Chamber cover plate and horizontal HWCVD equipment

Abstract

The invention provides a chamber cover plate and horizontal HWCVD equipment, the chamber cover plate is provided with a hot wire conductive assembly and a gas distribution device, the hot wire conductive assembly is connected with a plurality of hot wires, the plurality of hot wires are continuously arranged into a plurality of rows, and the gas distribution device is connected with the hot wire conductive assembly. And the air outlet of the air distribution device, the hot wire and the substrate are arranged in a manner that the air outlet, the hot wire and the substrate are arranged downwards or upwards in sequence. The hot wires are tightly spliced into a plurality of rows which are distributed at intervals, so that the hot wires can be modularly mounted on the chamber cover plate conveniently; the hot filament rows transversely penetrate through the air distribution pipes on the two sides of the carrier plate in parallel and are embedded into the cavity cover plate, meanwhile, each row-column hot filament installation strip is also embedded into the cavity cover, and the installation positions are flush with the surface of the cavity cover.

Description

Technical Field

[0001] The present invention relates to the field of hot wire coating, in particular to the field of single-sided coating Cat-CVD coating technology, and specifically to a chamber cover plate and a horizontal HWCVD device. Background Art

[0002] HWCVD, also known as Cat-CVD, is a high-temperature hot wire to crack the process gas, and the cracked process gas reacts with each other and deposits on the substrate. The gas utilization rate of HJT equipment using the hot wire process is more than 5 times that of PECVD, and the cost of low ion bombardment coating and the complexity of the equipment are far lower than the HJT equipment of the PECVD method. Therefore, the industry has been promoting the hot wire process to realize the mass production line of solar cells.

[0003] At present, the uniformity of the film prepared by the hot wire method is not ideal. This phenomenon is related to multiple factors, such as airflow pattern, air outlet method, hot wire arrangement, silicon wafer placement, electromagnetic field in the cavity, substrate temperature, etc. The substrate temperature uniformity can generally be achieved below 5%, but other factors affecting film uniformity are difficult to standardize, while factors such as hot wire arrangement and air outlet method are relatively easy to control, but the existing hot wire arrangement is disordered, the installation is complicated, and it is not convenient for modular design and installation. Summary of the invention

[0004] In order to solve the above technical problems in the prior art, the present invention provides a chamber cover and a horizontal HWCVD device.

[0005] The technical solution adopted by the present invention is:

[0006] The present invention proposes a chamber cover for a horizontal HWCVD device, wherein the chamber cover is installed on a trough body to form a chamber in the trough body, and the chamber cover is provided with a hot wire conductive component and an air distribution device, wherein a plurality of hot wires are connected to the hot wire conductive component, and the plurality of hot wires are continuously arranged in a plurality of rows, and the hot wires are located between the air outlet of the air distribution device and the substrate in the chamber, so that the gas coming out of the air outlet is heated by the hot wire before reaching the substrate.

[0007] Furthermore, the chamber cover plate is installed above the trough body, and the air outlet holes of its air distribution device face downward; or the chamber cover plate is installed at the bottom of the trough body, and the air outlet holes of its air distribution device face upward.

[0008] Furthermore, the hot wire conductive component includes: a plurality of insulated electrode components arranged on the chamber cover and facing the inner side of the chamber, the plurality of electrode components are arranged in a plurality of rows, and the two ends of the hot wire are electrically connected to two adjacent electrode components respectively.

[0009] In a preferred embodiment, each of the electrode assemblies is directly mounted on the chamber cover in an insulated form.

[0010] In a preferred embodiment, each row of the electrode assemblies is installed in an insulated form on a mounting bar, and a mounting groove is provided on the inner side surface of the chamber cover corresponding to the position of the mounting bar, and the mounting bar is flush with the inner side surface of the chamber cover after installation.

[0011] Furthermore, the ends of two hot wires are connected to the same electrode assembly at the same time; the ends of the two hot wires are in contact and located on the same plane; or there is a gap between the ends of the two hot wires and they are located on the same plane; or there is a gap between the ends of the two hot wires and they are located on two parallel planes.

[0012] In a preferred embodiment, the electrode assembly comprises: an insulating mounting post mounted on the inner side of the chamber cover, and a conductive head arranged on the top of the insulating mounting post.

[0013] In a preferred embodiment, the electrode assembly comprises: a conductive mounting post, an insulating mounting strip for mounting the conductive mounting post is provided on the inner side of the chamber cover, and the conductive mounting post is conductive as a whole to achieve electrical conduction of the two hot wires.

[0014] Furthermore, the electrode assemblies at both ends of each row of electrode assemblies pass through the chamber cover and serve as input electrodes and output electrodes of a row of electrode assemblies respectively, and the input electrodes and output electrodes are insulated from the chamber cover, and the input electrodes and output electrodes are directly connected to a power supply, or are connected in series or in parallel with the input electrodes and output electrodes of other rows of electrode assemblies and then connected to a power supply.

[0015] Furthermore, the air distribution device includes: a plurality of main pipes arranged in parallel at intervals, a plurality of branch pipes respectively connected to two of the main pipes at both ends, and the bottom surfaces of the branch pipes are provided with air outlet holes or air outlet parts at intervals along the length direction.

[0016] In a preferred embodiment, the bottom surface of the chamber cover is provided with grooves for embedding the main pipe and the branch pipe.

[0017] In a preferred embodiment, the main pipeline and the branch pipeline are holes reserved inside the chamber cover.

[0018] Furthermore, the spray pipe of each branch pipe is located between two adjacent rows of hot wires and is parallel to the extension direction of the length of the rows of hot wires.

[0019] Furthermore, after being installed, the air outlet piece of the branch pipe and the mounting strip for mounting the hot wire conductive component are flush with the inner side surface of the chamber cover plate facing the chamber, thereby reducing airflow obstruction and scattering.

[0020] The present invention also proposes a horizontal HWCVD device, comprising: at least one trough body, the above-mentioned chamber cover installed on the trough body, a carrier conveying device arranged in the trough body and a heater for heating, the carrier conveying device can convey the carrier to the bottom of the chamber cover where the hot wire row area is arranged, and the carrier is used to place a substrate.

[0021] Furthermore, transmission openings for passing through the carrier are provided on both sides of the trough body, and an exhaust hole is provided at the bottom of the trough body; the airflow reaches the exhaust hole through the gaps in the forward and backward directions of the carrier, or reaches the exhaust hole through the gaps on both sides parallel to the transmission direction of the carrier, so that the airflow direction of the airflow when flowing toward the gap is perpendicular to the extension direction of the hot wire row composed of the hot wires.

[0022] In a preferred embodiment, when the extension direction of the hot wire row formed by the hot wires is perpendicular to the conveying direction of the carrier, baffles are provided at the gaps on both sides of the trough body parallel to the conveying direction of the carrier to block the airflow, so that the airflow reaches the exhaust hole through the gaps in the forward and backward directions of the carrier.

[0023] In a preferred embodiment, when the extension direction of the hot wire row formed by the hot wires is parallel to the conveying direction of the carrier, baffles are provided in the slots in the forward and backward directions of the carrier to block the airflow, so that the airflow reaches the exhaust hole through the slots on both sides parallel to the conveying direction of the carrier.

[0024] Furthermore, the length direction of the substrate is consistent with the extension direction of the hot wire row.

[0025] Furthermore, the carrier conveying device includes: a plurality of roller shafts arranged at intervals along the conveying direction, rollers arranged on the roller shafts, a magnetic fluid component sealed on the inner wall of the tank body and connected to the roller shafts, and a motor arranged outside the tank body and driving the roller shafts to rotate through the magnetic fluid component.

[0026] Compared with the prior art, the present invention has the following advantages:

[0027] 1. The hot wires are closely spliced ​​into multiple rows with intervals, which is convenient for modular installation on the chamber cover;

[0028] 2. Through the baffle, the gas flow around the carrier is directed to flow only in the forward and backward directions of the carrier, so that the process gas is fully cracked and evenly starts from the hot wire surface in the same direction and reaches the substrate surface on the carrier at an equal distance;

[0029] 3. Move the air distribution pipes that cross the hot wires to both sides of the carrier board into the chamber cover. At the same time, each hot wire installation strip is also embedded in the chamber cover. The installation positions are flush with the surface of the chamber cover.

[0030] 4. Placing the substrate in parallel with the hot wire in the length direction can improve the uniformity of the film quality within the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0032] Figure 1 It is a front view schematic diagram of the structure in an embodiment of the present invention;

[0033] Figure 2 It is a schematic side view of the structure in an embodiment of the present invention;

[0034] Figure 3 It is a schematic diagram of the structure of the pipeline part of the air distribution device in an embodiment of the present invention;

[0035] Figure 4 It is a schematic diagram of the structure in which the electrode assembly is installed on the mounting bar in an embodiment of the present invention;

[0036] Figure 5 Schematic diagram of the arrangement of the hot wire and the substrate in an embodiment of the present invention.

[0037] 1. Tank body; 11. Transmission opening; 12. Air extraction port;

[0038] 2. Chamber cover;

[0039] 31. electrode assembly; 32. hot wire; 33. mounting strip;

[0040] 4. gas distribution device; 411. main pipeline; 412. branch pipeline; 42. air outlet;

[0041] 51. Motor; 52. Roller;

[0042] 6. Heater; 7. Baffle; 8. Carrier; 81. Substrate; 9. Process gas. DETAILED DESCRIPTION

[0043] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0044] The principle and structure of the present invention are described in detail below with reference to the accompanying drawings and embodiments.

[0045] Hot wire equipment is different from PECVD equipment. It has unique airflow direction. Zebra stripes appear when the airflow does not match the structure. The existing air intake method, whether it is air intake around the periphery or air intake in the normal direction of the wire plane, has a part of the airflow parallel to the extension direction of the hot wire and a part of the airflow perpendicular to the extension direction of the hot wire. This airflow method will cause the concentration of active molecules on the substrate in different regions to become uneven. The intermittent arrangement of the hot wire also affects the uniformity of the concentration of active molecules on the gas flow path, and then affects the uniformity of the atmosphere reaching the bottom surface of the coating. The placement direction of silicon wafers prepared by hot wire coating is not standardized. The active groups cracked by the hot wire have too long a path to reach and react with other particles during the drift process, which easily causes the atmosphere at the beginning and end of the silicon wafer to become different, affecting the uniformity within the wafer. The hot wire series length of the mass production machine is large, and the potential difference between the positive and negative electrodes is high. It is easy to have broken wires, film-induced conductive loss, short circuits, sparks, etc., and even cause a large number of active molecules in the cavity to migrate under the action of the electromagnetic field, resulting in difficulty in unifying the film quality between wafers.

[0046] In existing hot wire equipment, the hot wire is generally arranged in an intermittent manner, which affects the uniformity of the concentration of active molecules on the gas flow path, and further affects the uniformity of the atmosphere reaching the bottom surface of the coating. In addition, the hot wire is arranged in the tank in the form of a bracket, which makes the installation method complicated and not convenient for modular installation.

[0047] In this regard, Figure 1 , 2 As shown, the present invention proposes a chamber cover, wherein the chamber cover 2 is installed on the trough body 1 to form a chamber in the trough body 1, and the chamber cover 2 specifically includes: a plurality of hot wires 32, a hot wire conductive component and an air distribution device, wherein the hot wire conductive component is connected to a plurality of hot wires 32, and the plurality of hot wires 32 are continuously arranged into a plurality of rows, i.e., forming a continuous and uninterrupted heating line, and the air outlet 43 of the air distribution device is located above the hot wire 32, and the air outlet direction of the air outlet 43 is downward.

[0048] By directly integrating the hot wires 32 and the gas distribution device on the chamber cover 2, the modular installation of the equipment can be improved, and the installation and manufacturing efficiency can be improved. At the same time, the hot wires are closely spliced ​​into multiple continuous rows, which can avoid affecting the uniformity of the active molecule concentration on the gas flow path.

[0049] In other embodiments, the chamber cover plate can also be installed at the bottom of the trough body, with the air outlet of the gas distribution device facing upward, the hot wire being located between the air outlet of the gas distribution device and the substrate in the chamber, and the exhaust port can also be set at the top of the trough body, so that the gas coming out of the air outlet is heated by the hot wire before reaching the substrate for process reaction.

[0050] In a specific embodiment, the hot wire conductive component includes: a plurality of electrode assemblies 31, each electrode assembly 31 is insulated and mounted on the chamber cover by configuring an insulating component so that it is insulated and connected to the chamber cover, the electrode assembly 31 extends vertically out of the bottom surface of the chamber cover 2, and the plurality of electrode assemblies 31 are arranged in parallel rows, and the electrode assemblies 31 in each row of electrode assemblies 31 are arranged at intervals, and at the same time, the two ends of each hot wire 32 are bent vertically upward to be connected to two adjacent electrode assemblies 31 in a row, and the middle part between the two ends of each hot wire 32 is perpendicular to the electrode assembly 31, and the ends of two hot wires 32 are connected to the same electrode assembly 31 at the same time, so that the multiple hot wires 32 connected to a row of electrode assemblies 31 are continuously arranged in a row to form a hot wire row.

[0051] In other embodiments, the connection method between the two ends of each hot wire and the electrode assembly is not limited to the upward bending form. It only requires that the hot wires can be arranged into multiple parallel rows. Specifically, they can be electrically connected to the electrode assembly in any manner, which is within the protection scope of the present invention.

[0052] In a specific embodiment, the ends of two hot wires are connected to the same electrode assembly at the same time. The positions of the two hot wires have multiple embodiments, as follows:

[0053] In the first embodiment, the ends of two hot wires are connected to the same electrode assembly at the same time, the ends of the two hot wires are in contact and located on the same plane, and the ends of the two hot wires are in direct contact to achieve conductive connection.

[0054] In the second embodiment, there is a gap between the ends of the two hot wires and they are located on the same plane. In this case, the two hot wires are electrically connected mainly through the motor assembly, and the hot wires will not directly interfere with each other.

[0055] In the third embodiment, there is a gap between the ends of the two hot wires, and the ends are located on two parallel planes, so that the hot wires are further separated to avoid interference.

[0056] The specific insulation installation form of the electrode assembly 31 has the following two embodiments:

[0057] In the first embodiment:

[0058] Each electrode assembly is directly mounted on the chamber cover in an insulated form. For example, the chamber cover is provided with corresponding holes for mounting the electrode assembly, and the electrode assembly has an insulating structure to be insulated from the chamber cover.

[0059] In the second embodiment:

[0060] Each row of electrode assemblies is installed in an insulated form on a mounting bar. Specifically, the electrode assemblies are connected to the insulating mounting bar, and corresponding mounting holes are provided on the mounting bar. The chamber cover is provided with a mounting groove at the position corresponding to the mounting bar. After the mounting bar is installed in the mounting groove, the surface of the mounting bar on which the electrode assemblies are installed is flush with the inner side surface of the chamber cover where the mounting groove is set (the side directly facing the substrate in the chamber).

[0061] The present invention also proposes two embodiments of the specific structure of the electrode assembly 31, which are as follows:

[0062] First embodiment,

[0063] The electrode assembly includes: an insulating mounting column mounted on the inner side of the chamber cover, and a conductive head arranged at the top of the insulating mounting column. One end of the insulating mounting column is connected to the chamber cover 2, which can be fixed by plugging or screw connection, and the other end of the insulating mounting column is sleeved with a conductive head, which can be electrically connected to the ends of the two hot wires 32; so that the two hot wires 32 are electrically connected.

[0064] Preferably, the insulating mounting column is made of ceramic, that is, a ceramic mounting column.

[0065] In the second embodiment, the electrode assembly 31 includes: a conductive mounting column, the conductive mounting column is conductive as a whole to achieve electrical conduction between the two hot wires connected thereto, and corresponding to this embodiment, a strip-shaped mounting groove is reserved on the chamber cover 2 for installing the insulating mounting bar, and one end of the conductive mounting column is connected to the insulating mounting bar and insulated (specifically, it can be connected by screws, or by setting an annular soft spring on the insulating mounting bar for clamping and fixing). The other end of the conductive mounting column is directly conductively connected to the end of the hot wire 32.

[0066] Preferably, the insulating mounting plate is a ceramic mounting plate.

[0067] In a further embodiment of the above-mentioned two electrode assemblies 31, the conductive head or the conductive mounting post can be connected to the fixed end of the hot wire 32 by clamping with a metal sheet, or by pressing with screws and a conductive wall (i.e., the wall surface of the conductive head or the conductive mounting post), or by only using screws (i.e., the conductive head or the conductive mounting post is provided with a screw hole) for conductive connection.

[0068] Furthermore, the conductive mounting column can be in the form of a ceramic seat coated on the outside of a conductive core, or in the form of a conductive sleeve coated on the outside of a ceramic core, which increases the temperature of the conductive part and reduces the deposition of the coating.

[0069] In a specific embodiment, two electrode assemblies 31 at both ends of each row of electrode assemblies 31 pass through the chamber cover 2, and are correspondingly provided with lead-out electrodes, that is, the lead-out electrodes are located outside the chamber cover 2, and the lead-out electrodes are electrically connected to the hot wire 32 inside the chamber through the electrode assembly 31. The two lead-out electrodes serve as input electrodes and output electrodes, respectively. By connecting the input electrodes and the output electrodes, multiple rows of hot wires 32 can be connected in series or in parallel outside the chamber.

[0070] Specifically, every four rows of hot wires 32 can be connected in series, and all the hot wires 32 are divided into four groups connected in series. For example, the lead-out electrode on the electrode assembly 31 corresponding to the rightmost end of the first row of hot wires 32 is connected to the negative pole of the power supply, and the lead-out electrode on the electrode assembly 31 corresponding to the rightmost end of the fourth row of hot wires 32 is connected to the positive pole of the power supply. This method can solve the problem of wire breakage, reduce the segregation distribution of active gas components under the action of the electric field and the electrical loss caused by film-induced conductivity, improve the stability of the hot wires 32, and improve the uniformity of the film quality.

[0071] Specifically, Figure 4 As shown, each row of electrode assemblies 31 is mounted on a mounting bar 33 (specifically, it can be the insulating mounting bar in the above embodiment), and a protruding connecting piece is provided on the side of the mounting bar 33 for passing through screws to be screwed to the bottom surface of the chamber cover 2. The chamber cover 2 is also provided with a mounting groove at a position corresponding to the mounting bar 33, so that the lower surface of the mounting bar 33 is flush with the bottom surface of the chamber cover 2.

[0072] In a specific embodiment, Figure 3 As shown, the air distribution device includes: two main pipes 411 and multiple branch pipes 412, the two main pipes 411 are arranged in parallel at intervals, and the multiple branch pipes 412 are connected to the position between the two main pipes 411 (that is, the two ends of each branch pipe 412 are respectively connected to the two main pipes 411), and are arranged in sequence along the length direction of the main pipes 411. The bottom surface of the branch pipe 412 is provided with air outlet holes 43 or air outlet parts at intervals along the length direction.

[0073] In other embodiments, more main pipelines may be provided, for example, three, four, etc., to improve the uniformity of the airflow.

[0074] The installation structure of the gas distribution device installed on the chamber cover plate has multiple embodiments, which are as follows:

[0075] First embodiment:

[0076] The bottom surface of the chamber cover 2 is provided with a groove for embedding the main pipe 411 and the branch pipe 412, so that the pipes will not exceed the bottom surface of the chamber cover 2, and a sealing plate can be provided at the position of the groove to cover the main pipe 411 and the branch pipe 412, so that the bottom surface of the chamber cover 2 remains flush. An air outlet 43 or an air outlet member (i.e., a spray pipe with an air outlet at the end) is provided on the sealing plate.

[0077] The outlet hole 43 of the branch pipe 412 is located above the hot wire 32. After the process gas 9 enters the vacuum chamber, it first flows through the main gas distribution pipe 411 and the branch pipe 412 to form a positive pressure state. Each gas distribution pipe has multiple small holes. Under the action of positive pressure and vacuum, it flows out of each outlet hole 43 evenly, and finally diffuses and reacts in the vacuum and gradually flows to the exhaust hole.

[0078] Specifically, each branch pipe 412 is located between two adjacent rows of heating wires 32 and is parallel to the arrangement direction of the heating wires 32 .

[0079] Second embodiment: reserved grooves are arranged in the chamber cover plate 2, and then the top plate is covered to cover the reserved grooves to form reserved channels, which serve as main pipes and branch pipes.

[0080] Specifically, the gas distribution device also includes: a distribution main pipe, a distribution sub-pipe and two distribution branch pipes, which are installed on the outer side surface of the chamber cover 2 (the side facing away from the bottom surface), and the pipe body is parallel to the outer side surface, wherein one end of the distribution main pipe is bent downward and connected to the special gas combiner sealing position (the special gas combiner sealing position is connected to the special gas cabinet), and the other end of the distribution main pipe is connected to the middle part of the distribution sub-pipe, and the two ends of the distribution sub-pipe are respectively connected to the middle parts of the two distribution branch pipes, and the two ends of each distribution branch pipe are correspondingly connected to a main pipeline 411 close to the two ends, so that the gas distribution device has multiple gas feeding points to ensure the outlet gas flow rate requirements of the outlet holes used in the cavity.

[0081] In other embodiments, the air distribution device includes an air distribution box, which is arranged in a row inside the chamber cover. The bottom surface of the air distribution box is provided with a plurality of air outlets, and the air outlet holes can be specifically arranged in an array above the hot wire.

[0082] Specifically, after installation, the ends of the spray pipes (i.e., the air outlets) of the branch pipes and the mounting strips for mounting the hot wire conductive components are flush with the inner side of the chamber cover facing the chamber, which can reduce airflow obstruction and scattering.

[0083] like Figure 1 , 2 As shown, the present invention further proposes a horizontal HWCVD device, specifically comprising: at least one trough body 1, a chamber cover plate 2 corresponding to each trough body 1, and a carrier conveying device arranged in the trough body 1 for conveying the carrier and a heater 6 for heating.

[0084] Each tank body 1 is provided with a transmission opening 11 on the left and right sides for passing the carrier to be transmitted. The transmission opening 11 can be directly connected to another adjacent chamber, or a valve that can be opened and closed can be provided to ensure that the inside of the chamber can be evacuated. The upper part of the tank body 1 is covered with a chamber cover plate 2 to close the upper part of the tank body 1 and form a chamber inside. The bottom of the tank body 1 is provided with an exhaust port 12 to evacuate the chamber in the tank body 1 to form a vacuum chamber.

[0085] Specifically, the carrier conveying device includes: a roller shaft 52, a roller 52, a magnetic fluid assembly and a motor 51. The roller shafts are arranged in parallel and spaced from the left side to the right side of the tank body 1. The roller shafts are sleeved with rollers 52. The carrier is laid on the rollers 52. The carrier can be conveyed from left to right or from right to left by the rollers 52. The roller shafts can be connected in series through a transverse transmission gear shaft (that is, each roller shaft is provided with an umbrella gear, and the gear shaft is also provided with an umbrella gear corresponding to each roller shaft) so that all roller shafts can be linked at the same time. A magnetic fluid assembly is sealed on the inner wall of the tank body 1. One end of the rotating shaft of the magnetic fluid assembly is connected to the roller shaft, and the other end extends out of the tank body 1 and is connected to the motor 51, so that the roller 52 in the tank body 1 can be driven by the external motor 51 to rotate and drive the carrier 8 to transmit, and the conveying direction of the carrier 8 can be changed by the forward and reverse rotation of the motor 51.

[0086] A heater 6 is arranged directly below the roller group consisting of a plurality of rollers for heating the chamber.

[0087] like Figure 5 As shown, a plurality of substrates 81 (in the form of half-sheets) are placed on the carrier. The substrates 81 can be arranged so that the length direction is consistent with the extension direction of the hot wire row, which can improve the uniformity of the film quality within the sheet.

[0088] Specifically, in order to make the flow direction of the airflow from the air distribution device perpendicular to the extension direction of the hot wire row composed of the hot wires and improve the heating efficiency of the hot wires, there are the following two embodiments.

[0089] First embodiment,

[0090] like Figure 2 As shown, the extension direction of the hot wire row composed of the hot wires is perpendicular to the conveying direction of the carrier, and baffles are provided in the slots located on both sides parallel to the conveying direction of the carrier (specifically located below the conveying device and between the heater and the inner wall of the slot body) to block the airflow, so that the airflow can only reach the exhaust hole from top to bottom through the slots in the forward and backward directions of the carrier (i.e., the left and right sides of the slot body 1). At this time, as shown in the figure, the airflow direction above the carrier is perpendicular to the extension direction of the hot wire row composed of the hot wires. While allowing the process gas to fully crack, it starts from the surface of the hot wire 32 evenly from the same direction and reaches the surface of the substrate 81 on the carrier at equal distances.

[0091] Second embodiment,

[0092] The extension direction of the hot wire row composed of the hot wires is parallel to the conveying direction of the carrier plate. Baffles are arranged at the gaps in the forward and backward directions of the carrier plate in the trough body to block the airflow, so that the airflow reaches the exhaust hole through the gaps on both sides parallel to the conveying direction of the carrier plate. At this time, the direction of the airflow above the carrier plate is still perpendicular to the extension direction of the hot wire row composed of the hot wires.

[0093] This flow conduction method can be used in conjunction with reciprocating dynamic coating or static coating. During dynamic coating, the roller rotates clockwise and counterclockwise at a relatively slow speed to achieve the reciprocating motion of the carrier (achieved by the forward and reverse rotation of the motor), which can further improve the uniformity as a method of changing the refractive index, band gap, microstructure factor and hydrogen content of the film layer.

[0094] It should be noted that the terms used above are only for describing specific embodiments and are not intended to limit exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0095] Unless otherwise specifically stated, the relative arrangement of the parts and steps described in these embodiments, numerical expressions and numerical values ​​do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, method and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, method and equipment should be regarded as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0096] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the devices or elements referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention. The directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0097] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0098] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A chamber cover plate for a horizontal HWCVD device, wherein the chamber cover plate is mounted on a tank body to form a chamber in the tank body, characterized in that: The chamber cover is provided with a hot wire conductive component and an air distribution device, a plurality of hot wires are connected to the hot wire conductive component, and the plurality of hot wires are continuously arranged in a plurality of rows, and the hot wires are located between the air outlet holes of the air distribution device and the substrate in the chamber, so that the gas coming out of the air outlet holes is heated by the hot wires before reaching the substrate.

2. The chamber cover plate according to claim 1, wherein: The chamber cover plate is installed above the trough body, and the air outlet holes of its air distribution device are facing downward; or the chamber cover plate is installed at the bottom of the trough body, and the air outlet holes of its air distribution device are facing upward.

3. The chamber cover plate according to claim 1, wherein: The hot wire conductive component includes: a plurality of insulated electrode components arranged on the chamber cover and facing the inner side of the chamber, the plurality of electrode components are arranged in a plurality of rows, and the two ends of the hot wire are electrically connected to two adjacent electrode components respectively.

4. The chamber cover plate according to claim 3, characterized in that: Each of the electrode assemblies is directly mounted on the chamber cover in an insulated form.

5. The chamber cover plate according to claim 3, characterized in that: Each row of the electrode assemblies is installed in an insulated form on a mounting bar, and a mounting groove is provided on the inner side surface of the chamber cover at a position corresponding to the mounting bar. After installation, the mounting bar is flush with the inner side surface of the chamber cover.

6. The chamber cover plate according to claim 3, characterized in that: The ends of two hot wires are connected to the same electrode assembly at the same time; the ends of the two hot wires are in contact and located on the same plane; or there is a gap between the ends of the two hot wires and they are located on the same plane; or there is a gap between the ends of the two hot wires and they are located on two parallel planes.

7. The chamber cover plate according to claim 3, wherein: The electrode assembly comprises: an insulating mounting post mounted on the inner side of the chamber cover plate, and a conductive head arranged on the top of the insulating mounting post.

8. The chamber cover plate according to claim 3, wherein: The electrode assembly comprises: a conductive mounting post, an insulating mounting strip for mounting the conductive mounting post is disposed on the inner side of the chamber cover, and the conductive mounting post is electrically conductive as a whole to achieve electrical conduction of the two heating wires.

9. The chamber cover plate according to claim 3, wherein: The electrode assemblies at both ends of each row of electrode assemblies pass through the chamber cover and serve as input electrodes and output electrodes of the electrode assemblies in a row respectively, and the input electrodes and output electrodes are insulated from the chamber cover. The input electrodes and output electrodes are directly connected to a power supply, or are connected in series or in parallel with the input electrodes and output electrodes of other rows of electrode assemblies and then connected to a power supply.

10. The chamber cover plate according to claim 1, wherein: The air distribution device comprises: a plurality of main pipes arranged in parallel at intervals, a plurality of branch pipes respectively connected to two of the main pipes at both ends, and air outlet holes or air outlet parts are arranged at intervals on the bottom surface of the branch pipes along the length direction.

11. The chamber cover plate according to claim 10, wherein: The bottom surface of the chamber cover plate is provided with grooves for embedding the main pipeline and the branch pipeline.

12. The chamber cover plate according to claim 10, wherein: The main pipeline and the branch pipeline are channels reserved inside the chamber cover plate.

13. The chamber cover plate according to claim 10, wherein: The spray pipe of each branch pipe is located between two adjacent rows of hot wires and is parallel to the length extension direction of the rows of hot wires.

14. The chamber cover plate according to claim 10, wherein: After being installed, the air outlet piece of the branch pipe and the mounting strip for mounting the hot wire conductive component are flush with the inner side of the chamber cover plate facing the chamber, thereby reducing airflow obstruction and scattering.

15. A horizontal HWCVD device, characterized in that: include: At least one trough body, a chamber cover as described in any one of claims 1 to 14 installed on the trough body, a carrier conveying device arranged in the trough body and a heater for heating, the carrier conveying device can convey the carrier to the bottom of the chamber cover where the hot wire row area is arranged, and the carrier is used to place a substrate.

16. The horizontal HWCVD device according to claim 15, characterized in that: Transmission openings for passing the carrier are provided on both sides of the trough body, and an exhaust hole is provided at the bottom of the trough body; the airflow reaches the exhaust hole through the gaps in the forward and backward directions of the carrier, or reaches the exhaust hole through the gaps on both sides parallel to the transmission direction of the carrier, so that the airflow direction of the airflow when flowing toward the gap is perpendicular to the extension direction of the hot wire row composed of the hot wires.

17. The horizontal HWCVD equipment according to claim 16, characterized in that: When the extension direction of the hot wire row formed by the hot wires is perpendicular to the conveying direction of the carrier, baffles are provided at the gaps on both sides of the slot body parallel to the conveying direction of the carrier to block the airflow, so that the airflow reaches the exhaust hole through the gaps in the forward and backward directions of the carrier.

18. The horizontal HWCVD equipment according to claim 16, characterized in that: When the extension direction of the hot wire row formed by the hot wires is parallel to the conveying direction of the carrier, baffles are provided at the gaps in the forward and backward directions of the carrier in the trough body to block the airflow, so that the airflow reaches the exhaust hole through the gaps on both sides parallel to the conveying direction of the carrier.

19. The horizontal HWCVD equipment according to claim 15, characterized in that: The length direction of the substrate is consistent with the extension direction of the hot wire row.

20. The horizontal HWCVD equipment according to claim 15, characterized in that: The carrier conveying device includes: a plurality of roller shafts spaced apart along the conveying direction, rollers arranged on the roller shafts, a magnetic fluid component sealed on the inner wall of the tank body and connected to the roller shafts, and a motor arranged outside the tank body and driving the roller shafts to rotate through the magnetic fluid component.

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