Preparation method of three-dimensional needle tip mold and preparation method of three-dimensional needle tip

Abstract

The invention relates to the technical field of advanced laser manufacturing, in particular to a preparation method of a three-dimensional needle tip mold, which comprises the following steps: irradiating laser on a mold base material through a mask plate with a light-transmitting area in a preset shape, and respectively forming a first preset-shape irradiation area and a second preset-shape irradiation area on the mold base material, and enabling the mold base material and the laser to relatively move along the first direction and the second direction according to a preset speed, and etching on the mold base material to form a first groove and a second groove. And the crossed area of the first groove and the second groove forms the three-dimensional needle tip mold. The length of the first preset shape irradiation area in the first direction and the length of the second preset shape irradiation area in the second direction are not continuous and identical, so that the condition of repeated etching on the first groove and the second groove is avoided when laser is used for etching the mold base material; the formed three-dimensional needle point mold is ensured to be the three-dimensional needle point mold which is formed according to the actual preset numerical value and meets the requirement.

Description

Technical Field

[0001] The present invention relates to the field of advanced laser manufacturing technology, and in particular to a method for preparing a three-dimensional needle tip mold and a method for preparing a three-dimensional needle tip. Background Art

[0002] As technology advances, the demand for precision microdevices continues to grow. Needle tips, a crucial component of today's three-dimensional electrodes, are effective tools for treating neurological diseases. They can penetrate the cortex and reach deep into tissue, acting as sensors to stimulate nerves or record neural signals.

[0003] Current methods for manufacturing needle tips are difficult to achieve with high repeatability, low cost, and efficient production. Mechanical forming methods rely on manual labor, suffer from poor repeatability, and fail to meet precision requirements. Ion beam milling methods can lead to impurity deposition on the sample surface, resulting in surface roughness and low processing efficiency. Electron beam deposition methods have low deposition efficiency, making them unsuitable for large-scale production. Furthermore, the performance and stability of needle tips produced by electrochemical etching methods require further improvement. Summary of the Invention

[0004] The present invention is made to solve the above technical problems. Its purpose is to provide a method for preparing a three-dimensional needle tip mold and a method for preparing a three-dimensional needle tip, and to improve the electron beam deposition method to achieve the efficient preparation of a three-dimensional needle tip at a lower cost.

[0005] In order to achieve the above-mentioned objectives, the present invention provides a method for preparing a three-dimensional needle tip mold, comprising: S1, irradiating a laser onto a mold substrate through a mask having a preset shape of a light-transmitting area, forming a first preset shape irradiation area on the mold substrate, causing the mold substrate and the laser to move relative to each other along a first direction at a preset speed, and etching a first groove on the mold substrate; S2, irradiating a laser onto the mold substrate through a mask having a preset shape of a light-transmitting area, forming a second preset shape irradiation area on the mold substrate, causing the mold substrate and the laser to move relative to each other along a second direction at a preset speed, and etching a second groove on the mold substrate that intersects with the first groove, and the intersection area of ​​the first groove and the second groove forms a three-dimensional needle tip mold; wherein, the first preset shape irradiation area has no continuous and identical portion along the length of the first direction, and the second preset shape irradiation area has no continuous and identical portion along the length of the second direction.

[0006] Preferably, the preset shape light-transmitting area is any one of a triangular light-transmitting area and a quasi-triangular light-transmitting area; the first preset shape illumination area is any one of a triangular illumination area and a quasi-triangular illumination area; the second preset shape illumination area is any one of a triangular illumination area and a quasi-triangular illumination area.

[0007] Preferably, the triangular irradiation area includes at least one angle formed by two sides of equal length, and the direction of the angle is consistent with the formation direction of the first groove or the second groove.

[0008] Preferably, a light-transmitting area of ​​the preset shape is provided on the mask; wherein, step S1 is repeated m times to form m parallel first grooves on the mold substrate, and step S2 is repeated n times to form n parallel second grooves on the mold substrate.

[0009] Preferably, a plurality of light-transmitting areas of the preset shape are provided on the mask, and the plurality of light-transmitting areas of the preset shape are not parallel to the first direction or the second direction.

[0010] Preferably, the mask plate of the preset shape light-transmitting area is provided with a kind of, wherein, before executing the step S2, the direction of the mask plate and / or the mold substrate is further adjusted, and then the second groove intersecting with the first groove is etched on the mold substrate.

[0011] Preferably, the first groove and the second groove are perpendicular to each other.

[0012] Preferably, a first preset shape transparent area is provided on the mask in step S1, and a second preset shape transparent area is provided on the mask in step S2, and the first preset shape transparent area and the second preset shape transparent area have different directions.

[0013] Preferably, a speed at which the mold substrate and the laser move relative to each other along the first direction is equal to a speed at which the mold substrate and the laser move relative to each other along the second direction.

[0014] The present invention provides a method for preparing a three-dimensional needle tip, comprising: sputtering a conductive metal on a three-dimensional needle tip mold formed by any of the preparation methods described above; electroforming a three-dimensional needle tip in the three-dimensional needle tip mold; and demolding the three-dimensional needle tip from the three-dimensional needle tip mold.

[0015] According to the above description and practice, the preparation method of the three-dimensional needle tip mold described in the present invention includes S1, irradiating the laser onto the mold substrate through a mask having a light-transmitting area of ​​a preset shape, forming a first preset shape irradiation area on the mold substrate, and making the mold substrate and the laser move relative to each other along a first direction at a preset speed, and etching a first groove on the mold substrate; the laser is mapped onto the mold substrate through the light-transmitting area of ​​the mask, and the frequency of the laser is controlled so that the first groove extends along the first direction on the mold substrate as a partial structure of the three-dimensional needle tip mold. S2. The laser is irradiated onto the mold substrate through a mask having a light-transmitting area of ​​a preset shape to form an irradiation area of ​​a second preset shape on the mold substrate. The mold substrate and the laser are moved relative to each other along a second direction at a preset speed to etch a second groove intersecting with the first groove on the mold substrate. The intersection area of ​​the first groove and the second groove forms a three-dimensional needle tip mold. Similarly, the direction of the laser on the mold substrate is changed, and the frequency of the laser is controlled so that the second groove extends along the second direction on the mold substrate as a partial structure of the three-dimensional needle tip mold, wherein the length of the first preset shape irradiation area along the first direction has no continuous and identical parts, and the length of the second preset shape irradiation area along the second direction has no continuous and identical parts, which ensures that when the laser etches the mold substrate, a pointed first groove and a second groove can be formed, and then a three-dimensional needle tip mold that meets the taper requirements can be formed according to the actual preset value, thereby improving the accuracy of the generated three-dimensional needle tip mold, and forming the first groove and the second groove by laser is relatively simple to operate and reduces the production cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The figure is a flow chart of a method for preparing a three-dimensional needle tip mold according to one embodiment of the present invention.

[0017] Figure 2 The figure is a flow chart of a method for preparing a three-dimensional needle tip mold according to another embodiment of the present invention.

[0018] Figure 3 The figure is a flow chart of a method for preparing a three-dimensional needle tip according to an embodiment of the present invention.

[0019] Figure 4 This is a structural diagram of a three-dimensional needle tip mold preparation device involved in one embodiment of the present invention.

[0020] Figure 5 4 is a structural diagram of a three-dimensional needle tip mold involved in one embodiment of the present invention.

[0021] Figure 6 Schematic diagram of the laser etching path of the three-dimensional needle tip mold involved in one embodiment of the present invention.

[0022] Figure 72 is a structural diagram of a three-dimensional needle tip involved in one embodiment of the present invention.

[0023] Figure 8 Schematic diagram of the shape of a triangular light-transmitting area of ​​a mask in one embodiment of the present invention.

[0024] Figure 9 This is a diagram showing the depth variation of the three-dimensional needle tip mold at different speeds and frequencies according to the preparation method of the present invention.

[0025] Figure 10 This is a side view of the needle tip mold at different speeds and frequencies according to the preparation method of the three-dimensional needle tip mold of the present invention. DETAILED DESCRIPTION

[0026] The exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, the exemplary embodiments can be embodied in many forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concepts of the exemplary embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

[0027] In addition, the accompanying drawings are only schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the figures represent the same or similar parts, and their repeated description will be omitted. It should be noted that in the present disclosure, the terms "including", "configured with", and "arranged on" are used to express open-ended inclusion and mean that in addition to the listed elements / components / etc., additional elements / components / etc. may be present; the terms "first", "second", etc. are used only as labels and do not limit the number or order of their objects; the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operate in a specific direction, and therefore should not be understood as limiting the present invention.

[0028] Unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be interpreted broadly. For example, they can refer to fixed, removable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediary; and internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in the present invention based on the specific circumstances.

[0029] The present invention discloses a method for preparing a three-dimensional needle tip mold. The preparation device of the three-dimensional needle tip mold is used. Figure 4 The three-dimensional needle tip mold preparation equipment includes a helium-neon laser 1, an excimer laser 2, a mask exchange platform 3, a reflector 4, a focusing lens 5, a sample placement platform 7, a moving platform 8, a motor 9, and a computer 10 equipped with a system control application. The computer 10 controls the entire preparation equipment to execute the preparation equipment. The mold substrate 6 is mounted on the sample placement platform 7. The moving platform 8 supports the sample placement platform 7 and is driven by the motor 9 to achieve three-dimensional movement. The helium-neon laser 1 is used to calibrate the optical path of the excimer laser 2. The excimer laser 2 uses a laser that can generate 248nm KrF laser. The reflector 4 is placed at a 45-degree angle to the horizontal plane, and the focusing lens 5 is placed between the sample placement platform 7 and the reflector 4. This ensures that the laser light is directed toward the center of the optical path of the mask exchange platform 3, passes through the light transmission area of ​​the mask, passes through the reflector 4, and reaches the mold substrate 6 vertically. The sample substrate 6 is made of organic glass to ensure that the sample substrate 6 still has a certain degree of stability under the irradiation of the helium-neon laser 1 and the excimer laser 2. For easier description, the subsequent preparation methods are all described using the above-mentioned preparation equipment.

[0030] Specifically, please refer to Figures 1 to 10 In some application scenarios, the preparation method of the three-dimensional needle tip mold includes:

[0031] S1. Irradiate the mold substrate 6 with a laser through a mask having a preset shape of a light-transmitting area to form a first preset shape irradiation area on the mold substrate 6. Move the mold substrate 6 and the laser relative to each other along a first direction at a preset speed to etch a first groove 61 on the mold substrate.

[0032] Among them, the laser emitted by the excimer laser 2 is mapped onto the mold substrate 6 through the light-transmitting area of ​​the mask on the mask exchange table 3. The frequency of the laser is controlled to form a first groove 61 extending along a first direction on the mold substrate 6. At this time, the first groove 61 serves as a part of the structure of the three-dimensional needle tip mold.

[0033] S2. Irradiate the mold substrate 6 with a laser through a mask having a light-transmitting area of ​​a preset shape, forming an irradiation area of ​​a second preset shape on the mold substrate 6, so that the mold substrate 6 and the laser move relative to each other along a second direction at a preset speed, and etch the mold substrate 6 to form a second groove 62 that intersects with the first groove 61. The intersection area of ​​the first groove 61 and the second groove 62 forms a three-dimensional needle tip mold.

[0034] Similarly, changing the direction of the laser or the mold substrate 6 changes the direction of the laser on the mold substrate 6, and controlling the frequency of the laser forms a second groove 62 extending along the second direction on the mold substrate 6 as a part of the structure of the three-dimensional needle tip mold.

[0035] Among them, the first preset shape irradiation area has no continuous and identical parts along the length of the first direction, and the second preset shape irradiation area has no continuous and identical parts along the length of the second direction, which ensures that when the laser etches the mold substrate, a pointed first groove and a second groove can be formed, and then a three-dimensional needle tip mold that meets the taper requirements can be formed according to the actual preset value, thereby improving the accuracy of the generated three-dimensional needle tip mold. On the other hand, the three-dimensional needle tip mold is formed by laser to form the first groove 61 and the second groove 62 respectively, which is relatively simple to operate and reduces the production cost.

[0036] It can be understood that since the laser emitted by the excimer laser 2 is invisible ultraviolet light, before using the excimer laser 2 to emit laser light to the mask exchange table 3, it is necessary to use the helium-neon laser 1 to calibrate the optical path of the excimer laser 2. At this time, the helium-neon laser 1 emits visible red light, and the optical path trajectory of the visible red light can vertically pass through the center of the light-transmitting area of ​​the mask. Specifically, photosensitive paper is placed on the path of the laser, and the spot positions of the visible red light emitted by the helium-neon laser 1 and the ultraviolet light emitted by the excimer laser 2 on the photosensitive paper are compared until the spot positions coincide and it can be determined that the optical paths of the helium-neon laser 1 and the excimer laser 2 coincide, thereby completing the laser path calibration.

[0037] Furthermore, in order to prevent the accumulated energy of the laser emitted by the excimer laser 2 from knocking the mask off the mask exchange table 3 when etching the mold substrate 6, before preparing the three-dimensional needle tip mold, it is necessary to adjust the positions of the mold substrate 6 and the mask for laser focusing, specifically including: taking another piece of organic glass with the same size as the mold substrate 6, fixing it on the sample placement table 7, the computer 10 controls the motor 9 to drive the moving table 8 to move in the vertical direction and perform dotting after adjustment, and repeatedly adjust until the image formed by the light-transmitting area of ​​the mask through the reflector 4 and the focusing lens 5 falls on the upper surface of the sample and the shape is not distorted, confirming that the vertical position at this time is the focus position, fixing the focus position, replacing the mold substrate 6, and preparing the three-dimensional needle tip mold.

[0038] In some application scenarios, in order to form a three-dimensional needle tip mold on the mold substrate 6 that better meets actual needs, the preset shaped light-transmitting area is either a triangular light-transmitting area or a quasi-triangular light-transmitting area. The projection onto the mold substrate 6 via the reflector 4 and the focusing lens 5 is triangular or quasi-triangular. In other words, the first preset shaped irradiation area is either a triangular irradiation area or a quasi-triangular irradiation area; the second preset shaped irradiation area is either a triangular irradiation area or a quasi-triangular irradiation area. As the excimer laser 2 emits laser light of a certain frequency, a first groove 61 and a second groove 62 with a triangular or quasi-triangular cross-section are formed. At this time, the overlapping portion of the first groove 61 and the second groove 62 can form a three-dimensional needle tip mold.

[0039] Furthermore, the size of the triangular light-transmitting area and the quasi-triangular light-transmitting area needs to be designed according to the actual required tip bottom size and the magnification of the focusing objective lens 5 . The magnification of the focusing objective lens is usually 15 times.

[0040] In order to form a three-dimensional needle tip mold that better meets actual needs, please refer to Figure 8 The triangular irradiation area includes at least one angle formed by two equal-length sides, and the direction of the angle is consistent with the formation direction of the first groove 61 or the second groove 62. The three-dimensional needle tip formed by the mold has sufficient taper and the edge size of the three-dimensional needle tip is consistent. During application, there is no need for large cutting adjustments to the size, which simplifies subsequent operations and reduces the cost requirements of manpower and material resources.

[0041] Furthermore, the method for preparing a three-dimensional needle tip mold can also be used to prepare multiple three-dimensional needle tip molds on a mold substrate 6 to improve the overall preparation efficiency of the three-dimensional needle tip in subsequent operations. In some application scenarios, a preset shape transparent area is provided on the mask, wherein:

[0042] Repeat step S1 m times to form m parallel first grooves on the mold substrate. After forming one first groove 61, the mold substrate 6 and the laser are moved in a direction different from the first direction, and step S1 is performed again to form multiple non-overlapping and parallel first grooves 61.

[0043] Repeat step S2 n times to form n parallel second grooves on the mold substrate. Similarly, after forming one second groove 62, the mold substrate 6 and the laser are moved in a direction different from the second direction, and step S2 is repeated again to form multiple non-overlapping and parallel second grooves 62. At this point, on the mold substrate 6, multiple intersections of the first grooves 61 and the second grooves 62 form a three-dimensional needle tip mold at the locations where the multiple first grooves 61 and the multiple second grooves 62 overlap. When subsequently generating a three-dimensional needle tip, multiple three-dimensional needle tips can be formed on the mold substrate 6, greatly improving the efficiency of preparing three-dimensional needle tips using this three-dimensional needle tip mold without requiring additional complex operating steps.

[0044] It is understandable that in some application scenarios, m steps S1 and n steps S2 can be cross-etched to form the first groove 61 and the second groove 62 according to actual needs. The specific order of the multiple steps S1 and S2 is not limited herein.

[0045] In other application scenarios, a plurality of light-transmitting areas of preset shapes are provided on the mask plate, that is, a plurality of laser beams can be provided, and each laser beam corresponds to a light-transmitting area of ​​preset shape. At this time, the object image mapped on the sample substrate 6 is a plurality of first preset shape irradiation areas arranged in parallel, so that the mold substrate 6 and the laser move relative to each other along the first direction at a preset speed, and a plurality of parallel first grooves 61 are etched on the mold substrate 6. Similarly, the object image on the sample substrate 6 is a plurality of second preset shape irradiation areas arranged in parallel, so that the mold substrate 6 and the laser move relative to each other along the second direction at a preset speed, and a plurality of parallel second grooves 62 are etched on the mold substrate 6. At this time, only step S1 and step S2 need to be performed once to form a plurality of three-dimensional needle tip molds on the mold substrate 6, and when a three-dimensional needle tip is generated subsequently, a plurality of three-dimensional needle tips can be formed on the mold substrate 6. The multiple preset-shaped light-transmitting areas are not parallel to the first direction or the second direction, which prevents the laser from mapping the preset-shaped irradiation areas parallel to the mold substrate 6 through the multiple preset-shaped light-transmitting areas to coincide with the first direction or the second direction, resulting in the laser etching multiple times in the same direction on the mold substrate 6. Multiple laser beams and multiple preset-shaped light-transmitting areas can only form a three-dimensional needle tip mold. In serious cases, the mold substrate 6 may be damaged due to repeated etching of the same part of the mold substrate 6.

[0046] In order to form the first groove 61 and the second groove 62 in different directions, it is necessary to adjust the shape and orientation of the light-transmitting area on the mask. In some application scenarios, a mask with a preset shape of the light-transmitting area is provided. Before executing step S2, the following is further included:

[0047] Step S20: Adjust the direction of the mask plate and / or the mold substrate 6 so that the laser forms a second preset shape irradiation area on the mold substrate 6 in a direction different from the first preset shape irradiation area, thereby etching the mold substrate 6 to form a second groove 62 that intersects with the first groove 61 to form a three-dimensional needle tip mold.

[0048] It is understood that when the direction of the second predetermined shaped irradiation area is adjusted by adjusting the orientation of the mold substrate 6, the laser light emitted by the excimer laser 2 is in the same direction as the mold substrate 6 along the first direction and the second direction. When the direction of the second predetermined shaped irradiation area is adjusted by adjusting the orientation of the mask, the laser light emitted by the excimer laser 2 is in different directions from the mold substrate 6 along the first direction and the second direction.

[0049] In some application scenarios, the first groove and the second groove are perpendicular to each other to form a three-dimensional needle tip with more regular size and greater taper.

[0050] In other application scenarios, the mask in step S1 is provided with a light-transmitting area of ​​a first preset shape, and the mask in step S2 is provided with a light-transmitting area of ​​a second preset shape, with the first and second light-transmitting areas oriented in different directions. Prior to step S2, the mask on the mask exchange stage 3 is replaced, and after the helium-neon laser 1 and the excimer laser 2 are focused, the mold substrate 6 and the laser are moved relative to each other in a second direction at a preset speed, etching the mold substrate 6 to form a second groove 62 that intersects the first groove 61. The intersection of the first groove 61 and the second groove 62 forms a three-dimensional needle tip mold.

[0051] In some application scenarios, the speed at which the mold substrate 6 and the laser move relative to each other along the first direction is equal to the speed at which the mold substrate 6 and the laser move relative to each other along the second direction. Figure 9 and Figure 10 The moving speed of the mold substrate 6 is 0.01mm / s-0.002mm / s, the frequency of the pulsed laser emitted by the excimer laser 2 is 10Hz-20Hz, and the movable stage 8 drives the sample placement stage 7 to move a distance of 1-4mm, ensuring that the energy density accumulated on the surface of the mold substrate 6 is the same, and a three-dimensional needle tip mold with the same depth and taper can be formed at the first groove 61 and the second groove 62.

[0052] The present invention provides a method for preparing a three-dimensional needle tip, comprising:

[0053] Step S10: sputtering a conductive metal on the three-dimensional needle tip mold formed by any of the above preparation methods.

[0054] The three-dimensional needle tip mold is placed in the electroplating machine, and the vacuum chamber pressure reaches 1.1×10 -4 mbar, and then sputtering was performed. The current range of the sputtering was 9.92A-10.16A, the voltage range was 735V-761V, and the sputtering power range was 7.21-7.73Kw. The sputtering power was kept at 1.5×10 -3 mbar, cycle time 9.99 seconds, sputtering time set to 1.8 seconds, argon flow rate 6 sccm, argon flow deviation 20%. Under these conditions, sputtering is performed four times to achieve sputtering of a conductive metal layer on the entire three-dimensional needle tip mold, where the metal of the conductive metal layer can be nickel.

[0055] It can be understood that before sputtering the three-dimensional needle tip mold, it also includes: cleaning the three-dimensional needle tip mold. The cleaning process can be carried out by rinsing the three-dimensional needle tip mold with ultrapure water for three minutes and then blowing it dry with clean nitrogen gas, so that the residue is flushed away while preventing non-pure water or other chemical components inside other gases from reacting with the three-dimensional needle tip mold, thereby affecting the shape and properties of the three-dimensional needle tip mold, and avoiding residues from being deposited in the three-dimensional needle tip mold during etching, thereby affecting the cleanliness of the entire three-dimensional needle tip mold.

[0056] Step S11: forming a three-dimensional needle tip by electroforming deposition in a three-dimensional needle tip mold.

[0057] The electroplated three-dimensional needle tip mold is placed in the electroforming equipment, and the pulse current and low current are used in sequence to electroform the process to improve the uneven thickness of the three-dimensional needle tip or the occurrence of electroforming nodules. Specifically, the frequency is 10 3 Hz pulse current, the growth rate is 3.2μm / Ah. After 10 hours of growth, it is switched to a small current of 1-2A to improve the growth efficiency. After 60 hours of growth, a needle tip with a depth of more than 600μm is obtained.

[0058] Understandably, the current setting within the electroforming equipment is crucial. A current setting that is too high results in an excessively rapid metal deposition rate, resulting in a rough and uneven surface of the resulting 3D needle tip. This reduces the density and strength of the 3D needle tip, impacting its quality. A current setting that is too low results in a slow growth rate of the 3D needle tip, lowering production efficiency.

[0059] Step S12: Demolding the three-dimensional needle tip from the three-dimensional needle tip mold.

[0060] After the growth of the needle tip is completed, the three-dimensional needle tip is taken out from the entire mold substrate 6. The repeated etching area of ​​the first groove 61 and the second groove 62 is the tapered area of ​​the three-dimensional needle tip. After the three-dimensional needle tip is cleaned with ultrapure water, it is cut into the required size using a laser to form a desired shape. Figure 8 A single three-dimensional needle tip.

[0061] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. A method for preparing a three-dimensional needle tip mold, characterized in that: include: S1, irradiating a laser onto a mold substrate through a mask having a light-transmitting area of ​​a preset shape, forming an irradiation area of ​​a first preset shape on the mold substrate, causing the mold substrate and the laser to move relative to each other along a first direction at a preset speed, and etching a first groove on the mold substrate; S2, irradiating the mold substrate with a laser through a mask having a preset shape of a light-transmitting area, forming a second preset shape irradiation area on the mold substrate, making the mold substrate and the laser move relative to each other along a second direction at a preset speed, etching a second groove intersecting the first groove on the mold substrate, and forming a three-dimensional needle tip mold at the intersection of the first groove and the second groove; wherein, The length of the first preset shape irradiation area along the first direction has no continuous and identical portion, and the length of the second preset shape irradiation area along the second direction has no continuous and identical portion.

2. The preparation method according to claim 1, characterized in that The preset shape light-transmitting area is any one of a triangular light-transmitting area and a quasi-triangular light-transmitting area; The first preset shape illumination area is any one of a triangular illumination area and a quasi-triangular illumination area; The second preset shape illumination area is any one of a triangular illumination area and a quasi-triangular illumination area.

3. The preparation method according to claim 2, characterized in that: The triangular irradiation area at least includes an angle formed by two sides of equal length, and the direction of the angle is consistent with the formation direction of the first groove or the second groove.

4. The preparation method according to claim 1, characterized in that: The mask is provided with a light-transmitting area of ​​the preset shape; wherein, Step S1 is repeated m times to form m parallel first grooves on the mold substrate, and step S2 is repeated n times to form n parallel second grooves on the mold substrate.

5. The preparation method according to claim 1, characterized in that: A plurality of light-transmitting areas of the preset shape are arranged on the mask plate, and the plurality of light-transmitting areas of the preset shape are not parallel to the first direction or the second direction.

6. The preparation method according to claim 1, characterized in that: The mask of the preset light-transmitting area is provided with a type, wherein: Before executing the step S2, the method further includes: adjusting the direction of the mask plate and / or the mold substrate, and then etching the mold substrate to form the second groove intersecting the first groove.

7. The preparation method according to claim 6, characterized in that: The first groove and the second groove are perpendicular to each other.

8. The preparation method according to claim 1, characterized in that: The mask in step S1 is provided with a light-transmitting area of ​​a first preset shape, and the mask in step S2 is provided with a light-transmitting area of ​​a second preset shape, and the first light-transmitting area of ​​the first preset shape and the second light-transmitting area of ​​the second preset shape have different directions.

9. The preparation method according to any one of claims 1 to 8, characterized in that The speed at which the mold substrate and the laser move relative to each other along the first direction is equal to the speed at which the mold substrate and the laser move relative to each other along the second direction.

10. A method for preparing a three-dimensional needle tip, characterized in that: include: Sputtering a conductive metal on the three-dimensional needle tip mold formed by the preparation method according to any one of claims 1 to 9; Electroforming and depositing in the three-dimensional needle tip mold to form a three-dimensional needle tip; The three-dimensional needle tip is demoulded and removed from the three-dimensional needle tip mold.

Images