Vacuum sealing device cavity puncture device and method

Abstract

The invention discloses a vacuum sealing device cavity puncture device and method. The top of a residual gas analysis cavity of the puncture device is open and is provided with a driving mechanism in a sealed mode, the side face of the residual gas analysis cavity is provided with an observation window in a sealed mode, and the bottom of the residual gas analysis cavity is fixedly provided with a fixing tool and is provided with a vacuumizing connector. And an all-metal sealing structure is adopted, so that environmental gas leakage in the puncture process is reduced, the puncture process is controllable, and secondary pollution caused by residual gas is avoided. According to the vacuum sealing device placed in the residual gas analysis cavity subjected to sufficient evacuation treatment, the puncture needle and the vacuum sealing device can move relatively through the driving mechanism, the sealing face of the vacuum sealing device is damaged, and gas in the cavity of the vacuum sealing device is expanded into the residual gas analysis cavity. The puncture device solves the problems that in the existing puncture process, a dynamic sealing structure is prone to generating atmosphere leakage, the puncture process is invisible, and the puncture stroke cannot be accurately adjusted.

Description

Technical Field

[0001] The invention belongs to the field of vacuum measurement technology, and in particular relates to a vacuum sealing device cavity puncturing device and method. Background Art

[0002] Vacuum sealed devices used in aerospace, aviation and other fields, if the concentration of impurity gases such as water vapor, oxygen, hydrogen and carbon dioxide packaged inside is too high, it will cause corrosion, electrical performance parameter drift, electron migration and other hazards to the inside of the device, resulting in loss of device function. Therefore, the gas pressure and component content inside the cavity are one of the important indicators for evaluating the reliability of vacuum sealed device packaging.

[0003] Since the vacuum sealing device under test is usually a fully sealed structure and the residual gas content inside is very small, a puncture device under vacuum conditions is required to destroy the sealing surface of the vacuum sealing device under test. The traditional puncture device uses a dynamic sealing method to drive the puncture needle to move, which is prone to atmospheric leakage during use, the puncture process is invisible, and the puncture stroke cannot be accurately adjusted. Summary of the invention

[0004] The present invention provides a vacuum sealing device cavity puncturing device and method, the puncturing device has the advantages of good sealing effect, visible puncturing process, adjustable puncturing stroke and little secondary pollution of residual gas.

[0005] In order to achieve the above object, the present invention adopts the following specific technical solutions:

[0006] The present invention provides a vacuum sealing device cavity puncture device, the puncture device comprises a driving mechanism, a puncture needle, an observation window, a vacuum sealing device to be tested, a fixing tool and a residual gas analysis chamber;

[0007] The top of the residual gas analysis chamber is open and the driving mechanism is sealed and installed, the side is sealed and installed with the observation window, the bottom is fixedly installed with the fixing tool, and a vacuum interface is provided; the interior of the driving mechanism is connected with the interior of the residual gas analysis chamber to form a sealed cavity; the vacuum interface is used to connect the vacuum unit, and is used to make the vacuum degree in the residual gas analysis chamber reach the ultimate vacuum during puncture;

[0008] The fixing fixture is used to fix the vacuum sealing device to be tested in the residual gas analysis chamber;

[0009] The puncture needle is fixedly mounted on the bottom end of the driving mechanism;

[0010] The driving mechanism is used to drive the puncture needle to move back and forth in the vertical direction so as to puncture the vacuum sealing device to be tested and to detach from the vacuum sealing device to be tested after puncture;

[0011] The observation window is used to facilitate observation of the puncture needle in the residual gas analysis chamber.

[0012] Furthermore, it also includes a metal sealing flange and a metal sealing ring;

[0013] The bottom surface of the metal sealing flange is sealed and installed on the top surface of the residual gas analysis chamber through the metal sealing ring, and the top surface is sealed and connected with the driving mechanism.

[0014] Furthermore, the driving mechanism includes a valve handle, a driving component and a valve body;

[0015] The valve handle is installed on the driving component, and the driving component is reciprocated in the vertical direction by rotating the valve handle;

[0016] The driving component is mounted on the valve body by welding;

[0017] A bellows is provided inside the valve body, and the bellows is sealingly connected between the driving component and the metal sealing flange to achieve sealing;

[0018] The puncture needle is fixedly connected to the bottom end of the driving component.

[0019] Furthermore, the driving mechanism is a fully metal sealed vacuum valve;

[0020] The puncture needle is connected to the driving component by a fastener.

[0021] Furthermore, the observation window is a glass observation window, and is sealed with the residual gas analysis chamber by metal.

[0022] Furthermore, the residual gas analysis chamber is made of stainless steel with a low outgassing rate and is treated by a high-temperature hydrogen burning process.

[0023] Furthermore, the fixing fixture is detachably mounted on the residual gas analysis chamber by fasteners.

[0024] Furthermore, the vacuum sealing device to be tested is an electric vacuum device with a sealed cavity.

[0025] In addition, the present invention also provides a puncture method of the above vacuum sealing device cavity puncture device, the puncture method comprising the following steps:

[0026] Step 1, removing the driving mechanism from the residual gas analysis chamber;

[0027] Step 2: Install the puncture needle at the bottom end of the driving mechanism, and install the vacuum sealing device to be tested on the fixed fixture;

[0028] Step 3: Adjust the distance between the vacuum sealing device to be tested and the puncture needle to ensure that the distance between the puncture needle and the sealing surface of the vacuum sealing device to be tested is between 1 and 3 mm;

[0029] Step 4, sealingly connecting the driving mechanism to the residual gas analysis chamber;

[0030] Step 5, using a vacuum unit to evacuate the residual gas analysis chamber in which the vacuum sealing device to be tested is installed;

[0031] Step 6, turn off the vacuum unit, slowly adjust the drive mechanism, make the puncture needle fully contact with the sealing surface of the vacuum sealing device to be tested, and observe the position of the puncture needle through the observation window;

[0032] Step 7: driving the puncture needle downward by the driving mechanism until the puncture needle completely punctures the sealing surface of the vacuum sealing device to be tested;

[0033] Step eight, control the driving mechanism to move in the reverse direction so that the puncture needle is completely out of contact with the sealing surface of the vacuum sealing device under test, and at the same time observe the position of the puncture needle through the observation window to ensure that the distance between the puncture needle and the sealing surface of the vacuum sealing device under test is greater than 3 mm.

[0034] Furthermore, in the fifth step, the residual gas analysis chamber may be treated by high-temperature baking degassing and nitrogen replacement to ensure that the residual gas analysis chamber reaches the ultimate vacuum degree.

[0035] Compared with the prior art, the technical solution of the present invention has the following beneficial effects:

[0036] 1. The vacuum sealed device cavity puncture device of the present invention adopts an extremely high vacuum design, an all-metal sealing structure and an all-metal sealing vacuum valve driving mode to reduce the leakage of environmental gas during the puncture process, ensure that the puncture process is controllable, and no secondary pollution of residual gas occurs. It can significantly reduce the secondary pollution of the residual gas analysis cavity caused by the outgassing of the vacuum cavity surface and the atmospheric leakage of the dynamic sealing structure during the puncture process, and improve the accuracy of the residual gas analysis inside the cavity of the vacuum sealed device being tested.

[0037] 2. The use of all-metal sealed vacuum valves and residual gas analysis chambers with observation windows can meet the puncture test requirements of vacuum sealed devices of different specifications and sizes, and can achieve the advantages of visible puncture process and precise adjustment of puncture stroke.

[0038] 3. The working principle of the above-mentioned puncture device is: a vacuum sealing device is placed in the residual gas analysis chamber after sufficient evacuation. By adjusting the valve handle, the puncture needle installed at the front end of the driving component inside the valve body and the surface of the vacuum sealing device move relative to each other, thereby destroying the sealing surface of the vacuum sealing device, causing the gas inside the vacuum sealing device cavity to expand into the residual gas analysis cavity, thereby realizing the residual gas analysis inside the vacuum sealing device cavity.

[0039] 4. The puncture device can puncture the cavity of a vacuum-sealed device with a wall thickness of no more than 4 mm and a diameter of less than 50 mm, solving the problems of atmospheric leakage easily generated by the dynamic sealing structure during the use of the existing puncture method, the invisible puncture process and the inability to accurately adjust the puncture stroke. It can meet the puncture requirements during the accurate measurement of the residual gas content in the cavity of high-reliability vacuum-packaged components for aerospace and aviation, and provide an evaluation method for the material selection, production process, identification and inspection of packaged component products such as crystal oscillators, diodes, digital switching circuits, etc. with sealed cavities. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 It is a schematic diagram of the principle structure of the vacuum sealing device cavity puncture device of the present invention.

[0041] Reference numerals:

[0042] 1-residual gas analysis chamber; 2-puncture needle; 3-observation window; 4-metal sealing flange; 5-metal sealing ring; 6-vacuum sealing device to be tested; 7-fixing tooling; 8-valve handle; 9-driving component; 10-valve body; 11-bellows. DETAILED DESCRIPTION

[0043] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0044] Embodiment 1

[0045] This embodiment provides a vacuum sealing device cavity puncture device, such as Figure 1 As shown, the puncture device includes a residual gas analysis chamber 1, a driving mechanism, a puncture needle 2, an observation window 3, a metal sealing flange 4, a metal sealing ring 5, a vacuum sealing device to be tested 6 and a fixing tool 7;

[0046] The residual gas analysis chamber 1 is used to accommodate the vacuum sealing device 6 to be tested and the gas overflowed after the sealing surface of the vacuum sealing device 6 to be tested is punctured for residual gas analysis. The top of the residual gas analysis chamber 1 has an opening, which is convenient for the driving mechanism to drive the puncture needle 2 to enter the interior of the residual gas analysis chamber 1 through the top opening; the top of the residual gas analysis chamber 1 is sealed with a driving mechanism, and the inside of the driving mechanism is connected with the inside of the residual gas analysis chamber 1 through the top opening to form a sealed cavity; the sealing connection between the driving mechanism and the residual gas analysis chamber 1 can be achieved through a metal sealing flange 4 and a metal sealing ring 5. The bottom surface of the metal sealing flange 4 is sealed and installed on the top surface of the residual gas analysis chamber 1 through a metal sealing ring 5, and the top surface is sealed with a driving mechanism, and the puncture needle 2 is fixedly installed at the bottom end of the driving mechanism. A disposable metal sealing ring 5 is used to connect and seal the metal sealing flange 4 and the residual gas analysis chamber 1. When replacing the vacuum sealing device 6 to be tested, the metal sealing ring 5 needs to be replaced to ensure the sealing effect.

[0047] The driving mechanism can be replaced by a full-metal sealed vacuum valve. According to the size of the vacuum sealed device 6 to be tested, it can be selected from the full-metal sealed vacuum valves with three interfaces of DN16CF, DN40CF and DN63CF to meet the puncture requirements of vacuum sealed devices with a diameter not exceeding 50 mm; when the driving mechanism adopts a full-metal sealed vacuum valve, the driving mechanism includes a valve handle 8, a driving component 9 and a valve body 10; the valve handle 8 is installed on the driving component 9, and the reciprocating movement of the driving component 9 in the vertical direction is achieved by rotating the valve handle 8; the driving component 9 is installed on the valve body 10 by welding; a bellows 11 is arranged inside the valve body 10, and the bellows 11 is sealed and connected between the driving component 9 and the metal sealing flange 4 for achieving sealing; the puncture needle 2 is fixedly connected to the bottom end of the driving component 9 by a fastener, so that the puncture needle 2 can be driven to move in the vertical direction by the driving component 9. The specific working principle of the driving mechanism is as follows: the valve handle 8 is designed with a threaded hole, which can rotate around the center hole. A threaded lead screw is installed on the valve body 10. One end of the lead screw is connected to the valve handle 8 by thread, and the other end is connected to the valve body 10 by a slip-on flange. The valve handle 8, the lead screw and the slip-on flange are all in the atmospheric environment and are separated from the vacuum chamber by the bellows on the valve body 10. When working, the valve handle 8 is rotated to drive the lead screw to reciprocate, and the lead screw drives the valve body 10 and the bellows to reciprocate, finally realizing the movement of the driving component in the vacuum chamber and ensuring the vacuum seal.

[0048] An observation window 3 is installed on the side of the residual gas analysis chamber 1, and the observation window 3 is used to observe the position and movement state of the puncture needle 2 in the residual gas analysis chamber 1 with naked eyes; the observation window 3 can be a glass observation window 3; a metal seal is used between the glass observation window 3 and the residual gas analysis chamber 1. The observation window 3 is connected and fixed to the residual gas analysis chamber 1 by a metal seal, and the size is preferably such that the relative movement of the puncture needle 2 on the sealing surface of the vacuum sealing device 6 to be tested can be clearly observed.

[0049] A fixing fixture 7 is fixedly installed at the bottom of the residual gas analysis chamber 1; the fixing fixture 7 can be detachably installed on the residual gas analysis chamber 1 by fasteners, and the position adjustment of the fixing fixture 7 relative to the residual gas analysis chamber 1 can be achieved by disassembling the fasteners; the fixing fixture 7 is used to fix the vacuum sealing device 6 to be tested in the residual gas analysis chamber 1, and to make the vacuum sealing device 6 to be tested and the puncture needle 2 relatively arranged in the vertical direction; the residual gas analysis chamber 1 is provided with a vacuum extraction interface, which is used to connect the vacuum extraction unit, and is used to make the vacuum degree in the residual gas analysis chamber 1 reach the ultimate vacuum during puncture;

[0050] The driving mechanism is used to drive the puncture needle 2 to move back and forth in the vertical direction so as to puncture the vacuum sealing device 6 to be tested and to detach from the vacuum sealing device 6 to be tested after puncture;

[0051] The above-mentioned residual gas analysis chamber 1 is made of stainless steel material with low outgassing rate. All connection interfaces of the residual gas analysis chamber 1 are sealed by welding or metal sealing. High-temperature hydrogen burning treatment should be performed during the manufacturing process.

[0052] The vacuum sealed device 6 to be tested is an electric vacuum device with a sealed cavity, such as a microwave cavity, an infrared detector dewar, a crystal oscillator, a vacuum diode, etc., and the thickness of its package body is between 0.5 mm and 4 mm.

[0053] The above-mentioned vacuum sealed device cavity puncture device adopts an extremely high vacuum design, an all-metal sealing structure and an all-metal sealing vacuum valve driving method, which can significantly reduce the secondary contamination of the residual gas analysis cavity 1 caused by the outgassing of the vacuum cavity surface and the atmospheric leakage of the dynamic sealing structure during the puncture process, and improve the accuracy of the residual gas analysis inside the cavity of the tested vacuum sealed device 6. The use of an all-metal sealing vacuum valve and a residual gas analysis cavity 1 with an observation window 3 can meet the puncture test requirements of vacuum sealed devices of different specifications and sizes, and can achieve the advantages of visible puncture process and precise adjustment of puncture stroke.

[0054] The above-mentioned vacuum sealed device cavity puncture device can realize the puncture of the vacuum sealed device cavity with a wall thickness not exceeding 4mm and a diameter less than 50mm, which solves the problems that the dynamic sealing structure is prone to atmospheric leakage during the use of the existing puncture method, the puncture process is invisible and the puncture stroke cannot be accurately adjusted. It can meet the puncture needs in the process of accurately measuring the residual gas content in the cavity of high-reliability vacuum packaged components for aerospace and aviation, and provides an evaluation method for the material selection, production process, identification and inspection of packaged component products such as electronic components with sealed cavities, such as crystal oscillators, diodes, digital switching circuits, etc.

[0055] Embodiment 2

[0056] This embodiment provides a puncturing method of the vacuum sealing device cavity puncturing device in the above embodiment, and the puncturing method comprises the following steps:

[0057] Step 1: Remove the driving mechanism from the residual gas analysis chamber 1; when the driving mechanism adopts a full metal sealing vacuum valve, remove the full metal sealing vacuum valve composed of a valve handle 8, a driving component 9 and a valve body 10 from the residual gas analysis chamber 1 at the metal sealing flange 4;

[0058] Step 2: Install the puncture needle 2 at the bottom end of the driving mechanism, and install the vacuum sealing device 6 to be tested on the fixing fixture 7 through fasteners;

[0059] Step 3: Adjust the distance between the vacuum sealing device 6 to be tested and the puncture needle 2 to ensure that the distance between the puncture needle 2 and the sealing surface of the vacuum sealing device 6 to be tested is between 1 and 3 mm;

[0060] Step 4: seal and connect the driving mechanism to the residual gas analysis chamber 1; take an unused metal sealing ring 5, and connect the all-metal sealed vacuum valve composed of the valve handle 8, the driving component 9 and the valve body 10 to the residual gas analysis chamber 1 through the metal sealing ring 5;

[0061] Step 5: Use a vacuum pump to evacuate the residual gas analysis chamber 1 installed with the vacuum sealing device 6 to be tested; if necessary, adopt high-temperature baking degassing, nitrogen replacement and other methods to ensure that the ultimate vacuum degree and leakage rate of the residual gas analysis chamber 1 meet the test requirements;

[0062] Step 6: According to the test requirements, close the vacuum unit, slowly adjust the valve handle 8 of the driving mechanism, so that the puncture needle 2 is in full contact with the sealing surface of the vacuum sealing device 6 to be tested, and observe the position of the puncture needle 2 through the glass observation window 3;

[0063] Step 7: Slowly increase the adjustment force of the valve handle 8 of the driving mechanism to drive the puncture needle 2 to move downward until the puncture needle 2 completely punctures the sealing surface of the vacuum sealing device 6 to be tested;

[0064] Step eight, control the driving mechanism to move in the reverse direction, that is, adjust the valve handle 8 in the opposite direction so that the puncture needle 2 is completely out of contact with the sealing surface of the vacuum sealing device 6 to be tested. While adjusting the valve handle 8, observe the position state of the puncture needle 2 through the glass observation window 3 to ensure that the distance between the puncture needle 2 and the sealing surface of the vacuum sealing device 6 to be tested is greater than 3 mm.

[0065] Obviously, those skilled in the art can make various changes and modifications to the embodiments of the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A vacuum sealed device cavity puncture device, characterized in that: It includes a driving mechanism, a puncture needle, an observation window, a vacuum sealing device to be tested, a fixing tool and a residual gas analysis chamber; The top of the residual gas analysis chamber is open and the driving mechanism is sealed and installed, the side is sealed and installed with the observation window, the bottom is fixedly installed with the fixing tool, and a vacuum interface is provided; the interior of the driving mechanism is connected with the interior of the residual gas analysis chamber to form a sealed cavity; the vacuum interface is used to connect the vacuum unit, and is used to make the vacuum degree in the residual gas analysis chamber reach the ultimate vacuum during puncture; The fixing fixture is used to fix the vacuum sealing device to be tested in the residual gas analysis chamber; The puncture needle is fixedly mounted on the bottom end of the driving mechanism; The driving mechanism is used to drive the puncture needle to move back and forth in the vertical direction so as to puncture the vacuum sealing device to be tested and to detach from the vacuum sealing device to be tested after puncture; The observation window is used to facilitate observation of the puncture needle in the residual gas analysis chamber.

2. The puncture device according to claim 1, characterized in that: Also includes a metal sealing flange and a metal sealing ring; The bottom surface of the metal sealing flange is sealed and installed on the top surface of the residual gas analysis chamber through the metal sealing ring, and the top surface is sealed and connected with the driving mechanism.

3. The puncture device according to claim 2, characterized in that: The driving mechanism includes a valve handle, a driving component and a valve body; The valve handle is installed on the driving component, and the driving component is reciprocated in the vertical direction by rotating the valve handle; The driving component is mounted on the valve body by welding; A bellows is provided inside the valve body, and the bellows is sealingly connected between the driving component and the metal sealing flange to achieve sealing; The puncture needle is fixedly connected to the bottom end of the driving component.

4. The puncture device according to claim 3, characterized in that: The driving mechanism is a full metal sealed vacuum valve; The puncture needle is connected to the driving component by a fastener.

5. The puncture device according to claim 1, characterized in that: The observation window is a glass observation window, and is sealed with the residual gas analysis chamber by metal.

6. The puncture device according to claim 1, characterized in that: The residual gas analysis chamber is made of stainless steel material with low outgassing rate and is processed by a high-temperature hydrogen burning process.

7. The puncture device according to claim 1, characterized in that: The fixing fixture is detachably mounted on the residual gas analysis chamber by fasteners.

8. The puncture device according to claim 1, characterized in that: The vacuum sealing device to be tested is an electric vacuum device with a sealed cavity.

9. A puncturing method using the vacuum sealing device cavity puncturing device according to any one of claims 1 to 8, characterized in that: The following steps are involved: Step 1, removing the driving mechanism from the residual gas analysis chamber; Step 2: Install the puncture needle at the bottom end of the driving mechanism, and install the vacuum sealing device to be tested on the fixed fixture; Step 3: Adjust the distance between the vacuum sealing device to be tested and the puncture needle to ensure that the distance between the puncture needle and the sealing surface of the vacuum sealing device to be tested is between 1 and 3 mm; Step 4, sealingly connecting the driving mechanism to the residual gas analysis chamber; Step 5, using a vacuum unit to evacuate the residual gas analysis chamber in which the vacuum sealing device to be tested is installed; Step 6, turn off the vacuum unit, slowly adjust the drive mechanism, make the puncture needle fully contact with the sealing surface of the vacuum sealing device to be tested, and observe the position of the puncture needle through the observation window; Step 7: driving the puncture needle downward by the driving mechanism until the puncture needle completely punctures the sealing surface of the vacuum sealing device to be tested; Step eight, control the driving mechanism to move in the reverse direction so that the puncture needle is completely out of contact with the sealing surface of the vacuum sealing device under test, and at the same time observe the position of the puncture needle through the observation window to ensure that the distance between the puncture needle and the sealing surface of the vacuum sealing device under test is greater than 3 mm.

10. The puncture method according to claim 9, characterized in that: In the fifth step, the residual gas analysis chamber may be treated by high-temperature baking degassing and nitrogen replacement to ensure that the residual gas analysis chamber reaches the ultimate vacuum degree.

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