Fixture for preparing movable charge standard sample wafer of integrated circuit

Abstract

The invention discloses a clamp for preparing a movable charge standard sample wafer of an integrated circuit, and relates to the technical field of clamps for integrated circuits. A clamp device comprises a supporting table, supporting assemblies are arranged on the periphery of the bottom of the supporting table, a driving groove is formed in the upper surface of the supporting table, and a clamping table is arranged above the driving groove; four moving grooves are formed in the upper surface of the clamping table, ejector rods are arranged among the moving grooves, first clamping assemblies are arranged in the moving grooves and slidably connected with the interiors of the moving grooves, and second clamping assemblies are arranged on one sides of the first clamping assemblies and slidably connected with the interiors of the moving grooves. A pressing assembly is arranged at the rear end of the clamping table, and a first rotating plate is arranged on the end face of one side of the clamping table. The problems that in the prior art, a preparation clamp is poor in functionality and flexibility, and therefore the practicability and convenience of the preparation clamp are affected during use are solved.

Description

Technical Field

[0001] The invention relates to the technical field of integrated circuit fixtures, in particular to a fixture for preparing a movable charge standard sample of an integrated circuit. Background Art

[0002] The integrated circuit movable charge standard sample is a special integrated circuit sample used to calibrate or test the digital integrated circuit test system. This sample has one or more parameters determined, including parameters related to charge. During the preparation process, a fixture is required for fixing the sample.

[0003] For example, the Chinese authorized patent with announcement number CN216991612U (an integrated circuit board production fixture): it includes a base plate, a placement plate is fixedly installed on the top of the base plate, the top of the placement plate is in contact with the bottom of the integrated circuit board, and clamping and positioning devices are provided on both sides of the top of the base plate. The integrated circuit board production fixture, by setting the clamping and positioning device, is easy to operate and has a simple structure when the integrated circuit board is clamped during production. The clamping position can be automatically adjusted according to the different external dimensions of the integrated circuit board. It is highly practical and avoids singleness. The clamping position is adjusted by telescopic sliding rods, and the corresponding clamping and positioning rods are controlled during the clamping operation to avoid the damage of the chip circuit on the surface of the integrated circuit board caused by the existing long strip overall clamping, thereby enhancing production efficiency, having a multi-point clamping function, and a more stable clamping effect.

[0004] However, the functionality and flexibility of the preparation fixture in the above-mentioned prior art are poor, which affects its practicality and convenience when used; therefore, it does not meet the existing needs. We have proposed a fixture for preparing integrated circuit movable charge standard samples. Summary of the invention

[0005] The purpose of the present invention is to provide a fixture for preparing integrated circuit movable charge standard samples to solve the problem that the functionality and flexibility of the preparation fixture in the prior art mentioned in the above background technology are poor, thereby affecting its practicality and convenience when used.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: A fixture for preparing integrated circuit movable charge standard samples, comprising a support table, support components are arranged around the bottom of the support table, a driving groove is arranged on the upper surface of the support table, a clamping table is arranged above the driving groove, a moving groove is arranged on the upper surface of the clamping table, four moving grooves are arranged, a push rod is arranged between the moving grooves, a first clamping component is arranged inside the moving groove, the first clamping component is slidably connected to the inside of the moving groove, a second clamping component is arranged on one side of the first clamping component, and a pressing component is arranged at the rear end of the clamping table.

[0007] Preferably, a first rotating plate is provided on one end face of the clamping table, and both front and rear end faces of the first rotating plate are provided with limit seats, a rotating shaft is provided on the front end face of the limit seat, and the first rotating plate is rotatably connected to the limit seat.

[0008] Preferably, a supporting leg is provided at the bottom of the supporting assembly, an adjusting leg is provided inside the supporting leg, a fixing groove is provided on the front end surface of the adjusting leg, the adjusting leg is plug-connected with the inside of the supporting leg, a fixing rod is installed on the front end surface of the supporting leg, a fixing plate is provided at the bottom of the supporting leg, and fixing holes are provided on both sides of the upper surface of the fixing plate.

[0009] Preferably, a first clamping plate is provided on the first clamping assembly, a first cylinder is provided on the upper surface of the first clamping plate, a first clamping groove is provided at the bottom of the first clamping plate, and a first pressure plate is provided at the top end of the first clamping groove.

[0010] Preferably, the front and rear ends of the bottom of the second clamping assembly are both provided with a first lifting rod, a mounting seat is provided on the top of the first lifting rod, a second rotating plate is provided inside the mounting seat, the second rotating plate is rotatably connected to the inside of the mounting seat, a first telescopic rod is installed on one end surface of the second rotating plate, a first rotating seat is provided on one side of the first telescopic rod, a second clamping seat is installed on one side of the first rotating seat, a second clamping groove is provided inside the second clamping seat, and second pressure plates are installed on the upper and lower ends of the second clamping groove.

[0011] Preferably, a second rotating seat is provided at the bottom of the pressing assembly, a second lifting rod is provided above the second rotating seat, a support rod is provided on the top of the second lifting rod, a second cylinder is provided on one side of the upper surface of the support rod, a second telescopic rod is provided on one side of the bottom of the support rod, and a pressing rod is installed at the bottom of the second telescopic rod.

[0012] Preferably, a third lifting rod is provided on one side inside the driving groove, and two groups of the third lifting rods are provided. A connecting seat is provided on the top of the third lifting rod, and an arc groove is provided inside the connecting seat.

[0013] Preferably, the method for using the fixture for preparing the integrated circuit movable charge standard sample comprises the following steps:

[0014] Step 1: After placing the sample of the integrated circuit on the clamping table, the driving device drives the first clamping assembly to move inside the moving groove, so that the four sides of the sample are located inside the first clamping groove at the bottom of the first clamping plate for clamping, and then the first cylinder drives the first pressing plate to press and fix the surface around the sample;

[0015] Step 2: When the sample needs to be rotated, the second rotating plate on the second clamping assembly is rotated to the right inside the mounting seat, and then the first telescopic rod is extended and retracted so that the two side end surfaces of the sample are located inside the second clamping groove inside the second clamping plate, and then the second pressing plate is used to press and reinforce it, and the first rotating seat can be used to rotate it when rotating;

[0016] Step 3: When processing is required on all sides of the sample, the sample is placed above the push rod on the clamping table, and then the pressing assembly rotates the push rod to the top of the sample through the second rotating seat, and the second cylinder drives the second telescopic rod to make the push rod contact the upper surface of the sample, and then the push rod and the push rod are telescoped to achieve height lifting;

[0017] Step 4: After clamping and fixing by selecting the clamping method in the above steps 1-3 according to the needs, you can proceed with the subsequent processing operations. During processing, you can fix it by installing fixing screws inside the fixing holes of the fixing plate at the bottom of the support assembly. The overall height of the support assembly can be adjusted by plugging and moving the adjusting legs inside the support legs. After adjustment, fix it with a fixing rod.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] 1. The present invention provides a first clamping assembly, a second clamping assembly and a pressing assembly. After placing the sample of the integrated circuit on the clamping table, the driving device drives the first clamping assembly to move inside the moving groove, so that the four sides of the sample are located inside the first clamping groove at the bottom of the first clamping plate for clamping. Then, the first cylinder drives the first pressing plate to press and fix the surface around the sample. When the sample needs to be rotated, the second rotating plate on the second clamping assembly is rotated to the right inside the mounting seat, and then the first telescopic rod is extended and retracted, so that the two side end faces of the sample are located in the second clamping groove inside the second clamping plate. The inside is then pressed and reinforced by the second pressing plate, and the first rotating seat is used for rotation. When the sample needs to be processed on all sides, the sample is placed above the push rod on the clamping table, and then the pressing assembly rotates the pressure rod to the top of the sample through the second rotating seat. The second cylinder drives the second telescopic rod to make the pressure rod contact the upper surface of the sample, and then the push rod and the pressure rod are telescoped for height lifting. The above clamping method can be selected according to the processing scenario, which solves the problem that the functionality and flexibility of the preparation fixture in the prior art are poor, thereby affecting its practicality and convenience when used.

[0020] 2. By setting up the support assembly and selecting the clamping method according to the needs, the support assembly can be fixed by installing fixing screws inside the fixing holes of the fixing plate at the bottom of the support assembly during processing. The overall height of the support assembly can be adjusted by plugging and moving the adjusting legs inside the supporting legs, and then fixed with a fixing rod after adjustment.

[0021] 3. A driving groove is provided on the upper surface of the support table, and a third lifting rod and a connecting seat are provided inside the driving groove. The top of the connecting seat is rotatably connected to one side of the lower surface of the clamping table, and the first rotating plate on the other side of the clamping table is rotatably connected to the limit seat. By lifting and lowering the third lifting rod, one end of the clamping table can be raised so that the surface of the clamping table is inclined, which is convenient for operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the preparation fixture of the present invention;

[0023] Figure 2 It is an enlarged schematic diagram of the clamping table structure of the present invention;

[0024] Figure 3 It is an enlarged schematic diagram of the support assembly structure of the present invention;

[0025] Figure 4 It is an enlarged schematic diagram of the first clamping assembly and the second clamping assembly structure of the present invention;

[0026] Figure 5 It is an enlarged schematic diagram of the pressing assembly structure of the present invention;

[0027] Figure 6 It is an enlarged schematic diagram of the local structure of the support platform of the present invention;

[0028] In the figure: 1, support platform; 2, support assembly; 3, driving groove; 4, clamping platform; 5, pressing assembly; 6, moving groove; 7, ejector rod; 8, first rotating plate; 9, limit seat; 10, rotating shaft; 11, first clamping assembly; 12, second clamping assembly; 13, support leg; 14, adjustment leg; 15, fixing groove; 16, fixing plate; 17, fixing hole; 18, fixing rod; 19, first clamping plate; 20, first cylinder; 21 , the first clamping groove; 22, the first pressure plate; 23, the first lifting rod; 24, the mounting seat; 25, the second rotating plate; 26, the first telescopic rod; 27, the first rotating seat; 28, the second clamping plate; 29, the second clamping groove; 30, the second pressure plate; 31, the second lifting rod; 32, the second rotating seat; 33, the supporting rod; 34, the second cylinder; 35, the second telescopic rod; 36, the pressure rod; 37, the third lifting rod; 38, the connecting seat. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0030] See also Figure 1-6An embodiment of the present invention is a fixture for preparing a standard sample of a movable charge of an integrated circuit, comprising a support table 1, a support assembly 2 is arranged around the bottom of the support table 1, a driving groove 3 is arranged on the upper surface of the support table 1, a clamping table 4 is arranged above the driving groove 3, a moving groove 6 is arranged on the upper surface of the clamping table 4, four moving grooves 6 are arranged, a push rod 7 is arranged between the moving grooves 6, a first clamping assembly 11 is arranged inside the moving groove 6, the first clamping assembly 11 is slidably connected to the inside of the moving groove 6, a second clamping assembly 12 is arranged on one side of the first clamping assembly 11, and a pressing assembly 5 is arranged at the rear end of the clamping table 4. After placing the sample of the integrated circuit on the clamping table 4, the driving device drives the first clamping assembly 11 to move inside the moving groove 6, so that the four sides of the sample are located inside the first clamping groove 21 at the bottom of the first clamping plate 19 for clamping, and then the first cylinder 20 drives the first pressing plate 22 to press and fix the surface around the sample When the sample needs to be rotated, the second rotating plate 25 on the second clamping assembly 12 is rotated to the right inside the mounting seat 24, and then the first telescopic rod 26 is telescoped so that the two side end surfaces of the sample are located inside the second clamping groove 29 inside the second clamping plate 28, and then the second pressing plate 30 is used for pressing and reinforcement, and the first rotating seat 27 is used for rotation when rotating; when the sample needs to be processed on all sides, the sample is placed above the push rod 7 on the clamping table 4, and then the pressing assembly 5 rotates the pressure rod 36 to the top of the sample through the second rotating seat 32, and the second cylinder 34 drives the second telescopic rod 35 to make the pressure rod 36 contact the upper surface of the sample, and then the push rod 7 and the pressure rod 36 are telescoped for height lifting. The above clamping method can be selected according to the processing scenario, which solves the problem that the functionality and flexibility of the preparation fixture in the prior art are poor, thereby affecting its practicality and convenience when used. During processing, the support component 2 can be fixed by installing fixing screws inside the fixing holes 17 of the fixing plate 16 at the bottom. The overall height of the support component 2 can be adjusted by inserting and moving the adjusting legs 14 inside the supporting legs 13, and then fixed using the fixing rods 18 after adjustment.

[0031] See also Figure 1-Figure 6 A first rotating plate 8 is provided on one end face of the clamping platform 4, and a limiting seat 9 is provided on both the front and rear end faces of the first rotating plate 8. A rotating shaft 10 is provided on the front end face of the limiting seat 9, and the first rotating plate 8 is rotatably connected to the limiting seat 9.

[0032] See also Figure 1-Figure 6A supporting leg 13 is provided at the bottom of the supporting component 2, an adjusting leg 14 is provided inside the supporting leg 13, a fixing groove 15 is provided on the front end surface of the adjusting leg 14, the adjusting leg 14 is plugged and connected with the inside of the supporting leg 13, a fixing rod 18 is installed on the front end surface of the supporting leg 13, a fixing plate 16 is provided at the bottom of the supporting leg 13, and fixing holes 17 are provided on both sides of the upper surface of the fixing plate 16. During processing, fixing screws can be installed inside the fixing holes 17 of the fixing plate 16 at the bottom of the supporting component 2 for fixing. The overall height of the supporting component 2 is adjusted by plugging and moving the adjusting leg 14 inside the supporting leg 13, and fixed by the fixing rod 18 after adjustment.

[0033] See also Figure 1-Figure 6 A first clamping plate 19 is provided on the first clamping assembly 11, a first cylinder 20 is provided on the upper surface of the first clamping plate 19, a first clamping groove 21 is provided at the bottom of the first clamping plate 19, and a first pressure plate 22 is provided at the top end of the first clamping groove 21.

[0034] See also Figure 1-Figure 6 A first lifting rod 23 is provided at the front and rear ends of the bottom of the second clamping assembly 12, a mounting seat 24 is provided at the top of the first lifting rod 23, a second rotating plate 25 is provided inside the mounting seat 24, the second rotating plate 25 is rotatably connected with the inside of the mounting seat 24, a first telescopic rod 26 is installed on one end surface of the second rotating plate 25, a first rotating seat 27 is provided on one side of the first telescopic rod 26, a second clamping seat 28 is installed on one side of the first rotating seat 27, a second clamping groove 29 is provided inside the second clamping seat 28, and a second pressing plate 30 is installed at the upper and lower ends of the second clamping groove 29.

[0035] See also Figure 1-Figure 6 A second rotating seat 32 is provided at the bottom of the pressing assembly 5, a second lifting rod 31 is provided above the second rotating seat 32, a support rod 33 is provided on the top of the second lifting rod 31, a second cylinder 34 is provided on one side of the upper surface of the support rod 33, a second telescopic rod 35 is provided on one side of the bottom of the support rod 33, and a pressing rod 36 is installed at the bottom of the second telescopic rod 35.

[0036] See also Figure 1-Figure 6 A third lifting rod 37 is provided on one side of the driving groove 3, and two groups of the third lifting rod 37 are provided. A connecting seat 38 is provided on the top of the third lifting rod 27, and an arc groove is provided inside the connecting seat 38. The top of the connecting seat 38 is rotatably connected to one side of the lower surface of the clamping platform 4, and the first rotating plate 8 on the other side of the clamping platform 4 is rotatably connected to the limiting seat 9. The lifting and lowering of the third lifting rod 37 can make one end of the clamping platform 4 rise so that the surface of the clamping platform 4 is in an inclined state, which is convenient for operation.

[0037] See also Figure 1-Figure 6A method for using a fixture for preparing a movable charge standard sample of an integrated circuit comprises the following steps:

[0038] Step 1: After placing the sample of the integrated circuit on the clamping table 4, the driving device drives the first clamping assembly 11 to move inside the moving groove 6, so that the four sides of the sample are located in the first clamping groove 21 at the bottom of the first clamping plate 19 for clamping, and then the first cylinder 20 drives the first pressing plate 22 to press and fix the surface around the sample;

[0039] Step 2: When the sample needs to be rotated, the second rotating plate 25 on the second clamping assembly 12 is rotated to the right inside the mounting seat 24, and then the first telescopic rod 26 is extended and retracted so that the two side end surfaces of the sample are located inside the second clamping groove 29 inside the second clamping plate 28, and then the second pressing plate 30 is used to press and reinforce it, and the first rotating seat 27 can be used to rotate when rotating;

[0040] Step 3: When processing is required around the sample, the sample is placed above the push rod 7 on the clamping table 4, and then the pressing assembly 5 rotates the pressing rod 36 to the top of the sample through the second rotating seat 32, and the second cylinder 34 drives the second telescopic rod 35 to make the pressing rod 36 contact the upper surface of the sample, and then the push rod 7 and the pressing rod 36 are telescoped to achieve height lifting;

[0041] Step 4: After clamping and fixing by selecting the clamping method in the above steps 1-3 according to needs, subsequent processing operations can be carried out. During processing, fixing screws can be installed inside the fixing holes 17 of the fixing plate 16 at the bottom of the support component 2 for fixing. The overall height of the support component 2 can be adjusted by plugging and moving the adjustment leg 14 inside the support leg 13, and after adjustment, it is fixed using the fixing rod 18.

[0042] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. A fixture for preparing a movable charge standard sample of an integrated circuit, comprising a support table (1), characterized in that: Support components (2) are arranged around the bottom of the support platform (1), a driving groove (3) is arranged on the upper surface of the support platform (1), a clamping platform (4) is arranged above the driving groove (3), a movable groove (6) is arranged on the upper surface of the clamping platform (4), four movable grooves (6) are arranged, a push rod (7) is arranged between the movable grooves (6), a first clamping component (11) is arranged inside the movable groove (6), the first clamping component (11) is slidably connected to the inside of the movable groove (6), a second clamping component (12) is arranged on one side of the first clamping component (11), and a pressing component (5) is arranged at the rear end of the clamping platform (4).

2. The fixture for preparing a movable charge standard sample of an integrated circuit according to claim 1, characterized in that: A first rotating plate (8) is provided on one end face of the clamping platform (4), and a limiting seat (9) is provided on both the front and rear end faces of the first rotating plate (8). A rotating shaft (10) is provided on the front end face of the limiting seat (9), and the first rotating plate (8) is rotatably connected to the limiting seat (9).

3. The fixture for preparing a movable charge standard sample of an integrated circuit according to claim 2, characterized in that: A supporting leg (13) is provided at the bottom of the supporting assembly (2), an adjusting leg (14) is provided inside the supporting leg (13), a fixing groove (15) is provided on the front end surface of the adjusting leg (14), and the adjusting leg (14) is plug-connected with the inside of the supporting leg (13).

4. The fixture for preparing a movable charge standard sample of an integrated circuit according to claim 3, characterized in that: A fixing rod (18) is installed on the front end surface of the supporting leg (13), a fixing plate (16) is arranged at the bottom of the supporting leg (13), and fixing holes (17) are arranged on both sides of the upper surface of the fixing plate (16).

5. The fixture for preparing a movable charge standard sample of an integrated circuit according to claim 4, characterized in that: The first clamping assembly (11) is provided with a first clamping plate (19), the upper surface of the first clamping plate (19) is provided with a first cylinder (20), the bottom of the first clamping plate (19) is provided with a first clamping groove (21), and the top end of the first clamping groove (21) is provided with a first pressure plate (22).

6. The fixture for preparing a movable charge standard sample of an integrated circuit according to claim 5, characterized in that: The front and rear ends of the bottom of the second clamping assembly (12) are both provided with a first lifting rod (23), a mounting seat (24) is provided at the top of the first lifting rod (23), a second rotating plate (25) is provided inside the mounting seat (24), and the second rotating plate (25) is rotatably connected to the inside of the mounting seat (24).

7. The fixture for preparing a movable charge standard sample of an integrated circuit according to claim 6, characterized in that: A first telescopic rod (26) is installed on one end surface of one side of the second rotating plate (25); a first rotating seat (27) is provided on one side of the first telescopic rod (26); a second clamping seat (28) is installed on one side of the first rotating seat (27); a second clamping groove (29) is provided inside the second clamping seat (28); and second pressing plates (30) are installed at the upper and lower ends of the second clamping groove (29).

8. The fixture for preparing a movable charge standard sample of an integrated circuit according to claim 7, characterized in that: A second rotating seat (32) is arranged at the bottom of the pressing assembly (5), a second lifting rod (31) is arranged above the second rotating seat (32), a support rod (33) is arranged at the top of the second lifting rod (31), a second cylinder (34) is arranged on one side of the upper surface of the support rod (33), a second telescopic rod (35) is arranged on one side of the bottom of the support rod (33), and a pressing rod (36) is installed at the bottom of the second telescopic rod (35).

9. The fixture for preparing a movable charge standard sample of an integrated circuit according to claim 8, characterized in that: A third lifting rod (37) is arranged on one side inside the driving groove (3), and two groups of the third lifting rods (37) are arranged. A connecting seat (38) is arranged on the top of the third lifting rod (27), and an arc groove is arranged inside the connecting seat (38).

10. The method for using the fixture for preparing a movable charge standard sample of an integrated circuit according to any one of claims 1 to 9, characterized in that: The following steps are involved: Step 1: After placing the integrated circuit sample on the clamping table (4), the driving device drives the first clamping assembly (11) to move inside the movable groove (6), so that the four sides of the sample are located inside the first clamping groove (21) at the bottom of the first clamping plate (19) for clamping, and then the first cylinder (20) drives the first pressing plate (22) to press and fix the surface of the four sides of the sample; Step 2: When the sample needs to be rotated, the second rotating plate (25) on the second clamping assembly (12) is rotated to the right inside the mounting seat (24), and then the first telescopic rod (26) is extended and retracted so that the two side end surfaces of the sample are located inside the second clamping groove (29) inside the second clamping plate (28), and then the second pressing plate (30) is used to press and reinforce it, and the first rotating seat (27) can be used to rotate it when rotating; Step 3: When processing is required on all sides of the sample, the sample is placed above the push rod (7) on the clamping table (4), and then the pressing assembly (5) rotates the pressing rod (36) to the top of the sample through the second rotating seat (32), and the second cylinder (34) drives the second telescopic rod (35) to make the pressing rod (36) contact the upper surface of the sample, and then the push rod (7) and the pressing rod (36) are telescoped to achieve height lifting; Step 4: After clamping and fixing by the clamping method in the above steps 1-3 according to the needs, the subsequent processing operation can be carried out. During processing, fixing screws are installed inside the fixing holes (17) of the fixing plate (16) at the bottom of the support component (2) for fixing. The overall height of the support component (2) is adjusted by inserting and moving the adjustment leg (14) inside the support leg (13). After adjustment, it is fixed using the fixing rod (18).

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