Adjusting device and adjusting method for inclined machining of scribing machine

Abstract

The invention discloses an inclination machining adjusting device and method for a scribing machine. The inclination machining adjusting device at least comprises a workbench assembly, a scribing cutting assembly, an inclination adjusting mechanism and a controller. The scribing and cutting assembly is located above the workbench assembly, the inclination adjusting mechanism is arranged on the scribing and cutting assembly, and the inclination angle of the scribing and cutting assembly is adjusted through the inclination adjusting mechanism; the inclination adjusting mechanism comprises an angle sensor, and the angle sensor feeds back and adjusts the inclination angle of the scribing cutting assembly according to a signal of the controller. According to the adjusting device and method for inclined machining of the scribing machine, the inclined angle of the cutting tool can be accurately adjusted, operation is easy and convenient through an automatic setting mode, stability is high, multiple practical functions are achieved, and the requirements for inclined cutting in the fields of modern semiconductor manufacturing, electronic element machining and the like are met.

Description

Technical Field

[0001] The present invention belongs to the technical field of mechanical processing equipment, and relates to a dicing machine equipment capable of realizing tilt processing, and specifically relates to a dicing machine tilt processing adjustment device and an adjustment method. Background Art

[0002] In the fields of semiconductor manufacturing, electronic component processing, etc., a dicing machine is a key device used to cut wafers or other sheet materials into individual chips. Due to the diversity of customer needs, for some chips with special structures or under specific processing requirements, the cutting angle of the dicing machine needs to be tilted to achieve a special cutting effect.

[0003] Most traditional dicing machines can only perform vertical cutting, such as Figure 1 to Figure 2 As shown, for situations where inclined cutting is required, it is necessary to add an adjustment block, manually adjust the spindle inclination angle, and continuously correct and adjust the installation position to achieve the inclination angle.

[0004] At present, the angle adjustment of the dicing machine has the following shortcomings: first, the adjustment accuracy is low, and it is difficult to accurately control the tilt angle, resulting in large deviations in the cutting size, affecting product quality; second, the adjustment operation is complicated, requiring a lot of time and manpower, reducing production efficiency; third, the existing adjustment device lacks feedback monitoring. If an angle deviation occurs during the cutting process, the cut product will be scrapped. Summary of the invention

[0005] The present invention aims to provide a dicing machine tilt processing adjustment device and adjustment method, which can adjust the spindle inclination of a standard dicing machine to achieve the tilt processing requirements by solving the problems of low accuracy, complex operation, lack of feedback monitoring, cumbersome tilt angle adjustment, and fixed angle in the angle adjustment of a traditional dicing machine.

[0006] In order to achieve the above object, the present invention provides the following technical solutions:

[0007] A dicing machine tilting adjustment device, the tilting adjustment device at least comprises a workbench assembly, a dicing and cutting assembly, a tilting adjustment mechanism and a controller; the dicing and cutting assembly is located above the workbench assembly, the tilting adjustment mechanism is arranged on the dicing and cutting assembly, and the tilting adjustment mechanism adjusts the tilt angle of the dicing and cutting assembly; wherein,

[0008] The tilt adjustment mechanism includes an angle sensor, and the angle sensor feeds back and adjusts the tilt angle of the dicing and cutting assembly according to a signal from a controller.

[0009] In an alternative embodiment, the dicing and cutting assembly includes at least a lifting motor, a Z-axis lead screw, a Z-axis slide, a spindle, a spindle seat, and a cutting tool;

[0010] The cutting tool is installed on the main shaft, and the main shaft is fixedly connected to the bottom of the tilt adjustment mechanism through the main shaft seat, and the top of the tilt adjustment mechanism is fixedly connected to the Z-axis slide. The lifting motor is connected to the Z-axis slide through the Z-axis screw rod, thereby driving the cutting tool to move in the vertical direction.

[0011] In an alternative embodiment, the dicing and cutting assembly further includes a Z coupling, and the Z-axis screw rod is connected to the lifting motor via the Z coupling.

[0012] In a replaceable embodiment, the tilt adjustment mechanism also includes an angle adjustment seat, an angle rotation shaft and an angle adjustment motor; the angle sensor is installed on the outer surface of the angle adjustment seat, the upper surface of the angle adjustment seat is fixedly connected to the Z-axis slide, the angle rotation shaft is installed in the angle adjustment seat, and one end of the angle rotation shaft is fixedly connected to the spindle seat, and the other end is accommodated in the angle adjustment seat and connected to the output shaft of the angle adjustment motor, the angle adjustment motor controls the rotation of the angle rotation shaft, and the angle rotation shaft drives the spindle and the cutting tool to rotate through the spindle seat.

[0013] In an alternative embodiment, the angular rotation axis is driven and controlled by a worm gear mechanism and guides the inclination of the main shaft by an arc-shaped V-shaped guide rail.

[0014] In an alternative embodiment, the controller is electrically connected to the tilt adjustment mechanism, the input signal of the controller includes a preset tilt angle value and a current actual angle value of the angle sensor, and the controller outputs an adjustment signal to the angle adjustment motor and controls the rotation of the angle adjustment motor.

[0015] In an alternative embodiment, a display module is provided on the angle adjustment motor, and the display module is connected to the controller and displays a preset tilt angle value, a current actual angle value and equipment working status information.

[0016] In an alternative embodiment, the workbench assembly includes a workbench and a direct-drive motor, the object to be cut is placed on the surface of the workbench, and the direct-drive motor controls the workbench to always be in a horizontal state.

[0017] The present invention also provides a method for adjusting the dicing machine tilt processing adjustment device using the above-mentioned dicing machine tilt processing adjustment device, and the adjustment method comprises:

[0018] The direct drive motor adjusts the workbench to a horizontal state, and the angle sensor obtains the current actual angle value and feeds it back to the controller;

[0019] The controller receives a preset tilt angle value and a current actual angle value, and calculates a rotation angle of the angle adjustment motor;

[0020] The angle adjustment motor controls the rotation of the angle rotation shaft according to the above rotation angle, and the angle sensor monitors the rotation angle of the angle rotation shaft in real time and feeds back the current actual angle value to the controller;

[0021] When the current actual angle value fed back by the angle sensor is the same as the preset tilt angle value, the controller controls the angle adjustment motor to stop rotating, thereby completing the tilt angle adjustment of the cutting tool;

[0022] The lifting motor drives the cutting tool to perform cutting movement through the Z-axis lead screw.

[0023] In an alternative embodiment, the lifting motor drives the cutting tool to perform cutting motion via the Z-axis screw further comprises:

[0024] The angle sensor continuously monitors the inclination angle of the cutting tool, and when the inclination angle is different from the preset inclination angle value, the angle sensor feeds back the current actual angle value to the controller;

[0025] The controller calculates the fine-tuning rotation angle of the angle adjustment motor according to the preset tilt angle value and the current actual angle value, and the angle adjustment motor is adjusted according to the fine-tuning rotation angle.

[0026] Beneficial effects of the present invention:

[0027] 1. High-precision angle adjustment. The present invention uses an angle sensor to monitor the angle of the rotating shaft in real time. Combined with a drive motor and a controller, it can achieve precise tilt angle adjustment, ensure the accuracy of the cutting size, and improve product quality.

[0028] 2. Convenient operation. The present invention simplifies the operation process by setting up a controller and a display module, so that the operator can intuitively understand the working status and angle information of the device.

[0029] 3. Good stability. The high-precision worm gear mechanism of the present invention improves the stability of the device during tilt adjustment and cutting, reduces the risk of angle deviation, and reduces the probability of cutting failure and product scrapping. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a schematic diagram of the structure of a traditional dicing machine.

[0031] Figure 2 Schematic diagram of the structure of the angle adjustment of traditional dicing machine equipment.

[0032] Figure 3 It is a schematic structural diagram of the tilt processing adjustment device of the present invention.

[0033] Figure 4It is a structural stereogram of the tilt processing adjustment device of the present invention.

[0034] Figure 5 It is a structural front view of the tilt processing adjustment device of the present invention.

[0035] Figure 6 It is a top view of the structure of the tilt processing adjustment device of the present invention.

[0036] Figure markings: 1-lifting motor, 2-Z coupling, 3-Z-axis screw, 4-Z-axis slide, 5-angle adjustment seat, 6-angle sensor, 7-angle rotation axis, 8-angle adjustment motor, 9-spindle seat, 10-spindle, 11-cutting tool, 12-workbench, 13-direct drive motor. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solution and advantages of this application clearer, the technical solution in the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiment of the present invention. Obviously, the described embodiment is only a part of the embodiment of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0038] Embodiments of the present invention, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The terms "first", "second", "third", etc. (if any) in the specification and claims of the present invention and the accompanying drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the objects described in this way can be interchanged where appropriate. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions. The directional terms mentioned in the present invention, such as: up, down, left, right, front, back, inside, outside, side, etc., are only reference directions of the accompanying drawings. The embodiments described below by reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention. In addition, the present invention repeats reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present invention provides examples of various specific processes and materials, but a person of ordinary skill in the art can recognize the application of other processes and / or the use of other materials.

[0039] like Figure 3-Figure 6As shown, the dicing machine tilting adjustment device of the present invention comprises at least a workbench assembly, a dicing and cutting assembly, a tilting adjustment mechanism and a controller. The dicing and cutting assembly is located above the workbench assembly, the tilting adjustment mechanism is arranged on the dicing and cutting assembly, and the tilting adjustment mechanism adjusts the tilt angle of the dicing and cutting assembly.

[0040] Specifically, the dicing and cutting assembly at least includes a lifting motor 1 , a Z-axis lead screw 3 , a Z-axis slide 4 , a spindle 10 , a spindle seat 9 and a cutting tool 11 .

[0041] The cutting tool 11 is mounted on the spindle 10, and the spindle 10 is fixedly connected to the bottom of the tilt adjustment mechanism through the spindle seat 9, and the top of the tilt adjustment mechanism is fixedly connected to the Z-axis slide 4. The lifting motor 1 is connected to the Z-axis slide 4 through the Z-axis screw rod 3, thereby driving the cutting tool 11 to move in the vertical direction. When the tilt adjustment device completes the adjustment of the tilt angle of the cutting tool 11, the lifting motor 1 drives the cutting tool 11 to move downward in the vertical direction to cut the object to be cut on the workbench assembly. When the cutting is completed or the tilt angle of the cutting tool 11 needs to be adjusted, the lifting motor 1 drives the cutting tool 11 to move upward in the vertical direction.

[0042] Furthermore, the dicing and cutting assembly also includes a Z coupling 2, and the Z-axis screw rod 3 is connected to the lifting motor 1 through the Z coupling 2.

[0043] Specifically, the tilt adjustment mechanism at least includes an angle adjustment seat 5, an angle sensor 6, an angle rotation shaft 7 and an angle adjustment motor 8. The angle sensor 6 feeds back and adjusts the tilt angle of the dicing cutting assembly according to a signal from the controller.

[0044] In addition, the angle sensor 6 can be installed on the outer surface of the angle adjustment seat 5 to monitor the rotation angle of the angle rotation shaft 7 in real time, thereby accurately feeding back the inclination angle of the cutting tool 11 .

[0045] Preferably, the angle sensor 6 is in the shape of an arc, and there is a rotation angle scale on the angle sensor 6. After the angle rotation shaft 7 rotates, the scale allows the operator to visually observe the tilt angle.

[0046] The upper surface of the angle adjustment seat 5 is fixedly connected to the Z-axis slide 4, the angle rotation shaft 7 is installed in the angle adjustment seat 5, and one end of the angle rotation shaft 7 is fixedly connected to the spindle seat 9, and the other end is accommodated in the angle adjustment seat 5 and connected to the output shaft of the angle adjustment motor 8. The angle adjustment motor 8 controls the rotation of the angle rotation shaft 7, and the angle rotation shaft 7 drives the spindle 10 and the cutting tool 11 to rotate through the spindle seat 9.

[0047] Furthermore, the angular rotation shaft 7 is driven and controlled by a worm gear mechanism and guides the inclination of the main shaft 10 by an arc-shaped V-shaped guide rail, thereby achieving large load and high-precision control of the inclination processing of the dicing machine.

[0048] Optionally, the controller is electrically connected to the tilt adjustment mechanism, and the input signal of the controller includes a preset tilt angle value and a current actual angle value of the angle sensor 6. The controller outputs an adjustment signal to the angle adjustment motor 8 and controls the rotation of the angle adjustment motor 8. Due to the connection between the angle adjustment motor 8 and the controller, the controller controls the rotation of the angle adjustment motor 8 according to the preset tilt angle value and the actual angle value fed back by the angle sensor 6, thereby accurately adjusting the tilt angle of the cutting tool 11.

[0049] Preferably, a display module is provided on the angle adjustment motor 8, and the display module is connected to the controller and displays a preset tilt angle value, a current actual angle value and equipment working status information.

[0050] Specifically, the workbench assembly includes a workbench 12 and a direct drive motor 13. The object to be cut is placed on the surface of the workbench 12, and the direct drive motor 13 controls the workbench 12 to always be in a horizontal state.

[0051] Since the workbench of the dicing machine is the equipment reference, the workbench 12 needs to be adjusted horizontally to ensure that the objects to be cut placed on the workbench 12 are in a horizontal state as a whole.

[0052] In order to better express the characteristics of the dicing machine tilt processing adjustment device of the present invention, the present invention also protects the adjustment method of the dicing machine tilt processing adjustment device, and the adjustment method includes at least three modules: equipment initialization, tilt angle adjustment and cutting operation, and specifically includes the following steps:

[0053] 1. Equipment initialization step module

[0054] In this module, the dicing machine equipment needs to perform normal initialization, component inspection, equipment self-test, etc. The direct drive motor 13 adjusts the workbench 12 to be in a horizontal state, and the angle sensor 6 obtains the current actual angle value and feeds it back to the controller.

[0055] Specifically, during the initialization process, the dicing machine workbench needs to be adjusted horizontally to be in a horizontal state, thereby ensuring that the workbench 12 is in a horizontal state.

[0056] Check whether the connections between the various components are firm, turn on the power, start the dicing machine equipment software, and the controller performs a self-check. At the same time, the angle sensor 6 obtains the initial angle value, that is, the current actual angle in the initial state, and feeds back the current actual angle to the controller. Preferably, the current actual angle in the initial state is 0°

[0057] 2. Tilt angle adjustment step module

[0058] In this module, the inclination angle of the cutting tool 11 of the dicing and cutting assembly is adjusted by the inclination adjustment mechanism.

[0059] The controller receives a preset tilt angle value and a current actual angle value, and calculates the rotation angle of the angle adjustment motor 8 .

[0060] Specifically, the operator inputs a preset tilt angle value through the device operation interface of the controller according to the processing requirements. Preferably, if the cutting tool 11 needs to be tilted 30° for cutting, the tilt angle of the cutting tool 11 is set to 30° on the controller.

[0061] The angle adjustment motor 8 controls the rotation of the angle rotation shaft 7 according to the above rotation angle, and the angle sensor 6 monitors the rotation angle of the angle rotation shaft 7 in real time and feeds back the current actual angle value to the controller.

[0062] Specifically, the controller calculates the angle that the angle adjustment motor 8 needs to rotate according to the current actual angle value fed back by the angle sensor 6. The controller controls the angle adjustment motor 8 to rotate in a predetermined direction (clockwise or counterclockwise). The angle adjustment motor 8 drives the angle rotation shaft 6 to rotate, and the angle rotation shaft 6 drives the spindle 10 and the cutting tool 11 to rotate around the angle rotation shaft 6. During the rotation process, the angle sensor 6 monitors the rotation angle of the angle rotation shaft 6 in real time and feeds back the actual angle value to the controller.

[0063] Preferably, the controller calculates that the angle adjustment motor 8 needs to rotate 30° according to the current actual angle value 0° and the preset tilt angle value 30°.

[0064] When the current actual angle value fed back by the angle sensor 6 is the same as the preset tilt angle value, the controller controls the angle adjustment motor 8 to stop rotating, thereby completing the tilt angle adjustment of the cutting tool 11 .

[0065] Preferably, when the actual angle value fed back by the angle sensor 6 reaches 30°, the controller controls the angle adjustment motor 8 to stop rotating, thereby completing the tilt angle adjustment of the cutting tool 11 .

[0066] 3. Cutting operation steps module

[0067] In this module, the cutting tool is controlled to perform cutting and is monitored to determine whether the inclination angle of the cutting tool needs to be fine-tuned.

[0068] The lifting motor 1 drives the cutting tool 11 to perform cutting motion via the Z-axis lead screw 3 .

[0069] Specifically, after the inclination angle of the cutting tool 11 is adjusted, the lifting motor 1 drives the main shaft 10 to move downward through the Z-axis screw rod 3, thereby driving the cutting tool 11 to perform cutting movement.

[0070] In order to fine-tune and monitor the inclination angle of the cutting tool during the cutting process, the lifting motor 1 drives the cutting tool 11 through the Z-axis screw rod 3 to perform cutting movement, which further includes:

[0071] The angle sensor 6 continuously monitors the inclination angle of the cutting tool 11 . When the inclination angle is different from the preset inclination angle value, the angle sensor 6 feeds back the current actual angle value to the controller.

[0072] Specifically, since the angle sensor 6 continuously monitors the inclination angle of the cutting tool 11, if the cutting angle is slightly offset due to external interference or equipment abnormality, that is, it is different from the preset inclination angle value, the angle sensor 6 will feed back the actual angle value to the controller. Preferably, the inclination angle of the cutting tool 11 is offset from 30° to 30.5°.

[0073] The controller calculates the fine-tuning rotation angle of the angle adjustment motor 8 according to the preset tilt angle value and the current actual angle value, and the angle adjustment motor 8 is adjusted according to the fine-tuning rotation angle.

[0074] Preferably, the controller calculates the actual angle to be adjusted as -0.5° from the received 30.5°, and then controls the driving angle motor 8 to perform reverse fine adjustment to restore the inclination angle of the cutting tool 11 to 30°, thereby ensuring the accuracy of the cutting angle.

[0075] The dicing machine tilt adjustment device and adjustment method of the present invention can accurately adjust the tilt angle of the cutting tool. Through the automatic setting mode, the operation is simple and the stability is high. It no longer relies on manual adjustment to control the angle, which simplifies the adjustment process. The tilt angle of the cutting tool is accurately adjusted through the motor control scheme, and the blade angle information can be monitored during the dicing process, reducing the risk of angle deviation. It has multiple practical functions and meets the needs of modern semiconductor manufacturing, electronic component processing and other fields for tilted cutting.

[0076] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0077] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims

1. A dicing machine tilt processing adjustment device, characterized in that: The tilt processing adjustment device at least includes a workbench assembly, a dicing and cutting assembly, a tilt adjustment mechanism and a controller; the dicing and cutting assembly is located above the workbench assembly, the tilt adjustment mechanism is arranged on the dicing and cutting assembly, and the tilt adjustment mechanism adjusts the tilt angle of the dicing and cutting assembly; wherein, The tilt adjustment mechanism comprises an angle sensor (6), and the angle sensor (6) feeds back and adjusts the tilt angle of the dicing and cutting assembly according to a signal from the controller.

2. The dicing machine tilt processing adjustment device according to claim 1, characterized in that: The dicing and cutting assembly at least comprises a lifting motor (1), a Z-axis lead screw (3), a Z-axis slide (4), a spindle (10), a spindle seat (9) and a cutting tool (11); The cutting tool (11) is mounted on a main shaft (10); the main shaft (10) is fixedly connected to the bottom of a tilt adjustment mechanism via a main shaft seat (9); the top of the tilt adjustment mechanism is fixedly connected to a Z-axis slide (4); the lifting motor (1) is connected to the Z-axis slide (4) via a Z-axis lead screw (3), thereby driving the cutting tool (11) to move in a vertical direction.

3. The dicing machine tilt processing adjustment device according to claim 2, characterized in that: The dicing and cutting assembly also includes a Z coupling (2), and the Z-axis screw rod (3) is connected to the lifting motor (1) via the Z coupling (2).

4. The dicing machine tilt processing adjustment device according to claim 2, characterized in that: The tilt adjustment mechanism also includes an angle adjustment seat (5), an angle rotation shaft (7) and an angle adjustment motor (8); the angle sensor (6) is mounted on the outer surface of the angle adjustment seat (5); the upper surface of the angle adjustment seat (5) is fixedly connected to the Z-axis slide (4); the angle rotation shaft (7) is mounted in the angle adjustment seat (5); one end of the angle rotation shaft (7) is fixedly connected to the spindle seat (9); the other end is accommodated in the angle adjustment seat (5) and connected to the output shaft of the angle adjustment motor (8); the angle adjustment motor (8) controls the rotation of the angle rotation shaft (7); and the angle rotation shaft (7) drives the spindle (10) and the cutting tool (11) to rotate through the spindle seat (9).

5. The dicing machine tilt processing adjustment device according to claim 4, characterized in that: The angular rotation axis (7) is driven and controlled by a worm gear mechanism and guides the inclination of the main axis (10) by an arc-shaped V-shaped guide rail.

6. The dicing machine tilt processing adjustment device according to claim 4, characterized in that: The controller is electrically connected to the tilt adjustment mechanism, the input signal of the controller includes a preset tilt angle value and a current actual angle value of the angle sensor (6), and the controller outputs an adjustment signal to the angle adjustment motor (8) and controls the rotation of the angle adjustment motor (8).

7. The dicing machine tilt processing adjustment device according to claim 6, characterized in that: The angle adjustment motor (8) is provided with a display module, which is connected to the controller and displays a preset tilt angle value, a current actual angle value and equipment working status information.

8. The dicing machine tilt processing adjustment device according to claim 1, characterized in that: The workbench assembly comprises a workbench (12) and a direct-drive motor (13); an object to be cut is placed on the surface of the workbench (12); and the direct-drive motor (13) controls the workbench (12) to always be in a horizontal state.

9. A method for adjusting the dicing machine tilt processing adjustment device using any one of claims 1 to 8, characterized in that: The adjustment method comprises: The direct drive motor (13) adjusts the workbench (12) to be in a horizontal state, and the angle sensor (6) obtains the current actual angle value and feeds it back to the controller; The controller receives a preset tilt angle value and a current actual angle value, and calculates the rotation angle of the angle adjustment motor (8); The angle adjustment motor (8) controls the rotation of the angle rotation shaft (7) according to the above rotation angle, and the angle sensor (6) monitors the rotation angle of the angle rotation shaft (7) in real time and feeds back the current actual angle value to the controller; When the current actual angle value fed back by the angle sensor (6) is the same as the preset tilt angle value, the controller controls the angle adjustment motor (8) to stop rotating, thereby completing the tilt angle adjustment of the cutting tool (11); The lifting motor (1) drives the cutting tool (11) to perform cutting movement via the Z-axis lead screw (3).

10. The adjustment method according to claim 9, characterized in that: The lifting motor (1) drives the cutting tool (11) to perform cutting motion via the Z-axis lead screw (3) further comprising: The angle sensor (6) continuously monitors the inclination angle of the cutting tool (11); when the inclination angle is different from a preset inclination angle value, the angle sensor (6) feeds back the current actual angle value to the controller; The controller calculates the fine-tuning rotation angle of the angle adjustment motor (8) according to a preset tilt angle value and a current actual angle value, and the angle adjustment motor (8) is adjusted according to the fine-tuning rotation angle.

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