Light energy uniformity detection method and system and exposure equipment

Abstract

The invention discloses a light energy uniformity detection method and system and exposure equipment, and relates to the technical field of light energy detection, and the system comprises a light ray projection unit which is used for changing a laser light path emitted by a laser module and forming a light spot with a proper size; the photoelectric energy sensor is used for receiving the light spots and carrying out energy detection; the motion detection unit is used for driving the photoelectric energy sensor to move in the plane of the exposure machine platform; the main control computer is used for controlling the motion detection unit to move, so that the windowing center of the photoelectric energy sensor coincides with the light spot center; and the processor is also used for carrying out data processing on the energy detection information and determining whether the energy uniformity of the laser light path reaches the standard or not. According to the system, the accurate moving distance required by the motion detection unit can be obtained, the situation of energy loss caused by the fact that a light path projection light spot does not completely fall into an open window of the photoelectric energy sensor is avoided, and the uniformity detection result is more accurate.

Description

Technical Field

[0001] The present invention relates to the technical field of light energy detection, and in particular to a light energy uniformity detection method and system. Background Art

[0002] In laser direct imaging technology, the illumination uniformity of the exposure machine's optical path has a huge impact on the quality of the manufactured products, so it is very necessary to detect the energy uniformity of the laser light source.

[0003] Existing exposure machines usually use sensors to detect the energy generated by the light spot projected by the light path to determine the uniformity of the light path. However, the window for the sensor to sense the light spot projected by the light path is relatively small. When the sensor is installed with deviation or moves for a long time causing position shift, the light spot cannot be completely projected into the window, causing energy loss, which can easily lead to deviations in energy uniformity detection and affect the uniformity detection results. Summary of the invention

[0004] In view of the above problems and technical requirements, the inventors have proposed a light energy uniformity detection method, system and exposure equipment. The technical solution of the present invention is as follows:

[0005] In a first aspect, the present application provides a light energy uniformity detection system, comprising:

[0006] A light projection unit, used to change the laser light path emitted by the laser module to form a light spot;

[0007] Photoelectric energy sensor, used for receiving light spot and performing energy detection;

[0008] A motion detection unit, used to drive the photoelectric energy sensor to move within the plane of the exposure machine platform;

[0009] The main control unit is used to control the movement of the motion detection unit so that the window center of the photoelectric energy sensor coincides with the center of the light spot; it is also used to process the energy detection information to determine whether the energy uniformity of the laser light path meets the standard.

[0010] A further technical solution is that the ray projection unit comprises:

[0011] A laser module, used for emitting a laser beam;

[0012] A pattern generator, used for reflecting the laser beam and forming at least three light spots;

[0013] The optical path lens is used to enlarge or reduce the light spot formed by the pattern generator, and the light spot size is smaller than the window size of the photoelectric energy sensor.

[0014] A further technical solution is that the motion detection unit includes:

[0015] The control module is used to send corresponding control instructions to the detection module and the motion module respectively under the control of the main control machine;

[0016] The detection module is used to perform light energy detection according to the detection control instruction sent by the control module, and feed back the energy detection information to the control module;

[0017] The motion module includes a housing and a motion track. A photoelectric energy sensor is mounted outside the housing. The motion module is used to drive the housing to move to a specified position along the motion track according to a motion control instruction sent by the control module, and to feed back the current motion state to the control module. The specified position refers to a position where the window center of the photoelectric energy sensor coincides with the center of the light spot.

[0018] The power module is used to supply power to the control module, detection module and motion module.

[0019] A further technical solution is that the photoelectric energy sensor is a photon detector.

[0020] A further technical solution is that the system further includes a camera;

[0021] The camera is installed on the light projection unit and is used to capture the photoelectric energy sensor and the light spot image to obtain the positions of the window center and the light spot center of the photoelectric energy sensor in the image coordinate system;

[0022] Alternatively, the camera is installed on the motion detection unit, and the position of the window center of the photoelectric energy sensor in the camera coordinate system is pre-calibrated; the camera captures the spot image as the motion detection unit moves, and then converts it to the camera coordinate system to obtain the position of the spot center in the camera coordinate system.

[0023] A further technical solution is that the motion module further includes a motor drive module, a motion motor, a third control chip and a fifth communication chip;

[0024] The third control chip is connected to the control module via the fifth communication chip, and is used to receive the motion control instructions issued by the control module and to feed back the current motion state to the control module;

[0025] The third control chip is connected to the motor drive module and is used to send a pulse control signal when receiving a motion control instruction;

[0026] The motor drive module is connected to the motion motor and is used to receive the pulse control signal and convert it into a motor PWM control signal and transmit it to the motion motor;

[0027] The motion motor is arranged at one end of the motion track, and is used for driving the motion track to move the housing with the photoelectric energy sensor to a designated position according to a motor PWM control signal.

[0028] In a second aspect, the present application further provides a method for detecting light energy uniformity, which is implemented based on the light energy uniformity detection system described in the first aspect and includes the following steps:

[0029] Using a light projection unit to obtain light spots in the same laser light path, the number of light spots is at least three;

[0030] The main control machine controls the motion detection unit with the photoelectric energy sensor to move in the plane of the exposure machine platform, so that the window center of the photoelectric energy sensor coincides with the center of each light spot in turn, and uses the photoelectric energy sensor to detect the energy of each light spot to obtain the energy detection information of each light spot;

[0031] The main control computer processes the energy detection information to determine whether the energy uniformity of the laser light path meets the standard.

[0032] A further technical solution is that the light spots are distributed at equal distances.

[0033] A further technical solution is that the main control computer processes the energy detection information to determine whether the energy uniformity of the laser light path meets the standard, including:

[0034] Repeat the energy collection step of controlling the motion detection unit with the photoelectric energy sensor to move in the plane of the exposure machine platform several times, so that the window center of the photoelectric energy sensor coincides with the center of each light spot in turn, and using the photoelectric energy sensor to perform energy detection on each light spot;

[0035] According to the energy detection information of each light spot obtained by executing the energy collection step each time, the range of the energy detection information of the light spot projected by each optical path is calculated, and then the range after multiple measurements is averaged;

[0036] If the mean of the extreme differences is within the set threshold range, it is determined that the energy uniformity of the laser optical path meets the standard.

[0037] In a third aspect, the present application further provides an exposure device, including an exposure machine platform, an alignment component, and the light energy uniformity detection system described in the first aspect;

[0038] The exposure machine platform is used to carry the panels to be exposed;

[0039] The alignment component is used to calibrate the position of the panel to be exposed on the exposure machine platform;

[0040] The light projection unit of the light energy uniformity detection system is used to expose the panel to be exposed after the light energy uniformity meets the standard.

[0041] The beneficial technical effects of the present invention are:

[0042] The main control machine controls the motion detection unit with the photoelectric energy sensor to move within the plane of the exposure machine platform, so that the window center of the photoelectric energy sensor coincides with the center of each light spot in turn, avoiding the situation where the light path projection light spot does not completely fall within the window of the photoelectric energy sensor and cause energy loss, making the uniformity detection result more accurate.

[0043] The photoelectric energy sensor used in this application is a photon detector based on the photoelectric effect. Since the photon detector generates a linear induced current as the energy of the light spot changes, the energy of the light spot can be determined by comparing the magnitude of the induced current. In addition, the photon detector is minimally affected by the ambient temperature, thereby reducing the impact of environmental factors on the detection system, ensuring the production yield of the exposure machine under different working conditions, and improving the working efficiency of the exposure machine. In addition, by detecting the energy values ​​of multiple equally spaced light spots projected in one direction by a single optical path, calculating the range of the energy detection value of the light spot projected by the optical path, and then calculating the mean of the range after repeated measurements to determine whether the energy uniformity of the optical path meets the standard, the range calculation not only reduces the amount of data and improves the calculation efficiency without reducing the detection accuracy, but also simplifies the detection steps and saves detection time. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 It is a schematic diagram of the construction of the light energy uniformity detection system provided in this application.

[0045] Figure 2 It is a schematic diagram of the composition of the motion detection unit provided in this application.

[0046] Figure 3 It is a data transmission schematic diagram between the main control machine and the motion detection unit provided in this application.

[0047] Figure 4 It is a schematic diagram of the internal composition of the control module provided in this application.

[0048] Figure 5 It is a schematic diagram of the internal composition of the detection module provided in this application.

[0049] Figure 6 It is a schematic diagram of the internal composition of the motion module provided in this application.

[0050] Figure 7 This is a flow chart of the light energy uniformity detection method provided in this application. DETAILED DESCRIPTION

[0051] The specific implementation of the present invention will be further described below in conjunction with the accompanying drawings.

[0052] Please refer to Figure 1As shown, in one embodiment, the present application provides a light energy uniformity detection system, which includes a light projection unit, a motion detection unit 1-2, a photoelectric energy sensor 1-3 and a main control computer placed thereon. Among them, the light projection unit is used to change the laser light path emitted by the laser module 1-1 to form a light spot of appropriate size. The photoelectric energy sensor 1-3 is used to receive the light spot and perform energy detection. The motion detection unit 1-2 is used to drive the photoelectric energy sensor 1-3 to move in the plane of the exposure machine platform 1-4, wherein the movement along the x-axis direction can be achieved through the cooperation of the main control unit and the motion detection unit 1-2, which will be described in detail later, and the movement along the y-axis direction can be achieved through the movement of the exposure machine platform 1-4. The main control computer is used to control the movement of the motion detection unit 1-2 so that the window center of the photoelectric energy sensor 1-3 coincides with the center of the light spot. The main control computer is also used to perform data processing on the energy detection information fed back by the photoelectric energy sensor 1-3 to determine whether the energy uniformity of the laser light path meets the standard. The following is a detailed introduction to the composition of each component:

[0053] Combination Figure 1 As shown, the light projection unit includes a laser module 1-1, a pattern generator 1-5 and an optical path lens 1-6. The laser module 1-1 is used to emit a laser beam 1-7, and the different light intensities of the laser fiber output beam result in uneven light energy. The pattern generator 1-5 is used to reflect the laser beam 1-7 and form at least three light spots 1-8. Optionally, the pattern generator can use a digital micromirror (DMD). The optical path lens 1-6 is used to enlarge or reduce the light spot 1-8 formed by the pattern generator 1-5.

[0054] In some embodiments, in order to meet the detection requirements, the position and shape of the light spot can be set according to human needs. For example, in order to detect the uniformity of the light spot energy at the edge of the DMD, a light spot is randomly selected at the light output edge of the DMD. At this time, the light spots are distributed at unequal intervals, and the light spots are squares with the same shape as the micromirrors in the DMD, or artificially selected triangles, diamonds, etc. In this embodiment, in order to improve the reliability of the measurement, the light spots projected to the photoelectric energy sensors 1-3 by the light projection unit are required to be:

[0055] ① Multiple light spots are distributed equidistantly throughout the DMD to measure the light energy of the entire light beam at different positions. There are many forms of equidistant distribution, such as equidistant distribution along a straight line, equidistant distribution in the form of a regular polygon, or equidistant distribution between elements in the form of an m*n array. If the equidistant distribution is in the form of a regular polygon or the equidistant distribution between elements in the form of an m*n array, the movement in the y direction is achieved by controlling the exposure machine platform 1-4, and the movement in the x direction is achieved by making the photoelectric energy sensor 1-3 move on the motion track 1-9.

[0056] In this embodiment, multiple light spots are preferably distributed equidistantly along a straight line. At this time, it is only necessary to move the photoelectric energy sensor 1-3 along the x-axis on the motion track 1-9 without moving the exposure machine platform 1-4, thereby reducing one control item and avoiding energy detection errors caused by the photoelectric energy sensor not moving into place on the y-axis and the sensor not fully receiving the light spot.

[0057] ②The spot size should be smaller than the window size of the photoelectric energy sensor 1-3.

[0058] ③ A circular spot is preferred to facilitate the determination of the center point of the spot. At the same time, when the optical path is installed with deviations, or the focal lengths of the optical path lenses 1-6 are slightly different, the circular pattern distortion is small, and the circular spot energy is more concentrated at this time, while the energy uniformity of the square spot will be different in this case.

[0059] In this embodiment, the photoelectric energy sensors 1-3 are implemented by photon detectors based on the photoelectric effect. Compared with thermistor detectors based on the thermal effect of light, photon detectors are less affected by ambient temperature. The use of photon detectors eliminates the influence of environmental factors on the detection system and ensures the detection yield of the exposure machine under different working conditions. For example, different working conditions refer to hot and cold machine states.

[0060] Combination Figure 2 As shown, the motion detection unit includes a control module, a detection module, a motion module and a power module. The power module is used to supply power to the control module, the detection module and the motion module. Figure 3 As shown, the main control machine transmits the control instruction to the POE switch through the TCP / IP communication protocol for signal transfer. The POE switch connects the control module through the network cable to transmit the control instruction. The control module is controlled by the main control machine to send corresponding control instructions to the detection module and the motion module through the data bus. The detection module is used to detect light energy according to the detection control instruction sent by the control module, and feed back the energy detection information to the control module. The motion module includes a shell and a motion track 1-9. The photoelectric energy sensor 1-3 is installed outside the shell. The motion module is used to drive the shell to move to a specified position along the motion track 1-9 according to the motion control instruction sent by the control module, and feed back the current motion state to the control module, wherein the specified position refers to the position where the window center of the photoelectric energy sensor 1-3 coincides with the center of the light spot.

[0061] Combination Figure 4As shown, the control module includes a first communication chip 4-1, a second communication chip 4-2, a third communication chip 4-3 and a first control chip 4-4. The POE power supply interface 4-5 is transmitted to the power module 2-2 by the POE switch, and the DC power supply signal 4-6 of the power module 2-2 is transmitted to the detection module and the motion module. The first communication chip 4-1 is connected to the outside through a network communication interface 4-7 (the same interface as the POE power supply interface 4-5), and receives control instructions from the POE switch using the TCP / IP protocol. The first control chip 4-4 is connected to the first communication chip 4-1 using an SPI communication bus 4-8 (high-speed communication) to receive control instructions from the main control machine. The first control chip 4-4 is also connected to the second communication chip 4-2 and the third communication chip 4-3 using a communication bus, sends detection control instructions to the detection module through the second communication chip 4-2, and receives energy detection information, sends motion control instructions to the motion module through the third communication chip 4-3, and receives the current motion state.

[0062] Combination Figure 5 As shown, the detection module includes an energy signal conversion module 5-2, a second control chip 5-3, a fourth communication chip 5-4 and an onboard power supply 5-5 connected to the photoelectric energy sensor 5-1. The onboard power supply 5-5 receives the DC power supply signal 4-6 of the power module 2-2. The photoelectric energy sensor 5-1 is used to transmit the energy current signal 5-6 of the light spot of the acquisition light path to the energy signal conversion module 5-2. The energy signal conversion module 5-2 is used to convert the energy current signal 5-6 into a voltage signal 5-7, which is transmitted to the second control chip 5-3 as energy detection information. The second control chip 5-3 is connected to the fourth communication chip 5-4 using a communication bus, and is used to receive the detection control instructions issued by the control module and the voltage signal 5-7 sent by the energy signal conversion module 5-2, and to feed back the energy detection information to the control module through the communication bus.

[0063] Combination Figure 6As shown, the motion module also includes a motor drive module 6-1, a motion mechanism (including a motion motor 6-2 and a motion track 1-9), a third control chip 6-3, a fifth communication chip 6-4 and an onboard power supply 6-5. The onboard power supply 6-5 receives the DC power supply signal 4-6 of the power supply module 2-2, and the onboard power supply 6-5 is used to convert the DC power supply signal 4-6 into a motion motor power supply signal 6-6 and transmit it to the motion motor 6-2. The third control chip 6-3 is connected to the fifth communication chip 6-4 using a communication bus, and is used to receive the motion control instructions issued by the control module, and to feedback the current motion state to the control module. The third control chip 6-3 is connected to the motor drive module 6-1, and is used to transmit a pulse control signal 6-7 when receiving the motion control instruction. The motor drive module 6-1 is connected to the motion motor 6-2, and is used to receive the pulse control signal 6-7 and convert it into a motor PWM control signal 6-8 and transmit it to the motion motor 6-2. The motion motor 6-2 is arranged at one end of the motion track 1-9 ( Figure 1 ), which is used to receive the motion motor power supply signal 6-6 and the motor PWM control signal 6-8, and thereby drive the motion track 1-9 to move the housing with the photoelectric energy sensor 1-3 to a specified position.

[0064] The system is also equipped with a camera to determine the window center coordinates and the spot center coordinates of the photoelectric energy sensor. One installation method is to install the camera on the light projection unit, that is, to install it coaxially with the optical path lens 1-6 to shoot the photoelectric energy sensor 1-3 and the spot image. The imaging can refer to Figure 1 As shown in a, the positions of the window opening center and the light spot center of the photoelectric energy sensor 1-3 in the image coordinate system are obtained. Another installation method is to install the camera on the motion detection unit and pre-calibrate the position of the window opening center of the photoelectric energy sensor in the camera coordinate system. The camera captures the light spot image as the motion detection unit moves, and then converts it to the camera coordinate system to obtain the position of the light spot center in the camera coordinate system.

[0065] Based on the same inventive concept, in another embodiment, the present application also provides a light energy uniformity detection method, which is implemented based on the above light energy uniformity detection system. Figure 7 As shown, the specific steps include:

[0066] Step 1: Use a light projection unit to obtain light spots in the same laser light path, and there are at least three light spots. In this embodiment, the three light spots are equidistantly distributed along the x-axis direction, and are preferably adjusted to circular light spots with a diameter of 5 mm.

[0067] Step 2: The main control machine controls the motion detection unit with the photoelectric energy sensor to move in the plane of the exposure machine platform so that the window center of the photoelectric energy sensor coincides with the center of each light spot in turn. In this embodiment, the motion module of the motion detection unit drives the housing with the photoelectric energy sensor to move to a specified position along the direction of the motion track (i.e., the x direction) according to the motion control instruction sent by the control module, and the moving distance in the motion control instruction depends on the window center coordinates of the photoelectric energy sensor and the light spot center coordinates.

[0068] If the camera is installed on the light projection unit, that is, it is installed coaxially with the optical path lens, the main control machine uses the existing image processing method to obtain the position of the window center of the photoelectric energy sensor and the light spot center in the image coordinate system through the photoelectric energy sensor and the light spot image captured by the camera, so as to obtain the precise distance that the motion detection unit needs to move. In practical application, the motion detection unit can be adjusted in real time through the camera field of view so that the window center of the photoelectric energy sensor coincides with the light spot center. The light spot image can also be obtained first to determine the position of the light spot center, and then the motion detection unit is controlled to move to this position. After the camera captures the image, the main control machine determines whether the window center of the photoelectric energy sensor coincides with the light spot center. If the camera is installed on the motion detection unit, the position of the window center of the photoelectric energy sensor in the camera coordinate system needs to be calibrated in advance, and then the camera captures the light spot image as the motion detection unit moves. The main control machine has a coordinate system conversion algorithm stored inside, which converts the light spot image to the camera coordinate system to obtain the position of the light spot center in the camera coordinate system, and obtains the precise distance that the motion detection unit needs to move based on the position difference between the two centers.

[0069] Step 3: When the window center of the photoelectric energy sensor passes through the center of the light spot in sequence, the photoelectric energy sensor is used to detect the energy of each light spot to obtain energy detection information V1, V2, and V3 of each light spot. In this embodiment, the photoelectric energy sensor is implemented based on a photon detector of the photoelectric effect, which can reduce the impact of environmental factors on the detection system.

[0070] Step 4: The main control computer processes the energy detection information to determine whether the energy uniformity of the laser light path meets the standard. Specifically, the energy acquisition steps of steps 2 and 3 are repeated, and the range of the energy detection information of each light spot projected by the light path is calculated based on the energy detection information of each light spot obtained by each energy acquisition step, that is, the maximum and minimum values ​​of the three energy detection information V1 to V3 collected each time are determined to calculate the range of the i-th measurement ΔVi = (Vmax-Vmin), and then the range after n measurements is averaged. If the mean of the extreme differences is within the set threshold range, it is determined that the energy uniformity of the laser optical path meets the standard.

[0071] In another embodiment, the energy uniformity detection adopts the following method: after obtaining the detection values ​​of all the light spots in a measurement process, the detection mean of all the light spots is calculated, the variance is calculated based on the detection value and the detection mean, and whether the light energy is uniform is judged based on whether the variance meets the variance threshold. Compared with the method of judging uniformity by the variance, the advantage of using the range to judge uniformity is that when a large number of light spots are projected, the amount of data storage required to calculate the variance is significantly higher than the amount of data storage required to calculate the maximum and minimum values ​​of the range. Therefore, the amount of data calculated by the range is less, which can improve the calculation efficiency, simplify the detection process and save detection time without reducing the detection accuracy.

[0072] In another embodiment, the present application also provides an exposure device, including an exposure machine platform, an alignment component, and the above-mentioned light energy uniformity detection system. The exposure machine platform is used to carry the panel to be exposed, the alignment component is used to calibrate the position of the panel to be exposed in the exposure machine platform, and the light projection unit of the light energy uniformity detection system is used to expose the panel to be exposed after the light energy uniformity meets the standard.

[0073] In the above-mentioned light energy uniformity detection method, system and exposure equipment provided by the present application, the center coordinates of the window opening of the photoelectric energy sensor are obtained by the camera, and are calculated together with the centers of the multiple circular light spots projected by the light path to obtain the precise distance that the energy uniformity detection module needs to move, thereby avoiding the situation where the light path projected light spot does not completely fall within the window opening of the photoelectric energy sensor and causes energy loss, making the uniformity detection result more accurate. The implementation solution provided by this method to solve the problem is similar to the implementation solution recorded in the above-mentioned light energy uniformity detection system, so the specific definition of each step in the light energy uniformity detection method can refer to the definition of the light energy uniformity detection system above, and will not be repeated here.

[0074] The above is only a preferred embodiment of the present application, and the present invention is not limited to the above embodiments. It is understood that other improvements and changes directly derived or associated by those skilled in the art without departing from the spirit and concept of the present invention should be considered to be included in the protection scope of the present invention.

Claims

1. A light energy uniformity detection system, characterized in that: include: A light projection unit, used to change the laser light path emitted by the laser module to form a light spot; Photoelectric energy sensor, used for receiving light spot and performing energy detection; A motion detection unit, used to drive the photoelectric energy sensor to move within the plane of the exposure machine platform; A main control machine, used for controlling the movement of the motion detection unit so that the window center of the photoelectric energy sensor coincides with the center of the light spot; It is also used to process energy detection information to determine whether the energy uniformity of the laser light path meets the standard.

2. The light energy uniformity detection system according to claim 1, characterized in that: The ray casting unit comprises: The laser module is used to emit a laser beam; A pattern generator, used for reflecting the laser beam and forming at least three light spots; The optical path lens is used to enlarge or reduce the light spot formed by the pattern generator, and the size of the light spot is smaller than the window size of the photoelectric energy sensor.

3. The light energy uniformity detection system according to claim 1, characterized in that: The motion detection unit comprises: A control module, used to send corresponding control instructions to the detection module and the motion module respectively under the control of the main control machine; A detection module, used to perform light energy detection according to the detection control instruction sent by the control module, and feed back energy detection information to the control module; A motion module, comprising a housing and a motion track, wherein the photoelectric energy sensor is mounted outside the housing, and the motion module is used to drive the housing to move to a specified position along the motion track according to a motion control instruction sent by the control module, and to feed back a current motion state to the control module, wherein the specified position refers to a position where the window center of the photoelectric energy sensor coincides with the center of the light spot; A power supply module is used to supply power to the control module, the detection module and the motion module.

4. The light energy uniformity detection system according to claim 1, characterized in that: The photoelectric energy sensor is a photon detector.

5. The light energy uniformity detection system according to claim 1, characterized in that: The system also includes a camera; The camera is installed on the light projection unit and is used to capture the photoelectric energy sensor and the light spot image to obtain the positions of the window center and the light spot center of the photoelectric energy sensor in the image coordinate system; Alternatively, the camera is installed on the motion detection unit, and the position of the window center of the photoelectric energy sensor in the camera coordinate system is pre-calibrated; the camera captures the spot image as the motion detection unit moves, and then converts it to the camera coordinate system to obtain the position of the spot center in the camera coordinate system.

6. The light energy uniformity detection system according to claim 3, characterized in that: The motion module also includes a motor drive module, a motion motor, a third control chip and a fifth communication chip; The third control chip is connected to the control module via the fifth communication chip, and is used to receive the motion control instructions issued by the control module, and to feed back the current motion state to the control module; The third control chip is connected to the motor drive module and is used to send a pulse control signal when receiving the motion control instruction; The motor driving module is connected to the motion motor and is used to receive the pulse control signal and convert it into a motor PWM control signal and transmit it to the motion motor; The motion motor is arranged at one end of the motion track, and is used to drive the motion track to move the housing with the photoelectric energy sensor to a specified position according to the motor PWM control signal.

7. A method for detecting uniformity of light energy, characterized in that: The method is implemented based on the light energy uniformity detection system according to any one of claims 1 to 6, and includes: Using the light projection unit to obtain light spots in the same laser light path, the number of the light spots is at least three; The main control machine controls the motion detection unit with the photoelectric energy sensor to move in the plane of the exposure machine platform, so that the window center of the photoelectric energy sensor coincides with the center of each light spot in turn, and uses the photoelectric energy sensor to perform energy detection on each light spot to obtain energy detection information of each light spot; The main control computer performs data processing on the energy detection information to determine whether the energy uniformity of the laser light path meets the standard.

8. The light energy uniformity detection method according to claim 7, characterized in that: The light spots are distributed at equal distances.

9. The light energy uniformity detection method according to claim 7, characterized in that: The main control machine performs data processing on the energy detection information to determine whether the energy uniformity of the laser light path meets the standard, including: Repeat the energy collection step of controlling the motion detection unit with the photoelectric energy sensor to move in the plane of the exposure machine platform several times, so that the window center of the photoelectric energy sensor coincides with the center of each light spot in turn, and using the photoelectric energy sensor to perform energy detection on each light spot; According to the energy detection information of each light spot obtained by executing the energy collection step each time, the range of the energy detection information of the light spot projected by each optical path is calculated, and then the range after multiple measurements is averaged; If the mean of the extreme differences is within the set threshold range, it is determined that the energy uniformity of the laser optical path meets the standard.

10. An exposure device, characterized in that: The exposure device comprises an exposure machine platform, an alignment component and a light energy uniformity detection system according to any one of claims 1 to 6; The exposure machine platform is used to carry the panel to be exposed; The alignment assembly is used to calibrate the position of the panel to be exposed on the exposure machine platform; The light projection unit of the light energy uniformity detection system is used to expose the panel to be exposed after the light energy uniformity reaches the standard.

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