Test method of semiconductor process equipment and upper computer

Abstract

The invention provides a test method for semiconductor process equipment and an upper computer, and the method comprises the steps: creating a target process task based on a process path set, and updating a test result of the semiconductor process equipment based on an execution result of the target process task, the process paths in the process path set are synchronously updated with the process paths in the preset storage unit, so that real-time updating of the process path set can be realized; meanwhile, the process path in the preset storage unit is created based on a target file and comprises a plurality of process steps and a process formula corresponding to a target process step in the plurality of process steps, and the target file comprises the plurality of process steps and parameter values of preset process parameters corresponding to the target process step; in the process formula corresponding to the target process step, the parameter value of each process parameter except the predetermined process parameter is obtained based on the predetermined process formula of the chamber in the process step, so that the workload in the process path creation process is greatly reduced.

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