Blue-light semiconductor laser array dense spectrum beam combining device with adaptive wavelength adjustment

Abstract

The invention discloses a blue-light semiconductor laser array dense spectrum beam combining device with a self-adaptive wavelength adjustment function, and belongs to the technical field of blue-light semiconductor laser. The device is characterized in that a first blue light array emits a wavelength-locked collimated laser beam; the first spectroscope splits the light beam to obtain a main light beam and an auxiliary light beam; the first polaroid adjusts the polarization state of the secondary light beam to be S polarization; the first transmission grating diffracts the S-polarized light beam, the S-polarized light beam is reflected by the first adjustable reflector and propagated along an original light path, after the S-polarized light beam passes through the first spectroscope, a transmission part is reflected by the first plane reflector and then passes through the first spectroscope, the transmission part enters the original light path to be modulated again, a reflection part and a main light beam are subjected to space beam combination, and target laser is output; the monitoring and adjusting system analyzes the wavelength and the laser quality of the target laser in real time, adjusts the angle of the first adjustable plane mirror according to the wavelength and the laser quality, and reflects the laser with the target wavelength. The effects of output beam quality improvement, laser volume compression and system reliability improvement are achieved.

Description

Technical Field

[0001] The present invention belongs to the technical field of blue light semiconductor lasers, and more specifically, relates to a blue light semiconductor laser array dense spectrum combining device with adaptive wavelength adjustment. Background Art

[0002] Blue light semiconductor lasers are a new generation of visible light sources in the world, with important application prospects, and are mainly used in laser processing (such as copper, gold, etc.), laser pumping, underwater detection, laser medical treatment and other fields. However, blue light semiconductor lasers have low brightness and cannot meet the demand for semiconductor laser power and brightness in the field of material processing. The poor beam quality makes them unsuitable for copper thick plate welding.

[0003] The kilowatt-class blue laser system can be realized through two types of technologies: high power and low brightness and high power and high brightness. The high power and low brightness technology is relatively mature, with a low threshold and easy to implement, but the power density is low and cannot break through the limitation of copper plate welding. Compared with the high power and low brightness blue laser, the high power and high brightness blue laser has a high power density and breaks through the limitation of copper thick plate welding, but its optical design is complex and difficult to implement.

[0004] Traditional spectral beam combining technology uses gratings / narrowband filters and external cavity reflectors. Through the dispersion effect of gratings / narrowband filters, only the light beam that meets the specific incident angle-wavelength relationship can return to the light-emitting unit, and the output is superimposed in the near field and far field, achieving wavelength locking and synthetic output at the same time. Although traditional spectral beam combining technology has shown significant advantages in improving the performance of high-power semiconductor lasers, it is also accompanied by some disadvantages that cannot be ignored.

[0005] Traditional single-tube spectral beam combining technology and bar spectral beam combining technology cannot achieve high brightness and will have quality degradation problems. As the number of beam combining units increases, the traditional single-tube spectral beam combining technology can achieve high-brightness blue laser output, but the quality of the beam after combining will decrease significantly due to the difference in beam characteristics of each single-tube laser. Due to the smile effect, the beam quality of the bar spectral beam combining technology decreases, affecting the beam combining effect; and the thermal crosstalk problem may be aggravated by poor heat dissipation, further affecting the stability and output quality of the spectral beam combining.

[0006] In summary, the traditional dense spectral beam combining technology has the problems of poor spectral narrowing effect, serious deterioration of beam quality due to grating dispersion effect, and a sharp increase in the far-field divergence angle of the beam due to mutual injection locking of adjacent light-emitting units caused by external cavity reflectors, which leads to poor output beam quality. Summary of the invention

[0007] In view of the defects of the related art, the purpose of the present invention is to provide a blue light semiconductor laser array dense spectral beam combining device with adaptive wavelength adjustment, aiming to solve the problem that the external cavity reflector causes adjacent light-emitting units to inject lock each other, resulting in a sharp increase in the far-field divergence angle of the light beam, thereby causing poor output beam quality.

[0008] To achieve the above-mentioned object, the present invention provides a blue light semiconductor laser array dense spectral beam combining device with adaptive wavelength adjustment, comprising a first mirror group, a first transmission grating and a monitoring and adjustment system; the first mirror group comprises: a first blue light array, a first beam splitter, a first polarizer, a first adjustable plane reflector, and a first plane reflector;

[0009] The first blue light array comprises a wavelength locking device for emitting a wavelength-locked collimated laser beam;

[0010] The first beam splitter is used to split the collimated laser beam to obtain a main beam and a side beam;

[0011] The first polarizer is used to adjust the polarization state of the sub-beam to S polarization;

[0012] The first transmission grating is used to diffract the S-polarized light beam, which is then reflected by the first adjustable reflector and propagates along the original optical path. After passing through the first beam splitter, the transmitted part is reflected by the first plane reflector. When passing through the first beam splitter again, the transmitted part enters the original optical path for re-modulation, and the reflected part is spatially combined with the main light beam to obtain a first combined light beam as the target laser output;

[0013] The monitoring and adjustment system is used to analyze the wavelength and laser quality of the target laser in real time, and adjust the angle of the first adjustable plane reflector accordingly to reflect the laser of the target wavelength.

[0014] Optionally, the device further comprises at least one second mirror group, a second transmission grating and a cylindrical mirror group; the second mirror group comprises: a second blue light array, a second beam splitter, a second polarizer, a second adjustable plane reflector, a second plane reflector, and a right-angle prism reflector;

[0015] The collimated laser beam emitted by the second blue light array is at 90° to the collimated laser beam emitted by the first blue light array;

[0016] The collimated laser beam emitted by the second blue light array passes through the second beam splitter, the second polarizer, the first transmission grating, the second adjustable plane reflector, the second beam splitter, the second plane reflector and the second beam splitter in sequence, and the reflected part is spatially combined with the main light beam emitted by the second blue light array to obtain a second combined light beam; the transmitted part enters the original optical path for re-modulation;

[0017] The second combined light beam is reflected by the right-angle prism reflector to generate a third combined light beam parallel to the first combined light beam;

[0018] The cylindrical lens group and the second transmission grating are used to combine the first combined light beam and the third combined light beam;

[0019] The monitoring and adjustment system is also used to adjust the angle of the second adjustable plane reflector.

[0020] Optionally, the device further comprises a spectroscope;

[0021] The beam splitter is used to split the target laser, with one part of the light being output and the other part of the light entering the monitoring and adjustment system.

[0022] Optionally, the device further comprises a focusing lens;

[0023] The focusing mirror is used to converge part of the incident target laser light, increase its power and then output it.

[0024] Optionally, the mirror surfaces of the beam splitter, the first beam splitter and the second beam splitter are all covered with a multilayer film; the multilayer film is formed by alternatingly stacking a material with a first refractive index and a material with a second refractive index, wherein the first refractive index is higher than the second refractive index.

[0025] Optionally, the cylindrical mirror group includes a first cylindrical mirror, a second cylindrical mirror and a third cylindrical mirror arranged in sequence;

[0026] The first cylindrical mirror and the second cylindrical mirror form a Kepler telescope structure, which is used to compress the spacing of the first combined light beam, and the third cylindrical mirror is used to converge the compressed first combined light beam.

[0027] Optionally, the first blue light array and the second blue light array are both composed of a plurality of single blue light tubes.

[0028] Optionally, the number of the first blue light array and the number of the second blue light array are at least one;

[0029] When the number of the first blue light array exceeds one, the device further comprises a cylindrical lens group and a second transmission grating;

[0030] The cylindrical mirror group and the second transmission grating are used to combine a plurality of parallel first combined light beams.

[0031] Compared with the prior art, the above technical solution conceived by the present invention can achieve the following beneficial effects:

[0032] 1. The embodiment of the present invention provides a blue light semiconductor laser array dense spectrum combining device with adaptive wavelength adjustment. Through the separate wavelength locking and spectrum synthesis process, the blue light array has its own wavelength locking device, which can lock the wavelength of the emitted blue light. Through this process, the wavelength locking process and the spectrum synthesis process are separated, which greatly reduces the influence of the dispersion device on the beam quality in the traditional spectrum synthesis process, suppresses the dispersion effect in principle, eliminates mutual locking, and achieves the improvement of output beam quality, laser volume compression, and system reliability improvement. At the same time, the device adopts a resonant cavity design, which is composed of an adjustable plane reflector, a transmission grating, a polarizer, and a plane reflector. The light emitted by the blue light array passes through a beam splitter, and the secondary beam is reflected through a polarizer and enters the transmission grating to the adjustable plane reflector. It is reflected by the adjustable plane reflector and passes through the transmission grating, polarizer, and beam splitter again, and finally reflects again to the plane reflector, and is combined with the main beam. The target wavelength beam oscillates repeatedly in the resonant cavity, eliminating the problem of the external cavity reflector causing the adjacent light-emitting units to inject and lock each other, resulting in a sharp increase in the far-field divergence angle of the beam. At the same time, through the multiple oscillations of the light beam in the resonant cavity, the blue light laser power and efficiency are further greatly improved. The monitoring and adjustment system adjusts the angle of the adjustable plane reflector to select the reflected target wavelength and realize adaptive wavelength adjustment.

[0033] 2. The embodiment of the present invention provides a blue light semiconductor laser array dense spectral beam combining device with adaptive wavelength adjustment, in which the cylindrical mirror group and the second transmission grating play the role of spectrum synthesis. The spacing of the light beams emitted by each light emitting element is shortened by the first cylindrical mirror and the second cylindrical mirror in the cylindrical mirror group, and then converged to the second transmission grating by the third cylindrical mirror, and the spectral beam combining effect is achieved through the transmission grating. At the same time, the optical fiber output is used to improve the power density and brightness. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a schematic structural diagram of a blue light semiconductor laser array dense spectral beam combining device with adaptive wavelength adjustment provided by the present invention;

[0035] Figure 2 is a schematic diagram of a focusing system provided by the present invention;

[0036] Figure 3 is a schematic diagram of the resonant cavity provided by the present invention;

[0037] Figure 4 It is a schematic diagram of the output and monitoring and regulating system provided by the present invention;

[0038] Figure 5 It is a principle diagram of the blue light array provided by the present invention.

[0039] In the above drawings, the reference numerals are the same, and the reference numerals are:

[0040] 1. The first adjustable plane reflector, 2. The first transmission grating, 3. The first polarizer, 4. The first blue light array, 5. The first plane reflector, 6. The first beam splitter, 7. The right-angle prism reflector, 8. The first cylindrical mirror, 9. The second cylindrical mirror, 10. The third cylindrical mirror, 11. The second transmission grating, 12. The beam splitter, 13. The focusing mirror, 14. The optical fiber, 15. The monitoring and adjustment system, 16. The second plane reflector, 17. The second beam splitter, 18. The second blue light array, 19. The second polarizer, 20. The second adjustable plane reflector, 21. The blue light single tube, 22. The fourth cylindrical mirror, 23. The fifth cylindrical mirror, 24. The third plane reflector. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0042] The contents involved in the above embodiment are described below in conjunction with a preferred embodiment.

[0043] A blue light semiconductor laser array intensive spectral beam combining device with adaptive wavelength adjustment, comprising a first mirror group, a first transmission grating 2 and a monitoring and adjustment system 15; the first mirror group comprises: a first blue light array 4, a first beam splitter 6, a first polarizer 3, a first adjustable plane reflector 1, and a first plane reflector 5;

[0044] The first blue light array 4 comprises a wavelength locking device for emitting a wavelength-locked collimated laser beam;

[0045] The first beam splitter 6 is used to split the collimated laser beam to obtain a main beam and a side beam;

[0046] The first polarizer 3 is used to adjust the polarization state of the sub-beam to S polarization;

[0047] The first transmission grating 2 is used to diffract the S-polarized light beam, which is then reflected by the first adjustable reflector 1 and propagates along the original optical path. After passing through the first beam splitter 6, the transmitted part is reflected by the first plane reflector 5. When passing through the first beam splitter 6 again, the transmitted part enters the original optical path for re-modulation, and the reflected part is spatially combined with the main light beam to obtain a first combined light beam as the target laser output;

[0048] The monitoring and adjusting system 15 is used to analyze the wavelength and laser quality of the target laser in real time, and adjust the angle of the first adjustable plane reflector 1 accordingly to reflect the laser of the target wavelength.

[0049] like Figure 1 As shown, the blue light semiconductor laser array dense spectral beam combining device with adaptive wavelength adjustment provided in this embodiment is suitable for generating high-brightness blue light laser. The blue light collimated laser beam generated by the first blue light array 4 is split by the first beam splitter 6 to obtain a main beam and a side beam. The reflectivity and transmittance of the first beam splitter 6 are 20:80, 80% of the light is directly transmitted as the main beam, and 20% of the light is reflected as the side beam. The side beam enters the grating modulation system for precise adjustment. The first polarizer 3 filters out part of the interference light emitted by the first blue light array 4, and adjusts the polarization state of the side beam to S polarization. It enters the first transmission grating 2 and is incident on the first adjustable reflector 1 placed at a preset position under the action of diffraction. The angle of the first adjustable reflector 1 is perpendicular to the incident light beam. The light beam is totally reflected by the first adjustable reflector 1 and propagates along the original optical path. The light beam is split again by the first beam splitter 6, and the generated transmission part is injected into the first plane reflector 5, and is vertically reflected back to the original light path again, which greatly reduces energy loss, thereby achieving efficient use of energy; the reflected part returns to the first blue light array 4 as loss; when the light beam reflected by the first plane reflector 5 passes through the first beam splitter 6 again, the generated transmission part enters the original light path for re-modulation, and the reflected part is spatially combined with the main light beam to obtain the first combined light as the target laser output. The angle of the first adjustable plane reflector 1 can be fine-tuned, and the monitoring and adjustment system 15 analyzes the wavelength and laser quality of the target laser in real time, and adjusts the angle of the first adjustable plane reflector 1 according to the target wavelength, so as to control the phase change of the reflected light beam, and finally the reflected light beam returns to the first beam splitter 6 to interfere with the main light beam, generating the expected corresponding frequency blue light, and realizing the function of real-time adjustment of the target light beam.

[0050] On the basis of the above embodiment, the mirror group in the device may include multiple ones. In a specific implementation, the device further includes at least one second mirror group, a second transmission grating 11 and a cylindrical mirror group; the second mirror group includes: a second blue light array 18, a second beam splitter 17, a second polarizer 19, a second adjustable plane reflector 20, a second plane reflector 16, and a right-angle prism reflector 7;

[0051] The collimated laser beam emitted by the second blue light array 18 is at 90° to the collimated laser beam emitted by the first blue light array 4;

[0052] The collimated laser beam emitted by the second blue light array 18 passes through the second beam splitter 6, the second polarizer 3, the first transmission grating 2, the second adjustable plane reflector 20, the second beam splitter 17, the second plane reflector 16 and the second beam splitter 17 in sequence, and the reflected part is spatially combined with the main light beam emitted by the second blue light array 18 to obtain a second combined light beam; the transmitted part enters the original optical path for re-modulation; the second combined light beam is reflected by the right-angle prism reflector 7 to generate a third combined light beam parallel to the first combined light beam;

[0053] The cylindrical lens group and the second transmission grating 11 are used to combine the first combined light beam and the third combined light beam;

[0054] The monitoring and adjusting system 15 is also used to adjust the angle of the second adjustable plane reflector 20 .

[0055] refer to Figure 1 The second mirror group has basically the same function as the first mirror group. The second mirror group and the first mirror group share the first transmission grating 2, the second transmission grating 11, the cylindrical mirror group and the monitoring and adjustment system 15. The collimated light beam emitted by the first blue light array 4 in the first mirror group is in the horizontal direction. After precise adjustment by the modulation system composed of various optical devices, the first combined light in the horizontal direction is obtained and output to the cylindrical mirror group.

[0056] In this example, if Figure 3 As shown, the collimated light beam emitted by the second blue light 18 in the second mirror group is in the vertical direction. After multiple reflections and transmissions, the second combined light beam in the vertical direction is obtained, which is propagated to the position of the right-angle prism reflector 7. After reflection by the right-angle prism reflector 7, the third combined light beam in the horizontal direction is generated, and then incident on the cylindrical mirror group. The cylindrical mirror group and the second transmission grating densely bundle the parallel first combined light beam and the third combined light beam to form a dense spectral combined beam and output the target laser. The right-angle prism reflector 7, by virtue of its unique geometric structure, that is, the specific angle formed between its internal interface and the incident light beam, ensures that total reflection can occur when the light beam touches the surface. This mechanism not only cleverly changes the original direction of travel of the light path, but also the right-angle prism reflector 7 further encrypts the light through a specific optical design, thereby enhancing the concealment and security of the optical signal.

[0057] Two sets of mirrors are used. One is to increase the number of light-emitting units, thereby increasing the number of light beams participating in dense bundling and improving the blue light power; the other is to compress the volume of the system and realize the miniaturization of the blue light beam combining device.

[0058] Among them, the cylindrical mirror group includes a first cylindrical mirror 8, a second cylindrical mirror 9 and a third cylindrical mirror 10 arranged in sequence; the first cylindrical mirror 8 and the second cylindrical mirror 9 form a Kepler telescope structure, which is used to compress the distance between the first combined light beam and the third combined light beam, and the third cylindrical mirror 10 is used to converge the compressed first combined light beam and the third combined light beam.

[0059] like Figure 2 As shown, the cylindrical mirror group is used as a focusing system, which utilizes the synergy of the first cylindrical mirror 8 and the second cylindrical mirror 9 to achieve precise focusing and adjustment of the light. The two cylindrical mirrors are placed in parallel, and the right focus of the first cylindrical mirror 8 coincides with the left focus of the second cylindrical mirror 9, forming a precise optical focusing point. When the light passes through this system, it first encounters the first cylindrical mirror 8, whose special curved surface design allows the light to be effectively converged and directed to the focal area of ​​the second cylindrical mirror 9; then, under the action of the second cylindrical mirror 9, the light undergoes a more refined adjustment, is further compressed and converted into a thinner and highly parallel beam. This process significantly shortens the relative distance between the light beams, not only improves the density and parallelism of the light, but also provides an ideal prerequisite for subsequent tight collection and beam focusing. The third cylindrical mirror 10 accurately converges the dense parallel light beams to the same point on the grating, and emits all the light beams in the same direction through the diffraction effect of the transmission grating to achieve the function of combining the dense parallel light beams. In particular, generating a target beam by superposition of light beams not only greatly reduces energy loss and improves energy utilization, but also reduces the burden of heat generation caused by energy loss on the heat dissipation system.

[0060] During the adjustment process, the secondary beam is adjusted under the action of the first adjustable plane reflector 1 and the first polarizer 3, and the adjusted light will be re-reflected and form an effective beam combination with the original transmitted light in space, significantly enhancing the intensity of the blue light. After passing through the first cylindrical mirror 8 and the second cylindrical mirror 9, it converges into a laser beam with a narrower spacing, and then converges to the transmission grating 11 through the third cylindrical mirror 10, and then passes through the second transmission grating 11 for spectral synthesis to form a dense spectral beam combination, thereby separating the wavelength locking process and the spectral beam combination process, greatly reducing the influence of the dispersion device on the beam quality, and achieving a technical breakthrough in high brightness output.

[0061] Furthermore, in another specific embodiment, the scheme of the present invention may also include two second mirror groups; the optical devices included in the two second mirror groups are the same; the second blue light arrays in the two second mirror groups are arranged on both sides of the first blue light array, and both emit collimated light beams in the vertical direction; right-angle prism reflectors are arranged in the two second mirror groups to reflect the light beams to the horizontal direction, and all horizontal light beams are combined and focused on the cylindrical mirror group at the same time. Thereby, the number of light-emitting units is further increased, the number of light beams participating in dense beaming is increased, and the blue light power is improved.

[0062] Optionally, the device further comprises a spectroscope 12;

[0063] The beam splitter 12 is used to split the target laser light, with one part of the light being output and the other part of the light entering the monitoring and adjustment system 15 .

[0064] Optionally, the device further comprises a focusing lens 13;

[0065] The focusing mirror 13 is used to focus part of the incident target laser light and increase its power before outputting it.

[0066] like Figure 4 As shown, the output optical path of the blue light semiconductor laser array dense spectrum combining device provided by the present solution is composed of a beam splitter 12, a focusing mirror 13 and an optical fiber 14. When the light passes through the beam splitter 12, about 99.9% of the light will be transmitted through, and after the focusing effect of the focusing mirror 13, a blue light beam with higher brightness and greater energy density will be formed. This light beam is finally output through the optical fiber 14. At the same time, the remaining 0.1% of the light will enter the monitoring and adjustment system 15, which is responsible for monitoring the quality and wavelength of the target laser and feeding back the monitoring data to the computer for analysis. Based on the analysis results of the computer, the monitoring and adjustment system 15 adjusts the angle of the first adjustable plane reflector 1 or the second adjustable plane reflector 20 in real time to accurately control the wavelength of the blue light output by each light-emitting unit in the blue light array, ensure the quality of the output light beam, and provide stable and high-quality blue light laser output.

[0067] Optionally, the mirror surfaces of the beam splitter 12, the first beam splitter 1 and the second beam splitter 20 are all covered with a multilayer film; the multilayer film is formed by alternately stacking a material with a first refractive index and a material with a second refractive index, wherein the first refractive index is higher than the second refractive index.

[0068] When light is incident vertically, the interference effect of the reflected light from the multilayer film will greatly increase the transmittance of the light after multiple reflections.

[0069] Optionally, the first blue light array 4 and the second blue light array 18 are both composed of a plurality of blue light single tubes.

[0070] like Figure 5 and Figure 1 As shown, the first blue light array 4 is composed of a plurality of blue light single tubes 21. These blue light single tubes form an array of blue light sources that is both efficient and stable. The array can emit multiple parallel laser beams, and the beams are evenly distributed. Figure 5As shown, the blue light array includes a collimator array, which is composed of two parts: a fast-axis collimator array and a slow-axis collimator array. The former is composed of a fourth cylindrical mirror 22, and the latter is composed of a fifth cylindrical mirror 23. The laser beam is first preliminarily adjusted by the fast-axis collimator array, and then finely collimated by the slow-axis collimator array, so as to achieve spatial beam combining of the light beams. After this process, there will be certain gaps between the collimated light beams obtained, and the width of these gaps just matches the spot width after the blue light single tube 21 is collimated. In addition, the device also includes a reflector array. This array is composed of a plurality of plane reflectors 24. Each blue light single tube corresponds to a fourth cylindrical mirror 22, a fifth cylindrical mirror 23 and a plane reflector 24. Such a design not only improves the utilization rate of the light beam, but also makes the entire blue light array more flexible and efficient in application.

[0071] Furthermore, the number of the first blue light array 4 and the number of the second blue light array 18 are at least one.

[0072] Furthermore, when the number of the first blue light arrays 4 exceeds one, the device further comprises a cylindrical lens group and a second transmission grating 11; the cylindrical lens group and the second transmission grating 11 are used to combine a plurality of parallel first combined light beams.

[0073] When there are multiple first blue light arrays 4, multiple parallel first combined light beams will be generated in the horizontal direction. At this time, a cylindrical mirror group and a second transmission grating 11 need to be set. The first cylindrical mirror 8 and the second cylindrical mirror 9 compress the spacing between the multiple first combined light beams, and the third cylindrical mirror 10 accurately converges the dense parallel light beams to the same point on the grating. Through the diffraction effect of the transmission grating, all light beams are emitted in the same direction to achieve the function of combining the dense parallel light beams.

[0074] In a specific embodiment, if Figure 1 As shown, the first mirror group includes four first blue light arrays 4, which are represented by e, f, g, and h respectively, and the second mirror group includes four second blue light arrays 18, which are represented by a, b, c, and d respectively; different blue light arrays can output light beams of different wavelengths. When there are multiple blue light arrays, the mirror group also includes multiple corresponding beam splitters, adjustable plane reflectors, and right-angle prism reflectors to form an array, and the number is the same as the number of blue light arrays.

[0075] For example, Figure 1As shown, the four first beam splitters in the first mirror group form a first beam splitter array, and the four first adjustable plane reflectors form a first adjustable plane reflector group array. Furthermore, each first adjustable plane reflector group in the first adjustable plane reflector group array corresponds to reflecting a light beam output by a blue light array, and light beams of different wavelengths are combined and output after being combined by the blue light semiconductor laser array dense spectrum combining device with adaptive wavelength adjustment provided by the present invention. Multiple blue light arrays can increase the number of light-emitting units, thereby increasing the power density of the final dense spectrum combining within a certain range without having a significant impact on the beam quality.

[0076] In this embodiment, through the separate wavelength locking and spectrum synthesis process during the adjustment process, the wavelength locking device in the blue light array can lock the wavelength of the emitted blue light, and the cylindrical mirror group and the second transmission grating play the role of spectrum synthesis to achieve beam combination; the wavelength locking process and the spectrum combination process are separated, which greatly reduces the influence of the dispersion device on the beam quality, and in principle suppresses the dispersion effect and eliminates mutual locking. Furthermore, the resonant cavity design is adopted in the device to eliminate the problem of the external cavity reflector causing the adjacent light-emitting units to inject and lock each other, resulting in a sharp increase in the far-field divergence angle of the light beam, and the technical problem of poor output beam quality, thereby achieving the beneficial effects of improving the output beam quality, compressing the laser volume, and improving the system reliability.

[0077] It will be easily understood by those skilled in the art that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A blue light semiconductor laser array dense spectral beam combining device with adaptive wavelength adjustment, characterized in that: It includes a first mirror group, a first transmission grating and a monitoring and adjustment system; the first mirror group includes: a first blue light array, a first beam splitter, a first polarizer, a first adjustable plane reflector, and a first plane reflector; The first blue light array comprises a wavelength locking device for emitting a wavelength-locked collimated laser beam; The first beam splitter is used to split the collimated laser beam to obtain a main beam and a side beam; The first polarizer is used to adjust the polarization state of the sub-beam to S polarization; The first transmission grating is used to diffract the S-polarized light beam, which is then reflected by the first adjustable reflector and propagates along the original optical path. After passing through the first beam splitter, the transmitted part is reflected by the first plane reflector. When passing through the first beam splitter again, the transmitted part enters the original optical path for re-modulation, and the reflected part is spatially combined with the main light beam to obtain a first combined light beam as the target laser output; The monitoring and adjustment system is used to analyze the wavelength and laser quality of the target laser in real time, and adjust the angle of the first adjustable plane reflector accordingly to reflect the laser of the target wavelength.

2. The device according to claim 1, characterized in that The device also includes at least one second mirror group, a second transmission grating and a cylindrical mirror group; the second mirror group includes: a second blue light array, a second beam splitter, a second polarizer, a second adjustable plane reflector, a second plane reflector, and a right-angle prism reflector; The collimated laser beam emitted by the second blue light array is at 90° to the collimated laser beam emitted by the first blue light array; The collimated laser beam emitted by the second blue light array passes through the second beam splitter, the second polarizer, the first transmission grating, the second adjustable plane reflector, the second beam splitter, the second plane reflector and the second beam splitter in sequence, and the reflected part is spatially combined with the main light beam emitted by the second blue light array to obtain a second combined light beam; the transmitted part enters the original optical path for re-modulation; The second combined light beam is reflected by the right-angle prism reflector to generate a third combined light beam parallel to the first combined light beam; The cylindrical lens group and the second transmission grating are used to combine the first combined light beam and the third combined light beam; The monitoring and adjustment system is also used to adjust the angle of the second adjustable plane reflector.

3. The device according to claim 2, characterized in that The device also includes a spectroscope; The beam splitter is used to split the target laser, with one part of the light being output and the other part of the light entering the monitoring and adjustment system.

4. The device according to claim 3, characterized in that The device also includes a focusing lens; The focusing mirror is used to converge part of the incident target laser light, increase its power and then output it.

5. The device according to claim 3, characterized in that The mirror surfaces of the beam splitter, the first beam splitter and the second beam splitter are all covered with a multilayer film; the multilayer film is formed by alternately stacking a material with a first refractive index and a material with a second refractive index, wherein the first refractive index is higher than the second refractive index.

6. The device according to claim 2, characterized in that The cylindrical mirror group comprises a first cylindrical mirror, a second cylindrical mirror and a third cylindrical mirror arranged in sequence; The first cylindrical mirror and the second cylindrical mirror form a Kepler telescope structure, which is used to compress the spacing of the first combined light beams, and the third cylindrical mirror is used to converge the compressed first combined light beams.

7. The device according to claim 1 or 2, characterized in that The first blue light array and the second blue light array are both composed of a plurality of blue light single tubes.

8. The device according to claim 1 or 2, characterized in that The number of the first blue light array and the second blue light array is at least one; When the number of the first blue light array exceeds one, the device further comprises a cylindrical lens group and a second transmission grating; The cylindrical mirror group and the second transmission grating are used to combine a plurality of parallel first combined light beams.

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