Layout graph size calibration method and system, mask, equipment and storage medium

Abstract

The invention discloses a layout graph size calibration method and system, a mask, equipment and a storage medium, and the method comprises the steps: obtaining a layout layer which comprises a first graph extending in a first direction and a plurality of second graphs crossing the first graph; dividing the layout layer into a plurality of pattern density areas according to the pattern density; obtaining a plurality of second graphs and a processing unit formed by the first graph spanned by the second graphs, the processing unit completely covering the first graph and the second graphs, and the boundary of a combined graph formed by the first graph and the second graphs coinciding with the boundary of the processing unit; acquiring a processing unit having a boundary of a pattern density region as a calibration unit; performing graph density region redefinition processing on the calibration unit according to the division condition of the boundary of the graph density region on the calibration unit; and after the graph density area redefinition processing is carried out, size compensation processing is carried out on the graph corresponding to each graph density area according to a processing result. According to the invention, the redefinition processing efficiency of the graph density region is improved.

Description

Technical Field

[0001] The embodiments of the present invention relate to the field of semiconductor manufacturing, and in particular to a layout graphic size calibration method and system, a mask, a device and a storage medium. Background Art

[0002] As semiconductor chip manufacturing technology has greatly improved in the past few years, semiconductor chip foundries have to deal with more complex situations, most of which are completely new to their knowledge and experience. Critical Dimension (CD) variation control requires very critical accuracy to ensure the normal operation of the equipment, especially in the front end of layers (FEOL).

[0003] The current methods for OPC (Optical Proximity Correction) CD compensation mainly focus on two parameters: OPC model error / etch bias loading. Recently, a new relationship between CD and local density has been discovered in the FEOL layer. At the same time, it also brings new challenges. Summary of the invention

[0004] The problem solved by the embodiments of the present invention is to provide a layout pattern size calibration method and system, mask, device and storage medium, which can improve the optical proximity correction effect and save process costs.

[0005] To solve the above problems, an embodiment of the present invention provides a method for calibrating the size of a layout graphic, comprising: obtaining a layout layer, the layout layer comprising a first graphic extending along a first direction, and a plurality of second graphics spanning the first graphic, the second graphics extending along the second direction and arranged in parallel along the first direction, and the second direction being perpendicular to the first direction; dividing the layout layer into a plurality of graphic density areas according to the graphic density; obtaining a processing unit consisting of the plurality of second graphics and the first graphic spanned by the second graphics, the shape of the processing unit being a rectangle or a combination of a plurality of rectangles, the processing unit completely covering the first graphic and the second graphic, and the boundary of the combined graphic consisting of the first graphic and the second graphic coinciding with the boundary of the processing unit; obtaining a processing unit having a boundary of a graphic density area as a calibration unit; performing graphic density area redefinition processing on the calibration unit according to the division of the calibration unit by the boundary of the graphic density area; after performing the graphic density area redefinition processing, performing size compensation processing on the graphics corresponding to each graphic density area according to the processing result.

[0006] Correspondingly, an embodiment of the present invention further provides a layout graphic size calibration system, comprising: a layout layer acquisition module, used to acquire a layout layer, the layout layer comprising a first graphic extending along a first direction, and a plurality of second graphics spanning the first graphic, the second graphics extending along the second direction and arranged in parallel along the first direction, and the second direction being perpendicular to the first direction; a graphic density area acquisition module, used to divide the layout layer into a plurality of graphic density areas according to the graphic density; a processing unit acquisition module, used to acquire a processing unit composed of a plurality of second graphics and a first graphic spanned by the second graphics, the shape of the processing unit being a rectangle or a combination of a plurality of rectangles, the processing unit completely covering the first graphic and the second graphic, and the boundary of the combined graphic composed of the first graphic and the second graphic coinciding with the boundary of the processing unit; a calibration unit acquisition module, used to acquire a processing unit having a boundary of a graphic density area as a calibration unit; a redefinition processing module, used to perform graphic density area redefinition processing on the calibration unit according to the division of the calibration unit by the boundary of the graphic density area; and a size compensation module, used to perform size compensation processing on the graphics corresponding to each graphic density area according to the processing result after performing the graphic density area redefinition processing.

[0007] Correspondingly, an embodiment of the present invention further provides a mask plate, including a pattern obtained by using the layout pattern size calibration method provided by the embodiment of the present invention.

[0008] Correspondingly, an embodiment of the present invention also provides a device, comprising at least one memory and at least one processor, wherein the memory stores one or more computer instructions, wherein the one or more computer instructions are executed by the processor to implement the layout graphic size calibration method provided in an embodiment of the present invention.

[0009] Correspondingly, an embodiment of the present invention further provides a storage medium, wherein the storage medium stores one or more computer instructions, and the one or more computer instructions are used to implement the layout graphic size calibration method provided by the embodiment of the present invention.

[0010] Compared with the prior art, the technical solution of the embodiment of the present invention has the following advantages:

[0011] In the layout graphic size calibration method provided by the embodiment of the present invention, a processing unit with a boundary of a graphic density area is obtained as a calibration unit, and a graphic density area redefinition processing is performed on the calibration unit according to the division of the calibration unit by the boundary of the graphic density area. After the graphic density area redefinition processing is performed, size compensation processing is performed on the graphics corresponding to each graphic density area according to the processing result; the first graphic and the second graphic are composed of a processing unit, and a processing unit with a boundary of a graphic density area is selected as the calibration unit. By redefining the graphic density area based on the calibration unit, it is beneficial to make the result of redefining the graphic density area of ​​the layout layer smoother, and reduce the probability of excessive jump in the size compensation of the first graphic and the second graphic based on the result of the graphic density area redefinition, improve the balance of the graphics after the graphic size compensation processing, and also help to improve the efficiency of the graphic density area redefinition processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a flow chart of an embodiment of a method for calibrating the size of a layout pattern of the present invention;

[0013] Figures 2 to 25 It is a schematic diagram corresponding to each step in an embodiment of a layout pattern size calibration method of the present invention;

[0014] Fig.26 It is a functional block diagram of an embodiment of a layout pattern size calibration system of the present invention;

[0015] Fig. 27 It is a hardware structure diagram of an embodiment of the device provided by the present invention. DETAILED DESCRIPTION

[0016] As can be seen from the background technology, in the prior art, the size compensation jump of the graphics in the layout layer is too large, and it is difficult to achieve a good balance of the graphics in the layout layer after the size compensation processing of the graphics.

[0017] In order to solve the above technical problem, an embodiment of the present invention provides a layout pattern size calibration method. Figure 1 , showing a flow chart of an embodiment of a layout graphic size calibration method of the present invention.

[0018] In this embodiment, the layout pattern size calibration method includes the following basic steps:

[0019] Step S1: obtaining a layout layer, the layout layer comprising a first graphic extending along a first direction, and a plurality of second graphics spanning the first graphic, the second graphics extending along a second direction and arranged parallel to the first direction, and the second direction being perpendicular to the first direction;

[0020] Step S2: dividing the layout layer into a plurality of graphic density areas according to the graphic density;

[0021] Step S3: obtaining a plurality of second graphics and a processing unit formed by a first graphic spanned by the second graphics, wherein the processing unit is in the shape of a rectangle or a combination of a plurality of rectangles, the processing unit completely covers the first graphic and the second graphic, and the boundary of the combined graphic formed by the first graphic and the second graphic coincides with the boundary of the processing unit;

[0022] Step S4: obtaining a processing unit having a boundary of a graphic density region as a calibration unit;

[0023] Step S5: redefining the pattern density area of ​​the calibration unit according to the division of the calibration unit by the boundary of the pattern density area;

[0024] Step S6: After the graphic density area redefinition process is performed, the graphics corresponding to each graphic density area are subjected to size compensation processing according to the processing result.

[0025] In order to make the above-mentioned purposes, features and advantages of the embodiments of the present invention more obvious and understandable, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0026] Figures 2 to 25 It is a schematic diagram corresponding to each step in an embodiment of a layout graphic size calibration method of the present invention.

[0027] refer to Figure 2 , execute step S1: obtain a layout layer 100, the layout layer 100 includes a first direction (such as Figure 2 The first graphic 110 extending in the second direction (shown in the X direction) and the plurality of second graphics 120 spanning the first graphic 110, the second graphics 120 extending in the second direction (shown in the X direction) Figure 1 The first and second directions are shown in the Y direction and extend in parallel with each other along the first direction, and the second direction is perpendicular to the first direction.

[0028] The pattern of the pattern layer 100 is the target pattern to be transferred onto the wafer. After the pattern of the pattern layer 100 is subjected to optical proximity correction, the obtained pattern is used to make a mask, and then the mask is used to perform a photolithography process to form a corresponding mask pattern on the wafer.

[0029] In this embodiment, the first pattern 110 is an active region pattern, and the second pattern 120 is a gate structure pattern.

[0030] Combined with reference Figure 3 and Figure 4 , execute step S2: divide the printed layer 100 into a plurality of graphic density areas according to the graphic density.

[0031] The layout layer 100 is the layout layer of the current layer, and the graphic density is the graphic density of the previous layout layer. The formation of the current layer graphic is compensated based on the graphic density area of ​​the previous layout layer. Specifically, the second graphic 120 corresponds to the gate structure (GT, gate) formed on the wafer, and the graphic density refers to the graphic density of the gate core layer (GM, gate mandrel) of the previous layout layer. The previous layout layer adopts the SADP process to form the gate core layer. Based on the graphic density of the gate core layer, graphic compensation is performed on the gate structure formed in the current layer.

[0032] It should be noted that the method for dividing the graphic density area is usually to divide the measurement area with a certain point as the center point, obtain the graphic density area of ​​the front layer of the layout layer corresponding to the second graphic 120 in the measurement area, and correspondingly obtain the graphic density area division of the entire layout layer 100.

[0033] Execute step S3: obtain a processing unit 100a consisting of multiple second graphics 120 and a first graphic 110 spanned by the second graphics 120, the shape of the processing unit 100a is a rectangle or a combination of multiple rectangles, the processing unit 100a completely covers the first graphic 110 and the second graphic 120, and the boundary of the combined graphic consisting of the first graphic 110 and the second graphic 120 coincides with the boundary of the processing unit 100a.

[0034] The processing unit 100a is the basic area for the subsequent selection of the calibration unit. The processing unit 100a completely covers the first figure 110 and the second figure 120, and the boundary of the combined figure formed by the first figure 110 and the second figure 120 coincides with the boundary of the processing unit 100a, so that the processing unit 100a is a rectangle that just contains the first figure 110 and the second figure 120 or a combination of multiple rectangles, which is conducive to making full use of the area of ​​the processing unit 100a, making the area of ​​the processing unit 100a as small as possible, and reducing subsequent computing power.

[0035] Figure 2 The area filled with diagonal lines in FIG. 1 illustrates the processing unit 100 a . For clarity of illustration, the processing unit 100 a is not filled in other drawings, and the processing unit 100 a is illustrated with a dotted box.

[0036] In this embodiment, in the processing unit 100a formed by obtaining a plurality of second graphics 120 and a first graphic 110 spanned by the second graphics 120, the processing unit 100a in the layout layer 100 can be a rectangle or a combination of multiple rectangles (such as Figure 4 shown).

[0037] Execute step S4: obtain the processing unit 100a having the boundary of the graphic density area as the calibration unit 100c.

[0038] The calibration unit 100c has a boundary of a pattern density area, which is used as an area for performing a pattern density area redefinition process.

[0039] In this embodiment, when the shape of the processing unit 100a is a combination of multiple rectangles, the processing unit 100a having the boundary of the pattern density area is obtained as the calibration unit 100c, and the processing unit 100a is divided into multiple rectangular units along the extension direction of the boundary of the pattern density area by a straight line perpendicular to the boundary of the processing unit 100a of the pattern density area, and each rectangular unit is used as the calibration unit 100c (such as Figure 4 shown).

[0040] The processing unit 100a is divided into a plurality of calibration units 100c along the extension direction of the boundary of the pattern density area, so that subsequent processing of the calibration units 100c is more uniform.

[0041] Combined with reference Figures 5 to 18 , executing step S5: redefining the pattern density area of ​​the calibration unit 100c according to the division of the calibration unit 100c by the boundary of the pattern density area.

[0042] For clarity of illustration, two pattern density areas in the calibration unit 100c are respectively indicated by D1 and D2 in the drawing.

[0043] The graphics of a calibration unit 100c correspond to an active area on the wafer, and a gate structure spanning the same active area. Therefore, a calibration unit 100c is usually a unified device area. Therefore, when there is a boundary of a graphic density area in the calibration unit 100c, the graphic density area of ​​the calibration unit 100c is redefined, which is conducive to making the graphic compensation in a unified device area more uniform.

[0044] In this embodiment, the graphic density area redefinition process refers to redefining the graphic density area in the calibration unit 100c into regions, and accordingly, subsequent graphic compensation is performed based on the redefined and divided graphic density areas.

[0045] In this embodiment, the first graphic 110 and the second graphic 120 form a processing unit 100a, and the processing unit 100a having a boundary of a graphic density area is selected as a calibration unit 100c. By using the calibration unit 100c as a reference to perform a graphic density area redefinition process, it is beneficial to make the result of the graphic density area redefinition of the layout layer 100 smoother, and reduce the probability of excessive jumps in the size compensation of the first graphic 110 and the second graphic 120 based on the graphic density area redefinition result, improve the balance of the graphic after the graphic size compensation process, and also help to improve the efficiency of the graphic density area redefinition process.

[0046] In this embodiment, according to the division of the calibration unit 100c by the boundary of the graphic density area, the calibration unit 100c is redefined by the graphic density area, including: obtaining the boundary of the graphic density area located in the calibration unit 100c as the target boundary 100b; obtaining the calibration unit 100c covered by the translation of the target boundary 100b along its vertical direction as the target calibration unit; according to the division of the target calibration unit by the target boundary 100b, the target calibration unit is redefined by the corresponding graphic density area.

[0047] Specifically, Fig. 9 As shown, when the target boundary 100b extends in only one direction, the calibration unit 100c covered by the target boundary 100b translated in the vertical direction thereof is obtained as the target calibration unit, that is, the calibration unit 100c. Figure 6 As shown, when the target boundary 100b extends along two perpendicular directions, the calibration unit 100c covered by the translation of the target boundary 100b along its perpendicular direction is obtained as the target calibration unit, that is, the partial calibration unit 100c covered by the sparse filling layer and the dense filling layer in the figure.

[0048] In this embodiment, the processing unit 100a that obtains the boundary of the pattern density area is used as the calibration unit 100c, and the boundary of the pattern density area includes a first boundary extending along the first direction or a second boundary extending along the second direction.

[0049] Accordingly, in this case, in this embodiment, the boundary of the graphic density area located in the calibration unit 100c is obtained as the target boundary 100b, and the first boundary or the second boundary located in the calibration unit 100c is obtained as the target boundary 100b, that is, when the boundary of the graphic density area includes a first boundary extending along the first direction or a second boundary extending along the second direction, the target boundary 100b extends along the first direction or extends along the second direction.

[0050] In this embodiment, Figure 5 As shown, in the processing unit 100a that obtains the boundary of the pattern density area as the calibration unit 100c, the boundary of the pattern density area includes a first boundary extending along the first direction and a second boundary extending along the second direction.

[0051] Accordingly, in this case, in this embodiment, according to the division of the calibration unit 100c by the boundary of the pattern density area, the calibration unit 100c is redefined twice in the pattern density area redefinition process. Since the boundary of the pattern density area includes a first boundary extending along the first direction and a second boundary extending along the second direction, it is necessary to perform the pattern density area redefinition process according to the first boundary and the second boundary respectively. Therefore, in this embodiment, the redefinition process is performed twice.

[0052] Specifically, in this embodiment, Figure 6 As shown, in the first redefinition process, the boundary of the pattern density area located in the calibrated unit 100c is obtained as the target boundary 100b, and any one of the first boundary and the second boundary located in the calibration unit 100c is used as the target boundary 100b.

[0053] In this embodiment, the second boundary extending along the second direction is first used as the target boundary 100 b .

[0054] In this embodiment, in the second redefinition process, the boundary of the graphic density area in the calibration unit 100c is obtained as the target boundary 100b, and the target boundary 100b is updated according to the result of the first redefinition process. Updating the target boundary 100b according to the result of the first redefinition process is conducive to real-time adjustment of the second redefinition process according to the specific processing situation of the graphic density area redefinition process, which is conducive to making the result of the second redefinition process more accurate.

[0055] Specifically, in this embodiment, updating the target boundary according to the result of the first redefinition process includes: when the result of the first pattern density area redefinition process is that the original pattern density area of ​​the target calibration unit remains unchanged, obtaining the other of the first boundary and the second boundary located in the calibration unit 100c as the target boundary 100b. Figure 8 As shown, when the result of the first pattern density area redefinition process is that the original pattern density area of ​​the target calibration unit remains unchanged, the second boundary extending along the second direction is used as the target boundary 100b of the second redefinition process.

[0056] In this embodiment, when the result of the first pattern density area redefinition process is the merging of the pattern density areas of the target calibration unit, the boundary between the merged pattern density area and the remaining pattern density areas in the calibration unit 100c is obtained as the target boundary 100b. Figure 7 As shown, when the result of the first pattern density area redefinition process is the merging of the pattern density areas of the target calibration unit, the portion of the straight line where the second boundary extending along the second direction is located in the calibration unit 100c is used as the target boundary 100b.

[0057] Combined with reference Figures 9 to 18 According to the division of the target calibration unit by the target boundary 100b, the target calibration unit is subjected to corresponding graphic density area redefinition processing, including: obtaining a size of the target calibration unit along the first direction as a first size L1, and a size along the second direction as a second size L2.

[0058] Specifically, in conjunction with reference Fig. 9 and Fig.10When the first size L1 and the second size L2 are both less than or equal to the size threshold, the areas of the two graphic density areas divided by the target calibration unit by the target boundary 100b are obtained, and the graphic density area with a larger area is the first graphic density area, and the graphic density area with a smaller area is the second graphic density area; the first graphic density area and the second graphic density area are merged into the first graphic density area.

[0059] Redefining the second graphic density area with a smaller area into the first graphic density area with a larger area is beneficial to reducing the modified area of ​​the graphic density area in the target calibration unit, and is beneficial to reducing the difference in density areas between the target calibration unit and the original calibration unit 100c after the redefinition process, thereby improving the balance of the graphic after the graphic size compensation process.

[0060] Combined with reference Figures 11 to 14 ,as well as Fig.17 and Fig.18 , when the first size L1 or the second size L2 is greater than the size threshold and the extension direction of the target boundary 100b is parallel to the short side of the target calibration unit, or when the first size L1 or the second size L2 is greater than the size threshold, obtain the distances d1 and d2 between the target boundary 100b and the target calibration unit extending in the same direction; select a graphic density area with a distance less than n times the size threshold as the second graphic density area, and another graphic density area as the first graphic density area; merge the first graphic density area and the second graphic density area into the first graphic density area; when both distances are greater than or equal to n times the size threshold, do not process the target calibration unit, where n is equal to 0.5.

[0061] Specifically, Fig.11 and Fig.12 FIG. 4 shows a case where the first size L1 is greater than the size threshold and the extension direction of the target boundary 100b is parallel to the short side of the target calibration unit. Fig.13 and Fig.14 1 shows a case where the second size L2 is greater than the size threshold and the extension direction of the target boundary 100b is parallel to the short side of the target calibration unit. Fig.17 and Fig.18 The case where the first size L1 or the second size L2 is greater than the size threshold is shown.

[0062] Redefining the second graphic density area with a smaller width into the first graphic density area with a larger width is beneficial to reducing the modified area of ​​the graphic density area in the target calibration unit, and is beneficial to reducing the difference in density areas between the target calibration unit and the original calibration unit 100c after the redefinition process, thereby improving the balance of the graphic after the graphic size compensation process.

[0063] Combined with reference Fig.15 and Fig.16, when either the first size L1 or the second size L2 is greater than the size threshold, and the other is less than or equal to the size threshold, and the extension direction of the target boundary 100b is parallel to the long side of the target calibration unit, the areas of the two graphic density areas of the target calibration unit divided by the target boundary 100b are obtained, and the spacing between the two boundaries extending in the same direction of the target boundary 100b and the target calibration unit is obtained; a graphic density area with a spacing less than n times the size threshold and an area less than n times the area of ​​the target calibration unit is selected as the second graphic density area, and the other graphic density area is selected as the first graphic density area; the first graphic density area and the second graphic density area are merged into the first graphic density area, where n is equal to 0.5.

[0064] Redefining the second graphic density area with a smaller area and a smaller width as the first graphic density area with a larger area and a larger width, and taking both the area and the width into consideration, is beneficial to reducing the modified area of ​​the graphic density area in the target calibration unit, and is beneficial to reducing the difference in density areas between the target calibration unit and the original calibration unit 100c after the redefinition process, thereby improving the balance of the graphic after the graphic size compensation process.

[0065] Combined with reference Figures 19 to 23 , after redefining the graphic density area of ​​the calibration unit according to the division of the calibration unit by the boundary of the graphic density area, it also includes: when the calibration unit 100c still has a boundary of the graphic density area, determining whether the boundary of the graphic density area divides the first graphic 110 or the second graphic 120.

[0066] Whether to perform subsequent graphic re-division processing is determined based on the result of determining whether the boundary of the graphic density region divides the first graphic 110 or the second graphic 120 .

[0067] Specifically, in this embodiment, if yes, the first graphic 110 or the second graphic 120 is subjected to graphic re-division processing; otherwise, the graphic density area of ​​the calibration unit 100c is kept unprocessed.

[0068] If so, the boundary of the graphic density area still has an impact on the formation of the current layer graphic that is compensated based on the divided first graphic 110 or the second graphic 120. Therefore, re-dividing the first graphic 110 or the second graphic 120 is beneficial to reducing the uniformity of the formation of the current layer graphic that is compensated based on the same first graphic 110 or the second graphic 120, and improving the balance of the graphic after the graphic size compensation processing.

[0069] Combined with reference Fig.19 and Fig. 20, in the calibration unit 100c, there is also a boundary of a graphic density area. When the boundary of the graphic density area extends along the first direction, it is determined whether the boundary of the graphic density area divides the first graphic 110 or the second graphic 120, including: determining whether the boundary of the graphic density area divides the first graphic 110; if so, the graphic redivision processing includes: obtaining the areas of two regions of the first graphic 110 divided by the boundary of the graphic density area; translating the boundary of the graphic density area along its vertical direction to coincide with the boundary of the first graphic in an area with a smaller area.

[0070] Shifting the boundary of the graphic density area along its vertical direction to coincide with the boundary of the first graphic in a smaller area is beneficial to reducing the modified area of ​​the density area of ​​the first graphic 110, and is beneficial to reducing the balance of the graphic after the graphic re-division processing and improving the graphic size compensation processing.

[0071] Combined with reference Figure 21 to Figure 23 In the calibration unit 100c, there is also a boundary of a graphic density area. When the boundary of the graphic density area extends along the first direction, it is determined whether the boundary of the graphic density area divides the first graphic 110 or the second graphic 120, including: determining whether the boundary of the graphic density area divides the second graphic 120; if so, the graphic re-division processing includes: according to the division of the second graphic 120 by the boundary of the graphic density area, unifying the graphic density areas of the second graphic 120 into the same graphic density area.

[0072] According to the division of the second graphic 120 at the boundary of the graphic density area, the graphic density areas of the second graphic 120 are unified into the same graphic density area. The second graphic 120 is beneficial to reduce the graphic re-division process and improve the balance of the graphic after the graphic size compensation process.

[0073] Specifically, in this embodiment, the graphic density areas of the second graphic 120 are unified into the same graphic density area according to the division of the second graphic 120 by the boundaries of the graphic density areas, including: obtaining the size of the second graphic 120 along the first direction as the third size d0.

[0074] In this embodiment, when the third size d0 is smaller than the size threshold, or the boundary of the graphic density area only extends along the second direction, the graphic density areas of the second graphic 120 are unified into the same graphic density area according to the area of ​​the region divided by the boundary of the graphic density area.

[0075] In this embodiment, when the third size d0 is greater than or equal to the size threshold, and the boundary of the graphic density area includes a first graphic boundary along the first direction and a second graphic boundary extending along the second direction, the graphic density areas of the second graphic are unified into the same graphic density area based on the divided areas of the second graphic by the first graphic boundary and the second graphic boundary.

[0076] Specifically, refer to Fig. 22 , unifying the graphic density areas of the second graphic 120 into the same graphic density area according to the area of ​​the area divided by the boundary of the graphic density area, including: obtaining the area of ​​two areas of the second graphic 120 divided by the boundary of the graphic density area (such as Fig. 22 unifying the graphic density region of the second graphic 120 into a graphic density region having the same graphic density as the larger region of the two regions.

[0077] Unifying the graphic density area of ​​the second graphic 120 into a graphic density area with the same graphic density as the larger area of ​​the two areas is beneficial to reducing the modified area of ​​the graphic density area in the second graphic 120, and is beneficial to reducing the density area gap in the second graphic 120 after the re-division process, thereby improving the balance of the graphic after the graphic size compensation process.

[0078] In this embodiment, according to the area of ​​the second graphic 120 divided by the first graphic boundary and the second graphic boundary, the graphic density area of ​​the second graphic 120 is unified into the same graphic density area, including: taking any one of the first graphic boundary and the second graphic boundary as the first target graphic boundary, and taking the second graphic 120 covered by the first target graphic boundary along the vertical direction thereof as the first target graphic; obtaining the area of ​​two areas of the first target graphic divided by the first target graphic boundary (such as Fig. 22 ); unify the graphic density area of ​​the first target graphic into a graphic density area with the same graphic density as the larger area of ​​the two areas; use the boundary between the first target graphic and the remaining second graphics as the second target graphic boundary; obtain the areas of the two areas of the second graphic divided by the second target graphic boundary (as shown in Fig.23 unify the graphic density area of ​​the second graphic into a graphic density area with the same graphic density as the larger area of ​​the two areas.

[0079] Performing a redivision process based on the area as a measurement standard is beneficial to reducing the modified area of ​​the graphic density area in the second graphic 120, and is beneficial to reducing the density area gap in the second graphic 120 after the redivision process, thereby improving the balance of the graphic after the graphic size compensation process.

[0080] In this embodiment, according to the division of the calibration unit 100c by the boundary of the graphic density area, before redefining the graphic density area of ​​the calibration unit 100c, it also includes: obtaining the width of the graphic density area with the smallest width in the layout layer 100 as a size threshold.

[0081] The width of the smallest graphic density area in the layout layer 100 is used as the size threshold, which is beneficial to reducing the jumpiness of the graphic density area and improving the smoothness of the graphic density of the entire layout layer 100.

[0082] Combined with reference Fig.24 and Fig.26 After the graphic density area is redefined, before the size compensation processing is performed on the graphics corresponding to each graphic density area according to the processing result, it also includes: selecting the graphic density area surrounded by the adjacent graphic density areas as the modified graphic density area; obtaining the width size d3 of the modified graphic density area (such as Fig.24 As shown); when the width dimension d3 is less than the dimension threshold, the modified graphic density area is merged into its adjacent graphic density area (as shown Fig.25 When the width dimension d3 is greater than or equal to the dimension threshold, the modified graphic density area is not processed.

[0083] When the width dimension d3 is smaller than the dimension threshold, the graphic density area is too small, which may easily cause the graphic density area to jump. The corrected graphic density area is merged into its adjacent graphic density area, which is beneficial to improving the smoothness of the graphic density of the entire layout layer 100.

[0084] It should be noted that after the graphic density area redefinition processing is performed on the processing unit 100a, the graphic density area located outside the processing unit 100a and connected to the processing unit 100a is not subjected to the density area redefinition processing. Therefore, it is easy to leave a density area with a width size d3 smaller than the size threshold.

[0085] Execute step S6: After the pattern density area redefinition process is performed, the size compensation process is performed on the pattern corresponding to each pattern density area according to the processing result.

[0086] Specifically, the layout layer 100 is a front layout layer, and the formation of the current layer pattern is compensated based on the graphic density area of ​​the front layout layer. Specifically, the graphic density refers to the graphic density of the second graphic 120. The second graphic 120 corresponds to a gate structure formed on the wafer. The gate structure is formed by the SADP process. The second graphic 120 is the core layer in the SADP process. Based on the graphic density of the core layer, graphic compensation is performed on the sidewall layers formed on both sides of the core layer in the current layer.

[0087] Correspondingly, the present invention also provides an optical proximity correction system. Fig.26 It is a functional block diagram of an embodiment of an optical proximity correction system of the present invention.

[0088] In this embodiment, the optical proximity correction system 50 includes: a layout layer acquisition module 501, which is used to acquire a layout layer, wherein the layout layer includes a first graphic extending along a first direction and a plurality of second graphics spanning the first graphic, wherein the second graphics extend along the second direction and are arranged in parallel along the first direction, and the second direction is perpendicular to the first direction; a graphic density area acquisition module 502, which is used to divide the layout layer into a plurality of graphic density areas according to the graphic density; a processing unit acquisition module 503, which is used to acquire a processing unit composed of a plurality of second graphics and a first graphic spanned by the second graphics, wherein the processing unit is in the shape of a rectangle or a combination of a plurality of rectangles, wherein the processing unit completely covers the first graphic and the second graphic, and the boundary of the combined graphic composed of the first graphic and the second graphic coincides with the boundary of the processing unit; a calibration unit acquisition module 504, which is used to acquire a processing unit having a boundary of a graphic density area as a calibration unit; a redefinition processing module 505, which is used to perform a graphic density area redefinition processing on the calibration unit according to the division of the calibration unit by the boundary of the graphic density area; and a size compensation module 506, which is used to perform a size compensation processing on the graphics corresponding to each graphic density area according to the processing result after performing the graphic density area redefinition processing.

[0089] The pattern of the plate layer is the target pattern to be transferred to the wafer. After the pattern of the plate layer is subjected to optical proximity correction, the obtained pattern is used to make a mask plate, and then the mask plate is used for photolithography to form a corresponding mask pattern on the wafer.

[0090] In this embodiment, the first pattern is an active area pattern, and the second pattern is a gate structure pattern.

[0091] The graphic density region acquisition module 502 is used to divide the printed layer into a plurality of graphic density regions according to the graphic density.

[0092] The layout layer is the layout layer of the current layer, and the graphic density is the graphic density of the previous layout layer. The formation of the current layer graphic is compensated based on the graphic density area of ​​the previous layout layer. Specifically, the second graphic corresponds to the gate structure (GT, gate) formed on the wafer, and the graphic density refers to the graphic density of the gate core layer (GM, gate mandrel) of the previous layout layer. The previous layout layer adopts the SADP process to form the gate core layer. Based on the graphic density of the gate core layer, graphic compensation is performed on the gate structure formed in the current layer.

[0093] It should be noted that the method for dividing the graphic density area is usually to divide the measurement area with a certain point as the center point, obtain the graphic density area of ​​the front layer of the board layer corresponding to the second graphic in the measurement area, and correspondingly obtain the graphic density area division of the entire board layer.

[0094] The processing unit acquisition module 503 is used to acquire a processing unit consisting of multiple second graphics and a first graphic spanned by the second graphics. The shape of the processing unit is a rectangle or a combination of multiple rectangles. The processing unit completely covers the first graphic and the second graphic, and the boundary of the combined graphic consisting of the first graphic and the second graphic coincides with the boundary of the processing unit.

[0095] The processing unit is the basic area for the subsequent selection of the calibration unit. The processing unit completely covers the first figure and the second figure, and the boundary of the combined figure formed by the first figure and the second figure coincides with the boundary of the processing unit, so that the processing unit is a rectangle that just contains the first figure and the second figure or a combination of multiple rectangles, which is conducive to making full use of the area of ​​the processing unit, making the area of ​​the processing unit as small as possible, and reducing subsequent computing power.

[0096] In this embodiment, in the processing unit for obtaining a plurality of second graphics and a first graphic spanned by the second graphics, the processing unit in the layout layer may be a rectangle or a combination of a plurality of rectangles.

[0097] The calibration unit acquisition module 504 is used to acquire a processing unit having a boundary of a pattern density region as a calibration unit.

[0098] The calibration unit has a boundary of the pattern density area and is used as an area for performing pattern density area redefinition processing.

[0099] In this embodiment, when the shape of the processing unit is a combination of multiple rectangles, a processing unit with a boundary of a graphic density area is obtained as a calibration unit, and the processing unit is divided into multiple rectangular units along the extension direction of the boundary of the graphic density area using a straight line perpendicular to the boundary of the processing unit of the boundary of the graphic density area, and each rectangular unit serves as a calibration unit.

[0100] The processing unit is divided into a plurality of calibration units along the extension direction of the boundary of the pattern density area, so that subsequent processing of the calibration units is more uniform.

[0101] The redefinition processing module 505 is used to perform a graphic density area redefinition process on the calibration unit according to the division of the calibration unit by the boundary of the graphic density area.

[0102] The pattern of a calibration unit corresponds to an active area on the wafer, and a gate structure spanning the same active area. Therefore, a calibration unit is usually a unified device area. Therefore, when there is a boundary of a pattern density area in the calibration unit, the pattern density area of ​​the calibration unit is redefined, which is conducive to making the pattern compensation in a unified device area more uniform.

[0103] In this embodiment, the graphic density area redefinition process refers to redefining the graphic density area in the calibration unit into areas, and accordingly, the subsequent graphic compensation is based on the redefined and divided graphic density area.

[0104] In this embodiment, the first graphic and the second graphic are composed of a processing unit, and a processing unit with a boundary of a graphic density area is selected as a calibration unit. By redefining the graphic density area based on the calibration unit, the result of redefining the graphic density area of ​​the printing layer is made smoother, and the probability of excessive jumps in size compensation of the first graphic and the second graphic based on the result of redefining the graphic density area is reduced, the balance of the graphic after the graphic size compensation processing is improved, and the efficiency of the graphic density area redefinition processing is also improved.

[0105] In this embodiment, the calibration unit is redefined in a graphic density area according to how the calibration unit is divided by the boundary of the graphic density area, including: obtaining the boundary of the graphic density area in the calibration unit as the target boundary; obtaining the calibration unit covered by the translation of the target boundary along its vertical direction as the target calibration unit; and performing corresponding graphic density area redefinition processing on the target calibration unit according to how the target boundary divides the target calibration unit.

[0106] Specifically, when the target boundary extends along only one direction, the calibration unit covered by the translation of the target boundary along its perpendicular direction is obtained as the target calibration unit, and when the target boundary extends along two perpendicular directions, the calibration unit covered by the translation of the target boundary along its perpendicular direction is obtained as the target calibration unit, which is the partial calibration unit covered by the filling layer of sparse points and the filling layer of dense points in the figure.

[0107] In this embodiment, a processing unit having a boundary of a pattern density region is obtained as a calibration unit, and the boundary of the pattern density region includes a first boundary extending along a first direction or a second boundary extending along a second direction.

[0108] Accordingly, in this case, in this embodiment, the boundary of the graphic density area located in the calibration unit is obtained as the target boundary, and the first boundary or the second boundary located in the calibration unit is obtained as the target boundary, that is, when the boundary of the graphic density area includes a first boundary extending along a first direction or a second boundary extending along a second direction, the target boundary extends along the first direction or along the second direction.

[0109] In this embodiment, a processing unit having a boundary of a pattern density region is obtained as a calibration unit, and the boundary of the pattern density region includes a first boundary extending along a first direction and a second boundary extending along a second direction.

[0110] Accordingly, in this case, in this embodiment, according to the division of the calibration unit by the boundary of the graphic density area, the calibration unit is redefined twice in the graphic density area redefinition process.

[0111] Since the boundary of the graphic density area includes a first boundary extending along the first direction and a second boundary extending along the second direction, it is necessary to perform redefinition processing of the graphic density area according to the first boundary and the second boundary respectively. Therefore, in this embodiment, two redefinition processes are performed.

[0112] Specifically, in this embodiment, in the first redefinition process, the boundary of the graphic density area located in the calibrated unit is obtained as the target boundary, and any one of the first boundary and the second boundary located in the calibration unit is used as the target boundary.

[0113] In this embodiment, the second boundary extending along the second direction is first used as the target boundary.

[0114] In this embodiment, in the second redefinition process, the boundary of the graphic density area located in the calibration unit is obtained as the target boundary, and the target boundary is updated according to the result of the first redefinition process.

[0115] Updating the target boundary according to the result of the first redefinition process is conducive to real-time adjustment of the second redefinition process according to the specific processing situation of the graphic density area redefinition process, which is conducive to making the result of the second redefinition process more accurate.

[0116] Specifically, in this embodiment, the target boundary is updated according to the result of the first redefinition processing, including: when the result of the first graphic density area redefinition processing is that the original graphic density area of ​​the target calibration unit remains unchanged, obtaining the other of the first boundary and the second boundary located in the calibration unit as the target boundary.

[0117] When the result of the first pattern density area redefinition process is that the original pattern density area of ​​the target calibration unit remains unchanged, the second boundary extending along the second direction is used as the target boundary of the second redefinition process.

[0118] In this embodiment, when the result of the first pattern density area redefinition process is the merging of the pattern density areas of the target calibration unit, the boundary between the merged pattern density area and the remaining pattern density areas in the calibration unit is obtained as the target boundary.

[0119] When the result of the first pattern density area redefinition process is the merging of the pattern density areas of the target calibration unit, the portion of the straight line where the second boundary extending along the second direction is located in the calibration unit is used as the target boundary.

[0120] According to the division of the target calibration unit by the target boundary, the target calibration unit is subjected to corresponding graphic density area redefinition processing, including: obtaining a size of the target calibration unit along a first direction as a first size L1, and a size along a second direction as a second size L2.

[0121] Specifically, when the first size L1 and the second size L2 are both less than or equal to the size threshold, the areas of the two graphic density areas divided by the target boundary of the target calibration unit are obtained, and the graphic density area with a larger area is taken as the first graphic density area, and the graphic density area with a smaller area is taken as the second graphic density area; the first graphic density area and the second graphic density area are merged into the first graphic density area.

[0122] Redefining the second graphic density area with a smaller area into the first graphic density area with a larger area is beneficial to reducing the modified area of ​​the graphic density area in the target calibration unit, and is beneficial to reducing the difference in density area between the target calibration unit and the original calibration unit after the redefinition process, thereby improving the balance of the graphic after the graphic size compensation process.

[0123] When the first size L1 or the second size L2 is greater than the size threshold, and the extension direction of the target boundary is parallel to the short side of the target calibration unit, or when the first size L1 or the second size L2 is greater than the size threshold, obtain the spacing d1 and d2 between the two boundaries extending in the same direction of the target boundary and the target calibration unit; select a graphic density area with a spacing less than n times the size threshold as the second graphic density area, and another graphic density area as the first graphic density area; merge the first graphic density area and the second graphic density area into the first graphic density area; when both spacings are greater than or equal to n times the size threshold, do not process the target calibration unit, where n is equal to 0.5.

[0124] Redefining the second graphic density area with a smaller width as the first graphic density area with a larger width is beneficial to reducing the modified area of ​​the graphic density area in the target calibration unit, and is beneficial to reducing the difference in density areas between the target calibration unit and the original calibration unit after the redefinition process, thereby improving the balance of the graphic after the graphic size compensation process.

[0125] Specifically, in order to make the result of the redefinition processing more accurate and to improve the balance of the processed graphics, in this embodiment, n=0.5.

[0126] When either the first size L1 or the second size L2 is greater than the size threshold and the other is less than or equal to the size threshold, and the extension direction of the target boundary is parallel to the long side of the target calibration unit, obtain the areas of the two graphic density areas of the target calibration unit divided by the target boundary, and obtain the spacing between the two boundaries extending in the same direction as the target boundary and the target calibration unit; select a graphic density area with a spacing less than n times the size threshold and an area less than n times the area of ​​the target calibration unit as the second graphic density area, and another graphic density area as the first graphic density area; merge the first graphic density area and the second graphic density area into the first graphic density area, where n is equal to 0.5.

[0127] Redefining the second graphic density area with a smaller area and a smaller width as the first graphic density area with a larger area and a larger width, and taking the area and the width into consideration at the same time, is beneficial to reducing the modified area of ​​the graphic density area in the target calibration unit, and is beneficial to reducing the difference in density areas between the target calibration unit and the original calibration unit after the redefinition process, thereby improving the balance of the graphic after the graphic size compensation process.

[0128] After the calibration unit is redefined according to the boundary of the graphic density area, the method further includes: when the calibration unit still has a boundary of the graphic density area, determining whether the boundary of the graphic density area divides the first graphic or the second graphic.

[0129] Whether to perform subsequent graphic re-division processing is determined based on the result of determining whether the boundary of the graphic density region divides the first graphic or the second graphic.

[0130] Specifically, in this embodiment, if yes, the first graphic or the second graphic is subjected to graphic re-division processing; otherwise, the graphic density area of ​​the calibration unit is kept unprocessed.

[0131] If so, the boundary of the graphic density area still has an impact on the formation of the current layer graphic that is compensated based on the divided first graphic or second graphic. Therefore, re-dividing the first graphic or the second graphic is beneficial to reducing the uniformity of the formation of the current layer graphic that is compensated based on the same first graphic or second graphic, and improving the balance of the graphic after the graphic size compensation processing.

[0132] In the calibration unit, there is also a boundary of a graphic density area. When the boundary of the graphic density area extends along a first direction, it is determined whether the boundary of the graphic density area divides the first graphic or the second graphic, including: determining whether the boundary of the graphic density area divides the first graphic; if so, the graphic redivision processing includes: obtaining the areas of two regions of the first graphic divided by the boundary of the graphic density area; translating the boundary of the graphic density area along its vertical direction to overlap with the boundary of the first graphic in an area with a smaller area.

[0133] Shifting the boundary of the graphic density area along its vertical direction to coincide with the boundary of the first graphic in a smaller area is beneficial to reducing the modified area of ​​the first graphic density area, and is beneficial to reducing the balance of the graphic after the graphic re-division process and improving the graphic size compensation process.

[0134] The calibration unit also has a boundary of a graphic density area. When the boundary of the graphic density area extends along a first direction, determining whether the boundary of the graphic density area divides the first graphic or the second graphic includes: determining whether the boundary of the graphic density area divides the second graphic; if so, the graphic redivision processing includes: unifying the graphic density areas of the second graphic into the same graphic density area according to the division of the second graphic by the boundary of the graphic density area.

[0135] According to the division of the second graphic at the boundary of the graphic density area, the graphic density areas of the second graphic are unified into the same graphic density area, which is beneficial to reduce the graphic after the graphic re-division processing and improve the balance of the graphic after the graphic size compensation processing.

[0136] Specifically, in this embodiment, the graphic density areas of the second graphic are unified into the same graphic density area according to the division of the second graphic by the boundary of the graphic density area, including: obtaining the size of the second graphic along the first direction as the third size d0.

[0137] In this embodiment, when the third size d0 is smaller than the size threshold, or the boundary of the graphic density area only extends along the second direction, the graphic density areas of the second graphic are unified into the same graphic density area according to the area of ​​the region divided by the boundary of the graphic density area.

[0138] In this embodiment, when the third size d0 is greater than or equal to the size threshold, and the boundary of the graphic density area includes a first graphic boundary along the first direction and a second graphic boundary extending along the second direction, the graphic density areas of the second graphic are unified into the same graphic density area based on the divided areas of the second graphic by the first graphic boundary and the second graphic boundary.

[0139] Specifically, the graphic density areas of the second graphic are unified into the same graphic density area according to the areas of the regions divided by the boundary of the graphic density area for the second graphic, including: obtaining the areas of two regions of the second graphic divided by the boundary of the graphic density area; and unifying the graphic density areas of the second graphic into a graphic density area with the same graphic density as the larger area of ​​the two regions.

[0140] Unifying the graphic density area of ​​the second graphic into a graphic density area with the same graphic density as the larger area of ​​the two areas is beneficial to reducing the changed area of ​​the graphic density area in the second graphic, and is beneficial to reducing the density area gap in the second graphic after the re-division process, and improving the balance of the graphic after the graphic size compensation process.

[0141] In this embodiment, the graphic density areas of the second graphics are unified into the same graphic density area according to the areas divided by the first graphic boundary and the second graphic boundary, respectively, including: taking any one of the first graphic boundary and the second graphic boundary as the first target graphic boundary, and taking the second graphic covered by the first target graphic boundary translated along its vertical direction as the first target graphic; obtaining the areas of two regions of the first target graphic divided by the first target graphic boundary; unifying the graphic density area of ​​the first target graphic into a graphic density area with the same graphic density as the larger area of ​​the two areas; taking the boundary of the first target graphic and the remaining second graphics as the second target graphic boundary; obtaining the areas of the two regions of the second graphic divided by the second target graphic boundary; and unifying the graphic density area of ​​the second graphics into a graphic density area with the same graphic density as the larger area of ​​the two areas.

[0142] Performing a redivision process based on the area as a measurement standard is beneficial to reducing the modified area of ​​the graphic density area in the second graphic, and is beneficial to reducing the density area gap in the second graphic after the redivision process, and improving the balance of the graphic after the graphic size compensation process.

[0143] In this embodiment, according to the division of the calibration unit by the boundary of the graphic density area, before the graphic density area redefinition processing is performed on the calibration unit, the method further includes: obtaining the width of the graphic density area with the smallest width in the layout layer as a size threshold.

[0144] The width of the smallest graphic density area in the layout layer is used as the size threshold, which is beneficial to reduce the jumpiness of the graphic density area and improve the smoothness of the graphic density of the entire layout layer.

[0145] After the graphic density area redefinition processing is performed, before the size compensation processing is performed on the graphics corresponding to each graphic density area according to the processing result, it also includes: selecting a graphic density area surrounded by adjacent graphic density areas as a corrected graphic density area; obtaining a width dimension d3 of the corrected graphic density area; when the width dimension d3 is less than a size threshold, merging the corrected graphic density area into its adjacent graphic density area; when the width dimension d3 is greater than or equal to the size threshold, not processing the corrected graphic density area.

[0146] When the width dimension d3 is smaller than the size threshold, the graphic density area is too small, which may easily cause the graphic density area to jump. The corrected graphic density area is merged into its adjacent graphic density area, which is beneficial to improve the smoothness of the graphic density of the entire layout layer.

[0147] It should be noted that after the graphic density area is redefined based on the processing unit, the graphic density area located outside the processing unit and connected to the processing unit is not redefined. Therefore, it is easy to leave a density area with a width size d3 smaller than the size threshold.

[0148] The size compensation module 506 is used to perform size compensation processing on the graphics corresponding to each graphic density area according to the processing result after performing the graphic density area redefinition processing.

[0149] Specifically, the layout layer is a front layer layout layer, and the formation of the current layer pattern is compensated based on the graphic density area of ​​the front layer layout layer. Specifically, the graphic density refers to the graphic density of the second graphic. The second graphic corresponds to a gate structure formed on the wafer. The gate structure is formed by the SADP process. The second graphic is the core layer in the SADP process. Based on the graphic density of the core layer, graphic compensation is performed on the sidewall layers located on both sides of the core layer formed in the current layer.

[0150] Correspondingly, the present invention also provides a mask plate, comprising: a pattern obtained by using the layout pattern size calibration method provided by an embodiment of the present invention.

[0151] It can be seen from the aforementioned embodiments that the first graphic and the second graphic are composed of a processing unit, and a processing unit with a boundary of a graphic density area is selected as a calibration unit. By redefining the graphic density area based on the calibration unit, it is beneficial to make the result of redefining the graphic density area of ​​the layout layer smoother, and reduce the probability of excessive jumps in size compensation of the first graphic and the second graphic based on the result of redefining the graphic density area, improve the balance of the graphic after the graphic size compensation processing, and also help to improve the efficiency of the graphic density area redefinition processing.

[0152] The embodiment of the present invention further provides a device, which can implement the layout pattern size calibration method provided by the embodiment of the present invention by loading the above-mentioned layout pattern size calibration method in the form of a program. An optional hardware structure of the terminal device provided by the embodiment of the present invention can be as follows Fig. 27 As shown, it includes: at least one processor 01, at least one communication interface 02, at least one memory 03 and at least one communication bus 04.

[0153] In this embodiment, the number of processor 01, communication interface 02, memory 03, and communication bus 04 is at least one, and the processor 01, communication interface 02, and memory 03 communicate with each other through the communication bus 04. The communication interface 02 can be an interface of a communication module for network communication, such as an interface of a GSM module. The processor 01 may be a central processing unit CPU, or an application specific integrated circuit (ASIC), or one or more integrated circuits configured to implement an embodiment of the present invention. The memory 03 may include a high-speed RAM memory, and may also include a non-volatile memory (NVM), such as at least one disk storage. Among them, the memory 03 stores one or more computer instructions, and the one or more computer instructions are executed by the processor 01 to implement the layout graphic size calibration method provided in an embodiment of the present invention.

[0154] It should be noted that the above-mentioned terminal device may also include other devices (not shown) that may not be necessary for understanding the contents disclosed in the embodiments of the present invention; given that these other devices may not be necessary for understanding the contents disclosed in the embodiments of the present invention, the embodiments of the present invention will not introduce them one by one.

[0155] An embodiment of the present invention further provides a storage medium, wherein the storage medium stores one or more computer instructions, and the one or more computer instructions are used to implement the layout graphic size calibration method provided by the embodiment of the present invention.

[0156] In the layout graphic size calibration method provided by the embodiment of the present invention, the first graphic and the second graphic are composed of a processing unit, and the processing unit with the boundary of the graphic density area is selected as the calibration unit. By redefining the graphic density area based on the calibration unit, it is beneficial to make the result of redefining the graphic density area of ​​the layout layer smoother, and reduce the probability of excessive jump in the size compensation of the first graphic and the second graphic based on the result of the graphic density area redefinition, improve the balance of the graphic after the graphic size compensation processing, and also help to improve the efficiency of the graphic density area redefinition processing.

[0157] The above-mentioned embodiments of the present invention are combinations of elements and features of the present invention. Unless otherwise mentioned, the elements or features may be considered as optional. Each element or feature may be put into practice without being combined with other elements or features. In addition, the embodiments of the present invention may be constructed by combining some elements and / or features. The order of operations described in the embodiments of the present invention may be rearranged. Some constructions of any one embodiment may be included in another embodiment, and may be replaced by the corresponding construction of another embodiment. It is obvious to those skilled in the art that claims that do not have a clear reference relationship to each other in the attached claims may be combined into embodiments of the present invention, or may be included as new claims in the amendment after submitting this application.

[0158] Embodiments of the present invention may be implemented by various means such as hardware, firmware, software or a combination thereof. In a hardware configuration, the method according to an exemplary embodiment of the present invention may be implemented by one or more application specific integrated circuits (ASICs), digital signal processors (DSPs), digital signal processing devices (DSPDs), programmable logic devices (PLDs), field programmable gate arrays (FPGAs), processors, controllers, microcontrollers, microprocessors, etc. In a firmware or software configuration, embodiments of the present invention may be implemented in the form of modules, processes, functions, etc. The software code may be stored in a memory unit and executed by a processor. The memory unit is located inside or outside the processor and may send data to the processor and receive data from the processor via various known means.

[0159] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0160] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A method for calibrating the size of a layout pattern, characterized in that: include: Acquire a layout layer, the layout layer comprising a first graphic extending along a first direction, and a plurality of second graphics spanning the first graphic, the second graphics extending along a second direction and arranged parallel to the first direction, the second direction being perpendicular to the first direction; Dividing the layout layer into a plurality of graphic density areas according to the graphic density; Acquire a plurality of second graphics and a processing unit consisting of the first graphics spanned by the second graphics, wherein the processing unit is in the shape of a rectangle or a combination of a plurality of rectangles, the processing unit completely covers the first graphics and the second graphics, and a boundary of a combined graphic consisting of the first graphics and the second graphics coincides with a boundary of the processing unit; Acquire a processing unit having a boundary of the graphic density area as a calibration unit; According to the division of the calibration unit by the boundary of the graphic density area, redefining the graphic density area of ​​the calibration unit; After the graphic density area redefinition process is performed, size compensation process is performed on the graphics corresponding to each graphic density area according to the processing result.

2. The layout pattern size calibration method according to claim 1, characterized in that: Acquire a plurality of the second graphics and a processing unit consisting of the first graphics spanned by the second graphics, wherein the shape of the processing unit is a combination of a plurality of rectangles; A processing unit having a boundary of the graphic density area is obtained as a calibration unit, and the processing unit is divided into a plurality of rectangular units along an extension direction of the boundary of the graphic density area by a straight line perpendicular to the boundary of the processing unit. Each of the rectangular units serves as the calibration unit.

3. The layout pattern size calibration method according to claim 1, characterized in that: According to the division of the calibration unit by the boundary of the graphic density area, the calibration unit is subjected to a graphic density area redefinition process, including: obtaining a boundary of the graphic density area in the calibration unit as a target boundary; Acquire the calibration unit covered by the translation of the target boundary along its vertical direction as the target calibration unit; According to the division of the target calibration unit by the target boundary, a corresponding graphic density area redefinition process is performed on the target calibration unit.

4. The layout pattern size calibration method according to claim 3, characterized in that: Acquire a processing unit having a boundary of the graphic density area as a calibration unit, wherein the boundary of the graphic density area includes a first boundary extending along the first direction or a second boundary extending along the second direction; In acquiring a boundary of a graphic density area in the calibration unit as a target boundary, acquiring the first boundary or the second boundary in the calibration unit as the target boundary.

5. The layout pattern size calibration method according to claim 3, characterized in that: Acquire a processing unit having a boundary of the graphic density area as a calibration unit, wherein the boundary of the graphic density area includes a first boundary extending along the first direction and a second boundary extending along the second direction; According to the division of the calibration unit by the boundary of the graphic density area, performing the graphic density area redefinition processing on the calibration unit, performing the redefinition processing twice; In a first redefinition process, a boundary of a pattern density area in the calibration unit is obtained as a target boundary, and any one of the first boundary and the second boundary in the calibration unit is used as the target boundary; In the second redefinition process, the boundary of the graphic density area located in the calibration unit is obtained as the target boundary, and the target boundary is updated according to the result of the first redefinition process.

6. The layout pattern size calibration method according to claim 5, characterized in that: Updating the target boundary according to the result of the first redefinition process includes: when the result of the first redefinition process of the graphic density area is that the original graphic density area of ​​the target calibration unit remains unchanged, acquiring the other of the first boundary and the second boundary located in the calibration unit as the target boundary; When the result of the first redefinition of the graphic density area is the merging of the graphic density areas of the target calibration unit, the boundary of the merged graphic density area and the remaining graphic density areas at the calibration unit is obtained as the target boundary.

7. The layout pattern size calibration method according to claim 6, characterized in that: According to the division of the target calibration unit by the target boundary, the target calibration unit is subjected to corresponding graphic density area redefinition processing, including: obtaining a size of the target calibration unit along a first direction as a first size, and a size along a second direction as a second size; When the first size and the second size are both smaller than or equal to the size threshold, obtaining the areas of the two graphic density regions of the target calibration unit divided by the target boundary, taking the graphic density region with a larger area as the first graphic density region, and taking the graphic density region with a smaller area as the second graphic density region; merging the first graphic density region and the second graphic density region into the first graphic density region; When the first size or the second size is greater than the size threshold, and the extension direction of the target boundary is parallel to the short side of the target calibration unit, or when the first size or the second size is greater than the size threshold, obtain the distance between the target boundary and the two boundaries extending in the same direction of the target calibration unit; select a graphic density area with a distance less than n times the size threshold as the second graphic density area, and another graphic density area as the first graphic density area; merge the first graphic density area and the second graphic density area into the first graphic density area; when both of the distances are greater than or equal to n times the size threshold, do not process the target calibration unit, where n is equal to 0.5; When either the first size or the second size is greater than the size threshold, the other is less than or equal to the size threshold, and the extension direction of the target boundary is parallel to the long side of the target calibration unit, obtain the areas of two graphic density areas of the target calibration unit divided by the target boundary, and obtain the spacing between the target boundary and the two boundaries extending in the same direction of the target calibration unit; select a graphic density area with a spacing less than n times the size threshold and an area less than n times the area of ​​the target calibration unit as the second graphic density area, and another graphic density area as the first graphic density area; merge the first graphic density area and the second graphic density area into the first graphic density area, where n is equal to 0.

5.

8. The layout pattern size calibration method according to claim 1, characterized in that: After the calibration unit is redefined according to the division of the boundary of the graphic density area, the method further includes: when the calibration unit still has a boundary of the graphic density area, determining whether the boundary of the graphic density area divides the first graphic or the second graphic; If yes, performing a graphic re-division process on the first graphic or the second graphic; Otherwise, the pattern density area of ​​the calibration unit is kept unprocessed.

9. The layout pattern size calibration method according to claim 8, characterized in that: In the calibration unit further including a boundary of a pattern density area, when the boundary of the pattern density area extends along the first direction, determining whether the boundary of the pattern density area divides the first pattern or the second pattern comprises: Determining whether a boundary of the graphic density area divides the first graphic; If so, the graphic redivision process includes: obtaining the areas of two regions of the first graphic divided by the boundary of the graphic density area; translating the boundary of the graphic density area along its vertical direction to coincide with the first graphic boundary of the region with a smaller area.

10. The layout pattern size calibration method according to claim 8, characterized in that: In the calibration unit further including a boundary of a pattern density area, when the boundary of the pattern density area extends along the second direction, or the boundary of the pattern density includes line segments extending along the first direction and along the second direction, determining whether the boundary of the pattern density area divides the first pattern or the second pattern comprises: determining whether the boundary of the pattern density area divides the second pattern; If yes, the graphic re-division process includes: unifying the graphic density areas of the second graphic into the same graphic density area according to the division of the second graphic at the boundary of the graphic density area.

11. The layout pattern size calibration method according to claim 10, characterized in that: Unifying the graphic density areas of the second graphic into the same graphic density area according to the segmentation of the second graphic by the boundary of the graphic density area, including: obtaining a size of the second graphic along the first direction as a third size; When the third size is smaller than the size threshold, or the boundary of the graphic density area only extends along the second direction, the graphic density areas of the second graphic are unified into the same graphic density area according to the area of ​​the region divided by the boundary of the graphic density area; When the third size is greater than or equal to the size threshold, and the boundary of the graphic density area includes a first graphic boundary along the first direction and a second graphic boundary extending along the second direction, the graphic density areas of the second graphic are unified into the same graphic density area according to the divided areas of the second graphic by the first graphic boundary and the second graphic boundary respectively.

12. The layout pattern size calibration method according to claim 11, characterized in that: Unifying the graphic density areas of the second graphic into the same graphic density area according to the areas of the areas divided by the boundary of the graphic density area, including: obtaining the areas of two areas of the second graphic divided by the boundary of the graphic density area; The pattern density area of ​​the second pattern is unified into a pattern density area having the same pattern density as the larger area of ​​the two areas.

13. The layout pattern size calibration method according to claim 11, characterized in that: Unifying the graphic density areas of the second graphic into the same graphic density area according to the divided areas of the second graphic by the first graphic boundary and the second graphic boundary, including: taking any one of the first graphic boundary and the second graphic boundary as a first target graphic boundary, and taking the second graphic covered by the first target graphic boundary translated along a vertical direction thereof as a first target graphic; Acquire areas of two regions of the first target graphic divided by the boundary of the first target graphic; unifying the graphic density area of ​​the first target graphic into a graphic density area having the same graphic density as the larger area of ​​the two areas; Using the boundary between the first target figure and the remaining second figures as the boundary of the second target figure; Acquire the areas of two regions of the second graphic divided by the boundary of the second target graphic; The pattern density area of ​​the second pattern is unified into a pattern density area having the same pattern density as the larger area of ​​the two areas.

14. The layout pattern size calibration method according to claim 1, characterized in that: After the pattern density area redefinition process is performed, before the size compensation process is performed on the patterns corresponding to each pattern density area according to the processing result, the method further includes: selecting a pattern density area surrounded by adjacent pattern density areas as a modified pattern density area; Obtaining the width of the modified graphic density area; When the width size is smaller than the size threshold, merging the modified graphic density area into its adjacent graphic density area; When the width size is greater than or equal to the size threshold, no processing is performed on the modified pattern density area.

15. The method for calibrating layout pattern size according to any one of claims 7, 11 or 14, characterized in that: According to the division of the calibration unit by the boundary of the graphic density area, before redefining the graphic density area of ​​the calibration unit, it also includes: obtaining the width of the graphic density area with the smallest width in the layout layer as the size threshold.

16. The layout pattern size calibration method according to claim 1, characterized in that: The first pattern is an active area pattern, and the second pattern is a gate structure pattern.

17. A layout pattern size calibration system, characterized in that: include: A layout layer acquisition module, used to acquire a layout layer, wherein the layout layer includes a first graphic extending along a first direction, and a plurality of second graphics spanning the first graphic, wherein the second graphics extend along a second direction and are arranged in parallel along the first direction, and the second direction is perpendicular to the first direction; A graphic density region acquisition module, used for dividing the layout layer into a plurality of graphic density regions according to the graphic density; a processing unit acquisition module, used to acquire a plurality of second graphics and a processing unit formed by the first graphics spanned by the second graphics, wherein the processing unit is in the shape of a rectangle or a combination of multiple rectangles, the processing unit completely covers the first graphics and the second graphics, and the boundary of the combined graphics formed by the first graphics and the second graphics coincides with the boundary of the processing unit; A calibration unit acquisition module, used to acquire a processing unit having a boundary of the graphic density area as a calibration unit; A redefinition processing module, configured to perform a graphic density area redefinition processing on the calibration unit according to the division of the calibration unit by the boundary of the graphic density area; The size compensation module is used to perform size compensation processing on the graphics corresponding to each graphic density area according to the processing result after performing the graphic density area redefinition processing.

18. A mask, characterized in that: include: A graphic obtained using the layout graphic size calibration method as described in any one of claims 1-16.

19. A device, characterized in that It comprises at least one memory and at least one processor, wherein the memory stores one or more computer instructions, wherein the one or more computer instructions are executed by the processor to implement the layout graphic size calibration method as described in any one of claims 1-16.

20. A storage medium, characterized in that: The storage medium stores one or more computer instructions, and the one or more computer instructions are used to implement the layout graphic size calibration method as described in any one of claims 1-16.

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