Micro-nano spray needle batch manufacturing method based on cutting and dissolving and spray needle

Abstract

The invention discloses a micro-nano spray needle batch manufacturing method based on cutting and dissolving. The method comprises the following steps: printing a plurality of soluble polymer line groups on a substrate plate to obtain a micro-nano spray needle convex mold and / or an array micro-nano spray needle convex mold; a pouring mixed solution is poured on the base plate printed with the soluble polymer line group through a pouring method, so that the soluble polymer line group is covered with the pouring mixed solution, and the micro-nano spray needle which is not trimmed is obtained through curing; and cutting and dissolving the obtained unfinished micro-nano spray needle through a cutting and dissolving method to obtain the micro-nano spray needle with an inlet and an outlet. The invention discloses a micro-nano spray needle batch manufacturing method based on cutting and dissolving and a spray needle. Micron and nano structures are printed and manufactured through an electro-hydraulic power jet method, an unfinished micro-nano spray needle is obtained in cooperation with a pouring method, and a channel of the micro-nano structure spray needle is obtained by cutting and dissolving a printed male die.

Description

Technical Field

[0001] The invention relates to the field of micro-electromechanical technology, and in particular to a batch manufacturing method of micro-nano spray needles based on cutting and dissolution, and the spray needles. Background Art

[0002] Electrojet printing technology uses high-voltage electric field forces to print liquid materials onto the substrate in the form of fine jets. This technology can overcome the capillary effect of traditional inkjet printing technology at small apertures and achieve jet printing that is much smaller than the inner diameter of the needle. With the development of micro-nano technology, the application of micro-nano needles is becoming more and more extensive, and people have higher and higher requirements for the size and precision of the needles. However, during the printing process, sediments, particulate matter, chemical reaction products, etc. can easily cause material accumulation, adhesion or deterioration of the micro-nano needles, causing the needles to be blocked, so the micro-nano needles are very easy to wear out during the printing process.

[0003] Therefore, how to manufacture micro-nano spray needles with high precision on a large scale is a major problem that needs to be solved urgently in this field. At present, the production of high-precision micro-nano spray needles often requires expensive processing equipment and complex process flows, resulting in high costs. How to manufacture high-precision micro-nano spray needles in large quantities at low cost is one of the key issues that need to be solved in the production process. Summary of the invention

[0004] The present invention overcomes the shortcomings of the prior art and provides a micro-nano spray needle batch manufacturing method and spray needle based on cutting and dissolution; micron and nano structures are printed and manufactured by electro-hydraulic jet method, and untrimmed micro-nano spray needles are obtained by casting method; micro-nano structure spray needle channels are obtained by cutting and dissolving the printed convex mold.

[0005] To achieve the above object, the technical solution adopted by the present invention is: a method for batch manufacturing of micro-nano spray needles based on cutting and dissolution, comprising the following steps: Step 1, printing a plurality of groups of soluble polymer line groups on a substrate to obtain a micro-nano spray needle convex mold, and / or an array micro-nano spray needle convex mold, and then proceeding to step 2; Step 2, pouring a pouring mixed solution on the substrate plate printed with the soluble polymer line group by pouring method, so that the pouring mixed solution covers the solidified soluble polymer line group, and solidifying to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles, and then proceeding to step 3; Step 3, cutting and dissolving the untrimmed micro-nano spray needle and / or the untrimmed array micro-nano spray needle obtained in step 2 by a cutting and dissolving method to obtain a micro-nano spray needle with an inlet and an outlet; Cutting and dissolving methods include: Step 3.1, cutting the untrimmed micro-nano spray needles and / or the untrimmed array micro-nano spray needles at both ends of the soluble polymer line group, so that both ends of each group of soluble polymer line groups are exposed, and proceeding to step 3.2; Step 3.2, soaking the cut micro-nano spray needles and / or the cut array micro-nano spray needles in a soaking solution for a period of time until the soluble polymer lines in the soluble polymer line group are completely dissolved to obtain conductive micro-nano spray needles.

[0006] In a preferred embodiment of the present invention, in step 3.2, the micro-nano spray needle comprises one or more of a single-channel micro-nano spray needle, an array micro-nano spray needle, and a multi-solution printing array micro-nano spray needle.

[0007] In a preferred embodiment of the present invention, in step 1, the method for preparing the substrate comprises: Casting the casting mixed solution on a glass substrate, leaving the glass substrate cast with the casting mixed solution to stand for a period of time, heating and solidifying it, and cooling it to obtain a substrate plate; The preparation of the casting mixed solution includes: The PDMS base material and the curing agent are mixed in a weight ratio of 5:1 to 10:1 to uniformly obtain a casting mixed solution, and the casting mixed solution is degassed to remove bubbles.

[0008] In a preferred embodiment of the present invention, the method for preparing the micro-nano spray needle convex mold comprises: The method for preparing the micro-nano spray needle convex mold comprises: The substrate is treated with oxygen plasma, and a soluble polymer line one is printed on the treated substrate; then, a soluble polymer line two connected to the soluble polymer line one is printed on the basis of the soluble polymer line one; then, a soluble polymer line three connected to the soluble polymer line two is printed on the basis of the soluble polymer line two; the above steps are repeated several times on the substrate to obtain a micro-nano spray needle convex mold; the soluble polymer line one is a nano line, and the soluble polymer line two and the soluble polymer line three are micrometer lines.

[0009] In a preferred embodiment of the present invention, the method for preparing the array micro-nano spray needle convex mold comprises: On the substrate plate treated with oxygen plasma, a soluble polymer line four is printed at a certain interval to obtain the soluble polymer line four of the array; then, on the basis of the soluble polymer line four of the array, a soluble polymer line five connecting the soluble polymer line four of the array is printed; then, on the basis of the soluble polymer line five, a soluble polymer line six connecting the soluble polymer line five of the array is printed; the above steps are repeated several times on the substrate plate treated with oxygen plasma to obtain the array micro-nano spray needle convex mold; the soluble polymer line four is a nano line, and the soluble polymer line five and the soluble polymer line six are micrometer lines.

[0010] In a preferred embodiment of the present invention, the casting method of the untrimmed micro-nano spray needle and / or the untrimmed array micro-nano spray needle comprises: The mixed solution is poured on the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold, and the mold is placed in a vacuum oven for a period of time to allow the mixed solution to fill the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold; the mold is baked and solidified, and then cooled to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles.

[0011] In a preferred embodiment of the present invention, the single-channel micro-nano spray needle cutting and dissolving method comprises: step 3.1, cutting the untrimmed micro-nano spray needle into blocks with a coated tool, and connecting the soluble polymer line 1, soluble polymer line 2, and soluble polymer line 3 of different line widths as a group of soluble polymer line groups, and exposing both ends of each group of connected soluble polymer line groups during the cutting process; step 3.2, soaking the cut micro-nano spray needle in a soaking liquid with a temperature of 25-50°C for 1-3 hours, wherein the soaking liquid is placed in an ultrasonic cleaning machine to accelerate the dissolution of the soluble polymer line, and the ultrasonic power is 80-100W; the soaking liquid is deionized water, until the soluble polymer is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then the cut and trimmed micro-nano spray needle is placed on a hot plate for a period of time to remove moisture from the cut and trimmed micro-nano spray needle, and a single-channel micro-nano spray needle or an array micro-nano spray needle is obtained; The cutting and dissolving method of the array micro-nano spray needle comprises: step 3.1, cutting the untrimmed micro-nano spray needle into blocks with a coated tool, and connecting the soluble polymer line 4, the soluble polymer line 5, and the soluble polymer line 6 with different line widths as a group of soluble polymer line groups, and making the ends of each group of connected soluble polymer line groups exposed during the cutting process; step 3.2, soaking the cut micro-nano spray needle in a soaking liquid with a temperature of 25-50° C. for 1-3 hours, wherein the soaking liquid is placed in an ultrasonic cleaning machine to accelerate the dissolution of the soluble polymer line, and the ultrasonic power is 80-100W; the soaking liquid is deionized water, until the soluble polymer is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then, the cut and trimmed micro-nano spray needle is dehydrated to obtain an array micro-nano spray needle; And / or, the cutting and dissolving method of the multi-solution printing array micro-nano nozzle includes: Step 3.1, cutting the untrimmed micro-nano spray needle into blocks with a coated tool, so that soluble polymer line one, soluble polymer line two, and soluble polymer line of different line widths are grouped together, or soluble polymer line four, soluble polymer line five, and soluble polymer line six are grouped together, and several groups of soluble polymer line groups are cut as a part, and the ends of each group of soluble polymer line groups are exposed during the cutting process. The cut micro-nano spray needle is immersed in an immersion solution with a temperature of 25~50℃ for 1~3h, and the immersion solution is deionized water, until the soluble polymer is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then, the cut and trimmed micro-nano spray needle is dehydrated to obtain a multi-solution printing array micro-nano spray needle.

[0012] In a preferred embodiment of the present invention, the soluble polymer in the soluble polymer line is PEO; And / or, the printing parameters of the soluble polymer line one include: Print a 100nm PEO line with a printing voltage of 1800-2100V, a PEO concentration of 3-5wt%, and a working distance of 600-900μm; The printing parameters for soluble polymer line 2 include: A PEO line with a line width of 50 μm is printed on the basis of the line of the soluble polymer line 1, and the printing parameters are voltage 1500~2200 V, PEO concentration of the PEO line is 1~3wt%, and working distance is 500~700 μm; The printing parameters for soluble polymer line three include: A PEO line with a line width of 100 μm is printed on the basis of the line of the soluble polymer line 2, and the printing parameters are a voltage of 2000-2500 V, a PEO concentration of 2-4 wt % of the PEO line, and a working distance of 600-800 μm; the above steps are repeated several times on the substrate to obtain a micro-nano spray needle convex mold; And / or, the printing parameters of the soluble polymer line four include: A PEO line was printed every 5-8 μm to obtain array soluble polymer line four; the printing parameters were voltage 1800-2100 V, PEO concentration of the PEO line was 3-5 wt%, and working distance was 600-900 μm; The printing parameters for soluble polymer line five include: A PEO line with a line width of 50 μm was printed on the basis of the array soluble polymer line 4, and the printing parameters were voltage 1500~2200 V, PEO concentration 1~3wt%, and working distance 500~700 μm; The printing parameters for soluble polymer line six include: A PEO line with a line width of 100 μm was printed on the basis of the soluble polymer line 5, and the printing parameters were voltage 2000-2500 V, PEO concentration 2-4 wt%, and working distance 600-800 μm; And / or, in step 1, the PDMS base material and the curing agent are mixed together in a weight ratio of 5:1 to 10:1, stirred for 5 minutes to mix evenly, then placed in a vacuum box for degassing to remove bubbles, and poured on a glass substrate, then the poured glass substrate is placed on a horizontal platform in an oven and left to stand for 10 to 30 minutes, then the oven is adjusted at 60 to 80° C. to cure the PDMS mixed solution, and taken out after cooling to obtain a substrate plate, which is a PDMS substrate; And / or, the parameters of the substrate plate undergoing oxygen plasma treatment include: power of 5 to 25 W, treatment time of 10 to 35 s; And / or, the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold cast with the casting mixed solution is placed in a vacuum oven for 1-2 hours to ensure that the casting mixed solution completely fills the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold; then placed in a 60-85ºC oven for 2-4 hours to cure, and then cooled to room temperature to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles.

[0013] In a preferred embodiment of the present invention, the soluble polymer in the soluble polymer line is PEO; And / or, the printing parameters of the soluble polymer line one include: Print a 100nm PEO line with a printing voltage of 1800-2100V, a PEO concentration of 3-5wt%, and a working distance of 600-900μm; The printing parameters for soluble polymer line 2 include: A PEO line with a line width of 50 μm is printed on the basis of the line of the soluble polymer line 1, and the printing parameters are voltage 1500~2200 V, PEO concentration of the PEO line is 1~3wt%, and working distance is 500~700 μm; The printing parameters for soluble polymer line three include: A PEO line with a line width of 100 μm is printed on the basis of the line of the soluble polymer line 2, and the printing parameters are a voltage of 2000-2500 V, a PEO concentration of 2-4 wt % of the PEO line, and a working distance of 600-800 μm; the above steps are repeated several times on the substrate to obtain a micro-nano spray needle convex mold; And / or, the printing parameters of the soluble polymer line four include: A PEO line was printed every 5-8 μm to obtain array soluble polymer line four; the printing parameters were voltage 1800-2100 V, PEO concentration of the PEO line was 3-5 wt%, and working distance was 600-900 μm; The printing parameters for soluble polymer line five include: A PEO line with a line width of 50 μm was printed on the basis of the array soluble polymer line 4, and the printing parameters were voltage 1500~2200 V, PEO concentration 1~3wt%, and working distance 500~700 μm; The printing parameters for soluble polymer line six include: A PEO line with a line width of 100 μm was printed on the basis of the soluble polymer line 5, and the printing parameters were voltage 2000-2500 V, PEO concentration 2-4 wt%, and working distance 600-800 μm; And / or, in step 1, the PDMS base material and the curing agent are mixed together in a weight ratio of 5:1 to 10:1, stirred for 5 minutes to mix evenly, then placed in a vacuum box for degassing to remove bubbles, and poured on a glass substrate, then the poured glass substrate is placed on a horizontal platform in an oven and left to stand for 10 to 30 minutes, then the oven is adjusted at 60 to 80° C. to cure the PDMS mixed solution, and taken out after cooling to obtain a substrate plate, wherein the substrate plate is a PDMS substrate; And / or, the parameters of the substrate plate undergoing oxygen plasma treatment include: power of 5 to 25 W, treatment time of 10 to 35 s; And / or, the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold cast with the casting mixed solution is placed in a vacuum oven for 1-2 hours to ensure that the casting mixed solution completely fills the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold; then placed in a 60-85ºC oven for 2-4 hours to cure, and then cooled to room temperature to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles.

[0014] Furthermore, the working distance is the printing working distance between the print head and the substrate.

[0015] In a preferred embodiment of the present invention, the soluble polymer PEO of the electrojet printing can be replaced by PVP, AZ series positive photoresist, BP series positive photoresist with a concentration of 1-5wt%; the deionized water can be replaced by AZ developer, BP developer; and / or, using an oxygen plasma ashing apparatus to perform hydrophilic treatment on the substrate, with a treatment power of 5 to 25 W and a treatment time of 10 to 35 seconds; And / or, evacuate the environment in a vacuum oven below 10Pa for 1-2 hours; and / or, treating the trimmed micro-nano spray needle in deionized water with an ultrasonic power of 80-100 W, a temperature of 25-50° C., and a time of 1-3 h to dissolve PEO; and / or, placing the trimmed micro-nano spray needle on a hot plate at 85-150° C. for 10-30 min to remove moisture.

[0016] In a preferred embodiment of the present invention, a spray needle is prepared by a batch manufacturing method of micro-nano spray needles based on cutting and dissolution.

[0017] The present invention solves the defects existing in the technical background, and the beneficial technical effects of the present invention are: The present invention discloses a method for batch manufacturing of micro-nano spray needles based on cutting and dissolving, and a spray needle; a micron and nano structure is printed and manufactured by an electro-hydraulic jet method, and a large-area micro-nano spray needle convex mold and an array micro-nano spray needle convex mold are obtained. Then, a casting method is used to obtain an untrimmed micro-nano spray needle, that is, PDMS is cast on a large-area micro-nano spray needle convex mold and an array micro-nano spray needle convex mold and solidified. Subsequently, the coating tool is used for cutting and trimming, and the micro-nano structure is placed in a soaking liquid to dissolve the soluble polymer, and finally a stable and complete single-channel micro-nano spray needle, an array micro-nano spray needle, and a plurality of solution-printed array micro-nano spray needles are obtained. The present invention has a simple process, low cost, and can be produced on a large scale. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0019] Figure 1It is a flow chart for preparing a micro-nano spray needle convex mold and an array micro-nano spray needle convex mold in a preferred embodiment of the present invention; Figure 2 It is a manufacturing flow chart of manufacturing single-channel micro-nano spray needles, array micro-nano spray needles and multi-solution printing array micro-nano spray needles by casting and dissolving method in a preferred embodiment of the present invention; Figure 3 It is a structural diagram of a single-channel micro-nano spray needle in a preferred embodiment of the present invention; Figure 4 is a structural diagram of an array of micro-nano spray needles in a preferred embodiment of the present invention; Figure 5 Schematic diagram of the structure of a micro-nano spray needle for printing arrays of multiple solutions in a preferred embodiment of the present invention; Figure 6 This is a microscope image of a convex mold of a single-channel micro-nano spray needle in the third preferred embodiment of the present invention; Figure 7 This is a microscope image of the convex mold of the array micro-nano spray needle in the third preferred embodiment of the present invention; Figure 8 This is a SEM image of a cross section of a nanochannel in a single-channel micro-nano spray needle in the third preferred embodiment of the present invention; Fig. 9 This is a SEM image of a cross section of a nanochannel in a micro-nano spray needle of a multi-solution printing array in a preferred embodiment 3 of the present invention; Fig.10 This is a SEM image of a cross section of a nanochannel in an array of micro-nano spray needles in a preferred embodiment 3 of the present invention; In the figure: 1. substrate; 2. oxygen plasma ashing instrument; 3. soluble polymer line one; 4. soluble polymer line two; 5. soluble polymer line three; 6. beaker; 7. deionized water; 8. hot plate, 91. soluble polymer line four; 92. soluble polymer line five; 93. soluble polymer line six. DETAILED DESCRIPTION

[0020] The present invention will now be further described in detail with reference to the accompanying drawings and embodiments. These drawings are simplified schematic diagrams that only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0021] It should be noted that if there are directional indications (such as up, down, bottom, top, etc.) involved in the embodiments of the present invention, the directional indication is only used to explain the relative position relationship, movement, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly. The terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. Unless otherwise clearly specified and defined, the terms "set", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0022] like Figure 1-Figure 2 As shown, a method for batch manufacturing of micro-nano spray needles based on cutting and dissolution includes the following steps: Step 1, print a plurality of groups of soluble polymer line groups on the substrate 1 to obtain a micro-nano spray needle convex mold and / or an array micro-nano spray needle convex mold, and then proceed to step 2.

[0023] The preparation method of the substrate plate 1 includes: pouring a casting mixed solution on a glass substrate, then leaving the glass substrate poured with the casting mixed solution to stand for a period of time, heating and solidifying it, and cooling it to obtain the substrate plate 1; The preparation of the casting mixed solution includes: mixing the PDMS base material and the curing agent in a weight ratio of 5:1 to 10:1, stirring for 5 minutes to mix evenly, and obtaining a casting mixed solution; then placing the casting mixed solution in a vacuum box for degassing to remove bubbles, and casting it on a glass substrate (the parameters of the substrate plate 1 for oxygen plasma treatment include: power of 5~25W, treatment time of 10~35s), then placing the cast glass substrate on a horizontal platform in an oven and letting it stand for 10~30 minutes, then adjusting the oven to 60~80°C to cure the PDMS mixed solution, and taking it out after cooling to obtain a substrate plate 1, which is a PDMS substrate ( Figure 1 1a).

[0024] Furthermore, the preparation method of the micro-nano spray needle convex mold includes: The base plate 1 is subjected to oxygen plasma treatment ( Figure 1 1b), a soluble polymer line 3 is printed on the treated substrate 1 ( Figure 1Then, a soluble polymer line 2 4 connecting the soluble polymer line 1 3 is printed on the basis of the soluble polymer line 1 3 ( Figure 1 Then, a soluble polymer line 3 5 connecting the soluble polymer line 2 4 is printed on the basis of the soluble polymer line 2 4 ( Figure 1 Repeat the above steps several times on the substrate 1 to obtain a micro-nano spray needle convex mold ( Figure 1 1f).

[0025] More specifically, the printing parameters of soluble polymer line 3 include: printing a PEO line with a line width of 100nm, a printing voltage of 1800~2100V, a PEO concentration of 3~5wt% of the PEO line, and a working distance of 600~900μm; the printing parameters of soluble polymer line 24 include: printing a PEO line with a line width of 50μm based on the line of soluble polymer line 3, the printing parameters are voltage of 1500~2200V, the PEO concentration of the soluble polymer line is 1~3wt%, and the working distance is 500~700μm; the printing parameters of soluble polymer line 35 include: printing a PEO line with a line width of 100μm based on the line of soluble polymer line 24, the printing parameters are voltage of 2000~2500V, the PEO concentration of the soluble polymer line is 2~4wt%, and the working distance is 600~800μm. Repeat the above steps several times on the PDMS substrate to obtain a micro-nano spray needle convex mold.

[0026] The method for preparing the array micro-nano spray needle convex mold includes: After the oxygen plasma treatment, a soluble polymer line 91 is printed at intervals to obtain an array of soluble polymer lines 91 ( Figure 1 Then, a soluble polymer line 5 92 connecting the array soluble polymer line 4 91 is printed on the basis of the array soluble polymer line 4 91 ( Figure 1 Then, a soluble polymer line 6 93 connecting the array soluble polymer line 5 92 is printed on the basis of the soluble polymer line 5 92 ( Figure 1 1e2); repeat the above steps several times on the PDMS substrate after oxygen plasma treatment to obtain an array micro-nano needle convex mold ( Figure 11f). More specifically, the printing parameters of the soluble polymer line four 91 include: printing a PEO line every 5-8 μm to obtain the array soluble polymer line four 91; the printing parameters are voltage 1800-2100 V, PEO concentration 3-5 wt%, and working distance 600-900 μm; the printing parameters of the soluble polymer line five 92 include: printing a PEO line with a line width of 50 μm on the basis of the array soluble polymer line four 91, the printing parameters are voltage 1500-2200 V, PEO concentration 1-3 wt%, and working distance 500-700 μm; the printing parameters of the soluble polymer line six 93 include: printing a line with a line width of 100 μm on the basis of the soluble polymer line five 92, the printing parameters are voltage 2000-2500 V, PEO concentration 2-4 wt%, and working distance 600-800 μm.

[0027] Step 2, pouring a pouring mixed solution ( Figure 2 As shown in Figure 2a), the cast mixed solution covers the soluble polymer lines, and the untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles are obtained by solidification, and then the process proceeds to step 3.

[0028] Specifically, the casting method of the untrimmed micro-nano spray needle and / or the untrimmed array micro-nano spray needle includes: The mixed solution is poured on the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold, and the mold is placed in a vacuum oven for a period of time to allow the mixed solution to fill the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold; the mold is baked and solidified, and then cooled to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles.

[0029] Furthermore, the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold poured with the casting mixed solution is placed in a vacuum oven for 1-2 hours to ensure that the casting mixed solution completely fills the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold; then placed in a 60-85ºC oven for baking for 2-4 hours to cure (wherein, the temperature is 60°C for 4 hours, the temperature is 70°C for 3 hours, and the temperature is 80°C for 2 hours), and then cooled to room temperature to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles.

[0030] Step 3, cutting and dissolving the untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles obtained in step 2 by a cutting and dissolving method to obtain micro-nano spray needles and / or array micro-nano spray needles with an inlet and an outlet. The cutting and dissolving method includes: step 3.1, cutting the ends of the PEO line group of the untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles, so that the ends of each group of soluble polymer line groups are exposed ( Figure 2 2b, 2c1, 2c2, 2c3), proceed to step 3.2; step 3.2, place the cut micro-nano spray needle in the soaking liquid in the beaker 6 and soak for a period of time ( Figure 2 2d), until the soluble polymer in the soluble polymer line group is completely dissolved to obtain a conductive micro-nano spray needle. Step 3.2, the micro-nano spray needle includes one or more of a single-channel micro-nano spray needle, an array micro-nano spray needle, and a multi-solution printing array micro-nano spray needle ( Figure 2 2e).

[0031] Specifically, the single-channel micro-nano spray needle cutting and dissolving method includes: step 3.1, cutting the untrimmed micro-nano spray needle in blocks with a coated tool, and connecting the soluble polymer line 1 3, soluble polymer line 2 4, and soluble polymer line 3 5 of different line widths as a group of PEO line groups, and exposing the ends of each group of connected PEO lines during the cutting process; step 3.2, soaking the cut micro-nano spray needle in a soaking liquid at a temperature of 25~50℃ for 1~3h, the soaking liquid is deionized water 7, until PEO is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then the cut and trimmed micro-nano spray needle is dehydrated to obtain a single-channel micro-nano spray needle or an array micro-nano spray needle. Among them, the soaking liquid is placed in an ultrasonic cleaning machine to accelerate the dissolution of the PEO line, and the ultrasonic power is 80~100W.

[0032] Specifically, the cutting and dissolving method of the array micro-nano spray needle includes: step 3.1, cutting the untrimmed micro-nano spray needle into blocks with a coated tool, and connecting the soluble polymer line 4 91, the soluble polymer line 5 92, and the soluble polymer line 6 93 with different line widths as a group of PEO line groups, and exposing the ends of each group of connected PEO lines during the cutting process; step 3.2, soaking the cut micro-nano spray needle in a soaking solution with a temperature of 25-50°C for 1-3 hours ( Figure 2 As shown in 2d, the immersion liquid is deionized water 7, until the PEO is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then the cut and trimmed micro-nano spray needle is dehydrated to obtain an array micro-nano spray needle ( Figure 2 2e). The soaking liquid is placed in an ultrasonic cleaning machine to accelerate the dissolution of the PEO lines, and the ultrasonic power is 80 to 100W.

[0033] Specifically, the cutting and dissolving method of multi-solution printing array micro-nano spray needles includes: step 3.1, cutting the untrimmed micro-nano spray needles in blocks with a coated tool, so that 3 connected segments of soluble polymer lines 1 3, soluble polymer lines 2 4, and soluble polymer lines of different line widths are grouped together, or soluble polymer lines 4 91, soluble polymer lines 5 92, and soluble polymer lines 6 93 are grouped together, and every 2 to 3 groups of PEO lines are cut as a part, and the ends of each group of PEO lines are exposed during the cutting process, and the cut micro-nano spray needles are soaked in a soaking liquid at a temperature of 25 to 50°C for 1 to 3 hours, and the soaking liquid is deionized water 7, until PEO is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then, the cut and trimmed micro-nano spray needles are dehydrated to obtain multi-solution printing array micro-nano spray needles. Among them, the soaking liquid is placed in an ultrasonic cleaning machine to accelerate the dissolution of the PEO lines, and the ultrasonic power is 80 to 100W. Embodiment 1

[0034] like Figure 1-Figure 2 As shown, a method for batch manufacturing of micro-nano spray needles based on cutting and dissolution includes the following steps: Step 1, print a plurality of groups of soluble polymer line groups on the substrate 1 to obtain a micro-nano spray needle convex mold and / or an array micro-nano spray needle convex mold, and then proceed to step 2.

[0035] The preparation method of the substrate plate 1 includes: pouring a casting mixed solution on a glass substrate, then leaving the glass substrate poured with the casting mixed solution to stand for a period of time, heating and solidifying it, and cooling it to obtain the substrate plate 1; Among them, the preparation of the casting mixed solution includes: mixing the PDMS base material and the curing agent in a weight ratio of 5:1, stirring for 5 minutes to mix evenly, and obtaining a casting mixed solution; then placing the casting mixed solution in a vacuum box for degassing to remove bubbles, and casting it on a glass substrate (the parameters of the substrate plate 1 for oxygen plasma treatment include: power of 5W, treatment time of 10s), then placing the cast glass substrate on a horizontal platform in an oven and letting it stand for 10 minutes, then adjusting the oven to 60°C, curing for 4 hours, curing the PDMS mixed solution, cooling and taking it out to obtain a substrate plate 1, which is a PDMS substrate.

[0036] Furthermore, the preparation method of the micro-nano spray needle convex mold includes: The substrate 1 is treated with oxygen plasma, and a soluble polymer line 3 is printed on the treated substrate 1; then, a soluble polymer line 4 is printed on the basis of the soluble polymer line 3; then, a soluble polymer line 3 5 is printed on the basis of the soluble polymer line 2 4; the above steps are repeated several times on the substrate 1 to obtain a micro-nano spray needle convex mold. More specifically, the printing parameters of the soluble polymer line 1-3 include: printing a PEO line with a line width of 100nm, a printing voltage of 1800V, a PEO concentration of 3wt% of the PEO line, and a working distance of 600μm; the printing parameters of the soluble polymer line 2-4 include: printing a line with a line width of 50μm based on the line of the soluble polymer line 1-3, a printing parameter of a voltage of 1500V, a PEO concentration of 1wt% of the PEO line, and a working distance of 500μm; the printing parameters of the soluble polymer line 3-5 include: printing a line with a line width of 100μm based on the line of the soluble polymer line 2-4, a printing parameter of a voltage of 2000V, a PEO concentration of 2wt% of the PEO line, and a working distance of 600μm. Repeat the above steps several times on the PDMS substrate to obtain a micro-nano spray needle convex mold.

[0037] The method for preparing the array micro-nano spray needle convex mold includes: On the base plate 1 treated with oxygen plasma, a soluble polymer line four 91 is printed at a certain interval to obtain an array of soluble polymer lines four 91; then, on the basis of the array of soluble polymer lines four 91, a soluble polymer line five 92 connecting the array of soluble polymer lines four 91 is printed; then, on the basis of the soluble polymer line five 92, a soluble polymer line six 93 connecting the array of soluble polymer lines five 92 is printed; the above steps are repeated several times on the PDMS substrate treated with oxygen plasma to obtain an array of micro-nano spray needle convex mold. More specifically, the printing parameters of the soluble polymer line four 91 include: printing a soluble polymer line four 91 every 5 μm to obtain an array of soluble polymer lines four 91; the printing parameters are a voltage of 1800 V, a PEO concentration of 3 wt%, and a working distance of 600 μm; the printing parameters of the soluble polymer line five 92 include: printing a line with a line width of 50 μm based on the array soluble polymer line four 91, the printing parameters are a voltage of 1500 V, a PEO concentration of 1 wt%, and a working distance of 500 μm; the printing parameters of the soluble polymer line six 93 include: printing a line with a line width of 100 μm based on the soluble polymer line five 92, the printing parameters are a voltage of 2000 V, a PEO concentration of 2 wt%, and a working distance of 600 μm.

[0038] Step 2, pouring a casting mixed solution on the substrate 1 printed with PEO lines by a pouring method, so that the casting mixed solution covers the PEO lines, and solidifying to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles, and then proceeding to step 3.

[0039] Specifically, the casting method of the untrimmed micro-nano spray needle and / or the untrimmed array micro-nano spray needle includes: The mixed solution is poured on the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold, and the mold is placed in a vacuum oven for a period of time to allow the mixed solution to fill the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold; the mold is baked and solidified, and then cooled to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles.

[0040] Furthermore, the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold poured with the casting mixed solution is placed in a vacuum oven and evacuated for 1 hour to ensure that the casting mixed solution completely fills the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold; then placed in a 60ºC oven for baking for 4 hours to solidify, and then cooled to room temperature to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles.

[0041] Step 3, cutting and dissolving the untrimmed micro-nano spray needle and / or untrimmed array micro-nano spray needle obtained in step 2 by cutting and dissolving to obtain a micro-nano spray needle and / or an array micro-nano spray needle with an inlet and an outlet. The cutting and dissolving method includes: step 3.1, cutting the ends of the PEO line group of the untrimmed micro-nano spray needle and / or the untrimmed array micro-nano spray needle, so that the ends of each group of PEO line groups are exposed, and then proceeding to step 3.2; step 3.2, placing the cut micro-nano spray needle in the soaking liquid of beaker 6 for a period of time until the PEO in the PEO line group is completely dissolved to obtain a conductive micro-nano spray needle. In step 3.2, the micro-nano spray needle includes one or more of a single-channel micro-nano spray needle, an array micro-nano spray needle, and a multi-solution printing array micro-nano spray needle.

[0042] Specifically, the single-channel micro-nano spray needle cutting and dissolving method includes: step 3.1, cutting the untrimmed micro-nano spray needle in blocks with a coated tool, and connecting the soluble polymer line 1 3, soluble polymer line 2 4, and soluble polymer line 3 5 of different line widths as a group of PEO line groups, and exposing the ends of each group of connected PEO lines during the cutting process; step 3.2, soaking the cut micro-nano spray needle in a soaking liquid at a temperature of 25°C for 3 hours, the soaking liquid is deionized water 7, until the PEO is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then the cut and trimmed micro-nano spray needle is dehydrated to obtain a single-channel micro-nano spray needle or an array micro-nano spray needle. Among them, the soaking liquid is placed in an ultrasonic cleaning machine to accelerate the dissolution of the PEO line, and the ultrasonic power is 80 to 100W; in this embodiment, the ultrasonic power is 80W.

[0043] Specifically, the cutting and dissolving method of the array micro-nano spray needle includes: step 3.1, cutting the untrimmed micro-nano spray needle into blocks with a coated tool, and connecting the soluble polymer line 4 91, the soluble polymer line 5 92, and the soluble polymer line 6 93 of different line widths as a group of PEO line groups, and exposing the ends of each group of connected PEO lines during the cutting process; step 3.2, soaking the cut micro-nano spray needle in a soaking liquid at a temperature of 25°C for 3 hours, the soaking liquid is deionized water 7, until the PEO is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then the cut and trimmed micro-nano spray needle is dehydrated to obtain an array micro-nano spray needle. Among them, the soaking liquid is placed in an ultrasonic cleaning machine to accelerate the dissolution of the PEO lines, and the ultrasonic power is 80 to 100W; in this embodiment, the ultrasonic power is 80W.

[0044] Specifically, the cutting and dissolving method of multi-solution printing array micro-nano spray needles includes: step 3.1, cutting the untrimmed micro-nano spray needles in blocks with a coated tool, so that 3 connected segments of soluble polymer lines 1 3, soluble polymer lines 2 4, and PEO lines of different line widths are grouped together, or soluble polymer lines 4 91, soluble polymer lines 5 92, and soluble polymer lines 6 93 are grouped together, and every 2 or 3 groups of PEO lines are cut as a part, and the ends of each group of PEO lines are exposed during the cutting process, and the cut micro-nano spray needles are soaked in a soaking liquid at a temperature of 25°C for 3 hours, and the soaking liquid is deionized water 7, until PEO is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then, the cut and trimmed micro-nano spray needles are dehydrated to obtain multi-solution printing array micro-nano spray needles. Among them, the soaking liquid is placed in an ultrasonic cleaning machine to accelerate the dissolution of the PEO lines, and the ultrasonic power is 80 to 100W; in this embodiment, the ultrasonic power is 80W. Embodiment 2

[0045] like Figure 1-Figure 2As shown, a method for batch manufacturing of micro-nano spray needles based on cutting and dissolution includes the following steps: Step 1, print a plurality of groups of soluble polymer line groups on the substrate 1 to obtain a micro-nano spray needle convex mold and / or an array micro-nano spray needle convex mold, and then proceed to step 2.

[0046] The preparation method of the substrate plate 1 includes: pouring a casting mixed solution on a glass substrate, then leaving the glass substrate poured with the casting mixed solution to stand for a period of time, heating and solidifying it, and cooling it to obtain the substrate plate 1; Among them, the preparation of the casting mixed solution includes: mixing the PDMS base material and the curing agent in a weight ratio of 10:1, stirring for 5 minutes to mix evenly, and obtaining a casting mixed solution; then placing the casting mixed solution in a vacuum box to degas and remove bubbles, and casting it on a glass substrate (the parameters of the substrate plate 1 for oxygen plasma treatment include: power of 25W, treatment time of 35s), then placing the cast glass substrate on a horizontal platform in an oven and letting it stand for 30 minutes, then adjusting the oven to 80°C and curing for 2 hours to cure the PDMS mixed solution, and taking it out after cooling to obtain a substrate plate 1, which is a PDMS substrate.

[0047] Furthermore, the preparation method of the micro-nano spray needle convex mold includes: The substrate 1 is treated with oxygen plasma, and a soluble polymer line 3 is printed on the treated substrate 1; then, a soluble polymer line 4 is printed on the basis of the soluble polymer line 3; then, a soluble polymer line 3 5 is printed on the basis of the soluble polymer line 2 4; the above steps are repeated several times on the substrate 1 to obtain a micro-nano spray needle convex mold. More specifically, the soluble polymer in the soluble polymer line 1-3 is PEO, and the specific printing parameters include: printing a PEO line with a line width of 100nm, a printing voltage of 2100V, a PEO concentration of 5wt%, and a working distance of 900μm; the printing parameters of the soluble polymer line 2-4 include: printing a PEO line with a line width of 50μm based on the line of the soluble polymer line 1-3, the printing parameters are a voltage of 2200V, a PEO concentration of 3wt%, and a working distance of 700μm; the printing parameters of the soluble polymer line 3-5 include: printing a PEO line with a line width of 100μm based on the line of the soluble polymer line 2-4, the printing parameters are a voltage of 2500V, a PEO concentration of 4wt%, and a working distance of 800μm. Repeat the above steps several times on the PDMS substrate to obtain a micro-nano spray needle convex mold.

[0048] The method for preparing the array micro-nano spray needle convex mold includes: On the base plate 1 treated with oxygen plasma, a soluble polymer line four 91 is printed at a certain interval to obtain an array of soluble polymer lines four 91; then, on the basis of the array of soluble polymer lines four 91, a soluble polymer line five 92 connecting the array of soluble polymer lines four 91 is printed; then, on the basis of the soluble polymer line five 92, a soluble polymer line six 93 connecting the array of soluble polymer lines five 92 is printed; the above steps are repeated several times on the PDMS substrate treated with oxygen plasma to obtain an array of micro-nano spray needle convex mold. More specifically, the printing parameters of the soluble polymer line four 91 include: printing a PEO line every 8 μm to obtain an array of soluble polymer lines four 91; the printing parameters are a voltage of 2100 V, a PEO concentration of 5 wt%, and a working distance of 900 μm; the printing parameters of the soluble polymer line five 92 include: printing a PEO line with a line width of 50 μm based on the array soluble polymer line four 91, the printing parameters are a voltage of 1500~2200 V, a PEO concentration of 3 wt%, and a working distance of 700 μm; the printing parameters of the soluble polymer line six 93 include: printing a PEO line with a line width of 100 μm based on the soluble polymer line five 92, the printing parameters are a voltage of 2500 V, a PEO concentration of 4 wt%, and a working distance of 800 μm.

[0049] Step 2: pour a casting mixed solution on the base plate 1 printed with the soluble polymer line group by a casting method, so that the casting mixed solution covers the soluble polymer line group, and solidify to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles, and then proceed to step 3.

[0050] Specifically, the casting method of the untrimmed micro-nano spray needle and / or the untrimmed array micro-nano spray needle includes: The mixed solution is poured on the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold, and the mold is placed in a vacuum oven for a period of time to allow the mixed solution to fill the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold; the mold is baked and solidified, and then cooled to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles.

[0051] Furthermore, the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold poured with the casting mixed solution is placed in a vacuum oven and evacuated for 2 hours to ensure that the casting mixed solution completely fills the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold; then placed in an 85ºC oven for baking for 1.5 hours to solidify, and then cooled to room temperature to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles.

[0052] Step 3, cutting and dissolving the untrimmed micro-nano spray needle and / or untrimmed array micro-nano spray needle obtained in step 2 by a cutting and dissolving method to obtain a micro-nano spray needle and / or an array micro-nano spray needle with an inlet and an outlet. The cutting and dissolving method includes: step 3.1, cutting the ends of the PEO line group of the untrimmed micro-nano spray needle and / or the untrimmed array micro-nano spray needle, so that the ends of each group of PEO line groups are exposed, and then proceeding to step 3.2; step 3.2, placing the cut micro-nano spray needle in the soaking liquid of beaker 6 for a period of time until the PEO in the soluble polymer line group is completely dissolved to obtain a conductive micro-nano spray needle. In step 3.2, the micro-nano spray needle includes one or more of a single-channel micro-nano spray needle, an array micro-nano spray needle, and a multi-solution printing array micro-nano spray needle.

[0053] Specifically, the single-channel micro-nano spray needle cutting and dissolving method includes: step 3.1, cutting the untrimmed micro-nano spray needle in blocks with a coated tool, and connecting the soluble polymer line 1 3, soluble polymer line 2 4, and soluble polymer line 3 5 of different line widths as a group of PEO line groups, and exposing the ends of each group of connected PEO lines during the cutting process; step 3.2, soaking the cut micro-nano spray needle in a soaking liquid at a temperature of 50°C for 1 hour, the soaking liquid is deionized water 7, until the PEO is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then the cut and trimmed micro-nano spray needle is dehydrated to obtain a single-channel micro-nano spray needle or an array micro-nano spray needle. Among them, the soaking liquid is placed in an ultrasonic cleaning machine to accelerate the dissolution of the PEO line, and the ultrasonic power is 80 to 100W; in this embodiment, the ultrasonic power is 100W.

[0054] Specifically, the cutting and dissolving method of the array micro-nano spray needle includes: step 3.1, cutting the untrimmed micro-nano spray needle into blocks with a coated tool, and connecting the soluble polymer line 4 91, the soluble polymer line 5 92, and the soluble polymer line 6 93 of different line widths as a group of PEO line groups, and exposing the ends of each group of connected PEO lines during the cutting process; step 3.2, soaking the cut micro-nano spray needle in a soaking liquid at a temperature of 50°C for 1 hour, the soaking liquid is deionized water 7, until the PEO is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then the cut and trimmed micro-nano spray needle is dehydrated to obtain an array micro-nano spray needle. Among them, the soaking liquid is placed in an ultrasonic cleaning machine to accelerate the dissolution of the PEO lines, and the ultrasonic power is 80 to 100W; in this embodiment, the ultrasonic power is 100W.

[0055] Specifically, the cutting and dissolving method of multi-solution printing array micro-nano spray needles includes: step 3.1, cutting the untrimmed micro-nano spray needles in blocks with a coated tool, so that 3 sections of soluble polymer lines 1 3, soluble polymer lines 2 4, and PEO lines with different line widths are grouped together, or 3 sections of soluble polymer lines 4 91, soluble polymer lines 5 92, and soluble polymer lines 6 93 with different line widths are grouped together, and every 2 or 3 groups of PEO lines are cut as a part, and the ends of each group of PEO lines are exposed during the cutting process, and the cut micro-nano spray needles are soaked in a soaking liquid at a temperature of 50°C for 1 hour, and the soaking liquid is deionized water 7, until PEO is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then, the cut and trimmed micro-nano spray needles are dehydrated to obtain multi-solution printing array micro-nano spray needles. Among them, the soaking liquid is placed in an ultrasonic cleaning machine to accelerate the dissolution of the PEO lines, and the ultrasonic power is 80 to 100W; in this embodiment, the ultrasonic power is 100W. Embodiment 3

[0056] like Figure 1-Figure 10 As shown, a method for batch manufacturing of micro-nano spray needles based on cutting and dissolution includes the following steps: Step 1, print a plurality of groups of soluble polymer line groups on the substrate 1 to obtain a micro-nano spray needle convex mold and / or an array micro-nano spray needle convex mold, and then proceed to step 2.

[0057] The preparation method of the substrate plate 1 includes: pouring a casting mixed solution on a glass substrate, then leaving the glass substrate poured with the casting mixed solution to stand for a period of time, heating and solidifying it, and cooling it to obtain the substrate plate 1; Among them, the preparation of the casting mixed solution includes: mixing the PDMS base material and the curing agent in a weight ratio of 8:1, stirring for 5 minutes to mix evenly, and obtaining a casting mixed solution; then placing the casting mixed solution in a vacuum box to degas and remove bubbles, and casting it on a glass substrate (the parameters of the substrate plate 1 for oxygen plasma treatment include: power of 15W, treatment time of 25s), then placing the cast glass substrate on a horizontal platform in an oven and letting it stand for 20 minutes, then adjusting the oven to 70°C and curing for 3 hours to cure the PDMS mixed solution, and taking it out after cooling to obtain a substrate plate 1, which is a PDMS substrate.

[0058] Furthermore, the preparation method of the micro-nano spray needle convex mold includes: The substrate 1 is treated with oxygen plasma, and a soluble polymer line 3 is printed on the treated substrate 1; then, a soluble polymer line 4 is printed on the basis of the soluble polymer line 3; then, a soluble polymer line 3 5 is printed on the basis of the soluble polymer line 2 4; the above steps are repeated several times on the substrate 1 to obtain a micro-nano spray needle convex mold. More specifically, the printing parameters of soluble polymer line 1-3 include: printing a PEO line with a line width of 100nm, a printing voltage of 1950V, a PEO concentration of 4.5wt%, and a working distance of 750μm; the printing parameters of soluble polymer line 2-4 include: printing a PEO line with a line width of 50μm based on the line of soluble polymer line 1-3, a printing parameter of a voltage of 1800V, a PEO concentration of 2wt%, and a working distance of 600μm; the printing parameters of soluble polymer line 3-5 include: printing a PEO line with a line width of 100μm based on the line of soluble polymer line 2-4, a printing parameter of a voltage of 2250V, a PEO concentration of 3wt%, and a working distance of 700μm. Repeat the above steps several times on the PDMS substrate to obtain a micro-nano spray needle convex mold.

[0059] The method for preparing the array micro-nano spray needle convex mold includes: On the base plate 1 treated with oxygen plasma, a soluble polymer line four 91 is printed at a certain interval to obtain an array of soluble polymer lines four 91; then, on the basis of the array of soluble polymer lines four 91, a soluble polymer line five 92 connecting the array of soluble polymer lines four 91 is printed; then, on the basis of the soluble polymer line five 92, a soluble polymer line six 93 connecting the array of soluble polymer lines five 92 is printed; the above steps are repeated several times on the PDMS substrate treated with oxygen plasma to obtain an array of micro-nano spray needle convex molds. More specifically, the printing parameters of the soluble polymer line four 91 include: printing a soluble polymer line four 91 every 7 μm to obtain an array of soluble polymer lines four 91; the printing parameters are a voltage of 1950 V, a PEO concentration of 4.5 wt%, and a working distance of 800 μm; the printing parameters of the soluble polymer line five 92 include: printing a PEO line with a line width of 50 μm based on the array soluble polymer line four 91, the printing parameters are a voltage of 2250 V, a PEO concentration of 2 wt%, and a working distance of 600 μm; the printing parameters of the soluble polymer line six 93 include: printing a PEO line with a line width of 100 μm based on the soluble polymer line five 92, the printing parameters are a voltage of 2250 V, a PEO concentration of 3 wt%, and a working distance of 700 μm.

[0060] Step 2: pour a casting mixed solution on the base plate 1 printed with the soluble polymer line group by a casting method, so that the casting mixed solution covers the soluble polymer line group, and solidify to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles, and then proceed to step 3.

[0061] Specifically, the casting method of the untrimmed micro-nano spray needle and / or the untrimmed array micro-nano spray needle includes: The mixed solution is poured on the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold, and the mold is placed in a vacuum oven for a period of time to allow the mixed solution to fill the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold; the mold is baked and solidified, and then cooled to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles.

[0062] Furthermore, the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold poured with the casting mixed solution is placed in a vacuum oven for 1.5 hours to ensure that the casting mixed solution completely fills the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold; then placed in a 70ºC oven for baking for 3 hours to solidify, and then cooled to room temperature to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles.

[0063] Step 3, cutting and dissolving the untrimmed micro-nano spray needle and / or untrimmed array micro-nano spray needle obtained in step 2 by cutting and dissolving to obtain a micro-nano spray needle and / or an array micro-nano spray needle with an inlet and an outlet. The cutting and dissolving method includes: step 3.1, cutting the ends of the PEO line group of the untrimmed micro-nano spray needle and / or the untrimmed array micro-nano spray needle, so that the ends of each group of PEO line groups are exposed, and then proceeding to step 3.2; step 3.2, placing the cut micro-nano spray needle in the soaking liquid of beaker 6 for a period of time until the PEO in the PEO line group is completely dissolved to obtain a conductive micro-nano spray needle. In step 3.2, the micro-nano spray needle includes one or more of a single-channel micro-nano spray needle, an array micro-nano spray needle, and a multi-solution printing array micro-nano spray needle.

[0064] Specifically, the single-channel micro-nano spray needle cutting and dissolving method includes: step 3.1, cutting the untrimmed micro-nano spray needle in blocks with a coated tool, and connecting the soluble polymer line 1 3, soluble polymer line 2 4, and soluble polymer line 3 5 of different line widths as a group of PEO line groups, and exposing the ends of each group of connected PEO lines during the cutting process; step 3.2, soaking the cut micro-nano spray needle in a soaking liquid at a temperature of 35°C for 2 hours, the soaking liquid is deionized water 7, until the PEO is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then the cut and trimmed micro-nano spray needle is dehydrated to obtain a single-channel micro-nano spray needle or an array micro-nano spray needle. Among them, the soaking liquid is placed in an ultrasonic cleaning machine to accelerate the dissolution of the PEO line, and the ultrasonic power is 80 to 100W; in this embodiment, the ultrasonic power is 90W.

[0065] Specifically, the cutting and dissolving method of the array micro-nano spray needle includes: step 3.1, cutting the untrimmed micro-nano spray needle in blocks with a coated tool, and connecting the soluble polymer line 4 91, the soluble polymer line 5 92, and the soluble polymer line 6 93 of different line widths as a group of PEO line groups, and exposing the ends of each group of connected PEO lines during the cutting process; step 3.2, soaking the cut micro-nano spray needle in a soaking liquid at a temperature of 35°C for 2 hours, the soaking liquid is deionized water 7, until the PEO is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then the cut and trimmed micro-nano spray needle is dehydrated to obtain an array micro-nano spray needle. Among them, the soaking liquid is placed in an ultrasonic cleaning machine to accelerate the dissolution of the PEO lines, and the ultrasonic power is 80 to 100W; in this embodiment, the ultrasonic power is 90W.

[0066] Specifically, the cutting and dissolving method of multi-solution printing array micro-nano spray needles includes: step 3.1, cutting the untrimmed micro-nano spray needles in blocks with a coated tool, so that 3 connected segments of soluble polymer lines 1 3, soluble polymer lines 2 4, and PEO lines of different line widths are grouped together, or soluble polymer lines 4 91, soluble polymer lines 5 92, and soluble polymer lines 6 93 are grouped together, and every 2 or 3 groups of PEO lines are cut as a part, and the ends of each group of PEO lines are exposed during the cutting process, and the cut micro-nano spray needles are soaked in a soaking liquid at a temperature of 35°C for 2 hours, and the soaking liquid is deionized water 7, until PEO is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then, the cut and trimmed micro-nano spray needles are dehydrated to obtain multi-solution printing array micro-nano spray needles. Among them, the soaking liquid is placed in an ultrasonic cleaning machine to accelerate the dissolution of the PEO lines, and the ultrasonic power is 80 to 100W; in this embodiment, the ultrasonic power is 90W. Embodiment 4

[0067] On the basis of the first embodiment, the soluble polymer PEO of the soluble polymer line group printed by electrojet printing can be replaced by PVP with a concentration of 1 wt %. Embodiment 5

[0068] On the basis of Example 3, the PEO ink for electrojet printing can be replaced with PVP with a concentration of 5 wt %. Embodiment 6

[0069] On the basis of Example 2, the PEO ink of electrojet printing can be replaced with PVP with a concentration of 3 wt %. Embodiment 7

[0070] On the basis of the first embodiment, the soluble polymer PEO of the soluble polymer line group printed by electrojet printing can be replaced by AZ series positive photoresist, and the deionized water can be replaced by AZ developer. Embodiment 8

[0071] On the basis of the second embodiment, the soluble polymer PEO of the soluble polymer line group printed by electrojet printing can be replaced by BP series positive photoresist, and the deionized water can be replaced by BP developer. Embodiment 9

[0072] On the basis of Example 1, the substrate 1 was subjected to hydrophilic treatment using an oxygen plasma ashing apparatus 2, with a treatment power of 5 W and a treatment time of 10 s. The substrate was vacuumed in a vacuum oven environment below 10 Pa for 1 h. The trimmed micro-nano spray needles were treated in deionized water 7 at a temperature of 25° C. for 1 h to dissolve PEO; the trimmed micro-nano spray needles were placed on a hot plate 8 at 85° C. for 30 min to remove moisture. Embodiment 10

[0073] On the basis of Example 2, the substrate 1 is subjected to hydrophilic treatment using an oxygen plasma ashing apparatus 2, with a treatment power of 25 W and a treatment time of 35 s. The substrate is subjected to vacuum in a vacuum oven environment below 10 Pa for 2 h. The trimmed micro-nano spray needles are treated in deionized water 7 at a temperature of 50° C. for 1 to 3 h to dissolve PEO; the trimmed micro-nano spray needles are placed on a hot plate 8 at 100° C. for 20 min to remove moisture. Embodiment 11

[0074] On the basis of Example 3, the substrate 1 was subjected to hydrophilic treatment using an oxygen plasma ashing apparatus 2, with a treatment power of 15 W and a treatment time of 25 s. The substrate was subjected to vacuum in a vacuum oven environment below 10 Pa for 1.5 h. The trimmed micro-nano spray needles were treated in deionized water 7 at a temperature of 35° C. for 2 h to dissolve PEO; the trimmed micro-nano spray needles were placed on a hot plate 8 at 150° C. for 10 min to remove moisture. Embodiment 12

[0075] A spray needle is prepared by using the micro-nano spray needle batch manufacturing method based on cutting and dissolution of embodiment three.

[0076] Working principle: The present invention is a method for batch manufacturing of micro-nano spray needles based on cutting and dissolving, and the spray needles; the micro- and nano-structures are printed and manufactured by electro-hydraulic jet method, and the untrimmed micro-nano spray needles are obtained by casting method, and the printed convex mold is cut and dissolved to obtain a stable and complete micro-nano-structure spray needle channel. The present invention has simple process, low cost, and can be produced on a large scale. Figure 3 This is the structural diagram of a single-channel micro-nano spray needle; Figure 4 This is a structural diagram of the array micro-nano spray needle; Figure 5 It is a schematic diagram of the structure of a micro-nano spray needle for printing arrays of multiple solutions; Figure 6 This is a microscope image of a single-channel micro-nano spray needle convex mold; Figure 7 This is a microscope image of the array micro-nano spray needle convex mold; Figure 8 This is the SEM image of the cross section of the nanochannel in the single-channel micro-nano spray needle; Fig. 9 This is a cross-sectional SEM image of nanochannels in a micro-nanojet needle array printed with various solutions; Fig.10 It is a cross-sectional SEM image of nanochannels in an array micro-nano spray needle. The present invention prints and manufactures micron and nano structures by an electro-hydraulic jet method to obtain a large-area micro-nano spray needle convex mold and an array micro-nano spray needle convex mold. Then, a casting method is used to obtain an untrimmed micro-nano spray needle, that is, PDMS is cast on a large-area micro-nano spray needle convex mold and an array micro-nano spray needle convex mold and solidified. Subsequently, it is cut and trimmed by a coating tool, and the PEO micro-nano structure is dissolved in deionized water 7, and finally a stable and complete single-channel micro-nano spray needle, an array micro-nano spray needle and a plurality of solution-printed array micro-nano spray needles are obtained.

[0077] The above specific implementation methods are specific support for the scheme ideas proposed in the present invention, and cannot be used to limit the protection scope of the present invention. Any equivalent changes or equivalent modifications made on the basis of this technical scheme in accordance with the technical ideas proposed in the present invention still fall within the scope of protection of the technical scheme of the present invention.

Claims

1. A method for batch manufacturing of micro-nano spray needles based on cutting and dissolution, characterized in that: The following steps are involved: Step 1, printing a plurality of groups of soluble polymer line groups on a substrate to obtain a micro-nano spray needle convex mold, and / or an array micro-nano spray needle convex mold, and then proceeding to step 2; Step 2, pouring a pouring mixed solution on the substrate plate printed with the soluble polymer line group by pouring method, so that the pouring mixed solution covers the solidified soluble polymer line group, and solidifying to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles, and then proceeding to step 3; Step 3, cutting and dissolving the untrimmed micro-nano spray needle and / or the untrimmed array micro-nano spray needle obtained in step 2 by a cutting and dissolving method to obtain a micro-nano spray needle with an inlet and an outlet; The cutting and dissolving method comprises: Step 3.1, cutting the untrimmed micro-nano spray needles and / or the untrimmed array micro-nano spray needles at both ends of the soluble polymer line group, so that both ends of each group of soluble polymer line groups are exposed, and proceeding to step 3.2; Step 3.2, soaking the cut micro-nano spray needles and / or the cut array micro-nano spray needles in a soaking solution for a period of time until the soluble polymer lines in the soluble polymer line group are completely dissolved to obtain conductive micro-nano spray needles.

2. The method for batch manufacturing of micro-nano spray needles based on cutting and dissolution according to claim 1, characterized in that: In step 3.2, the micro-nano spray needle includes one or more of a single-channel micro-nano spray needle, an array micro-nano spray needle, and a multi-solution printing array micro-nano spray needle.

3. The method for batch manufacturing of micro-nano spray needles based on cutting and dissolution according to claim 2 is characterized in that: In step 1, the method for preparing the base plate includes: Casting the casting mixed solution on a glass substrate, leaving the glass substrate cast with the casting mixed solution to stand for a period of time, heating and solidifying it, and cooling it to obtain a substrate plate; The preparation of the casting mixed solution comprises: The PDMS base material and the curing agent are mixed in a weight ratio of 5:1 to 10:1 to uniformly obtain a casting mixed solution, and the casting mixed solution is degassed to remove bubbles.

4. The method for batch manufacturing of micro-nano spray needles based on cutting and dissolution according to claim 3 is characterized in that: The preparation method of the micro-nano spray needle convex mold comprises: The substrate is subjected to oxygen plasma treatment, and a soluble polymer line one is printed on the treated substrate; then, a soluble polymer line two connected to the soluble polymer line one is printed on the basis of the soluble polymer line one; then, a soluble polymer line three connected to the soluble polymer line two is printed on the basis of the soluble polymer line two; Repeat the above steps several times on the substrate to obtain a micro-nano spray needle convex mold; The soluble polymer line one is a nano line, and the soluble polymer line two and the soluble polymer line three are micrometer lines.

5. The method for batch manufacturing of micro-nano spray needles based on cutting and dissolution according to claim 4 is characterized in that: The preparation method of the array micro-nano spray needle convex mold comprises: Printing a soluble polymer line four at intervals on the substrate plate treated with oxygen plasma to obtain soluble polymer line four of the array; then, printing a soluble polymer line five connecting the soluble polymer line four of the array on the basis of the soluble polymer line four of the array; then, printing a soluble polymer line six connecting the soluble polymer line five of the array on the basis of the soluble polymer line five; Repeat the above steps several times on the substrate plate treated with oxygen plasma to obtain an array micro-nano spray needle convex mold; The soluble polymer line four is a nanometer line, and the soluble polymer line five and the soluble polymer line six are micrometer lines.

6. The method for batch manufacturing of micro-nano spray needles based on cutting and dissolution according to claim 5, characterized in that: The casting method of the untrimmed micro-nano spray needle and / or the untrimmed array micro-nano spray needle comprises: The casting mixed solution is cast on the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold, and the mold is placed in a vacuum oven for a period of time to allow the casting mixed solution to fill the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold; baked and solidified, and then cooled to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles.

7. The method for batch manufacturing of micro-nano spray needles based on cutting and dissolution according to claim 6, characterized in that: The single-channel micro-nano spray needle cutting and dissolving method comprises: step 3.1, cutting the untrimmed micro-nano spray needle into blocks with a coated tool, and connecting the soluble polymer line 1, soluble polymer line 2, and soluble polymer line 3 of different line widths as a group of soluble polymer line groups, and exposing both ends of each group of connected soluble polymer line groups during the cutting process; step 3.2, soaking the cut micro-nano spray needle in a soaking liquid with a temperature of 25-50°C for 1-3 hours, wherein the soaking liquid is placed in an ultrasonic cleaning machine to accelerate the dissolution of the soluble polymer line, and the ultrasonic power is 80-100W; the soaking liquid is deionized water, until the soluble polymer is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then the cut and trimmed micro-nano spray needle is placed on a hot plate for a period of time to remove moisture from the cut and trimmed micro-nano spray needle, and a single-channel micro-nano spray needle or an array micro-nano spray needle is obtained; And / or, the cutting and dissolving method of the array micro-nano spray needle comprises: step 3.1, cutting the untrimmed micro-nano spray needle into blocks with a coated tool, and connecting the soluble polymer line 4, soluble polymer line 5, and soluble polymer line 6 of different line widths as a group of soluble polymer line groups, and exposing both ends of each group of connected soluble polymer line groups during the cutting process; step 3.2, soaking the cut micro-nano spray needle in a soaking liquid with a temperature of 25-50°C for 1-3 hours, wherein the soaking liquid is placed in an ultrasonic cleaning machine to accelerate the dissolution of the soluble polymer line, and the ultrasonic power is 80-100W; the soaking liquid is deionized water, until the soluble polymer is completely dissolved to obtain a micro-nano spray needle with an inlet and an outlet; then, the cut and trimmed micro-nano spray needle is dehydrated to obtain an array micro-nano spray needle; And / or, the cutting and dissolving method of the multi-solution printing array micro-nano nozzle includes: Step 3.1, cutting the untrimmed micro-nano spray needle into blocks with a coated tool, so that soluble polymer line 1, soluble polymer line 2, and soluble polymer line of different line widths are grouped together, or soluble polymer line 4, soluble polymer line 5, and soluble polymer line 6 are grouped together, and several groups of soluble polymer line groups are cut as a part, and the ends of each group of soluble polymer line groups are exposed during the cutting process. The cut micro-nano spray needle is immersed in an immersion solution with a temperature of 25-50°C for 1-3 hours, and the immersion solution is deionized water, until the soluble polymer is completely dissolved, and a micro-nano spray needle with an inlet and an outlet is obtained; then, the cut and trimmed micro-nano spray needle is dehydrated to obtain a multi-solution printing array micro-nano spray needle.

8. The method for batch manufacturing of micro-nano spray needles based on cutting and dissolution according to claim 7, characterized in that: The soluble polymer in the soluble polymer line is PEO; And / or, the printing parameters of the soluble polymer line one include: Print a 100nm PEO line with a printing voltage of 1800-2100V, a PEO concentration of 3-5wt%, and a working distance of 600-900μm; The printing parameters for soluble polymer line 2 include: A PEO line with a line width of 50 μm is printed on the basis of the line of the soluble polymer line 1, and the printing parameters are voltage 1500~2200 V, PEO concentration of the PEO line is 1~3wt%, and working distance is 500~700 μm; The printing parameters for soluble polymer line three include: A PEO line with a line width of 100 μm is printed on the basis of the line of the soluble polymer line 2, and the printing parameters are a voltage of 2000-2500 V, a PEO concentration of 2-4 wt % of the PEO line, and a working distance of 600-800 μm; the above steps are repeated several times on the substrate to obtain a micro-nano spray needle convex mold; And / or, the printing parameters of the soluble polymer line four include: A PEO line was printed every 5-8 μm to obtain array soluble polymer line four; the printing parameters were voltage 1800-2100 V, PEO concentration of the PEO line was 3-5 wt%, and working distance was 600-900 μm; The printing parameters for soluble polymer line five include: A PEO line with a line width of 50 μm was printed on the basis of the array soluble polymer line 4, and the printing parameters were voltage 1500~2200 V, PEO concentration 1~3wt%, and working distance 500~700 μm; The printing parameters for soluble polymer line six include: A PEO line with a line width of 100 μm was printed on the basis of the soluble polymer line 5, and the printing parameters were voltage 2000-2500 V, PEO concentration 2-4 wt%, and working distance 600-800 μm; And / or, in step 1, the PDMS base material and the curing agent are mixed together in a weight ratio of 5:1 to 10:1, stirred for 5 minutes to mix evenly, then placed in a vacuum box for degassing to remove bubbles, and poured on a glass substrate, then the poured glass substrate is placed on a horizontal platform in an oven and left to stand for 10 to 30 minutes, then the oven is adjusted at 60 to 80° C. to cure the PDMS mixed solution, and taken out after cooling to obtain a substrate plate, wherein the substrate plate is a PDMS substrate; And / or, the parameters of the substrate plate undergoing oxygen plasma treatment include: power of 5 to 25 W, treatment time of 10 to 35 s; And / or, the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold cast with the casting mixed solution is placed in a vacuum oven for 1-2 hours to ensure that the casting mixed solution completely fills the micro-nano spray needle convex mold and / or the array micro-nano spray needle convex mold; then placed in a 60-85ºC oven for 2-4 hours to cure, and then cooled to room temperature to obtain untrimmed micro-nano spray needles and / or untrimmed array micro-nano spray needles.

9. The method for batch manufacturing of micro-nano spray needles based on cutting and dissolution according to claim 8, characterized in that: The soluble polymer PEO of electrojet printing can be replaced by PVP, AZ series positive photoresist, and BP series positive photoresist with a concentration of 1~5wt%; Deionized water can be replaced by AZ developer and BP developer; and / or, using an oxygen plasma ashing apparatus to perform hydrophilic treatment on the substrate, with a treatment power of 5 to 25 W and a treatment time of 10 to 35 seconds; And / or, evacuate the environment in a vacuum oven below 10Pa for 1-2 hours; and / or, treating the trimmed micro-nano spray needle in deionized water with an ultrasonic power of 80-100 W, a temperature of 25-50° C., and a time of 1-3 h to dissolve PEO; and / or, placing the trimmed micro-nano spray needle on a hot plate at 85-150° C. for 10-30 min to remove moisture.

10. A spray needle, characterized in that: The micro-nano spray needle is prepared by the batch manufacturing method of micro-nano spray needle based on cutting and dissolution as described in any one of claims 1 to 9.

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