Electrostatic chuck substrate coating machine

Abstract

The invention relates to the technical field of electrostatic chuck manufacturing, and provides an electrostatic chuck base plate coating machine which comprises a machine body and a spray gun arranged in the machine body, a fixing plate is arranged on the back of the spray gun, a motor is embedded in the fixing plate, the output end of the motor penetrates out of the fixing plate and is connected with a swing arm, a strip-shaped groove is formed in the swing arm, and the strip-shaped groove is connected with the spray gun. A limiting groove is formed in the side wall of the fixing plate. According to the device, the defects in the prior art are overcome, the design is reasonable, the structure is compact, when the spray gun does not work, the material receiving box moves to the position below the spray gun, dripping coating can be effectively collected, it is avoided that the coating drips on other follow-up non-target areas of a base plate, accidental pollution to the base plate is prevented, and the coating uniformity and overall quality of the base plate are guaranteed. And by arranging the inner wiping head and the outer wiping plate, the wiping efficiency is improved, it is guaranteed that the inner wall and the outer wall of the nozzle are comprehensively cleaned, the blocking phenomenon is effectively prevented, and meanwhile residual paint in the nozzle is prevented from dripping after the material receiving box is moved away.

Description

Technical Field

[0001] The invention relates to the technical field of electrostatic chuck manufacturing, and in particular to an electrostatic chuck substrate coating machine. Background Art

[0002] The preparation of an electrostatic chuck usually includes the following key steps: substrate preparation, substrate conductive layer coating, insulating layer bonding and chuck material pasting. Currently, the substrate conductive layer coating is continuously performed by a coating machine. However, during the coating operation, the nozzle of the spray gun often retains some paint. When switching to the coating of the next substrate, the residual paint may drip, thereby interfering with the thickness of the substrate coating and even forming unnecessary paint residue in non-predetermined areas, which has an adverse effect on the coating quality of the substrate. For this reason, we propose an electrostatic chuck substrate coating machine. Summary of the invention

[0003] 1. Technical issues to be solved

[0004] In view of the deficiencies of the prior art, the present invention provides an electrostatic chuck substrate coating machine, which overcomes the deficiencies of the prior art, has a reasonable design and a compact structure, and solves the problem that the coating quality of the substrate is adversely affected by the paint retained in the nozzle of the existing spray gun.

[0005] (II) Technical solution

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: an electrostatic chuck substrate coating machine, comprising a machine body and a spray gun arranged therein, a fixed plate is provided on the back of the spray gun, a motor is embedded in the fixed plate, the output end of the motor passes through the fixed plate and is connected to a swing arm, a strip groove is provided in the swing arm, a limiting groove is provided on the side wall of the fixed plate, a sliding rod is slidably connected in the limiting groove, one end of the sliding rod away from the fixed plate passes through the strip groove and is connected to a connecting rod, a material receiving box is connected to the bottom of the connecting rod for collecting paint dripping from the spray gun, the swing arm rotates to make the sliding rod slide along the limiting groove and move the material receiving box to the bottom of the spray gun.

[0007] Preferably, the limiting groove comprises at least a descending groove and a forward groove, when the slide rod is located in the upper half of the descending groove, the bottom of the material receiving box is higher than the bottom of the spray gun, and the slide rod moves along the forward groove to move the material receiving box to the bottom of the spray gun.

[0008] Preferably, a wiping unit is provided in the material receiving box corresponding to the spray gun, and the limiting groove is further provided with an upper groove at the tail of the front groove, so that the material receiving box and the wiping unit can move upward relative to the spray gun.

[0009] Preferably, the wiping unit comprises an elastic telescopic rod and a wiping head, wherein the wiping head comprises an inner wiping head insertable into the spray gun nozzle and an outer wiping plate abutting against the outer wall of the spray gun nozzle, so as to wipe the inner and outer walls of the spray gun nozzle simultaneously.

[0010] Preferably, the elastic telescopic rod includes a fixed rod fixed in the material receiving box and a sleeve rod sleeved on the fixed rod, the bottom of the sleeve rod is provided with a spring connected to the bottom wall of the material receiving box, the top of the fixed rod is provided with a downward extending slide groove around its outer wall, and the sleeve rod is provided with a slider sliding along the slide groove so that the wiping head rotates when the sleeve rod moves downward.

[0011] Preferably, the outer wiping plate comprises a plurality of wiping plates arranged circumferentially, with gaps between adjacent wiping plates to leave channels for the wiped paint to flow out, and bristles are provided on one side of the wiping plate facing the inner wiping head.

[0012] Preferably, the sleeve rod and the fixing rod are detachably arranged to facilitate the removal of the wiping head, and a water basin is arranged in the machine body.

[0013] (III) Beneficial effects

[0014] The embodiment of the present invention provides an electrostatic chuck substrate coating machine. It has the following beneficial effects:

[0015] 1. When the spray gun is not working, the material receiving box moves to the bottom of the spray gun, which can effectively collect the dripping paint, prevent the paint from dripping on other non-target areas of the subsequent substrate, prevent accidental contamination of the substrate, and ensure the uniformity and overall quality of the substrate coating.

[0016] 2. By setting the inner wiping head and the outer wiping plate, not only the wiping efficiency is improved, but also the comprehensive cleaning of the inner and outer walls of the nozzle is ensured, effectively preventing the occurrence of blockage, and preventing the residual paint in the nozzle from dripping after the material box is removed.

[0017] 3. The outer wiper plate adopts a bristle design and gap channels to enhance the cleaning ability and facilitate the flow of paint. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional schematic diagram of the overall structure of the present invention;

[0019] Figure 2 It is a schematic diagram of the overall structure of the present invention;

[0020] Figure 3 It is a left-side stereoscopic schematic diagram of the fixing plate structure of the present invention;

[0021] Figure 4 It is a front perspective schematic diagram of the fixing plate structure of the present invention;

[0022] Figure 5It is a top perspective schematic diagram of the material receiving box structure of the present invention;

[0023] Figure 6 It is a three-dimensional schematic diagram of the wiping unit structure of the present invention;

[0024] Figure 7 It is a three-dimensional schematic diagram of the elastic telescopic rod structure of the present invention;

[0025] Figure 8 It is a three-dimensional schematic diagram of the sleeve rod structure of the present invention.

[0026] In the figure: 1. machine body; 2. spray gun; 3. fixing plate; 4. motor; 5. swing arm; 6. strip groove; 7. limit groove; 8. slide rod; 9. connecting rod; 10. material receiving box; 111. fixing rod; 112. sleeve rod; 113. spring; 114. slide groove; 115. slider; 121. inner wiping head; 122. outer wiping plate; 13. water basin. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] Refer to the attached Figure 1-8 , an electrostatic chuck substrate coating machine, comprising a body 1 and a spray gun 2 arranged therein, for coating the substrate, a fixed plate 3 is provided on the back of the spray gun 2, a motor 4 is embedded in the fixed plate 3, the output end of the motor 4 passes through the fixed plate 3 and is connected to a swing arm 5, a strip groove 6 is provided in the swing arm 5 to allow the swing arm to guide other parts to move while rotating, a limiting groove 7 is provided on the side wall of the fixed plate 3, a slide bar 8 is slidably connected in the limiting groove 7 to form a stable and controllable mechanical linkage structure, the end of the slide bar 8 away from the fixed plate 3 passes through the strip groove 6 and is connected to a connecting rod 9, a material receiving box 10 is connected to the bottom of the connecting rod 9 for collecting the paint dripping from the spray gun 2, the depth of the material receiving box 10 is not less than 5 cm, so as to avoid the paint in the material receiving box 10 from spilling when the material receiving box 10 moves, the swing arm 5 rotates to make the slide bar 8 slide along the limiting groove 7, and make the material receiving box 10 move to the bottom of the spray gun 2.

[0029] After the working process of the spray gun 2 is completed, the motor 4 is started. At this time, the swing arm 5 drives the slide bar 8 to move, and the slide bar 8 moves along the limit groove 7, and the connecting rod 9 further drives the material receiving box 10 to move to the bottom of the spray gun 2, effectively receiving the paint dripping from the spray gun 2, ensuring that the material receiving box 10 can efficiently receive any paint drops that may drip from the spray gun 2 after completing the work, and effectively avoiding the paint dripping on other non-target areas of the subsequent substrate, thereby preventing accidental contamination of the substrate and ensuring the uniformity and overall quality of the substrate coating.

[0030] The limiting groove 7 includes at least a downward groove and a forward groove. When the slide bar 8 is located in the upper half of the downward groove, the bottom of the material receiving box 10 is higher than the bottom of the spray gun 2, which effectively avoids the bottom of the material receiving box 10 from touching the substrate and improves the safety during the coating process. The slide bar 8 moves along the forward groove to move the material receiving box 10 to the bottom of the spray gun 2, making it convenient for the material receiving box 10 to move to the bottom of the spray gun 2 to receive dripping paint when needed.

[0031] A wiping unit is provided in the material receiving box 10 corresponding to the spray gun 2, and the limiting groove 7 is also provided with an upper groove at the tail of the front groove, so that the material receiving box 10 and the wiping unit can move upward relative to the spray gun 2. After the material receiving box 10 moves to the bottom of the spray gun 2, it moves upward. At this time, the wiping unit wipes the nozzle of the spray gun 2, effectively preventing the residual paint in the nozzle from dripping after the material receiving box 10 is removed.

[0032] The wiping unit includes an elastic telescopic rod and a wiping head. The wiping head includes an inner wiping head 121 that can be inserted into the nozzle of the spray gun 2 and an outer wiping plate 122 that fits the outer wall of the nozzle of the spray gun 2 to wipe the inner and outer walls of the nozzle of the spray gun 2 at the same time. The internal and external design not only greatly improves the wiping efficiency, ensures that the inside of the nozzle is smooth and unobstructed, and prevents the occurrence of blockage, but also ensures the cleanliness of the inside and outside of the nozzle, thereby preventing residual paint in the nozzle from dripping after the material receiving box 10 is removed.

[0033] The elastic telescopic rod comprises a fixed rod 111 fixed in the material receiving box 10 and a sleeve rod 112 sleeved on the fixed rod 111, a spring 113 connected to the bottom wall of the material receiving box 10 is provided at the bottom of the sleeve rod 112, a downwardly extending slide groove 114 is provided around the outer wall of the fixed rod 111 at the top, and a slider 115 sliding along the slide groove 114 is provided in the sleeve rod 112, so that the wiping head rotates when the sleeve rod 112 moves downward, and when the material receiving box 10 moves upward relative to the spray gun 2, the spray head of the spray gun 2 The wiping head will be squeezed downward, further causing the sleeve rod 112 to move upward along the fixed rod 111. At this time, the slider 115 in the sleeve rod 112 will move along the slide groove 114, further causing the sleeve rod 112 to rotate. At this time, both the inner wiping head 121 and the outer wiping plate 122 will rotate. During this process, the inner wiping head 121 is inserted into the nozzle and rotates, and the outer wiping plate 122 fits the outer wall of the nozzle and rotates, which greatly improves the wiping efficiency and ability, and facilitates more comprehensive cleaning of the nozzle.

[0034] The outer wiping plate 122 includes a plurality of circumferentially arranged wiping plates, with gaps between adjacent wiping plates to leave a channel for the wiped paint to flow out, thereby preventing the paint from accumulating between the outer wiping plate 122 and the inner wiping head 121. Bristles are provided on the side of the wiping plate facing the inner wiping head 121 to improve the cleaning ability of the outer wiping plate 122.

[0035] The sleeve rod 112 and the fixed rod 111 can be separated to facilitate the removal of the wiping head. A water basin 13 is provided in the body 1. When the wiping head needs to be cleaned, the sleeve rod 112 is pulled out upwards, the sleeve rod 112 is placed in the water basin 13, and then the wiping head is cleaned. The cleaning is efficient and fast.

[0036] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0037] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An electrostatic chuck substrate coating machine, comprising a machine body (1) and a spray gun (2) arranged therein, characterized in that: The back of the spray gun (2) is provided with a fixing plate (3), a motor (4) is embedded in the fixing plate (3), an output end of the motor (4) passes through the fixing plate (3) and is connected to a swing arm (5), a strip groove (6) is provided in the swing arm (5), a limiting groove (7) is provided on the side wall of the fixing plate (3), a slide rod (8) is slidably connected in the limiting groove (7), one end of the slide rod (8) away from the fixing plate (3) passes through the strip groove (6) and is connected to a connecting rod (9), a material receiving box (10) is connected to the bottom of the connecting rod (9) for collecting paint dripping from the spray gun (2), the swing arm (5) rotates to make the slide rod (8) slide along the limiting groove (7), and make the material receiving box (10) move to the bottom of the spray gun (2).

2. The electrostatic chuck substrate coating machine according to claim 1, characterized in that: The limiting groove (7) comprises at least a downward groove and a forward groove. When the slide bar (8) is located in the upper half of the downward groove, the bottom of the material receiving box (10) is higher than the bottom of the spray gun (2). The slide bar (8) moves along the forward groove to move the material receiving box (10) below the spray gun (2).

3. An electrostatic chuck substrate coating machine as claimed in claim 2, characterized in that: A wiping unit is provided in the material receiving box (10) corresponding to the spray gun (2), and the limiting groove (7) is also provided with an upper groove at the tail of the front groove, so that the material receiving box (10) and the wiping unit can move upward relative to the spray gun (2).

4. An electrostatic chuck substrate coating machine as claimed in claim 3, characterized in that: The wiping unit comprises an elastic telescopic rod and a wiping head, wherein the wiping head comprises an inner wiping head (121) which can be inserted into a nozzle of a spray gun (2) and an outer wiping plate (122) which fits the outer wall of the nozzle of the spray gun (2) so as to wipe the inner and outer walls of the nozzle of the spray gun (2) simultaneously.

5. An electrostatic chuck substrate coating machine as claimed in claim 4, characterized in that: The elastic telescopic rod comprises a fixed rod (111) fixed in the material receiving box (10) and a sleeve rod (112) sleeved on the fixed rod (111); a spring (113) connected to the bottom wall of the material receiving box (10) is provided at the bottom of the sleeve rod (112); a downwardly extending sliding groove (114) is provided at the top of the fixed rod (111) around its outer wall; a sliding block (115) sliding along the sliding groove (114) is provided in the sleeve rod (112), so that the wiping head rotates when the sleeve rod (112) moves downward.

6. The electrostatic chuck substrate coating machine according to claim 4, characterized in that: The outer wiping plate (122) comprises a plurality of wiping plates arranged in a circumferential direction, with gaps between adjacent wiping plates to leave channels for the wiped paint to flow out, and bristles are arranged on the side of the wiping plate facing the inner wiping head (121).

7. An electrostatic chuck substrate coating machine as claimed in claim 5, characterized in that: The sleeve rod (112) and the fixed rod (111) can be detachably arranged to facilitate the removal of the wiping head. A water basin (13) is arranged in the machine body (1).

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