Method for compensating for angle error

Abstract

The invention relates to a method for compensating for an angle error when determining an angle value of an arrangement having a permanent magnet and at least two magnetic field sensors, comprising a distance formed between the permanent magnet and the magnetic field sensors, in which distance a sinusoidal signal and a cosine signal are generated in the magnetic field sensors, and wherein the sinusoidal signal and the cosine signal are generated in the magnetic field sensors. An evaluation signal corresponding to the angle value is formed from the two signals by means of an arc tangent function, the arrangement error and the error from the measurement and evaluation unit alter the shape of the evaluation signal and cause an angular deviation in the evaluation signal, and in order to minimize the angular deviation, the arrangement error and the error from the measurement and evaluation unit change the shape of the evaluation signal. According to the invention, a value for correcting a gain error and / or a value for correcting an orthogonality error of the signal is varied and a value for correcting a gain error and / or a value for correcting an orthogonality error is ascertained, the density difference of the measurement points of the second harmonics in the analysis processing signal and / or the third harmonics in the signal and / or the Lissajin pattern is determined.

Description

Technical Field

[0001] The invention relates to a method for compensating for angular errors. Background Art

[0002] A method is known from DE 10 2014 109 693 A1, in which the angular position of a magnet arrangement with a rotation axis is determined by contactless measurement. The magnet arrangement has a magnet and at least three magnetic field sensors, wherein sine and cosine output signals are calculated from the signals of the magnetic field sensors by means of a transformation.

[0003] In the evaluation device, the angle of rotation, ie the angular position of the magnet or the sensor arranged on the axis of rotation, is calculated directly from the two output signals or from their instantaneous values ​​using an inverse tangent function.

[0004] By using at least three magnetic field sensors, magnetic interference fields can be compensated, wherein interference fields occur in particular in the context of automotive electronics. The device and the method are not limited to three magnetic field sensors. When more than three sensors are used, the angular position can be calculated more accurately.

[0005] However, such methods are not suitable for compensating for errors of positioning inaccuracies and orientation inaccuracies. For example, the magnet arrangement and the sensor arrangement may both be axially offset from one another or have a tilt or inclination due to tolerances.

[0006] In addition to non-ideal magnetic properties, other errors in the signal and therefore in the angle determination are also attributable in particular to temperature changes and aging. In principle, the errors can be divided into three categories:

[0007] - an offset error caused by the DC component of the signal, and

[0008] - gain error, the deviation of the peak value of the signal amplitude causes the gain error, and

[0009] - Orthogonality error, which is caused by the deviation in the phase shift of the two signals.

[0010] A further method for compensating these errors is known from "Application Note APN000202_001EN". The underlying device has components for carrying out the compensation method.

[0011] However, due to the multiplicity and superposition of error sources (eg axial misalignment between the magnet arrangement and the sensor arrangement in combination with tilting of the magnet), effects occur which cannot be corrected using the compensation methods mentioned. Summary of the invention

[0012] Against this background, the object of the present invention is to specify a method which expands the prior art.

[0013] This object is achieved by a method for compensating for angular errors having the features of claim 1. Advantageous embodiments of the invention are the subject matter of the dependent claims.

[0014] According to the subject matter, a method for compensating for angular errors is provided.

[0015] The method is carried out for determining an angle value of an arrangement having a permanent magnet and at least two magnetic field sensors.

[0016] The two magnetic field sensors are connected to a measuring and evaluation device.

[0017] A distance is formed between the permanent magnet and the magnetic field sensor.

[0018] Sine and cosine signals are generated in the magnetic field sensor by means of a forced-guided mechanical movement or by means of a transformation.

[0019] From these two signals, an evaluation signal corresponding to the angle value is formed by means of an inverse tangent function, wherein arrangement errors and errors from the measuring and evaluation unit change the shape of the evaluation signal.

[0020] In the evaluation of the signal, the error leads to an angular deviation, wherein in order to minimize the angular deviation, a value in the signal for correcting the gain error and / or a value for correcting the orthogonality error is changed.

[0021] In one method step, correction values ​​for gain and / or orthogonality are determined, wherein the second harmonic in the evaluation signal and / or the third harmonic in the signal and / or the third harmonic in the density differences of the measuring points of the Lissajous plots are determined.

[0022] It should be noted that the measuring and evaluation unit generally does not determine a value for correcting the gain error and / or a value for correcting the orthogonality error, but rather uses a value for correcting the gain error and / or a value for correcting the orthogonality error that has already been determined, for example, during calibration. The latter is more likely to occur outside the measuring and evaluation unit and is generally stored.

[0023] In other words, in particular, gain errors (i.e. differences in the amplitudes of the signals) and / or orthogonality errors (i.e. deviations from a 90 degree phase relationship between the two signals) are known before the method is carried out and are taken into account by the measuring and analysis unit, i.e. the signals are corrected accordingly.

[0024] It should be noted that, unlike the prior art (in which, for example, the minimum and maximum values ​​of the signal are taken into account, thereby in some cases even expanding rather than reducing the final angular deviation), in the present invention, other methods are used to obtain values ​​for correcting the gain error and / or values ​​for correcting the orthogonality error in order to reliably correct the second-order angular deviation.

[0025] It is to be understood that the term "magnetic field sensor" comprises in particular vertical Hall sensors and / or lateral Hall sensors and / or TMR and / or AMR and / or other types of sensors. Furthermore, different types of magnetic field sensors may also be used in the arrangement.

[0026] It should be noted that the sine and cosine signals are also generated directly as measurement signals from the two magnetic field sensors or can only be derived by means of a transformation of the measurement signals in an implementation with just two sensors. In particular, in the case of more than two magnetic field sensors, the sine and cosine signals can generally only be generated by means of a transformation. Even in the case of just two magnetic field sensors, a transformation may be necessary, depending on the arrangement of the two magnetic field sensors and / or when using different types of magnetic field sensors, for example, one of the two magnetic field sensors is designed as a TMR and the other magnetic field sensor is designed as a Hall sensor.

[0027] It should be noted that, when passing through 0° to 360°, the measuring points in the Lissajous figure are in principle located on a closed curve, wherein, in the case of an arrangement without interference, the curve has a constant radius and the measuring points are evenly distributed on a circular line. In other words, the curve is a circle.

[0028] If there is a disturbance, the radius is no longer constant and the curve deviates from a circle and / or the distribution of the points on the Lissajous figure is different.

[0029] It should be noted that, in summary, the method minimizes the third harmonic in the signal by changing the value used to correct for gain error and / or the value used to correct for orthogonality error.

[0030] The determination of the third harmonic can be determined directly in the signal or in the resulting effect thereof (eg, the resulting angular deviation of the evaluated signal as the second harmonic or the density difference of the Lissajous figures of the two signals).

[0031] It should be noted that in an alternative, the angular deviation in the evaluation signal should be minimized, which angular deviation appears there as a second harmonic. In other words, the second harmonic is minimized.

[0032] In a further alternative, density differences are compensated during the evaluation using the Lissajous figures.

[0033] It should be noted that the above-mentioned schemes for reducing errors are equivalent to each other in terms of effect.

[0034] It will be appreciated that the error value can be determined and compensated for directly in the signal and only then the value for correcting the gain error and / or the value for correcting the orthogonality error can be determined with the aid of the method according to the invention.

[0035] The advantage of this method is that errors caused by axial misalignment between the magnet arrangement and the sensor arrangement or by tilting of the magnets as well as other error causes which lead to higher-order effects in the signal can be compensated.

[0036] In particular, the third harmonic in the sine and cosine signals can be determined, which third harmonic appears as the second harmonic in the resulting rotation angle deviation. It will be appreciated that it is advantageous to take into account at least one 360° pass.

[0037] Furthermore, it should be noted that the compensation of angle errors occurring in the form of the third harmonic of the signal is significantly extended with this method.

[0038] As a result, on the one hand, the achievable accuracy of the angle measurement is increased, and on the other hand, the requirements for manufacturing tolerances can be reduced and the efficiency or expenditure when assembling the device can be reduced. In other words, the costs in production can be reduced.

[0039] It is understood that the method is not limited to rotation angle measurement. The method can be used for all forms of contactless path measurement (Wegemessung), in which at least one permanent magnet generates sine and cosine signals in combination with at least two magnetic field sensors. This also includes in particular any type of linear motion whose magnetic structure is designed in a corresponding manner.

[0040] In one embodiment, after the angle value has been calculated using the inverse tangent function, the value for correcting the gain error and / or the value for correcting the orthogonality error is determined from the second harmonic of the resulting angular deviation of the 360° rotation.

[0041] In one embodiment, in order to determine the value for correcting the gain error and / or the value for correcting the orthogonality error from the density differences of the Lissajous figures, the measuring points are recorded with a fixed sampling rate at a relatively constant periodic speed / frequency or rotational speed.

[0042] In another embodiment, the value for correcting the gain error and / or the value for correcting the orthogonality error is determined from a component of the second harmonic of the resulting variation of the error of the rotation angle during a 360° rotation calculated by means of DFT or FFT.

[0043] In one embodiment, the value for correcting the gain error and / or the value for correcting the orthogonality error is determined by a change in the correction value that has been generated by other methods in combination with the third harmonic of the sine and cosine signals calculated by means of DFT or FFT. In other words, with the method according to the invention, the gain error and / or the value for correcting the orthogonality error is calculated by determining the second harmonic after correction by determining the third harmonic in the signal.

[0044] In an extended solution, the DFT calculation is performed with the aid of the Goertzel algorithm, or, in an alternative solution, the second harmonic or third harmonic is directly obtained with the aid of a sine fit (also referred to as a sine fit function). In other words, in this alternative solution, no FFT or DFT calculation is performed at all. One advantage is that the computing power is reduced.

[0045] In one embodiment, it is preferred that the value for correcting the gain error and / or the value for correcting the orthogonality error is obtained multiple times in an iterative manner, thereby further improving the accuracy of the angle calculation.

[0046] According to another embodiment, after the correction value has been determined, the third harmonic is determined directly in the signal by comparing the signal profile with an ideal sine profile and by comparing the signal profile with an ideal cosine profile.

[0047] A value for correcting the gain error and / or a value for correcting the orthogonality error is then determined from the ascertained correction value and the deviation from the ideal profile.

[0048] In one embodiment, the method is used to determine a rotational angle position in an arrangement having a permanent magnet and a magnetic field sensor.

[0049] In this case, the arrangement has a shaft with an end face and at least one permanent magnet which is arranged on the end face or laterally on the shaft.

[0050] Along the imaginary extension of the shaft, a magnetic field sensor is arranged. Alternatively, the magnetic field sensor is arranged laterally, ie, spaced apart from the imaginary extension of the shaft.

[0051] It will be appreciated that a distance is formed between the shaft and the magnetic field sensor.

[0052] The measuring and evaluation device is connected to the magnetic field sensor, wherein when the shaft rotates, a sine signal or a cosine signal is generated at the output of the corresponding magnetic field sensor or is obtained only by means of a transformation.

[0053] In one embodiment, the magnetic field sensors are spaced apart along the X direction.

[0054] In a further embodiment, the magnetic field sensors are arranged directly above one another in the X direction and / or partially or completely above one another in the Z direction.

[0055] In another embodiment, three magnetic field sensors are arranged in pixel units, wherein three different directions of a magnetic field are measured by the three magnetic field sensors. In one embodiment, a plurality of magnetic field sensors are arranged in an XY plane, preferably linearly or in a circle.

[0056] The measuring and evaluation device is configured to calculate an evaluation signal which corresponds to the rotation angle value from the signal by means of an inverse tangent function.

[0057] Furthermore, the measuring and evaluation device is configured to calculate a value for correcting a gain error and / or a value for correcting an orthogonality error in order to change the evaluation signal in order to minimize the angular deviation.

[0058] In an alternative embodiment, the method is used in other arrangements for ascertaining the angle value of the translational movement path.

[0059] In this case, the further arrangement comprises a plurality of permanent magnet pairs arranged along the translation path and at least two magnetic field sensors arranged along the translation path.

[0060] It will be appreciated that the magnetic field sensor is arranged spaced apart from the permanent magnet pair, movably relative to one another and along a translational movement path.

[0061] Furthermore, a measuring and evaluation device is provided which is connected to the magnetic field sensor.

[0062] In the case of a translational movement of the permanent magnet pair or the magnetic field sensor along this path, a sine signal or a cosine signal is present at the output of the respective magnetic field sensor, or these signals are obtained by means of a transformation.

[0063] The measuring and evaluation device is configured to calculate an evaluation signal which corresponds to the angle value from the signal by means of an inverse tangent function.

[0064] Furthermore, the measuring and evaluation device is configured to calculate a value for correcting a gain error and / or a value for correcting an orthogonality error in order to change the evaluation signal in order to minimize the angular deviation.

[0065] In a preferred embodiment, the measuring and evaluation device is designed to determine a value for correcting a gain error and / or a value for correcting an orthogonality error by means of a DFT or FFT evaluation.

[0066] In one embodiment, the measuring and evaluation device comprises a Goetzer filter or the measuring and evaluation device is designed to implement a sinusoidal fit function.

[0067] In an alternative embodiment, the measuring and evaluation device is designed to determine the density difference of the Lissajous figure.

[0068] In a preferred embodiment, the measuring and evaluation device together with the magnetic field sensor is integrated monolithically or as a multi-chip solution into an IC housing. BRIEF DESCRIPTION OF THE DRAWINGS

[0069] The invention is explained in more detail below with reference to the drawings. Similar parts are marked with the same names. The embodiments shown are highly schematic, i.e. the distances and the lateral and vertical extensions are not to scale and do not have any derivable geometrical relationships with each other unless otherwise indicated. It is shown in the drawings:

[0070] Figure 1 Sine and cosine signals with errors due to the third harmonic

[0071] Figure 2 The spectrum of the signal,

[0072] Figure 3 The final angle error obtained by analyzing the processed signal is expressed as follows:

[0073] Figure 4 Analyze and process the frequency spectrum of the signal.

[0074] Figure 5 Representation of erroneous sine and cosine signals in Lissajous figures with density differences at the measurement points,

[0075] Figure 6 Sine and cosine signals with errors,

[0076] Figure 7 Goetzel filter,

[0077] Figure 8 Rotating device,

[0078] Fig. 9 Linear devices,

[0079] Figure 10 Representation of ideal sine and cosine signals. DETAILED DESCRIPTION

[0080] It should be noted that in the following diagrams, the sine and cosine signals shown from the two magnetic field sensors S1 and S2 are either present directly as measurement signals or only after a transformation.

[0081] Figure 1The diagram of shows an ideal sine signal 10 and an ideal cosine signal 20, which represent the first harmonic of each of the two signals 10 and 20. The existing angle values ​​(in degrees) are given on the abscissa, and the magnitude of the output signal is given on the ordinate, wherein the maximum amplitude is normalized to the value 1.

[0082] The sine error signal 30 and the cosine error signal 40 occur at three times the frequency and therefore each represent a third harmonic in relation to the two ideal signals 10 and 20 .

[0083] Curve profiles 50 and 60 show actual signals, wherein the actual signals are distorted due to the superposition of ideal signals 10 and 20 and error signals 30 and 40 .

[0084] Figure 2 The diagram of shows the frequency spectra of signals 50 and 60 .

[0085] Plot the frequency on the horizontal axis. Plot the logarithmically scaled amplitude of the signal on the vertical axis.

[0086] The amplitude of the first harmonic 70 (also called the fundamental wave) and the amplitude of the third harmonic 80 (also called the second higher harmonic) are correspondingly very significant.

[0087] The use of the method according to the invention causes the third harmonic 80 to drop 90 to a significantly lower level 100 .

[0088] Figure 3 The diagram of shows the curve course of the resulting angular error Δφ, which is displayed as a second harmonic 110 .

[0089] The actually existing angle value of the magnet arrangement is plotted on the abscissa (in degrees), and the resulting angle error is plotted on the ordinate (in degrees).

[0090] In this case, the error appears as a second harmonic oscillation. The characteristic shown presupposes a deviation of the signal in the form of a pronounced third harmonic.

[0091] Figure 4 The diagram of shows a spectral representation of the resulting angular error Δφ. The amplitude of the second harmonic 120 is very significant.

[0092] The use of the method according to the invention causes the second harmonic 120 to drop 130 to a significantly lower level 140 .

[0093] exist Figure 5 The diagram of shows the Lissajous figures of sine and cosine measurement signals.

[0094] The graph has no further deformation, which means that the three errors in question have been ideally balanced. However, the graph does not have any equidistant measurement points 8.

[0095] The density distribution indicates the presence of the second harmonic in the signal. Although a change in the value used to correct the gain error and / or the value used to correct the orthogonality error distorts the graph, it will homogenize the density distribution and thereby reduce the resulting angular error Δφ.

[0096] Figure 6 The diagram of φ shows the course of uncompensated sine and cosine signals as a function of the rotation angle value actually present due to the magnet arrangement.

[0097] In this case, the signals have three error types, the compensation of which forms the prior art. A DC component 170, which is often also referred to as an offset, results in a modulation of one or both signals in the positive or negative direction.

[0098] The gain error 180 results in the difference in the peak values ​​of the two signals in the absence of a DC component.

[0099] The orthogonality error 190 causes a phase shift in the signal which is not equal to 90°. In this case, the orthogonality error describes the deviation of the two measured magnetic field vector components from an ideal 90° orientation.

[0100] The application of the method according to the invention reduces the amplitude of the third harmonic in the measured values ​​by correcting the values ​​for compensating the gain error and / or the values ​​for compensating the orthogonality error and thereby also minimizes the resulting angular error Δφ.

[0101] Inherent in this approach is that in the presence of the third harmonic in the signal, an increased gain error and / or an increased orthogonality error leads to a lower resulting angle error than according to known compensations, in which the gain error and / or orthogonality error in the signal is directly balanced.

[0102] In this context, we may speak of overcompensation. In other words, with the method according to the invention, overcompensation of gain errors and / or orthogonality errors from the first harmonic in the signal leads to an increase in the accuracy of the angle calculation.

[0103] exist Figure 7 In the diagram of , a second-order Goetzer filter is shown by way of example. The use of a Goetzer filter allows targeted determination of individual spectral components of a signal. A Goetzer filter is particularly suitable for determining the third harmonic of a signal according to the invention.

[0104] exist Figure 8, a rotary device DV is depicted, wherein the rotary device DV has a rotation axis DA configured in the Z direction and a permanent magnet PM arranged on the end face of the rotation axis DA in the XY plane. The permanent magnet PM has a north pole N and a south pole S. A first magnetic field sensor S1 and a second magnetic field sensor S2 are arranged on a carrier plate TR along an imaginary extension of the rotation axis DA.

[0105] The two magnetic field sensors S1, S2 are spaced apart from one another by a distance x1 in the X direction. The two magnetic field sensors S1, S2 are also spaced apart from the head-side end of the axis of rotation DA. In the event of a tilting of the carrier plate with the two magnetic field sensors S1, S2 relative to the end face and / or misalignment of the magnetic field sensors S1, S2, the signals may be loaded with different errors.

[0106] In an embodiment not shown, the distance x1 between the two magnetic field sensors S1 and S2 is zero or very small, so that the two magnetic field sensors S1 and S2 are arranged one above the other in the Z direction, wherein when arranged one above the other the two magnetic field sensors preferably measure different components of the magnetic field.

[0107] exist Fig. 9 The illustration of shows the arrangement of permanent magnet pairs along a straight line.

[0108] By means of a linearly movable permanent magnet PM with pole pairs arranged in a row, sine and cosine signals can be generated respectively by means of spaced magnetic field sensors S1, S2. Even in the case of linear motion, the compensation according to the invention for angular errors due to third-order deviations in the signal can be applied to translational path measurement / position measurement.

[0109] The diagram of FIG. 10 shows an idealized course of two signals, a sine signal 200 and a cosine signal 210 , as a function of the rotation angle value actually present due to the magnet arrangement.

[0110] By evaluating the inverse tangent function, the value of the rotation angle is determined from the quotient of the signals.

[0111] Both sine and cosine signals are ideal, ie error-free.

Claims

1. A method for compensating for an angular error when determining an angular value of an arrangement having a permanent magnet (PM) and at least two magnetic field sensors (S1, S2), the method comprising: - a measuring and evaluation device connected to the magnetic field sensors (S1, S2), - constructing a distance between the permanent magnet and the magnetic field sensor (S1, S2), - generating a sine signal and a cosine signal in the magnetic field sensor (S1, S2) by means of a forced-guided mechanical movement, or generating the sine signal and the cosine signal by means of a transformation, and From these two signals, an evaluation signal corresponding to the angle value is formed by means of an inverse tangent function, wherein - arrangement errors and errors from the measuring and evaluation unit change the shape of the evaluation signal and lead to angular deviations in the evaluation signal, and, - varying the gain and orthogonality values ​​of said signals so as to minimize said angular deviation, It is characterized in that A value for correcting a gain error and / or a value for correcting an orthogonality error is ascertained, wherein a second harmonic in the evaluation signal and / or a third harmonic in the signal and / or density differences of measurement points of the Lissajous figure are determined.

2. The method according to claim 1, characterized in that After the angle value has been calculated using the inverse tangent function, the value for correcting the gain error and / or the value for correcting the orthogonality error is determined from the amplitude and phase of the second harmonic of the resulting angular deviation of the 360° rotation.

3. The method according to claim 1, characterized in that In order to determine the value of the gain error and / or the value for correcting the orthogonality error from the density differences of the measuring points of the Lissajous figure, the measuring points are recorded at a constant rotational speed with a fixed sampling rate.

4. The method according to claim 1, characterized in that: The value for correcting the gain error and / or the value for correcting the orthogonality error is determined from the component of the second harmonic in the resulting course of the error of the rotation angle during a 360° rotation, which is calculated by means of the DFT or FFT.

5. The method according to claim 1, characterized in that: The value for correcting the gain error and / or the value for correcting the orthogonality error is determined by varying correction values ​​already generated by other methods and the third harmonics of the sine and cosine signals calculated by means of DFT or FFT.

6. The method according to claim 4 or 5, characterized in that: The DFT calculation is performed using the Goetzer algorithm, or the second harmonic or the third harmonic is directly obtained using a sinusoidal fitting function.

7. The method according to any one of the preceding claims, characterized in that The determination of the value for correcting the gain error and / or the value for correcting the orthogonality error is performed multiple times in an iterative manner.

8. The method according to any one of the preceding claims, characterized in that After the correction values ​​have been determined, the third harmonic is determined directly in the signal by comparing the signal's profile with an ideal sinusoidal profile and by comparing the signal's profile with an ideal cosine profile, and the value to be set for correcting the gain error and / or the value to correct the orthogonality error is determined from the determined correction values ​​and the deviation from the ideal profile.

9. The method according to any one of the preceding claims, characterized in that The magnetic field sensors (S1, S2) are spaced apart along the X direction, or the magnetic field sensors (S1, S2) are arranged one above the other along the Z direction.

10. Use of the method according to any one of the preceding claims for ascertaining a rotation angle value, comprising: - a shaft with an end face and at least one permanent magnet arranged on the end face or laterally on the shaft, at least two magnetic field sensors (S1, S2) arranged along an imaginary extension of the shaft or arranged laterally relative to the shaft, wherein a distance is formed between the shaft and the magnetic field sensors (S1, S2), - a measuring and evaluation device connected to the magnetic field sensors (S1, S2), wherein: When the shaft rotates, a sine or cosine signal is present at the output of the corresponding magnetic field sensor, and the measuring and evaluation device is designed to calculate an evaluation signal corresponding to the rotation angle value from said signal by means of an inverse tangent function in order to minimize the angular deviation.

11. Use of the method according to any one of the preceding claims 1 to 8 for determining an angular value of a translational movement path, comprising: - a plurality of permanent magnet pairs arranged along the translation path, at least two magnetic field sensors arranged along the translational movement path, the magnetic field sensors being spaced apart from the permanent magnet pair and being arranged movably along the translational movement path, - a measuring and evaluation device connected to the magnetic field sensors (S1, S2), wherein: -When the permanent magnet pair or the magnetic field sensor (S1, S2) moves translationally along the path, a sine signal or a cosine signal is present at the output end of the magnetic field sensor (S1, S2), and the measuring and analyzing device is configured to calculate an analyzing signal corresponding to the angle value from the signal with the aid of an inverse tangent function in order to minimize the angular deviation.

12. Use of the method according to claim 10 or claim 11, characterized in that The measuring and evaluation device is configured to determine a value for correcting a gain error and / or a value for correcting an orthogonality error by means of a DFT or FFT evaluation.

13. Use of the method according to any one of claims 10 to 12, characterized in that The measuring and evaluating device comprises a Goetzer filter or is configured to implement a sinusoidal fit function.

14. Use of the method according to claim 10 or claim 11, characterized in that The measuring and evaluation device is set up to determine density differences at the measuring points of a Lissajous figure.

15. Use of the method according to any one of the preceding claims, characterized in that The measuring and evaluation device together with the magnetic field sensor is integrated monolithically or as a multi-chip solution into an IC housing.

Images