first steering cooling pipeline;

[0035] The second flange port of the second angle valve unit is connected to the second thermal opening and closing mechanism.

[0036] Further preferably, the extension direction of the thermal cut-off cylinder of the first thermal cut-off closing mechanism is perpendicular to the extension direction of the angle valve cylinder of the first angle valve unit;

[0037] The extension direction of the thermal cut-off cylinder of the second thermal cut-off closing mechanism is perpendicular to the extension direction of the angle valve cylinder of the second angle valve unit;

[0038] The extension and retraction direction of the angle valve cylinder of the first angle valve unit is perpendicular to the extension and retraction direction of the angle valve cylinder of the second angle valve unit.

[0039] The cooling method of the forced cooling mechanism is that when the coating of the main furnace body of the CVD furnace is completed, a cooling process is required to shorten the furnace opening time. At this time, the piston rods of the first thermal break opening and closing mechanism, the first angle valve unit, the second angle valve unit and the second thermal break opening and closing mechanism are all retracted to make the inside of the cooling channel unobstructed, and at the same time, the cooling fan unit is turned on and the cooling blades rotate;

[0040] The heat in the main furnace body of the CVD furnace enters through the flange opening on the first thermal switch-off mechanism side and is discharged through the flange opening on the second thermal switch-off mechanism side, in a reciprocating cycle.

[0041] When the temperature of the temperature sensor detecting the temperature in the heat exchange channel reaches the requirement, the main furnace body of the CVD furnace starts to discharge exhaust gas and prepares to start the furnace.

[0042] Compared with the prior art, the present invention has the following beneficial effects:

[0043] The present invention rapidly forces cooling of the temperature in the cavity of the main furnace body of the CVD furnace, and is equipped with water cooling and air cooling. The heat in the cavity of the main furnace body enters from the upper end of the flange and is discharged from the lower end, forming a cycle to accelerate the cooling effect.

[0044] The present invention is equipped with a temperature sensor and a pressure sensor, which can know the temperature and pressure in the mechanism in real time. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 It is a structural schematic diagram of a specific embodiment 1 of the present invention;

[0046] Figure 2 It is a structural schematic diagram of another viewing angle of the specific embodiment 1 of the present invention;

[0047] Figure 3A cross-sectional view of a first thermal opening and closing mechanism of a specific embodiment 1 of the present invention;

[0048] Figure 4 A cross-sectional view of a first angle valve unit of a specific embodiment 1 of the present invention;

[0049] Figure 5 A cross-sectional view of a heat exchange channel of specific embodiment 1 of the present invention.

[0050] In the figure, 1 is a first thermal opening and closing mechanism, 2 is a first angle valve unit, 3 is a first thermocouple, 4 is a heat exchange channel, 5 is a cooling fan unit, 6 is a second angle valve unit, 7 is a second thermal opening and closing mechanism, 8 is a second water-cooling elbow, 9 is a cooling pipe, 10 is a first water-cooling elbow, 11 is a first cooling three-way joint, 12 is a pressure sensor, 13 is a second cold water three-way joint, 14 is a connecting pipe, 15 is a third cooling three-way joint, 16 is a second thermocouple, 1-1 is a thermal-break cylinder, 1-2 is a thermal-break O-ring, 1-3 is a thermal-break water-cooled flange, 1-4 is a thermal-break oil seal, 1-5 is a thermal-break shutter, 1-6 is a thermal-break hard felt, 2-1 is an angle valve cylinder, 2-2 is an angle valve connecting plate, 2-3 is a cylinder O-ring, 2-4 is a water-cooled valve seat, 2-5 is a valve plate, 2-6 is a valve plate sealing ring, 4-1 is an upper cooling cavity, 4-2 is a middle cooling cavity, 4-3 is a lower cooling cavity, and 4-4 is a water leakage detection sensor. DETAILED DESCRIPTION

[0051] See also Figures 1 to 5 , Specific embodiment 1, a forced cooling mechanism of a CVD furnace, comprising a cooling channel, both ends of the cooling channel are detachably connected to the side wall flanges of the main furnace body of the CVD furnace; the cooling channel is sequentially installed with a first thermal break closing mechanism 1, a first steering cooling pipeline, a first angle valve unit 2, a second steering cooling pipeline, a heat exchange channel 4, a cooling fan unit 5, a third steering cooling pipeline, a second angle valve unit 6 and a second thermal break closing mechanism 7 along the diversion direction; the first thermal break closing mechanism 1 and the second thermal break closing mechanism 7 are arranged up and down, and the first thermal break closing mechanism 1 and the second thermal break closing mechanism 7 both include a thermal break water-cooled flange 1-3, a thermal break cylinder 1-1, a thermal break shutter 1-5 and a thermal break hard felt 1-6, the cylinder body of the thermal break cylinder 1-1 is installed on the thermal break flange, the piston rod of the thermal break cylinder 1-1 passes through the thermal break water-cooled flange 1-3 and is connected to the thermal break shutter 1-5, and the side of the thermal break shutter 1-5 away from the thermal break cylinder 1-1 is connected with a thermal break hard felt 1-6. A thermal break O-ring 1-2 and a thermal break oil seal 1-4 are sandwiched between the thermal break water-cooled flange 1-3 and the piston rod of the thermal break cylinder 1-1.

[0052] When the piston rod of the thermal cut-off cylinder 1-1 is in an extended state, the piston rod drives the thermal cut-off felt 1-6 to block the side wall flange of the main furnace body of the CVD furnace, and the main furnace body of the CVD furnace is isolated from the cooling channel. At this time, the first angle valve and the second angle valve are in a closed state; when the piston rod of the thermal cut-off cylinder 1-1 is in a shortened state, the main furnace body of the CVD furnace is connected to the cooling channel. At this time, the first angle valve and the second angle valve are in an open state. The present invention facilitates the coating process to avoid the heat overflow in the main furnace body of the CVD furnace through the combination of the thermal cut-off closing mechanism and the angle valve, and realizes the isolation of the CVD furnace from the cooling channel. Through various cooling pipes 9 and the cooling fan unit 5, the rapid cooling of the CVD furnace is realized after the coating is completed.

[0053] The thermal cut-off water-cooling flange 1-3 is detachably connected to one of the two joints that pass through the water-cooling three-way joint in the axial direction; the thermal cut-off water-cooling flange 1-3 of the first thermal cut-off closing mechanism 1 is detachably connected to an axial joint of the first water-cooling three-way joint 11, and another axial joint of the first water-cooling three-way joint 11 is detachably connected to the side wall flange of the main furnace body of the CVD furnace; the thermal cut-off water-cooling flange 1-3 of the second thermal cut-off closing mechanism 7 is detachably connected to an axial joint of the second water-cooling three-way joint 13, and another axial joint of the second water-cooling three-way joint 13 is detachably connected to the side wall flange of the main furnace body of the CVD furnace.

[0054] The first steering cooling pipeline includes a first water-cooled bent pipe 10, a second water-cooled bent pipe 8 and a water-cooled straight pipe connected in sequence, and the first water-cooled bent pipe 10, the second water-cooled bent pipe 8 and the water-cooled straight pipe are all provided with a water inlet and a water outlet for cooling water to flow through; the first water-cooled bent pipe 10 is connected to the first thermal cut-off closing mechanism 1, and the water-cooled straight pipe is connected to the first angle valve unit 2; the central axis direction of the first water-cooled bent pipe 10 and the first thermal cut-off closing mechanism 1 is in the vertical direction; the central axis direction of the water-cooled straight pipe and the first angle valve is perpendicular to the vertical direction and perpendicular to the telescopic direction of the thermal cut-off cylinder 1-1.

[0055] The second turning cooling pipeline is a water-cooling elbow that turns at 90 degrees. The water-cooling elbow is provided with a water inlet and a water outlet for cooling water to flow through; the flow direction of the water-cooling elbow is on a horizontal plane.

[0056] The same side of the outer wall of the heat exchange channel 4 is provided with upper and lower docking flanges, the upper docking flange is docked with the second steering cooling pipeline, and the lower docking flange is docked with the cooling fan unit 5; the heat exchange channel 4 includes an upper cooling cavity 4-1, a middle cooling cavity 4-2 and a lower cooling cavity 4-3 arranged from top to bottom; the upper cooling cavity 4-1 and the lower cooling cavity 4-3 are both provided with a water inlet and a water outlet for cooling water diversion; the middle cooling cavity 4-2 is installed with more than one hundred heat exchange tubes, the inner wall of the heat exchange tube is used to dock with the upper cold cavity and the lower cold cavity, and the outer wall of the heat exchange tube is provided with a heat exchange diversion channel for docking cooling water. The lower cold cavity is installed with a water leakage detection sensor, and the lower end opening of the middle cooling cavity 4-2 is directly facing the water leakage detection sensor. The end of the heat exchange channel 4 adjacent to the second steering cooling pipeline and the side of the heat exchange channel 4 adjacent to the cooling fan unit 5 are both installed with temperature sensors; the heat exchange channel 4 is installed with an air pressure sensor 12 (that is, a pressure gauge). A first thermocouple 3 is installed at the end of the heat exchange channel 4 adjacent to the second turning cooling pipeline. A second thermocouple 16 is installed at one side of the heat exchange channel 4 adjacent to the cooling fan unit 5.

[0057] The cooling fan unit 5 includes a mounting valve seat and cooling blades, and the mounting valve seat is provided with a first mounting flange and a second mounting flange which are vertically arranged; the cooling blade is rotatably installed in the mounting valve seat; the axial direction of the rotation center of the cooling blade is parallel to the central axis direction of the first mounting flange; the first mounting flange is connected to the heat exchange channel 4, and the second mounting flange is connected to the third steering cooling pipeline; the third steering cooling pipeline includes a third water-cooling three-way joint 15 and a water-cooling connecting pipe 14 which are connected in sequence, the upper joint of the third water-cooling three-way joint 15 is connected to the second mounting flange, and one of the two axially connected joints of the third water-cooling three-way joint 15 is sealed, and the other joint is connected to the water-cooling connecting pipe 14.

[0058] The first angle valve unit 2 and the second angle valve unit 6 both include a water-cooled valve seat 2-4, an angle valve connecting plate 2-2, an angle valve cylinder 2-1 and a valve plate 2-5. The angle valve cylinder 2-1 is mounted on the angle valve connecting plate 2-2, and the telescopic rod of the angle valve cylinder 2-1 passes through the angle valve connecting plate 2-2 and is connected to the valve plate 2-5. The water-cooled valve seat 2-4 is provided with a first flange opening and a second flange opening, and the first flange opening is directly opposite to the valve plate 2-5. The angle valve connecting plate 2-2 and the first flange opening are respectively arranged on opposite sides of the water-cooled valve seat 2-4 in the axial direction, and the central axis direction of the second flange opening is perpendicular to the central axis direction of the first flange opening. A cylinder O-ring 2-3 is sandwiched between the angle valve connecting plate 2-2 and the telescopic rod of the angle valve cylinder 2-1, and a valve plate 2-5 sealing ring 2-6 for resisting the valve plate 2-5 is installed on the water-cooled valve seat 2-4.

[0059] The first flange port of the first angle valve unit 2 is connected to the first steering cooling pipeline; the second flange port of the second angle valve unit 6 is connected to the second thermal disconnection mechanism 7 .

[0060] The extension and retraction direction of the thermal cut-off cylinder 1-1 of the first thermal cut-off closing mechanism 1 is perpendicular to the extension and retraction direction of the angle valve cylinder 2-1 of the first angle valve unit 2; the extension and retraction direction of the thermal cut-off cylinder 1-1 of the second thermal cut-off closing mechanism 7 is perpendicular to the extension and retraction direction of the angle valve cylinder 2-1 of the second angle valve unit 6; the extension and retraction direction of the angle valve cylinder 2-1 of the first angle valve unit 2 is perpendicular to the extension and retraction direction of the angle valve cylinder 2-1 of the second angle valve unit 6.

[0061] The cooling method of the forced cooling mechanism is that when the coating of the main furnace body of the CVD furnace is completed, a cooling process is required to shorten the furnace opening time. At this time, the first thermal break opening and closing mechanism, the first angle valve unit 2, the second angle valve unit 6 and the piston rod of the second thermal break opening and closing mechanism are all retracted to make the inside of the cooling channel unobstructed, and at the same time, the cooling fan unit 5 is turned on and the cooling blades rotate;

[0062] The heat in the main furnace body of the CVD furnace enters through the flange opening on the side of the first thermal opening and closing mechanism 1, and is discharged through the flange opening on the side of the second thermal opening and closing mechanism 7, in a reciprocating cycle;

[0063] When the temperature of the temperature sensor detecting the temperature in the heat exchange channel 4 reaches the required temperature, the main furnace body of the CVD furnace starts to discharge exhaust gas and prepares to start the furnace.

[0064] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A forced cooling mechanism for a CVD furnace, characterized in that: It comprises a cooling channel, both ends of which are detachably connected to the side wall flanges of the main furnace body of the CVD furnace; The cooling channel is sequentially installed with a first thermal opening and closing mechanism, a first steering cooling pipeline, a first angle valve unit, a second steering cooling pipeline, a heat exchange channel, a cooling fan unit, a third steering cooling pipeline, a second angle valve unit and a second thermal opening and closing mechanism along the flow direction; The first thermal break closing mechanism and the second thermal break closing mechanism are arranged up and down, and both the first thermal break closing mechanism and the second thermal break closing mechanism include a thermal break water-cooled flange, a thermal break cylinder, a thermal break shutter and a thermal break hard felt, the thermal break flange is provided with a cylinder body of the thermal break cylinder, the piston rod of the thermal break cylinder passes through the thermal break water-cooled flange and is connected to the thermal break shutter, and the thermal break hard felt is connected to the side of the thermal break shutter away from the thermal break cylinder; The piston rod of the thermal cut-off cylinder is in an extended state, and the piston rod drives the thermal cut-off hard felt to block the side wall flange of the main furnace body of the CVD furnace, so that the main furnace body of the CVD furnace is isolated from the cooling channel. At this time, the first angle valve and the second angle valve are in a closed state; The piston rod of the thermal cut-off cylinder is in a shortened state, the main furnace body of the CVD furnace and the cooling channel are connected to each other, and at this time, the first angle valve and the second angle valve are in an open state.

2. The forced cooling mechanism of a CVD furnace according to claim 1, characterized in that: The thermal cut-off water-cooling flange is detachably connected to one of the two joints that penetrate and conduct the water-cooling three-way joint in the axial direction; A thermal cut-off water-cooling flange of the first thermal cut-off closing mechanism is detachably connected to a joint axially arranged with the first water-cooling three-way joint, and another joint axially arranged with the first water-cooling three-way joint is detachably connected to a side wall flange of the main furnace body of the CVD furnace; The thermal cut-off water-cooling flange of the second thermal cut-off closing mechanism is detachably connected to the second water-cooling three-way joint in the axial direction, and the other axially arranged joint of the second water-cooling three-way joint is detachably connected to the side wall flange of the main furnace body of the CVD furnace.

3. The forced cooling mechanism of a CVD furnace according to claim 1, characterized in that: The first turning cooling pipeline comprises a first water-cooling elbow, a second water-cooling elbow and a water-cooling straight pipe connected in sequence, and the first water-cooling elbow, the second water-cooling elbow and the water-cooling straight pipe are all provided with a water inlet and a water outlet for cooling water to flow through; The first water-cooling elbow is connected to the first thermal opening and closing mechanism, and the water-cooling straight pipe is connected to the first angle valve unit; The central axis direction of the joint between the first water-cooling elbow and the first thermal opening and closing mechanism is in the vertical direction; The central axis direction of the joint between the water-cooling straight pipe and the first angle valve is perpendicular to the vertical direction and perpendicular to the extension and contraction direction of the thermal cut-off cylinder.

4. The forced cooling mechanism of a CVD furnace according to claim 1, characterized in that: The second turning cooling pipeline is a water-cooling elbow that turns at 90 degrees, and the water-cooling elbow is provided with a water inlet and a water outlet for cooling water to flow through; The flow guiding direction of the water-cooling elbow is on a horizontal plane.

5. The forced cooling mechanism of a CVD furnace according to claim 1, characterized in that: The same side of the outer wall of the heat exchange channel is provided with upper and lower docking flanges, the upper docking flange is docked with the second steering cooling pipeline, and the lower docking flange is docked with the cooling fan unit; The heat exchange channel includes an upper cooling cavity, a middle cooling cavity and a lower cooling cavity arranged from top to bottom; The upper cooling cavity and the lower cooling cavity are both provided with a water inlet and a water outlet for guiding cooling water; The middle cooling cavity is equipped with more than one hundred heat exchange tubes, the inner walls of the heat exchange tubes are used to connect with the upper cooling cavity and the lower cooling cavity, and the outer walls of the heat exchange tubes are provided with heat exchange guide channels for connecting with cooling water; The lower cooling cavity is equipped with a water leakage detection sensor, and the lower end opening of the middle cooling cavity faces the water leakage detection sensor; Temperature sensors are installed at the end of the heat exchange channel adjacent to the second steering cooling pipeline and at one side of the heat exchange channel adjacent to the cooling fan unit; An air pressure sensor is installed in the heat exchange channel.

6. The forced cooling mechanism of a CVD furnace according to claim 1, characterized in that: The cooling fan unit comprises a mounting valve seat and cooling blades, wherein the mounting valve seat is provided with a first mounting flange and a second mounting flange which are vertically arranged; The cooling blade is rotatably mounted in the mounting valve seat; the axial direction of the rotation center of the cooling blade is parallel to the central axis direction of the first mounting flange; The first mounting flange is connected to the heat exchange channel, and the second mounting flange is connected to the third steering cooling pipeline; The third steering cooling pipeline includes a third water-cooling three-way joint and a water-cooling connecting pipe connected in sequence, the upper joint of the third water-cooling three-way joint is connected to the second mounting flange, one of the two axially connected joints of the third water-cooling three-way joint is sealed, and the other joint is connected to the water-cooling connecting pipe.

7. The forced cooling mechanism of a CVD furnace according to claim 1, characterized in that: The first angle valve unit and the second angle valve unit both include a water-cooled valve seat, an angle valve connecting plate, an angle valve cylinder and a valve plate, wherein the angle valve cylinder is mounted on the angle valve connecting plate, and a telescopic rod of the angle valve cylinder passes through the angle valve connecting plate and is connected to the valve plate; The water-cooled valve seat is provided with a first flange opening and a second flange opening, wherein the first flange opening faces the valve plate; The angle valve connecting plate and the first flange opening are respectively arranged on opposite sides of the water-cooled valve seat in the axial direction, and the central axis direction of the second flange opening is perpendicular to the central axis direction of the first flange opening.

8. The forced cooling mechanism of a CVD furnace according to claim 7, characterized in that: The first flange port of the first angle valve unit is connected to the first steering cooling pipeline; The second flange port of the second angle valve unit is connected to the second thermal opening and closing mechanism.

9. The forced cooling mechanism of a CVD furnace according to claim 7, characterized in that: The extension direction of the thermal cut-off cylinder of the first thermal cut-off closing mechanism is perpendicular to the extension direction of the angle valve cylinder of the first angle valve unit; The extension direction of the thermal cut-off cylinder of the second thermal cut-off closing mechanism is perpendicular to the extension direction of the angle valve cylinder of the second angle valve unit; The extension and retraction direction of the angle valve cylinder of the first angle valve unit is perpendicular to the extension and retraction direction of the angle valve cylinder of the second angle valve unit.

10. The cooling method of the forced cooling mechanism of a CVD furnace according to claim 1, characterized in that: When the coating of the main furnace body of the CVD furnace is completed, a cooling process is required to shorten the furnace opening time. At this time, the first thermal break opening and closing mechanism, the first angle valve unit, the second angle valve unit and the piston rod of the second thermal break opening and closing mechanism are all retracted to make the inside of the cooling channel unobstructed. At the same time, the cooling fan unit is turned on and the cooling blades rotate; The heat in the main furnace body of the CVD furnace enters through the flange opening on the first thermal switch-off mechanism side and is discharged through the flange opening on the second thermal switch-off mechanism side, in a reciprocating cycle. When the temperature of the temperature sensor detecting the temperature in the heat exchange channel reaches the requirement, the main furnace body of the CVD furnace starts to discharge exhaust gas and prepares to start the furnace.

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