Dust removal device and chemical vapor deposition equipment

Abstract

The invention relates to a dust removal device and chemical vapor deposition equipment, the dust removal device comprises a first power supply circuit, a first guide rail, a second guide rail, a conductive driving piece, a dust removal assembly and an air exhaust piece, the first guide rail is electrically conducted to the output end of the first power supply circuit and arranged on the outer surface, and the second guide rail is electrically conducted to the output end of the second power supply circuit; the second guide rail and the first guide rail are arranged on the outer surface in a spaced mode, the second guide rail is electrically connected to the input end of the first power circuit, the conductive driving part is slidably connected to the first guide rail and the second guide rail and electrically connected to the first guide rail and the second guide rail, and the dust removal assembly is arranged on the conductive driving part. The dust removal assembly can move along the first guide rail and the second guide rail along with the conductive driving part so as to clean the outer surface, and the air exhaust part can exhaust air in a local area near the outer surface, so that impurity particles on the bottom surface of the chemical vapor deposition device can be cleaned through the dust removal device, and the manufacturing yield of panels is increased.

Description

Technical Field

[0001] The present invention relates to the technical field of dust removal, and in particular to a dust removal device and chemical vapor deposition equipment. Background Art

[0002] like Figure 1 As shown, the chemical vapor deposition equipment in the related art often includes a deposition chamber 20', a first electrode 21' disposed at the top of the deposition chamber 20', and a second electrode 22' disposed at the bottom of the deposition chamber 20', wherein the second electrode 22' is usually supported by a column 23' to be suspended relative to the bottom surface 200' in the deposition chamber 20', so as to prevent the second electrode 22' from contacting impurities that may be gathered on the bottom surface 200' in the deposition chamber 20'. When it is necessary to coat the surface of a panel that has not yet been formed into a finished product, the panel is placed on the second electrode 22', and the deposition chamber 20' is filled with a reaction gas including a film-forming raw material. By connecting the first electrode 21' and the second electrode 22', the reaction gas is converted into a plasma in a plasma state, so that the film-forming raw material reacts uniformly on the surface of the panel and deposits to form a film layer.

[0003] In the process of using chemical vapor deposition equipment for production and manufacturing, since the panel needs to be placed manually or automatically by machine, some chemical vapor deposition equipment may also include a second electrode 22' that needs to be lifted and lowered during use, or include other parts that can move. After the chemical vapor deposition equipment has been used for a period of time, due to the partial structure shedding caused by collision, aging, etc. during the movement of the aforementioned various parts, and the impurity particles generated by the shedding of the film layer formed on the panel and the inner wall of the deposition chamber 20' will accumulate on the bottom surface 200' in the deposition chamber 20'. However, since the bottom surface 200' in the deposition chamber 20' is usually blocked by the second electrode 22' suspended above the bottom surface 200', it is difficult to clean the impurity particles accumulated on the bottom surface 200'.

[0004] However, the more impurity particles accumulated on the bottom surface 200', the higher the possibility that the impurity particles on the bottom surface 200' will float up and adhere to the surface of the second electrode 22' used to support the panel, or directly adhere to the surface of the panel during the production process using chemical vapor deposition equipment, resulting in a decrease in the manufacturing yield of the panel. Summary of the invention

[0005] The first object of the present invention is to provide a dust removal device that can automatically clean foreign particles in a certain area.

[0006] The second object of the present invention is to propose a chemical vapor deposition device, which, by setting the aforementioned dust removal device, can clean up the foreign particles that fall on the bottom surface, thereby reducing the possibility of foreign particles adhering to the panel and improving the manufacturing yield of the panel.

[0007] To achieve this object, the present invention adopts the following technical solutions:

[0008] In a first aspect, a dust removal device is provided, comprising:

[0009] a first power supply circuit;

[0010] a first guide rail, the first guide rail being electrically connected to an output end of the first power supply circuit and being disposed on an external surface;

[0011] a second guide rail, the second guide rail being spaced apart from the first guide rail on the outer surface, and the spacing between the first guide rail and the second guide rail is the same at any position of the second guide rail, and the second guide rail is electrically connected to the input end of the first power supply circuit;

[0012] A conductive driving member, wherein the conductive driving member is slidably connected to the first guide rail and the second guide rail, and the conductive driving member is electrically connected to the first guide rail and the second guide rail;

[0013] a dust removal assembly, the dust removal assembly being disposed on the conductive driving member, the dust removal assembly being capable of moving along the first guide rail and the second guide rail with the conductive driving member to clean the external surface; and

[0014] A suction member is provided, wherein the suction member is capable of suctioning a local area near the outer surface.

[0015] As a preferred solution of the dust removal device, the first guide rail and the second guide rail both extend in a straight line direction, and the first guide rail and the second guide rail are arranged in parallel with each other;

[0016] Along the extension direction of the first guide rail and the second guide rail, one end of the first guide rail and the second guide rail located on the same side is electrically connected to the first power supply circuit respectively;

[0017] The dust removal device also includes a second power supply circuit. Along the extension direction of the first guide rail and the second guide rail, one end of the first guide rail on the other side is electrically connected to the input end of the second power supply circuit, and one end of the second guide rail on the other side is electrically connected to the output end of the second power supply circuit.

[0018] As a preferred solution of the dust removal device, the dust removal component includes a component seat, a discharge component and an anode adsorption component, the component seat is arranged on the conductive driving component, the discharge component and the anode adsorption component are arranged on the component seat at intervals, and the discharge component is arranged between the anode adsorption component and the external surface;

[0019] Two ends of the discharge member are electrically connected to the first guide rail and the second guide rail respectively, or two ends of the discharge member are electrically connected to an external power source;

[0020] One end of the anode adsorbent is electrically connected to the first rail, or one end of the anode adsorbent can be electrically connected to an external circuit.

[0021] As a preferred solution of the dust removal device, the discharge member is made of filament material.

[0022] As a preferred solution of the dust removal device, the dust removal assembly includes a plurality of the anode adsorption components;

[0023] Along the relative direction between the discharge member and the anode adsorption member, a plurality of the anode adsorption members are arranged at intervals; or,

[0024] Along the relative direction of the first guide rail and the second guide rail, a plurality of anode adsorption members are arranged at intervals.

[0025] As a preferred solution of the dust removal device, the anode adsorption element is a porous structure.

[0026] As a preferred solution of the dust removal device, the component seat is a cover-shaped structure with an inner cavity, and the component seat has an opening connected to the inner cavity on the side facing the outer surface, and the discharge component and the anode adsorption component are both located inside the inner cavity.

[0027] As a preferred solution of the dust removal device, the dust removal component includes a seat and a brush, the seat is arranged on the conductive driving member, the brush is arranged on the seat, and the side of the brush away from the seat can abut against the external surface.

[0028] As a preferred solution of the dust removal device, the outer surface is provided with a through hole, the through hole is connected to the interval space between the first guide rail and the second guide rail, and the suction piece is connected to an end of the through hole away from the dust removal assembly.

[0029] In a second aspect, a chemical vapor deposition device is provided, comprising a chemical vapor deposition apparatus and at least one dust removal device as described in the first aspect above, wherein the chemical vapor deposition apparatus has a deposition chamber, and the first guide rail and the second guide rail are both arranged on the bottom surface of the deposition chamber.

[0030] The present invention has the following beneficial effects compared with the prior art:

[0031] The dust removal device of the present invention, by providing a first guide rail, a second guide rail and a conductive driving member, can, when the first power circuit is working, in other words, when the first power circuit outputs current to the first guide rail through the output end and receives current from the second guide rail through the input end, enable the current flowing in the first guide rail and the second guide rail to generate a magnetic field roughly perpendicular to the external surface between the first guide rail and the second guide rail. At this time, since the conductive driving member can generate a current from the connection with the first guide rail to the connection with the second guide rail, the conductive driving member can be subjected to an Ampere force roughly perpendicular to the length direction of the conductive driving member, so that the conductive driving member can slide relative to the first guide rail and the second guide rail to drive the dust removal component to move, and then realize the external surface within a certain area that can be swept by the dust removal component along the movement of the first guide rail and the second guide rail, to automatically clean the impurity particles accumulated within the certain area and collect them into the exhaust action area of ​​the exhaust member, so that the exhaust member can extract the impurity particles, thereby realizing automatic cleaning of the external surface within a certain area. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 A schematic structural diagram of a chemical vapor deposition device provided by the prior art.

[0033] Figure 2 It is a schematic top view of the magnetic field and structure of the dust removal device (when the first power circuit is working) according to an embodiment of the present invention.

[0034] Figure 3 It is a schematic cross-sectional view of the structure of a first dust removal device according to an embodiment of the present invention.

[0035] Figure 4 It is a schematic top view of the magnetic field and structure of the dust removal device (when the second power supply circuit is working) according to an embodiment of the present invention.

[0036] Figure 5 It is a schematic top view of the structure of the dust removal device according to an embodiment of the present invention (when the cleaning area of ​​the dust removal component is roughly annular).

[0037] Figure 6 It is a schematic cross-sectional view of the structure of a second dust removal device according to an embodiment of the present invention.

[0038] Figure 7 It is a schematic cross-sectional view of the structure of a third dust removal device according to an embodiment of the present invention.

[0039] Figure 8 Schematic diagram of the structure of a chemical vapor deposition device according to an embodiment of the present invention.

[0040] Fig. 9It is a schematic structural cross-sectional view of a chemical vapor deposition device (facing the bottom surface of the deposition chamber) according to an embodiment of the present invention.

[0041] Figure 1 middle:

[0042] 20', deposition chamber; 200', bottom surface; 21', first electrode; 22', second electrode; 23', column.

[0043] Figures 2 to 9 middle:

[0044] 1. dust removal device; 10. first power supply circuit; 11. first guide rail; 12. second guide rail; 13. conductive driving member; 14. dust removal assembly; 140. assembly seat; 1401. inner cavity; 1402. opening; 141. discharge member; 142. anode adsorption member; 143. seat body; 144. brush; 15. exhaust member; 16. second power supply circuit;

[0045] 2. Chemical vapor deposition device; 20. Deposition chamber; 200. Bottom surface; 201. Through hole; 22. Second electrode. DETAILED DESCRIPTION

[0046] The advantages and features of the present invention and methods for achieving them will become apparent with reference to the embodiments described in detail below in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms. This embodiment is provided only to complete the disclosure of the present invention and to enable those skilled in the art to fully understand the scope of the present invention, and the present invention is limited only by the scope of the claims. The same reference numerals represent the same constituent elements throughout the specification.

[0047] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

[0048] like Figure 2 and Figure 3As shown, a dust removal device 1 is provided, including a first power circuit 10, a first guide rail 11, a second guide rail 12, a conductive driving member 13, a dust removal assembly 14 and an exhaust member 15, the first guide rail 11 is electrically connected to the output end of the first power circuit 10 and is arranged on the external surface, the second guide rail 12 is spaced apart from the first guide rail 11 on the external surface, and at any position of the second guide rail 12, the spacing between the first guide rail 11 and the second guide rail is the same, the second guide rail 12 is electrically connected to the input end of the first power circuit 10, the conductive driving member 13 can be slidably connected to the first guide rail 11 and the second guide rail 12, and the conductive driving member 13 is electrically connected to the first guide rail 11 and the second guide rail 12, the dust removal assembly 14 is arranged on the conductive driving member 13, the dust removal assembly 14 can move along the first guide rail 11 and the second guide rail 12 with the conductive driving member 13 to clean the external surface, and the exhaust member 15 can exhaust a local area near the external surface.

[0049] By providing the first guide rail 11, the second guide rail 12 and the conductive driving member 13, when the first power supply circuit 10 is working, in other words, when the first power supply circuit 10 outputs current to the first guide rail 11 through the output terminal and receives current from the second guide rail 12 through the input terminal, the current flowing in the first guide rail 11 and the second guide rail 12 can generate a magnetic field substantially perpendicular to the external surface between the first guide rail 11 and the second guide rail 12, and at this time, since the conductive driving member 13 can generate a current from the portion connected to the first guide rail 11 to the portion connected to the second guide rail 12, the conductive driving member 13 can be subjected to an Ampere force roughly perpendicular to the length direction of the conductive driving member 13, so that the conductive driving member 13 can slide relative to the first guide rail 11 and the second guide rail 12, so as to drive the dust removal component 14 to move, and then realize the external surface within a certain area that can be cleaned by the dust removal component 14 along the movement of the first guide rail 11 and the second guide rail 12, to automatically clean and collect the impurity particles accumulated in the certain area into the exhaust action area of ​​the exhaust member 15, so that the exhaust member 15 can extract the impurity particles, thereby realizing automatic cleaning of the external surface within a certain area.

[0050] For example, please combine Figure 8 As shown, when the dust removal device 1 is applied to the chemical vapor deposition device 2, the bottom surface 200 of the deposition chamber 20 of the chemical vapor deposition device 2 can be the aforementioned external surface, that is, the first guide rail 11 and the second guide rail 12 can both be arranged on the bottom surface 200 in the deposition chamber 20, and the dust removal device 1 can be used to clean the impurity particles that fall on the bottom surface 200.

[0051] like Figure 2 As shown, Figure 2It is shown in the figure that when the first power supply circuit 10 is working, the current flowing in the first guide rail 11 and the second guide rail 12 generates a magnetic field between the first guide rail 11 and the second guide rail 12 that is approximately perpendicular to the paper surface. At this time, a current flowing from the right side of the figure to the left side is generated in the conductive driving member 13, and the conductive driving member 13 can be subjected to the Ampere force that is approximately directed downward in the figure, so that the conductive driving member 13 can slide downward in the figure relative to the first guide rail 11 and the second guide rail 12, thereby driving the dust removal assembly 14 to move downward in the figure.

[0052] In an optional embodiment, the first guide rail 11 and the second guide rail 12 both extend in a straight direction, and the first guide rail 11 and the second guide rail 12 are arranged in parallel with each other at intervals, so that the area that the dust removal assembly 14 can clean is roughly rectangular.

[0053] Please combine Figure 4 As shown, optionally, along the extension direction of the first guide rail 11 and the second guide rail 12, one end of the first guide rail 11 and the second guide rail 12 located on the same side are respectively electrically connected to the first power supply circuit 10, and the dust removal device 1 also includes a second power supply circuit 16, along the extension direction of the first guide rail 11 and the second guide rail 12, one end of the first guide rail 11 located on the other side is electrically connected to the input end of the second power supply circuit 16, and one end of the second guide rail 12 located on the other side is electrically connected to the output end of the second power supply circuit 16, so that the first power supply circuit 10 and the second power supply circuit 16 can work in sequence, so as to be able to make the conductive driving member 13 reciprocate along the extension direction of the first guide rail 11 and the second guide rail 12 as needed. In other words, after the dust removal device 1 completes cleaning, the conductive driving member 13 can be automatically reset.

[0054] Specifically, Figure 2 and Figure 4 As shown, Figure 2 It is shown in the figure that when the first power circuit 10 connected to the first guide rail 11 and the second guide rail 12 at one end located on the upper side of the figure is working and the second power circuit 16 is not working, the current flowing in the first guide rail 11 and the second guide rail 12 generates a magnetic field approximately perpendicular to the paper surface between the first guide rail 11 and the second guide rail 12. At this time, a current flowing from the right side to the left side in the figure is generated in the conductive driving member 13, and the conductive driving member 13 can be subjected to an Ampere force approximately pointing downward in the figure, so that the conductive driving member 13 can slide downward in the figure relative to the first guide rail 11 and the second guide rail 12, so as to drive the dust removal component 14 to move downward in the figure. Figure 4It is shown that when the second power circuit 16 connected to the first guide rail 11 and the second guide rail 12 at one end on the lower side of the figure is working and the first power circuit 10 is not working, the current flowing in the first guide rail 11 and the second guide rail 12 generates a magnetic field roughly perpendicular to the paper surface between the first guide rail 11 and the second guide rail 12. At this time, a current flowing from the left side to the right side in the figure is generated in the conductive driving member 13, and the conductive driving member 13 can be subjected to the Ampere force roughly pointing upward in the figure, so that the conductive driving member 13 can slide upward in the figure relative to the first guide rail 11 and the second guide rail 12, so as to drive the dust removal assembly 14 to move upward in the figure to reset.

[0055] In other embodiments, after the dust removal device 1 completes cleaning, the dust removal device 1 can be manually moved and reset by an operator.

[0056] like Figure 5 As shown, in another optional embodiment, the first guide rail 11 and the second guide rail 12 are concentrically arranged annular guide rails, so that the area that the dust removal assembly 14 can clean is roughly annular, wherein, Figure 5 It is exemplarily shown that the second guide rails 12 are arranged around the outer periphery of the first guide rails 11 at intervals. In other embodiments, the first guide rails 11 can also be arranged around the outer periphery of the second guide rails 12 at intervals.

[0057] Optionally, the dust removal device 1 may also include a magnetic component (not shown in the figure) to increase the magnetic field in the activity space of the conductive driving component 13 through the magnetic component, so as to increase the Ampere force that the conductive driving component 13 can be subjected to, so that the conductive driving component 13 can be subjected to a greater driving force.

[0058] Please see again Figure 3 The outer surface may be provided with a through hole 201, and the through hole 201 is connected to the interval space between the first guide rail 11 and the second guide rail 12. At this time, optionally, the exhaust member 15 is connected to the end of the through hole 201 away from the dust removal component 14, so that the exhaust member 15 can exhaust the area between the first guide rail 11 and the second guide rail 12 near the through hole 201 through the through hole 201.

[0059] It can be understood that the exhaust member 15 can be specifically arranged at any position outside the area that can be cleaned by the dust removal component 14 as needed, as long as the exhaust member 15 can be connected to the end of the through hole 201 away from the dust removal component 14 through the air pipe so as to be able to exhaust the area between the first guide rail 11 and the second guide rail 12 near the through hole 201. The specific setting position of the exhaust member 15 is not specifically limited in this embodiment.

[0060] Exemplarily, when the dust removal device 1 is applied to the chemical vapor deposition device 2 , the exhaust component 15 can be disposed at any position outside the chemical vapor deposition device 2 to prevent the exhaust component 15 from affecting the chemical vapor deposition process in the chemical vapor deposition device 2 .

[0061] The dust removal assembly 14 can be of various structures, so as to collect and transport foreign particles to the suction area of ​​the suction member 15 in different ways. Next, two different structures of the dust removal assembly 14 will be described in conjunction with the accompanying drawings.

[0062] like Figure 3 As shown, in an optional embodiment, the dust removal component 14 includes a component seat 140, a discharge component 141 and an anode adsorption component 142, the component seat 140 is arranged on the conductive driving component 13, the discharge component 141 and the anode adsorption component 142 are arranged at intervals on the component seat 140, and the discharge component 141 is arranged between the anode adsorption component 142 and the external surface, so that electrons can be released from a position close to the external surface through the discharge component 141 to charge the impurity particles located on the external surface, and at the same time, the anode adsorption component 142 is used to adsorb the charged impurity particles, so as to collect the impurity particles and transport them to the exhaust action area of ​​the exhaust component 15.

[0063] In addition, after the dust removal component 14 moves to the vicinity of the suction action area of ​​the exhaust component 15, the discharge component 141 and the anode adsorption component 142 can be powered off to release the force exerted by the discharge component 141 and the anode adsorption component 142 on the foreign particles, thereby making it easier for the exhaust component 15 to extract the foreign particles.

[0064] Optionally, the discharge member 141 may be made of a filament material. For example, the discharge member 141 may include at least but not limited to a tungsten material and a rhenium material, so that when the discharge member 141 is powered on, it can emit electrons to the outside.

[0065] Optionally, the discharge member 141 may be a porous structure, for example, including but not limited to a mesh structure, a sheet structure with multiple through holes, so that charged impurity particles can pass through the discharge member 141 to be adsorbed by the anode adsorption member 142, or be extracted from the anode adsorption member 142 by the exhaust member 15.

[0066] Optionally, the two ends of the discharge element 141 are electrically connected to the first guide rail 11 and the second guide rail 12 respectively, so that when the first power circuit 10 or the second power circuit 16 is working, a voltage can be applied to the two ends of the discharge element 141 through the first guide rail 11 and the second guide rail 12, so that the discharge element 141 can be used for discharge.

[0067] At this time, when the first power supply circuit 10 is working, the conductive driving component 13 drives the dust removal component 14 to move to the vicinity of the suction action area of ​​the suction component 15. The discharge component 141 can be powered off by simply disconnecting the first power supply circuit 10 from the first guide rail 11 and the second guide rail 12 to release the force exerted by the discharge component 141 on the impurity particles.

[0068] Exemplarily, two ends of the discharge member 141 may be electrically connected to two ends of the conductive driving member 13 , respectively, so that the discharge member 141 and the conductive driving member 13 are connected in parallel between the first guide rail 11 and the second guide rail 12 .

[0069] In other embodiments, both ends of the discharge element 141 can also be electrically connected to an external power source so that a voltage can be applied to both ends of the discharge element 141 through the external power source, thereby being able to control the movement of the conductive driving element 13 and whether the discharge element 141 discharges through the power circuit and the external power source respectively.

[0070] Optionally, one end of the anode adsorbent 142 may be electrically connected to the first rail 11, so that when the first power circuit 10 is working, the anode adsorbent 142 can be formed as an anode through the first rail 11, so that the anode adsorbent 142 can be used to adsorb charged foreign particles.

[0071] At this time, when the first power supply circuit 10 is working, after the conductive driving component 13 drives the dust removal component 14 to move to the vicinity of the suction action area of ​​the suction component 15, the anode adsorption component 142 can be powered off by simply disconnecting the first power supply circuit 10 from the first guide rail 11 and the second guide rail 12 to release the adsorption force exerted by the anode adsorption component 142 on the impurity particles.

[0072] Exemplarily, one end of the anode adsorbing member 142 may be electrically connected to the conductive driving member 13 , so that one end of the anode adsorbing member 142 is electrically connected to the first guide rail 11 through the conductive driving member 13 .

[0073] In other embodiments, one end of the anode adsorbent 142 can be electrically connected to an external circuit so that a voltage can be applied to one end of the anode adsorbent 142 through an external power supply, thereby being able to control the movement of the conductive driving member 13 and whether the anode adsorbent 142 forms an anode through the power supply circuit and the external power supply respectively.

[0074] like Figure 3 and Figure 6 As shown, optionally, the dust removal assembly 14 may include a plurality of anode adsorption members 142, and along the relative direction between the discharge member 141 and the anode adsorption member 142, the plurality of anode adsorption members 142 are arranged at intervals (such as Figure 3 Alternatively, along the relative direction of the first guide rail 11 and the second guide rail 12, a plurality of anode adsorption members 142 are arranged at intervals (as shown in Figure 6 As shown), the adsorbable surface area of ​​the dust removal component 14 for charged foreign particles can be increased by increasing the number of anode adsorbents 142, thereby improving the collection capacity of the dust removal component 14 for charged foreign particles.

[0075] Optionally, the anode adsorbent 142 is a porous structure. For example, the anode adsorbent 142 may be a sheet structure including but not limited to a mesh structure with multiple holes, thereby increasing the surface area of ​​the anode adsorbent 142 and thereby improving the dust removal component 14's ability to collect charged impurity particles.

[0076] Optionally, the component seat 140 is a cover-shaped structure with an inner cavity 1401. The side of the component seat 140 facing the external surface has an opening 1402 connected to the inner cavity 1401. The discharge member 141 and the anode adsorption member 142 are both located inside the inner cavity 1401, so that the component seat 140 can block the charged impurity particles entering the inner cavity 1401 from scattering, so as to improve the dust removal effect of the dust removal component 14. In addition, such a setting can also make the conductive driving member 13 drive the dust removal component 14 to move to the vicinity of the suction action area of ​​the suction member 15, and the opening 1402 is roughly aligned with the through hole 201, so that the suction member 15 can extract the impurity particles collected in the inner cavity 1401 through the through hole 201.

[0077] like Figure 7 As shown, in another optional embodiment, the dust removal component 14 includes a seat body 143 and a brush 144, the seat body 143 is arranged on the conductive driving member 13, the brush 144 is arranged on the seat body 143, and the side of the brush 144 away from the seat body 143 can abut against the external surface, so that the seat body 143 can follow the movement of the conductive driving member 13 to enable the brush 144 to sweep the impurity particles on the external surface into the suction action area of ​​the suction member 15.

[0078] like Figure 8 and Fig. 9 As shown, a chemical vapor deposition device is also provided, including a chemical vapor deposition device 2 and at least one dust removal device 1 as described in the aforementioned technical solution, the chemical vapor deposition device 2 has a deposition chamber 20, the first guide rail 11 and the second guide rail 12 are both arranged on the bottom surface 200 in the deposition chamber 20, and by setting the aforementioned dust removal device 1, the dust removal device 1 can be used to clean up the foreign particles that fall on the bottom surface 200, thereby reducing the possibility of foreign particles adhering to the panel and improving the manufacturing yield of the panel.

[0079] The bottom surface 200 of the deposition chamber 20 is usually rectangular, and the second electrode 22 is usually supported by a column 23 to be suspended relative to the bottom surface 200 in the deposition chamber 20. At this time, the dust removal device 1 can be arranged in the space formed between the second electrode 22 and the bottom surface 200. In other words, the dust removal device 1 can be located between the second electrode 22 and the bottom surface 200 to avoid the dust removal device 1 affecting the normal operation of the second electrode 22.

[0080] And, exemplarily, the chemical vapor deposition equipment may include two dust removal devices 1, and the areas that can be cleaned by the two dust removal devices 1 are roughly rectangular, and the two dust removal devices 1 are respectively arranged on two opposite sides of the column 23, so as to be able to automatically clean the bottom surface 200 within the rectangular area located on two opposite sides of the column 23.

[0081] It can be understood that, at this time, the two dust removal devices 1 can share the same exhaust component 15 to simplify the structure of the chemical vapor deposition equipment.

[0082] In other embodiments, the area that the dust removal device 1 can clean can also be roughly annular, and the first guide rail 11 and the second guide rail 12 of the dust removal device 1 are both arranged around the column 23, so that the dust removal device 1 can automatically clean the bottom surface 200 within the annular area located on the outer periphery of the column 23.

[0083] Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be manufactured in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or basic features of the present invention. Therefore, it should be understood that the above embodiments are exemplary and not restrictive in all aspects.

Claims

1. A dust removal device, characterized in that: include: a first power supply circuit; a first guide rail, the first guide rail being electrically connected to an output end of the first power supply circuit and being disposed on an external surface; a second guide rail, the second guide rail being spaced apart from the first guide rail on the outer surface, and the spacing between the first guide rail and the second guide rail is the same at any position of the second guide rail, and the second guide rail is electrically connected to the input end of the first power supply circuit; A conductive driving member, wherein the conductive driving member is slidably connected to the first guide rail and the second guide rail, and the conductive driving member is electrically connected to the first guide rail and the second guide rail; a dust removal assembly, the dust removal assembly being disposed on the conductive driving member, the dust removal assembly being capable of moving along the first guide rail and the second guide rail with the conductive driving member to clean the external surface; and A suction member is provided, wherein the suction member is capable of suctioning a local area near the outer surface.

2. The dust removal device according to claim 1, characterized in that: The first guide rail and the second guide rail both extend in a straight line direction, and the first guide rail and the second guide rail are arranged in parallel with each other at an interval; Along the extension direction of the first guide rail and the second guide rail, one end of the first guide rail and the second guide rail located on the same side is electrically connected to the first power supply circuit respectively; The dust removal device also includes a second power supply circuit. Along the extension direction of the first guide rail and the second guide rail, one end of the first guide rail on the other side is electrically connected to the input end of the second power supply circuit, and one end of the second guide rail on the other side is electrically connected to the output end of the second power supply circuit.

3. The dust removal device according to claim 1 or 2, characterized in that: The dust removal component comprises a component seat, a discharge component and an anode adsorption component, wherein the component seat is arranged on the conductive driving component, the discharge component and the anode adsorption component are arranged on the component seat at intervals, and the discharge component is arranged between the anode adsorption component and the external surface; Two ends of the discharge member are electrically connected to the first guide rail and the second guide rail respectively, or two ends of the discharge member are electrically connected to an external power source; One end of the anode adsorbent is electrically connected to the first rail, or one end of the anode adsorbent can be electrically connected to an external circuit.

4. The dust removal device according to claim 3, characterized in that: The discharge member is made of filament material.

5. The dust removal device according to claim 3, characterized in that: The dust removal assembly includes a plurality of anode adsorption components; Along the relative direction between the discharge member and the anode adsorption member, a plurality of the anode adsorption members are arranged at intervals; or, Along the relative direction of the first guide rail and the second guide rail, a plurality of anode adsorption members are arranged at intervals.

6. The dust removal device according to claim 3, characterized in that: The anode adsorption component is a porous structure.

7. The dust removal device according to claim 3, characterized in that: The component seat is a cover-shaped structure with an inner cavity. The side of the component seat facing the outer surface has an opening connected to the inner cavity. The discharge component and the anode adsorption component are both located inside the inner cavity.

8. The dust removal device according to claim 1 or 2, characterized in that: The dust removal component includes a seat body and a brush. The seat body is arranged on the conductive driving member. The brush is arranged on the seat body, and a side of the brush away from the seat body can abut against the external surface.

9. The dust removal device according to claim 1 or 2, characterized in that: The outer surface is provided with a through hole, the through hole is connected to the interval space between the first guide rail and the second guide rail, and the air suction member is connected to an end of the through hole away from the dust removal assembly.

10. A chemical vapor deposition device, characterized in that: It comprises a chemical vapor deposition device and at least one dust removal device as described in any one of claims 1 to 9, wherein the chemical vapor deposition device has a deposition chamber, and the first guide rail and the second guide rail are both arranged on the bottom surface of the deposition chamber.

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