Thin film separating device

Abstract

The invention relates to a thin film sheet separating device. According to the thin film separating device, a guide hole is formed in a shell assembly in the jacking direction; the number of the jacking blocks is at least two, the jacking blocks are sleeved with each other in a sliding mode, each jacking block comprises a jacking part and a sliding part, the jacking parts are arranged in the guide holes in a sliding mode, the sliding parts are provided with sliding grooves, the sliding grooves are provided with a same rolling shaft in a penetrating mode, the rolling shaft is arranged on the sliding seat, the sliding grooves are provided with inclined sections which are not overlapped, and the inclined sections are arranged on the sliding seat. When the rolling shafts move on the inclined sections, the corresponding jacking blocks are driven to move in the jacking direction; the driving assembly drives the sliding base to slide through the push rod, and then the rolling shaft is driven to slide along the sliding groove. The thin film separating device has the advantages of being simple and compact in structure, high in flexibility and not prone to being stuck.

Description

Technical Field

[0001] The invention relates to the technical field of solid crystal, in particular to a thin film and slice separation device. Background Art

[0002] In the process of picking up the wafer, since the wafer is usually attached to the film, it is necessary to lift the film upwards through a lifting device, so that the wafer corresponding to the area is initially separated from the film, and then the wafer and the film can be completely separated by a picking device such as a suction nozzle. However, the wafer is usually thin and brittle. During the lifting process, the outer edge of the wafer is prone to breakage when it is separated from the film, resulting in material waste. At present, the lifting devices used in the industry mostly adopt a multi-stage structure, which includes an internal shell, and a plurality of lifting assemblies located in the shell that are mutually nested and can move relative to the axial direction, a spring abutting between two adjacent layers of lifting assemblies, and a driving assembly that drives the innermost layer of lifting assemblies to lift. When in use, the driving assembly moves, driving the lifting assembly to lift as a whole. When the outer layer lifting assembly abuts against the limit part, it stops moving. At this time, the spring is compressed, so that the inner layer lifting assembly can continue to lift upward with the driving assembly. At this time, the abutment area between the lifting end of the lifting assembly and the film is reduced, thereby expanding the area where the edge of the wafer and the film are separated. By analogy, the lifting end of the lifting component eventually forms a "triangle" structure with a protruding middle, and the initial separation of the wafer and the film is completed. However, in actual use, the lifting component of this lifting device is prone to jamming or even freezing, which affects production efficiency. Summary of the invention

[0003] Based on this, the object of the present invention is to provide a thin film sheet separation device, which has the advantages of simple and compact structure, high flexibility and not prone to jamming.

[0004] A thin film sheet separation device, comprising:

[0005] A shell assembly, wherein the shell assembly is provided with a guide hole along the lifting direction;

[0006] A top block, wherein the top blocks are at least two and are slidably sleeved with each other, the top block comprises a lifting part and a sliding part, the lifting part is slidably arranged in the guide hole, the sliding part is provided with a slide groove, the slide groove is penetrated by the same roller, the roller is arranged on the sliding seat, the slide groove is respectively provided with inclined sections that do not overlap with each other, and when the roller moves on the inclined section, the corresponding top block is driven to move along the lifting direction;

[0007] A driving assembly drives the sliding seat to slide through a push rod, thereby driving the roller to slide along the sliding groove.

[0008] The film sheet separation device described in the present invention controls the lifting of the top block by the cooperation of the roller and the inclined slide slot, which is less likely to get stuck than the traditional structure, and does not require structures such as springs and limit components to control the lifting process, making the overall structure simpler and more compact. At the same time, the movement of the top block in this solution can be achieved by designing the inclined section, which simplifies the design process and makes the movement of the top block more flexible.

[0009] Furthermore, the roller is located at the initial section of the slideway in the initial state, the travel height of the inclined section along the lifting direction increases from the top block sleeved on the outside to the top block sleeved on the inside, and the inclination angles of the inclined sections are equal or increase from the top block sleeved on the outside to the top block sleeved on the inside. This structure can realize the lifting method of the traditional top block, while accelerating the lifting speed and improving the lifting efficiency.

[0010] Furthermore, the roller is located at the initial section of the chute in the initial state, and the chute is provided with lifting sections at both ends connected to the inclined section and the initial section, the inclined direction of the lifting section is opposite to the inclined direction of the inclined section, and the lifting sections overlap each other; the distance between the inclined section and the initial section increases from the top block sleeved on the outside to the top block sleeved on the inside, or the inclination angle of the inclined section decreases from the top block sleeved on the outside to the top block sleeved on the inside. This structure changes the traditional lifting method and reduces the risk of wafer breakage.

[0011] Furthermore, a mounting seat is provided inside the housing assembly, the sliding seat is slidably provided on the mounting seat, an inclined groove is provided on the sliding seat, the push rod is passed through the mounting seat, a sliding rod is provided on the push rod, and the sliding rod is slidably provided in the inclined groove, so as to convert the axial movement of the push rod into the lateral movement of the mounting seat. This structure makes it difficult for the top block to get stuck during the sliding process, and improves the smoothness of the sliding of the top block.

[0012] Furthermore, the mounting seat is provided with a baffle for limiting the sliding stroke of the sliding seat, and the sliding seat is also provided with guide bosses on both sides thereof that are slidably fitted with the side surfaces of the mounting seat. This structure limits the sliding direction and stroke length of the sliding seat.

[0013] Furthermore, a stopper is provided in the mounting seat, the stopper is provided with a sliding hole, the push rod is slidably inserted into the sliding hole, the push rod is provided with an abutment head abutting against the driving assembly, and a reset spring is compressed between the abutment head and the stopper. This structure enables the device to achieve automatic reset.

[0014] Furthermore, the housing assembly includes a shell, a cover plate and an upper connecting piece, the shell is provided with a chamber for accommodating the mounting seat, the cover plate is detachably connected to the shell through the upper connecting piece, the cover plate is provided at one end of the shell and covers the chamber, and the guide hole is provided in the middle of the cover plate. The housing assembly is easy to disassemble and maintain.

[0015] Furthermore, the upper connecting member is provided with a first abutting flange, the cover plate is provided with a positioning groove corresponding to the first abutting flange, and the first abutting flange extends toward the positioning groove and abuts against the cover plate. This structure can realize the fixing of the cover plate.

[0016] Furthermore, the housing assembly further comprises a lower connecting piece with a threaded inner wall, a positioning boss protruding outward is provided at the bottom of the housing, the lower connecting piece is sleeved on the bottom of the housing, and is provided with a second abutting flange abutting against the top surface of the positioning boss. This structure facilitates the assembly and disassembly of the device.

[0017] Furthermore, an integrally formed mounting boss is provided in the chamber of the housing, the mounting seat is provided on the mounting boss, and the chamber is axially divided into a negative pressure chamber and a receiving chamber, and the cover plate is also provided with a plurality of adsorption holes connected to the negative pressure chamber. This structure enables the film to fit tightly with the cover plate during operation, and facilitates the separation of the film from the wafer.

[0018] For better understanding and implementation, the present invention is described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is an overall structural diagram of the jacking device;

[0020] Figure 2 is a cross-sectional view of the jacking device;

[0021] Figure 3 An exploded view of the assembly of the housing and the cover plate;

[0022] Figure 4 It is the structural diagram of the jacking assembly;

[0023] Figure 5 This is the assembly exploded view of the top block;

[0024] Figure 6 A partial diagram of the chute in one embodiment;

[0025] Figure 7 A structural diagram of the top block in another embodiment;

[0026] Figure 8-Figure 13 is the operation flow chart, where Figure 8 is the initial state, Fig. 9 To lift all the top blocks at the same time, Fig.10 For the first top block to descend, Fig.11 For the second top block to descend, Fig.12 For the third top block to descend, Fig.13 The final state of the top block.

[0027] Description of reference numerals:

[0028] 11. Shell; 111. Limiting boss; 112. Positioning boss; 113. Mounting boss; 114. Negative pressure chamber; 115. Accommodating chamber; 12. Cover plate; 121. Adsorption hole; 122. Positioning groove; 123. Plane; 124. Guide hole; 13. Upper connecting piece; 131. First abutting flange; 14. Lower connecting piece; 141. Second abutting flange; 21. Mounting seat; 211. Baffle; 22. Push rod; 221. Abutting head; 222. Sliding rod; 23. Sliding seat; 231. Guide boss; 232. Inclined groove; 233. Roller; 234. Bearing; 24. Stopper; 2 5. Return spring; 3. First top block; 31. First lifting part; 32. First sliding part; 33. First lifting cavity; 34. First slide groove; 4. Second top block; 41. Second lifting part; 42. Second sliding part; 43. Second lifting cavity; 44. Second slide groove; 5. Third top block; 51. Third lifting part; 52. Third sliding part; 53. Third lifting cavity; 54. Third slide groove; 6. Fourth top block; 61. Fourth lifting part; 62. Fourth sliding part; 63. Fourth slide groove; 71. Inclined section; 72. Initial section; 73. Lifting section; 74. Holding section; 75. Final section. DETAILED DESCRIPTION

[0029] See also Figure 1-5 , Figure 1 is an overall structural diagram of the jacking device; Figure 2 is a cross-sectional view of the jacking device; Figure 3 An exploded view of the assembly of the housing and the cover plate; Figure 4 It is the structural diagram of the jacking assembly; Figure 5 The exploded view of the assembly of the top block. The present invention discloses a film and sheet separation device, which is used to preliminarily separate the film from the sheet adhered to the surface thereof, so as to facilitate the subsequent picking up of the sheet. The film can be a semiconductor sheet such as a wafer. The separation device includes a housing assembly, a lifting assembly arranged in the housing assembly, and a driving assembly (not shown) for enabling the lifting assembly to lift the wafer.

[0030] The housing assembly includes a shell 11, a cover plate 12, an upper connector 13 and a lower connector 14. The shell 11 is provided with an axially penetrating chamber, and the cover plate 12 is provided on the top of the shell 11 and covers the chamber. The cover plate 12 is provided with a plurality of adsorption holes 121. When in use, a negative pressure can be formed inside the chamber by connecting a vacuum device externally. During the lifting process, the film is closely attached to the cover plate 12 through the adsorption holes 121, so that the film is peeled off the wafer.

[0031] The cover plate 12 and the housing 11 may be an integrally formed structure, or connected by glue bonding, threaded connection, snap-fitting, interlocking, etc. In this embodiment, the bottom of the cover plate 12 abuts against the top of the housing 11, and the upper connecting member 13 is sleeved on the outside of the cover plate 12 and is threadedly connected to the housing 11. The upper connecting member 13 is provided with a first abutting flange 131, which extends toward the center of the through hole and abuts against the top of the cover plate 12, so that the cover plate 12 is sandwiched between the housing 11 and the first abutting flange 131, so that the cover plate 12 and the housing 11 are detachably fixed.

[0032] Preferably, a positioning groove 122 corresponding to the first abutment flange 131 is formed on the cover plate 12, and the first abutment flange 131 extends into the positioning groove 122, so that the top surface of the upper connecting member 13 is not higher than the top surface of the cover plate 12, thereby preventing damage to other chips on the film.

[0033] To prevent the cover plate 12 from rotating relative to the housing 11, the cover plate 12 has a plane 123 on its outer wall, and the housing 11 has a limiting boss 111 that abuts against the plane 123. The plane 123 and the limiting boss 111 may be matched at two locations and symmetrically arranged along a diameter as a symmetry axis.

[0034] The bottom of the housing 11 is provided with a positioning boss 112 protruding outward. The lower connecting member 14 is sleeved on the bottom of the housing 11 and is provided with a second abutting flange 141 extending toward the middle and abutting against the top surface of the positioning boss 112. When the lower connecting member 14 is threadedly connected to an external device through the thread provided on the inner wall, the second abutting flange 141 can simultaneously squeeze and fix the housing 11 during the process of rotating the lower connecting member 14 to tighten and fix it.

[0035] An integrally formed mounting boss 113 is provided inside the housing 11. The lifting assembly is provided on the mounting boss 113, and axially separates the chamber of the housing 11 into a negative pressure chamber 114 and a receiving chamber 115, wherein the negative pressure chamber 114 is connected to the adsorption hole 121. The receiving chamber 115 extends to the bottom of the housing 11 and is connected to the outside.

[0036] The jacking assembly includes a mounting seat 21, a push rod 22, a sliding seat 23 and a plurality of jacking blocks. The push rod 22 drives the jacking blocks to rise and fall through the sliding seat 23.

[0037] The mounting seat 21 is fastened to the positioning boss 112 by screws. A sliding cavity is provided inside the mounting seat 21, and the sliding cavity is communicated with the accommodating cavity 115. A stopper 24 is provided in the sliding cavity to abut against the driving component, and the stopper 24 is provided with a sliding hole, and the push rod 22 is slidably penetrated in the sliding hole. Preferably, the push rod 22 is provided with an abutment joint 221, and a return spring 25 is compressed and provided between the abutment joint 221 and the stopper 24. When the push rod 22 is pushed upward by the thrust, the return spring 25 is compressed, and when the thrust is withdrawn, the return spring 25 is released, thereby pushing the push rod 22 to move downward to achieve reset.

[0038] The sliding seat 23 is slidably disposed on the top of the mounting seat 21, and baffles 211 are disposed on both sides of the top of the mounting seat 21 to limit the sliding stroke of the sliding seat 23. Guide bosses 231 are also disposed on both sides of the sliding seat 23 to slide and fit with the side of the mounting seat 21 to guide and limit the sliding direction of the sliding seat 23. An inclined groove 232 is provided on the sliding seat 23, and a sliding rod 222 is disposed on the push rod 22. The sliding rod 222 is inserted into the inclined groove 232 and slides along the inclined groove 232, thereby converting the axial movement of the push rod 22 into the lateral movement of the mounting seat 21.

[0039] The cover plate 12 is provided with a guide hole 124, and the top block is slidably arranged in the guide hole 124. There are at least two top blocks, and the number can be selected according to actual conditions, such as 2 or 3 or more. In this embodiment, four top blocks are used as an example for explanation. The four top blocks are respectively a first top block 3, a second top block 4, a third top block 5 and a fourth top block 6.

[0040] The first top block 3 includes a first lifting portion 31 and a first sliding portion 32. The first lifting portion 31 and the first sliding portion 32 can be an integrally formed structure, or fixedly connected to each other through a detachable structure. The first lifting portion 31 is inserted into the guide hole 124, and its shape is adapted to the shape of the guide hole 124. A first lifting cavity 33 is provided inside the first lifting portion 31. The top surface of the first lifting portion 31 is used to abut against the film, and its bottom end is connected to the first sliding portion 32. The first sliding portion 32 is provided with a first slide groove 34, and a roller 233 is inserted into the first slide groove 34. The roller 233 is rotatably connected to the sliding seat 23 through a bearing 234. A groove recessed along the lifting direction is also provided in the first sliding portion 32.

[0041] The second top block 4 includes a second lifting portion 41 and a second sliding portion 42. The second lifting portion 41 and the second sliding portion 42 can be an integrally formed structure, or fixedly connected to each other through a detachable structure. The second lifting portion 41 is inserted into the first lifting cavity 33, and its shape is adapted to the shape of the first lifting cavity 33, and a second lifting cavity 43 is provided inside the second lifting portion 41. The top surface of the second lifting portion 41 is used to abut against the film, and its bottom end is connected to the second sliding portion 42. The second sliding portion 42 is provided with a second slide groove 44, and the roller 233 is inserted into the second slide groove 44. The second sliding portion 42 is arranged in the groove of the first sliding portion 32, and a groove recessed along the lifting direction is also provided in the second sliding portion 42.

[0042] The third top block 5 includes a third lifting part 51 and a third sliding part 52. The third lifting part 51 and the third sliding part 52 can be an integrally formed structure, or fixedly connected to each other through a detachable structure. The third lifting part 51 is inserted into the second lifting cavity 43, and its shape is adapted to the shape of the second lifting cavity 43, and a third lifting cavity 53 is provided inside the third lifting part. The top surface of the third lifting part 51 is used to abut against the film, and its bottom end is connected to the third sliding part 52. The third sliding part 52 is provided with a third slide groove 54, and the roller 233 is inserted into the third slide groove 54. The third sliding part 52 is arranged in the groove of the second sliding part 42, and a groove recessed along the lifting direction is also provided in the third sliding part 52.

[0043] The fourth top block 6 includes a fourth lifting portion 61 and a fourth sliding portion 62. The fourth lifting portion 61 and the fourth sliding portion 62 may be an integrally formed structure, or may be fixedly connected to each other through a detachable structure. The fourth lifting portion 61 is inserted into the third lifting cavity 53, and its shape is adapted to the shape of the third lifting cavity 53. It may have a hole inside, or may be a solid structure. The top surface of the fourth lifting portion 61 is used to abut against the film, and its bottom end is connected to the fourth sliding portion 62. The fourth sliding portion 62 is provided with a fourth slide groove 63, and the roller 233 is inserted into the fourth slide groove 63. The fourth sliding portion 62 is arranged in the groove of the third sliding portion 52.

[0044] The first slide groove 34, the second slide groove 44, the third slide groove 54 and the fourth slide groove 63 are all provided with an inclined section 71 and penetrated by the same roller 233. When the roller 233 moves upward along the inclined section 71, the top block corresponding to the inclined section 71 descends; when the roller 233 moves in the reverse direction, the top block corresponding to the inclined section 71 rises, thereby lifting the film.

[0045] The structure of the slideway can be designed according to the path, speed and sequence of the lifting of the top block.

[0046] In one embodiment, the starting points of the inclined sections 71 are all located on the same straight line, which is parallel to the axial direction of the roller 233. The travel height of the inclined section 71 along the lifting direction increases from the first top block 3 to the fourth top block 6, and the inclination angle of the inclined section 71 is equal or increases from the first top block 3 to the fourth top block 6. When the roller 233 abuts against the initial points of the first chute 34, the second chute 44, the third chute 54 and the fourth chute 63, the top ends of the first lifting part 31, the second lifting part 41, the third lifting part 51 and the fourth lifting part 61 are located on the same plane 123 and are flush with the cover plate 12. After the roller 233 passes through the inclined section 71, the top ends of the first lifting part 31, the second lifting part 41, the third lifting part 51 and the fourth lifting part 61 all protrude from the cover plate 12 and present a "triangular" structure. At this time, the lifting part completes the preliminary separation of the film and the wafer.

[0047] When the roller 233 rolls to the inclined section 71, the first top block 3, the second top block 4, the third top block 5 and the fourth top block 6 are lifted simultaneously. Figure 6 , Figure 6 It is a partial view of the slideway in an embodiment. Specifically, the first top block 3 is lifted into place first, and then the second top block 4, the third top block 5 and the fourth top block 6 are lifted into place in sequence, so as to finally form a "triangle" structure.

[0048] When the inclination angles are different, the inclination angle of the inclined section 71 of the first top block 3 is the smallest, so its lifting speed is the slowest, the lifting speed of the second top block 4 is faster than that of the first top block 3, and the lifting speed of the third top block 5 is slower than that of the fourth top block 6. The inclination angle of the inclined section 71 of the fourth top block 6 is the largest, and its lifting speed is the fastest, thereby forming a "triangle" structure during the lifting process.

[0049] The two ends of the slide groove are also provided with an initial section and an end section, so as to set a margin for the moving stroke of the roller 233 to prevent the top block of the roller 233 from colliding or getting stuck.

[0050] See also Figure 7-13 , Figure 7 A structural diagram of the top block in another embodiment; Figure 8-Figure 13 is the operation flow chart, where Figure 8 is the initial state, Fig. 9 To lift all the top blocks at the same time, Fig.10 For the first top block to descend, Fig.11 For the second top block to descend, Fig.12 For the third top block to descend, Fig.13 The final state of the top block.

[0051] In another embodiment, the first slide groove 34, the second slide groove 44, the third slide groove 54 and the fourth slide groove 63 are further provided with a lifting section 73 which is connected with the inclined section 71 and overlaps with each other, and the inclined direction of the lifting section 73 is opposite to that of the inclined section 71. When the roller 233 abuts against the lifting section 73, the first top block 3, the second top block 4, the third top block 5 and the fourth top block 6 are lifted at the same speed at the same time, and the top ends are in the same plane 123, so as to lift the film and the wafer.

[0052] The inclined sections 71 of the first chute 34, the second chute 44, the third chute 54 and the fourth chute 63 have the same inclination angle and stroke length. The roller 233 is located at one end of the chute in the initial state, and the distance between the inclined section 71 and the end increases from the first top block 3 sleeved on the outside to the fourth top block 6 sleeved on the inside. Specifically, a holding section 74 is provided between the inclined section 71 and the lifting section 73, and the holding sections 74 of the first top block 3, the second top block 4, the third top block 5 and the fourth top block 6 increase in stroke length in sequence, so that the time when the roller 233 arrives at the inclined sections 71 of each chute has a sequence. When the roller 233 moves from the holding section 74 to the inclined section 71, the roller 233 first arrives at the inclined section 71 of the first top block 3, and the first top block 3 descends, so that the film located at the edge of the wafer begins to separate from the wafer. While the first top block 3 is descending, the roller 233 reaches the inclined section 71 of the second top block 4 and the inclined section 71 of the third top block 5 in turn, so that the second top block 4 and the third top block 5 are descended in turn. Since the fourth top block 6 is still in the lifting state, the wafer is lifted up. Therefore, when the second top block 4 and the third top block 5 are descended in turn, the film is reset downward, so that the edge of the wafer is further separated from the film, and the wafer and the film are initially separated. Finally, the roller 233 reaches the inclined section 71 of the fourth top block 6, so that the fourth top block 6 is reset, so that it is convenient for the pickup device to absorb the wafer.

[0053] Of course, the retaining section 74 may be omitted, so that the inclined section 71 is directly connected to the lifting section 73. At this time, the inclined sections 71 of the first slide groove 34, the second slide groove 44, the third slide groove 54 and the fourth slide groove 63 have different inclination angles, so that the descending speeds of the first top block 3, the second top block 4, the third top block 5 and the fourth top block 6 are different, that is, the inclination angle of the inclined section 71 decreases successively from the first top block 3 mounted on the outside to the fourth top block 6 mounted on the inside, thereby realizing the sequential descent from the first top block 3 to the fourth top block 6, thereby achieving the effect of preliminary separation of the chip and the film.

[0054] Preferably, the retaining section 74 extends horizontally, and when the roller 233 abuts against the retaining section 74, the top block is kept at the highest position, thereby achieving the transition of the top block rising and falling.

[0055] An initial section 72 and an end section 75 are also provided at both ends of the slide groove. The initial section 72 is connected to the lifting section 73, and the end section 75 is connected to the inclined section 71, so as to set a margin for the moving stroke of the roller 233 to avoid collision or jamming of the top block of the roller 233.

[0056] The driving assembly is connected to the push rod 22 after passing through the accommodating cavity 115, thereby driving the push rod 22 to reciprocate axially. The driving assembly can be an axial telescopic motor, whose output shaft is connected to the push rod 22; or a structure in which a camshaft is driven by a rotary motor, and the cam of the camshaft abuts against the push rod 22.

[0057] When in use, the film is set on the cover plate 12 and is closely attached to the cover plate 12 through the adsorption hole 121. At this time, the driving component starts to drive the push rod 22 to move upward, and the push rod 22 pushes the slide bar 222 to slide. When the slide bar 222 slides along the inclined groove 232, it drives the sliding seat to move horizontally, so that the roller 233 slides along the slide groove, and then drives the top block to lift up. The top block lifts up the wafer to separate the wafer from the film. At this time, the driving component is reset, and the reset spring 25 pushes the push rod 22 to move downward, that is, the overall reset is completed.

[0058] The film sheet separation device described in the present invention controls the lifting of the top block by the cooperation of the roller and the inclined slide slot, which is less likely to get stuck than the traditional structure, and does not require structures such as springs and limit components to control the lifting process, making the overall structure simpler and more compact. At the same time, the movement of the top block in this solution can be achieved by designing the inclined section, which simplifies the design process and makes the movement of the top block more flexible.

[0059] It should be understood that, in the description of the present application, the terms "center", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. The terms "first", "second", "third", and "fourth" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated, that is, the features defined as "first", "second", "third", and "fourth" may explicitly or implicitly include one or more of the features. In addition, unless otherwise specified, "multiple" means two or more.

[0060] It should be noted that, in the description of this application, unless otherwise clearly specified and limited, the terms "disposed", "connected", "connected", and "hollow" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0061] The above-mentioned embodiments only express several implementation methods of the present invention, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the invention patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, and the present invention is also intended to include these modifications and modifications.

Claims

1. A thin film sheet separation device, characterized in that: include: A shell assembly, wherein the shell assembly is provided with a guide hole along the lifting direction; A top block, wherein the top blocks are at least two and are slidably sleeved with each other, the top block comprises a lifting part and a sliding part, the lifting part is slidably arranged in the guide hole, the sliding part is provided with a slide groove, the slide groove is penetrated by the same roller, the roller is arranged on the sliding seat, the slide groove is respectively provided with inclined sections that do not overlap with each other, and when the roller moves on the inclined section, the corresponding top block is driven to move along the lifting direction; A driving assembly drives the sliding seat to slide through a push rod, thereby driving the roller to slide along the sliding groove.

2. A thin film sheet separation device according to claim 1, characterized in that: The roller is located at the initial section of the slide groove in the initial state, and the travel height of the inclined section along the lifting direction increases successively from the top block mounted on the outside to the top block mounted on the inside, and the inclination angles of the inclined sections are equal or increase successively from the top block mounted on the outside to the top block mounted on the inside.

3. A thin film sheet separation device according to claim 1, characterized in that: The roller is located at the initial section of the slide groove in an initial state, and the slide groove is respectively provided with lifting sections whose two ends are connected with the inclined section and the initial section, the inclined direction of the lifting section is opposite to the inclined direction of the inclined section, and the lifting sections overlap with each other; the distance between the inclined section and the initial section increases gradually from the top block sleeved on the outside to the top block sleeved on the inside, or the inclination angle of the inclined section decreases gradually from the top block sleeved on the outside to the top block sleeved on the inside.

4. A thin film sheet separation device according to claim 1, 2 or 3, characterized in that: A mounting seat is arranged inside the shell assembly, the sliding seat is slidably arranged on the mounting seat, an inclined groove is opened on the sliding seat, the push rod is passed through the mounting seat, a sliding rod is arranged on the push rod, and the sliding rod is slidably arranged in the inclined groove, thereby converting the axial movement of the push rod into the lateral movement of the mounting seat.

5. A thin film sheet separation device according to claim 4, characterized in that: The mounting seat is provided with a baffle for limiting the sliding stroke of the sliding seat, and both sides of the sliding seat are also provided with guide bosses that are slidably fitted with the side surfaces of the mounting seat.

6. A thin film sheet separation device according to claim 4, characterized in that: A stopper is provided in the mounting seat, the stopper is provided with a sliding hole, the push rod is slidably inserted into the sliding hole, the push rod is provided with an abutment head abutting against the driving component, and a return spring is compressed and arranged between the abutment head and the stopper.

7. A thin film sheet separation device according to claim 6, characterized in that: The shell assembly includes an outer shell, a cover plate and an upper connecting piece. A chamber for accommodating the mounting seat is provided inside the outer shell. The cover plate is detachably connected to the outer shell through the upper connecting piece. The cover plate is arranged at one end of the outer shell and covers the chamber. The guide hole is opened in the middle of the cover plate.

8. A thin film sheet separation device according to claim 7, characterized in that: The upper connecting member is provided with a first abutting flange, and the cover plate is provided with a positioning groove corresponding to the first abutting flange. The first abutting flange extends toward the positioning groove and abuts against the cover plate.

9. A thin film sheet separation device according to claim 8, characterized in that: The shell assembly also includes a lower connecting piece with a threaded inner wall, the bottom of the shell is provided with a positioning boss protruding outward, the lower connecting piece is sleeved on the bottom of the shell, and is provided with a second abutting flange abutting against the top surface of the positioning boss.

10. The thin film sheet separation device according to claim 4, characterized in that: An integrally formed mounting boss is provided in the chamber of the shell, the mounting seat is provided on the mounting boss, and the chamber is axially divided into a negative pressure chamber and a containing chamber, and a plurality of adsorption holes connected with the negative pressure chamber are also provided on the cover plate.

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