Crystal pulling device of single crystal furnace

Abstract

The invention belongs to the technical field of single crystal furnaces, and particularly relates to a single crystal furnace crystal pulling device which comprises a cylinder, two arc-shaped plates are rotatably connected to the lower end of the cylinder, a first cylindrical rod is slidably arranged in the cylinder, a cylindrical block is fixedly connected to the lower end of the first cylindrical rod through a third circular plate, and a graphite chuck is mounted at the lower end of the cylindrical block. A clamping assembly is arranged at the lower end of the third circular plate and comprises clamping plates connected to the periphery of the lower end of the third circular plate through telescopic assemblies, single crystal heating furnaces are placed at the lower ends of the two arc-shaped plates, the clamping plates are driven to clamp the end of a coarse crystal bar and synchronously move upwards along with fine crystals, the stress of the fine crystals is reduced, and the single crystal heating furnaces are heated. And the possibility of fracture of the fine grains caused by overlarge load of the fine grains is reduced, and the potential safety hazard in the crystal pulling process is reduced.

Description

Technical Field

[0001] The invention belongs to the technical field of single crystal furnaces, in particular to a single crystal furnace crystal pulling device. Background Art

[0002] With the development of the semiconductor industry and the photovoltaic industry, there is a greater market demand for monocrystalline silicon. Currently, the Czochralski method for growing monocrystalline silicon is the most widely used technology for producing monocrystalline silicon. When growing monocrystalline silicon by the Czochralski method, the single crystal furnace is the core production equipment. The single crystal furnace includes a heater, a crucible and a pulling head. The heater heats the silicon material in the crucible to a melt, and the pulling head immerses the seed crystal into the silicon melt, and grows and pulls the single crystal rod under the seed crystal.

[0003] A patent with the publication number CN114232071B discloses a single crystal furnace crystal pulling device, which performs the first shoulder release through a process, and then necks the crystal rod through a process to obtain a clamping part after the size of the crystal rod is larger than the clamping space, and lifts the outer shaft and the support plate under driving, so that the clamping part of the crystal rod is clamped on each clamping block, and then performs the second shoulder release on the crystal rod according to the process requirements, and pulls the crystal at a preset speed, so that the weight of the pulled crystal rod acts on the support plate, reducing the force on the fine crystal and reducing the possibility of the fine crystal breaking due to excessive load. The technical problem of the easy breakage of fine crystals in the growth process of large-diameter crystal rods in the prior art is solved; the technical effect of reducing the possibility of fine crystal breakage is achieved.

[0004] In the above-mentioned prior art, when pulling crystals, a graphite chuck is generally used to clamp the seed crystal, and the fine crystal is led out from the seed crystal, and then a cylindrical coarse crystal rod is formed by releasing the shoulders and retracting the shoulders. During the pulling out process of the large-diameter crystal rod, it is necessary to drive the graphite chuck to drive the seed crystal to move upward continuously. The entire weight of the pulled out coarse crystal rod is applied to the fine crystal. Since the diameters of the seed crystal and the fine crystal are relatively small, they are prone to breakage during high load and high crystal rotation, causing the crystal rod to fall and a production safety accident.

[0005] To this end, the present invention provides a single crystal furnace crystal pulling device. Summary of the invention

[0006] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0007] The technical solution adopted by the present invention to solve its technical problems is: a single crystal furnace crystal pulling device described in the present invention comprises a cylinder, the lower end of the cylinder is rotatably connected to two arc-shaped plates, a first cylindrical rod is slidably arranged in the cylinder, the lower end of the first cylindrical rod is fixedly connected to a cylindrical block through a third circular plate, a graphite chuck is installed at the lower end of the cylindrical block, a clamping assembly is provided at the lower end of the third circular plate, the clamping assembly comprises clamping plates connected around the lower end of the third circular plate by telescopic assemblies, and a single crystal heating furnace is placed at the lower ends of the two arc-shaped plates.

[0008] Preferably, a second circular plate is slidably connected inside the cylinder, a lower end of the second circular plate is rotatably connected to a first circular plate, and a lower end of the first circular plate is fixedly connected to the first cylindrical rod.

[0009] Preferably, the telescopic assembly includes a second cylindrical rod fixedly connected to the third circular plate, the lower ends of the second cylindrical rod are slidably connected to the third cylindrical rods, and the lower ends of the third cylindrical rods are fixedly connected to the clamping plates.

[0010] Preferably, the lower end of the third circular plate is rotatably connected to a fourth circular plate, and the edges of the fourth circular plate are respectively provided with a plurality of arc-shaped holes, and the second cylindrical rods can slide in the arc-shaped holes respectively.

[0011] Preferably, a first ring is fixedly connected to the lower end of the cylinder, a first fixed block is fixedly connected to one side of the first ring, a third ring is provided at the lower ends of the two arc-shaped plates, a second fixed block is fixedly connected to one side of the third ring, a fourth cylindrical rod is fixedly connected between the first fixed block and the second fixed block, and the two arc-shaped plates can rotate on the outside of the fourth cylindrical rod respectively.

[0012] Preferably, a fifth circular plate is slidably connected to the outer side of the cylindrical block, and waist-shaped holes are respectively provided on the edges of the fifth circular plate, and the second cylindrical rods can slide in the waist-shaped holes respectively.

[0013] Preferably, the third circular plate and the fifth circular plate are rotatably connected to the outer sides thereof with sliding components, and the sliding components include a second circular ring rotatably connected to the outer sides thereof with the third circular plate and the fifth circular plate, first rectangular blocks are fixedly connected around the edges of the second circular ring, and a ball is rotatably connected to the middle of the first rectangular block.

[0014] Preferably, one side of the cylinder is slidably connected to a cylindrical column via a connecting block, the cylindrical column is fixedly connected to the middle part of the U-shaped column, the lower end of the cylindrical column is fixedly connected to a first gear, the first gear is meshed with a second gear, the upper end of the second gear is fixedly connected to the output end of the motor, and the motor is fixedly connected to one side of the U-shaped column via a motor seat.

[0015] Preferably, rectangular holes are respectively provided in the middle of the arc-shaped plates, and clamping blocks are respectively slidably provided in the rectangular holes.

[0016] Preferably, a third U-shaped block is fixedly connected to the middle of the fourth cylindrical rod, a fifth cylindrical rod is fixedly connected to the middle of the third U-shaped block, the two ends of one side of the clamping block are respectively fixedly connected to the output ends of the electric telescopic rod, the electric telescopic rod is commonly fixedly connected to the second U-shaped block on the side away from the clamping block, the two ends of the second U-shaped block are respectively rotatably connected to connecting rods, and the connecting rods are rotatably connected to the fifth cylindrical rod through torsion springs.

[0017] The beneficial effects of the present invention are as follows: 1. The single crystal furnace crystal pulling device described in the present invention drives the graphite chuck to drive the seed crystal to contact the liquid surface of the single crystal silicon solution to form a fine crystal at the lower end, and the lower end of the fine crystal is formed into a coarse crystal rod through the steps of shoulder release and shoulder retraction, and then drives the telescopic component to drive the clamping plate to move downward, so that the clamping plate moves to the upper end of the coarse crystal rod, and then drives the clamping plate to move close to the side wall of the coarse crystal rod and clamp it at the same time, and drives the clamping plate to clamp the end of the coarse crystal rod and move upward synchronously with the fine crystal, thereby reducing the force on the fine crystal, reducing the possibility of fine crystal breakage due to excessive load of the fine crystal, and reducing the safety hazards in the crystal pulling process.

[0018] 2. The single crystal furnace crystal pulling device described in the present invention has a connecting rod connected to the fifth cylindrical rod through a torsion spring, so that the connecting rods on both sides always drive the second U-shaped block to rotate toward the side close to the arc plate, and then drive the electric telescopic rod to extend to drive the clamping block to approach both sides of the coarse crystal rod at the same time until it is against both sides of the coarse crystal rod, thereby preventing the coarse crystal rod in the middle from shaking and bumping when the clamping plate is driven to drive the coarse crystal rod in the middle to rotate toward one side of the single crystal heating furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be further described below in conjunction with the accompanying drawings.

[0020] Figure 1 is a three-dimensional diagram of the first embodiment of the present invention; Figure 2 It is a schematic diagram of a cross section of a cylinder; Figure 3 It is a schematic diagram of the internal explosion of the curved plate; Figure 4 is a schematic diagram of the sliding component structure; Figure 5 This is a schematic diagram of the single crystal heating furnace architecture; Figure 6 It is a schematic diagram of the cylindrical column structure; Figure 7 is a schematic diagram of the clamping block structure; In the figure: 1, cylinder; 12, first circular ring; 121, first fixed block; 13, arc plate; 131, rectangular hole; 14, first cylindrical rod; 141, first circular plate; 142, second circular plate; 143, third circular plate; 1431, second circular ring; 1432, first rectangular block; 1433, ball; 144, cylindrical block; 1441, graphite chuck; 145, fourth circular plate; 1451, arc hole; 1452, second cylindrical rod; 1453, third cylindrical Rod; 146, fifth circular plate; 1461, waist-shaped hole; 147, clamping plate; 15, third circular ring; 151, second fixed block; 16, fourth cylindrical rod; 161, third U-shaped block; 162, fifth cylindrical rod; 17, clamping block; 171, electric telescopic rod; 172, second U-shaped block; 173, connecting rod; 2, cylindrical column; 21, connecting block; 22, U-shaped column; 23, first gear; 24, second gear; 241, motor; 3, single crystal heating furnace. DETAILED DESCRIPTION

[0021] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods. Embodiment 1

[0022] like Figure 1-Figure 5 As shown, a single crystal furnace crystal pulling device described in an embodiment of the present invention includes a cylinder 1, the lower end of the cylinder 1 is rotatably connected to two arc-shaped plates 13, a first cylindrical rod 14 is slidably arranged in the cylinder 1, the lower end of the first cylindrical rod 14 is fixedly connected to a cylindrical block 144 through a third circular plate 143, a graphite chuck 1441 is installed at the lower end of the cylindrical block 144, a clamping assembly is provided at the lower end of the third circular plate 143, the clamping assembly includes a clamping plate 147 connected around the lower end of the third circular plate 143 by a telescopic assembly, and a single crystal heating furnace 3 is placed at the lower ends of the two arc-shaped plates 13.

[0023] Specifically, in the prior art, when producing single crystal silicon ingots, it is necessary to first melt the single crystal silicon at a high temperature, then contact the seed crystal with the liquid surface of the molten single crystal silicon solution, clamp the seed crystal with a graphite chuck, and directly seed the seed crystal by contacting the seed crystal with the liquid surface of the single crystal silicon. During the seeding process, a thin crystal will grow on the seed crystal, and then by controlling the temperature and the rotation and stretching speed, the pulled crystal ingot will be shouldered to form a thicker crystal ingot. The entire weight of the growing crystal ingot is then applied to the thin crystal. In the subsequent continuous growth of the crystal ingot, due to the increasing weight of the crystal ingot, the seed crystal will grow thinner and thicker. The weight of the fine crystals drawn out by the seed crystal is small. When the crystal rod is rotated with a large weight, it may break, thereby causing the crystal rod to fall and cause a production safety accident. When using the crystal pulling device, the single crystal silicon is placed in the single crystal heating furnace 3 for high-temperature melting to form a single crystal silicon solution. At this time, the two arc plates 13 are located at the upper end of the single crystal heating furnace 3, and then the graphite chuck 1441 is driven to clamp the seed crystal. Then, the first cylindrical rod 14 is driven to drive the graphite chuck 1441 to slide downward through the cylindrical block 144, so that the seed crystal contacts the single crystal silicon liquid surface. The cylindrical block 144 is then driven to drive the graphite chuck 1441 to slide upward in the cylinder 1. The graphite chuck 1441 drives the seed crystal to move upward, and the lower end of the seed crystal forms a fine crystal. Then, the upward movement speed and the rotation speed of the first cylindrical rod 141 are controlled to make the lower end of the fine crystal form a coarse crystal rod through the steps of shoulder release and shoulder retraction. Then, the telescopic component is driven to drive the clamping plate 147 to move downward, so that the clamping plate 147 moves to the surrounding of the upper end of the coarse crystal rod, and the clamping plates 147 are controlled by electric drive to move toward the side wall of the coarse crystal rod at the same time until the coarse crystal is Rod clamping, since the coarse crystal rod is located in the middle of several clamping plates 147, the clamping plates 147 can contact the coarse crystal rod at the same time, and then drive the first cylindrical rod 14 to move upward and rotate, drive the graphite chuck 1441 to drive the end of the fine crystal to move upward, drive the clamping plate 147 to clamp the coarse crystal rod and move upward and rotate synchronously with the fine crystal, by driving the clamping plate 147 to clamp the end of the coarse crystal rod and move upward synchronously with the fine crystal, the force on the fine crystal is reduced, the possibility of fine crystal breakage due to excessive load of the fine crystal is reduced, and the safety hazard in the crystal pulling process is reduced.

[0024] like Figure 3 As shown, a second circular plate 142 is slidably connected inside the cylinder 1 , a first circular plate 141 is rotatably connected to the lower end of the second circular plate 142 , and a lower end of the first circular plate 141 is fixedly connected to the first cylindrical rod 14 .

[0025] Specifically, when the crystal pulling operation is performed, the second circular plate 142 is driven to slide downward in the cylinder 1, so that the graphite chuck 1441 enters the single crystal heating furnace 3 and the seed crystal contacts the single crystal silicon solution, and then the first circular plate 141 is driven to rotate at the lower end of the second circular plate 142, and at the same time, the first circular plate 141 is driven to move upward in the cylinder 1, and by controlling the rotation speed of the second circular plate 142 and the upward movement speed of the first circular plate 141, the fine crystals at the lower end are driven to form coarse crystal rods through the steps of shoulder release and shoulder retraction.

[0026] like Figure 4 As shown, the telescopic assembly includes a second cylindrical rod 1452 fixedly connected to the third circular plate 143 , the lower ends of the second cylindrical rod 1452 are slidably connected to the third cylindrical rod 1453 , and the lower ends of the third cylindrical rod 1453 are fixedly connected to the clamping plates 147 .

[0027] Specifically, after the coarse crystal rod is formed at the lower end of the fine crystal, several third cylindrical rods 1453 are driven to move outward at the same time in the second cylindrical rod 1452, and at the same time, the clamping plates 147 are driven to be positioned around the upper end of the coarse crystal rod. Subsequently, the clamping plates 147 are driven to clamp the coarse crystal rod close to the side wall of the coarse crystal rod, and at the same time, the upper end of the fine crystal is clamped and moved upward together with the upper end of the coarse crystal rod, so as to reduce the force weight of the fine crystal and prevent the fine crystal from breaking.

[0028] like Figure 4 As shown, the lower end of the third circular plate 143 is rotatably connected to the fourth circular plate 145 , and the edges of the fourth circular plate 145 are respectively provided with a plurality of arc holes 1451 , and the second cylindrical rods 1452 can slide in the arc holes 1451 .

[0029] Specifically, by driving the fourth circular plate 145 to rotate at the lower end of the third circular plate 143, the rotation of the fourth circular plate 145 drives several second cylindrical rods 1452 to slide in the arc hole 1451 at the same time, so that several second cylindrical rods 1452 approach the middle at the same time, and the second cylindrical rod 1452 drives the clamping plate 147 to approach the side wall of the coarse crystal rod at the same time through the third cylindrical rod 1453 until the coarse crystal rod is clamped. By driving the fourth circular plate 145 to rotate, the clamping plate 147 can be driven by the second cylindrical rod 1452 to approach the coarse crystal rod at the same time, so that the force of each clamping plate 147 contacting the side wall of the coarse crystal rod is uniform, thereby preventing the coarse crystal rod from being clamped and deformed.

[0030] like Figure 3 As shown, a first circular ring 12 is fixedly connected to the lower end of the cylinder 1, a first fixed block 121 is fixedly connected to one side of the first circular ring 12, a third circular ring 15 is provided at the lower ends of the two arc-shaped plates 13, a second fixed block 151 is fixedly connected to one side of the third circular ring 15, a fourth cylindrical rod 16 is fixedly connected between the first fixed block 121 and the second fixed block 151, and the two arc-shaped plates 13 can rotate on the outside of the fourth cylindrical rod 16 respectively.

[0031] Specifically, when pulling crystals, in order to ensure the forming effect of the coarse crystal rods, the temperature needs to be precisely controlled. The pulled coarse crystal rods are located in the middle of the two arc-shaped plates 13. A sealing strip is provided between the two arc-shaped plates 13 to ensure that the internal temperature remains constant. When all the coarse crystal rods are pulled out, the arc-shaped plate 13 on one side is driven to rotate along the fourth cylindrical rod 16 to separate the two arc-shaped plates 13 to facilitate the removal of the coarse crystal rods inside.

[0032] like Figure 4 As shown, a fifth circular plate 146 is slidably connected to the outer side of the cylindrical block 144 , and waist-shaped holes 1461 are respectively provided on the edges of the fifth circular plate 146 , and the second cylindrical rods 1452 can slide in the waist-shaped holes 1461 .

[0033] Specifically, when the fourth circular plate 145 is driven to rotate, the second cylindrical rod 1452 is simultaneously moved toward the side wall of the coarse crystal rod in the waist-shaped hole 1461, driving the clamping plate 147 to clamp the coarse crystal rod. When the second cylindrical rod 1452 is limited by the waist-shaped hole 1461, it moves more smoothly and reduces shaking.

[0034] like Figure 4 As shown, the third circular plate 143 and the fifth circular plate 146 are rotatably connected to the outer sides thereof with sliding components, and the sliding components include a second circular ring 1431 rotatably connected to the outer sides thereof with the third circular plate 143 and the fifth circular plate 146, and first rectangular blocks 1432 are fixedly connected to the edges thereof around the second circular ring 1431, and a ball bearing 1433 is rotatably connected to the middle of the first rectangular block 1432.

[0035] Specifically, when the first cylindrical rod 14 drives the third circular plate 143 to move downward in the cylinder 1, the third circular plate 143 drives the fifth circular plate 146 to move downward through the cylindrical block 144. At this time, the third circular plate 143 rotates with the inner wall of the cylinder 1 through the ball 1433 of the sliding assembly, and the fifth circular plate 146 slides with the inner wall of the arc plate 13 through the ball 1433 of the sliding assembly. When pulling crystal, the ball 1433 slides close to the cylinder 1 and the side wall of the arc plate 13 to reduce the shaking of the coarse crystal rod. When pulling crystal, it is necessary to drive the graphite chuck 1441 to rotate. At this time, the third circular plate 143 and the fifth circular plate 146 rotate at the same time in the middle of the second ring 1431 to minimize the shaking of the crystal rod during the process of rotating and pulling out the crystal rod.

[0036] like Figure 6 As shown, one side of the cylinder 1 is slidably connected to a cylindrical column 2 via a connecting block 21, the cylindrical column 2 is fixedly connected to the middle of a U-shaped column 22, a first gear 23 is fixedly connected to the lower end of the cylindrical column 2, the first gear 23 is meshed with a second gear 24, the upper end of the second gear 24 is fixedly connected to the output end of a motor 241, and the motor 241 is fixedly connected to one side of the U-shaped column 22 via a motor seat.

[0037] Specifically, after the coarse crystal rod is completely pulled out, it is necessary to remove the coarse crystal rod for subsequent processing. When removing the coarse crystal rod, due to the high temperature of the single crystal heating furnace 3, the arc plate 13 needs to be rotated to one side of the single crystal heating furnace 3 before the coarse crystal rod can be removed. At this time, the driving motor 241 drives the second gear 24 to rotate, and the second gear 24 drives the cylindrical column 2 to rotate through the first gear 23. The cylindrical column 2 drives the cylinder 1 to rotate through the connecting block 21. The cylinder 1 drives the coarse crystal rod in the middle of the arc plate 13 to rotate to the upper end of the single crystal heating furnace 3, and then drives the arc plate 13 on one side to rotate to take out the coarse crystal rod. Embodiment 2

[0038] like Figure 7 As shown, compared with the first embodiment, another embodiment of the present invention is as follows: rectangular holes 131 are respectively provided in the middle of the arc-shaped plates 13 , and clamping blocks 17 are respectively slidably provided in the rectangular holes 131 .

[0039] Specifically, when the cylindrical column 2 is driven to rotate and the coarse crystal rod in the middle is driven to rotate to one side of the upper end of the single crystal heating furnace 3 through the arc plate 13, since the coarse crystal rod is in the shape of an elongated strip and has a large weight, it may cause the coarse crystal rod to shake during rotation, which may cause the coarse crystal rod to collide. When using the present crystal pulling device, the clamping blocks 17 on both sides are driven to slide in the middle of the arc plate 13 at the same time, and at the same time approach the two sides of the coarse crystal rod to fix the coarse crystal rod in the middle of the arc plate 13, and then the cylindrical column 2 is driven to drive the coarse crystal rod in the middle of the arc plate 13 to rotate to one side, and the clamping blocks 17 are fixed to prevent the coarse crystal rod from shaking in the middle of the arc plate 13 during rotation, thereby preventing collisions.

[0040] like Figure 7 As shown, a third U-shaped block 161 is fixedly connected to the middle of the fourth cylindrical rod 16, a fifth cylindrical rod 162 is fixedly connected to the middle of the third U-shaped block 161, output ends of an electric telescopic rod 171 are respectively fixedly connected to both ends of one side of the clamping block 17, a second U-shaped block 172 is commonly fixedly connected to the side of the electric telescopic rod 171 away from the clamping block 17, and connecting rods 173 are respectively rotatably connected to both ends of the second U-shaped block 172, and the connecting rods 173 are rotatably connected to the fifth cylindrical rod 162 through torsion springs.

[0041] Specifically, when the coarse crystal rod needs to be taken out, since the connecting rod 173 is connected to the fifth cylindrical rod 162 through a torsion spring, the connecting rods 173 on both sides always drive the second U-shaped block 172 to rotate toward the side close to the arc plate 13, and then drive the electric telescopic rod 171 to extend to drive the clamping block 17 to approach both sides of the coarse crystal rod at the same time until it is against both sides of the coarse crystal rod, and then drive the arc plate 13 to drive the coarse crystal rod in the middle to rotate to one side, and then drive the arc plate 13 on one side to rotate, and then take out the coarse crystal rod in the middle.

[0042] Working principle: when using the crystal pulling device, the single crystal silicon is placed in the single crystal heating furnace 3 for high-temperature melting to form a single crystal silicon solution. At this time, the two arc plates 13 are located at the upper end of the single crystal heating furnace 3, and then the graphite chuck 1441 is driven to clamp the seed crystal, and then the second circular plate 142 is driven to slide downward in the cylinder 1, so that the graphite chuck 1441 enters the single crystal heating furnace 3 and makes the seed crystal contact the single crystal silicon solution to form a fine crystal rod, and then the first circular plate 141 is driven to rotate at the lower end of the second circular plate 142, and at the same time, the first circular plate 141 is driven to move upward in the cylinder 1, and by controlling the rotation speed of the second circular plate 142 and the upward movement speed of the first circular plate 141, the fine crystal at the lower end is driven to form a coarse crystal rod through steps such as shoulder release and shoulder retraction, and then a plurality of third cylindrical rods 1453 are driven to move outward at the same time in the second cylindrical rod 1452, and at the same time drive the clamping plate 147 and the upper end of the coarse crystal rod around, and by driving the fourth circular plate 145 on the third circular plate 14 3, the lower end rotates, the fourth circular plate 145 rotates and drives the plurality of second cylindrical rods 1452 to slide in the arc hole 1451 at the same time, so that the plurality of second cylindrical rods 1452 approach the middle at the same time, and the second cylindrical rods 1452 drive the clamping plate 147 to approach the side wall of the coarse crystal rod through the third cylindrical rod 1453 at the same time, until the coarse crystal rod is clamped, by driving the fourth circular plate 145 to rotate, the clamping plate 147 can be driven by the second cylindrical rod 1452 to approach the coarse crystal rod at the same time, so that the force of each clamping plate 147 contacting the side wall of the coarse crystal rod is uniform, and the coarse crystal rod is prevented from being deformed by clamping, and the end of the fine crystal is driven to move upward by driving the graphite chuck 1441, and the clamping plate 147 is driven to clamp the coarse crystal rod and move upward simultaneously with the fine crystal, and the force on the fine crystal is reduced by driving the clamping plate 147 to clamp the end of the coarse crystal rod and move upward synchronously with the fine crystal, thereby reducing the possibility of fine crystal breakage due to excessive fine crystal load, and reducing safety hazards during crystal pulling; When the coarse crystal rod is completely pulled out, it is necessary to remove the coarse crystal rod for subsequent processing. Since the connecting rod 173 is connected to the fifth cylindrical rod 162 through a torsion spring, the connecting rods 173 on both sides always drive the second U-shaped block 172 to rotate toward the side close to the arc plate 13, and then drive the electric telescopic rod 171 to extend and drive the clamping block 17 to approach both sides of the coarse crystal rod at the same time until it is against both sides of the coarse crystal rod, and drive the second gear 24 to rotate through the driving motor 241, and the second gear 24 drives the cylindrical column 2 to rotate through the first gear 23, and the cylindrical column 2 drives the cylinder 1 to rotate through the connecting block 21, and the cylinder 1 drives the coarse crystal rod in the middle of the arc plate 13 to rotate to the upper end of the single crystal heating furnace 3, and then the arc plate 13 on one side is driven to rotate to take out the coarse crystal rod.

[0043] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A single crystal furnace crystal pulling device, comprising a cylinder (1), wherein the lower end of the cylinder (1) is rotatably connected to two arc-shaped plates (13), a first cylindrical rod (14) is slidably arranged in the cylinder (1), a cylindrical block (144) is fixedly connected to the lower end of the first cylindrical rod (14) through a third circular plate (143), a graphite chuck (1441) is installed at the lower end of the cylindrical block (144), and a clamping assembly is provided at the lower end of the third circular plate (143), characterized in that: The clamping assembly comprises a clamping plate (147) connected around the lower end of the third circular plate (143) via a telescopic assembly, and a single crystal heating furnace (3) is placed at the lower ends of the two arc-shaped plates (13).

2. A single crystal furnace crystal pulling device according to claim 1, characterized in that: A second circular plate (142) is slidably connected inside the cylinder (1), the lower end of the second circular plate (142) is rotatably connected to the first circular plate (141), and the lower end of the first circular plate (141) is fixedly connected to the first cylindrical rod (14).

3. A single crystal furnace crystal pulling device according to claim 1, characterized in that: The telescopic assembly comprises a second cylindrical rod (1452) fixedly connected to the third circular plate (143); the lower ends of the second cylindrical rod (1452) are slidably connected to the third cylindrical rod (1453); and the lower ends of the third cylindrical rods (1453) are fixedly connected to the clamping plates (147).

4. A single crystal furnace crystal pulling device according to claim 3, characterized in that: The lower end of the third circular plate (143) is rotatably connected to a fourth circular plate (145), and the edges of the fourth circular plate (145) are respectively provided with a plurality of arc-shaped holes (1451), and the second cylindrical rods (1452) are respectively able to slide in the arc-shaped holes (1451).

5. The single crystal furnace crystal pulling device according to claim 1, characterized in that: A first circular ring (12) is fixedly connected to the lower end of the cylinder (1), a first fixed block (121) is fixedly connected to one side of the first circular ring (12), a third circular ring (15) is provided at the lower ends of the two arc-shaped plates (13), a second fixed block (151) is fixedly connected to one side of the third circular ring (15), a fourth cylindrical rod (16) is fixedly connected between the first fixed block (121) and the second fixed block (151), and the two arc-shaped plates (13) are respectively capable of rotating outside the fourth cylindrical rod (16).

6. A single crystal furnace crystal pulling device according to claim 4, characterized in that: The outer side of the cylindrical block (144) is slidably connected to a fifth circular plate (146), edges of the fifth circular plate (146) are respectively provided with waist-shaped holes (1461), and the second cylindrical rods (1452) are respectively able to slide in the waist-shaped holes (1461).

7. A single crystal furnace crystal pulling device according to claim 6, characterized in that: The third circular plate (143) and the fifth circular plate (146) are rotatably connected to the outer sides thereof with sliding components, the sliding components comprising a second circular ring (1431) rotatably connected to the outer sides thereof with the third circular plate (143) and the fifth circular plate (146), first rectangular blocks (1432) being fixedly connected to the edges of the second circular ring (1431), and a ball bearing (1433) being rotatably connected to the middle of the first rectangular block (1432).

8. The single crystal furnace crystal pulling device according to claim 1, characterized in that: One side of the cylinder (1) is slidably connected to a cylindrical column (2) via a connecting block (21); the cylindrical column (2) is fixedly connected to the middle of a U-shaped column (22); a first gear (23) is fixedly connected to the lower end of the cylindrical column (2); the first gear (23) is meshed with a second gear (24); the upper end of the second gear (24) is fixedly connected to the output end of a motor (241); and the motor (241) is fixedly connected to one side of the U-shaped column (22) via a motor seat.

9. The single crystal furnace crystal pulling device according to claim 5, characterized in that: A rectangular hole (131) is respectively provided in the middle of the arc-shaped plate (13), and a clamping block (17) is respectively slidably arranged in the rectangular hole (131).

10. A single crystal furnace crystal pulling device according to claim 9, characterized in that: A third U-shaped block (161) is fixedly connected to the middle of the fourth cylindrical rod (16), a fifth cylindrical rod (162) is fixedly connected to the middle of the third U-shaped block (161), output ends of an electric telescopic rod (171) are respectively fixedly connected to two ends of one side of the clamping block (17), a second U-shaped block (172) is commonly fixedly connected to a side of the electric telescopic rod (171) away from the clamping block (17), connecting rods (173) are respectively rotatably connected to two ends of the second U-shaped block (172), and the connecting rods (173) are rotatably connected to the fifth cylindrical rod (162) via torsion springs.

Images