Plate-shaped piezoelectric linear motor based on in-plane first-order bending longitudinal mode

Abstract

The invention provides a plate-shaped piezoelectric linear motor based on an in-plane first-order bending longitudinal mode, and belongs to piezoelectric motors. The motor is composed of a plate-shaped stator and a linear guide rail, the plate-shaped stator comprises a single driving foot made of wear-resistant materials and a vibrator body made of piezoelectric ceramics, and the linear guide rail is pressed on the single driving foot through pre-pressure. The oscillator body is provided with three (or'two ') polarization subareas, wherein the left polarization subarea and the right polarization subarea (or the left polarization subarea) form an A phase, and the middle polarization subarea (or the right polarization subarea) forms a B phase. Two orthogonal working modes of the stator are respectively an in-plane first-order bending vibration mode and a first-order symmetrical longitudinal vibration mode, two paths of sinusoidal signals with the phase difference of pi / 2 are applied to the A phase and the B phase of the stator, and the two orthogonal working modes of the stator are excited at the same time, so that mass points on the contact surface of the single driving foot generate elliptic motion, and a guide rail is driven through the friction effect. Compared with an existing piezoelectric motor, the motor adopts a low-order working mode, and the operation speed and the operation stability of the motor are higher.

Description

Technical Field

[0001] The present invention belongs to the technical field of piezoelectric motors, and in particular relates to a plate-shaped piezoelectric linear motor based on an in-plane first-order bending longitudinal mode. Background Art

[0002] Piezoelectric motor is a new type of power output device that uses the inverse piezoelectric effect of piezoelectric ceramics. Compared with traditional electromagnetic motors, piezoelectric motors have the advantages of low speed and high torque, fast transient response, high positioning accuracy, good control characteristics, no magnetic field and no magnetic field. It has broad application prospects in precision drive, chip manufacturing, medical equipment, automobiles, aerospace and other fields.

[0003] After searching the literature on existing plate-shaped piezoelectric motors whose vibrator bodies are made of piezoelectric ceramic materials, it was found that the patent owner is Nanomotion Ltd and the patent number is U.S. Patent No. 5453653, "Ceramic The "Motor" describes in detail a single-drive-foot plate-shaped piezoelectric motor, which has the following typical features: the stator of the motor is in a plate shape as a whole, including a vibrator body (a rectangular block made of piezoelectric ceramic material) and a single drive foot (made of wear-resistant material); the vibrator body is provided with four evenly distributed polarization partitions, the four polarization partitions are polarized along the thickness direction and have the same polarization direction, and the two diagonally distributed polarization partitions are electrically connected to form one phase of the stator, thereby forming two phases A and B of the stator; the single drive foot is bonded to the vibrator body as a whole to form the stator; the two orthogonal working modes of the stator are the first-order longitudinal vibration mode and the second-order bending vibration mode, respectively; when the A phase (or "B phase") of the stator is single-phase input with a sinusoidal wave excitation signal, the two orthogonal working modes of the stator will be excited simultaneously, at this time, the particles on the contact interface between the drive foot and the guide rail will produce an inclined (or "reversely inclined and oppositely turned") elliptical motion trajectory, and the guide rail will produce a forward (or "reverse") motion.

[0004] During the search, it was found that the monograph "Ultrasonic Motor Technology and Application" (written by Zhao Chunsheng) published by Science Press in September 2007 mentioned that the patent owner is Nanomotion Ltd. The patent number is 5453653 and the single-drive foot-plate piezoelectric motor has been successfully and widely used in precision drive and other fields.

[0005] From the above analysis, it can be seen that the shortcoming of the single-drive footplate-shaped piezoelectric motor described in the U.S. patent "Ceramic Motor" with patent number 5453653 owned by Nanomotion Ltd is that: although the Nanomotion piezoelectric motor has been successfully and widely used in fields such as precision drive, from the perspective of scientific and technological progress, it should be optimized based on the first-order longitudinal vibration and second-order bending vibration working modes of the Nanomotion piezoelectric motor, and a new and better working mode should be adopted for the development of new piezoelectric motors.

[0006] One way to solve this problem is to develop a new type of piezoelectric motor by optimizing the design by using a lower-order working mode combination (with better vibration energy utilization and operation stability) based on the two orthogonal working modes of the Nanomotion piezoelectric motor, namely the first-order longitudinal vibration and the second-order bending vibration. Summary of the invention

[0007] In view of the above problems, the present invention proposes a plate-shaped piezoelectric linear motor based on the first-order bending longitudinal mode in the plane, which adopts a lower-order working mode combination, can realize forward and reverse motion, has a simple structure, a large thrust-to-weight ratio, high excitation efficiency, high vibration energy utilization rate, and a fast response speed. The piezoelectric motor of the present invention is expected to have broad application prospects in the fields of precision drive, chip manufacturing, medical equipment, aerospace, automobiles, etc.

[0008] The specific technical solutions are as follows:

[0009] A plate-shaped piezoelectric linear motor based on an in-plane first-order bending longitudinal mode, characterized in that: the plate-shaped piezoelectric linear motor is composed of a plate-shaped stator and a linear guide, the plate-shaped stator includes a first vibrator body and a second vibrator body, a first single driving foot and a second single driving foot, the first single driving foot and the second single driving foot are respectively combined with the first vibrator body and the second vibrator body as a whole by bonding, welding or sintering, the linear guide includes a first linear guide and a second linear guide, the first linear guide and the second linear guide are correspondingly pressed on the first single driving foot and the second single driving foot under the action of pre-pressure; the first vibrator body contains three non-uniformly distributed polarization partitions, the second vibrator body contains two uniformly distributed polarization partitions of the same size, and the polarization direction is polarized along the thickness direction of the plate-shaped stator, thereby forming a non-uniformly distributed three-partition structure of piezoelectric ceramics and a uniformly distributed two-partition structure of piezoelectric ceramics;

[0010] The piezoelectric ceramic non-uniformly distributed three-partition structure includes a first left polarization partition, a first right polarization partition and a middle polarization partition, wherein the polarization directions of the first left polarization partition, the first right polarization partition and the middle polarization partition are polarized along the thickness direction of the first vibrator body, wherein the polarization direction of the first left polarization partition is opposite to the polarization direction of the first right polarization partition, and the polarization direction of the middle polarization partition is the same as the polarization direction of the first left polarization partition or the polarization direction of the first right polarization partition; on the front surface in the thickness direction of the first vibrator body, three mutually sintered The insulated silver layer electrodes are respectively a first left silver layer electrode corresponding to the first left polarization partition, a first right silver layer electrode corresponding to the first right polarization partition, and a middle silver layer electrode corresponding to the middle polarization partition, wherein the first left silver layer electrode corresponding to the first left polarization partition and the first right silver layer electrode corresponding to the first right polarization partition are connected to form the A phase of the plate-shaped stator, and the middle silver layer electrode corresponding to the middle polarization partition alone forms the B phase of the plate-shaped stator; on the rear surface of the first vibrator body in the thickness direction, a whole first rear silver layer electrode is sintered for grounding;

[0011] The piezoelectric ceramic is evenly distributed in a two-partition structure: including a second left polarization partition and a second right polarization partition, wherein the polarization direction of the second left polarization partition and the second right polarization partition is polarized along the thickness direction of the second vibrator body, wherein the polarization direction of the second left polarization partition is the same as or opposite to the polarization direction of the second right polarization partition; on the front surface in the thickness direction of the second vibrator body, two mutually insulated silver layer electrodes are sintered, which are respectively a second left silver layer electrode corresponding to the second left polarization partition and a second right silver layer electrode corresponding to the second right polarization partition, wherein the second left silver layer electrode corresponding to the second left polarization partition alone constitutes the A phase of the plate-shaped stator, and the second right silver layer electrode corresponding to the second right polarization partition alone constitutes the B phase of the plate-shaped stator; on the rear surface in the thickness direction of the second vibrator body, a whole second rear silver layer electrode is sintered for grounding;

[0012] The two orthogonal working modes of the plate-shaped stator in the piezoelectric ceramic non-uniformly distributed three-partition structure or the piezoelectric ceramic uniformly distributed two-partition structure are respectively the first-order bending vibration mode in the plane and the first-order symmetrical longitudinal vibration mode. Two sinusoidal signals with a phase difference of π / 2 are simultaneously applied to the A and B phases of the plate-shaped stator, and the two orthogonal working modes of the plate-shaped stator are simultaneously excited, so that the particles on the contact surfaces of the first single driving foot and the second single driving foot produce elliptical motion, and the first linear guide and the second linear guide are correspondingly driven through friction.

[0013] The piezoelectric ceramic non-uniformly distributed three-partition structure or the piezoelectric ceramic uniformly distributed two-partition structure based on the in-plane first-order bending longitudinal mode plate-shaped piezoelectric linear motor can be extended to the corresponding metal-bonded double-sided six-piece piezoelectric ceramic structure or metal-bonded double-sided four-piece piezoelectric ceramic structure with equivalent technology.

[0014] As a preferred technical solution of the present invention: the plate-shaped stator is composed of six double-sided piezoelectric ceramics symmetrically pasted or welded on the front and rear surfaces of the first single-leg plate-shaped metal body in the thickness direction, or is composed of four double-sided piezoelectric ceramics symmetrically pasted or welded on the front and rear surfaces of the second single-leg plate-shaped metal body in the thickness direction, thereby forming a metal-pasted double-sided six-piece piezoelectric ceramic structure or a metal-pasted double-sided four-piece piezoelectric ceramic structure.

[0015] As a preferred technical solution of the present invention: the metal-bonded double-sided six-piece piezoelectric ceramic structure contains a total of six piezoelectric ceramic sheets, namely a first front left piezoelectric ceramic sheet, a first front right piezoelectric ceramic sheet, a front middle piezoelectric ceramic sheet, a first rear left piezoelectric ceramic sheet, a first rear right piezoelectric ceramic sheet, and a rear middle piezoelectric ceramic sheet. Bonded to the front surface of the first single-legged plate-shaped metal body in the thickness direction are two first front left piezoelectric ceramic sheets and a first front right piezoelectric ceramic sheet of the same size and a front middle piezoelectric ceramic sheet. Symmetrically bonded to the rear surface of the single-legged plate-shaped metal body in the thickness direction are another two first rear left piezoelectric ceramic sheets and a first rear right piezoelectric ceramic sheet of the same size and another rear middle piezoelectric ceramic sheet.

[0016] The polarization directions of the double-sided six-piece piezoelectric ceramic structure are all polarized along the thickness direction of the monopod plate-shaped metal body, wherein the polarization direction of the first front left piezoelectric ceramic sheet is opposite to that of the first front right piezoelectric ceramic sheet, the polarization direction of the front middle piezoelectric ceramic sheet is the same as that of the first front left piezoelectric ceramic sheet or the first front right piezoelectric ceramic sheet, and the first rear left piezoelectric ceramic sheet, the first rear right piezoelectric ceramic sheet and the rear middle piezoelectric ceramic sheet symmetrically attached to the rear surface of the first monopod plate-shaped metal body in the thickness direction have polarization directions symmetrical to those of the first front left piezoelectric ceramic sheet, the first front right piezoelectric ceramic sheet and the front middle piezoelectric ceramic sheet;

[0017] The first single-legged plate-shaped metal body is used for grounding, the first front left piezoelectric ceramic sheet, the first front right piezoelectric ceramic sheet, the first rear left piezoelectric ceramic sheet and the first rear right piezoelectric ceramic sheet are connected to form the A phase of the plate-shaped stator, and the front middle piezoelectric ceramic sheet and the rear middle piezoelectric ceramic sheet are connected to form the B phase of the plate-shaped stator.

[0018] As a preferred technical solution of the present invention: the metal-pasted double-sided four-piece piezoelectric ceramic structure contains a total of four piezoelectric ceramic sheets, namely a second front left piezoelectric ceramic sheet, a second front right piezoelectric ceramic sheet, a second rear left piezoelectric ceramic sheet, and a second rear right piezoelectric ceramic sheet. Pasted on the front surface of the second single-legged plate-shaped metal body in the thickness direction are two second front left piezoelectric ceramic sheets and a second front right piezoelectric ceramic sheet of the same size. symmetrically pasted on the rear surface of the second single-legged plate-shaped metal body in the thickness direction are another two second rear left piezoelectric ceramic sheets and a second rear right piezoelectric ceramic sheets of the same size.

[0019] The polarization directions of the double-sided four-piece piezoelectric ceramic structure are all polarized along the thickness direction of the second single-foot plate-shaped metal body, wherein the polarization direction of the second front left piezoelectric ceramic sheet is the same as or opposite to the polarization direction of the second front right piezoelectric ceramic sheet, and the second rear left piezoelectric ceramic sheet and the second rear right piezoelectric ceramic sheet symmetrically attached to the rear surface of the second single-foot plate-shaped metal body in the thickness direction have polarization directions symmetrical to those of the second front left piezoelectric ceramic sheet and the second front right piezoelectric ceramic sheet;

[0020] The second single-legged plate-shaped metal body is used for grounding, the second front left piezoelectric ceramic sheet and the second rear left piezoelectric ceramic sheet are connected to form the A phase of the plate-shaped stator; the second front right piezoelectric ceramic sheet and the second rear right piezoelectric ceramic sheet are connected to form the B phase of the plate-shaped stator of the motor.

[0021] As a preferred technical solution of the present invention: the two orthogonal working modes of the plate-shaped stator of the metal-bonded double-sided six-piece piezoelectric ceramic structure or the metal-bonded double-sided four-piece piezoelectric ceramic structure are respectively the first-order bending vibration mode in the plane and the first-order symmetrical longitudinal vibration mode; the first single-foot plate-shaped metal body and the second single-foot plate-shaped metal body are respectively provided with a single driving foot of the first metal material and a single driving foot of the second metal material, and also include a third linear guide and a fourth linear guide; the third linear guide and the fourth linear guide are pressed on the single driving foot of the first metal material and the single driving foot of the second metal material by pre-pressure; two sinusoidal signals with a phase difference of π / 2 are simultaneously applied to the A and B phases of the plate-shaped stator, and the two orthogonal working modes of the plate-shaped stator are simultaneously excited, so that the particles on the contact surface of the single driving foot of the first metal material and the single driving foot of the second metal material produce elliptical motion, and the third linear guide and the fourth linear guide are driven by friction.

[0022] As a preferred technical solution of the present invention: the first-order symmetrical longitudinal vibration mode is used to provide normal vibration components of the first single driving foot and the second single driving foot, the single driving foot of the first metal material and the single driving foot of the second metal material, and its vibration mode is an atypical first-order longitudinal vibration vibration mode: the amplitude of the "four corners of the cube" is almost zero, and the amplitude increases as it transitions from the "four corners of the cube" to the "center of the four sides of the cube", and the amplitude of the "center of the four sides of the cube" is the largest, and the vibration modes of the areas near the tangential and normal central axes of the cube are similar to the first-order longitudinal vibration vibration modes and are symmetrical;

[0023] The first-order bending vibration mode is used to provide tangential vibration components of the first single driving foot and the second single driving foot, the single driving foot of the first metal material and the single driving foot of the second metal material, and its vibration mode is a typical first-order bending vibration vibration mode.

[0024] As a preferred technical solution of the present invention: the first single driving foot, the second single driving foot, the single driving foot of the first metal material and the single driving foot of the second metal material are triangular block-shaped, semi-spherical or arc-top cylindrical structures; the shape of the first vibrator body and the second vibrator body is a cube-like shape, which is made of piezoelectric ceramic material; the first single-foot plate-shaped metal body and the second single-foot plate-shaped metal body are approximate cubes made of metal materials; the first single driving foot and the second single driving foot are made of wear-resistant materials.

[0025] Beneficial effects:

[0026] Compared with the prior art, the innovation of the present invention is:

[0027] (1) Structural innovation: Compared with the Nanomotion piezoelectric motor in the prior art, the plate-shaped piezoelectric motor of the present invention optimizes and simplifies the prior art "uniformly distributed four-polarized partitions of piezoelectric ceramics" structure into a "non-uniformly distributed three-polarized partitions of piezoelectric ceramics" or "uniformly distributed two-polarized partitions of piezoelectric ceramics", which effectively improves the utilization rate of piezoelectric ceramics during operation, simplifies the manufacturing process and reduces the manufacturing cost;

[0028] (2) Innovation in driving principle: Compared with the Nanomotion piezoelectric motor in the prior art, the plate-shaped piezoelectric motor of the present invention optimizes the two orthogonal working modes of the first-order longitudinal vibration combined with the second-order bending vibration of the background technology into two orthogonal working modes of the first-order bending vibration combined with the first-order symmetrical longitudinal vibration, adopts a lower-order working mode combination, and has better vibration energy utilization and operation stability.

[0029] In summary, compared with the Nanomotion piezoelectric motor in the prior art, the plate-shaped piezoelectric linear motor based on the in-plane first-order bending longitudinal mode proposed in the present invention can not only provide greater output power and better stability in theory, but also has a wider range of applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the structure of a plate-shaped piezoelectric linear motor based on the first-order bending longitudinal mode in the plane;

[0031] Figure 2 It is a two-dimensional schematic diagram of the non-uniformly distributed three-partition structure of the piezoelectric ceramics of the plate-shaped piezoelectric linear motor based on the first-order bending longitudinal mode in the plane;

[0032] Figure 3 It is a schematic diagram of the three-dimensional structure of the plate-shaped stator with non-uniformly distributed three-partition structure of piezoelectric ceramics and the silver layer electrode sintered on the surface;

[0033] Figure 4 It is a schematic diagram of the wiring method on the front surface of the plate-shaped stator with a non-uniformly distributed three-partition structure of piezoelectric ceramics;

[0034] Figure 5 It is a schematic diagram of the wiring method on the rear surface of the plate-shaped stator with a non-uniformly distributed three-partition structure of piezoelectric ceramics;

[0035] Figure 6 It is a two-dimensional schematic diagram of the piezoelectric ceramics uniformly distributed two-partition structure of the plate-shaped piezoelectric linear motor based on the in-plane first-order bending longitudinal mode;

[0036] Figure 7 It is a schematic diagram of the three-dimensional structure of the plate-shaped stator with two-partition structure of piezoelectric ceramics evenly distributed and the silver layer electrode sintered on the surface;

[0037] Figure 8 It is a schematic diagram of the wiring method on the front surface of the plate-shaped stator with a two-partition structure of piezoelectric ceramics evenly distributed;

[0038] Fig. 9 It is a schematic diagram of the wiring method on the rear surface of the plate-shaped stator with a two-partition structure of piezoelectric ceramics evenly distributed;

[0039] Fig.10 It is a two-dimensional schematic diagram of a metal-bonded double-sided six-piece piezoelectric ceramic structure;

[0040] Fig.11 It is a schematic diagram of the three-dimensional structure and wiring method of the metal-bonded double-sided six-piece piezoelectric ceramic plate-shaped stator;

[0041] Fig.12 It is a schematic diagram of the three-dimensional structure and wiring method of the metal-bonded single-sided three-piece piezoelectric ceramic plate-shaped stator;

[0042] Fig.13 It is a two-dimensional schematic diagram of a metal-bonded double-sided four-piece piezoelectric ceramic structure;

[0043] Fig.14 It is a schematic diagram of the three-dimensional structure and wiring method of the metal-bonded double-sided four-piece piezoelectric ceramic plate-shaped stator;

[0044] Fig.15 It is a schematic diagram of the three-dimensional structure and wiring method of a plate-shaped stator with two piezoelectric ceramic structures bonded on one side by metal;

[0045] Fig.16 It is a schematic diagram of the first-order symmetrical longitudinal vibration mode of the plate-shaped stator of the piezoelectric motor;

[0046] Fig.17 Schematic diagram of the first-order bending vibration mode of the plate-shaped stator of the piezoelectric motor;

[0047] Fig.18 A sinusoidal signal with a phase difference of π / 2 is used to simultaneously excite two orthogonal working modes of the stator, so that the particle on the end surface of the single driving foot of the piezoelectric motor generates an elliptical motion trajectory of positive rotation;

[0048] Fig.19A sinusoidal signal with a phase difference of -π / 2 is used to simultaneously excite two orthogonal working modes of the stator, so that the particles on the end surface of the single driving foot of the piezoelectric motor produce an elliptical motion trajectory that rotates in the opposite direction;

[0049] Fig. 20 The ANSYS geometric model of the plate-shaped stator with non-uniformly distributed three-partition structure of piezoelectric ceramics;

[0050] Fig.21 It is the ANSYS finite element model of the plate-shaped stator with non-uniformly distributed three-partition structure of piezoelectric ceramics;

[0051] Fig. 22 This is the ANSYS modal analysis result diagram of the first-order symmetrical longitudinal vibration mode;

[0052] Fig.23 This is the ANSYS modal analysis result diagram of the first-order bending vibration mode;

[0053] Fig.24 This is the ANSYS harmonic response analysis result diagram of the plate-shaped stator with non-uniformly distributed piezoelectric ceramics and three-partition structure;

[0054] Fig.25 A sinusoidal signal with a phase difference of π / 2 is used to simultaneously excite two orthogonal working modes of the stator, so that the particles on the end surface of the single driving foot of the piezoelectric motor generate an elliptical motion trajectory diagram rotating clockwise;

[0055] Fig.26 A sinusoidal signal with a phase difference of -π / 2 simultaneously excites two orthogonal working modes of the stator, so that the particles on the end surface of the single driving foot of the piezoelectric motor generate an elliptical motion trajectory diagram rotating counterclockwise.

[0056] List of reference numerals:

[0057] 1-1, the first vibrator body; 1-2, the second vibrator body; 1-3, the first monopod plate-shaped metal body; 1-4, the second monopod plate-shaped metal body; 2-1, the first left polarization partition; 2-2, the second left polarization partition; 2-3-1, the first front left piezoelectric ceramic sheet; 2-4-1, the second front left piezoelectric ceramic sheet; 2-3-2, the first rear left piezoelectric ceramic sheet; 2-4-2, the second rear left piezoelectric ceramic sheet; 3-1, the first right polarization partition; 3-2, the second right polarization partition; 3-3-1, the first front right piezoelectric ceramic sheet; 3-4-1, the second front right piezoelectric ceramic sheet; 3-3-2, the first rear right piezoelectric ceramic sheet; 3-4-2, the second rear right piezoelectric ceramic sheet; 4-1, the middle polarization partition; 4-3-1, the front middle piezoelectric ceramic sheet; 4-3-2, the rear middle piezoelectric Ceramic sheet; 5-1, first single drive foot; 5-2, second single drive foot; 5-3, single drive foot of first metal material; 5-4, single drive foot of second metal material; 6-1, first linear guide; 6-2, second linear guide; 6-3, third linear guide; 6-4, fourth linear guide; 7-1, first left silver layer electrode; 7-2, second left silver layer electrode; 8-1, first right silver layer electrode; 8-2, second right silver layer electrode; 9-1, middle silver layer electrode; 10-1, first rear silver layer electrode; 10-2, second rear silver layer electrode; 11, phase A of plate-shaped stator; 12, phase B of plate-shaped stator; 13, first-order symmetrical longitudinal vibration mode; 14, first-order bending vibration mode; 15, elliptical motion trajectory of forward rotation; 16, elliptical motion trajectory of reverse rotation. DETAILED DESCRIPTION

[0058] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments:

[0059] The present invention provides a plate-shaped piezoelectric linear motor based on an in-plane first-order bending longitudinal mode, and proposes a working mode of a plate-shaped piezoelectric linear motor based on an in-plane first-order bending longitudinal mode, which adopts a lower-order working mode combination, can realize forward and reverse motion, has a simple structure, a large thrust-to-weight ratio, high excitation efficiency, high vibration energy utilization rate, and fast response speed. The piezoelectric motor of the present invention is expected to have broad application prospects in the fields of precision drive, chip manufacturing, medical equipment, aerospace, automobiles, etc.

[0060] A plate-shaped piezoelectric linear motor based on the first-order bending longitudinal mode in the plane Figure 1 As shown, the solid line portion is the "non-uniformly distributed piezoelectric ceramics in three partitions" structure of the piezoelectric motor; the dotted line portion is the "uniformly distributed piezoelectric ceramics in two partitions" structure of the piezoelectric motor.

[0061] The present invention proposes a plate-shaped piezoelectric linear motor based on an in-plane first-order bending longitudinal mode. The plate-shaped piezoelectric linear motor is composed of a plate-shaped stator and a linear guide. The plate-shaped stator includes a first vibrator body 1-1 and a second vibrator body 1-2, a first single driving foot 5-1 and a second single driving foot 5-2, and the first single driving foot 5-1 and the second single driving foot 5-2 are respectively combined with the first vibrator body 1-1 and the second vibrator body 1-2 as a whole by bonding, welding or sintering. The linear guide includes a first linear guide 6-1 and a second linear guide 6-2, and the first linear guide 6-1 and the second linear guide 6-2 are correspondingly pressed on the first single driving foot 5-1 and the second single driving foot 5-2 under the action of pre-pressure; the first vibrator body 1-1 contains three non-uniformly distributed polarization partitions, and the second vibrator body 1-2 contains two uniformly distributed polarization partitions of the same size, and the polarization directions are polarized along the thickness direction of the plate-shaped stator, thereby forming a non-uniformly distributed three-partition structure of piezoelectric ceramics and a uniformly distributed two-partition structure of piezoelectric ceramics.

[0062] The two-dimensional schematic diagram of the non-uniform distribution of piezoelectric ceramics in three partitions of the plate-shaped piezoelectric linear motor based on the first-order bending longitudinal mode in the plane is shown in Figure 2 As shown, the piezoelectric ceramic non-uniformly distributed three-partition structure includes a first left polarization partition 2-1, a first right polarization partition 3-1 and a middle polarization partition 4-1, wherein the polarization directions of the first left polarization partition 2-1, the first right polarization partition 3-1 and the middle polarization partition 4-1 are polarized along the thickness direction of the first vibrator body 1-1, wherein the polarization direction of the first left polarization partition 2-1 is opposite to the polarization direction of the first right polarization partition 3-1, and the polarization direction of the middle polarization partition 4-1 is the same as the polarization direction of the first left polarization partition 2-1 or the polarization direction of the first right polarization partition 3-1;

[0063] The schematic diagram of the piezoelectric ceramic non-uniformly distributed three-partition structure of the plate-shaped piezoelectric linear motor based on the first-order bending longitudinal mode and the three-dimensional structure of the plate-shaped stator and the surface sintered silver layer electrode is shown in the figure. Figure 3 As shown, three mutually insulated silver layer electrodes are sintered on the front surface in the thickness direction of the first vibrator body 1-1, which are respectively a first left silver layer electrode 7-1 corresponding to the first left polarization partition 2-1, a first right silver layer electrode 8-1 corresponding to the first right polarization partition 3-1, and a middle silver layer electrode 9-1 corresponding to the middle polarization partition 4-1; a whole first rear silver layer electrode 10-1 is sintered on the rear surface in the thickness direction of the first vibrator body 1-1;

[0064] The schematic diagram of the wiring method of the front surface of the plate-shaped stator of the plate-shaped piezoelectric linear motor with non-uniformly distributed three-partition structure of piezoelectric ceramics based on the first-order bending longitudinal mode in the plane is shown in Figure 4 As shown, the first left silver layer electrode 7-1 and the first right silver layer electrode 8-1 are connected to form the A phase 11 of the plate-shaped stator, and the middle silver layer electrode 9-1 alone forms the B phase 12 of the plate-shaped stator;

[0065] The schematic diagram of the wiring method of the rear surface of the plate-shaped stator of the piezoelectric linear motor with non-uniform distribution of piezoelectric ceramics in three-partition structure based on the first-order bending longitudinal mode in the plane is shown in Figure 5 As shown, a whole first rear silver layer electrode 10-1 is sintered on the rear surface of the first vibrator body 1-1 in the thickness direction for grounding.

[0066] The two-dimensional schematic diagram of the piezoelectric ceramic uniformly distributed two-partition structure of the plate-shaped piezoelectric linear motor based on the first-order bending longitudinal mode is shown in Figure 6 As shown, the piezoelectric ceramic is evenly distributed in a two-partition structure: including a second left polarization partition 2-2 and a second right polarization partition 3-2, wherein the polarization directions of the second left polarization partition 2-2 and the second right polarization partition 3-2 are polarized along the thickness direction of the second vibrator body 1-2, wherein the polarization direction of the second left polarization partition 2-2 is the same as or opposite to the polarization direction of the second right polarization partition 3-2;

[0067] The schematic diagram of the piezoelectric ceramics uniformly distributed in two partitions of the plate-shaped piezoelectric linear motor based on the first-order bending longitudinal mode is shown in the figure. The three-dimensional structure of the plate-shaped stator and the silver layer electrode sintered on the surface are shown in the figure. Figure 7 As shown, two mutually insulated silver layer electrodes are sintered on the front surface in the thickness direction of the second vibrator body 1-2, which are a second left silver layer electrode 7-2 corresponding to the second left polarization partition 2-2 and a second right silver layer electrode 8-2 corresponding to the second right polarization partition 3-2; a whole second rear silver layer electrode 10-2 is sintered on the rear surface in the thickness direction of the second vibrator body 1-2;

[0068] The schematic diagram of the wiring method of the plate-shaped stator front surface of the plate-shaped piezoelectric linear motor with a piezoelectric ceramic uniformly distributed two-partition structure based on the in-plane first-order bending longitudinal mode is shown in Figure 8 As shown, the second left silver layer electrode 7-2 alone constitutes the A phase 11 of the plate-shaped stator, and the second right silver layer electrode 8-2 alone constitutes the B phase 12 of the plate-shaped stator;

[0069] The schematic diagram of the wiring method of the rear surface of the plate-shaped stator of the plate-shaped piezoelectric linear motor with a two-partition structure of piezoelectric ceramics evenly distributed based on the in-plane first-order bending longitudinal mode is shown in Fig. 9 As shown, a whole second rear silver layer electrode 10-2 is sintered on the rear surface of the second vibrator body 1-2 in the thickness direction for grounding.

[0070] The two-dimensional schematic diagram of the metal-bonded double-sided six-piece piezoelectric ceramic structure of the plate-shaped piezoelectric linear motor based on the first-order bending longitudinal mode is shown in the figure. Fig.10As shown, the metal-pasted double-sided six-piece piezoelectric ceramic structure is an equivalent technical extension of the piezoelectric ceramic non-uniformly distributed three-partition structure. The metal-pasted double-sided six-piece piezoelectric ceramic structure piezoelectric motor is composed of a single-foot plate-shaped stator and a third linear guide 6-3. The single-foot plate-shaped stator is composed of double-sided six-piece piezoelectric ceramics symmetrically pasted or welded on the front and rear surfaces of the first single-foot plate-shaped metal body 1-3 in the thickness direction. The single driving foot 5-3 of the first metal material is a part of the first single-foot plate-shaped metal body 1-3, and the third linear guide 6-3 is pressed on the single driving foot 5-3 of the first metal material by pre-pressure;

[0071] The schematic diagram of the three-dimensional structure and wiring method of the stator of the "metal-bonded double-sided six-piece piezoelectric ceramic" structure of the plate-shaped piezoelectric linear motor based on the first-order bending longitudinal mode is shown in the figure. Fig.11 As shown, the metal-bonded double-sided six-piece piezoelectric ceramic structure contains a total of six piezoelectric ceramic sheets, namely, a first front left piezoelectric ceramic sheet 2-3-1, a first front right piezoelectric ceramic sheet 3-3-1, a front middle piezoelectric ceramic sheet 4-3-1, a first rear left piezoelectric ceramic sheet 2-3-2, a first rear right piezoelectric ceramic sheet 3-3-2, and a rear middle piezoelectric ceramic sheet 4-3-2; bonded to the front surface of the first monopod plate-shaped metal body 1-3 in the thickness direction are two first front left piezoelectric ceramic sheets 2-3-1 and a first front right piezoelectric ceramic sheet 3-3-2 of the same size. -3-1 and a front middle piezoelectric ceramic sheet 4-3-1, symmetrically attached to the rear surface of the first single-leg plate-shaped metal body 1-3 in the thickness direction are another two first rear left piezoelectric ceramic sheets 2-3-2 and a first rear right piezoelectric ceramic sheet 3-3-2 of the same size and another rear middle piezoelectric ceramic sheet 4-3-2; the polarization direction of the double-sided six-piece piezoelectric ceramic structure is polarized along the thickness direction of the first single-leg plate-shaped metal body 1-3, wherein the polarization direction of the first front left piezoelectric ceramic sheet 2-3-1 and the polarization direction of the first front right piezoelectric ceramic sheet 3-3-1, the polarization direction of the front middle piezoelectric ceramic sheet 4-3-1 is opposite to the polarization direction of the first front left piezoelectric ceramic sheet 2-3-1 or the polarization direction of the first front right piezoelectric ceramic sheet 3-3-1; the polarization direction of the first rear left piezoelectric ceramic sheet 2-3-2, the first rear right piezoelectric ceramic sheet 3-3-2 and the rear middle piezoelectric ceramic sheet 4-3-2 adhered to the rear surface of the first single-legged plate-shaped metal body 1-3 in the thickness direction is polarized along the thickness direction of the first single-legged plate-shaped metal body 1-3, and is opposite to the polarization direction of the first front left piezoelectric ceramic sheet 2-3-1 or the polarization direction of the first front right piezoelectric ceramic sheet 3-3-1. The polarization directions of the ceramic sheet 2-3-1, the first front right piezoelectric ceramic sheet 3-3-1 and the front middle piezoelectric ceramic sheet 4-3-1 are symmetrical; the first single-foot plate-shaped metal body 1-3 is used for grounding, the first front left piezoelectric ceramic sheet 2-3-1, the first front right piezoelectric ceramic sheet 3-3-1, the first rear left piezoelectric ceramic sheet 2-3-2 and the first rear right piezoelectric ceramic sheet 3-3-2 are connected to form the A phase 11 of the stator, and the front middle piezoelectric ceramic sheet 4-3-1 and the rear middle piezoelectric ceramic sheet 4-3-2 are connected to form the B phase 12 of the stator;

[0072] The schematic diagram of the three-dimensional structure and wiring method of the stator of the plate-shaped piezoelectric linear motor with a metal-bonded single-sided three-piece piezoelectric ceramic structure based on the in-plane first-order bending longitudinal mode is shown in the figure. Fig.12 As shown, the metal-bonded single-sided three-piece piezoelectric ceramic structure is a simplified structure of the metal-bonded double-sided six-piece piezoelectric ceramic structure. Compared with the metal-bonded double-sided six-piece piezoelectric ceramic structure, the metal-bonded single-sided three-piece piezoelectric ceramic structure has no piezoelectric ceramic sheet bonded to the rear surface in the thickness direction of the first single-foot plate-shaped metal body 1-3, and the other technical features are exactly the same as those of the metal-bonded double-sided six-piece piezoelectric ceramic structure.

[0073] The two-dimensional schematic diagram of the metal-bonded double-sided four-piece piezoelectric ceramic structure of the plate-shaped piezoelectric linear motor based on the first-order bending longitudinal mode is shown in Fig.13 As shown, the metal-pasted double-sided four-piece piezoelectric ceramic structure is an equivalent technical extension of the piezoelectric ceramic uniformly distributed two-partition structure. The metal-pasted double-sided four-piece piezoelectric ceramic structure piezoelectric motor is composed of a single-foot plate-shaped stator and a fourth linear guide 6-4. The single-foot plate-shaped stator is composed of double-sided four-piece piezoelectric ceramics symmetrically pasted or welded on the front and rear surfaces of the second single-foot plate-shaped metal body 1-4 in the thickness direction. The single driving foot 5-4 of the second metal material is a part of the second single-foot plate-shaped metal body 1-4, and the fourth linear guide 6-4 is pressed on the single driving foot 5-4 of the second metal material by pre-pressure;

[0074] The schematic diagram of the three-dimensional structure and wiring method of the stator of the metal-bonded double-sided four-piece piezoelectric ceramic structure of the plate-shaped piezoelectric linear motor based on the first-order bending longitudinal mode is shown in the figure. Fig.14As shown, the metal-pasted double-sided four-piece piezoelectric ceramic structure contains a total of four piezoelectric ceramic sheets, namely a second front left piezoelectric ceramic sheet 2-4-1, a second front right piezoelectric ceramic sheet 3-4-1, a second rear left piezoelectric ceramic sheet 2-4-2, and a second rear right piezoelectric ceramic sheet 3-4-2; pasted on the front surface of the second single-foot plate-shaped metal body 1-4 in the thickness direction are two second front left piezoelectric ceramic sheets 2-4-1 and a second front right piezoelectric ceramic sheet 3-4-1 of the same size, and symmetrically pasted on the rear surface of the second single-foot plate-shaped metal body 1-4 in the thickness direction are another two second rear left piezoelectric ceramic sheets 2-4-2 and a second rear right piezoelectric ceramic sheet 3-4-2 of the same size; the polarization direction of the double-sided four-piece piezoelectric ceramic structure is polarized along the thickness direction of the second single-foot plate-shaped metal body 1-4, wherein the second front The polarization direction of the left piezoelectric ceramic sheet 2-4-1 is the same as or opposite to the polarization direction of the second front right piezoelectric ceramic sheet 3-4-1; the polarization direction of the second rear left piezoelectric ceramic sheet 2-4-2 and the second rear right piezoelectric ceramic sheet 3-4-2 adhered to the rear surface of the second single-leg plate-shaped metal body 1-4 in the thickness direction is polarized along the thickness direction of the second single-leg plate-shaped metal body 1-4, and is symmetrical with the polarization direction of the second front left piezoelectric ceramic sheet 2-4-1 and the second front right piezoelectric ceramic sheet 3-4-1; the second single-leg plate-shaped metal body 1-4 is used for grounding, the second front left piezoelectric ceramic sheet 2-4-1 and the second rear left piezoelectric ceramic sheet 2-4-2 are connected to form the A phase 11 of the stator, and the second front right piezoelectric ceramic sheet 3-4-1 and the second rear right piezoelectric ceramic sheet 3-4-2 are connected to form the B phase 12 of the stator;

[0075] The schematic diagram of the three-dimensional structure and wiring method of the stator of the plate-shaped piezoelectric linear motor with two piezoelectric ceramics bonded on one side based on the first-order bending longitudinal mode in the plane is shown in the figure. Fig.15 As shown, it is characterized in that: the metal-bonded single-sided two-piece piezoelectric ceramic structure is a simplified structure of the metal-bonded double-sided four-piece piezoelectric ceramic structure. Compared with the metal-bonded double-sided four-piece piezoelectric ceramic structure, the metal-bonded single-sided two-piece piezoelectric ceramic structure has no piezoelectric ceramic sheet bonded to the rear surface in the thickness direction of the single-foot plate-shaped metal body 1-4, and the remaining technical features are completely consistent with the metal-bonded double-sided four-piece piezoelectric ceramic structure.

[0076] The schematic diagram of the two orthogonal working modes of the plate-shaped piezoelectric linear motor stator based on the in-plane first-order bending longitudinal mode is shown in Fig.16 , 17 As shown, the two orthogonal working modes of the piezoelectric motor single-foot plate-shaped stator are the first-order symmetrical longitudinal vibration mode 13 and the first-order bending vibration mode 14; the first-order symmetrical longitudinal vibration mode 13 is as shown in FIG. Fig.16As shown, it is used to provide normal vibration components of the first single driving foot 5-1, the second single driving foot 5-2, the single driving foot 5-3 of the first metal material, and the single driving foot 5-4 of the second metal material, and its vibration mode is an atypical first-order longitudinal vibration mode: the amplitude of the "four corners of the cube" is almost zero, and the amplitude becomes larger and larger as it transitions from the "four corners of the cube" to the "center of the four sides of the cube", and the amplitude of the "center of the four sides of the cube" is the largest, and the vibration mode of the area near the tangential and normal center axes of the cube is similar to the first-order longitudinal vibration mode and is symmetrical, so it is called the first-order symmetrical longitudinal vibration mode 13; the first-order bending vibration mode 14 is as shown in Fig.17 As shown, it is used to provide tangential vibration components of the first single driving foot 5-1, the second single driving foot 5-2, the single driving foot 5-3 of the first metal material and the single driving foot 5-4 of the second metal material, and its vibration mode is a typical first-order bending vibration vibration mode; in order to make full use of the normal vibration component of the first-order symmetrical longitudinal vibration mode 13, the first single driving foot 5-1, the second single driving foot 5-2, the single driving foot 5-3 of the first metal material and the single driving foot 5-4 of the second metal material are triangular block structures, semi-spherical or arc-top cylindrical.

[0077] The structural design makes the first-order symmetrical longitudinal vibration mode 13 and the first-order bending vibration mode 14 of the plate-shaped stator have good frequency consistency, that is, the resonance frequency ω of the first-order symmetrical longitudinal vibration mode 13 is z and the resonant frequency ω of the first-order bending vibration mode 14 w Comply with |ω z -ω w |≤200Hz; the frequency of the two orthogonal working mode excitation signals is ω0, ω0 is close to ω z and ω w .

[0078] The schematic diagram of the driving mode of the stator of the plate-shaped piezoelectric linear motor based on the first-order bending longitudinal mode in the plane is as follows: Fig.18 , 19 As shown; when the A phase 11 of the plate-shaped stator inputs a continuous sinusoidal wave excitation signal with a frequency of ω0, and at the same time the B phase 12 of the plate-shaped stator inputs a continuous sinusoidal wave excitation signal with a frequency of ω0 but a phase difference of 90° (phase lead) with the input signal of the A phase 11; at this time, the particles on the single driving foot of the piezoelectric motor plate-shaped stator and the contact interface with the linear guide rail will produce an elliptical motion trajectory 15, and the guide rail will produce a directional motion; when the A phase 11 of the plate-shaped stator inputs a continuous sinusoidal wave excitation signal with a frequency of ω0 and the B phase 12 of the plate-shaped stator inputs a continuous sinusoidal wave excitation signal with a frequency of ω0 but a phase difference of -90° (phase lag) with the input signal of the A phase 11, at this time, the particles on the single driving foot of the motor plate-shaped stator and the contact interface with the linear guide rail will produce a reverse rotating elliptical motion trajectory 16, and the guide rail will produce a reverse directional motion.

[0079] It should be noted that: the first single driving foot 5-1, the second single driving foot 5-2, the single driving foot 5-3 of the first metal material and the single driving foot 5-4 of the second metal material are triangular block-shaped, semi-spherical or arc-top cylindrical structures; the shape of the first vibrator body 1-1 and the second vibrator body 1-2 is approximately a cube, which is made of piezoelectric ceramic material; the first single-foot plate-shaped metal body 1-3 and the second single-foot plate-shaped metal body 1-4 are approximately cubes made of metal materials; the first single driving foot 5-1 and the second single driving foot 5-2 are made of wear-resistant materials.

[0080] Taking the piezoelectric ceramic non-uniformly distributed three-partition structure in the embodiment of the present invention as an example, the present invention is verified through ANSYS simulation analysis:

[0081] First, the geometric model and finite element model of the piezoelectric ceramic non-uniformly distributed three-partition structure plate-shaped stator of the present invention are established in ANSYS, such as Fig. 20 and 21 As shown; after adjusting the structural dimensions of the stator and performing modal analysis, we obtain Fig. 22 , 23 The modal analysis results with good frequency consistency are shown in the figure: "50991Hz first-order bending vibration mode" and "50861Hz first-order symmetrical longitudinal vibration mode" (frequency difference is 130Hz); then, a harmonic response sweep analysis is performed under the excitation of a two-phase sinusoidal signal with a phase difference of 90° at 200Vp-p, and the following is obtained: Fig.24 The vibration amplitude-frequency curve of the contact surface node of the plate-shaped stator of the piezoelectric ceramic non-uniformly distributed three-partition structure of the present invention is shown: the normal amplitude (first-order symmetrical longitudinal vibration mode) of the contact surface node of the driving foot is up to 1.8μm, and the tangential amplitude (first-order bending vibration mode) is up to 5.5μm; according to Fig.24 The amplitude-frequency curve of the elliptical motion is shown in Figure 1. The 51100Hz frequency point is selected for transient analysis, and the "calculation iteration number" is increased. The formation process of the elliptical motion trajectory and the steady-state elliptical motion trajectory can be directly observed. The calculation results of the transient analysis are shown in Figure 1. Fig.25 , 26 As shown: the normal amplitude of the steady-state elliptical motion trajectory is 1.1μm and the tangential amplitude is 5μm, which can achieve forward and reverse driving.

[0082] The structural design principles of the present invention are:

[0083] 1. The plate-shaped piezoelectric linear motor stator based on the first-order bending longitudinal mode in the plane of the present invention is optimized from the piezoelectric ceramic uniformly distributed four-partition structure of the Nanomotion ultrasonic motor stator in the prior art to the piezoelectric ceramic non-uniformly distributed three-partition structure and the piezoelectric ceramic uniformly distributed two-partition structure of the present invention, and the equivalent technology is extended to the metal-bonded double-sided six-piece (or "single-sided three-piece") piezoelectric ceramic structure and the metal-bonded double-sided four-piece (or "single-sided two-piece") piezoelectric ceramic structure of the present invention;

[0084] 2. The stator topology of the plate-shaped piezoelectric linear motor based on the first-order bending-longitudinal mode in the present invention is approximately a cube. The first-order bending vibration mode and the first-order symmetrical longitudinal vibration mode of the stator have good frequency consistency through structural design, making the motor suitable for dual-mode drive;

[0085] The above is only one of the preferred embodiments of the present invention and is not intended to limit the present invention in any other form. Any modification or equivalent change made based on the technical essence of the present invention still falls within the scope of protection required by the present invention.

Claims

1. A plate-shaped piezoelectric linear motor based on an in-plane first-order bending longitudinal mode, characterized in that: The plate-type piezoelectric linear motor is composed of a plate-shaped stator and a linear guide rail. The plate-shaped stator comprises a first vibrator body (1-1) and a second vibrator body (1-2), a first single driving foot (5-1) and a second single driving foot (5-2). The first single driving foot (5-1) and the second single driving foot (5-2) are respectively combined with the first vibrator body (1-1) and the second vibrator body (1-2) by bonding, welding or sintering. The linear guide rail comprises a first linear guide rail (6-1) and a second linear guide rail (6-2), the first linear guide rail (6-1) and the second linear guide rail (6-2) are pressed against the first single driving foot (5-1) and the second single driving foot (5-2) respectively under the action of pre-pressure; the first vibrator body (1-1) contains three non-uniformly distributed polarization partitions, and the second vibrator body (1-2) contains two uniformly distributed polarization partitions of the same size, and the polarization directions are both polarized along the thickness direction of the plate-shaped stator, thereby forming a piezoelectric ceramic non-uniformly distributed three-partition and piezoelectric ceramic uniformly distributed two-partition structure; The piezoelectric ceramic non-uniformly distributed three-partition structure comprises a first left polarization partition (2-1), a first right polarization partition (3-1) and a middle polarization partition (4-1), wherein the polarization directions of the first left polarization partition (2-1), the first right polarization partition (3-1) and the middle polarization partition (4-1) are polarized along the thickness direction of the first vibrator body (1-1), wherein the polarization direction of the first left polarization partition (2-1) is opposite to the polarization direction of the first right polarization partition (3-1), and the polarization direction of the middle polarization partition (4-1) is the same as the polarization direction of the first left polarization partition (2-1) or the polarization direction of the first right polarization partition (3-1); and three mutually insulated silver layer electrodes are sintered on the front surface in the thickness direction of the first vibrator body (1-1). , respectively, a first left silver layer electrode (7-1) corresponding to the first left polarization partition (2-1), a first right silver layer electrode (8-1) corresponding to the first right polarization partition (3-1), and a middle silver layer electrode (9-1) corresponding to the middle polarization partition (4-1), wherein the first left silver layer electrode (7-1) corresponding to the first left polarization partition (2-1) and the first right silver layer electrode (8-1) corresponding to the first right polarization partition (3-1) are connected to form the A phase (11) of the plate-shaped stator, and the middle silver layer electrode (9-1) corresponding to the middle polarization partition (4-1) alone forms the B phase (12) of the plate-shaped stator; on the rear surface in the thickness direction of the first vibrator body (1-1), a whole first rear silver layer electrode (10-1) is sintered for grounding; The piezoelectric ceramic has a two-partition structure that is evenly distributed, comprising a second left polarization partition (2-2) and a second right polarization partition (3-2), wherein the polarization directions of the second left polarization partition (2-2) and the second right polarization partition (3-2) are polarized along the thickness direction of the second vibrator body (1-2), wherein the polarization direction of the second left polarization partition (2-2) is the same as or opposite to the polarization direction of the second right polarization partition (3-2); and two mutually insulated silver layer electrodes are sintered on the front surface in the thickness direction of the second vibrator body (1-2), which correspond to the second left polarization partition (2-2) and the second right polarization partition (3-2). The second left silver layer electrode (7-2) of the second polarization partition (2-2) and the second right silver layer electrode (8-2) corresponding to the second right polarization partition (3-2), wherein the second silver layer electrode (7-2) corresponding to the second left polarization partition (2-2) alone constitutes the A phase (11) of the plate-shaped stator, and the second right silver layer electrode (8-2) corresponding to the second right polarization partition (3-2) alone constitutes the B phase (12) of the plate-shaped stator; on the rear surface of the second vibrator body (1-2) in the thickness direction, a whole second rear silver layer electrode (10-2) is sintered for grounding; The two orthogonal working modes of the plate-shaped stator in the piezoelectric ceramic non-uniformly distributed three-partition structure or the piezoelectric ceramic uniformly distributed two-partition structure are respectively an in-plane first-order bending vibration mode (14) and a first-order symmetrical longitudinal vibration mode (13). Two sinusoidal signals with a phase difference of π / 2 are simultaneously applied to the A and B phases of the plate-shaped stator to simultaneously excite the two orthogonal working modes of the plate-shaped stator, so that the particles on the contact surfaces of the first single driving foot (5-1) and the second single driving foot (5-2) produce elliptical motion, and the first linear guide rail (6-1) and the second linear guide rail (6-2) are correspondingly driven through friction.

2. The plate-shaped piezoelectric linear motor based on the in-plane first-order bending longitudinal mode according to claim 1, characterized in that: The plate-shaped stator is composed of six pieces of double-sided piezoelectric ceramics symmetrically pasted or welded on the front and rear surfaces of a first single-legged plate-shaped metal body (1-3) in the thickness direction, or is composed of four pieces of double-sided piezoelectric ceramics symmetrically pasted or welded on the front and rear surfaces of a second single-legged plate-shaped metal body (1-4) in the thickness direction, thereby forming a metal-pasted double-sided six-piece piezoelectric ceramic structure or a metal-pasted double-sided four-piece piezoelectric ceramic structure.

3. The plate-shaped piezoelectric linear motor based on the in-plane first-order bending longitudinal mode according to claim 2 is characterized in that: The metal-bonded double-sided six-piece piezoelectric ceramic structure contains a total of six piezoelectric ceramic sheets, namely a first front left piezoelectric ceramic sheet (2-3-1), a first front right piezoelectric ceramic sheet (3-3-1), a front middle piezoelectric ceramic sheet (4-3-1), a first rear left piezoelectric ceramic sheet (2-3-2), a first rear right piezoelectric ceramic sheet (3-3-2), and a rear middle piezoelectric ceramic sheet (4-3-2); bonded to the front surface of the first single-legged plate-shaped metal body (1-3) in the thickness direction are two first front left piezoelectric ceramic sheets (2-3-1) and a first front right piezoelectric ceramic sheet (3-3-1) of the same size, and a front middle piezoelectric ceramic sheet (4-3-1); symmetrically bonded to the rear surface of the single-legged plate-shaped metal body (1-3) in the thickness direction are another two first rear left piezoelectric ceramic sheets (2-3-2) and a first rear right piezoelectric ceramic sheet (3-3-2) of the same size, and another rear middle piezoelectric ceramic sheet (4-3-2); The polarization direction of the double-sided six-piece piezoelectric ceramic structure is polarized along the thickness direction of the single-foot plate-shaped metal body (1-3), wherein the polarization direction of the first front left piezoelectric ceramic sheet (2-3-1) is opposite to the polarization direction of the first front right piezoelectric ceramic sheet (3-3-1), the polarization direction of the front middle piezoelectric ceramic sheet (4-3-1) is the same as the polarization direction of the first front left piezoelectric ceramic sheet (2-3-1) or the polarization direction of the first front right piezoelectric ceramic sheet (3-3-1), and the first rear left piezoelectric ceramic sheet (2-3-2), the first rear right piezoelectric ceramic sheet (3-3-2) and the rear middle piezoelectric ceramic sheet (4-3-2) symmetrically attached to the rear surface of the first single-foot plate-shaped metal body (1-3) in the thickness direction have polarization directions that are symmetrical to the polarization directions of the first front left piezoelectric ceramic sheet (2-3-1), the first front right piezoelectric ceramic sheet (3-3-1) and the front middle piezoelectric ceramic sheet (4-3-1); The single-legged plate-shaped metal body (1-3) is used for grounding; the first front left piezoelectric ceramic sheet (2-3-1), the first front right piezoelectric ceramic sheet (3-3-1), the first rear left piezoelectric ceramic sheet (2-3-2) and the first rear right piezoelectric ceramic sheet (3-3-2) are connected to form the A phase (11) of the plate-shaped stator; the front middle piezoelectric ceramic sheet (4-3-1) and the rear middle piezoelectric ceramic sheet (4-3-2) are connected to form the B phase (12) of the plate-shaped stator.

4. The plate-shaped piezoelectric linear motor based on the in-plane first-order bending longitudinal mode according to claim 2, characterized in that: The metal-bonded double-sided four-piece piezoelectric ceramic structure contains a total of four piezoelectric ceramic sheets, namely a second front left piezoelectric ceramic sheet (2-4-1), a second front right piezoelectric ceramic sheet (3-4-1), a second rear left piezoelectric ceramic sheet (2-4-2), and a second rear right piezoelectric ceramic sheet (3-4-2); bonded to the front surface of the second single-legged plate-shaped metal body (1-4) in the thickness direction are two second front left piezoelectric ceramic sheets (2-4-1) and second front right piezoelectric ceramic sheets (3-4-1) of the same size; symmetrically bonded to the rear surface of the second single-legged plate-shaped metal body (1-4) in the thickness direction are another two second rear left piezoelectric ceramic sheets (2-4-2) and second rear right piezoelectric ceramic sheets (3-4-2) of the same size; The polarization direction of the double-sided four-piece piezoelectric ceramic structure is polarized along the thickness direction of the second single-foot plate-shaped metal body (1-4), wherein the polarization direction of the second front left piezoelectric ceramic sheet (2-4-1) is the same as or opposite to the polarization direction of the second front right piezoelectric ceramic sheet (3-4-1), and the second rear left piezoelectric ceramic sheet (2-4-2) and the second rear right piezoelectric ceramic sheet (3-4-2) symmetrically attached to the rear surface of the second single-foot plate-shaped metal body (1-4) in the thickness direction have polarization directions symmetrical to those of the second front left piezoelectric ceramic sheet (2-4-1) and the second front right piezoelectric ceramic sheet (3-4-1); The second single-legged plate-shaped metal body (1-4) is used for grounding; the second front left piezoelectric ceramic sheet (2-4-1) and the second rear left piezoelectric ceramic sheet (2-4-2) are connected to form the A phase (11) of the plate-shaped stator; the second front right piezoelectric ceramic sheet (3-4-1) and the second rear right piezoelectric ceramic sheet (3-4-2) are connected to form the B phase (12) of the plate-shaped stator of the motor.

5. The plate-shaped piezoelectric linear motor based on the first-order bending longitudinal mode in the plane according to claims 2, 3 and 4 is characterized in that: The two orthogonal working modes of the plate-shaped stator of the metal-bonded double-sided six-piece piezoelectric ceramic structure or the metal-bonded double-sided four-piece piezoelectric ceramic structure are respectively an in-plane first-order bending vibration mode (14) and a first-order symmetrical longitudinal vibration mode (13); the first single-foot plate-shaped metal body (1-3) and the second single-foot plate-shaped metal body (1-4) are respectively provided with a single driving foot (5-3) made of a first metal material and a single driving foot (5-4) made of a second metal material, and also include a third linear guide rail (6-3) and a fourth linear guide rail (6-3); the third linear guide rail (6- The first linear guide (3) and the fourth linear guide (6-4) are pressed by preload on the single driving foot (5-3) of the first metal material and the single driving foot (5-4) of the second metal material, and two sinusoidal signals with a phase difference of π / 2 are simultaneously applied to the A and B phases of the plate-shaped stator, and two orthogonal working modes of the plate-shaped stator are simultaneously excited, so that the particles on the contact surfaces of the single driving foot (5-3) of the first metal material and the single driving foot (5-4) of the second metal material produce elliptical motion, and the third linear guide (6-3) and the fourth linear guide (6-4) are driven by friction.

6. The plate-shaped piezoelectric linear motor based on the in-plane first-order bending longitudinal mode according to claims 1 and 2 is characterized in that: The first-order symmetrical longitudinal vibration mode (13) is used to provide normal vibration components of the first single driving foot (5-1) and the second single driving foot (5-2), the single driving foot (5-3) of the first metal material and the single driving foot (5-4) of the second metal material, and its vibration mode is an atypical first-order longitudinal vibration mode: the amplitude of the "four corners of the cube" is almost zero, and the amplitude increases as it transitions from the "four corners of the cube" to the "center of the four sides of the cube", and the amplitude of the "center of the four sides of the cube" is the largest, and the vibration mode of the area near the tangential and normal central axis of the cube is similar to the first-order longitudinal vibration mode and has symmetry; the first-order bending vibration mode (14) is used to provide tangential vibration components of the first single driving foot (5-1) and the second single driving foot (5-2), the single driving foot (5-3) of the first metal material and the single driving foot (5-4) of the second metal material, and its vibration mode is a typical first-order bending vibration mode.

7. The plate-shaped piezoelectric linear motor based on the in-plane first-order bending longitudinal mode according to claims 1 and 2 is characterized in that: The first single driving foot (5-1) and the second single driving foot (5-2), the single driving foot (5-3) made of the first metal material and the single driving foot (5-4) made of the second metal material are triangular block-shaped, semi-spherical or arc-top cylindrical structures; The first vibrator body (1-1) and the second vibrator body (1-2) are approximately cube-shaped and are made of piezoelectric ceramic material; the first single-leg plate-shaped metal body (1-3) and the second single-leg plate-shaped metal body (1-4) are approximately cube-shaped and are made of metal material; the first single driving foot (5-1) and the second single driving foot (5-2) are made of wear-resistant material.

Images