Semiconductor general equipment debugging system and method

Abstract

The invention discloses a semiconductor general equipment debugging system and method in the technical field of semiconductor equipment debugging. The method comprises the following steps: detecting whether an operation interaction interface receives a teaching starting instruction or not; when it is detected that the operation interaction interface receives the teaching starting instruction, a data reading instruction is sent to the lower computer, and feedback data of the lower computer is received; popping up a data interaction window on the operation interaction interface, displaying feedback data of the lower computer, and receiving a read-write instruction input from the outside for data modification; and sending a command to a lower computer based on the modified data, wherein the lower computer completes equipment debugging based on the command of the upper computer. According to the method, diversified functions and operation options can be matched, instruction operation is carried out by utilizing the interactive interface, the user operation is simple, hardware and firmware upgrading is convenient, and the information display capability and interactivity of the display screen are greatly improved.

Description

Technical Field

[0001] The invention relates to a semiconductor general equipment debugging system and method, belonging to the technical field of semiconductor equipment debugging. Background Art

[0002] As the semiconductor industry increasingly relies on automated and intelligent production equipment, the teach pendant is a handheld device used for robot control. As a key automated and intelligent measurement and debugging tool in the semiconductor industry, it is simple to operate and has precise positioning. It solves the problems of complex programming and on-site intelligent debugging in semiconductor equipment, as well as accurate position calibration. This method reduces the dependence on programming languages ​​and codes, allowing operators to complete the target position calibration and debugging of the equipment without having to understand programming technology.

[0003] The traditional button teaching devices currently available on the market cannot match the diversified functions and operation options, the display screen's ability to display information and interactivity are limited, and there is a problem of complex operation of physical buttons. Summary of the invention

[0004] The purpose of the present invention is to overcome the deficiencies in the prior art and provide a semiconductor general equipment debugging system and method.

[0005] To achieve the above object, the present invention is implemented by adopting the following technical solutions:

[0006] In a first aspect, the present invention provides a semiconductor general equipment debugging method, comprising:

[0007] Detect whether the operation interactive interface receives the teaching start instruction;

[0008] In response to detecting that the operation interaction interface receives a teaching start instruction, sending a data reading instruction to the lower computer, and receiving feedback data from the lower computer;

[0009] A data interaction window pops up on the operation interaction interface to display the feedback data of the lower computer, and receive external input read and write instructions to modify data;

[0010] A command is issued to the lower computer based on the modified data, and the lower computer completes the device debugging based on the command of the upper computer.

[0011] Furthermore, the host computer uses a C# form application developed by VisualStudio compiler software as UI layout and coding, and uses standard JSON format source data as an interactive data format for establishing communication with the lower computer.

[0012] Furthermore, the data interaction form of the host computer contains entity class information, and the entity class information includes function name, type, function code, address, Bit, Mask, default value, value range, comment and multiple text boxes for recording logs.

[0013] Furthermore, after receiving the read and write instructions input from the outside, the host computer performs corresponding logic judgment on the data modification, and only allows the data modification when the logic judgment is correct.

[0014] Furthermore, a plurality of button click events are set in the operation interaction interface of the host computer, wherein each button corresponds to an axis, and each axis has a corresponding command.

[0015] Furthermore, the host computer communicates with the slave computer through WIFI transparent transmission or serial port, wherein WIFI transparent transmission communication is implemented based on MODBUSTCP / IP protocol, and serial port communication is implemented based on MODBUSRTU protocol.

[0016] Furthermore, the upper computer sends a reliability test command to the lower computer in an asynchronous thread manner.

[0017] In a second aspect, the present invention provides a semiconductor general equipment debugging system, comprising:

[0018] Signal detection module: detects whether the operation interactive interface receives the teaching start command;

[0019] Data reading module: in response to detecting that the operation interaction interface receives a teaching start instruction, sends a data reading instruction to the lower computer, and receives feedback data from the lower computer;

[0020] Command input module: pops up a data interaction window on the operation interaction interface to display the feedback data of the lower computer, and receives external input read and write commands to modify data;

[0021] Command issuing module: issues commands to the lower computer based on the modified data, and the lower computer completes the device debugging based on the command of the upper computer.

[0022] In a third aspect, the present invention provides a semiconductor general equipment debugging device, including a processor and a storage medium;

[0023] The storage medium is used to store instructions;

[0024] The processor is used to operate according to the instructions to execute the steps of any of the methods described above.

[0025] In a fourth aspect, the present invention provides a computer-readable storage medium having a computer program stored thereon, which implements the steps of any of the above methods when executed by a processor.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] 1. The present invention aims at the problem of complicated operation of physical buttons of existing teaching pendants. By designing a semiconductor general equipment debugging method, it can match diversified functions and operation options, use an interactive interface to perform command operations, avoid the wear and failure of mechanical buttons caused by long-term use, reduce maintenance and repair costs, and is simple for users to operate. The hardware firmware upgrade is convenient, and the display screen's information display capability and interactivity are greatly improved;

[0028] Second, the present invention proposes two communication methods and JSON file formats. The combination of the two also meets the application scenarios of most teaching pendants on the market. To use different devices, you only need to modify the JSON file content, and the software level does not need to be changed, so as to achieve a universal effect. Use WIFI transparent transmission to communicate and realize remote control without relying on physical connection lines. The serial port method is used to ensure communication in special environments. Use the standard JSON file format, which is universal enough.

[0029] 3. The log records in the present invention are divided into two parts. The first part is for operators, which is intuitively reflected in the interface to observe the running status of each command. The second part is for developers to find the log file in the installation directory to observe the execution status of function calls and threads. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The accompanying drawings constituting a part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the accompanying drawings:

[0031] Figure 1 An interactive interface display of a semiconductor general equipment debugging method provided by the first embodiment of the present invention Figure 1 ;

[0032] Figure 2 An interactive interface display of a semiconductor general equipment debugging method provided by the first embodiment of the present invention Figure 2 ;

[0033] Figure 3 An interactive interface display of a semiconductor general equipment debugging method provided by the first embodiment of the present invention Figure 3 . DETAILED DESCRIPTION

[0034] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments. It should be noted that the embodiments and features in the embodiments of the present invention can be combined with each other without conflict.

[0035] The following detailed description is an exemplary description, which is intended to provide further detailed description of the present invention. Unless otherwise specified, all technical terms used in the present invention have the same meaning as those generally understood by those skilled in the art to which the present invention belongs. The terms used in the present invention are only for describing specific embodiments, and are not intended to limit the exemplary embodiments according to the present invention.

[0036] Embodiment 1:

[0037] The teach pendant is a test and adjustment tool for equipment debugging and calibration. Conventional teach pendants have the problem of complex operation of physical buttons and cannot match diversified functions and operation options, such as the ability to display information on the screen and the process of data interaction. With long-term use, there are problems with wear and failure of mechanical buttons, which leads to increased maintenance and repair costs, low efficiency, cumbersome operation for operators, and complex hardware firmware upgrades. In addition, traditional teach pendants are configured with one teach pendant for each device, and cannot achieve one-to-many adaptation.

[0038] This embodiment discloses a semiconductor general equipment debugging method, which can solve various drawbacks of traditional mechanical buttons. The C# form application developed by VisualStudio compiler software is used as the UI layout and coding of the teaching pendant. The software architecture is divided into three categories: 1. Source data; 2. Communication method; 3. Specific position calibration and motion control and protection measures, among which:

[0039] Source data: uses the standard JSON format, which is lightweight and flexible, easy to parse and cross-platform; the JSON file is a unified data format for the host computer (device that directly interacts with the user, semiconductor general equipment teaching pendant application software, hereinafter referred to as "teaching pendant") and the slave computer (directly connected to the device);

[0040] Communication method: establish communication between the upper computer and the lower computer to achieve data exchange;

[0041] Motion control: read and send instructions according to the specified data (JSON file data);

[0042] See also Figure 1 In the data interaction window of the teaching pendant operation interaction interface, the meaning of each entity class information is as follows:

[0043] ①Function name: as the only mark of data;

[0044] ② Type: Signed and hexadecimal types are used to ensure the accuracy of data interaction;

[0045] ③Function code: In the MODBUS protocol, different function codes correspond to different interactive messages. For example, function code 03 represents reading holding registers (reading single or multiple), function code 06 represents writing a single register, and function code 10 represents writing multiple registers.

[0046] ④Address: Each function corresponds to the address of a register; (they can share one address and distinguish them according to unused bits and masks);

[0047] ⑤Bit: One register is two bytes, one byte is 8 bits, a total of 16 bits;

[0048] ⑥Mask: One bit corresponds to one mask. According to different masks, the value of the register or the single (multiple) bit value of the register can be obtained by taking the value of the bit;

[0049] ⑦Default value: Set different default values ​​according to different functions;

[0050] ⑧Value range: Different functions have different value ranges (the specific range is set according to the actual business); standardize the correctness of interactive data;

[0051] ⑨Comment: An explanation of the operation being performed by the current function;

[0052] Figure 1 There is a multi-text box for recording logs in the blank space below (the background color is the same as the form color, invisible by default, and log information will be displayed when there is interactive data). The specific operation process is as follows:

[0053] (1) Read: Click Read, and the value read from the lower computer will be displayed in the Read input box.

[0054] (2) Write: Enter a value in the Write input box and click Write to send a command to the host computer. Figure 1 Modify the corresponding value on the interface. Each input box has corresponding logical judgment to ensure the correctness of the input value, otherwise it cannot be modified; click Save to modify the data corresponding to the JSON file (use the function name as the unique identifier to modify the JSON file)

[0055] (3) Finally control the lower computer to complete the measurement and calibration work;

[0056] See also Figure 3 In the operating software of the teach pendant, six button click events are set. Each button corresponds to an axis, and each axis has a corresponding command.

[0057] The semiconductor general equipment teaching method of this embodiment specifically includes:

[0058] The first step is to prepare source data and entity class data. The naming of entity class data should be consistent with the naming of JSON file data. The specific process is as follows:

[0059] (1) In the form loading event, read the JSON file content, which is a string data type;

[0060] (2) Create entity class data with the same format and type as the JSON data in advance (parse the data into data that can be used by the program);

[0061] (3) Create a dictionary type in advance and use a recursive function to parse the string into the corresponding dictionary type;

[0062] (4) Use data binding to echo the data to the interface;

[0063] (5) The data required by the interface has been prepared;

[0064] The second step is interface development (the layout and settings of each control, only the visual interface layout, and no data value is reflected);

[0065] Step 3, communication: In both communication methods, the underlying layer calculates byte arrays based on different data values ​​and concatenates them as messages for sending data, where:

[0066] (1) WIFI transparent transmission, that is, implementing the MODBUSTCP / IP protocol. Different values ​​are calculated according to the function code, address, bit, mask, etc. of each data, and finally the data is spliced ​​and sent according to the prescribed message format. Different function codes correspond to different message formats;

[0067] (2) Serial port method, that is, implementing the MODBUSRTU protocol. The implementation process is the same as TCP / IP, preparing data and splicing byte arrays.

[0068] Step 4: Parse the entity class data to the interface (perfect the second step, echo the data to the interactive interface), such as Figure 2 As shown. This control is DataGridView, referred to as DGV, which is widely used in UI layout to process data. Design process: Set the double-click event, and the data interaction form will appear ( Figure 1 ), read and write operations; Save button settings: simplify data modification. Principle: FuncName is a unique identifier that cannot be modified. Set a click event for the Save button. Logically determine whether it is consistent with the previous one. If it is inconsistent, loop through the dictionary to find the corresponding value according to the key and modify it. Finally, deserialize it and write it into the JSON file.

[0069] Step 5: The asynchronous thread obtains the status of the sensor limit in real time, sets the events of multiple controls on the interface (visual buttons, mostly buttons and drop-down boxes), and calculates the values ​​input on the interface and the corresponding entity class information according to the actual business logic. The calculated values ​​are used as the values ​​of data interaction. The design ideas are:

[0070] (1) Define a dictionary to collect the data sent and received;

[0071] (2) Asynchronous threads for data interaction (asynchronous to ensure that the main thread will not be blocked);

[0072] (3) Define the value of the received data;

[0073] (4) Calculate the value, echo it to the interface, and change the button's properties (Text, BackColor, etc.).

[0074] How to ensure thread safety: Use mutex to achieve it. Obtain the mutex before the thread starts to interact with data, and release the mutex at the end to achieve thread safety.

[0075] Step 6: motion control and position calibration of each axis, send instructions, and complete calibration (the business logic of each instruction is complex, and the bottom layer calls the third and fifth steps of the previously prepared methods), specifically:

[0076] (1) Separate the information of each axis on the interface, such as Figure 3 Six axes shown;

[0077] (2) Make logical judgments based on different business scenarios and issue instructions.

[0078] (3) Set the movement speed and step of the required axis to complete motion control and position calibration;

[0079] (4) The bottom layer sends commands and Figure 1 Read and write commands are public methods that are called for underlying data interaction.

[0080] Step 7: Reliability test. According to the device debugging requirements: Add a reliability function, send a command to the device, check whether it has been executed after a period of time, send the next command after it is executed, and continue to block the thread for a delay if it is not executed (at the same time, the main thread cannot be blocked). Send a stop test instruction, stop reliability, and end the thread. The specific process is:

[0081] (1) First of all, the main thread cannot be blocked and thread safety cannot be guaranteed, so the asynchronous thread method is still used.

[0082] (2) Create a thread and collect the data to be read and written.

[0083] (3) Interaction instructions are executed according to business logic, and the color of the interface controls is changed to indicate that execution is in progress.

[0084] (4) Add enumeration types to represent state switching during command execution to ensure the correctness of the process.

[0085] (5) Mutex to ensure thread safety.

[0086] (6) Stop the test, stop the thread, and change the color of the interface control to indicate the end of execution.

[0087] Step 8. Log records.

[0088] 1. Add text labels on the interface to indicate the current execution process.

[0089] Create a text label. During the command execution process, collect the command execution status (success, exception, failure) and change the Text property of the text label.

[0090] 2. Code execution process log file

[0091] Used by coders to observe whether there are errors in the code execution process.

[0092] Create a log class, write multiple methods (normal, abnormal, failure), etc., add the log class to all methods called in the entire teaching pendant application software execution, record the currently executed function name, parameter type, return value, etc., and finally generate a Log file in the Bin directory.

[0093] Embodiment 2:

[0094] A semiconductor general-purpose device debugging system can implement a semiconductor general-purpose device debugging method described in Embodiment 1, including:

[0095] Signal detection module: detects whether the operation interactive interface receives the teaching start command;

[0096] Data reading module: in response to detecting that the operation interaction interface receives a teaching start instruction, sends a data reading instruction to the lower computer, and receives feedback data from the lower computer;

[0097] Command input module: pops up a data interaction window on the operation interaction interface to display the feedback data of the lower computer, and receives external input read and write commands to modify data;

[0098] Command issuing module: issues commands to the lower computer based on the modified data, and the lower computer completes the device debugging based on the command of the upper computer.

[0099] Embodiment three:

[0100] The embodiment of the present invention further provides a semiconductor general equipment debugging device, which can implement the semiconductor general equipment debugging method described in the first embodiment, including a processor and a storage medium;

[0101] The storage medium is used to store instructions;

[0102] The processor is used to operate according to the instructions to perform the steps of the following method:

[0103] Detect whether the operation interactive interface receives the teaching start instruction;

[0104] In response to detecting that the operation interaction interface receives a teaching start instruction, sending a data reading instruction to the lower computer, and receiving feedback data from the lower computer;

[0105] A data interaction window pops up on the operation interaction interface to display the feedback data of the lower computer, and receive external input read and write instructions to modify data;

[0106] A command is issued to the lower computer based on the modified data, and the lower computer completes the device debugging based on the command of the upper computer.

[0107] Embodiment 4:

[0108] The embodiment of the present invention further provides a computer-readable storage medium, which can implement the semiconductor general device debugging method described in the first embodiment, and stores a computer program thereon, which implements the steps of the following method when the program is executed by a processor:

[0109] Detect whether the operation interactive interface receives the teaching start instruction;

[0110] In response to detecting that the operation interaction interface receives a teaching start instruction, sending a data reading instruction to the lower computer, and receiving feedback data from the lower computer;

[0111] A data interaction window pops up on the operation interaction interface to display the feedback data of the lower computer, and receive external input read and write instructions to modify data;

[0112] A command is issued to the lower computer based on the modified data, and the lower computer completes the device debugging based on the command of the upper computer.

[0113] It is known from common technical knowledge that the present invention can be implemented by other embodiments that do not deviate from its spirit or essential features. Therefore, the above disclosed embodiments are only illustrative in all respects and are not exclusive. All changes within the scope of the present invention or within the scope equivalent to the present invention are included in the present invention.

[0114] It will be appreciated by those skilled in the art that embodiments of the present invention may be provided as methods, systems or computer program products. Therefore, the present invention may take the form of a complete hardware embodiment, a complete software embodiment or an embodiment combining software and hardware. Moreover, the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0115] The present invention is described with reference to flowcharts and / or block diagrams of methods, devices (systems) and computer program products according to embodiments of the present invention. It should be understood that each process and / or block in the flowchart and / or block diagram, as well as the combination of processes and / or blocks in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor or other programmable data processing device to produce a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the process in the flowchart. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0116] These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing device to operate in a specific manner, so that the instructions stored in the computer-readable memory produce an article of manufacture comprising an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0117] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operating steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing instructions for implementing the process. Figure 1 A process or multiple processes and / or boxes Figure 1 The steps for the functions specified in one or more boxes.

[0118] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, ordinary technicians in the relevant field should understand that the specific implementation methods of the present invention can still be modified or replaced by equivalents. Any modification or equivalent replacement that does not depart from the spirit and scope of the present invention should be covered within the scope of protection of the claims of the present invention.

Claims

1. A semiconductor general equipment debugging method, characterized in that: The method is implemented by a host computer and includes: Detect whether the operation interactive interface receives the teaching start instruction; In response to detecting that the operation interaction interface receives a teaching start instruction, sending a data reading instruction to the lower computer, and receiving feedback data from the lower computer; A data interaction window pops up on the operation interaction interface to display the feedback data of the lower computer, and receive external input read and write instructions to modify data; A command is issued to the lower computer based on the modified data, and the lower computer completes the device debugging based on the command of the upper computer.

2. The semiconductor general equipment debugging method according to claim 1, characterized in that: The host computer uses a C# form application developed by Visual Studio compiler software as UI layout and coding, and uses standard JSON format source data as the interactive data format for establishing communication with the lower computer.

3. The semiconductor general equipment debugging method according to claim 1, characterized in that: The data interaction form of the host computer contains entity class information, and the entity class information includes function name, type, function code, address, Bit, Mask, default value, value range, comment and multiple text boxes for recording logs.

4. The semiconductor general equipment debugging method according to claim 1, characterized in that: After receiving the read and write instructions input from the outside, the host computer performs corresponding logic judgment on the data modification, and only allows the data modification when the logic judgment is correct.

5. The semiconductor general equipment debugging method according to claim 1, characterized in that: The operation interaction interface of the host computer is provided with a plurality of button click events, wherein each button corresponds to an axis, and each axis has a corresponding command.

6. The semiconductor general equipment debugging method according to claim 1, characterized in that: The host computer communicates with the slave computer through WIFI transparent transmission or serial port, wherein WIFI transparent transmission communication is implemented based on MODBUSTCP / IP protocol, and serial port communication is implemented based on MODBUSRTU protocol.

7. The semiconductor general equipment debugging method according to claim 1, characterized in that: The upper computer sends a reliability test command to the lower computer in the form of an asynchronous thread.

8. A semiconductor general equipment debugging system, characterized in that: include: Signal detection module: detects whether the operation interactive interface receives the teaching start command; Data reading module: in response to detecting that the operation interaction interface receives a teaching start instruction, sends a data reading instruction to the lower computer, and receives feedback data from the lower computer; Command input module: pops up a data interaction window on the operation interaction interface to display the feedback data of the lower computer, and receives external input read and write commands to modify data; Command issuing module: issues commands to the lower computer based on the modified data, and the lower computer completes the device debugging based on the command of the upper computer.

9. A semiconductor general equipment debugging device, characterized in that: including processor and storage medium; The storage medium is used to store instructions; The processor is configured to operate according to the instructions to execute the steps of the method according to any one of claims 1 to 7.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the program is executed by a processor, the steps of the method according to any one of claims 1 to 7 are implemented.

Images