Mass spectrometer

Abstract

The invention provides a mass spectrometer capable of simplifying the attachment and detachment of a lens optical system and a feedthrough connector. A mass spectrometer is provided with a vacuum container, an ion source, a sample introduction tube, a lens optical system, and a feedthrough connector. A first unit of the lens optical system can move relative to the sample introduction tube along the connection direction, and a second unit and a third unit can move relative to the first unit along the orthogonal direction. The first connection piece has a first biasing portion that contacts the first terminal and biases the first terminal in the connection direction. The second connection piece has a second biasing portion that contacts the second terminal and biases the second terminal in the orthogonal direction. The third connection piece has a third urging portion that contacts the third terminal and urges the third terminal in the orthogonal direction.

Description

Technical Field

[0001] The present invention relates to a mass analysis device. Background Art

[0002] For example, a mass spectrometer is known as disclosed in Japanese Patent No. 4692627. The mass spectrometer includes a vacuum container, an ion source, a lens optical system, a quadrupole mass filter, and an ion detector. A voltage is applied to the lens optical system from a voltage application unit provided outside the vacuum container. Summary of the invention

[0003] In a mass spectrometer as disclosed in Japanese Patent No. 4692627, a feedthrough connector is usually installed in a vacuum container for electrical connection between a voltage application unit and a lens optical system, and each terminal in the feedthrough connector is connected to the lens optical system through wiring. In this case, for example, it is necessary to carry out wiring attachment and detachment work during maintenance of the lens optical system.

[0004] An object of the present invention is to provide a mass spectrometer capable of simplifying the attachment and detachment of a lens optical system and a feed-through connector.

[0005] One scheme of the present invention relates to a mass spectrometer, which comprises: a vacuum container; an ion source, which is arranged in the vacuum container and ionizes sample molecules contained in a sample gas; a sample introduction tube, which introduces the sample gas into the ion source from the outside of the vacuum container; a lens optical system, which draws out ions generated by the ion source to the outside of the ion source; and a feed-through connector, which connects a voltage applying unit and the lens optical system to each other, the voltage applying unit is arranged outside the vacuum container and applies a voltage to the lens optical system, the lens optical system comprising: a first unit, which comprises a first lens, which is connected to the sample introduction tube; a first connecting piece, which connects the first unit to the feed-through connector; a second unit, which comprises a second lens; a second connecting piece, which connects the second unit to the feed-through connector; a third unit, which comprises a third lens; and a third connecting piece, which connects the third unit The element is connected to the feed-through connector, the first unit can be relatively moved relative to the sample introduction tube along the connection direction of connecting the ion source to the sample introduction tube, the second unit and the third unit can be relatively moved relative to the first unit along an orthogonal direction orthogonal to the connection direction, the feed-through connector has: a first terminal, which is in contact with the first connecting piece; a second terminal, which is in contact with the second connecting piece; and a third terminal, which is in contact with the third connecting piece, the first connecting piece has a first force applying portion that contacts the first terminal and applies force to the first terminal at least in the connection direction, the second connecting piece has a second force applying portion that contacts the second terminal and applies force to the second terminal at least in the orthogonal direction, and the third connecting piece has a third force applying portion that contacts the third terminal and applies force to the third terminal at least in the orthogonal direction.

[0006] The above and other objects, features, aspects and advantages of the present invention will become apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] Figure 1 This is a diagram schematically showing a mass spectrometer in one embodiment of the present invention.

[0008] Figure 2 It is a front view schematically showing the mass spectrometer.

[0009] Figure 3 It is a three-dimensional diagram of each connecting piece and feed-through connector.

[0010] Figure 4 It is a three-dimensional diagram of the first connecting piece.

[0011] Figure 5 This is a diagram schematically showing a change in shape of the first connection piece when the first unit is installed. DETAILED DESCRIPTION

[0012] Embodiments of the present invention will be described with reference to the accompanying drawings. In the drawings referred to below, the same or corresponding components are denoted by the same reference numerals.

[0013] Figure 1 This is a diagram schematically showing a mass spectrometer in one embodiment of the present invention. Figure 2 1 is a front view schematically showing a mass spectrometer. The mass spectrometer 1 is a device for analyzing the mass by ionizing sample molecules or atoms. The mass spectrometer 1 is preferably used in a gas chromatograph or the like.

[0014] like Figure 1 and Figure 2 As shown, the mass spectrometer 1 includes a vacuum container 100 , an ion source 200 , a sample introduction tube 300 , a lens optical system 400 , a quadrupole mass filter 500 , an ion detector 600 , a feedthrough connector 700 , and a voltage application unit 800 .

[0015] The vacuum container 100 is provided with a vacuum pump 110 for evacuating the vacuum container 100. Figure 1 ) is equipped with an ion source 200, a lens optical system 400, a quadrupole mass filter 500, and an ion detector 600.

[0016] The ion source 200 ionizes sample molecules contained in the sample gas and includes an ionization chamber 210 , a filament 220 , a trap electrode 230 , etc. The ionization chamber 210 is connected to a sample introduction tube 300 for introducing the sample gas from the outside of the vacuum container 100 (gas chromatograph) into the ionization chamber 210 .

[0017] After being guided to the outside of the ionization chamber 210 by the lens optical system 400 , the ions generated in the ionization chamber 210 are separated according to the mass-to-charge ratio in the quadrupole mass filter 500 disposed at the rear stage of the lens optical system 400 , and detected by the ion detector 600 .

[0018] The lens optical system 400 is arranged at the rear stage of the ion source 200, and extracts ions generated in the ionization chamber 210 to the outside of the ionization chamber 210. The lens optical system 400 includes a first unit 410 including a first lens, a second unit 420 including a second lens, a third unit 430 including a third lens, a first connecting piece 411, a second connecting piece 422, and a third connecting piece 433.

[0019] The first unit 410 is disposed after the ionization chamber 210, the second unit 420 is disposed after the first unit 410, and the third unit 430 is disposed after the second unit 420. The lenses in each unit 410 to 430 define the passage path (ion optical axis C) of ions.

[0020] From the viewpoint of suppressing the adhesion of dirt from the sample to the first lens, the first unit 410 is fixed to the ionization chamber 210 and the temperature is adjusted together with the ionization chamber 210. The first unit 410 can be connected with the ionization chamber 210 along the length direction ( Figure 2 The sample introduction tube 300 is relatively moved in the left-right direction (in the right and left directions).

[0021] The second unit 420 and the third unit 430 are fixed to each other. The second unit 420 and the third unit 430 can be connected to the first unit 410 in the connection direction ( Figure 2 The orthogonal direction ( Figure 2 The quadrupole mass filter 500 has a partition wall 510 formed in a disk shape (see Figure 1 and Figure 2 ), the second unit 420 and the third unit 430 are embedded in the central part of the partition wall 510 in a manner coaxial with the central axis of the quadrupole mass filter 500. Figure 2 The inside of the paper ( Figure 3 A quadrupole mass filter 500 is configured (on the right side in FIG. ).

[0022] A voltage is applied to each of the cells 410 to 430 from a voltage applying unit 800 provided outside the vacuum container 100. Specifically, a base voltage is applied to the first cell 410 and the third cell 430 from a base voltage generating unit 810 in the voltage applying unit 800, and an adjustment voltage is applied to the second cell 420 from an adjustment voltage generating unit 820 in the voltage applying unit 800. The base voltage is a voltage for attracting ions from the ionization chamber 210, and the adjustment voltage is a voltage for driving ions away (a voltage having a polarity opposite to that of the base voltage).

[0023] The first connection piece 411 is connected to the first unit 410 by welding or the like. The first connection piece 411 connects the first unit 410 and the feed-through connector 700 .

[0024] The second connection piece 422 is connected to the second unit 420 by welding or the like. The second connection piece 422 connects the second unit 420 and the feed-through connector 700 .

[0025] The third connection piece 433 is connected to the third unit 430 by welding or the like. The third connection piece 433 connects the third unit 430 and the feed-through connector 700 .

[0026] The feedthrough connector 700 connects the voltage applying section 800 and the lens optical system 400 to each other. The feedthrough connector 700 is connected to the vacuum container 100. Figure 3 As shown, the feed-through connector 700 includes a first terminal 701 , a second terminal 702 , and a third terminal 703 .

[0027] The first terminal 701 contacts the first connection piece 411. The second terminal 702 contacts the second connection piece 422. The third terminal 703 contacts the third connection piece 433. The first terminal 701 and the third terminal 703 are connected to the base voltage generating unit 810, and the second terminal 702 is connected to the adjustment voltage generating unit 820.

[0028] like Figure 3 and Figure 4 As shown, the first connection piece 411 includes a first base end portion 411 a , a first biasing portion 411 b , and a first guide portion 411 c .

[0029] The first base end portion 411a is a portion connected to the first unit 410. The first base end portion 411a is formed in a flat plate shape.

[0030] The first force-applying portion 411b is connected to the first base end portion 411a. The first force-applying portion 411b contacts the first terminal 701 and applies force to the first terminal 701 at least in the connection direction. In other words, the first force-applying portion 411b contacts the first terminal 701 and causes a force including a component of applying force to the first terminal 701 in the connection direction to act on the first terminal 701. In the present embodiment, the first force-applying portion 411b contacts the first terminal 701 and applies force to the first terminal 701 in the connection direction and in the length direction ( Figure 2 The first force applying portion 411b is bent in a manner convex toward the connection direction.

[0031] The first guide portion 411c is connected to the front end of the first force-applying portion 411b. The first guide portion 411c guides the first terminal 701 when the first unit 410 is connected to the sample introduction tube 300. The first guide portion 411c is bent in a manner that protrudes in the direction opposite to the direction in which the first force-applying portion 411b is bent. A first slit S1 for receiving the first terminal 701 is formed at the front end of the first guide portion 411c. The first slit S1 extends in the connection direction. Figure 4 As shown in FIG. 1 , a first tapered portion 411d is formed at the front end of the first guide portion 411c. The first tapered portion 411d has a shape that gradually expands toward the front end of the first slit S1.

[0032] In this embodiment, the first connecting piece 411, the second connecting piece 422 and the third connecting piece 433 are formed in the same shape. That is, the second connecting piece 422 has a second base end 422a, a second force applying portion 422b and a second guide portion 422c, and the third connecting piece 433 has a third base end 433a, a third force applying portion 433b and a third guide portion 433c.

[0033] like Figure 2 and Figure 3 As shown, the bending direction of the second force applying portion 422b and the bending direction of the third force applying portion 433b are orthogonal to the bending direction of the first force applying portion 411b. That is, the second force applying portion 422b contacts the second terminal 702 and applies force to the second terminal 702 in two directions, namely, the orthogonal direction and the length direction of the second terminal 702, and the third force applying portion 433b contacts the third terminal 703 and applies force to the third terminal 703 in two directions, namely, the orthogonal direction and the length direction of the third terminal 703. In addition, the extending direction of the second slit S2 formed in the second guide portion 422c and the extending direction of the third slit S3 formed in the third guide portion 433c are orthogonal to the extending direction of the first slit S1.

[0034] In the mass spectrometer 1 described above, when the lens optical system 400 is set in the vacuum container 100, the first unit 410, the second unit 420 and the third unit 430 can be moved independently, so it is easy to connect the ion source 200 that moves integrally with the first unit 410 to the sample introduction tube 300 in an airtight manner.

[0035] In addition, if Figure 5 As shown, the first force-applying portion 411b slides relative to the first terminal 701 while in contact with the first terminal 701. Therefore, the end of the first terminal 701 cleans the surface of the first force-applying portion 411b. Therefore, poor contact between the first force-applying portion 411b and the first terminal 701 caused by foreign matter (dust, etc.) can be suppressed. Figure 5 In FIG. 4 , the first connecting piece 411 before the installation is completed is shown by a dotted line.

[0036] Furthermore, regarding the second unit 420 and the third unit 430, by pressing the second unit 420 and the third unit 430 toward the quadrupole mass filter 500 side along the orthogonal direction, the second connection piece 422 contacts the second terminal 702 when the second force applying portion 422b applies force to the second terminal 702, and the third connection piece 433 contacts the third terminal 703 when the third force applying portion 433b applies force to the third terminal 703. At this time, the cleaning action generated by the second terminal 702 and the third terminal 703 is the same as that of the first terminal 701. Furthermore, the second unit 420 and the third unit 430 are configured coaxially with the central axis of the quadrupole mass filter 500 by being fitted into the partition wall 510.

[0037] As described above, in the mass spectrometer 1 of the present embodiment, when the units 410 to 430 of the lens optical system 400 are arranged in the vacuum container 100, the first force applying portion 411b of the first connecting piece 411 contacts the first terminal 701 to apply force to the first terminal 701 in the connection direction, the second force applying portion 422b of the second connecting piece 422 contacts the second terminal 702 to apply force to the second terminal 702 in the orthogonal direction, and the third force applying portion 433b of the third connecting piece 433 contacts the third terminal 703 to apply force to the third terminal 703 in the orthogonal direction. Therefore, conventional wiring can be omitted, and the assembly and detachment operations of the lens optical system 400 and the feedthrough connector 700 can be simplified.

[0038] [plan]

[0039] Those skilled in the art will appreciate that the above-mentioned multiple exemplary embodiments are specific examples of the following schemes.

[0040] (Item 1) The mass spectrometer according to one embodiment comprises:

[0041] Vacuum container;

[0042] an ion source, disposed in the vacuum container, for ionizing sample molecules contained in the sample gas;

[0043] A sample introduction tube for introducing the sample gas from outside the vacuum container into the ion source;

[0044] a lens optical system for extracting ions generated by the ion source out of the ion source; and

[0045] A feed-through connector connects a voltage applying unit and the lens optical system to each other, wherein the voltage applying unit is disposed outside the vacuum container and applies voltage to the lens optical system.

[0046] The lens optical system has:

[0047] The first unit includes a first lens and is connected to the sample introduction tube;

[0048] a first connecting piece, connecting the first unit to the feed-through connector;

[0049] Unit 2, including a second lens;

[0050] a second connecting piece, connecting the second unit to the feed-through connector;

[0051] Unit 3, including a third lens; and

[0052] a third connecting piece, connecting the third unit to the feed-through connector,

[0053] The first unit is capable of relative movement with respect to the sample introduction tube along a connection direction of connecting the ion source to the sample introduction tube.

[0054] The second unit and the third unit are capable of relative movement with respect to the first unit along a direction orthogonal to the connection direction.

[0055] The feed-through connector has:

[0056] a first terminal in contact with the first connecting piece;

[0057] a second terminal in contact with the second connecting piece; and

[0058] a third terminal in contact with the third connecting piece,

[0059] The first connection piece has a first force applying portion that contacts the first terminal and applies force to the first terminal at least in the connection direction.

[0060] The second connection piece has a second force applying portion that contacts the second terminal and applies force to the second terminal at least in the orthogonal direction.

[0061] The third connection piece includes a third biasing portion that contacts the third terminal and biases the third terminal at least in the orthogonal direction.

[0062] In the mass spectrometer, when each unit of the lens optical system is arranged in a vacuum container, the first force-applying portion of the first connecting piece contacts the first terminal to apply force to the first terminal in a connection direction, the second force-applying portion of the second connecting piece contacts the second terminal to apply force to the second terminal in an orthogonal direction, and the third force-applying portion of the third connecting piece contacts the third terminal to apply force to the third terminal in an orthogonal direction. Therefore, conventional wiring can be omitted, and the assembly and detachment operations of the lens optical system and the feedthrough connector can be simplified.

[0063] Furthermore, since the first unit, the second unit, and the third unit can be moved independently, positioning of each unit becomes easy.

[0064] (Item 2) Preferably, in the mass spectrometer 1 described in Item 1,

[0065] The first connecting piece further comprises a first guiding portion connected to the front end of the first force applying portion.

[0066] The first guide portion has a first slit extending along the connection direction,

[0067] The second connecting piece further comprises a second guide portion connected to the front end of the second force applying portion.

[0068] The second guide portion has a second slit extending along the orthogonal direction,

[0069] The third connecting piece further comprises a third guiding portion connected to the front end of the third force applying portion.

[0070] The third guide portion has a third slit extending in the orthogonal direction.

[0071] According to the mass spectrometer described in Item 2, when the first unit is set along the connection direction, the first slit receives the first terminal, and when the second unit and the third unit are set along the orthogonal direction, the second slit receives the second terminal, and the third slit receives the third terminal, thereby effectively determining the position of each terminal and each connecting piece.

[0072] (Item 3) Preferably, in the mass spectrometer 1 described in Item 1 or Item 2,

[0073] It also includes a quadrupole mass filter disposed at a rear stage of the lens optical system,

[0074] The quadrupole mass filter has a partition wall,

[0075] The first unit is fixed to the ion source and its temperature is adjusted together with the ion source.

[0076] The second unit and the third unit are fixed to each other and are fitted to the partition wall coaxially with the central axis of the quadrupole mass filter.

[0077] According to the mass spectrometer described in Item 3, contaminants derived from the sample are suppressed from adhering to the first lens, and the second lens and the third lens are arranged coaxially with the central axis of the quadrupole mass filter.

[0078] The embodiments of the present invention have been described above, but the embodiments disclosed this time should be considered to be illustrative in all aspects and not restrictive. The scope of the present invention is indicated by the claims, and is intended to include all modifications within the meaning and scope equivalent to the claims.

Claims

1. A mass analysis device, characterized in that: have: Vacuum container; an ion source, disposed in the vacuum container, for ionizing sample molecules contained in the sample gas; A sample introduction tube for introducing the sample gas from outside the vacuum container into the ion source; A lens optical system, which draws ions generated by the ion source out of the ion source; as well as A feed-through connector connects a voltage applying unit and the lens optical system to each other, wherein the voltage applying unit is disposed outside the vacuum container and applies voltage to the lens optical system. The lens optical system has: The first unit includes a first lens and is connected to the sample introduction tube; a first connecting piece, connecting the first unit to the feed-through connector; Unit 2, including a second lens; a second connecting piece, connecting the second unit to the feed-through connector; Unit 3, including a third lens; and a third connecting piece, connecting the third unit to the feed-through connector, The first unit is capable of relative movement with respect to the sample introduction tube along a connection direction of connecting the ion source to the sample introduction tube. The second unit and the third unit are capable of relative movement with respect to the first unit along a direction orthogonal to the connection direction. The feed-through connector has: a first terminal in contact with the first connecting piece; a second terminal in contact with the second connecting piece; as well as a third terminal in contact with the third connecting piece, The first connection piece has a first force applying portion that contacts the first terminal and applies force to the first terminal at least in the connection direction. The second connection piece has a second force applying portion that contacts the second terminal and applies force to the second terminal at least in the orthogonal direction. The third connection piece includes a third biasing portion that contacts the third terminal and biases the third terminal at least in the orthogonal direction.

2. The mass spectrometer according to claim 1, wherein: The first connecting piece further comprises a first guiding portion connected to the front end of the first force applying portion. The first guide portion has a first slit extending along the connection direction, The second connecting piece further comprises a second guide portion connected to the front end of the second force applying portion. The second guide portion has a second slit extending along the orthogonal direction, The third connecting piece further comprises a third guiding portion connected to the front end of the third force applying portion. The third guide portion has a third slit extending in the orthogonal direction.

3. The mass spectrometer according to claim 1 or 2, wherein: It also includes a quadrupole mass filter disposed at a rear stage of the lens optical system, The quadrupole mass filter has a partition wall, The first unit is fixed to the ion source and its temperature is adjusted together with the ion source. The second unit and the third unit are fixed to each other and are fitted to the partition wall coaxially with the central axis of the quadrupole mass filter.

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