Magnetic field enhanced chemical liquid assisted laser drilling device and drilling method

Abstract

The invention discloses a magnetic field enhanced chemical liquid assisted laser drilling device and a drilling method. The magnetic field enhanced chemical liquid assisted laser drilling device comprises a laser emitting system, a laser galvanometer system, a magnetic field generating system, a chemical liquid assisted system, a magnetic induction intensity detection system and a computer. The computer is in communication connection with the laser emission system, the laser galvanometer system and the chemical liquid auxiliary system, and the computer controls the laser emission system, the laser galvanometer system and the chemical liquid auxiliary system; the laser emission system emits laser for punching a sample, the laser galvanometer system controls a processing path for punching the sample, the magnetic field generation system generates a magnetic field with magnetic induction intensity required for punching the sample, the chemical liquid auxiliary system contains the sample and chemical liquid, and the magnetic induction intensity detection system detects the magnetic induction intensity of the magnetic field generation system. Under the same laser energy, smaller hole wall inclination, better outlet roundness and smoother side walls are achieved, cracks of the hole walls are reduced, and the punching quality and efficiency are remarkably improved.

Description

Technical Field

[0001] The invention relates to the field of laser processing, in particular to a magnetic field enhanced chemical liquid assisted laser drilling device and a drilling method. Background Art

[0002] Silicon carbide is a third-generation semiconductor material with a wide bandgap, high breakdown electric field and high electron saturation drift rate. Coupled with its excellent chemical and thermal stability, it can be widely used in microwave radio frequency, new energy vehicles, avionics and other fields. Microvia is one of the core structures of microelectronic devices. It provides high-density internal circuit interconnection, and its quality plays an important role in the performance of microelectronic devices. In the aerospace field, it is often necessary to drill microvias to increase the heat transfer coefficient to ensure the safe operation of aircraft engines at high temperatures. So far, efficient and high-quality microvia processing still faces challenges.

[0003] The main processing technologies for silicon carbide at present include mechanical processing, electrospark machining, inductively coupled plasma etching, reactive ion etching and photoelectrochemical etching. However, the precision of mechanical processing is not enough to prepare microstructures, which can easily damage the material; the electrospark machining process can easily cause large-area thermal damage to the surface of the material; the rates of inductively coupled plasma etching and reactive ion etching are slow (<1μm / min), making it difficult to mass-produce high aspect ratio structures; the photoelectrochemical etching process is relatively complex and has high requirements for etching parameters. It is necessary to reasonably design and strictly control parameters such as the etching solution ratio, light intensity, etching current, and temperature. Changes in parameters are likely to lead to defects and a decrease in etching rate.

[0004] Taking into account the cost, speed and quality requirements is the direction of development. High precision, smooth side walls, good verticality and low cost are the industry requirements at the current stage. Laser is an effective means of processing hard and brittle materials. It has higher efficiency, lower cost, higher precision and better flexibility, and less wear on materials. Therefore, laser drilling technology is widely used.

[0005] At present, there have been many studies on laser processing of microholes. For example, Zhao Yulong et al. used 1064nm femtosecond laser to prepare a blind hole with a depth of 270μm in "Application of femtosecond laser micromachining in silicon carbide deep etching for fabricating sensitive diaphragm of high temperature pressure sensor". The inclination of the hole wall reached 1.7°. However, femtosecond lasers are limited by the high cost of equipment. For large-scale applications or projects with limited budgets, high-quality and high-efficiency laser drilling is undoubtedly a problem. In contrast, nanosecond pulse laser drilling has a lower cost, but unfortunately, due to the large pulse width of nanosecond pulse lasers, it is inevitable that thermal defects such as recast layers, cracks and burrs will be caused to the microholes. In order to solve these defects, researchers have developed liquid-assisted laser drilling technology to reduce thermal defects with the help of a liquid environment. Drilling is performed at the solid-liquid interface, and the cooling, cleaning and anti-oxidation properties of the auxiliary liquid can reduce thermal defects at the edge of the microhole.

[0006] However, drilling in a liquid environment also has its drawbacks. On the one hand, absorption by the liquid layer will lead to loss of laser beam energy. On the other hand, during the processing, the liquid will vaporize due to heat, forming cavitation bubbles. The cavitation bubbles will further form persistent bubbles with a lifespan of milliseconds due to mutual collision. These bubbles will shield part of the subsequent incident laser beam, resulting in reduced laser energy utilization. These problems not only limit the deep drilling capability, but also make it difficult to control the inclination of the hole wall within the ideal range (usually kept at around 5°), resulting in poor quality of the inner wall of the hole. How to perform high-quality and efficient drilling has become a problem that needs to be solved.

[0007] To this end, the present applicant intends to propose a magnetic field enhanced chemical liquid assisted laser drilling device and drilling method to solve the above problems. Summary of the invention

[0008] The purpose of the present invention is to provide a device and a method for magnetic field enhanced chemical liquid assisted laser drilling, which can achieve a smaller hole wall inclination, better outlet roundness and smoother side wall under the same laser energy, reduce cracks in the hole wall, and significantly improve the drilling quality and efficiency.

[0009] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is: a magnetic field enhanced chemical liquid assisted laser drilling device, characterized in that it includes a laser emission system, a laser galvanometer system, a magnetic field generation system, a chemical liquid auxiliary system, a magnetic induction intensity detection system and a computer;

[0010] The computer is communicatively connected with the laser emitting system, the laser galvanometer system and the chemical liquid auxiliary system. The computer is used to control the laser emitting system, the laser galvanometer system and the chemical liquid auxiliary system. The laser emitting system is used to emit laser for drilling holes in the sample. The laser galvanometer system is used to control the processing path for drilling holes in the sample. The magnetic field generating system is used to generate a magnetic field with the magnetic induction intensity required for drilling holes in the sample. The chemical liquid auxiliary system is used to hold the sample and the chemical liquid. The magnetic induction intensity detection system is used to detect the magnetic induction intensity of the magnetic field generating system.

[0011] Optionally, the laser galvanometer system includes a galvanometer and a field lens, the galvanometer is communicatively connected to a computer, the galvanometer controls the scanning path of the laser beam through the computer, and the field lens is used to focus the laser beam into a light spot at a working focal length.

[0012] Optionally, the magnetic field generating system includes a first permanent magnet and a second permanent magnet, the N pole of the first permanent magnet is opposite to the S pole of the second permanent magnet, and the first permanent magnet and the second permanent magnet are arranged oppositely on two sides of the sample.

[0013] Optionally, the first permanent magnet and the second permanent magnet are permanent magnets made of neodymium iron boron.

[0014] Optionally, the chemical liquid auxiliary system includes an XYZ-axis moving platform, a sample container and chemical liquid. The XYZ-axis platform is communicatively connected to a computer, and the computer controls the XYZ-axis moving platform to move in three directions of X, Y and Z. The sample container and the magnetic field generating system are arranged on the XYZ-axis moving platform. The sample container is arranged between the first permanent magnet and the second permanent magnet. The sample container is used to hold chemical liquid and samples, and the chemical liquid immerses the sample.

[0015] Optionally, the chemical liquid is a KOH solution with a mass fraction of 30%.

[0016] Optionally, the magnetic induction intensity detection system includes a Hall sensor probe and a host, the host is electrically connected to the Hall sensor probe, the host displays the detection result of the Hall sensor probe in real time, and the Hall sensor probe is set 5 mm above the sample.

[0017] Optionally, the sample is silicon carbide, silicon carbide-based composite material, or sapphire.

[0018] A magnetic field enhanced chemical liquid assisted laser drilling method, comprising the following steps:

[0019] Step 1: Sample treatment: ultrasonically clean the sample in acetone and deionized water for 10 minutes each, blow dry with an air gun, and place it flat on a sample container;

[0020] Step 2, setting the laser parameters and processing path, opening the corresponding software on the computer, first setting the specific processing path of the laser galvanometer system, and then setting the laser parameters of the laser emission system, the laser parameters including laser power, pulse repetition rate, pulse width, scanning speed, and number of scanning times;

[0021] Step 3: Add chemical liquid into the sample container to immerse the sample. Keep the liquid level at 1 mm. Use the computer to adjust the height of the XYZ-axis moving platform so that the focal plane of the laser beam coincides with the upper surface of the sample on the XYZ-axis moving platform.

[0022] Step 4, setting the parameters of the magnetic field generation system, adjusting the distance between the first permanent magnet and the second permanent magnet according to the magnetic induction intensity synchronously detected by the magnetic induction intensity detection system, and setting appropriate magnetic induction intensity parameters;

[0023] Step 5: laser drilling: operate the computer to control the laser emission system to start drilling the sample according to the designed path;

[0024] Step six, after the drilling is completed, turn off the laser emission system and the computer, take out the sample, ultrasonically clean it in acetone and deionized water for 10 minutes each, and blow it dry with an air gun.

[0025] After adopting the above scheme, the gain effect of the present invention is:

[0026] 1. The user controls the on and off of the laser and the processing path through the laser emission system and the laser galvanometer system; the magnetic field generation system places the sample in a position with the required magnetic induction intensity; the chemical liquid auxiliary system is used for liquid-assisted laser drilling, and the measurement system can synchronously measure the magnetic induction intensity of the sample's position.

[0027] 2. A magnetic field generating system is designed to ensure that a stable transverse magnetic field can be formed around the sample when it is immersed in the chemical liquid; the N pole of the first permanent magnet and the S pole of the second permanent magnet are opposite, and the direction of the magnetic flux lines is from the N pole to the S pole.

[0028] 3. A chemical liquid auxiliary system is designed. The sample container in this system is loaded with chemical liquid that can react with the sample at high temperature to improve the drilling efficiency. At the same time, the liquid also has cooling, cleaning and anti-oxidation properties, which can effectively reduce thermal defects during laser drilling. In addition, the system is equipped with an XYZ axis moving platform, which can accurately adjust the relative position of the sample and the laser beam to ensure that the focal plane of the laser beam is accurately aligned with the upper surface of the sample.

[0029] 4. Design a magnetic induction intensity detection system to detect the magnetic induction intensity of the sample's location. The Hall sensor probe of the magnetic induction intensity detection system adopts a one-dimensional lateral probe. When the Hall sensor probe is placed in a magnetic field, Hall voltage will be generated on both sides of it. The host will receive this Hall voltage and display the magnetic induction intensity obtained by the voltage conversion on the LCD screen in high definition. The Hall sensor probe maintains a longitudinal distance of 5mm from the sample in the glass container to ensure that the magnetic induction intensity of the sample's location can be accurately measured.

[0030] 5. The user sets appropriate laser parameters according to different drilling target requirements, absorption characteristics, optical effects, application requirements and other characteristics of the sample to be processed.

[0031] 6. The user designs the corresponding processing path through the corresponding software on the computer, and then uses the computer to control the galvanometer to realize the movement of the laser beam along the set path, and under the focusing action of the field lens, the laser beam is focused to the optimal laser spot diameter, thereby realizing fine processing of the sample.

[0032] 7. A laser drilling method that can improve the efficiency and quality of laser drilling is designed. Under the same laser energy, a smaller hole wall inclination, better exit roundness and smoother side wall can be achieved, cracks in the hole wall can be reduced, and the drilling quality and efficiency can be significantly improved. Subsequently, by changing the distance between the permanent magnets in the magnetic field generating system, the magnetic induction intensity of the sample position can be changed to achieve higher processing efficiency.

[0033] 8. The selected sample and the selected chemical liquid can react chemically at high temperature, which improves the efficiency of laser drilling, weakens the shielding effect, and accelerates the discharge of bubbles and debris in the hole, thereby improving the quality of the inner wall of the hole.

[0034] 9. The designed device and method are not only suitable for laser drilling, but also have a wide range of applications in the field of laser processing, which can improve processing quality and efficiency, such as laser processing of high aspect ratio microstructures, such as grooves, cones, micro-pillars, etc. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 This is a schematic diagram of the overall structure of a magnetic field enhanced chemical liquid assisted laser drilling device of the present invention;

[0036] Figure 2 A schematic diagram of a laser beam scanning path of a laser emitting system of the present invention;

[0037] Figure 3 This is a result diagram of chemical liquid-assisted laser drilling without magnetic field enhancement on silicon carbide according to the present invention;

[0038] Figure 4This is a result diagram of the present invention performing 80mT magnetic field enhanced chemical liquid assisted laser drilling on silicon carbide;

[0039] Figure 5 This is a result diagram of the present invention performing 160mT magnetic field enhanced chemical liquid assisted laser drilling on silicon carbide;

[0040] Figure 6 This is a graph showing the results of studying the effect of magnetic induction intensity on the drilling depth of silicon carbide in the present invention.

[0041] Description of labels:

[0042] 1. Laser emission system;

[0043] 2. Laser galvanometer system; 21. Galvanometer; 22. Field lens; 23. Computer;

[0044] 3. Magnetic field generating system; 31. First permanent magnet; 32. Second permanent magnet;

[0045] 4. Chemical liquid auxiliary system; 41. Chemical liquid; 42. Sample container; 43. XYZ axis moving platform;

[0046] 5. Magnetic induction intensity detection system; 51. Hall sensor probe; 52. Host;

[0047] 6. Samples. DETAILED DESCRIPTION

[0048] The following combination Figure 1-Figure 6 , the present invention is described in further detail.

[0049] The embodiment of the invention discloses a device for magnetic field enhanced chemical liquid assisted laser drilling.

[0050] refer to Figure 1 A device for magnetic field-enhanced chemical liquid-assisted laser drilling includes a laser emitting system 1 for emitting laser, a laser galvanometer system 2 for controlling a processing path, a magnetic field generating system 3 for generating a required magnetic induction intensity, a chemical liquid-assisted system 4, and a magnetic induction intensity detection system 5 for detecting the magnetic induction intensity at a position of a sample 6. In this embodiment, an ultraviolet nanosecond pulse laser is used as the laser emitting source of the laser emitting system 1. In the actual laser processing process, lasers of other wavelengths such as green light and infrared may also be used as laser emitting sources.

[0051] refer to Figure 1The laser galvanometer system 2 includes a galvanometer 21 for controlling the scanning path of the laser beam, a field lens 22 for focusing the laser beam into a spot at a certain working focal length, and a computer 23 for controlling the on and off of the laser. The computer 23 is installed with corresponding software and is simultaneously connected to the laser emission system 1 and the galvanometer 21. The user designs the corresponding processing path through the corresponding software on the computer 23, and then uses the computer 23 to control the galvanometer 21 to realize the movement of the laser beam along the set path, and under the focusing action of the field lens 22, the laser beam is focused to the optimal laser spot diameter, thereby realizing fine processing of the sample 6.

[0052] refer to Figure 1 The magnetic field generating system 3 includes a first permanent magnet 31 made of NdFeB and a second permanent magnet 32 ​​placed opposite to the first permanent magnet 31 and having opposite magnetic pole directions, so as to ensure that when the sample 6 is immersed in the chemical liquid 41, a stable transverse magnetic field can be formed around it. The N pole of the first permanent magnet 31 and the S pole of the second permanent magnet 32 ​​are opposite, and the direction of the magnetic flux lines is from the N pole to the S pole. In this embodiment, the magnetic induction intensity ranges from 0 to 160 mT. In the actual drilling process, other magnetic induction intensities can also be used as required to achieve corresponding drilling effects.

[0053] refer to Figure 1 , the chemical liquid auxiliary system 4 includes a sample container 42 and an XYZ axis moving platform 43 for holding chemical liquid 41 and sample 6; the sample container 42 can be a transparent glass container. The sample container 42 in the system is loaded with a chemical liquid 41 that can react with the sample 6 at high temperature, thereby improving the drilling efficiency. At the same time, the liquid also has cooling, cleaning and antioxidant properties, which can effectively reduce thermal defects in the laser drilling process. In addition, the system is equipped with an XYZ axis moving platform 43, which can accurately adjust the relative position of the sample 6 and the laser beam to ensure that the focal plane of the laser beam is accurately aligned with the upper surface of the sample 6. In this embodiment, a KOH solution with a mass fraction of 30% is used, and the liquid level height is 11mm, which not only reduces the scattering and absorption of the laser beam by the flow and oscillation of the liquid, but also ensures the chemical reaction of the KOH solution and silicon carbide at high temperature to improve the drilling quality.

[0054] refer to Figure 1 The measurement system includes a Hall sensor probe 51 and a host 52 for real-time display of magnetic induction intensity. The Hall sensor probe 51 adopts a one-dimensional transverse probe. When the Hall sensor probe 51 is placed in a magnetic field, Hall voltage will be generated on both sides thereof. The host 52 will receive the Hall voltage. The host 52 will display the magnetic induction intensity obtained by converting the voltage in high definition on a liquid crystal display screen. The Hall sensor probe 51 maintains a longitudinal distance of 5 mm from the sample 6 in the sample container 42 to ensure that the magnetic induction intensity at the location of the sample 6 can be accurately measured.

[0055] A magnetic field enhanced chemical liquid assisted laser drilling method, the specific implementation method is as follows:

[0056] Sample 6 is treated by ultrasonically cleaning the sample 6 in acetone and deionized water for 10 minutes each, and then blown dry with an air gun and placed flat on the sample container 42;

[0057] Setting of laser parameters and processing path: Open the corresponding software on the computer 23, first set the specific processing path of the laser galvanometer system 2, and then set the laser parameters of the laser emission system 1. The laser parameters include laser power, pulse repetition rate, pulse width, scanning speed, and number of scanning times;

[0058] The chemical liquid 41 is added into the sample container 42 to immerse the sample 6. The liquid level of the chemical liquid 41 is kept at 1 mm. The computer 23 is operated to adjust the height of the XYZ axis moving platform 43 so that the focal plane of the laser beam coincides with the upper surface of the sample 6 on the XYZ axis moving platform 43.

[0059] The parameters of the magnetic field generating system 3 are set by adjusting the distance between the first permanent magnet 31 and the second permanent magnet 32 ​​according to the magnetic induction intensity synchronously detected by the magnetic induction intensity detection system 5, and setting appropriate magnetic induction intensity parameters;

[0060] Laser drilling, operating the computer 23 to control the laser emission system 1 to start drilling the sample 6 according to the designed path;

[0061] After the drilling is completed, the laser emitting system 1 and the computer 23 are turned off, and the sample 6 is taken out and ultrasonically cleaned in acetone and deionized water for 10 minutes each, and then blown dry with an air gun.

[0062] Characterization of sample 6 after punching: The morphology of the punched area of ​​sample 6 was characterized using a characterization device.

[0063] refer to Figure 3 In this embodiment, chemical liquid-assisted laser drilling is performed on silicon carbide without magnetic induction intensity, and the laser energy parameters are designed for laser drilling. As can be seen from the figure, the hole wall inclination is about 4.6° under the microscope system, the entrance shrinkage is obvious, there are micron-level and submicron-level hole defects and a large number of large debris deposits at the hole entrance, the exit roundness is 89.67%, the hole inner wall roughness near the exit is about 1.6μm, and there are cracks and collapse.

[0064] refer to Figure 4In this embodiment, chemical liquid-assisted laser drilling of silicon carbide was performed under a magnetic induction intensity of 80 mT, and the same laser energy parameters were used for laser drilling. As can be seen from the figure, the inclination of the hole wall was observed to be about 2.7° under the microscope system, which was 41.3% less than that of the same period last year. The inlet contraction was improved, and the defects at the hole entrance were reduced, forming a corrugated accumulation. This was caused by the shock wave formed by the cavitation bubbles during the growth and collapse process. The outlet roundness was 91.48%, which was better than that without magnetic induction intensity. The roughness of the inner wall of the hole near the outlet was reduced to about 1.1 μm, which was significantly lower than the surface roughness without magnetic induction intensity, and cracks and collapse were reduced.

[0065] refer to Figure 5 In this embodiment, chemical liquid-assisted laser drilling of silicon carbide was performed under a magnetic induction intensity of 160 mT, and the same laser energy parameters were used for laser drilling. As can be seen from the figure, the inclination of the hole wall was observed to be about 1.6° under the microscope system, which was 65.2% less than that of the same period last year, and the inlet shrinkage was significantly improved. There were almost no defects at the hole entrance, less debris deposition, and the outlet roundness was 92.26%, which was better than that without magnetic induction intensity. The roughness of the inner wall of the hole near the outlet was reduced to about 0.8 μm, which was significantly lower than that without magnetic induction intensity. The overall verticality was significantly optimized, there was no edge collapse, and there were few cracks. From the experimental results obtained, it can be seen that the device and method proposed in this application significantly improve the quality of existing laser drilling and significantly improve the verticality.

[0066] refer to Figure 6 This embodiment studies the effect of magnetic induction intensity on the drilling depth of silicon carbide. The laser energy and parameters required for processing blind holes are first adjusted. As can be seen from the figure, within the range of magnetic induction intensity selected in the embodiment, the depth increases with the increase of magnetic induction intensity. From the experimental results obtained, the device and method proposed in this application can improve the efficiency of laser drilling. Using the method provided in this application, after adjusting the appropriate laser parameters and magnetic induction intensity, the expected indicators can be achieved: through-hole depth-to-width ratio: 1:1-1:15; aperture size: 20-200μm, through-hole yield greater than 90%, drilling rate: 70μm / s, which can meet the requirements of chip-to-chip integrated packaging and aerospace fields.

[0067] The implementation principle of the embodiment of the present application is: ultrasonically clean the sample 6 to be processed in acetone and deionized water for 10 minutes each, blow dry with an air gun, and then place it flat on the sample container 42; open the corresponding software on the computer 23, first set the specific processing path, and then set the appropriate laser processing parameters, including laser power, pulse repetition rate, pulse width, scanning speed, and number of scans; add chemical liquid 41 into the sample container 42 to immerse the sample 6, keep the liquid level at 1 mm, click the execution button of the corresponding software on the computer 23, and adjust the moving platform to adjust the relative height of the sample 6 so that the focal plane of the laser beam coincides with the upper surface of the sample 6. According to the magnetic induction intensity synchronously measured by the measurement system, the distance between the first permanent magnet 31 and the second permanent magnet 32 ​​is adjusted, and appropriate magnetic induction intensity parameters are set; the execution button of the corresponding software on the computer 23 is clicked to make the laser start drilling the sample 6 according to the designed path; after the laser drilling is completed, the laser emission system 1 and the computer 23 are turned off, and the sample 6 is taken out and ultrasonically cleaned in acetone and deionized water for 10 minutes each, and blown dry with an air gun, and the morphology of the drilling area is characterized by a characterization device.

[0068] The embodiments of this specific implementation are all preferred embodiments of the present application, and are not intended to limit the protection scope of the present application. The same components are represented by the same figure marks. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A device for magnetic field enhanced chemical liquid assisted laser drilling, characterized in that: It includes laser emission system, laser galvanometer system, magnetic field generation system, chemical liquid auxiliary system, magnetic induction intensity detection system and computer; The computer is communicatively connected with the laser emitting system, the laser galvanometer system and the chemical liquid auxiliary system. The computer is used to control the laser emitting system, the laser galvanometer system and the chemical liquid auxiliary system. The laser emitting system is used to emit laser for drilling holes in the sample. The laser galvanometer system is used to control the processing path for drilling holes in the sample. The magnetic field generating system is used to generate a magnetic field with the magnetic induction intensity required for drilling holes in the sample. The chemical liquid auxiliary system is used to hold the sample and the chemical liquid. The magnetic induction intensity detection system is used to detect the magnetic induction intensity of the magnetic field generating system.

2. A magnetic field enhanced chemical liquid assisted laser drilling device as claimed in claim 1, characterized in that: The laser galvanometer system includes a galvanometer and a field lens. The galvanometer is connected to a computer for communication. The galvanometer controls the scanning path of the laser beam through the computer. The field lens is used to focus the laser beam into a light spot at a working focal length.

3. The device for magnetic field enhanced chemical liquid assisted laser drilling as claimed in claim 1, characterized in that: The magnetic field generating system comprises a first permanent magnet and a second permanent magnet, wherein the N pole of the first permanent magnet is opposite to the S pole of the second permanent magnet, and the first permanent magnet and the second permanent magnet are arranged opposite to each other on two sides of the sample.

4. A magnetic field enhanced chemical liquid assisted laser drilling device as claimed in claim 3, characterized in that: The first permanent magnet and the second permanent magnet are permanent magnets made of neodymium iron boron.

5. The device for magnetic field enhanced chemical liquid assisted laser drilling as claimed in claim 3, characterized in that: The chemical liquid auxiliary system includes an XYZ axis moving platform, a sample container and chemical liquid. The XYZ axis platform is connected to a computer for communication. The computer controls the XYZ axis moving platform to move in three directions of X, Y and Z axes. The sample container and the magnetic field generating system are arranged on the XYZ axis moving platform. The sample container is arranged between the first permanent magnet and the second permanent magnet. The sample container is used to hold the chemical liquid and the sample, and the chemical liquid immerses the sample.

6. The device for magnetic field enhanced chemical liquid assisted laser drilling as claimed in claim 5, characterized in that: The chemical liquid is a KOH solution with a mass fraction of 30%.

7. The device for magnetic field enhanced chemical liquid assisted laser drilling as claimed in claim 1, characterized in that: The magnetic induction intensity detection system comprises a Hall sensor probe and a host, the host is electrically connected to the Hall sensor probe, the host displays the detection result of the Hall sensor probe in real time, and the Hall sensor probe is arranged 5 mm above the sample.

8. The device for magnetic field enhanced chemical liquid assisted laser drilling as claimed in claim 1, characterized in that: The samples are silicon carbide, silicon carbide-based composite materials, and sapphire.

9. A drilling method based on the magnetic field enhanced chemical liquid assisted laser drilling according to claims 1 to 8, comprising the following steps: Step 1: Sample treatment: ultrasonically clean the sample in acetone and deionized water for 10 minutes each, blow dry with an air gun, and place it flat on a sample container; Step 2, setting the laser parameters and processing path, opening the corresponding software on the computer, first setting the specific processing path of the laser galvanometer system, and then setting the laser parameters of the laser emission system, the laser parameters including laser power, pulse repetition rate, pulse width, scanning speed, and number of scanning times; Step 3: Add chemical liquid into the sample container to immerse the sample. Keep the liquid level of the chemical liquid at 1 mm. Use the computer to adjust the height of the XYZ axis moving platform so that the focal plane of the laser beam coincides with the upper surface of the sample on the XYZ axis moving platform. Step 4, setting the parameters of the magnetic field generation system, adjusting the distance between the first permanent magnet and the second permanent magnet according to the magnetic induction intensity synchronously detected by the magnetic induction intensity detection system, and setting appropriate magnetic induction intensity parameters; Step 5: laser drilling: operate the computer to control the laser emission system to start drilling the sample according to the designed path; Step six, after the drilling is completed, turn off the laser emission system and the computer, take out the sample, ultrasonically clean it in acetone and deionized water for 10 minutes each, and blow it dry with an air gun.

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