Probe station

Abstract

The invention discloses a probe station. The probe station comprises a rack, a support table, a vacuum chamber, a workpiece support device, a closed cycle refrigerator, a probe arm device and a workpiece detection device, the probe arm device comprises a detection probe mechanism, a probe driving mechanism and a probe positioning mechanism; the closed cycle refrigerator comprises a refrigeration counterweight mechanism, a refrigeration support, a refrigerator body, a first refrigeration head, a second refrigeration head and a vacuum shield. The first refrigeration head and the second refrigeration head are connected with the workpiece supporting device, and effective refrigeration of the workpiece is achieved; the vacuum shield sleeves the outer sides of the first refrigeration head and the second refrigeration head and is communicated with the vacuum chamber to form an integral vacuum cooling environment; a low-temperature testing environment is provided through the closed cycle refrigerator, the problems of high cost, large potential safety hazards, environmental risks and the like of a traditional liquid refrigerant are solved, and the accuracy and efficiency of testing are ensured through accurate positioning of the probe arm device.

Description

Technical Field

[0001] The present application relates to the field of semiconductor detection technology, and in particular to a probe station. Background Art

[0002] A probe station is a device used to test electronic products such as semiconductor devices, integrated circuits, and optoelectronic components. It can measure electrical performance parameters such as voltage, current, and signal transmission by contacting the test points with precisely positioned probes. Traditional probe stations usually use liquid refrigerants to achieve a low-temperature testing environment, but this method is not only expensive, increasing the cost of each test; but also, leakage or improper handling of the refrigerant can pose a safety hazard, especially during operation, which can increase the complexity and risk of equipment use; and liquid refrigerants can also have a negative impact on the environment, causing chemical pollution or greenhouse gas emissions, especially when used for a long time and disposed of improperly; therefore, existing probe stations have problems such as high cost, great safety hazards, and environmental risks. Summary of the invention

[0003] In order to improve the defects of traditional probe stations that use liquid refrigerants to achieve a low-temperature testing environment, which is not only costly but also complicated to operate and has high safety risks, the present application provides a probe station.

[0004] The probe station provided in this application adopts the following technical solution: A probe station, comprising a frame, a support table connected to the upper end surface of the frame, a vacuum chamber arranged on the support table, a workpiece support device inserted in the vacuum chamber and used to support a workpiece, a closed-cycle refrigerator inserted in the frame and extending upward into the workpiece support device, a probe arm device arranged on the support table and used to be inserted into the workpiece support device, and a workpiece detection device connected to the support table and located above the vacuum chamber; The probe arm device comprises a detection probe mechanism for passing through the vacuum chamber and inserted into the workpiece support device, a probe driving mechanism for connecting the detection probe mechanism and the support table, and a probe positioning mechanism connected to the probe driving mechanism; the probe driving mechanism is used to drive the detection probe mechanism to move to the workpiece position in the workpiece support device; The closed-cycle refrigerator includes a refrigeration counterweight mechanism inserted at the bottom of the frame, a refrigeration bracket connected to the refrigeration counterweight mechanism, a refrigerator body connected to the refrigeration bracket, a first refrigeration head connected to the refrigerator body and extending vertically upward, a second refrigeration head connected to the first refrigeration head and inserted upward into the workpiece supporting device, and a vacuum shield for connecting the refrigeration bracket and the support platform; the vacuum shield is sleeved on the outside of the first refrigeration head and the second refrigeration head and is connected to the vacuum chamber; the first refrigeration head and the second refrigeration head are both connected to the workpiece supporting device.

[0005] By adopting the above technical scheme, the workpiece support device is used to support the workpiece under test, the refrigerator body extends upward through the first cooling head and is further inserted into the position of the workpiece support device through the second cooling head, the first cooling head and the second cooling head are respectively connected to the workpiece support device, so as to realize effective cooling of the workpiece; the probe driving mechanism is used to drive the detection probe mechanism to pass through the vacuum chamber and insert into the workpiece support device to contact the workpiece surface for detection, and the probe positioning mechanism is used to assist in determining the contact positioning between the detection probe mechanism and the workpiece surface; the workpiece detection device is fixed on the support table and is located above the vacuum chamber for detecting the workpiece; the vacuum hood is sleeved on the outside of the first cooling head and the second cooling head and is connected to the vacuum chamber to form an overall vacuum cooling environment; the present application provides a low-temperature testing environment through a closed-cycle refrigerator, avoiding the high cost, great safety hazards and environmental risks of traditional liquid refrigerants. At the same time, the precise positioning and movement functions of the probe arm device ensure the accuracy and efficiency of the test, and the setting of the workpiece detection device further improves the comprehensiveness and reliability of the test.

[0006] Preferably, the workpiece support device includes a detection support cover connected to the support platform and communicated with the interior of the vacuum chamber, a workpiece detection cover arranged above the detection support cover and inserted into the vacuum chamber, a support stabilization cover with one end inserted into the detection support cover and the other end connected to the bottom of the workpiece detection cover, a workpiece support cover inserted into the support stabilization cover and extending upward into the workpiece detection cover, and a detection support seat connected to the upper end of the workpiece support cover and inserted into the workpiece detection cover; the workpiece support cover maintains a gap with the support stabilization cover; The workpiece support cover is sleeved on the outside of the second refrigeration head, the support stabilization cover is sleeved on the outside of the workpiece support cover, the detection support cover is sleeved on the outside of the support stabilization cover, and the vacuum shield is sleeved on the outside of the detection support cover.

[0007] By adopting the above technical solution, the workpiece detection cover provides an internal space for workpiece detection; the workpiece support cover is used to support the detection support seat; a gap is maintained between the workpiece support cover and the support stabilization cover to reduce mutual interference; the workpiece support cover is sleeved on the outside of the second refrigeration head, and the workpiece is cooled by the second refrigeration head, and the support stabilization cover is sleeved on the outside of the workpiece support cover to further enhance the stability of the structure; the detection support cover is sleeved on the outside of the support stabilization cover and is connected to the vacuum chamber to form an overall vacuum sealing structure; The second cooling head of the present application cools the workpiece in a vacuum environment, and at the same time, the workpiece support cover and the detection support seat ensure the stable support of the workpiece. During detection, the entire device avoids mutual interference between structures through the separation and gap design of different cover layers, thereby improving the stability and accuracy of the detection process; the present application realizes stable support and effective cooling of the workpiece in a vacuum environment through the layered design of the multi-layer cover structure, and improves the stability and detection accuracy of the system through the independent action of each cover layer, while ensuring the low-temperature cooling effect of the workpiece.

[0008] Preferably, the vacuum chamber comprises a vacuum chamber body, and a vacuum chamber transparent window provided at the middle position of the upper end surface of the vacuum chamber body, and the vacuum chamber body is also provided with probe insertion holes arranged in an array and used to connect the probe driving mechanism with the interior of the vacuum chamber body. The workpiece detection cover includes an inspection cover body, and a detection cover transparent window arranged at the middle position of the upper end surface of the inspection cover body, the vacuum chamber transparent window is located below the workpiece detection device, the detection cover transparent window is located directly below the vacuum chamber transparent window, and the detection support seat is located directly below the detection cover transparent window; the inspection cover body is also provided with detection through holes arranged in an array on the circumference thereof and used to connect the interior of the inspection cover body with the interior of the vacuum chamber body; the probe insertion hole and the detection through holes are correspondingly arranged.

[0009] By adopting the above technical scheme, the detection probe mechanism is driven by the probe driving mechanism to be inserted from the probe insertion hole into the vacuum chamber body, and enters the inspection cover body through the corresponding detection through hole, and finally contacts the workpiece for detection. At the same time, through the vacuum chamber transparent window and the detection cover transparent window, the workpiece detection device can monitor the workpiece in real time; the present application facilitates clear observation of the workpiece during the detection process through the alignment of the vacuum chamber transparent window and the detection cover transparent window. The corresponding design of the probe insertion hole and the detection through hole ensures that the probe can smoothly pass through each layer of the structure to contact the workpiece, thereby improving the detection accuracy and efficiency, and at the same time improving the stability and reliability of workpiece detection in a vacuum environment.

[0010] Preferably, the probe driving mechanism includes a radial moving component arranged along the radial direction of the vacuum chamber, a vertical moving component arranged at the moving end of the radial moving component, a lateral moving component connected to the moving end of the vertical moving component, a probe telescopic tube connected to the moving end of the lateral moving component and communicated with the vacuum chamber, and a telescopic tube bracket connected to the support platform and used to support the probe telescopic tube; the detection probe mechanism is inserted into the probe telescopic tube and connected to the moving end of the lateral moving component.

[0011] By adopting the above technical scheme, the radial moving component is used to drive the detection probe mechanism to move radially to the top of the workpiece position and compress the probe telescopic tube. The lateral moving component is used to fine-tune the horizontal position of the detection probe mechanism. The vertical moving component is used to drive the lateral moving component and the detection probe mechanism to move up and down, and make the detection probe mechanism and the workpiece press fit for detection. The present application realizes the precise positioning and flexible movement of the detection probe mechanism in three-dimensional space through the combination of multi-directional independent moving components, ensures the detection accuracy and operation convenience of the detection probe mechanism, and the connection between the probe telescopic tube and the vacuum chamber and the support of the telescopic tube bracket further improve the stability of the system and the reliability of the operation of the detection probe mechanism.

[0012] Preferably, the radial moving assembly includes a probe driving base connected to the support platform, bearing brackets arranged at both ends of the probe driving base, a radial rotating screw rod passing through the two bearing brackets and respectively rotatably connected to the two bearing brackets, a radial slide rail connected to the probe driving base and located between the two bearing brackets, and a radial sliding seat sleeved on the outer side wall of the radial rotating screw rod and threadedly matched with the radial rotating screw rod, wherein the radial sliding seat is arranged on the radial slide rail and is slidably connected to the radial slide rail.

[0013] By adopting the above-mentioned technical scheme, when the radial rotating screw rotates, the radial sliding seat moves along the axial direction of the radial rotating screw under the action of the threaded cooperation, and at the same time maintains smooth linear motion on the radial slide rail; the present application realizes the precise radial movement of the detection probe mechanism through the threaded cooperation between the radial rotating screw and the radial sliding seat. The setting of the radial slide rail ensures the stability and smooth movement of the radial sliding seat, thereby ensuring the radial positioning accuracy of the detection probe mechanism, and effectively improving the operating accuracy and flexibility of the entire probe drive mechanism.

[0014] Preferably, the vertical moving assembly includes a vertical fixed seat fixedly connected to the radial sliding seat, a vertical slide rail fixedly connected to the vertical fixed seat, a vertical sliding seat sleeved on the vertical slide rail and slidably connected to the vertical slide rail, a vertical driving flange fixedly connected to the upper end of the vertical sliding seat, and a vertical rotating screw inserted on the vertical driving flange and threadedly engaged with the vertical driving flange; the end of the vertical rotating screw is rotatably connected to the vertical slide rail.

[0015] By adopting the above-mentioned technical scheme, when the vertical rotating screw rotates, the vertical sliding seat moves up and down along the vertical slide rail by cooperating with the thread of the vertical driving cam, thereby driving the detection probe mechanism to move in the vertical direction; the present application can realize the precise movement of the detection probe mechanism in the vertical direction through the thread cooperation of the vertical rotating screw and the vertical driving cam, and the sliding connection of the vertical slide rail ensures the stability and smoothness of the movement, thereby improving the vertical positioning accuracy of the detection probe mechanism and ensuring the efficient operation of the detection probe mechanism in the vertical direction.

[0016] Preferably, the transverse moving assembly includes a transverse slide rail fixedly connected to the vertical sliding seat, a transverse sliding seat sleeved on the transverse slide rail and slidably connected to the transverse slide rail, a transverse driving protrusion fixedly connected to the upper end of the transverse slide rail, a transverse fixed protrusion fixedly connected to the upper end of the transverse sliding seat, and a transverse rotating screw passing through the transverse driving protrusion and threadedly engaged with the transverse driving protrusion; the end of the transverse rotating screw is rotatably connected to the transverse fixed protrusion.

[0017] By adopting the above-mentioned technical solution, when the transverse rotating screw rotates, the transverse sliding seat is driven to move laterally along the transverse slide rail through the thread cooperation between the transverse rotating screw and the transverse driving cam; in this application, the transverse rotating screw can accurately adjust the movement of the transverse sliding seat through the thread transmission method, so as to realize high-precision positioning of the detection probe mechanism in the transverse direction, ensure the multi-directional operation accuracy of the entire probe system, and thus improve the detection efficiency and accuracy of the equipment.

[0018] Preferably, the probe positioning mechanism includes an auxiliary positioning probe connected to the moving end of the lateral moving component, and an auxiliary positioning support seat connected to the support table and horizontally aligned with the detection support seat. When the probe driving mechanism drives the auxiliary positioning probe to move to a press fit with the auxiliary positioning support seat, the detection probe mechanism in the vacuum chamber moves synchronously to a press fit with the detection support seat.

[0019] By adopting the above-mentioned technical scheme, when the probe driving mechanism drives the auxiliary positioning probe to move, the auxiliary positioning probe will gradually approach and eventually be pressed into engagement with the auxiliary positioning support seat. At this time, the detection probe mechanism in the vacuum chamber moves synchronously until the detection probe mechanism and the detection support seat are pressed into engagement, thereby completing the precise positioning of the detection probe mechanism. The present application achieves precise control of the position of the detection probe mechanism during movement by setting an auxiliary positioning probe and an auxiliary positioning support seat, thereby ensuring the precise docking of the detection probe mechanism and the detection support seat, avoiding the accumulation of deviations and errors, and greatly improving the positioning accuracy and test reliability of the probe station.

[0020] Preferably, the auxiliary positioning support seat includes a fixed guide sleeve fixedly connected to the support platform, a telescopic rod movably inserted in the fixed guide sleeve, a telescopic driving component arranged at the end of the fixed guide sleeve and used to drive the telescopic rod to move up and down, an auxiliary positioning base arranged at the end of the telescopic rod, a pressure detection sensor arranged on the auxiliary positioning base, an auxiliary positioning platform arranged on the upper side of the pressure detection sensor, and a warning light arranged on the auxiliary positioning base and electrically connected to the pressure detection sensor.

[0021] By adopting the above-mentioned technical scheme, when the pressure detection sensor detects that the pressure on the auxiliary positioning platform exceeds the preset range, the pressure detection sensor triggers the warning light to send a warning signal; the present application drives the telescopic rod to move up and down through the telescopic driving component to realize the precise adjustment of the auxiliary positioning platform; when the workpiece is set on the detection support seat, the telescopic driving component drives the telescopic rod to move up to a distance the same as the thickness of the workpiece, so that the upper surface of the auxiliary positioning platform is flush with the upper surface of the workpiece on the detection support seat; and the pressure situation is monitored by the pressure detection sensor to ensure the precise contact between the auxiliary positioning probe and the auxiliary positioning platform, as well as the detection probe mechanism and the workpiece to be measured. The setting of the warning light further enhances the safety and accuracy of the operation, and improves the overall detection efficiency and reliability of the probe station.

[0022] Preferably, the telescopic driving component includes a telescopic power unit arranged at the end of the fixed guide sleeve, a rotating gear arranged at the output end of the telescopic power unit, and a rack arranged on the telescopic rod and arranged along the length direction of the telescopic rod; the rack and the rotating gear are meshed and matched, the telescopic power unit is used to drive the rotating gear to rotate, and the rotating gear is used to drive the rack and the telescopic rod to move up and down.

[0023] By adopting the above-mentioned technical solution, when the rotating gear rotates driven by the telescopic power part, the rotating gear drives the rack to move in the vertical direction, so that the telescopic rod moves up and down synchronously with the rack; through the cooperation of the rotating gear and the rack, the telescopic driving component of the present application can efficiently and accurately drive the displacement of the telescopic rod, realize the precise adjustment of the auxiliary positioning support seat, ensure the docking accuracy of the detection probe mechanism and the workpiece, and improve the stability and detection efficiency of the detection probe mechanism.

[0024] In summary, the present application includes at least one of the following beneficial technical effects: 1. The workpiece support device is used to support the workpiece under test. The refrigerator body extends upward through the first cooling head and is further inserted into the position of the workpiece support device through the second cooling head. The first cooling head and the second cooling head are respectively connected to the workpiece support device, so as to achieve effective cooling of the workpiece; the probe driving mechanism is used to drive the detection probe mechanism to pass through the vacuum chamber and insert into the workpiece support device to contact the workpiece surface for detection, and the probe positioning mechanism is used to assist in determining the contact positioning between the detection probe mechanism and the workpiece surface; the workpiece detection device is fixed on the support table and located above the vacuum chamber for detecting the workpiece; the vacuum shield is sleeved on the outside of the first cooling head and the second cooling head and is connected to the vacuum chamber to form an overall vacuum cooling environment; the present application provides a low-temperature testing environment through a closed-cycle refrigerator, avoiding the high cost, great safety hazards and environmental risks of traditional liquid refrigerants. At the same time, the precise positioning and movement functions of the probe arm device ensure the accuracy and efficiency of the test, and the setting of the workpiece detection device further improves the comprehensiveness and reliability of the test; 2. The detection support cover is sleeved on the outside of the support stability cover and connected to the vacuum chamber to form an overall vacuum sealing structure; the second cooling head of the present application cools the workpiece in a vacuum environment, while the workpiece support cover and the detection support seat ensure the stable support of the workpiece. The entire device avoids mutual interference between structures through the separation and gap design of different cover layers during detection, thereby improving the stability and accuracy of the detection process; the present application realizes stable support and effective cooling of the workpiece in a vacuum environment through the layered design of the multi-layer cover structure, and improves the stability and detection accuracy of the system through the independent action of each cover layer, while ensuring the low-temperature cooling effect of the workpiece; 3. When the probe driving mechanism drives the auxiliary positioning probe to move, the auxiliary positioning probe will gradually approach and eventually press-fit with the auxiliary positioning support seat. At this time, the detection probe mechanism in the vacuum chamber moves synchronously until the detection probe mechanism and the detection support seat are press-fitted to complete the precise positioning of the detection probe mechanism. The present application realizes precise control of the position of the detection probe mechanism during movement by setting an auxiliary positioning probe and an auxiliary positioning support seat, thereby ensuring the precise docking of the detection probe mechanism and the detection support seat, avoiding the accumulation of deviations and errors, and greatly improving the positioning accuracy and test reliability of the probe station. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic diagram of the cross-sectional structure of an embodiment of the present application. Figure 1 .

[0026] Figure 2 for Figure 1 Enlarged view of part A.

[0027] Figure 3 It is a schematic diagram of the three-dimensional structure of an embodiment of the present application.

[0028] Figure 4 for Figure 3 Enlarged view of part B.

[0029] Figure 5 This is a schematic diagram of the cross-sectional structure of an embodiment of the present application. Figure 2 .

[0030] Description of reference numerals: 1. Rack; 2. Support table; 21. Arc swing groove; 3. Vacuum chamber; 31. Vacuum chamber body; 32. Vacuum chamber transparent window; 33. Probe insertion hole; 4. Workpiece support device; 41. Detection support cover; 42. Workpiece detection cover; 43. Support stability cover; 44. Workpiece support cover; 45. Detection support seat; 46. Heater; 47. Copper guide belt; 421. Inspection cover body; 422. Detection cover transparent window; 423. Detection through hole; 5. Closed cycle refrigerator; 51. Refrigeration counterweight mechanism; 52. Refrigeration bracket; 53. Refrigeration machine body; 54. First refrigeration head; 55. Second refrigeration head; 56. Vacuum shield; 57. Air extraction port; 6. Probe arm device; 61. Detection probe mechanism; 62. Probe driving mechanism; 63. Probe positioning mechanism; 631. Auxiliary positioning probe; 632. Auxiliary positioning support seat; 621. Radial moving assembly; 622. Vertical moving assembly; 623. Lateral moving assembly; 624. Probe telescopic tube; 625. Telescopic tube bracket; 626. Rotary toggle assembly; 6211, probe driving base; 6212, bearing bracket; 6213, radial rotating screw; 6214, radial slide rail; 6215, radial sliding seat; 6221, vertical fixed seat; 6222, vertical slide rail; 6223, vertical sliding seat; 6224, vertical driving convex edge; 6225, vertical rotating screw; 6231, transverse slide rail; 6232, transverse sliding seat; 6233, transverse driving convex edge; 6234, transverse fixed convex edge; 6235, transverse rotating screw; 6321, fixed guide sleeve; 6322, telescopic rod; 6323, telescopic driving component; 6324, auxiliary positioning base; 6325, pressure detection sensor; 6326, auxiliary positioning platform; 6327, warning light; 6328, telescopic power unit; 6329, rotating gear; 6330, rack; 6331, scale; 7. Workpiece detection device; 71. Detection support frame; 72. Detection mechanism. DETAILED DESCRIPTION

[0031] The following is combined with Figures 1 to 5 This application is described in further detail.

[0032] The present application embodiment discloses a probe station. Figure 1 A probe station includes a frame 1, a support table 2 connected to the upper end surface of the frame 1, a vacuum chamber 3 arranged on the support table 2, a workpiece support device 4 inserted in the vacuum chamber 3 and used to support a workpiece, a closed-cycle refrigerator 5 inserted in the frame 1 and extending upward into the workpiece support device 4, a probe arm device 6 arranged on the support table 2 and used to be inserted into the workpiece support device 4, and a workpiece detection device 7 connected to the support table 2 and located above the vacuum chamber 3; The probe arm device 6 includes a detection probe mechanism 61 for passing through the vacuum chamber 3 and inserted into the workpiece support device 4, a probe driving mechanism 62 for connecting the detection probe mechanism 61 and the support table 2, and a probe positioning mechanism 63 connected to the probe driving mechanism 62; the probe driving mechanism 62 is used to drive the detection probe mechanism 61 to move to the workpiece position in the workpiece support device 4; The closed-cycle refrigerator 5 includes a refrigeration counterweight mechanism 51 inserted at the bottom of the frame 1, a refrigeration bracket 52 connected to the refrigeration counterweight mechanism 51, a refrigerator body 53 connected to the refrigeration bracket 52, a first refrigeration head 54 connected to the refrigeration body 53 and extending vertically upward, a second refrigeration head 55 connected to the first refrigeration head 54 and inserted upward into the workpiece support device 4, and a vacuum shield 56 for connecting the refrigeration bracket 52 and the support table 2; the vacuum shield 56 is sleeved on the outside of the first refrigeration head 54 and the second refrigeration head 55 and is connected to the vacuum chamber 3; the first refrigeration head 54 and the second refrigeration head 55 are both connected to the workpiece support device 4.

[0033] The workpiece support device 4 of the present application is used to support the workpiece under test. The refrigerator body 53 extends upward through the first cooling head 54 and is further inserted into the position of the workpiece support device 4 through the second cooling head 55. The first cooling head 54 and the second cooling head 55 are respectively connected to the workpiece support device 4, so as to achieve effective cooling of the workpiece; the probe driving mechanism 62 is used to drive the detection probe mechanism 61 to pass through the vacuum chamber 3 and insert into the workpiece support device 4 to contact the workpiece surface for detection, and the probe positioning mechanism 63 is used to assist in determining the contact positioning between the detection probe mechanism 61 and the workpiece surface; the workpiece detection device 7 is fixed on the support table 2 and is located above the vacuum chamber 3 for detecting the workpiece; the vacuum shield 56 is sleeved on the outside of the first cooling head 54 and the second cooling head 55, and is connected to the vacuum chamber 3 to form an overall vacuum cooling environment; The present application provides a low-temperature testing environment through a closed-cycle refrigerator 5, avoiding the high cost, great safety hazards and environmental risks of traditional liquid refrigerants. At the same time, the precise positioning and movement functions of the probe arm device 6 ensure the accuracy and efficiency of the test. The setting of the workpiece detection device 7 further improves the comprehensiveness and reliability of the test. The probe station of the present application is more efficient, safe and environmentally friendly during the testing process.

[0034] The closed-cycle refrigerator 5 of the present application uses compressed helium as a refrigerant, and the number of probe arm devices 6 is preferably six and arranged in an array along the circumference of the vacuum chamber 3 .

[0035] Furthermore, if Figure 2 As shown, the workpiece support device 4 includes a detection support cover 41 connected to the support table 2 and communicated with the inside of the vacuum chamber 3, a workpiece detection cover 42 arranged above the detection support cover 41 and inserted into the vacuum chamber 3, a support stabilization cover 43 with one end inserted into the detection support cover 41 and the other end connected to the bottom of the workpiece detection cover 42, a workpiece support cover 44 inserted into the support stabilization cover 43 and extending upward into the workpiece detection cover 42, and a detection support seat 45 connected to the upper end of the workpiece support cover 44 and inserted into the workpiece detection cover 42; the workpiece support cover 44 maintains a gap with the support stabilization cover 43; The workpiece support cover 44 is sleeved on the outside of the second cooling head 55 , the support stabilization cover 43 is sleeved on the outside of the workpiece support cover 44 , the detection support cover 41 is sleeved on the outside of the support stabilization cover 43 , and the vacuum shield 56 is sleeved on the outside of the detection support cover 41 .

[0036] The detection support cover 41 of the present application is connected to the support table 2 and communicated with the inside of the vacuum chamber 3 to form the basis of the entire support structure; the workpiece detection cover 42 is located above the detection support cover 41 and inserted in the vacuum chamber 3 to provide an internal space for workpiece detection; one end of the support and stability cover 43 is inserted in the detection support cover 41, and the other end is connected to the bottom of the workpiece detection cover 42 to form a stable support structure connected up and down; the workpiece support cover 44 is inserted in the support and stability cover 43 and extends upward into the workpiece detection cover 42 to support the detection support seat 45; a gap is maintained between the workpiece support cover 44 and the support and stability cover 43 to reduce mutual interference; the workpiece support cover 44 is sleeved on the outside of the second cooling head 55, and the cooling of the workpiece is achieved through the second cooling head 55, while the support and stability cover 43 is sleeved on the outside of the workpiece support cover 44 to further enhance the stability of the structure; the detection support cover 41 is sleeved on the outside of the support and stability cover 43 and communicated with the vacuum chamber 3 to form an overall vacuum sealing structure; The second cooling head 55 of the present application cools the workpiece in a vacuum environment, and at the same time, the workpiece support cover 44 and the detection support seat 45 ensure the stable support of the workpiece. During detection, the entire device avoids mutual interference between structures through the separation and gap design of different cover layers, thereby improving the stability and accuracy of the detection process; the present application realizes stable support and effective cooling of the workpiece in a vacuum environment through the layered design of the multi-layer cover structure, and improves the stability and detection accuracy of the system through the independent action of each cover layer, while ensuring the low-temperature cooling effect of the workpiece.

[0037] like Figure 2 As shown, the present application also discloses that the workpiece support device 4 also includes a heater 46 disposed between the workpiece support cover 44 and the detection support seat 45; the heater 46 is used to provide rapid preheating for the workpiece to facilitate adjustment of the detection temperature of the workpiece; the heater 46 is preferably an anti-radiation screen heater.

[0038] like Figure 1 and Figure 2 As shown, the present application also discloses that the workpiece support device 4 also includes a copper guide belt 47, which is used to connect the first cooling head 54 and the heater 46 at the bottom of the detection support seat 45. The first cooling head 54 transfers the cold to the workpiece on the detection support seat 45 through the metal part of the heater 46; the cooperation between the first cooling head 54 and the heater 46 facilitates the rapid and accurate adjustment of the temperature on the detection support seat 45; the copper guide belt 47 is also used to connect the second cooling head 55 with the detection support cover 41, the support stabilization cover 43, and the bottom of the workpiece support cover 44. The setting of the copper guide belt 47 not only facilitates the transfer of cold, but also the copper guide belt 47 can be used as a soft connection to reduce shock without affecting the cooling.

[0039] Furthermore, if Figure 2As shown, the vacuum chamber 3 includes a vacuum chamber body 31, and a vacuum chamber transparent window 32 provided at the middle position of the upper end surface of the vacuum chamber body 31. The vacuum chamber body 31 is also provided with probe insertion holes 33 arranged in an array and used to connect the probe driving mechanism 62 with the inside of the vacuum chamber body 31. The workpiece detection cover 42 includes an inspection cover body 421, and an inspection cover transparent window 422 arranged at the middle position of the upper end surface of the inspection cover body 421, the vacuum chamber transparent window 32 is located below the workpiece detection device 7, the inspection cover transparent window 422 is located directly below the vacuum chamber transparent window 32, and the detection support seat 45 is located directly below the inspection cover transparent window 422; the inspection cover body 421 is also provided with detection through holes 423 arranged in an array on the circumference thereof and used to connect the interior of the inspection cover body 421 with the interior of the vacuum chamber body 31; the probe insertion hole 33 and the detection through hole 423 are correspondingly arranged.

[0040] The transparent window 32 of the vacuum chamber of the present application is used for observing and inspecting the workpiece; the peripheral side of the vacuum chamber body 31 is provided with probe insertion holes 33 arranged in an array, which are used to insert the detection probe mechanism 61 on the probe driving mechanism 62 into the vacuum chamber body 31 to ensure that the detection probe mechanism 61 is in contact with the workpiece; the inspection cover body 421 is located inside the vacuum chamber body 31 to protect and support the workpiece, and the detection cover transparent window 422 is located directly below the vacuum chamber transparent window 32 to ensure that the workpiece detection device 7 observes and inspects the workpiece through the transparent window; the detection support seat 45 is located directly below the detection cover transparent window 422 to support the workpiece and ensure that the workpiece is in accurate contact with the detection probe mechanism 61; the detection through hole 423 is arranged one-to-one with the probe insertion hole 33 to ensure that the detection probe mechanism 61 can smoothly pass through the vacuum chamber body 31 and the inspection cover body 421 and move to the position of the detection support seat 45; In the present application, the probe driving mechanism 62 drives the detection probe mechanism 61 to insert into the vacuum chamber body 31 through the probe insertion hole 33, and enters the inspection cover body 421 through the corresponding detection through hole 423, and finally contacts the workpiece for detection. At the same time, through the vacuum chamber transparent window 32 and the detection cover transparent window 422, the workpiece detection device 7 can monitor the workpiece in real time; in the present application, the alignment setting of the vacuum chamber transparent window 32 and the detection cover transparent window 422 facilitates clear observation of the workpiece during the detection process. The corresponding design of the probe insertion hole 33 and the detection through hole 423 ensures that the probe can smoothly pass through each layer of the structure to contact the workpiece, thereby improving the accuracy and efficiency of the detection, and at the same time improving the stability and reliability of workpiece detection in a vacuum environment.

[0041] like Figure 1 As shown, the workpiece detection device 7 includes a detection support frame 71 connected to the support platform 2, and a detection mechanism 72 connected to the detection support frame 71 and located above the transparent window 32 of the vacuum chamber.

[0042] The detection mechanism 72 of the present application is positioned above the transparent window 32 of the vacuum chamber through the stable support of the detection support frame 71, and detects the workpiece located inside the vacuum chamber 3 through the transparent window 32 of the vacuum chamber to ensure the detection accuracy; the present application ensures the accurate positioning of the detection mechanism 72 through the stable support of the detection support frame 71, and realizes contactless real-time observation and detection through the transparent window 32 of the vacuum chamber, thereby improving the accuracy of the detection and the stability of the overall operation, and effectively ensuring the detection reliability of the workpiece under vacuum conditions.

[0043] The detection mechanism 72 of the present application is preferably a microscope and a CCD camera; the microscope magnifies and observes the microstructure of the workpiece through the transparent window 32 of the vacuum chamber, and the CCD camera simultaneously captures the image and transmits the data, thereby realizing contactless detection of the workpiece; the present application ensures high-precision, non-contact real-time observation and detection in a vacuum environment; the combination of the microscope and the CCD camera realizes high-precision magnified detection of the workpiece and real-time transmission of the image, ensuring the accuracy and efficiency of the detection, while reducing the risk of errors in operation through contactless detection technology.

[0044] Specifically, Figures 3 to 5 As shown, the probe driving mechanism 62 includes a radial moving component 621 arranged along the radial direction of the vacuum chamber 3, a vertical moving component 622 arranged at the moving end of the radial moving component 621, a lateral moving component 623 connected to the moving end of the vertical moving component 622, a probe telescopic tube 624 connected to the moving end of the lateral moving component 623 and communicated with the vacuum chamber 3, and a telescopic tube bracket 625 connected to the support platform 2 and used to support the probe telescopic tube 624; the detection probe mechanism 61 is inserted into the probe telescopic tube 624 and connected to the moving end of the lateral moving component 623.

[0045] The radial moving component 621 of the present application is used to drive the vertical moving component 622, the lateral moving component 623 and the detection probe mechanism 61 to move radially, and move the detection probe mechanism 61 to the top of the workpiece position, and compress the probe telescopic tube 624. The lateral moving component 623 is used to fine-tune the horizontal position of the detection probe mechanism 61. The vertical moving component 622 is used to drive the lateral moving component 623 and the detection probe mechanism 61 to move up and down, and make the detection probe mechanism 61 and the workpiece press fit for detection; the present application realizes the precise positioning and flexible movement of the detection probe mechanism 61 in three-dimensional space through the combination of multi-directional independent moving components, ensures the detection accuracy and operation convenience of the detection probe mechanism 61, and the connection between the probe telescopic tube 624 and the vacuum chamber 3 and the support of the telescopic tube bracket 625 further improve the stability of the system and the reliability of the operation of the detection probe mechanism 61; The probe telescopic tube 624 is communicated with the probe insertion hole 33 , and the probe telescopic tube 624 is preferably a corrugated tube.

[0046] like Figure 3 As shown, the present application also discloses that the probe driving mechanism 62 also includes a rotating toggle assembly 626 arranged between the detection probe mechanism 61 and the moving end of the lateral moving assembly 623, and the rotating toggle assembly 626 is used to drive the detection probe mechanism 61 to rotate with the axial direction of the detection probe mechanism 61 as the rotation axis, so as to fine-tune the contact position between the detection probe mechanism 61 and the workpiece, thereby further improving the accuracy of workpiece detection; the rotating toggle assembly 626 is preferably a rotary damper.

[0047] More specifically, if Figure 3 As shown, the radial moving assembly 621 includes a probe driving base 6211 connected to the support table 2, bearing brackets 6212 arranged at both ends of the probe driving base 6211, a radial rotating screw 6213 passing through the two bearing brackets 6212 and respectively rotatably connected to the two bearing brackets 6212, a radial slide rail 6214 connected to the probe driving base 6211 and located between the two bearing brackets 6212, and a radial sliding seat 6215 sleeved on the outer wall of the radial rotating screw 6213 and threadedly matched with the radial rotating screw 6213, the radial sliding seat 6215 is arranged on the radial slide rail 6214 and is slidably connected to the radial slide rail 6214.

[0048] The probe driving base 6211 of the present application is connected to the support platform 2, providing a supporting foundation for the entire radial moving assembly 621; the bearing bracket 6212 is rotatably connected to the radial rotating screw 6213 to ensure the smooth rotation of the radial rotating screw 6213; the radial slide rail 6214 serves as a guide structure for the radial sliding seat 6215; the radial sliding seat 6215 is connected to the radial rotating screw 6213 through threaded matching, and the bottom of the radial sliding seat 6215 is slidably connected to the radial slide rail 6214 to ensure that the radial sliding seat 6215 can slide smoothly in a straight line along the radial slide rail 6214; In the present application, when the radial rotating screw 6213 rotates, the radial sliding seat 6215 moves along the axial direction of the radial rotating screw 6213 under the action of the threaded cooperation, and at the same time maintains a smooth linear motion on the radial slide rail 6214; in the present application, the threaded cooperation between the radial rotating screw 6213 and the radial sliding seat 6215 is used to realize the precise radial movement of the detection probe mechanism 61. The setting of the radial slide rail 6214 ensures the stability and smooth movement of the radial sliding seat 6215, thereby ensuring the radial positioning accuracy of the detection probe mechanism 61, and effectively improving the operating accuracy and flexibility of the entire probe drive mechanism 62.

[0049] like Figure 5As shown, the present application also discloses an arc-shaped swinging groove 21 provided on the support table 2 and used for the bottom of the probe driving base 6211 to be inserted; the arc-shaped swinging groove 21 is preferably an arc-shaped strip groove with the detection support seat 45 as the center; the arc-shaped swinging groove 21 is used for the probe driving base 6211 to rotate and swing with the telescopic tube bracket 625 as the rotation axis, so that the probe driving base 6211 drives the radial moving component 621, the vertical moving component 622, the lateral moving component 623, and the detection probe mechanism 61 to swing synchronously, and the end of the detection probe mechanism 61 is swept on the workpiece of the detection support seat 45 with the telescopic tube bracket 625 as the rotation axis, so as to adjust the detection position of the workpiece, thereby further improving the positioning accuracy of the detection probe mechanism 61 and the flexibility of workpiece detection.

[0050] In addition, if Figure 3 As shown, the vertical moving assembly 622 includes a vertical fixed seat 6221 fixedly connected to the radial sliding seat 6215, a vertical slide rail 6222 fixedly connected to the vertical fixed seat 6221, a vertical sliding seat 6223 sleeved on the vertical slide rail 6222 and slidably connected to the vertical slide rail 6222, a vertical driving flange 6224 fixedly connected to the upper end of the vertical sliding seat 6223, and a vertical rotating screw 6225 inserted on the vertical driving flange 6224 and threadedly engaged with the vertical driving flange 6224; the end of the vertical rotating screw 6225 is rotatably connected to the vertical slide rail 6222.

[0051] The vertical fixed seat 6221 of the present application is fixedly connected with the radial sliding seat 6215, and as the basic structure for vertical movement, the vertical slide rail 6222 is fixedly connected to the vertical fixed seat 6221 to provide vertical guidance; the vertical sliding seat 6223 is sleeved on the vertical slide rail 6222 to ensure smooth vertical movement; the vertical rotating screw 6225 is inserted into the vertical driving convex edge 6224, and the transmission of the rotating screw is realized through threaded cooperation; the end of the vertical rotating screw 6225 is rotatably connected with the vertical slide rail 6222 to ensure that the vertical rotating screw 6225 can drive the vertical sliding seat 6223 to slide up and down along the vertical slide rail 6222 when rotating; In the present application, when the vertical rotating screw 6225 rotates, the vertical sliding seat 6223 moves up and down along the vertical slide rail 6222 through the thread cooperation with the vertical driving flange 6224, thereby driving the detection probe mechanism 61 to move in the vertical direction; in the present application, the thread cooperation between the vertical rotating screw 6225 and the vertical driving flange 6224 can realize the precise movement of the detection probe mechanism 61 in the vertical direction, and the sliding connection of the vertical slide rail 6222 ensures the stability and smoothness of the movement, thereby improving the vertical positioning accuracy of the detection probe mechanism 61 and ensuring the efficient operation of the detection probe mechanism 61 in the vertical direction.

[0052] And, if Figure 5 As shown, the transverse moving assembly 623 includes a transverse slide rail 6231 fixedly connected to the vertical sliding seat 6223, a transverse sliding seat 6232 sleeved on the transverse slide rail 6231 and slidably connected to the transverse slide rail 6231, a transverse driving flange 6233 fixedly connected to the upper end of the transverse slide rail 6231, a transverse fixed flange 6234 fixedly connected to the upper end of the transverse sliding seat 6232, and a transverse rotating screw 6235 passed through the transverse driving flange 6233 and threadedly engaged with the transverse driving flange 6233; the end of the transverse rotating screw 6235 is rotatably connected to the transverse fixed flange 6234.

[0053] The transverse sliding seat 6232 of the present application is slidably connected to the transverse slide rail 6231 to ensure the stability of transverse movement; the transverse driving convex edge 6233 is fixedly connected to the upper end of the transverse slide rail 6231 for transmission support, and the transverse fixed convex edge 6234 is fixedly connected to the upper end of the transverse sliding seat 6232 for sliding support; the transverse rotating screw 6235 is penetrated on the transverse driving convex edge 6233 and driven by threaded matching. The end of the transverse rotating screw 6235 is rotatably connected to the transverse fixed convex edge 6234 to ensure that the movement stability of the transverse sliding seat 6232 is not affected during rotation; When the transverse rotating screw 6235 rotates, the transverse sliding seat 6232 is driven to move laterally along the transverse slide rail 6231 through the thread cooperation between the transverse rotating screw 6235 and the transverse driving cam 6233; in the present application, the transverse rotating screw 6235 can accurately adjust the movement of the transverse sliding seat 6232 through threaded transmission, thereby achieving high-precision positioning of the detection probe mechanism 61 in the transverse direction, ensuring the multi-directional operation accuracy of the entire probe system, thereby improving the detection efficiency and accuracy of the equipment.

[0054] Furthermore, if Figure 3 As shown, the probe positioning mechanism 63 includes an auxiliary positioning probe 631 connected to the moving end of the lateral moving component 623, and an auxiliary positioning support seat 632 connected to the support table 2 and horizontally aligned with the detection support seat 45. When the probe driving mechanism 62 drives the auxiliary positioning probe 631 to move to a press fit with the auxiliary positioning support seat 632, the detection probe mechanism 61 in the vacuum chamber 3 synchronously moves to a press fit with the detection support seat 45.

[0055] The auxiliary positioning probe 631 of the present application is connected to the moving end of the lateral moving component 623 to ensure that the auxiliary positioning probe 631 can move synchronously with the movement of the lateral moving component 623; the auxiliary positioning support seat 632 is horizontally aligned with the detection support seat 45 to provide an accurate positioning reference for the auxiliary positioning probe 631; the present application realizes accurate positioning of the detection probe mechanism 61 by the top pressure fit between the auxiliary positioning probe 631 and the auxiliary positioning support seat 632; In the present application, when the probe driving mechanism 62 drives the auxiliary positioning probe 631 to move, the auxiliary positioning probe 631 will gradually approach and finally press-fit with the auxiliary positioning support seat 632. At this time, the detection probe mechanism 61 in the vacuum chamber 3 moves synchronously until the detection probe mechanism 61 and the detection support seat 45 are press-fitted to complete the precise positioning of the detection probe mechanism 61. In the present application, by setting the auxiliary positioning probe 631 and the auxiliary positioning support seat 632, precise control of the position of the detection probe mechanism 61 during movement is achieved, precise docking of the detection probe mechanism 61 with the detection support seat 45 is ensured, the accumulation of deviations and errors is avoided, and the positioning accuracy and test reliability of the probe station are greatly improved.

[0056] Furthermore, if Figure 3 and Figure 4 As shown, the auxiliary positioning support seat 632 includes a fixed guide sleeve 6321 fixedly connected to the support platform 2, a telescopic rod 6322 movably inserted in the fixed guide sleeve 6321, a telescopic driving component 6323 arranged at the end of the fixed guide sleeve 6321 and used to drive the telescopic rod 6322 to move up and down, an auxiliary positioning base 6324 arranged at the end of the telescopic rod 6322, a pressure detection sensor 6325 arranged on the auxiliary positioning base 6324, an auxiliary positioning platform 6326 arranged on the upper side of the pressure detection sensor 6325, and a warning light 6327 arranged on the auxiliary positioning base 6324 and electrically connected to the pressure detection sensor 6325.

[0057] The telescopic rod 6322 of the present application is movably inserted into the fixed guide sleeve 6321, and the telescopic driving component 6323 drives the telescopic rod 6322 to move up and down, thereby adjusting the position of the auxiliary positioning base 6324; the pressure detection sensor 6325 on the auxiliary positioning base 6324 is used to monitor the pressure generated during the positioning process; when the pressure detection sensor 6325 detects that the pressure on the auxiliary positioning platform 6326 exceeds a preset range, the pressure detection sensor 6325 triggers the warning light 6327 to send a warning signal; The present application realizes precise adjustment of the auxiliary positioning platform 6326 by driving the telescopic rod 6322 up and down through the telescopic driving component 6323; when the workpiece is set on the detection support seat 45, the telescopic driving component 6323 drives the telescopic rod 6322 to move up to a distance the same as the thickness of the workpiece, so that the upper surface of the auxiliary positioning platform 6326 is flush with the upper surface of the workpiece on the detection support seat 45; and the pressure is monitored by the pressure detection sensor 6325 to ensure the precise contact between the auxiliary positioning probe 631 and the auxiliary positioning platform 6326, and the detection probe mechanism 61 and the workpiece being measured. The setting of the warning light 6327 further enhances the safety and accuracy of the operation and improves the overall detection efficiency and reliability of the probe station.

[0058] Specifically, Figure 4 As shown, the telescopic driving component 6323 includes a telescopic power unit 6328 arranged at the end of the fixed guide sleeve 6321, a rotating gear 6329 arranged at the output end of the telescopic power unit 6328, and a rack 6330 arranged on the telescopic rod 6322 and along the length direction of the telescopic rod 6322; the rack 6330 and the rotating gear 6329 are meshed and matched, the telescopic power unit 6328 is used to drive the rotating gear 6329 to rotate, and the rotating gear 6329 is used to drive the rack 6330 and the telescopic rod 6322 to move up and down.

[0059] In the present application, when the rotating gear 6329 rotates driven by the telescopic power part 6328, the rotating gear 6329 drives the rack 6330 to move in the vertical direction, so that the telescopic rod 6322 moves up and down synchronously with the rack 6330; in the present application, through the cooperation of the rotating gear 6329 and the rack 6330, the telescopic driving component 6323 can efficiently and accurately drive the displacement of the telescopic rod 6322, realize the precise adjustment of the auxiliary positioning support seat 632, ensure the docking accuracy of the detection probe mechanism 61 and the workpiece, and improve the stability and detection efficiency of the detection probe mechanism 61; The telescopic power unit 6328 is preferably a motor.

[0060] like Figure 4 As shown, the telescopic rod 6322 is also provided with a scale 6331 for aligning with the upper end surface of the fixed guide sleeve 6321.

[0061] When the telescopic driving component 6323 drives the telescopic rod 6322 to move up and down, the scale 6331 is precisely aligned with the upper end surface of the fixed guide sleeve 6321, which is convenient for intuitively judging the displacement of the telescopic rod 6322 and ensuring the accuracy of the height adjustment of the auxiliary positioning support seat 632, thereby improving the working accuracy and detection effect of the detection probe mechanism 61 and reducing errors.

[0062] like Figure 5 As shown, the present application also discloses an exhaust port 57 disposed on the vacuum shield 56 and connected to the interior of the vacuum shield 56 , and a molecular pump group (not shown) connected to the exhaust port 57 , so as to adjust the vacuum state inside the vacuum shield 56 .

[0063] The implementation principle of a probe station in the embodiment of the present application is: The workpiece support device 4 is used to support the workpiece under test. The refrigerator body 53 extends upward through the first cooling head 54 and is further inserted into the position of the workpiece support device 4 through the second cooling head 55. The first cooling head 54 and the second cooling head 55 are respectively connected to the workpiece support device 4, so as to achieve effective cooling of the workpiece; the probe driving mechanism 62 is used to drive the detection probe mechanism 61 to pass through the vacuum chamber 3 and insert into the workpiece support device 4 to contact the workpiece surface for detection, and the probe positioning mechanism 63 is used to assist in determining the contact positioning between the detection probe mechanism 61 and the workpiece surface; the workpiece detection device 7 is fixed to the support table 2, and is located above the vacuum chamber 3, for detecting the workpiece; the vacuum shield 56 is sleeved on the outside of the first cooling head 54 and the second cooling head 55, and is connected to the vacuum chamber 3 to form an overall vacuum cooling environment; the present application provides a low-temperature test environment through a closed-cycle refrigerator 5, avoiding the high cost, great safety hazards and environmental risks of traditional liquid refrigerants. At the same time, the precise positioning and movement functions of the probe arm device 6 ensure the accuracy and efficiency of the test. The setting of the workpiece detection device 7 further improves the comprehensiveness and reliability of the test. The probe station of the present application is more efficient, safe and environmentally friendly during the test process; The detection support cover 41 is connected to the support platform 2 and communicated with the inside of the vacuum chamber 3 to form the basis of the entire support structure; the workpiece detection cover 42 is located above the detection support cover 41 and inserted in the vacuum chamber 3 to provide an internal space for workpiece detection; one end of the support and stabilization cover 43 is inserted in the detection support cover 41, and the other end is connected to the bottom of the workpiece detection cover 42 to form a stable support structure connected up and down; the workpiece support cover 44 is inserted in the support and stabilization cover 43 and extends upward into the workpiece detection cover 42 to support the detection support seat 45; a gap is maintained between the workpiece support cover 44 and the support and stabilization cover 43 to reduce mutual interference; the workpiece support cover 44 is sleeved on the outside of the second cooling head 55, and the cooling of the workpiece is achieved through the second cooling head 55, while the support and stabilization cover 43 is sleeved on the outside of the workpiece support cover 44 to further enhance the stability of the structure; the detection support cover 41 is sleeved on the outside of the support and stabilization cover 43 and communicated with the vacuum chamber 3 to form an overall vacuum sealing structure; The second cooling head 55 of the present application cools the workpiece in a vacuum environment, while the workpiece support cover 44 and the detection support seat 45 ensure the stable support of the workpiece. The entire device avoids mutual interference between structures through the separation and gap design of different cover layers during detection, thereby improving the stability and accuracy of the detection process; the present application realizes stable support and effective cooling of the workpiece in a vacuum environment through the layered design of the multi-layer cover structure, and improves the stability and detection accuracy of the system through the independent action of each cover layer, while ensuring the low-temperature cooling effect of the workpiece; The auxiliary positioning probe 631 is connected to the moving end of the lateral moving component 623 to ensure that the auxiliary positioning probe 631 can move synchronously with the movement of the lateral moving component 623; the auxiliary positioning support seat 632 is horizontally aligned with the detection support seat 45 to provide an accurate positioning reference for the auxiliary positioning probe 631; the present application realizes accurate positioning of the detection probe mechanism 61 through the top pressure cooperation between the auxiliary positioning probe 631 and the auxiliary positioning support seat 632; the present application when the probe driving mechanism 62 drives the auxiliary positioning probe 631 to move, the auxiliary positioning probe 631 will gradually contact The detection probe mechanism 61 in the vacuum chamber 3 moves synchronously until the detection probe mechanism 61 and the detection support seat 45 are pressed together, thereby completing the precise positioning of the detection probe mechanism 61. The present application achieves precise control of the position of the detection probe mechanism 61 during movement by setting the auxiliary positioning probe 631 and the auxiliary positioning support seat 632, thereby ensuring the precise docking of the detection probe mechanism 61 with the detection support seat 45, avoiding the accumulation of deviations and errors, and greatly improving the positioning accuracy and test reliability of the probe station.

[0064] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A probe station, characterized in that: The invention comprises a frame (1), a support platform (2) connected to the upper end surface of the frame (1), a vacuum chamber (3) arranged on the support platform (2), a workpiece support device (4) inserted in the vacuum chamber (3) and used to support a workpiece, a closed-cycle refrigerator (5) inserted in the frame (1) and extending upward into the workpiece support device (4), a probe arm device (6) arranged on the support platform (2) and used to be inserted into the workpiece support device (4), and a workpiece detection device (7) connected to the support platform (2) and located above the vacuum chamber (3); The probe arm device (6) comprises a detection probe mechanism (61) for passing through the vacuum chamber (3) and being inserted into the workpiece support device (4), a probe driving mechanism (62) for connecting the detection probe mechanism (61) and the support table (2), and a probe positioning mechanism (63) connected to the probe driving mechanism (62); the probe driving mechanism (62) is used to drive the detection probe mechanism (61) to move to the workpiece position in the workpiece support device (4); The closed-cycle refrigerator (5) comprises a refrigeration counterweight mechanism (51) inserted at the bottom of the frame (1), a refrigeration bracket (52) connected to the refrigeration counterweight mechanism (51), a refrigerator body (53) connected to the refrigeration bracket (52), a first refrigeration head (54) connected to the refrigeration body (53) and extending vertically upward, a second refrigeration head (55) connected to the first refrigeration head (54) and inserted upward into the workpiece support device (4), and a vacuum shield (56) for connecting the refrigeration bracket (52) and the support platform (2); the vacuum shield (56) is sleeved on the outside of the first refrigeration head (54) and the second refrigeration head (55) and is connected to the vacuum chamber (3); the first refrigeration head (54) and the second refrigeration head (55) are both connected to the workpiece support device (4).

2. A probe station according to claim 1, characterized in that, The workpiece support device (4) comprises a detection support cover (41) connected to the support platform (2) and communicated with the interior of the vacuum chamber (3), a workpiece detection cover (42) arranged above the detection support cover (41) and inserted into the vacuum chamber (3), a support stabilization cover (43) with one end inserted into the detection support cover (41) and the other end connected to the bottom of the workpiece detection cover (42), a workpiece support cover (44) inserted into the support stabilization cover (43) and extending upward into the workpiece detection cover (42), and a detection support seat (45) connected to the upper end of the workpiece support cover (44) and inserted into the workpiece detection cover (42); the workpiece support cover (44) maintains a gap with the support stabilization cover (43); The workpiece support cover (44) is sleeved on the outside of the second refrigeration head (55), the support stabilization cover (43) is sleeved on the outside of the workpiece support cover (44), the detection support cover (41) is sleeved on the outside of the support stabilization cover (43), and the vacuum shield (56) is sleeved on the outside of the detection support cover (41).

3. A probe station according to claim 2, characterized in that, The vacuum chamber (3) comprises a vacuum chamber body (31) and a vacuum chamber transparent window (32) arranged at the middle position of the upper end surface of the vacuum chamber body (31); the vacuum chamber body (31) is also provided with probe insertion holes (33) arranged in an array and used to connect the probe driving mechanism (62) with the interior of the vacuum chamber body (31); The workpiece detection cover (42) comprises an inspection cover body (421) and an inspection cover transparent window (422) arranged at the middle position of the upper end surface of the inspection cover body (421); the vacuum chamber transparent window (32) is located below the workpiece detection device (7); the inspection cover transparent window (422) is located directly below the vacuum chamber transparent window (32); and the detection support seat (45) is located directly below the inspection cover transparent window (422); the inspection cover body (421) is also provided with detection through holes (423) arranged in an array on the circumference thereof and used for connecting the interior of the inspection cover body (421) with the interior of the vacuum chamber body (31); the probe insertion hole (33) and the detection through hole (423) are arranged correspondingly.

4. A probe station according to claim 2, characterized in that, The probe driving mechanism (62) includes a radial moving component (621) arranged along the radial direction of the vacuum chamber (3), a vertical moving component (622) arranged at the moving end of the radial moving component (621), a lateral moving component (623) connected to the moving end of the vertical moving component (622), a probe telescopic tube (624) connected to the moving end of the lateral moving component (623) and connected to the vacuum chamber (3), and a telescopic tube bracket (625) connected to the support platform (2) and used to support the probe telescopic tube (624); the detection probe mechanism (61) is inserted into the probe telescopic tube (624) and connected to the moving end of the lateral moving component (623).

5. A probe station according to claim 4, characterized in that: The radial moving assembly (621) includes a probe driving base (6211) connected to the support platform (2), bearing brackets (6212) arranged at both ends of the probe driving base (6211), a radial rotating screw (6213) passing through the two bearing brackets (6212) and respectively rotatably connected to the two bearing brackets (6212), a radial slide rail (6214) connected to the probe driving base (6211) and located between the two bearing brackets (6212), and a radial sliding seat (6215) sleeved on the outer wall of the radial rotating screw (6213) and threadedly matched with the radial rotating screw (6213), wherein the radial sliding seat (6215) is arranged on the radial slide rail (6214) and is slidably connected to the radial slide rail (6214).

6. A probe station according to claim 5, characterized in that: The vertical moving assembly (622) includes a vertical fixed seat (6221) fixedly connected to the radial sliding seat (6215), a vertical slide rail (6222) fixedly connected to the vertical fixed seat (6221), a vertical sliding seat (6223) sleeved on the vertical slide rail (6222) and slidably connected to the vertical slide rail (6222), a vertical driving flange (6224) fixedly connected to the upper end of the vertical sliding seat (6223), and a vertical rotating screw (6225) inserted on the vertical driving flange (6224) and threadedly engaged with the vertical driving flange (6224); the end of the vertical rotating screw (6225) is rotationally connected to the vertical slide rail (6222).

7. A probe station according to claim 6, characterized in that: The transverse moving assembly (623) includes a transverse slide rail (6231) fixedly connected to the vertical sliding seat (6223), a transverse sliding seat (6232) sleeved on the transverse slide rail (6231) and slidably connected to the transverse slide rail (6231), a transverse driving protrusion (6233) fixedly connected to the upper end of the transverse slide rail (6231), a transverse fixed protrusion (6234) fixedly connected to the upper end of the transverse sliding seat (6232), and a transverse rotating screw (6235) passing through the transverse driving protrusion (6233) and threadedly engaged with the transverse driving protrusion (6233); the end of the transverse rotating screw (6235) is rotationally connected to the transverse fixed protrusion (6234).

8. A probe station according to claim 4, characterized in that: The probe positioning mechanism (63) includes an auxiliary positioning probe (631) connected to the moving end of the lateral moving component (623), and an auxiliary positioning support seat (632) connected to the support table (2) and horizontally aligned with the detection support seat (45). When the probe driving mechanism (62) drives the auxiliary positioning probe (631) to move to a press fit with the auxiliary positioning support seat (632), the detection probe mechanism (61) in the vacuum chamber (3) synchronously moves to a press fit with the detection support seat (45).

9. A probe station according to claim 8, characterized in that: The auxiliary positioning support seat (632) includes a fixed guide sleeve (6321) fixedly connected to the support platform (2), a telescopic rod (6322) movably inserted in the fixed guide sleeve (6321), a telescopic driving component (6323) arranged at the end of the fixed guide sleeve (6321) and used to drive the telescopic rod (6322) to move up and down, an auxiliary positioning base (6324) arranged at the end of the telescopic rod (6322), a pressure detection sensor (6325) arranged on the auxiliary positioning base (6324), an auxiliary positioning platform (6326) arranged on the upper side of the pressure detection sensor (6325), and a warning light (6327) arranged on the auxiliary positioning base (6324) and electrically connected to the pressure detection sensor (6325).

10. A probe station according to claim 9, characterized in that: The telescopic driving component (6323) includes a telescopic power unit (6328) arranged at the end of the fixed guide sleeve (6321), a rotating gear (6329) arranged at the output end of the telescopic power unit (6328), and a rack (6330) arranged on the telescopic rod (6322) and along the length direction of the telescopic rod (6322); the rack (6330) and the rotating gear (6329) are meshed and matched, the telescopic power unit (6328) is used to drive the rotating gear (6329) to rotate, and the rotating gear (6329) is used to drive the rack (6330) and the telescopic rod (6322) to move up and down.

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