Rotary sintering equipment

Abstract

The invention belongs to the field of semiconductor rotary sintering equipment, and particularly relates to rotary sintering equipment. The rotary sintering equipment comprises a rotary feeding structure, the rotary feeding structure comprises a rotating assembly and a conveying assembly, the rotating assembly comprises a rotating material plate arranged in a rotating mode and a rotating driving mechanism used for driving the rotating material plate to rotate, and a hot pressing station is located on a rotating path of the rotating material plate; the conveying assembly comprises a first clamping mechanism, a transferring mechanism and a second clamping mechanism, the second clamping mechanism is arranged at an interval relative to the first clamping mechanism, the first clamping mechanism grabs a target object at a preset position, and the transferring mechanism is arranged between the first clamping mechanism and the second clamping mechanism in a sliding mode; the floating pressure head structure is positioned at the hot-pressing station and is positioned above the rotary material plate; and the heating structure is positioned at the hot pressing station and is positioned below the rotary material plate. The conveying assembly and the floating pressure head structure are arranged in the circumferential direction of the rotary material plate, so that the occupied space of the rotary sintering equipment can be reduced.

Description

Technical Field

[0001] The invention belongs to the field of semiconductor sintering equipment, and in particular relates to a rotary sintering equipment. Background Art

[0002] At present, power semiconductor devices need to withstand high current, high voltage and high energy density, which requires the packaging interconnection materials to have excellent electrical conductivity, thermal conductivity and mechanical properties. With the improvement of device integration and the gradual commercialization of third-generation semiconductors represented by silicon carbide, traditional connection methods can no longer meet the requirements of power devices in terms of heat dissipation, conductivity and mechanical properties. In this context, new packaging methods represented by sintered silver process have gradually become the mainstream technology for power device packaging.

[0003] In the currently used press sintering technology, hot press sintering equipment is indispensable. The current sintering equipment is generally linear in layout, with materials loaded at one end, sintered through the sintering structure set in the middle, and then unloaded from the other end. This linear sintering equipment usually occupies a large space and requires running back and forth during operation, which makes the operation inconvenient. Summary of the invention

[0004] The purpose of the embodiments of the present application is to provide a rotary sintering device, aiming to solve the problem of how to reduce the space occupied by the rotary sintering device.

[0005] To achieve the above purpose, the technical solution adopted in this application is:

[0006] A rotary sintering device is provided for sintering a target object, wherein the target object is located at a predetermined position, and the rotary sintering device comprises:

[0007] A rotary feeding structure for conveying the target object at the predetermined position to a hot pressing station, the rotary feeding structure comprising a rotary assembly and a conveying assembly, the rotary assembly comprising a rotatable rotating material plate and a rotary driving mechanism for driving the rotating material plate to rotate, the hot pressing station being located on a rotating path of the rotating material plate; the conveying assembly comprising a first clamping mechanism, a transfer mechanism and a second clamping mechanism spaced apart from the first clamping mechanism, the first clamping mechanism grabs the target object at the predetermined position, the second clamping mechanism is arranged on the rotating path of the rotating material plate, the transfer mechanism is slidably arranged between the first clamping mechanism and the second clamping mechanism; the transfer mechanism receives the target object at the first clamping mechanism and transfers the target object to the second clamping mechanism, the second clamping mechanism grabs the target object and releases the target object on the rotating material plate, the rotating material plate rotates a predetermined angle and moves the target object to the hot pressing station;

[0008] A floating pressure head structure, located at the hot pressing station and above the rotating material plate; and

[0009] A heating structure, located at the hot pressing station and below the rotating material plate;

[0010] The conveying assembly and the floating pressure head structure are arranged along the circumference of the rotating material plate, and the floating pressure head structure presses the target object located at the hot pressing station toward the heating structure, so that the heating structure heats and sinters the target object.

[0011] The beneficial effect of the present application is that: through the rotating assembly and the conveying assembly, the material tray can be automatically rotated and fed from a predetermined position to a hot pressing station, thereby improving production efficiency. The rotation of the rotating material plate can accurately deliver the material tray to the hot pressing station, reducing the cumbersome steps and errors of manual operation. Moreover, the conveying assembly and the floating pressure head structure are arranged along the circumference of the rotating material plate, thereby reducing the space occupied by the rotary sintering equipment and improving the convenience of operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or exemplary technical descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0013] Figure 1 It is a schematic diagram of the three-dimensional structure of the rotary sintering equipment provided in the embodiment of the present application;

[0014] Figure 2 yes Figure 1 A partial exploded schematic diagram of a pressure head assembly of a floating pressure head structure;

[0015] Figure 3 yes Figure 2 A partial exploded schematic diagram of the force transmission mechanism;

[0016] Figure 4 yes Figure 1 A cross-sectional schematic diagram of a pressure head assembly of a floating pressure head structure;

[0017] Figure 5 yes Figure 1 A schematic diagram of the three-dimensional structure of the conveying component in FIG.

[0018] Figure 6 yes Figure 1 A schematic diagram of the three-dimensional structure of the first clamping mechanism;

[0019] Figure 7 yes Figure 1 A schematic diagram of the three-dimensional structure of the second clamping mechanism;

[0020] Figure 8 yes Figure 1 A schematic diagram of the three-dimensional structure of the rotating component in FIG.

[0021] Fig. 9 It is a schematic diagram of a three-dimensional structure of a material hooking structure provided by another embodiment of the present application, in which the material hooking plate is in a first position;

[0022] Fig.10 It is a schematic diagram of the three-dimensional structure of a material hooking structure provided by another embodiment of the present application, in which the material hooking plate is in the second position;

[0023] Fig.11 yes Fig. 9 Exploded diagram of the hook structure. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present application.

[0025] It should be noted that when a component is referred to as being "fixed on" or "disposed on" another component, it may be directly on the other component or indirectly on the other component. When a component is referred to as being "connected to" another component, it may be directly or indirectly connected to the other component. The orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to the specific circumstances. The terms "first" and "second" are only used for the purpose of convenience of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features. The meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0026] See also Figures 1 to 3 The embodiment of the present application provides a rotary sintering device, which can sinter a target object, wherein the target object includes a plurality of semiconductor devices, and the plurality of semiconductor devices are arranged on a material tray, and the material tray is used as a carrier for movement and sintering. The rotary sintering device can sinter each semiconductor device.

[0027] See also Figures 1 to 6 The rotary sintering equipment includes a rotary feeding structure, a floating pressure head structure 60 and a heating structure 70 .

[0028] See also Figures 5 to 8 The rotary feeding structure is used to convey the material tray 200 at a predetermined position to the hot pressing station 44, and the rotary feeding structure includes: a rotating assembly 40 and a conveying assembly 30. The rotating assembly 40 includes a rotating material plate 41 that is rotatably arranged and a rotating driving mechanism 42 for driving the rotating material plate 41 to rotate, and the hot pressing station 44 is located in the rotation path of the rotating material plate 41; it can be understood that the rotating material plate 41 is used to place the material tray 200, and when the driving mechanism 42 drives the rotating material plate 41 to rotate, the material tray 200 located on the rotating material plate 41 can be rotated and conveyed to the hot pressing station 44, and the sintering mold 50 is set at the hot pressing station 44.

[0029] See also Figures 5 to 8 The conveying assembly 30 includes a first clamping mechanism 31, a transfer mechanism 33, and a second clamping mechanism 32 arranged at intervals relative to the first clamping mechanism 31. The first clamping mechanism 31 grabs the material tray 200 at a predetermined position, the second clamping mechanism 32 is arranged on the rotation path of the rotating material plate 41, and the transfer mechanism 33 is slidably arranged between the first clamping mechanism 31 and the second clamping mechanism 32; the transfer mechanism 33 can perform reciprocating linear movement in the horizontal direction, so as to continuously move the material tray 200 from the first clamping mechanism 31 to the second clamping mechanism 32. Among them, the transfer mechanism 33 receives the material tray 200 at the first clamping mechanism 31 and transfers the material tray 200 to the second clamping mechanism 32, the second clamping mechanism 32 grabs the material tray 200 and releases the material tray 200 to the rotating material plate 41, and the rotating material plate 41 rotates a predetermined angle and moves the material tray 200 to the hot pressing station 44. The predetermined angle may be 30 degrees, 45 degrees or 90 degrees, which is not limited here and can be selected according to actual conditions.

[0030] See also Figures 1 to 3 The floating pressure head structure is located at the hot pressing station 44 and above the rotating material plate 41; the heating structure 70 is located at the hot pressing station 44 and below the rotating material plate 41; the conveying assembly 30 and the floating pressure head structure are arranged along the circumference of the rotating material plate 41, and the floating pressure head structure presses the target object located at the hot pressing station toward the heating structure 70, so that the heating structure 70 heats and sinters the target object.

[0031] See also Figures 1 to 3 The rotary sintering equipment of the embodiment of the present application can realize the automatic rotary feeding of the material tray 200 from the predetermined position to the hot pressing station 44 through the rotating assembly 40 and the conveying assembly 30, thereby improving the production efficiency. The rotation of the rotating material plate 41 can accurately deliver the material tray 200 to the hot pressing station 44, reducing the cumbersome steps and errors of manual operation. Moreover, the conveying assembly 30 and the floating pressure head structure 60 are arranged along the circumference of the rotating material plate 41, thereby reducing the space occupied by the rotary sintering equipment and improving the convenience of operation.

[0032] See also Figures 1 to 3 Optionally, the heating structure 70 includes a heating table 71 located below the rotating material plate, a heating tube arranged in the heating table 71, and a heating lifting mechanism 72 that drives the heating table to move in a vertical direction. The heating lifting mechanism 72 can drive the heating table 71 to rise and cooperate with the floating pressure head structure 60 to sinter each semiconductor device on the material tray 200.

[0033] See also Figures 2 to 4 The floating pressure head structure 60 includes a pressure head assembly 62 and a pressurizing assembly 61 .

[0034] See also Figures 2 to 4 The pressure head assembly 62 includes a positioning seat 64 fixedly arranged relative to the rotating material plate 41, a pressure head 65 slidably arranged between the positioning seat 64 and the target object, and a force transmission mechanism 63 connected to the positioning seat 64. The positioning seat 64 is located above the material tray, and the pressure head 65 is located below the positioning seat 64. The force transmission mechanism 63 includes a pressure rod 631 with one end slidably connected to the positioning seat 64, a first force transmission part 632 connected to the other end of the pressure rod 631, and a second force transmission part 633 connected to the pressure head 65. The first force transmission part 632 and the second force transmission part 633 are in point-to-surface contact. A plurality of pressure heads 65 are arranged at intervals, and at least one corresponding force transmission mechanism 63 is provided for any pressure head 65. In this embodiment, six pressure heads 65 are provided, and each force transmission mechanism 63 can transmit power to each pressure head 65, so that each pressure head 65 can apply pressure to semiconductor devices at different positions on the material tray.

[0035] See also Figures 2 to 4 The pressurizing assembly 61 is connected to the positioning seat 64 and is used to drive each pressing rod 631 to move toward the target object, so that each pressing rod 631 drives each pressing head 65 to press different positions of the target object. It can be understood that since the first force transmission part 632 and the second force transmission part 633 are in point-to-surface contact, the pressing surface of the pressing head 65 can float within a certain range relative to the horizontal plane, so as to uniformly press each semiconductor device.

[0036] See also Figures 2 to 4 The floating pressure head structure 60 can realize uniform downward pressure on multiple semiconductor devices through the cooperation of the pressure head assembly 62 and the pressure assembly 61. Since the first force transmission part 632 and the second force transmission part 633 are in point-to-surface contact, when the pressure rod 631 drives the pressure head 65 to press the material plate, the pressure head 65 can float within a certain range, thereby adapting to the height difference of different semiconductor devices, improving the stability and consistency of the contact between the pressure head 65 and each semiconductor device, ensuring that each target object is subjected to uniform force, thereby improving the subsequent sintering quality and efficiency of semiconductor devices.

[0037] Optionally, a plurality of sliding holes 641 are formed on the positioning seat 64 , and the upper ends of the pressure rods 631 are slidably disposed in the sliding holes 641 .

[0038] See also Figures 2 to 4 In some embodiments, the abutting surface of the first force transmission portion 632 is a plane and the abutting surface of the second force transmission portion 633 is a convex arc surface, and the convex arc surface may be a spherical surface.

[0039] See also Figures 2 to 4 In some embodiments, the abutting surface of the second force transmission portion 633 is a plane and the abutting surface of the first force transmission portion 632 is a convex arc surface, and the convex arc surface may be a spherical surface.

[0040] See also Figures 2 to 4 Optionally, by setting the abutting surfaces of the first force transmission part 632 and the second force transmission part 633 to be a plane and a convex arc surface respectively, or the abutting surfaces of the second force transmission part 633 and the first force transmission part 632 to be a plane and a convex arc surface respectively, the pressure head 65 can float within a certain range to adapt to the height difference of different semiconductor devices, and can also effectively reduce the friction between the first force transmission part 632 and the second force transmission part 633, thereby ensuring the smoothness and stability of force transmission.

[0041] See also Figures 2 to 4 In some embodiments, the pressure head 65 is provided with a pressure hole 651, one end of the pressure rod 631 is slidably disposed in the pressure hole 651, the second force transmission portion 633 is located at the bottom of the pressure hole 651, and the first force transmission portion 632 is located at the pressure hole 651 and connected to the pressure rod 631.

[0042] Optionally, by opening a pressure hole 651 on the pressure head 65, and sliding one end of the pressure rod 631 in the pressure hole 651, a stable connection between the pressure rod 631 and the pressure head 65 is ensured. The second force transmission part 633 is located at the bottom of the pressure hole 651, so that the force transmission is more direct and effective, the force transmission efficiency is improved, the loss in the force transmission path is reduced, and the pressure applied by the pressure head 65 to the semiconductor device is ensured to be uniform.

[0043] See also Figures 2 to 4 In some embodiments, the force transmission mechanism 63 further includes a transverse compression spring 634 located in the pressure hole 651, and the two ends of the transverse compression spring 634 respectively abut against the first force transmission portion 632 and the hole wall of the pressure hole 651. The transverse compression springs 634 are arranged in pairs, and the two transverse compression springs 634 in the same pair are symmetrical about the pressure rod 631. In the present application, two pairs of transverse compression springs 634 are arranged, and the four compression springs are arranged around the pressure rod 631 with equal arcs in the circumferential direction.

[0044] See also Figures 2 to 4Optionally, by providing a transverse compression spring 634 in the force transmission mechanism 63 and locating it in the pressure hole 651, additional support and buffering can be provided between the pressure head 65 and the pressure hole 651. The transverse compression springs 634 arranged in pairs are symmetrically arranged about the pressure rod 631, ensuring that the pressure head 65 can still maintain a stable posture when subjected to uneven pressure, improving the stability and accuracy of the pressing process, and effectively preventing the pressure head 65 from deflecting and tilting due to lateral force.

[0045] See also Figures 2 to 4 In some embodiments, a limiting hole is opened in the first force transmission portion 632 corresponding to the position of the transverse compression spring 634, and a portion of the transverse compression spring 634 is located in the limiting hole.

[0046] Optionally, by providing a limiting hole on the first force transmission part 632 and making the transverse compression spring 634 partially located in the limiting hole, the transverse displacement of the transverse compression spring 634 can be limited, thereby ensuring the stability of the force transmission mechanism 63 and ensuring that the transverse compression spring 634 will not deviate from its set position during operation, thereby improving the reliability and service life of the force transmission mechanism 63.

[0047] See also Figures 2 to 4 In some embodiments, the force transmission mechanism 63 further includes a longitudinal compression spring 635 which is sleeved on the pressure rod 631 and located at the pressure hole 651. One end of the longitudinal compression spring 635 abuts against the first force transmission part 632, and the other end of the longitudinal compression spring 635 is fixedly arranged so that the first force transmission part 632 and the second force transmission part 633 are kept in abutment. A pressure cover plate 66 is arranged at the opening of the pressure hole 651, and the two ends of the longitudinal compression spring 635 abut against the pressure cover plate 66 and the first force transmission part 632 respectively.

[0048] See also Figures 2 to 4 Optionally, a longitudinal compression spring 635 is provided in the force transmission mechanism 63 and is sleeved on the compression rod 631 to provide additional longitudinal support force. One end of the longitudinal compression spring 635 abuts against the first force transmission part 632, and the other end abuts against the pressure cover plate 66, ensuring that the first force transmission part 632 and the second force transmission part 633 always maintain an abutting state.

[0049] See also Figures 2 to 4 In some embodiments, any pressure head 65 is provided with a plurality of force transmission mechanisms 63, and each force transmission mechanism 63 is arranged at intervals. In this embodiment, any pressure head 65 is provided with four force transmission mechanisms 63 at intervals.

[0050] See also Figures 2 to 4 Optionally, by providing a plurality of force transmission mechanisms 63 on any pressure head 65 and arranging them at intervals, multi-point support and uniform force transmission of the pressure head 65 can be achieved, ensuring that the pressure head 65 can remain stable when subjected to pressure in different directions, effectively avoiding the tilting and deviation of the pressure head 65, and improving the uniformity and accuracy of the pressing process.

[0051] In some embodiments, the pressurizing assembly 61 includes a cylinder body 611 and a plurality of piston rods 612 connected to the cylinder body 611. The cylinder body 611 is provided with a plurality of piston chambers 613. Each piston rod 612 is respectively disposed in each piston chamber 613, and each piston rod 612 is respectively used to drive each compression rod 631. Optionally, the pressurizing assembly 61 may be a hydraulic cylinder, and high-pressure oil is injected into the piston chamber 613 to push the piston rod 612 to move, and the movement of the piston rod 612 drives the corresponding compression rod 631 to move.

[0052] Optionally, through multiple piston rods 612, it is possible to independently drive multiple pressure rods 631, thereby improving the flexibility and accuracy of the pressurization process.

[0053] See also Figures 2 to 4 In some embodiments, a plurality of pressurizing assemblies 61 are stacked along the axial direction of the pressure rod 631 , and a plurality of piston rods 612 on any cylinder body 611 are respectively connected to a plurality of piston rods 612 on another adjacent cylinder body 611 in a transmission manner.

[0054] It can be understood that in this embodiment, three pressurizing assemblies 61 are stacked in the vertical direction, three cylinder bodies 611 are stacked in the vertical direction, and each layer of piston rods 612 are connected in sequence in the vertical direction, that is, any pressure rod 631 is driven by three piston rods 612, thereby providing a greater driving force for the pressure rod 631.

[0055] See also Figures 2 to 4 Optionally, by stacking a plurality of pressurizing assemblies 61 along the axial direction of the pressure rod 631, a plurality of piston rods 612 on any cylinder body 611 are transmission-connected with a plurality of piston rods 612 on an adjacent cylinder body 611, thereby achieving multi-layer pressurization.

[0056] Optionally, a heating hole is provided on the positioning seat 64 , and a heating rod 68 is arranged in the heating hole, so that the pressing head 65 can heat the semiconductor device while pressing the semiconductor device.

[0057] Optionally, a heat insulating column 67 is further provided between the bottom piston rod 612 and the pressure rod 631 to prevent heat from being transferred to the pressurizing assembly 61 .

[0058] Optionally, the rotary drive mechanism 42 may be a combination of a motor and a gear assembly, and the gear assembly may transmit the rotary power of the motor to the rotating material plate 41 .

[0059] See also Figures 5 to 8In some embodiments, the rotary feeding structure further includes a feeding table 34 having a feeding trough 341 , both ends of the feeding table 34 extend toward the first clamping mechanism 31 and the second clamping mechanism 32 respectively, and the transfer mechanism 33 is slidably disposed in the feeding trough 341 .

[0060] Optionally, the first clamping mechanism 31 is fixed on the feeding platform 34, and the predetermined position is set in the feeding slot 341. By setting the feeding platform 34 with the feeding slot 341, the two ends of the feeding platform 34 extend toward the first clamping mechanism 31 and the second clamping mechanism 32 respectively, so that the material tray 200 can remain stable in the feeding slot 341 during the transfer process. The transfer mechanism 33 is slidably set in the feeding slot 341, which can effectively prevent the shaking and tilting of the material tray 200 during the movement, and improve the stability and reliability of the transfer of the material tray 200.

[0061] Optionally, a bottom template is provided on the transfer mechanism 33, and the material tray 200 can be placed on the bottom template, so that the material tray 200 can be transferred through the support of the bottom template.

[0062] See also Figures 5 to 8 In some embodiments, the moving mechanism includes two oppositely arranged support frames 331, the two support frames 331 are slidably connected to the two side walls of the feeding trough 341, and the two support frames 331 are respectively used to support the two ends of the material tray 200.

[0063] Optionally, a guide rail slider mechanism can be provided on the slot wall of the feeding slot 341, and the guide rail slider mechanism guides the sliding of the support frame 331, and the two support frames 331 are respectively slidably connected to the slot walls on both sides of the feeding slot 341, thereby ensuring the stability and supporting force of the material tray 200 during the transfer process. The two support frames 331 can respectively support the two ends of the bottom template, and the material tray 200 is placed on the bottom template, so that the material tray 200 is not easy to tilt or fall during the transportation process, thereby improving the safety of the operation.

[0064] See also Figures 5 to 8 In some embodiments, the rotary feeding structure further includes a synchronous belt 342 rotatably arranged in the feeding trough 341, a transmission shaft 344 rotatably arranged along the trough width direction of the feeding trough 341, and a synchronous driver 343 for driving the synchronous belt 342 to rotate. Two synchronous belts 342 are provided, and two support frames 331 are respectively connected to the two synchronous belts 342, and the two ends of the transmission shaft 344 are respectively connected to the two synchronous belts 342. The synchronous driver 343 can be a servo motor.

[0065] Optionally, by setting two synchronous belts 342, and the two synchronous belts 342 are connected by transmission shaft 344, when the synchronous driver 343 drives one of the synchronous belts 342 to rotate, the other synchronous belt 342 can also rotate synchronously through the transmission of the transmission shaft 344, and the two synchronously rotating synchronous belts 342 can respectively drive the two support frames 331 to slide synchronously, ensuring the synchronous movement of the two support frames 331, avoiding the problem of tilting and offset of the material tray 200 caused by asynchronism. The arrangement of the transmission shaft 344 further enhances the transmission efficiency of the synchronous belt 342, so that the material tray 200 can move smoothly on the predetermined path, improving the working efficiency and accuracy of the entire feeding structure.

[0066] See also Figures 5 to 8 In some embodiments, the first clamping mechanism 31 includes a fixed support base 314, a lifter 313 disposed on the support base 314, a first finger cylinder 312 connected to the lifter 313, and a first clamping claw 311 connected to the first finger cylinder 312. The first finger cylinder 312 is provided with first clamping claws 311 at both ends, and the first finger cylinder 312 is used to drive the two first clamping claws 311 to clamp the material tray 200. The lifter 313 can drive the first finger cylinder 312 to rise or fall in the vertical direction. After the two first clamping claws 311 clamp the material tray 200, the lifter 313 drives the first finger cylinder 312 to rise, and the material tray 200 rises synchronously. The transfer mechanism 33 moves to the bottom of the material tray 200, and the lifter 313 drives the first finger cylinder 312 to fall again until the material tray 200 is released on the transfer mechanism 33.

[0067] The first finger cylinder 312 can drive the two first clamping jaws 311 to move toward each other or away from each other in the horizontal direction.

[0068] Optionally, the height of the two first clamps 311 can be adjusted by the lifter 313, so that it can adapt to the trays 200 of different heights, and realize accurate positioning and clamping of the tray 200. The first finger cylinder 312 drives the first clamp 311 to clamp the tray 200, ensuring stability and safety during the clamping process, which can effectively reduce human operation errors and improve the reliability and production efficiency of automated operation.

[0069] Optionally, the lifter 313 may be a cylinder or a synchronous belt 342 structure, which is a prior art and will not be described in detail here.

[0070] See also Figures 5 to 8 In some embodiments, the first clamping jaw 311 includes a first clamping plate 3111 connected to the first finger cylinder 312 and a first clamping head 3112 arranged on the first clamping plate 3111, and two first clamping heads 3112 are arranged at intervals.

[0071] Optionally, a limiting groove 208 is provided on the tray 200 at a position corresponding to each first clamping head 3112, and each first clamping head 3112 is respectively clamped in each limiting groove 208, so as to stably clamp the tray 200 and provide a more stable clamping force. The spaced arrangement of each first clamping head 3112 ensures multi-point support and clamping of the tray 200, avoiding tilting and sliding of the tray 200 caused by single-point clamping. The first clamping plate 3111 is connected to the first finger cylinder 312, so that the first clamping head 3112 can flexibly adjust its position to adapt to trays 200 of different sizes, thereby improving the stability and safety of the clamping process and preventing the tray 200 from slipping or shifting.

[0072] See also Figures 5 to 8 In some embodiments, the second clamping mechanism 32 includes a preheating template 321 located above the rotating material plate 41, a second finger cylinder 322 arranged on the preheating template 321, and a second clamping jaw 323 connected to the second finger cylinder 322. Second clamping jaws 323 are provided at both ends of the second finger cylinder 322, and the second finger cylinder 322 is used to drive the two second clamping jaws 323 to clamp the material tray 200.

[0073] Optionally, the preheating template 321 can slide in the vertical direction under the drive of external force, so that the second finger cylinder 322 drives the two second clamps 323 to clamp the material tray 200 from the transfer mechanism 33, and after the transfer mechanism 33 leaves, the material tray 200 is released on the rotating material plate 41. A preheating mold is provided under the preheating template 321, which can preheat the material tray 200 before it is transferred to the hot pressing station 44, thereby ensuring the temperature uniformity of the material tray 200 in the hot pressing station 44 and improving the sintering quality.

[0074] See also Figures 5 to 8 In some embodiments, the second clamping jaw 323 includes a second clamping plate 3231 connected to the second finger cylinder 322 and a second clamping head 3232 arranged on the second clamping plate 3231, and two second clamping heads 3232 are arranged at intervals.

[0075] Optionally, a limiting groove 208 is provided on the tray 200 at a position corresponding to each second clamping head 3232, and each second clamping head 3232 is respectively clamped in each limiting groove 208, so as to stably clamp the tray 200 and provide a more stable clamping force. The spaced arrangement of each second clamping head 3232 ensures multi-point support and clamping of the tray 200, avoiding tilting and sliding of the tray 200 caused by single-point clamping. The second clamping plate 3231 is connected to the second finger cylinder 322, so that the second clamping head 3232 can flexibly adjust its position to adapt to trays 200 of different sizes, thereby improving the stability and safety of the clamping process and preventing the tray 200 from slipping or shifting.

[0076] Optionally, the clamping direction of the two first clamping jaws 311 is perpendicular to the clamping direction of the two second clamping jaws 323 .

[0077] See also Figures 5 to 8 In some embodiments, the rotating material plate 41 is provided with a loading trough 411 on which the supply tray 200 is placed, and a plurality of loading troughs 411 are provided, and each loading trough 411 is arranged at intervals around the rotation center of the rotating material plate 41, and the rotating material plate 41 rotates so that each loading trough 411 passes through the hot pressing station in sequence.

[0078] Optionally, in this embodiment, four loading troughs 411 are provided, and the four loading troughs 411 are arranged with equal arcs.

[0079] Optionally, by arranging a plurality of feeding troughs 411 on the rotating material plate 41, each feeding trough 411 is arranged at intervals around the rotation center of the rotating material plate 41, so that a plurality of material trays 200 can be simultaneously accommodated and conveyed. The interval arrangement of the feeding troughs 411 enables the rotating material plate 41 to simultaneously perform feeding, hot pressing and unloading operations during the rotation process, that is, one feeding trough 411 is in a feeding preheating state, one feeding trough 411 is in a hot pressing state, one feeding trough 411 is in a unloading state, and another feeding trough 411 is in a state to be loaded, so that the material trays 200 can be continuously processed, thereby improving the sintering efficiency.

[0080] See also Figure 8 In some embodiments, the rotary sintering equipment further includes an electrical slip ring 412 disposed at the rotation center of the rotating material plate 41 , and the electrical slip ring 412 rotates synchronously with the rotating material plate 41 .

[0081] It is understandable that the electrical slip ring 412 is an electrical component that can connect the external pipe gas circuit to the rotating material plate 41 and transmit electrical energy and signals. By setting the electrical slip ring 412, the wires connected to the rotating feeding structure 300 can be prevented from being entangled and knotted. The electrical slip ring 412 includes a rotor installed at the rotation center of the material selection plate and a stator connected to the rotor. A plurality of gas pipelines and a plurality of circuit pipelines are arranged on the stator. The gas pipeline can transport nitrogen or inert gas to each feeding trough 411 so that each feeding trough 411 is in an inert gas environment, or the gas pipeline absorbs gas from each feeding trough 411 so that each feeding trough 411 is in a vacuum environment. The gas pipeline can also transport formic acid atomization gas with a reducing function to each feeding trough 411. The circuit pipeline can provide electrical energy to each electrical component of the rotating feeding structure 300, such as a sensor and a controller.

[0082] The rotary sintering equipment further includes a material unloading structure 35 , and the material unloading structure 35 is used to unload the sintered material tray 200 .

[0083] See also Figures 1 to 8The unloading structure 35 also includes a conveying component 30 and a silo 202 for collecting the sintered trays 200. The second clamping mechanism 32 in the conveying component 30 can clamp the sintered tray 200 located at one of the loading troughs 411. The transfer mechanism 33 moves the tray 200 to the first clamping mechanism 31. The first clamping mechanism 31 clamps the sintered tray 200 and releases it to a predetermined position so that the sintered tray 200 can be collected in the silo 202.

[0084] Optionally, two silos 202 are provided, wherein one silo 202 stores the trays 200 to be sintered, and the other silo 202 is used to store the trays 200 that have been sintered.

[0085] See also Figures 9 to 11 The rotary sintering equipment of the embodiment of the present application also includes a hooking structure, which is used to move the material tray to be sintered, that is, to move the material tray to be sintered from one of the material bins 202 to a predetermined position, so that the conveying component 30 can convey the material tray 200 at the predetermined position to the rotating material plate 41.

[0086] The material hook structure includes: a material hook plate 10 slidingly arranged relative to a predetermined position, a loading rack 11 located on the sliding path of the material hook plate 10, and a driving component 20 for driving the material hook plate 10 to reciprocate along a predetermined direction; in this embodiment, the predetermined direction is a horizontal direction, and the material hook plate 10 can perform linear reciprocating movement under the action of external force.

[0087] See also Figures 9 to 11 , the hook plate 10 has a first position 101 and a second position 102. When the driving assembly 20 drives the hook plate 10 to move toward the predetermined position and places the hook plate 10 in the first position 101, the hook plate 10 is detachably connected to the clamping portion 201; that is, one end of the hook plate 10 is buckled with the clamping portion 201; the driving assembly 20 drives the hook plate 10 to move in a direction away from the predetermined position and is in the second position 102, the material tray 200 moves synchronously and slides to the material carrier 11, and the hook plate 10 is disengaged from the material tray 200, thereby completing the movement of the material tray 200 and realizing the movement of the material tray 200 to the predetermined position, that is, on the material carrier 11. The reverse process of the above process can realize the movement of the material tray 200 from the material carrier 11 to the material bin 202, that is, the sintered material tray 200 moves from another material carrier 11 to another material bin 202, realizing the unloading of the material tray 200.

[0088] The hooking structure provided by the present application can accurately control the movement and connection of the hooking plate 10 by setting a driving component 20, so that the material tray 200 can be smoothly moved from the material bin to the material carrier 11 under the pull of the hooking plate 10, and ensure stability and safety during the movement. At the same time, through the detachable connection between the hooking plate 10 and the clamping part 201, after the material tray 200 is located on the material carrier 11, the material tray 200 can be disconnected from the hooking plate 10, which is convenient for the subsequent conveying component 30 to transfer the material tray 200 to the rotating material plate 41, thereby realizing the automatic loading of the material tray 200 and improving the flexibility and convenience of the overall operation.

[0089] Optionally, two opposite ends of the material tray 200 are provided with clamping parts 201 .

[0090] See also Figures 9 to 11 In some embodiments, the driving assembly 20 includes a bracket 22 that is slidably arranged along a predetermined direction and a moving driver 21 that drives the bracket 22 to slide back and forth, and the loading plate 111 is connected to the bracket 22. The moving driver 21 can be a cylinder or a rodless cylinder, which is not limited here and can be selected according to actual conditions.

[0091] Optionally, by combining the bracket 22 and the mobile driver 21, the hook plate 10 can slide smoothly in a predetermined direction, ensuring the stability and accuracy of the material tray 200 during the hooking and releasing process. The setting of the bracket 22 makes the entire structure more stable and firm, capable of bearing a large load, and improves the reliability and durability of the equipment. At the same time, the application of the mobile driver 21 makes the entire operation process highly automated, greatly reduces human intervention, and improves production efficiency and operational safety.

[0092] See also Figures 9 to 11 In some embodiments, the hook plate 10 is rotatably connected to the bracket 22, and the driving assembly 20 also includes a rotation driver 25 connected to the bracket 22 and used to drive the hook plate 10 to rotate. When the hook plate 10 is located at the first position 101, the rotation driver 25 drives the hook plate 10 to rotate so that the hook plate 10 is buckled into the clamping portion 201; when the hook plate 10 is located at the second position 102, the rotation driver 25 drives the hook plate 10 to rotate in the opposite direction so that the hook plate 10 is disengaged from the clamping portion 201.

[0093] The rotating driver 25 can be a cylinder, which drives the hook plate 10 to rotate clockwise and upward by a predetermined angle, such as 5 degrees or 15 degrees, so that the hook plate 10 is buckled into the clamping part 201, thereby realizing the connection between the hook plate 10 and the material tray 200; or the rotating driver 25 drives the hook plate 10 to rotate counterclockwise and downward by a predetermined angle, so that the hook plate 10 is disengaged from the clamping part 201, thereby releasing the connection with the material tray 200.

[0094] Optionally, by adding a rotation driver 25, the hook plate 10 can be flexibly rotated between different positions, realizing the automatic hooking and unhooking operation between the hook plate 10 and the clamping portion 201, which not only improves the accuracy and efficiency of the operation, but also reduces mechanical wear and prolongs the service life of the equipment. In addition, the application of the rotation driver 25 enables the hook plate 10 to rotate smoothly between the first position 101 and the second position 102, improving the stability and safety of the material tray 200 during the hooking and releasing process.

[0095] See also Figures 9 to 11 In some embodiments, the hook plate 10 includes a plate body 12 rotatably connected to a bracket 22 and a buckle plate 13 provided at one end of the plate body 12, and the other end of the plate body 12 is rotatably connected to a rotating driver 25, the clamping portion 201 is a clamping hole opened on the material tray 200, and the buckle plate 13 is adapted to the shape of the clamping hole.

[0096] Optionally, the buckle plate 13 is adapted to the clamping portion 201, so that a firm buckling effect can be achieved between the hook plate 10 and the material tray 200. The matching design of the buckle plate 13 and the clamping hole shape ensures the stability and reliability of the material tray 200 during the hooking and releasing process, and avoids the risk of the material tray 200 falling off or slipping.

[0097] In some embodiments, a transfer hole 14 is opened at one end of the plate body 12 , a rotating shaft 251 is disposed in the transfer hole 14 , and an output shaft of the rotating driver 25 is connected to the rotating shaft 251 .

[0098] Optionally, by providing a transfer hole 14 on the plate body 12 and providing a rotating shaft 251 in the transfer hole 14, the hook plate 10 can rotate more stably and smoothly, reducing mechanical friction and wear, and improving the durability of the device. The connection between the output shaft of the rotary driver 25 and the rotating shaft 251 ensures the effective transmission of the driving force, so that the hook plate 10 can rotate flexibly and achieve accurate buckling and disengagement operations.

[0099] In some embodiments, the shape of the adapter hole 14 is oval, circular, polygonal or racetrack.

[0100] Optionally, by designing the adapter hole 14 to be elliptical, circular, polygonal or track-shaped, the rotation axis 251 can obtain greater flexibility and adaptability during the rotation process, further improving the stability and accuracy of the rotation of the hook plate 10. Adapter holes 14 of different shapes can adapt to different rotation requirements and improve the diversity and flexibility of rotation.

[0101] Optionally, in this embodiment, the shape of the adapter hole 14 is a racetrack shape. In other embodiments, the shape of the adapter hole 14 may also be an ellipse. There is no limitation here and the shape may be selected according to actual conditions.

[0102] See also Figures 9 to 11 In some embodiments, the driving assembly 20 further includes a guide rail 23 arranged along a predetermined direction and a slider 24 slidably connected to the guide rail 23, and the bracket 22 is connected to the slider 24. The predetermined direction is a horizontal direction, and the length direction of the guide rail 23 is consistent with the predetermined direction.

[0103] Optionally, by adding the cooperation of the guide rail 23 and the slider 24, the bracket 22 can slide smoothly in a predetermined direction, thereby improving the stability and accuracy of the hook plate 10 during movement. The provision of the guide rail 23 makes the entire structure more stable, capable of bearing a larger load, and enhances the reliability and durability of the device. The sliding connection between the slider 24 and the guide rail 23 enables the bracket 22 to move smoothly, reduces mechanical friction and wear, and prolongs the service life of the device.

[0104] See also Figures 9 to 11 In some embodiments, the loading rack 11 includes two oppositely disposed loading vertical plates 111, the hook plate 10 is located between the two loading vertical plates 111, a loading groove 112 is opened on any loading vertical plate 111, and the two ends of the material tray 200 are respectively slidably disposed in the two loading grooves 112.

[0105] Optionally, the material carrier 11 includes two material carrier plates 111 disposed opposite to each other, so that the material tray 200 can slide and support more stably, avoiding the risk of tilting or falling. The material carrier slot 112 on the material carrier plate 111 is designed so that the material tray 200 can slide smoothly onto the material carrier 11, and the material carrier slot 112 can limit the material tray 200, thereby improving the stability and reliability of the operation. The hook plate 10 is located between the two material carrier plates 111, ensuring the stability and safety of the material tray 200 during movement, and reducing mechanical wear and operation errors.

[0106] See also Figures 9 to 11 In some embodiments, the loading trough 112 is provided with a guide surface 113 for guiding the material tray 200 to slide in.

[0107] Optionally, by providing a guide surface 113 on the loading slot 112, one end of the tray 200 can slide smoothly into the loading slot 112, thereby improving the convenience and efficiency of the operation. The guide surface 113 can effectively reduce the friction and resistance during the sliding of the tray 200, thereby preventing the tray 200 from getting stuck or slipping.

[0108] See also Figure 1In some embodiments, the rotary sintering device further includes a silo 202 for storing a material tray 200, and a plurality of material trays 200 are arranged at intervals in the vertical direction. The rotary sintering device further includes a lifting structure 203, and the lifting structure 203 is used to lift the silo 202 in the vertical direction, so that after the previous material tray 200 is moved away, the lifting structure 203 drives the silo 202 to rise a certain distance, so that the next material tray 200 is in a state of waiting to be moved, thereby realizing continuous loading.

[0109] The above are only optional embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.

Claims

1. A rotary sintering device for sintering a target object, wherein the target object is located at a predetermined position, characterized in that: The rotary sintering equipment comprises: A rotary feeding structure for conveying the target object at the predetermined position to a hot pressing station, the rotary feeding structure comprising a rotary assembly and a conveying assembly, the rotary assembly comprising a rotatable rotating material plate and a rotary driving mechanism for driving the rotating material plate to rotate, the hot pressing station being located on a rotating path of the rotating material plate; the conveying assembly comprising a first clamping mechanism, a transfer mechanism and a second clamping mechanism spaced apart from the first clamping mechanism, the first clamping mechanism grabs the target object at the predetermined position, the second clamping mechanism is arranged on the rotating path of the rotating material plate, the transfer mechanism is slidably arranged between the first clamping mechanism and the second clamping mechanism; the transfer mechanism receives the target object at the first clamping mechanism and transfers the target object to the second clamping mechanism, the second clamping mechanism grabs the target object and releases the target object on the rotating material plate, the rotating material plate rotates a predetermined angle and moves the target object to the hot pressing station; A floating pressure head structure, located at the hot pressing station and above the rotating material plate; and A heating structure, located at the hot pressing station and below the rotating material plate; The conveying assembly and the floating pressure head structure are arranged along the circumference of the rotating material plate, and the floating pressure head structure presses the target object located at the hot pressing station toward the heating structure, so that the heating structure heats and sinters the target object.

2. The rotary sintering equipment according to claim 1, characterized in that: The floating pressure head structure includes a pressure head assembly and a pressure-applying assembly, the pressure head assembly includes a positioning seat fixedly arranged relative to the target object, a pressure head located between the positioning seat and the target object and slidably arranged, and a force transmission mechanism connected to the positioning seat, the force transmission mechanism includes a pressure rod with one end slidably connected to the positioning seat, a first force transmission part connected to the other end of the pressure rod, and a second force transmission part connected to the pressure head, the first force transmission part and the second force transmission part are in point-to-surface contact, a plurality of pressure heads are arranged at intervals, and at least one corresponding force transmission mechanism is arranged for any of the pressure heads; the pressure-applying assembly is connected to the positioning seat, and is used to drive each of the pressure rods to move toward the target object, so that each of the pressure rods respectively drives each of the pressure heads to press different positions of the target object.

3. The rotary sintering equipment according to claim 2, characterized in that: The abutting surface of the first force transmission part is a plane and the abutting surface of the second force transmission part is a convex arc surface, or the abutting surface of the second force transmission part is a plane and the abutting surface of the first force transmission part is a convex arc surface.

4. The rotary sintering equipment according to claim 2, characterized in that: The pressure head is provided with a pressure hole, one end of the pressure rod is slidably set in the pressure hole, the second force transmission part is located at the bottom of the pressure hole, and the first force transmission part is located in the pressure hole and connected to the pressure rod; the force transmission mechanism also includes a transverse compression spring located in the pressure hole, the two ends of the transverse compression spring respectively abut the first force transmission part and the hole wall of the pressure hole, the transverse compression springs are arranged in pairs, and the two transverse compression springs in the same pair are symmetrical about the pressure rod.

5. The rotary sintering equipment according to claim 2, characterized in that: The pressurizing assembly includes a cylinder body and a plurality of piston rods connected to the cylinder body. The cylinder body has a plurality of piston chambers, each of the piston rods is respectively arranged in each of the piston chambers, and each of the piston rods is respectively used to drive each of the pressure rods. The pressurizing assembly is stacked in a plurality along the axial direction of the pressure rod, and the plurality of piston rods on any cylinder body are respectively connected to the plurality of piston rods on another adjacent cylinder body.

6. The rotary sintering equipment according to any one of claims 1 to 5, characterized in that: The rotary feeding structure also includes a feeding table with a feeding trough, the two ends of the feeding table extend toward the first clamping mechanism and the second clamping mechanism respectively, and the transfer mechanism is slidably arranged on the feeding trough; the transfer mechanism includes two oppositely arranged support frames, the two support frames are respectively slidably connected to the two side trough walls of the feeding trough, and the two support frames are respectively used to support the two ends of the target object.

7. The rotary sintering equipment according to claim 6, characterized in that: The first clamping mechanism includes a fixed support base, a lifter arranged on the support base, a first finger cylinder connected to the lifter, and a first clamping claw connected to the first finger cylinder, the first clamping claws are provided at both ends of the first finger cylinder, and the first finger cylinder is used to drive the two first clamping claws to clamp the target object; the second clamping mechanism includes a preheating template located above the rotating material plate, a second finger cylinder arranged on the preheating template, and a second clamping claw connected to the second finger cylinder, the second clamping claws are provided at both ends of the second finger cylinder, and the second finger cylinder is used to drive the two second clamping claws to clamp the target object.

8. The rotary sintering equipment according to any one of claims 1 to 5, characterized in that: The rotating material plate is provided with a loading trough for placing the target object, and a plurality of the loading troughs are provided, and each of the loading troughs is arranged at intervals around the rotation center of the rotating material plate, and the rotating material plate rotates so that each of the loading troughs passes through the hot pressing station in sequence.

9. The rotary sintering equipment according to any one of claims 1 to 5, characterized in that: The heating structure comprises a heating platform located below the rotating material plate, a heating tube arranged in the heating platform, and a heating lifting mechanism driving the heating platform to move in a vertical direction.

10. The rotary sintering equipment according to any one of claims 1 to 5, characterized in that: The rotary sintering equipment also includes a hooking structure, which is used to move the target object in the material bin to the predetermined position. The target object is provided with a clamping portion, and the hooking structure includes: a hooking plate slidably arranged relative to the predetermined position, a loading rack located on the sliding path of the hooking plate, and a driving component for driving the hooking plate to reciprocate along a predetermined direction; the hooking plate has a first position and a second position, the driving component drives the hooking plate to move to the first position and the hooking plate is detachably connected to the clamping portion; the driving component drives the hooking plate to move to the second position, the target object moves synchronously and slides to the loading rack, and the hooking plate is disengaged from the target object.

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