Silicon resonance and silicon piezoresistive meter core hybrid integrated system, aircraft and measurement method

Abstract

The invention provides a silicon resonance and silicon piezoresistive meter core hybrid integrated system, an aircraft and a measuring method.The system comprises a silicon resonance unit, a silicon piezoresistive unit, a gas path control module and an information processing circuit, and the silicon resonance unit comprises a silicon resonance meter core, a supporting structure, a resonance regulation and control module and a first gas path shielding integrated structure; the silicon resonance meter core is arranged on the supporting structure and is connected with the resonance regulation and control module, and the first gas path shielding integrated structure hermetically covers the silicon resonance meter core, the supporting structure and the resonance regulation and control module and is communicated with a first to-be-tested channel; the silicon piezoresistive unit comprises more than two silicon piezoresistive meter cores, a piezoresistive conditioning module and a second gas path shielding integrated structure, the silicon piezoresistive meter cores are connected with the piezoresistive conditioning module, and the second gas path shielding integrated structure covers the silicon piezoresistive meter cores and the piezoresistive conditioning module in a sealing manner and is communicated with the second channel to be detected. By applying the technical scheme of the invention, the technical problem that high performance and low cost of a multi-channel system in the prior art are difficult to consider at the same time is solved.

Description

Technical Field

[0001] The present invention relates to the field of pressure sensing technology, and in particular to a hybrid integrated system of silicon resonance and silicon piezoresistive meter core, an aircraft and a measuring method. Background Art

[0002] The atmospheric sensing system is a sensor device that obtains flight atmospheric data such as flight speed, aerodynamic angle, static pressure, air pressure, altitude, etc. It is an indispensable key equipment for flight control, engine control, navigation and post-analysis of modern aircraft when flying in the atmosphere, which directly affects the safety and stable flight of the aircraft. New weapons and equipment have put forward high-performance, low-cost and miniaturized coupling requirements for multi-channel atmospheric sensing systems. At present, in order to achieve high-performance design, the atmospheric sensing system generally adopts high-performance vibration tube and silicon resonant pressure sensor integrated design to ensure the pressure measurement accuracy, and then obtain high-precision atmospheric parameters. However, although the vibration tube and silicon resonant pressure sensor have high accuracy, they are expensive and large in size, which leads to high cost and large size of multi-channel atmospheric sensing system, which cannot meet the needs of new weapons and equipment. At the same time, the existing atmospheric sensing system based on silicon piezoresistive sensor integration has low cost and small size, but low accuracy and poor stability, which cannot meet the needs of new weapons and equipment. Summary of the invention

[0003] The present invention provides a hybrid integrated system of silicon resonance and silicon piezoresistive meter core, an aircraft and a measuring method, which can solve the technical problem in the prior art that it is difficult to achieve both high performance and low cost in a multi-channel system.

[0004] According to one aspect of the present invention, a hybrid integrated system of silicon resonance and silicon piezoresistive meter core is provided, the system comprising:

[0005] A silicon resonance unit, wherein the silicon resonance unit comprises a silicon resonance core, a support structure, a resonance control module and a first gas path shielding integrated structure. The support structure and the resonance control module are designed as an integrated whole. The silicon resonance core is arranged on the support structure and connected to the resonance control module. The first gas path shielding integrated structure is a metal cover. A sealing cover of the first gas path shielding integrated structure is arranged on the silicon resonance core, the support structure and the resonance control module. The first gas path shielding integrated structure has a first gas nozzle for communicating with a first channel to be measured. The first gas path shielding integrated structure is also used for electromagnetic shielding.

[0006] One or more silicon piezoresistive units, each of which includes more than two silicon piezoresistive cores, a piezoresistive conditioning module and a second gas path shielding integrated structure, the silicon piezoresistive core is connected to the piezoresistive conditioning module, the second gas path shielding integrated structure is a metal cover, a sealing cover of the second gas path shielding integrated structure is provided on the silicon piezoresistive core and the piezoresistive conditioning module, the second gas path shielding integrated structure has a second gas nozzle for communicating with a second channel to be measured, and the second gas path shielding integrated structure is also used for electromagnetic shielding;

[0007] An air path control module, the air path control module includes a valve and a program-controlled switch matched with the valve, the first air path shielding integrated structure and the second air path shielding integrated structure and the plurality of second air path shielding integrated structures are connected by the valve, and the opening and closing of the valve is controlled by the program-controlled switch;

[0008] The information processing circuit includes a preprocessing unit and an information acquisition unit. The preprocessing unit is respectively connected to the resonance control module and the piezoresistive conditioning module, and is used to preprocess the measurement signals output by the resonance control module and the piezoresistive conditioning module. The information acquisition unit is connected to the preprocessing unit, and is used to acquire the preprocessed measurement signals.

[0009] Furthermore, the measuring ranges of the multiple silicon piezoresistive cores in the same silicon piezoresistive unit are different.

[0010] Furthermore, the information processing circuit also includes a fault management unit, which is connected to the information acquisition unit and is used to determine whether each silicon piezoresistive core in the same silicon piezoresistive unit has a fault based on the signal collected by the information acquisition unit, and to eliminate the measurement signal of the faulty silicon piezoresistive core.

[0011] Furthermore, the information processing circuit also includes a self-calibration unit, which is respectively connected to the programmable switch and the information acquisition unit, and is used to control all valves to open through the programmable switch each time the system is powered on, obtain measurement signals of the silicon resonant meter core and the silicon piezoresistive meter core through the information acquisition unit, perform zero-position correction on the measurement signal of the silicon piezoresistive meter core based on the measurement signal of the silicon resonant meter core, and control all valves to close through the programmable switch after correction.

[0012] According to another aspect of the present invention, there is provided an aircraft, which includes the hybrid integrated system of silicon resonance and silicon piezoresistive core proposed in the present invention.

[0013] According to another aspect of the present invention, a measurement method using the hybrid integrated system of silicon resonance and silicon piezoresistive meter core proposed in the present invention is provided, and the measurement method comprises:

[0014] After the hybrid integrated system of silicon resonant meter core and silicon piezoresistive meter core is powered on, the self-calibration unit controls the opening of all valves through program-controlled switches, and obtains the measurement signals of the silicon resonant meter core and silicon piezoresistive meter core through the information acquisition unit;

[0015] Taking the measurement signal of the silicon resonant meter core as the reference, the measurement signal of the silicon piezoresistive meter core is corrected to zero position;

[0016] After the correction, the self-calibration unit controls all valves to close through program-controlled switches;

[0017] The corresponding channels to be measured are measured respectively using the silicon resonance unit and each silicon piezoresistive unit.

[0018] By applying the technical solution of the present invention, a hybrid integrated system of silicon resonance and silicon piezoresistive movement, an aircraft and a measuring method are provided. The system is based on the existing silicon resonance movement and silicon piezoresistive movement, and innovatively integrates the two movements to form a multi-channel sensing system. The movement-level integration is combined with the multi-movement information integration processing. Compared with the multi-sensor-level integration, the space occupied by the sensor housing, sensor circuit, internal gap of the sensor and gap between large-size sensors is reduced. Multiple movements can be integrated in the circuit in a matrix manner, greatly reducing the size of the system. The high precision and high stability of the silicon resonance movement are utilized, and the silicon piezoresistive movement is calibrated and corrected regularly or before use, so as to achieve the high precision of the multi-channel system. Compared with the use of silicon resonance movement for all channels, the volume, weight and cost can be effectively reduced. Compared with the use of silicon piezoresistive movement for all channels, the measurement accuracy and stability can be effectively improved. This hybrid integrated system uses only one high-precision, high-stability silicon resonant meter core in a multi-channel system, which significantly improves the performance of the silicon piezoresistive meter core measurement channel, and realizes high-precision, high-reliability, miniaturized, and low-cost measurement of multi-channel pressure. It is simple and practical, easy and effective to implement, and has strong feasibility. It can meet the coupling requirements of new weapons and equipment for atmospheric sensing systems in terms of high performance, low cost, and miniaturization, and can expand the application areas of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The included drawings are used to provide a further understanding of the embodiments of the present invention, which constitute a part of the specification, are used to illustrate the embodiments of the present invention, and together with the text description, explain the principles of the present invention. Obviously, the drawings in the following description are only some embodiments of the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0020] Figure 1 A structural block diagram of a hybrid integrated system of silicon resonance and silicon piezoresistive meter core provided according to a specific embodiment of the present invention is shown. DETAILED DESCRIPTION

[0021] It should be noted that, in the absence of conflict, the embodiments in this application and the features in the embodiments can be combined with each other. The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is by no means intended to limit the present invention and its application or use. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0023] Unless otherwise specifically stated, the relative arrangement of the parts and steps described in these embodiments, numerical expressions and numerical values ​​do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, method and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, method and equipment should be regarded as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0024] In the field of pressure sensing technology, silicon resonant sensors have the characteristics of high precision, high stability, large size and high cost. The silicon resonant core is the pressure sensitive chip of the silicon resonant sensor and does not include the conditioning circuit; silicon piezoresistive sensors have the characteristics of small size, low cost, medium and low precision, and obvious time drift. The silicon piezoresistive core is the pressure sensitive chip of the silicon piezoresistive sensor and does not include the conditioning circuit. Figure 1 As shown, according to a specific embodiment of the present invention, a hybrid integrated system of silicon resonance and silicon piezoresistive meter core is provided, and the system includes:

[0025] A silicon resonance unit, wherein the silicon resonance unit comprises a silicon resonance core, a support structure, a resonance control module and a first gas path shielding integrated structure. The support structure and the resonance control module are designed as an integrated whole. The silicon resonance core is arranged on the support structure and connected to the resonance control module. The first gas path shielding integrated structure is a metal cover. A sealing cover of the first gas path shielding integrated structure is arranged on the silicon resonance core, the support structure and the resonance control module. The first gas path shielding integrated structure has a first gas nozzle for communicating with a first channel to be measured. The first gas path shielding integrated structure is also used for electromagnetic shielding.

[0026] One or more silicon piezoresistive units, each of which includes more than two silicon piezoresistive cores, a piezoresistive conditioning module and a second gas path shielding integrated structure, the silicon piezoresistive core is connected to the piezoresistive conditioning module, the second gas path shielding integrated structure is a metal cover, a sealing cover of the second gas path shielding integrated structure is provided on the silicon piezoresistive core and the piezoresistive conditioning module, the second gas path shielding integrated structure has a second gas nozzle for communicating with a second channel to be measured, and the second gas path shielding integrated structure is also used for electromagnetic shielding;

[0027] An air path control module, the air path control module includes a valve and a program-controlled switch matched with the valve, the first air path shielding integrated structure and the second air path shielding integrated structure and the plurality of second air path shielding integrated structures are connected by the valve, and the opening and closing of the valve is controlled by the program-controlled switch;

[0028] The information processing circuit includes a preprocessing unit and an information acquisition unit. The preprocessing unit is respectively connected to the resonance control module and the piezoresistive conditioning module, and is used to preprocess the measurement signals output by the resonance control module and the piezoresistive conditioning module. The information acquisition unit is connected to the preprocessing unit, and is used to acquire the preprocessed measurement signals.

[0029] Among them, the present invention is based on the design concept of "three transformations", and the silicon resonant core is set on the resonant control module circuit board to realize the integrated design of the support structure of the silicon resonant core and the resonant control module. The metal cover is used as both an electromagnetic shielding structure and a part of the silicon resonant core gas path to realize the integrated design of the silicon resonant core gas path and the shielding structure, forming a miniaturized packaged silicon resonant core packaging unit. Two or more silicon piezoresistive cores are packaged together with the conditioning module through micro-assembly process and low-stress packaging process, and the metal cover is used to realize the integrated design of the gas path and metal shielding structure of multiple silicon piezoresistive cores to form a miniaturized silicon piezoresistive core packaging unit. The silicon resonant core packaging unit and the silicon piezoresistive core packaging unit are installed on the information processing circuit board in the system to ensure that the electromagnetic shielding shell (metal cover) and the signal stratum of the information processing circuit board are electrically conductive, and each sensor unit is electrically conductive with the information processing circuit board through pin welding.

[0030] By applying this configuration, a hybrid integrated system of silicon resonance and silicon piezoresistive movement is provided. The system is based on the existing silicon resonance movement and silicon piezoresistive movement, and innovatively integrates the two movements to form a multi-channel sensing system. The movement-level integration is combined with multi-movement information integration processing. Compared with multi-sensor-level integration, the space occupied by the sensor housing, sensor circuit, internal gap of the sensor and gap between large-size sensors is reduced. Multiple movements can be integrated in the circuit in a matrix manner, greatly reducing the size of the system. By utilizing the high precision and high stability of the silicon resonance movement, the silicon piezoresistive movement can be calibrated and corrected regularly or before use, so as to achieve high precision of the multi-channel system. Compared with using silicon resonance movement for all channels, the size, weight and cost can be effectively reduced. Compared with using silicon piezoresistive movement for all channels, the measurement accuracy and stability can be effectively improved. The hybrid integrated system significantly improves the performance of the silicon piezoresistive core measurement channel while using only one high-precision, high-stability silicon resonant core in the multi-channel system, and realizes high-precision, high-reliability, miniaturized, and low-cost measurement of multi-channel pressure. It is simple and practical, easy to implement and effective, and has strong feasibility. It can meet the coupling requirements of new weapons and equipment for atmospheric sensing systems in terms of high performance, low cost, and miniaturization, and can expand the application field of the system. Compared with the prior art, the technical solution of the present invention can solve the technical problem that it is difficult to balance high performance and low cost in the prior art multi-channel system.

[0031] In order to improve the measurement accuracy, in the embodiment of the present invention, two or more silicon piezoresistive meter cores of different ranges are miniaturized and integrated, and the gas path is connected by sharing a metal cover to form a single silicon piezoresistive unit, which jointly realizes the pressure measurement of one channel, with small size and low cost, wherein the ranges of multiple silicon piezoresistive meter cores in the same silicon piezoresistive unit are different. The low-pressure section mainly uses the measurement results of the small-range silicon piezoresistive meter core, and the high-pressure section mainly uses the measurement results of the large-range silicon piezoresistive meter core. Such a combined measurement can improve the accuracy of pressure measurement within the entire range (the measurement accuracy of the pressure sensor is generally a percentage of the full range, and using one sensor to measure the entire range will cause the absolute value of the measurement error in the low-pressure section to be larger). At the same time, two or more silicon piezoresistive meter cores constitute redundancy in hardware, and combined with fault management software, the reliability of pressure measurement can be improved, and the normal operation of the system can be guaranteed when individual cores fail.

[0032] Further, in an embodiment of the present invention, the information processing circuit also includes a fault management unit, which is connected to the information acquisition unit, and is used to determine whether each silicon piezoresistive core in the same silicon piezoresistive unit fails according to the signal collected by the information acquisition unit, and to remove the measurement signal of the silicon piezoresistive core that fails. In addition, the information processing circuit also includes a self-calibration unit, which is connected to the program-controlled switch and the information acquisition unit respectively, and is used to control all valves to open through the program-controlled switch each time the system is powered on, obtain the measurement signals of the silicon resonant meter core and the silicon piezoresistive meter core through the information acquisition unit, and use the measurement signal of the silicon resonant meter core as a reference to perform zero-position correction on the measurement signal of the silicon piezoresistive meter core, and control all valves to close through the program-controlled switch after correction. Through zero-position correction, the measurement accuracy of the silicon piezoresistive meter core can be improved by utilizing the high precision and good stability of the silicon resonant meter core, and the valve is closed after correction, and each connected channel is pressure measured. In addition, the information processing circuit also includes a power supply unit, which is used to convert the external power supply to the circuit board, and power each part through the circuit board. Through multi-core fault management and online rapid self-calibration, the reliability and maintainability of the system can be improved as a priority.

[0033] That is to say, in the embodiment of the present invention, in addition to carrying each sensor unit, the information processing circuit integrates the functions of silicon resonant sensor information collection, silicon piezoresistive sensor information collection, power supply conversion, information preprocessing, pressure solution, fault management, self-calibration, etc. Then, the information processing circuit board with multiple sensor units installed is reliably installed on the miniaturized controllable gas path module (gas path control module) to realize the connection and control of the gas path between the sensor units and the sealed connection of the electrical signals. Finally, the cover plate structure is installed to perform structural sealing to realize the integrated packaging of the multi-channel sensor system.

[0034] Furthermore, in order to improve the stability of the silicon piezoresistive core (meter movement) during long-term use, in an embodiment of the present invention, an external air path structure is used to connect the air path of the silicon resonant meter core and the air path of the silicon piezoresistive meter core respectively before regular use or before use, and the three pressures within the product range are controlled separately by an external pressure controller. The software corrects the scale factor of the silicon piezoresistive meter core based on the measurement value of the silicon resonant meter core according to a set specific algorithm, thereby realizing online rapid self-calibration of the system to ensure the measurement accuracy stability of the system during long-term use.

[0035] In summary, the present invention integrates a silicon resonant core, multiple silicon piezoresistive cores and multi-core information processing circuits to form a multi-channel sensing system. The silicon resonant core achieves stable closed-loop resonance through a resonance control module to complete the sensitive measurement of a channel pressure; the silicon piezoresistive core achieves amplification and conditioning through a signal conditioning module, and two or more silicon piezoresistive cores are combined to complete the sensitive measurement of a channel pressure. On the one hand, the accuracy is improved by range combination segmented measurement, and on the other hand, redundancy improves reliability. The information of each core in the system is uniformly collected and processed. When the system is powered on or in a specific stage, the silicon piezoresistive core is zero-corrected based on the preset program or external instructions and the silicon resonant core is used as a reference; the multi-channel multi-core system is fault-managed according to the core redundancy settings of each measurement channel, the pressure fault monitoring of each channel, the pressure prediction of the multi-channel system, etc., to ensure the normal operation of the system when a short-term fault occurs in an individual core or channel; through the cooperation of an external pressure source, the silicon piezoresistive core is scaled and corrected to achieve online rapid self-calibration of the system to ensure the measurement accuracy of the system.

[0036] According to another aspect of the present invention, an aircraft is provided, and the aircraft includes the hybrid integrated system of silicon resonance and silicon piezoresistive core proposed in the present invention. Since the hybrid integrated system of silicon resonance and silicon piezoresistive core proposed in the present invention can significantly improve the performance of the measurement channel of the silicon piezoresistive core, realize high-precision, high-reliability, miniaturized, and low-cost measurement of multi-channel pressure, it is simple and practical, easy and effective to implement, and has strong feasibility. It can meet the coupling requirements of new weapons and equipment for atmospheric sensing systems in terms of high performance, low cost, and miniaturization. Therefore, applying it to aircraft can significantly improve the performance of aircraft.

[0037] According to another aspect of the present invention, a measurement method using the hybrid integrated system of silicon resonance and silicon piezoresistive meter core proposed in the present invention is provided, the measurement method comprising:

[0038] After the hybrid integrated system of silicon resonant meter core and silicon piezoresistive meter core is powered on, the self-calibration unit controls the opening of all valves through program-controlled switches, and obtains the measurement signals of the silicon resonant meter core and silicon piezoresistive meter core through the information acquisition unit;

[0039] Taking the measurement signal of the silicon resonant meter core as the reference, the measurement signal of the silicon piezoresistive meter core is corrected to zero position;

[0040] After the correction, the self-calibration unit controls all valves to close through program-controlled switches;

[0041] The corresponding channels to be measured are measured respectively using the silicon resonance unit and each silicon piezoresistive unit.

[0042] In order to further understand the present invention, the following Figure 1The hybrid integrated system and measurement method of the present invention are described in detail.

[0043] like Figure 1 As shown, one silicon resonant sensing unit and four silicon piezoresistive sensing units are installed on an information processing circuit board and connected to a controllable gas path module to form a miniaturized multi-channel pressure measurement system. Before use, the silicon resonant unit is calibrated, and a calibration model is established to obtain the corresponding relationship between its output electrical signal and the sensed pressure, so as to achieve high-precision measurement of one channel pressure; the silicon piezoresistive core is calibrated, and calibration models of two silicon piezoresistive cores are established to obtain the corresponding relationship between their output electrical signal and the sensed pressure, and a combined measurement model is established to judge the sensed pressure values ​​of the two silicon piezoresistive cores. When the sensed pressure values ​​are all less than the set segment lower boundary, the output pressure value of the channel adopts the pressure value sensed by the small-range core; when the sensed pressure values ​​are all greater than the segment upper boundary, the output pressure value of the channel adopts the pressure value sensed by the large-range core; when the sensed pressure values ​​are all between the segment lower boundary and the upper boundary, the output pressure value of the channel adopts the average of the sensed pressure values ​​of the two cores. High-precision measurement of one channel pressure is achieved through segmentation.

[0044] Each time the multi-channel system is powered on, the switches between the gas paths of each channel are automatically opened to connect the gas paths. The zero position of the measurement result of the silicon piezoresistive unit is corrected based on the pressure measured by the silicon resonance unit. After the correction, the switch is closed to measure the pressure of each connected channel. The gas paths of the silicon resonance unit and the silicon piezoresistive unit are regularly connected together through an external gas path structure, and the three pressures within the product range are respectively controlled by an external pressure controller. A self-calibration algorithm model is established, and the silicon piezoresistive unit is self-calibrated based on the pressure value measured by the silicon resonance unit to realize the correction of the scale factor of the silicon piezoresistive unit.

[0045] By using only one high-precision, high-stability silicon resonant meter movement in the multi-channel system, high-precision, high-reliability measurement of 5-channel pressure is achieved. Compared with a system in which all 5 channels use silicon resonant units, the cost and volume are significantly reduced.

[0046] In summary, the present invention provides a hybrid integrated system of silicon resonance and silicon piezoresistive movement, an aircraft and a measurement method. The system is based on the existing silicon resonance movement and silicon piezoresistive movement, and innovatively integrates the two movements to form a multi-channel sensing system. The movement-level integration is combined with multi-movement information integration processing. Compared with multi-sensor-level integration, the space occupied by sensor housings, sensor circuits, internal gaps in sensors, and gaps between large-size sensors is reduced. Multiple movements can be integrated in the circuit in a matrix manner, greatly reducing the size of the system. The high precision and high stability of the silicon resonance movement are utilized, and the silicon piezoresistive movement is calibrated and corrected regularly or before use, so as to achieve high precision of the multi-channel system. Compared with using silicon resonance movement for all channels, the volume, weight and cost can be effectively reduced. Compared with using silicon piezoresistive movement for all channels, the measurement accuracy and stability can be effectively improved. The hybrid integrated system significantly improves the performance of the silicon piezoresistive core measurement channel while using only one high-precision, high-stability silicon resonant core in the multi-channel system, and realizes high-precision, high-reliability, miniaturized, and low-cost measurement of multi-channel pressure. It is simple and practical, easy to implement and effective, and has strong feasibility. It can meet the coupling requirements of new weapons and equipment for atmospheric sensing systems in terms of high performance, low cost, and miniaturization, and can expand the application field of the system. Compared with the prior art, the technical solution of the present invention can solve the technical problem that it is difficult to balance high performance and low cost in the prior art multi-channel system.

[0047] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0048] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0049] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A hybrid integrated system of silicon resonance and silicon piezoresistive core, characterized in that: The system comprises: A silicon resonance unit, the silicon resonance unit comprising a silicon resonance core, a support structure, a resonance control module and a first air path shielding integrated structure, the support structure and the resonance control module are designed as an integrated whole, the silicon resonance core is arranged on the support structure and connected to the resonance control module, the first air path shielding integrated structure is a metal cover, the first air path shielding integrated structure sealing cover is arranged on the silicon resonance core, the support structure and the resonance control module, the first air path shielding integrated structure has a first air nozzle for communicating with a first channel to be measured, and the first air path shielding integrated structure is also used for electromagnetic shielding; One or more silicon piezoresistive units, each of which includes more than two silicon piezoresistive cores, a piezoresistive conditioning module and a second air path shielding integrated structure, the silicon piezoresistive core is connected to the piezoresistive conditioning module, the second air path shielding integrated structure is a metal cover, a sealing cover of the second air path shielding integrated structure is provided on the silicon piezoresistive core and the piezoresistive conditioning module, the second air path shielding integrated structure has a second air nozzle for communicating with a second channel to be measured, and the second air path shielding integrated structure is also used for electromagnetic shielding; An air path control module, the air path control module comprising a valve and a program-controlled switch coordinated with the valve, the first air path shielding integrated structure and the second air path shielding integrated structure as well as multiple second air path shielding integrated structures are connected via the valve, and the opening and closing of the valve is controlled by the program-controlled switch; An information processing circuit, wherein the information processing circuit comprises a preprocessing unit and an information acquisition unit, wherein the preprocessing unit is respectively connected to the resonance control module and the piezoresistive conditioning module, and is used for preprocessing the measurement signals output by the resonance control module and the piezoresistive conditioning module, and the information acquisition unit is connected to the preprocessing unit, and is used for acquiring the preprocessed measurement signals.

2. The system according to claim 1, characterized in that The measuring ranges of multiple silicon piezoresistive cores in the same silicon piezoresistive unit are different.

3. The system according to claim 2, characterized in that The information processing circuit also includes a fault management unit, which is connected to the information acquisition unit and is used to determine whether each silicon piezoresistive core in the same silicon piezoresistive unit has a fault based on the signal collected by the information acquisition unit, and to eliminate the measurement signal of the faulty silicon piezoresistive core.

4. The system according to claim 3, characterized in that The information processing circuit also includes a self-calibration unit, which is respectively connected to the programmable switch and the information acquisition unit, and is used to control all the valves to open through the programmable switch each time the system is powered on, obtain the measurement signals of the silicon resonant meter core and the silicon piezoresistive meter core through the information acquisition unit, perform zero-position correction on the measurement signal of the silicon piezoresistive meter core based on the measurement signal of the silicon resonant meter core, and control all the valves to close through the programmable switch after the correction.

5. An aircraft, characterized in that: The aircraft comprises the hybrid integrated system of silicon resonance and silicon piezoresistive movement according to any one of claims 1 to 4.

6. A measurement method using the hybrid integrated system of silicon resonance and silicon piezoresistive meter core according to any one of claims 1 to 4, characterized in that: The measuring method comprises: After the hybrid integrated system of silicon resonant meter core and silicon piezoresistive meter core is powered on, the self-calibration unit controls the opening of all valves through program-controlled switches, and obtains the measurement signals of the silicon resonant meter core and silicon piezoresistive meter core through the information acquisition unit; Taking the measurement signal of the silicon resonant meter core as a reference, performing zero correction on the measurement signal of the silicon piezoresistive meter core; After the correction, the self-calibration unit controls all the valves to close through the program-controlled switch; The silicon resonance unit and each of the silicon piezoresistive units are used to measure the corresponding channel to be measured.

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