Positioning-based aluminum alloy component forging and pressing equipment and method for semiconductor equipment

Abstract

The invention belongs to the field of semiconductor equipment production, and particularly relates to a semiconductor equipment aluminum alloy component forging and pressing device and method based on positioning, the semiconductor equipment aluminum alloy component forging and pressing device comprises a bottom plate, a fixing seat and a second material guiding frame are welded and fixed to the bottom end face of the bottom plate, and a supporting rod is welded and fixed to the top end face of the bottom plate; a fixing plate is fixedly welded to the supporting rod, a top plate is fixedly welded to the top end of the supporting rod, a pretreatment assembly is installed on the top plate, a self-positioning feeding assembly is installed on the fixing plate, a first hydraulic rod is fixedly installed on the top plate, and an upper mold plate is fixedly connected to the bottom end of the first hydraulic rod; and a feeding groove is formed in the fixing plate in a penetrating mode, a second hydraulic rod is fixedly installed on the bottom plate, and the problem that in the actual working process of existing aluminum alloy component forging and pressing equipment for the semiconductor equipment, automatic and stable positioning feeding and automatic demolding work cannot be conducted on aluminum alloy component blanks is solved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor equipment production, and in particular to a positioning-based aluminum alloy component forging device and method for semiconductor equipment. Background Art

[0002] Aluminum alloy components for semiconductor equipment refer to various parts or components used in the semiconductor manufacturing process. These components need to meet specific process requirements and performance standards to ensure the production quality and performance stability of semiconductor devices. Since the application of aluminum alloys in semiconductor equipment usually requires high precision, good surface quality and specific mechanical properties, forging equipment is required to be used forging during the production process.

[0003] However, there are some problems in the actual working process of the existing aluminum alloy component forging equipment. For example, a forging equipment for aluminum alloy processing workpieces with publication number CN112453296A can complete the convenient spraying of the demolding liquid by turning the foot lever during the working process, but it still requires manual operation by the staff, and the working efficiency and degree of automation are low; because the aluminum alloy components in semiconductor equipment usually require high precision and consistency of geometric shape, and the existing aluminum alloy component forging equipment cannot automatically and stably position and load the aluminum alloy component blanks and automatically demold them during the actual working process, the staff needs to manually place the aluminum alloy component blanks in the forging die, but manual loading is very prone to deviations, and thus cannot ensure that the blanks are in the correct position, which can easily lead to errors in the forging of aluminum alloy components or unqualified products, and the practicality is poor. Therefore, it is necessary to provide a positioning-based aluminum alloy component forging equipment and method for semiconductor equipment to meet the needs of users. Summary of the invention

[0004] The present invention is proposed in view of the problems existing in the existing positioning-based aluminum alloy component forging equipment and method for semiconductor devices.

[0005] To solve the above technical problems, according to one aspect of the present invention, the present invention provides the following technical solutions: a positioning-based aluminum alloy component forging equipment for semiconductor equipment, comprising a base plate, a fixing seat and a second material guide frame are welded and fixed on the bottom end surface of the base plate, a support rod is welded and fixed on the top end surface of the base plate, a fixing plate is welded and fixed on the support rod, a top plate is welded and fixed on the top end of the support rod, a pretreatment component is installed on the top plate, a self-positioning feeding component is installed on the fixing plate, a first hydraulic rod is installed and fixed on the top plate, the bottom end of the first hydraulic rod is fixedly connected to an upper template, a feeding trough is penetrated through the fixing plate, a second hydraulic rod is installed and fixed on the base plate, and the end of the second hydraulic rod is fixedly connected to A lower template is connected, a material discharge trough is opened through the bottom plate, a liquid storage tank is welded and fixed on the side end surface of the fixed plate, a liquid inlet pipe is connected to the top of the liquid storage tank, a sealing ring is fixedly connected to the bottom side end of the liquid storage tank, a third spring is welded and fixed on the inner side end surface of the liquid storage tank, a rubber piston is fixedly connected to the other end of the third spring, a push rod is fixedly connected to the rubber piston, the push rod is slidably connected in the sealing ring, a first delivery pipe is fixedly connected to the inner bottom end surface of the liquid storage tank, the end of the first delivery pipe is connected to the second delivery pipe, the top of the second delivery pipe is fixedly connected in the fixed plate, the end of the second delivery pipe is connected to the third delivery pipe, and an atomizing nozzle is installed at the bottom of the third delivery pipe.

[0006] As a preferred scheme of the present invention, wherein: the pretreatment component includes a first servo motor, the first servo motor is installed and fixed on the inner top end surface of the top plate, a rotating rod is welded and fixed on the output shaft of the first servo motor, a toggle rod is welded and fixed on one end of the rotating rod, and a first limit plate is welded and fixed on the other end of the rotating rod, an insulation frame is welded and fixed on the top plate, a rotating shaft is rotatably connected in the insulation frame, a rotating frame is welded and fixed on the end of the rotating shaft, a limit frame and a second limit plate are welded and fixed on the inner side end surface of the rotating frame, the side end surfaces of the first limit plate and the second limit plate are both arc-shaped, four limit frames and four second limit plates are each provided, four limit frames and four second limit plates are evenly distributed in the rotating frame, four limit frames and four second limit plates are alternately distributed, and the horizontal center line of the rotating shaft, the horizontal center line of the rotating frame and the horizontal center line of the insulation frame are located on the same horizontal line.

[0007] As a preferred scheme of the present invention, wherein: a first through groove is penetrated through the top side end of the thermal insulation frame, a first material guide frame is welded and fixed on the top side end surface of the thermal insulation frame, a second through groove is penetrated through the bottom of the thermal insulation frame, a turntable is rotatably connected in the thermal insulation frame, the turntable is welded and fixed on the rotating shaft, a transfer groove is penetrated through the turntable, an electric heating tube is installed and fixed in the turntable, the first material guide frame is inclined, the inner wall of the thermal insulation frame is fitted with the outer wall of the turntable, the rotating shaft is fixed at the center of the turntable, four transfer grooves are arranged, and the four transfer grooves are equally distributed on the turntable, and the electric heating tubes are equally distributed in the turntable.

[0008] As a preferred solution of the present invention, the self-positioning feeding assembly includes a first mounting plate and a second mounting plate, the first mounting plate and the second mounting plate are both welded and fixed on the top surface of the fixed plate, a reciprocating screw is rotatably connected to the first mounting plate, the reciprocating screw is symmetrically distributed on both sides of the top of the fixed plate, the reciprocating screw on one side is connected to the output end of the second servo motor, the second servo motor is welded and fixed to the first mounting plate, a transmission belt is connected to the end of the reciprocating screw, a sliding plate is threadedly connected to the reciprocating screw, a first guide groove is penetrated through the sliding plate, a first guide rod is limitedly slidably connected in the first guide groove, a second guide rod is welded and fixed at the end of the first guide rod, a second guide groove is penetrated through the second mounting plate, the second guide rod is limitedly slidably connected in the second guide groove, the bottom end surface of the sliding plate is fitted with the top end surface of the fixed plate, the first guide groove is "V" shaped, the bottom end height of the first guide groove is the same as the bottom end height of the second guide groove, and the top end height of the first guide groove is the same as the top end height of the second guide groove.

[0009] As a preferred solution of the present invention, a connecting plate is welded and fixed at the end of the second guide rod, a first sliding groove and a third through groove are formed on the connecting plate, the first sliding groove is connected to the third through groove, a first spring is welded and fixed on the inner side end surface of the first sliding groove, a sliding rod is welded and fixed on the other end of the first spring, the sliding rod is limitedly slidably connected in the first sliding groove, a bracket is welded and fixed on the top of the sliding rod, a roller is rotatably connected on the top of the bracket, a connecting plate is welded and fixed at the bottom end of the sliding rod, a second sliding groove is formed on the connecting plate, a second spring is welded and fixed on the inner side end surface of the second sliding groove, a first clamping plate is welded and fixed on the other end of the second spring, the first clamping plate is limitedly slidably connected in the second sliding groove, the third through groove is formed in the middle part of the connecting plate, the first sliding grooves are symmetrically distributed on both sides of the connecting plate, the first sliding groove corresponds to the sliding rod one by one, the sliding rod is fixed at the middle part of the bottom of the bracket, the second sliding grooves are symmetrically distributed on both sides of the connecting plate, and the second sliding groove corresponds to the first clamping plate one by one through the second spring.

[0010] As a preferred scheme of the present invention, the connecting plate is slidably connected with a transmission rod, one end of the transmission rod is fixedly connected with a traction rope, the traction rope is limitedly slidably connected to the guide wheel, and the guide wheel is installed on the connecting plate, the end of the traction rope is fixedly connected to the first clamping plate, and the other end of the transmission rod is welded and fixed to the second clamping plate, the second clamping plate is penetrated by a third sliding groove, the first clamping plate is limitedly slidably connected in the third sliding groove, the top of the second mounting plate is threadedly connected with a threaded rod, the end of the threaded rod is rotatably connected with an adjusting plate, the bottom of the adjusting plate is hinged with a telescopic sleeve rod, the bottom end of the telescopic sleeve rod is hinged on the top side end surface of the second mounting plate, the transmission rod is connected to the center part of the connecting plate, the first clamping plate corresponds to the guide wheel one by one through the traction rope, the threaded rod is connected to the middle part of the adjusting plate, and the telescopic sleeve rod is symmetrically distributed on both sides of the bottom of the adjusting plate.

[0011] As a preferred solution of the present invention, the second hydraulic rods are symmetrically distributed on both sides of the bottom plate, the second hydraulic rods correspond to the lower template one by one, and the bottom end surface of the lower template fits the top end surface of the bottom plate.

[0012] As a preferred solution of the present invention, the liquid storage tanks are symmetrically distributed on both sides of the fixed plate, the length and width of the rubber piston are respectively equal to the length and width of the internal space of the first delivery pipe, and the push rod is fixed at the middle part of the side end of the rubber piston.

[0013] As a preferred solution of the present invention, the second delivery pipe is connected to the middle part of the side end of the third delivery pipe, the atomizing nozzles are equidistantly distributed at the bottom of the third delivery pipe, and the bottom end surface of the atomizing nozzles is flush with the bottom end surface of the fixed plate.

[0014] A positioning-based forging method for an aluminum alloy component for semiconductor equipment comprises the following steps:

[0015] S1: Separately load and automatically heat the aluminum alloy component blanks for semiconductor equipment using a pretreatment component;

[0016] S2: The aluminum alloy component blank after heating treatment is automatically transported to the middle part of the lower template through the self-positioning loading component to complete the automatic positioning loading work;

[0017] S3: driving the upper mold plate to move downward through the first hydraulic rod, and cooperating with the lower mold plate to complete the forging process of the aluminum alloy component blank;

[0018] S4: The lower mold plate is driven to open the mold by the second hydraulic rod, and the material unloading trough and the second material guide frame are used to complete the automatic demoulding and unloading work;

[0019] S5: During the opening process of the lower template, the rubber piston can be pushed by the push rod, and the lubricating liquid in the liquid storage tank can be transported to the third delivery pipe by the first delivery pipe and the second delivery pipe. The lower template can be automatically sprayed with the atomizing nozzle to complete the automatic lubrication process.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] 1. The present invention is provided with a pretreatment component. Under the driving action of the first servo motor, the toggle lever and the first limit plate on the rotating rod cooperate with the limit frame and the second limit plate on the rotating frame to drive the turntable on the rotating shaft to perform automatic and stable intermittent rotation, and each rotation is 90°, so that the aluminum alloy component blanks for semiconductor equipment can be automatically and stably intermittently separated and fed. In the feeding process, the electric heating tube can be used to stably heat the aluminum alloy component blanks in the feeding process, thereby improving the plasticity of the aluminum alloy component blanks, making it easier to form the desired shape, thereby improving the working efficiency of the forging equipment.

[0022] 2. The present invention is provided with a self-positioning feeding assembly, which can drive the threaded sliding plate to perform stable reciprocating motion under the rotation of the reciprocating screw rod, and can push the second guide rod on the first guide rod to perform stable motion along the trajectory of the second guide groove in combination with the first guide groove, thereby driving the connecting plate to perform synchronous motion; and during the movement of the connecting plate, the first clamping plate and the second clamping plate can be driven by the adjusting plate to automatically and stably clamp and position the aluminum alloy component blank in all directions, thereby pushing the aluminum alloy component blank to automatically move to the middle part of the lower template, completing the automatic positioning and feeding work, ensuring that the aluminum alloy blank maintains the required position and shape during the forging process, and ensuring the stability and consistency of each processing, which is particularly important for semiconductor equipment components with high precision and complex shapes, avoiding processing errors or unqualified products due to position changes, and increasing the convenience and stability of the forging equipment; and the position of the adjusting plate can be adjusted by rotating the threaded rod, thereby adjusting the clamping range of the first clamping plate and the second clamping plate, so that aluminum alloy component blanks of different sizes can be conveniently and stably clamped and positioned, thereby improving the practicality and applicability of the forging equipment.

[0023] 3. The present invention is provided with a lower template and a material discharge chute. The upper template is driven downward by the first hydraulic rod, and the forging process of the aluminum alloy component blank can be stably completed in cooperation with the lower template. Subsequently, the corresponding lower templates are driven to move to the sides at the same time by the second hydraulic rods on both sides to complete the mold opening. At this time, the aluminum alloy component after the forging process can be automatically demolded and discharged through the material discharge chute and the second material guide frame, thereby effectively improving the production efficiency and ensuring the quality and consistency of the components.

[0024] 4. The present invention is provided with a liquid storage tank and an atomizing nozzle. The lower template moves to the side. During the mold opening process, the rubber piston can be pushed by the push rod. The lubricating liquid in the liquid storage tank can be transported to the third delivery pipe by the first delivery pipe and the second delivery pipe. The atomizing nozzle can be used to automatically spray the lower template to complete the automatic lubrication process, so as to reduce the friction between the aluminum alloy component blank and the mold and promote a smooth forging process. This is particularly important for some semiconductor equipment components with complex shapes or high precision requirements. The lubricated mold can effectively reduce the friction between the aluminum alloy and the mold surface, thereby reducing the demand for demolding force, and further improving the stability of subsequent demolding work. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the present invention will be described in detail below in combination with the accompanying drawings and detailed embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. Among them:

[0026] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the present invention;

[0027] Figure 2 It is a schematic diagram of the connection structure of the reciprocating screw rod and the transmission belt of the present invention;

[0028] Figure 3 It is a schematic diagram of the connection structure of the second delivery pipe and the third delivery pipe of the present invention;

[0029] Figure 4 It is a schematic diagram of the overall main structure of the present invention;

[0030] Figure 5 It is a schematic diagram of the main cross-sectional structure of the thermal insulation frame of the present invention;

[0031] Figure 6 It is a schematic diagram of the side view structure of the rotating frame of the present invention;

[0032] Figure 7 It is a schematic diagram of the main structure of the second guide groove of the present invention;

[0033] Figure 8 It is a schematic diagram of the main cross-sectional structure of the connecting plate of the present invention;

[0034] Fig. 9 It is a schematic diagram of the main structure of the adjustment plate of the present invention;

[0035] Fig.10 It is a schematic diagram of the front view structure of the second clamping plate of the present invention;

[0036] Fig.11 It is a schematic diagram of the top view of the connecting plate of the present invention;

[0037] Fig.12 The present invention Fig.11 The enlarged structural diagram at B in the middle;

[0038] Fig.13 It is a schematic diagram of the overall side section structure of the present invention;

[0039] Fig.14 The present invention Fig.13 The enlarged structural diagram at A in the middle;

[0040] Fig.15 It is a schematic diagram of the main cross-sectional structure of the liquid storage tank of the present invention.

[0041] In the figure: 1, bottom plate; 2, fixed seat; 3, support rod; 4, fixed plate; 5, top plate; 6, pre-treatment component; 601, first servo motor; 602, rotating rod; 603, toggle rod; 604, first limit plate; 605, insulation frame; 606, rotating shaft; 607, rotating frame; 608, limit frame; 609, second limit plate; 610, first through slot; 611, first material guide frame; 612, first Second through slot; 613, turntable; 614, transfer slot; 615, electric heating tube; 7, self-positioning feeding assembly; 701, first mounting plate; 702, reciprocating screw rod; 703, transmission belt; 704, second servo motor; 705, sliding plate; 706, first guide slot; 707, first guide rod; 708, second guide rod; 709, connecting plate; 710, first sliding slot; 711, third through slot; 71 2. first spring; 713. sliding rod; 714. bracket; 715. roller; 716. connecting plate; 717. second sliding groove; 718. second spring; 719. first clamping plate; 720. transmission rod; 721. traction rope; 722. guide wheel; 723. second clamping plate; 724. third sliding groove; 725. second mounting plate; 726. second guide groove; 727. threaded rod; 728. adjustment Section plate; 729, telescopic sleeve rod; 8, first hydraulic rod; 9, upper template; 10, feed trough; 11, second hydraulic rod; 12, lower template; 13, discharge trough; 14, second material guide frame; 15, liquid storage tank; 16, liquid inlet pipe; 17, sealing ring; 18, third spring; 19, rubber piston; 20, push rod; 21, first delivery pipe; 22, second delivery pipe; 23, third delivery pipe; 24, atomizing nozzle. DETAILED DESCRIPTION

[0042] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0043] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0044] Secondly, the present invention is described in detail with reference to schematic diagrams. When describing the embodiments of the present invention in detail, for the sake of convenience, the cross-sectional diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0045] Example

[0046] To make the objectives, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0047] like Figure 1-15 As shown, a positioning-based aluminum alloy component forging device for semiconductor equipment includes a bottom plate 1, a fixing seat 2 and a second material guide frame 14 are welded and fixed on the bottom end surface of the bottom plate 1, a support rod 3 is welded and fixed on the top end surface of the bottom plate 1, a fixing plate 4 is welded and fixed on the support rod 3, a top plate 5 is welded and fixed on the top end of the support rod 3, a pretreatment component 6 is installed on the top plate 5, a self-positioning feeding component 7 is installed on the fixing plate 4, a first hydraulic rod 8 is installed and fixed on the top plate 5, and the bottom end of the first hydraulic rod 8 is fixedly connected to an upper template 9, a feed trough 10 is provided through the fixed plate 4, a second hydraulic rod 11 is fixedly mounted on the bottom plate 1, the end of the second hydraulic rod 11 is fixedly connected to a lower template 12, a feed trough 13 is provided through the bottom plate 1, a liquid storage tank 15 is welded and fixed on the side end surface of the fixed plate 4, a liquid inlet pipe 16 is connected to the top of the liquid storage tank 15, a sealing ring 17 is fixedly connected to the bottom side end of the liquid storage tank 15, a third spring 18 is welded and fixed on the inner side end surface of the liquid storage tank 15, and the other end of the third spring 18 is fixedly connected to a rubber spring The plug 19 is fixedly connected to a push rod 20 on the rubber piston 19, and the push rod 20 penetrates and is slidably connected in the sealing ring 17. A first delivery pipe 21 is fixedly connected to the inner bottom end surface of the liquid storage tank 15, and the end of the first delivery pipe 21 is connected to a second delivery pipe 22, and the top of the second delivery pipe 22 is fixedly connected in the fixed plate 4. The end of the second delivery pipe 22 is connected to a third delivery pipe 23, and an atomizing nozzle 24 is installed at the bottom of the third delivery pipe 23. The pretreatment component 6 can be used to automatically and stably perform intermittent separation feeding on aluminum alloy component blanks for semiconductor equipment, and during the feeding process, the aluminum alloy component blanks in the feeding process can be stably heated, thereby improving the plasticity of the aluminum alloy component blanks, making it easier to form the desired shape, and in conjunction with the self-positioning feeding component 7, the aluminum alloy component blanks can be automatically and stably clamped and positioned in all directions, completing the automatic positioning and feeding work, ensuring that the aluminum alloy blanks maintain the desired position and shape during the forging process, and ensuring the stability and consistency of each processing.

[0048] In this embodiment, the pretreatment component 6 includes a first servo motor 601, which is installed and fixed on the inner top surface of the top plate 5. A rotating rod 602 is welded and fixed on the output shaft of the first servo motor 601, a toggle rod 603 is welded and fixed on one end of the rotating rod 602, and a first limit plate 604 is welded and fixed on the other end of the rotating rod 602. An insulation frame 605 is welded and fixed on the top plate 5, and a rotating shaft 606 is rotatably connected in the insulation frame 605. A rotating frame 607 is welded and fixed on the end of the rotating shaft 606. A limit frame 608 and a second limit plate 606 are welded and fixed on the inner side end surface of the rotating frame 607. 9, the side end surface of the first limiting plate 604 and the side end surface of the second limiting plate 609 are both in an arc shape, and four limiting frames 608 and four second limiting plates 609 are provided, and the four limiting frames 608 and the four second limiting plates 609 are evenly distributed in the rotating frame 607 at an angle, and the four limiting frames 608 and the four second limiting plates 609 are alternately distributed, and the horizontal center line of the rotating shaft 606, the horizontal center line of the rotating frame 607 and the horizontal center line of the insulation frame 605 are located on the same horizontal line, and the top side end of the insulation frame 605 is penetrated by a first through groove 610, and the top side end surface of the insulation frame 605 is welded and fixed with a first material guide frame 610. 1. A second through slot 612 is provided at the bottom of the insulation frame 605. A turntable 613 is rotatably connected in the insulation frame 605. The turntable 613 is welded and fixed on the rotating shaft 606. A transfer slot 614 is provided on the turntable 613. An electric heating pipe 615 is installed and fixed in the turntable 613. The first material guide frame 611 is inclined. The inner wall of the insulation frame 605 fits the outer wall of the turntable 613. The rotating shaft 606 is fixed at the center of the turntable 613. Four transfer slots 614 are provided. The four transfer slots 614 are distributed at equal angles on the turntable 613. The electric heating pipe 615 is distributed at equal angles in the turntable 613. Driven by the servo motor 601, the toggle lever 603 and the first limit plate 604 on the rotating rod 602, in cooperation with the limit frame 608 and the second limit plate 609 on the rotating frame 607, can drive the turntable 613 on the rotating shaft 606 to perform automatic and stable intermittent rotation, and each rotation is 90°, so that the aluminum alloy component blanks for semiconductor equipment can be automatically and stably intermittently separated and fed, and in the feeding process, the electric heating tube 615 can be used to stably heat the aluminum alloy component blanks during the feeding process, thereby improving the plasticity of the aluminum alloy component blanks, making it easier to form the desired shape.

[0049] In this embodiment, the self-positioning loading assembly 7 includes a first mounting plate 701 and a second mounting plate 725, the first mounting plate 701 and the second mounting plate 725 are both welded and fixed on the top surface of the fixed plate 4, the first mounting plate 701 is rotatably connected with a reciprocating screw rod 702, the reciprocating screw rods 702 are symmetrically distributed on both sides of the top of the fixed plate 4, the reciprocating screw rod 702 on one side is connected to the output end of the second servo motor 704, the second servo motor 704 is welded and fixed on the first mounting plate 701, the end of the reciprocating screw rod 702 is connected with a transmission belt 703, the reciprocating screw rod 702 is threadedly connected with a sliding plate 705, the sliding plate 705 is penetrated with a first guide groove 706, and the first guide groove 706 is limited and slidably connected with a first guide The first guide rod 707 is welded and fixed with the second guide rod 708 at the end thereof, the second mounting plate 725 is provided with a second guide groove 726, the second guide rod 708 is limitedly slidably connected in the second guide groove 726, the bottom end surface of the sliding plate 705 is fitted with the top end surface of the fixing plate 4, the first guide groove 706 is "V" shaped, the bottom end height of the first guide groove 706 is the same as the bottom end height of the second guide groove 726, the top end height of the first guide groove 706 is the same as the top end height of the second guide groove 726, the end of the second guide rod 708 is welded and fixed with a connecting plate 709, the connecting plate 709 is provided with a first sliding groove 710 and a third through groove 711, the first sliding groove 710 and the third through groove 711 are connected The first and second through grooves 711 and 712 are connected to each other, a first spring 712 is welded and fixed on the inner side end surface of the first sliding groove 710, a sliding rod 713 is welded and fixed on the other end of the first spring 712, the sliding rod 713 is limited and slidably connected in the first sliding groove 710, a bracket 714 is welded and fixed on the top of the sliding rod 713, a roller 715 is rotatably connected on the top of the bracket 714, a connecting plate 716 is welded and fixed on the bottom end of the sliding rod 713, a second sliding groove 717 is penetrated on the connecting plate 716, a second spring 718 is welded and fixed on the inner side end surface of the second sliding groove 717, a first clamping plate 719 is welded and fixed on the other end of the second spring 718, the first clamping plate 719 is limited and slidably connected in the second sliding groove 717, and the third through groove 711 is opened. It is arranged in the middle part of the connecting plate 709, and the first sliding groove 710 is symmetrically distributed on both sides of the connecting plate 709. The first sliding groove 710 corresponds to the sliding rod 713 one by one. The sliding rod 713 is fixed to the middle part of the bottom of the bracket 714. The second sliding groove 717 is symmetrically distributed on both sides of the connecting plate 716. The second sliding groove 717 corresponds to the first clamping plate 719 one by one through the second spring 718. Under the rotation of the reciprocating screw rod 702, the threaded sliding plate 705 can be driven to perform stable reciprocating motion. Combined with the first guide groove 706, the second guide rod 708 on the first guide rod 707 can be pushed to perform stable motion along the trajectory of the second guide groove 726, thereby driving the connecting plate 709 to perform synchronous motion;During the movement of the connecting plate 709, the adjusting plate 728 can drive the first clamping plate 719 and the second clamping plate 723 to automatically and stably clamp and position the aluminum alloy component blank in all directions, thereby pushing the aluminum alloy component blank to automatically move to the middle part of the lower template 12, completing the automatic positioning and loading work, ensuring that the aluminum alloy blank maintains the required position and shape during the forging process, and ensuring the stability and consistency of each processing, which is particularly important for semiconductor equipment components with high precision and complex shapes, to avoid processing errors or unqualified products due to position changes. ;

[0050] In this embodiment, a transmission rod 720 is slidably connected to the connecting plate 716, one end of the transmission rod 720 is fixedly connected to a traction rope 721, the traction rope 721 is limitedly slidably connected to the guide wheel 722, the guide wheel 722 is installed on the connecting plate 716, the end of the traction rope 721 is fixedly connected to the first clamping plate 719, the other end of the transmission rod 720 is welded and fixed to the second clamping plate 723, the second clamping plate 723 is penetrated with a third sliding groove 724, the first clamping plate 719 is limitedly slidably connected in the third sliding groove 724, the top of the second mounting plate 725 is threadedly connected to a threaded rod 727, and the end of the threaded rod 727 is rotatably connected to an adjustment plate 728. A telescopic sleeve rod 729 is hinged at the bottom of the adjusting plate 728, and the bottom end of the telescopic sleeve rod 729 is hinged on the top side end surface of the second mounting plate 725. The transmission rod 720 is connected to the central part of the connecting plate 716. The first clamping plate 719 corresponds to the guide wheel 722 one by one through the traction rope 721. The threaded rod 727 is connected to the middle part of the adjusting plate 728. The telescopic sleeve rod 729 is symmetrically distributed on both sides of the bottom of the adjusting plate 728. The position of the adjusting plate 728 can be adjusted by rotating the threaded rod 727, and then the clamping range of the first clamping plate 719 and the second clamping plate 723 can be adjusted, so that aluminum alloy component blanks of different specifications and sizes can be clamped and positioned conveniently and stably.

[0051] In this embodiment, the second hydraulic rods 11 are symmetrically distributed on both sides of the base plate 1. The second hydraulic rods 11 correspond to the lower template 12 one by one. The bottom end surface of the lower template 12 fits with the top end surface of the base plate 1. The upper template 9 is driven downward by the first hydraulic rod 8, and the forging process of the aluminum alloy component blank can be stably completed in cooperation with the lower template 12. Subsequently, the corresponding lower templates 12 are driven to move sideways at the same time by the second hydraulic rods 11 on both sides to complete the mold opening. At this time, the aluminum alloy component after forging can be automatically demolded and unloaded through the unloading trough 13 and the second guide frame 14, thereby effectively improving production efficiency and ensuring the quality and consistency of the component.

[0052] In this embodiment, the liquid storage tank 15 is symmetrically distributed on both sides of the fixed plate 4, an electromagnetic valve is installed on the liquid inlet pipe 16, the length and width of the rubber piston 19 are respectively equal to the length and width of the internal space of the first delivery pipe 21, the push rod 20 is fixed to the middle part of the side end of the rubber piston 19, the second delivery pipe 22 is connected to the middle part of the side end of the third delivery pipe 23, the atomizing nozzles 24 are equidistantly distributed at the bottom of the third delivery pipe 23, the bottom end surface of the atomizing nozzle 24 is flush with the bottom end surface of the fixed plate 4, and the lower template 12 moves to the side. During the mold opening process, the rubber piston 19 can be pushed by the push rod 20, and the lubricating liquid in the liquid storage tank 15 can be transported to the third delivery pipe 23 by using the first delivery pipe 21 and the second delivery pipe 22. The lower template 12 can be automatically sprayed with the atomizing nozzle 24 to complete the automatic lubrication process.

[0053] It should be noted that the present invention is a positioning-based forging device and method for aluminum alloy components for semiconductor devices. First, the staff can place the aluminum alloy component blank for semiconductor devices that needs to be forged on the first guide frame 611. At this time, under the inclined guiding action of the first guide frame 611, the aluminum alloy component blank can be automatically transported to the transfer slot 614 at the top of the turntable 613 through the first through slot 610 on the insulation frame 605 under the action of its own gravity. At this time, under the driving action of the first servo motor 601, the output shaft can drive the rotating rod 602 to rotate stably, and then the toggle rod 603 and the first limit plate 604 at both ends can be driven to perform synchronous circular motion. At this time, under the circular motion of the toggle rod 603, the toggle limit frame 608 can be used to drive the rotating frame 607 to rotate intermittently, and each time it rotates 90°, and when the toggle rod 603 moves out of the limit frame 608, the rotating frame 607 stops rotating. At this time, the rotating rod 602 can drive the first limiting plate 604 to fit with the second limiting plate 609 in the rotating frame 607 to limit the rotating frame 607, avoid shaking when the rotating frame 607 stops rotating, and ensure the stability of the intermittent rotation state of the rotating frame 607. By utilizing the intermittent rotation of the rotating frame 607, the rotating disk 613 can be driven by the rotating shaft 606 to perform convenient and stable intermittent rotation in the insulation frame 605, and each time it moves 90°, the top transfer slot 614 can be moved to the lowest end by utilizing the 90° intermittent rotation of the rotating disk 613. At this time, the aluminum alloy component blank in the transfer slot 614 can be automatically unloaded through the second through slot 612, and the aluminum alloy component blank can be stably heated by the electric heating tube 615 during the movement of the rotating disk 613 in the insulation frame 605, thereby improving the plasticity of the aluminum alloy component blank, making it easier to form a desired shape;

[0054] The second guide groove 726 has two inflection points. One inflection point of the second guide groove 726 is aligned with the vertical center line of the insulation frame 605, while the other inflection point of the second guide groove 726 is aligned with the vertical center line of the lower template 12. Therefore, when the second guide rod 708 is at the rightmost side of the second guide groove 726, the connecting plate 709 on the second guide rod 708 is located directly below the insulation frame 605. Therefore, when the aluminum alloy component blank is automatically unloaded through the second through groove 612, it can pass through the connecting plate 709 to stabilize the third through groove 711 and stably fall onto the fixed plate 4.

[0055] Subsequently, driven by the second servo motor 704, the reciprocating screw rod 702 on one side can be driven to rotate. At this time, the reciprocating screw rod 702 on one side can drive the reciprocating screw rod 702 on the other side to rotate synchronously through the transmission belt 703. At this time, under the synchronous rotation of the reciprocating screw rods 702 on both sides, the corresponding threaded sliding plates 705 can be driven to perform synchronous reciprocating motion. At this time, the sliding plate 705 moves to the left first. Under the movement of the sliding plate 705, the inclined surface on the left side of the first guide groove 706 can be used to push the first guide rod 707 and the second guide rod 708 to move upward along the second guide groove 726 on the second mounting plate 725, and then under the continued movement of the sliding plate 705 , can continue to push the first guide rod 707 and the second guide rod 708 to move along the trajectory of the second guide groove 726 on the second mounting plate 725, at this time, the first guide rod 707 and the second guide rod 708 can be stably translated to the left until the first guide rod 707 and the second guide rod 708 move to the leftmost, at this time the sliding plate 705 still continues to move, the first guide rod 707 and the second guide rod 708 will not continue to move to the left, so the first guide rod 707 and the second guide rod 708 under the joint action of the right side inclined surface of the first guide groove 706 and the second guide groove 726, the first guide rod 707 and the second guide rod 708 can be smoothly moved downward along the trajectory of the second guide groove 726;

[0056] Under the action of the movement of the first guide rod 707 and the second guide rod 708, the connecting plate 709 can be driven to move synchronously. The rightmost connecting plate 709 first moves upward, then translates to the left, and finally moves downward. Similarly, under the continuous rotation of the reciprocating screw rod 702, the threaded sliding plate 705 can be driven to move from left to right to reset. At this time, under the joint limiting action of the first guide groove 706 and the second guide groove 726, the leftmost connecting plate 709 can be driven to move upward first, then translate to the right, and finally move downward to complete the reset through the first guide rod 707 and the second guide rod 708.

[0057] When the rightmost connecting plate 709 moves upward first, it can drive the bracket 714 on the sliding rod 713 to move upward synchronously. At this time, under the action of the movement of the bracket 714, the roller 715 can be driven to contact the telescopic sleeve rod 729 first. At this time, under the guiding action of the telescopic sleeve rod 729, the sliding rod 713 on the side can be pushed to move toward the middle through the roller 715 until the connecting plate 709 moves upward to the top. Similarly, the roller 715 and the sliding rod 713 on the other side also move toward the middle. At this time, the bracket 714 can move to the adjustment plate 728 and be flush with the adjustment plate 728. The adjustment plate 728 is used to block and limit the bracket 714. When the sliding rods 713 on both sides move toward the middle, the connecting plate 716 can be driven to move synchronously through the sliding rod 713. At this time, under the action of the movement of the connecting plate 716, the transmission rod 715 can be used to The second clamping plates 723 on both sides are pushed by the 720 to contact the front and rear surfaces of the aluminum alloy component blank first, and then the connecting plates 716 on both sides continue to move toward the middle. Since the second clamping plates 723 on both sides have already contacted the front and rear surfaces of the aluminum alloy component blank, the second clamping plates 723 and the transmission rod 720 will not continue to move, so the connecting plate 716 moves toward the second clamping plates 723. At this time, under the guidance of the guide wheel 722, the second clamping plates 723 can pull the first clamping plates 719 on both sides to move toward the middle at the same time through the traction rope 721 on the transmission rod 720 until the first clamping plates 719 on both sides contact the left and right surfaces of the aluminum alloy component blank. At this time, under the joint action of the second clamping plates 723 on both sides and each first clamping plate 719, the aluminum alloy component blank can be automatically and stably clamped, fixed and positioned in all directions;

[0058] The second clamping plates 723 and the first clamping plates 719 on both sides can automatically and stably clamp, fix and position the aluminum alloy component blank in all directions. The staff can place the aluminum alloy component blank sample in the third through groove 711 in advance. Then the staff can rotate the threaded rod 727. During the threaded rotation of the threaded rod 727, the adjusting plate 728 can be pushed to translate stably under the limiting effect of the telescopic sleeve rod 729 hinged on both sides. Under the translation effect of the adjusting plate 728, the telescopic sleeve rod 729 can be used to conveniently adjust the guide translation distance of the sliding rod 713 and the connecting plate 716, so as to ensure that the connecting plate 716 after movement can drive the second clamping plates 723 and the first clamping plates 719 on both sides to automatically and stably clamp, fix and position the aluminum alloy component blank in all directions.

[0059] After the second clamping plates 723 on both sides and the first clamping plates 719 have fully clamped, fixed and positioned the aluminum alloy component blank, the connecting plate 709 is translated from right to left, thereby being able to drive the aluminum alloy component blank to be translated synchronously until the aluminum alloy component blank moves to just above the lower template 12, and then moves to the leftmost connecting plate 709 and moves downward along the trajectory of the second guide groove 726. During the downward movement of the connecting plate 709, it can drive the bracket 714 to move away from the adjustment plate 728 and the telescopic sleeve rod 729. At this time, the first spring 712 Under the elastic action of the sliding rod 713, the bracket 714 and the connecting plate 716 can be driven to move and reset, and then the second clamping plate 723 can be driven to move and reset through the transmission rod 720. At the same time, under the elastic action of the second spring 718, the first clamping plate 719 can be driven to move and reset. At this time, the second clamping plates 723 and each first clamping plate 719 on both sides can automatically move and reset, and then can move away from the aluminum alloy component blank. At this time, the aluminum alloy component blank can automatically and stably fall to the middle part of the lower template 12 through the feed trough 10;

[0060] Similarly, after the loading work is completed, under the continuous rotation of the reciprocating screw 702, the connecting plate 709 moves from left to right to reset, and then under the continuous intermittent rotation of the turntable 613, the aluminum alloy component blank in the next transfer groove 614 can pass through the third through groove 711 on the connecting plate 709 again and fall onto the fixed plate 4 for subsequent loading work;

[0061] When the aluminum alloy component blank falls into the lower template 12 and the connecting plate 709 moves and resets, the upper template 9 can be driven downward by the driving action of the first hydraulic rod 8, and the forging process of the aluminum alloy component blank can be stably completed in cooperation with the lower template 12. After the aluminum alloy component blank is forged, the corresponding lower template 12 can be driven to move to the side at the same time by driving the second hydraulic rods 11 on both sides to complete the mold opening. At this time, the aluminum alloy component after forging can automatically fall onto the second guide frame 14 through the unloading trough 13. Under the inclined guiding action of the second guide frame 14, the automatic demoulding and unloading work can be completed. Then, the second hydraulic rod 11 is driven again to drive the corresponding lower template 12 to move to the middle and reset at the same time, so as to ensure the stability of subsequent forging work.

[0062] The lower templates 12 on both sides move to the side at the same time. During the mold opening process, the lower template 12 can squeeze and push the push rod 20. At this time, under the movement of the push rod 20, the rubber piston 19 can be pushed to move into the first delivery pipe 21. Then, as the rubber piston 19 continues to move, the lubricating liquid in the first delivery pipe 21 can be pushed into the second delivery pipe 22. Then, the lubricating liquid in the second delivery pipe 22 can be stably delivered to each atomizing nozzle 24 through the third delivery pipe 23. The atomizing nozzle 24 can automatically spray the lower template 12 to complete the automatic lubrication process, so as to reduce the friction between the aluminum alloy component blank and the mold. The friction can promote a smooth forging process, which is particularly important for some semiconductor equipment components with complex shapes or high precision requirements. The lubricated mold can effectively reduce the friction between the aluminum alloy and the mold surface, thereby reducing the demand for demolding force, and further improving the stability of subsequent demolding work. When the lower mold plates 12 on both sides move to the middle and reset at the same time, they can move away from the push rod 20. At this time, under the elastic action of the third spring 18, the rubber piston 19 can be driven to move and reset, and disengage from the first delivery pipe 21. At this time, the lubricating liquid in the liquid storage tank 15 can automatically enter the first delivery pipe 21, waiting for subsequent delivery work.

[0063] Although the present invention has been described above with reference to the embodiments, various modifications may be made thereto and parts thereof may be replaced by equivalents without departing from the scope of the present invention. In particular, as long as there is no structural conflict, the various features in the embodiments disclosed in the present invention may be used in combination with each other in any manner, and the fact that these combinations are not exhaustively described in this specification is only for the sake of omitting space and saving resources. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A positioning-based aluminum alloy component forging device for semiconductor equipment, comprising a base plate (1), characterized in that: A fixing seat (2) and a second material guide frame (14) are welded and fixed on the bottom end surface of the bottom plate (1); a support rod (3) is welded and fixed on the top end surface of the bottom plate (1); a fixing plate (4) is welded and fixed on the support rod (3); a top plate (5) is welded and fixed on the top end of the support rod (3); a pretreatment component (6) is installed on the top plate (5); a self-positioning feeding component (7) is installed on the fixing plate (4); a first hydraulic rod (8) is installed and fixed on the top plate (5); the bottom end of the first hydraulic rod (8) is fixedly connected to an upper template (9); a feeding trough (10) is provided through the fixing plate (4); a second hydraulic rod (11) is installed and fixed on the bottom plate (1); the end of the second hydraulic rod (11) is fixedly connected to a lower template (12); a material discharge trough (13) is provided through the bottom plate (1); a side end surface of the fixing plate (4) is welded and fixed A liquid storage tank (15) is provided, wherein the top of the liquid storage tank (15) is connected to a liquid inlet pipe (16), the bottom side end of the liquid storage tank (15) is fixedly connected to a sealing ring (17), a third spring (18) is welded and fixedly provided on the inner side end surface of the liquid storage tank (15), the other end of the third spring (18) is fixedly connected to a rubber piston (19), a push rod (20) is fixedly connected to the rubber piston (19), the push rod (20) penetrates and is slidably connected in the sealing ring (17), a first delivery pipe (21) is fixedly connected to the inner bottom end surface of the liquid storage tank (15), the end of the first delivery pipe (21) is connected to a second delivery pipe (22), the top of the second delivery pipe (22) is fixedly connected in a fixed plate (4), the end of the second delivery pipe (22) is connected to a third delivery pipe (23), and an atomizing nozzle (24) is installed at the bottom of the third delivery pipe (23).

2. The positioning-based aluminum alloy component forging equipment for semiconductor devices according to claim 1 is characterized in that: The pretreatment component (6) comprises a first servo motor (601), the first servo motor (601) is mounted and fixed on the inner top surface of the top plate (5), a rotating rod (602) is welded and fixed on the output shaft of the first servo motor (601), a toggle rod (603) is welded and fixed on one end of the rotating rod (602), a first limit plate (604) is welded and fixed on the other end of the rotating rod (602), a thermal insulation frame (605) is welded and fixed on the top plate (5), a rotating shaft (606) is rotatably connected inside the thermal insulation frame (605), a rotating frame (607) is welded and fixed on the end of the rotating shaft (606), and the rotating frame (607) is welded and fixed on the end of the rotating shaft (606). A limit frame (608) and a second limit plate (609) are welded and fixed on the inner side end surface of the rotating frame (607), the side end surface of the first limit plate (604) and the side end surface of the second limit plate (609) are both arc-shaped, and four limit frames (608) and four second limit plates (609) are each provided, and the four limit frames (608) and the four second limit plates (609) are evenly distributed in the rotating frame (607), and the four limit frames (608) and the four second limit plates (609) are alternately distributed, and the horizontal center line of the rotating shaft (606), the horizontal center line of the rotating frame (607) and the horizontal center line of the insulation frame (605) are located on the same horizontal line.

3. The positioning-based aluminum alloy component forging equipment for semiconductor devices according to claim 2 is characterized in that: The top side end of the thermal insulation frame (605) is provided with a first through slot (610), the top side end surface of the thermal insulation frame (605) is welded and fixed with a first material guide frame (611), the bottom of the thermal insulation frame (605) is provided with a second through slot (612), a rotating disk (613) is rotatably connected inside the thermal insulation frame (605), the rotating disk (613) is welded and fixed on the rotating shaft (606), and a transfer slot (614) is provided on the rotating disk (613). An electric heating tube (615) is fixedly installed in the turntable (613); the first material guiding frame (611) is inclined; the inner wall of the thermal insulation frame (605) is in contact with the outer wall of the turntable (613); the rotating shaft (606) is fixed at the center of the turntable (613); four transfer grooves (614) are provided; the four transfer grooves (614) are distributed at equal angles on the turntable (613); and the electric heating tubes (615) are distributed at equal angles in the turntable (613).

4. The positioning-based aluminum alloy component forging equipment for semiconductor devices according to claim 1, characterized in that: The self-positioning loading assembly (7) comprises a first mounting plate (701) and a second mounting plate (725), the first mounting plate (701) and the second mounting plate (725) are both welded and fixed on the top surface of the fixed plate (4), a reciprocating screw rod (702) is rotatably connected to the first mounting plate (701), the reciprocating screw rod (702) is symmetrically distributed on both sides of the top of the fixed plate (4), one side of the reciprocating screw rod (702) is connected to the output end of the second servo motor (704), the second servo motor (704) is welded and fixed on the first mounting plate (701), the end of the reciprocating screw rod (702) is connected to a transmission belt (703), the reciprocating screw rod (702) is threadedly connected to a sliding plate (705), and the sliding plate (705) A first guide groove (706) is formed on the upper surface, a first guide rod (707) is slidably connected in the first guide groove (706), a second guide rod (708) is welded and fixed at the end of the first guide rod (707), a second guide groove (726) is formed on the second mounting plate (725), the second guide rod (708) is slidably connected in the second guide groove (726), the bottom end surface of the sliding plate (705) is in contact with the top end surface of the fixing plate (4), the first guide groove (706) is in a "V" shape, the bottom end height of the first guide groove (706) is the same as the bottom end height of the second guide groove (726), and the top end height of the first guide groove (706) is the same as the top end height of the second guide groove (726).

5. The positioning-based aluminum alloy component forging equipment for semiconductor devices according to claim 4 is characterized in that: A connecting plate (709) is welded and fixed to the end of the second guide rod (708), and a first sliding groove (710) and a third through groove (711) are formed on the connecting plate (709), and the first sliding groove (710) is connected to the third through groove (711). A first spring (712) is welded and fixed to the inner side end surface of the first sliding groove (710), and a sliding rod (713) is welded and fixed to the other end of the first spring (712), and the sliding rod (713) is limitedly slidably connected in the first sliding groove (710), and a bracket (714) is welded and fixed to the top of the sliding rod (713), and a roller (715) is rotatably connected to the top of the bracket (714), and a connecting plate (716) is welded and fixed to the bottom end of the sliding rod (713), and a second sliding groove (710) is formed on the connecting plate (716). A second spring (718) is welded and fixed on the inner side end surface of the second sliding groove (717), and a first clamping plate (719) is welded and fixed on the other end of the second spring (718). The first clamping plate (719) is limitedly slidably connected in the second sliding groove (717). The third through groove (711) is opened in the middle part of the connecting plate (709). The first sliding groove (710) is symmetrically distributed on both sides of the connecting plate (709). The first sliding groove (710) corresponds to the sliding rod (713) one by one. The sliding rod (713) is fixed to the middle part of the bottom of the bracket (714). The second sliding groove (717) is symmetrically distributed on both sides of the connecting plate (716). The second sliding groove (717) corresponds to the first clamping plate (719) one by one through the second spring (718).

6. The positioning-based aluminum alloy component forging equipment for semiconductor devices according to claim 5, characterized in that: A transmission rod (720) is slidably connected to the connecting plate (716), one end of the transmission rod (720) is fixedly connected to a traction rope (721), the traction rope (721) is limitedly slidably connected to a guide wheel (722), the guide wheel (722) is installed on the connecting plate (716), the end of the traction rope (721) is fixedly connected to a first clamping plate (719), the other end of the transmission rod (720) is welded and fixed to a second clamping plate (723), a third sliding groove (724) is penetrated through the second clamping plate (723), the first clamping plate (719) is limitedly slidably connected in the third sliding groove (724), the second mounting The top of the plate (725) is threadedly connected to a threaded rod (727), the end of the threaded rod (727) is rotatably connected to an adjustment plate (728), the bottom of the adjustment plate (728) is hingedly connected to a telescopic sleeve rod (729), the bottom end of the telescopic sleeve rod (729) is hingedly connected to the top side end surface of the second mounting plate (725), the transmission rod (720) is connected to the central part of the connecting plate (716), the first clamping plate (719) corresponds to the guide wheel (722) one by one through a traction rope (721), the threaded rod (727) is connected to the middle part of the adjustment plate (728), and the telescopic sleeve rods (729) are symmetrically distributed on both sides of the bottom of the adjustment plate (728).

7. The positioning-based aluminum alloy component forging equipment for semiconductor devices according to claim 1, characterized in that: The second hydraulic rods (11) are symmetrically distributed on both sides of the bottom plate (1), the second hydraulic rods (11) correspond one to one with the lower template (12), and the bottom end surface of the lower template (12) fits with the top end surface of the bottom plate (1).

8. The positioning-based aluminum alloy component forging equipment for semiconductor devices according to claim 1, characterized in that: The liquid storage tank (15) is symmetrically distributed on both sides of the fixed plate (4), the length and width of the rubber piston (19) are respectively equal to the length and width of the internal space of the first delivery pipe (21), and the push rod (20) is fixed to the middle part of the side end of the rubber piston (19).

9. The positioning-based aluminum alloy component forging equipment for semiconductor devices according to claim 1, characterized in that: The second delivery pipe (22) is connected to the middle part of the side end of the third delivery pipe (23), and the atomizing nozzles (24) are evenly distributed at the bottom of the third delivery pipe (23), and the bottom end surface of the atomizing nozzles (24) is flush with the bottom end surface of the fixing plate (4).

10. A method for forging an aluminum alloy component for semiconductor devices based on positioning, using the aluminum alloy component forging device for semiconductor devices based on positioning as described in claim 1, characterized in that: The following steps are involved: S1: using a pretreatment component (6) to separate and load aluminum alloy component blanks for semiconductor devices and automatically heat them; S2: The aluminum alloy component blank after the heating treatment is automatically transported to the middle part of the lower template (12) through the self-positioning loading component (7), completing the automatic positioning loading work; S3: driving the upper die plate (9) to move downwards through the first hydraulic rod (8) to cooperate with the lower die plate (12) to complete the forging process of the aluminum alloy component blank; S4: driving the lower mold plate (12) to open the mold through the second hydraulic rod (11), and cooperating with the material discharge chute (13) and the second material guide frame (14) to complete the automatic demoulding and material discharge work; S5: During the process of opening the lower mold plate (12), the rubber piston (19) can be pushed by the push rod (20), and the lubricating liquid in the liquid storage tank (15) can be transported to the third delivery pipe (23) by using the first delivery pipe (21) and the second delivery pipe (22), and the lower mold plate (12) can be automatically sprayed in cooperation with the atomizing nozzle (24), thereby completing the automatic lubrication process.

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