Semiconductor element with electrode with stepped side wall and preparation method thereof

Abstract

The present disclosure provides a semiconductor device including a lower electrode structure disposed over a semiconductor substrate. The lower electrode structure comprises a first metal layer, a second metal layer, a third metal layer, a fourth metal layer and a fifth metal layer from bottom to top. The first metal layer, the third metal layer and the fifth metal layer comprise a first metal material, the second metal layer and the fourth metal layer comprise a second metal material, and the second metal material is different from the first metal material. The semiconductor device also includes a high-k dielectric structure disposed on opposite sidewalls of the lower electrode structure. The plurality of opposite side walls of the lower electrode structure are stepped. The semiconductor element also includes an upper electrode structure laterally surrounding the lower electrode structure and separated from the lower electrode structure by the high-k dielectric structure.

Description

Technical Field

[0001] This application claims priority to U.S. patent application No. 18 / 242,076 (i.e., the priority date is "September 5, 2023"), the contents of which are incorporated herein by reference in their entirety.

[0002] The present disclosure relates to a semiconductor element and a method for preparing the semiconductor element, and more particularly to a semiconductor element having an electrode with a stepped sidewall and a method for preparing the semiconductor element. Background Art

[0003] Semiconductor components are essential to many modern applications. With the advancement of electronic technology, the size of semiconductor components has become smaller and smaller, while providing more powerful functions and containing more integrated circuits. Due to the miniaturization of semiconductor device size, wafer-level chip scale packaging (WLCSP) is widely used due to its low cost and relatively simple process. In addition, a large number of manufacturing operations are implemented in such a small semiconductor component.

[0004] However, the manufacture and integration of semiconductor devices involve many complex steps and operations. The increasing complexity of the manufacture and integration of semiconductor devices may lead to defects. Therefore, there is a constant need to improve the manufacturing process of semiconductor devices to solve these problems.

[0005] The above description of “prior art” only provides background technology, does not admit that the above description of “prior art” discloses the subject matter of the present disclosure, does not constitute the prior art of the present disclosure, and any description of the above “prior art” should not be regarded as any part of this case. Summary of the invention

[0006] One embodiment of the present disclosure provides a semiconductor element. The semiconductor element includes a lower electrode structure disposed above a semiconductor substrate. The lower electrode structure includes: a first metal layer; a second metal layer disposed above the first metal layer; a third metal layer disposed above the second metal layer; a fourth metal layer disposed above the third metal layer; and a fifth metal layer disposed above the fourth metal layer. The first metal layer, the third metal layer and the fifth metal layer include a first metal material, and the second metal layer and the fourth metal layer include a second metal material, which is different from the first metal material. The semiconductor element also includes a high-k dielectric structure disposed on the opposite side of the lower electrode structure. The opposite side of the lower electrode structure is stepped. The semiconductor element also includes an upper electrode structure that laterally surrounds the lower electrode structure and is separated from the lower electrode structure by the high-k dielectric structure.

[0007] In one embodiment, the first metal layer has a first width, the second metal layer has a second width, the third metal layer has a third width, the fourth metal layer has a fourth width, and the fifth metal layer has a fifth width, wherein the first width is greater than the third width, and the third width is greater than the fifth width, and wherein the second width is greater than the fourth width. In one embodiment, the third width is greater than the second width, and the fifth width is greater than the fourth width. In one embodiment, a portion of the upper electrode structure extends between the first metal layer and the third metal layer. In one embodiment, another portion of the upper electrode structure extends between the third metal layer and the fifth metal layer.

[0008] In one embodiment, an upper surface of the lower electrode structure, an upper surface of the high-k dielectric structure, and an upper surface of the upper electrode structure are substantially coplanar with each other. In one embodiment, a melting point of the second metal material is higher than a melting point of the first metal material. In one embodiment, the semiconductor element further includes a first dielectric layer disposed between the semiconductor substrate and the first metal layer, and a second dielectric layer disposed above the first dielectric layer and laterally surrounding the upper electrode structure. In one embodiment, the first dielectric layer is separated from the upper electrode structure by the high-k dielectric structure. In one embodiment, the second dielectric layer is laterally separated from the upper electrode structure by the high-k dielectric structure.

[0009] Another embodiment of the present disclosure provides a semiconductor element. The semiconductor element includes a lower electrode structure disposed above a semiconductor substrate. The lower electrode structure includes a first metal layer; a second metal layer disposed above the first metal layer; a third metal layer disposed above the second metal layer; a fourth metal layer disposed above the third metal layer; and a fifth metal layer disposed above the fourth metal layer. The first metal layer, the third metal layer, and the fifth metal layer include a first metal material, and the second metal layer and the fourth metal layer include a second metal material, which is different from the first metal material. The first metal layer has a first width, the second metal layer has a second width, and the third metal layer has a third width, the first width is greater than the third width, and the third width is greater than the second width. The semiconductor element also includes a high-k dielectric structure disposed on opposite sidewalls of the lower electrode structure; and an upper electrode structure that laterally surrounds the lower electrode structure and is separated from the lower electrode structure by the high-k dielectric structure.

[0010] In one embodiment, a melting point of the second metal material is higher than a melting point of the first metal material. In one embodiment, the first metal material is aluminum (Al) and the second metal material is copper (Cu). In one embodiment, an upper surface of the lower electrode structure is approximately coplanar with an upper surface of the high-k dielectric structure. In one embodiment, an upper surface of the upper electrode structure is approximately coplanar with an upper surface of the high-k dielectric structure. In one embodiment, the semiconductor element further includes a first dielectric layer disposed between the semiconductor substrate and the lower electrode structure, and a second dielectric layer disposed above the first dielectric layer and laterally surrounding the upper electrode structure, wherein an upper surface of the second dielectric layer is approximately coplanar with an upper surface of the upper electrode structure. In one embodiment, the first dielectric layer and the second dielectric layer are separated from the upper electrode structure by the high-k dielectric structure.

[0011] In one embodiment, the fourth metal layer has a fourth width, the fifth metal layer has a fifth width, the third width of the third metal layer is greater than the fifth width, and the fifth width is greater than the fourth width. In one embodiment, the lower electrode structure further includes a sixth metal layer disposed above the fifth metal layer; and a seventh metal layer disposed above the sixth metal layer; wherein the sixth metal layer includes the second metal material, and the seventh metal layer includes the first metal material. In one embodiment, the sixth metal layer has a sixth width, the seventh metal layer has a seventh width, wherein the fifth width of the fifth metal layer is greater than the seventh width, and the seventh width is greater than the sixth width.

[0012] Another embodiment of the present disclosure provides a method for preparing a semiconductor element. The preparation method includes forming a lower electrode structure above a semiconductor substrate. The formation of the lower electrode structure includes forming a first metal layer above the semiconductor substrate; forming a second metal layer above the first metal layer; forming a third metal layer above the second metal layer; forming a fourth metal layer above the third metal layer; and forming a fifth metal layer above the fourth metal layer. The first metal layer, the third metal layer and the fifth metal layer include a first metal material, and the second metal layer and the fourth metal layer include a second metal material, which is different from the first metal material. The formation of the lower electrode structure also includes performing a first dry etching process to partially remove the fifth metal layer; and after performing the first dry etching process, performing a first wet etching process to partially remove the fourth metal layer. The preparation method also includes forming a high-k dielectric layer above the lower electrode structure; and forming a conductive layer above the high-k dielectric layer. The preparation method also includes performing a planarization process on the conductive layer and the high-k dielectric layer, so that an upper electrode structure and a high-k dielectric structure are formed around the lower electrode structure.

[0013] In one embodiment, during the first wet etching process, the second metal material has an etching selectivity relative to the first metal material. In one embodiment, after performing the first wet etching process, a lower surface of the fifth metal layer is exposed. In one embodiment, a portion of the high-k dielectric layer and a portion of the conductive layer extend between the first metal layer and the third metal layer. In one embodiment, after performing the first wet etching process, forming the lower electrode structure further includes performing a second dry etching process to partially remove the fifth metal layer and the third metal layer so as to expose an upper surface of the second metal layer.

[0014] In one embodiment, after performing the second dry etching process, forming the lower electrode structure further includes performing a second wet etching process to partially remove the fourth metal layer and the second metal layer. In one embodiment, after performing the second wet etching process, an upper surface and a lower surface of the third metal layer are exposed. In one embodiment, after performing the second wet etching process, forming the lower electrode structure further includes performing a third dry etching process to partially remove the fifth metal layer, the third metal layer and the first metal layer. In one embodiment, before forming the first metal layer, the preparation method further includes forming a first dielectric layer above the semiconductor substrate; forming a second dielectric layer above the first dielectric layer; and etching the second dielectric layer to form an opening exposing an upper surface of the first dielectric layer; wherein the first metal layer, the second metal layer, the third metal layer, the fourth metal layer and the fifth metal layer are formed in the opening. In one embodiment, before forming the high-k dielectric layer, the upper surface of the first dielectric layer is exposed.

[0015] The present disclosure provides an embodiment of a semiconductor element having an electrode with a stepped sidewall and a method for preparing the same. In some embodiments, the semiconductor element includes a lower electrode structure, a high-k dielectric structure disposed on the opposite sidewall of the lower electrode structure, and an upper electrode structure that laterally surrounds the lower electrode structure and is separated from the lower electrode structure by the high-k dielectric structure. In some embodiments, the opposite sidewall of the lower electrode structure is stepped. Therefore, within the same occupied area, the effective area of ​​the capacitor formed by the lower electrode structure, the high-k dielectric structure and the upper electrode structure can be increased, and the capacitance per unit area can be increased. As a result, the performance of the semiconductor element can be improved.

[0016] The above has been a fairly broad overview of the technical features and advantages of the present disclosure, so that the detailed description of the present disclosure below can be better understood. Other technical features and advantages that constitute the subject matter of the patent application scope of the present disclosure will be described below. Those with ordinary knowledge in the technical field to which the present disclosure belongs should understand that the concepts and specific embodiments disclosed below can be used to modify or design other structures or processes to achieve the same purpose as the present disclosure. Those with ordinary knowledge in the technical field to which the present disclosure belongs should also understand that such equivalent constructions cannot depart from the spirit and scope of the present disclosure as defined by the attached patent application scope. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] When with Figure 1 When read together, various aspects of the present disclosure can be best understood from the following detailed description. It should be understood that, in accordance with standard industry practice, various features are not drawn to scale. In fact, the size of various features can be arbitrarily increased or reduced for clarity of discussion.

[0018] Figure 1 is a schematic cross-sectional view illustrating a semiconductor device according to an embodiment of the present disclosure.

[0019] Figure 2 FIG. 1 is a schematic top view illustrating a portion of a semiconductor device according to an embodiment of the present disclosure. Figure 1 The cross-sectional view is along Figure 2 The section line A-A' is taken in FIG.

[0020] Figure 3 It is a schematic flow chart illustrating a method for preparing a semiconductor element according to some embodiments of the present disclosure.

[0021] Figure 4 is a schematic cross-sectional view illustrating an intermediate stage of sequentially forming a first dielectric layer and a second dielectric layer over a semiconductor substrate during formation of a semiconductor device according to some embodiments of the present disclosure.

[0022] Figure 5 is a schematic cross-sectional view illustrating an intermediate stage of etching the second dielectric layer to form an opening exposing the first dielectric layer during formation of a semiconductor device according to some embodiments of the present disclosure.

[0023] Figure 6 It is a cross-sectional schematic diagram illustrating an intermediate stage of forming multiple metal layers (i.e., a first metal layer, a second metal layer, a third metal layer, a fourth metal layer, a fifth metal layer, a sixth metal layer and a seventh metal layer from bottom to top) in an opening during the formation of a semiconductor element in some embodiments of the present disclosure.

[0024] Figure 7 is a schematic cross-sectional view illustrating an intermediate stage of forming a patterned photoresist over a plurality of metal layers during formation of a semiconductor device according to some embodiments of the present disclosure.

[0025] Figure 8 is a cross-sectional view illustrating the use of some embodiments of the present disclosure during the formation of a semiconductor device Figure 7 The patterned photoresist is used as a mask to perform the intermediate stage of the dry etching process.

[0026] Fig. 9 is a schematic cross-sectional view illustrating an intermediate stage of a wet etching process performed during the formation of a semiconductor device according to some embodiments of the present disclosure.

[0027] Fig.10 is a schematic cross-sectional view illustrating an intermediate stage of forming a patterned photoresist over a plurality of metal layers during formation of a semiconductor device according to some embodiments of the present disclosure.

[0028] Fig.11 is a cross-sectional view illustrating the use of some embodiments of the present disclosure during the formation of a semiconductor device Fig.10 The patterned photoresist is used as a mask to perform the intermediate stage of the dry etching process.

[0029] Fig.12 is a schematic cross-sectional view illustrating an intermediate stage of a wet etching process performed during the formation of a semiconductor device according to some embodiments of the present disclosure.

[0030] Fig.13 is a schematic cross-sectional view illustrating an intermediate stage of forming a patterned photoresist over a plurality of metal layers during formation of a semiconductor device according to some embodiments of the present disclosure.

[0031] Fig.14 is a cross-sectional view illustrating the use of some embodiments of the present disclosure during the formation of a semiconductor device Fig.13 The patterned photoresist is used as a mask to perform an intermediate stage of the dry etching process.

[0032] Fig.15 is a schematic cross-sectional view illustrating an intermediate stage of a wet etching process performed during the formation of a semiconductor device according to some embodiments of the present disclosure.

[0033] Fig.16 is a schematic cross-sectional view illustrating an intermediate stage of forming a patterned photoresist over a plurality of metal layers during formation of a semiconductor device according to some embodiments of the present disclosure.

[0034] Fig.17 is a cross-sectional view illustrating the use of some embodiments of the present disclosure during the formation of a semiconductor device Fig.13 The patterned photoresist is used as a mask to perform a dry etching process to form an intermediate stage of the lower electrode structure.

[0035] Fig.18is a cross-sectional view illustrating the formation of a high-k dielectric layer during the formation of a semiconductor device according to some embodiments of the present disclosure. Fig.17 The intermediate stage above the structure.

[0036] Fig.19 FIG. 1 is a schematic cross-sectional view illustrating an intermediate stage of sequentially forming a seed layer and a conductive layer on a high-L dielectric layer during formation of a semiconductor device according to some embodiments of the present disclosure.

[0037] Fig. 20 2 is a schematic cross-sectional view illustrating an intermediate stage of performing a planarization process on a conductive layer, a seed layer, and a high-k dielectric layer to form an upper electrode structure and a high-k dielectric structure during formation of a semiconductor device according to some embodiments of the present disclosure.

[0038] Fig.21 is a schematic cross-sectional view illustrating the formation of a third dielectric layer during the formation of a semiconductor device in some embodiments of the present disclosure. Fig. 20 The intermediate stage above the structure.

[0039] The accompanying drawings are described as follows:

[0040] 100:Semiconductor components

[0041] 101:Semiconductor substrate

[0042] 103: first dielectric layer

[0043] 105: Second dielectric layer

[0044] 105S: Sidewall

[0045] 105T: Upper surface

[0046] 107: Patterned mask

[0047] 110: Opening

[0048] 112: Opening

[0049] 121: First metal layer

[0050] 121S: Sidewall

[0051] 123: Second metal layer

[0052] 123S: Sidewall

[0053] 125: The third metal layer

[0054] 125B: Lower surface

[0055] 125S: Sidewall

[0056] 125S': Sidewall

[0057] 127: Fourth metal layer

[0058] 127S: Sidewall

[0059] 127S': Side wall

[0060] 129: Fifth metal layer

[0061] 129B: Lower surface

[0062] 129S: Sidewall

[0063] 129S': Side wall

[0064] 129S”: Sidewall

[0065] 131: Sixth metal layer

[0066] 131S: Sidewall

[0067] 131S': Side wall

[0068] 131S”: Sidewall

[0069] 133: Seventh metal layer

[0070] 133B: Lower surface

[0071] 133S: Sidewall

[0072] 133S”: Sidewall

[0073] 133S”': Side wall

[0074] 133T: Upper surface

[0075] 135: Lower electrode structure

[0076] 141: Patterned photoresist

[0077] 143: Patterned photoresist

[0078] 145: Patterned photoresist

[0079] 147: Patterned photoresist

[0080] 151: High-k dielectric layer

[0081] 151': High-k dielectric structure

[0082] 151a: High-k dielectric part

[0083] 151b: High-k dielectric part

[0084] 151T: Upper surface

[0085] 153: Seed layer

[0086] 153a: Seed crystal part

[0087] 153b: Seed crystal part

[0088] 155: Conductive layer

[0089] 155a: conductive part

[0090] 155b: conductive part

[0091] 157: Upper electrode structure

[0092] 157T: Upper surface

[0093] 159: third dielectric layer

[0094] 159T: Upper surface

[0095] 160a~160c: Open

[0096] 163a~163c: Conductive plug

[0097] 165a~165c: Conductive pad

[0098] 210: Dry Etching Process

[0099] 220: Dry Etching Process

[0100] 230:Dry Etching Process

[0101] 240:Dry Etching Process

[0102] 330: Wet Etching Process

[0103] 10: Preparation method

[0104] P1: Part

[0105] P2: Part

[0106] P3: Part

[0107] S11: Steps

[0108] S13: Steps

[0109] S15: Steps

[0110] S17: Steps

[0111] S19: Steps

[0112] S21: Steps

[0113] S23: Steps

[0114] S25: Steps

[0115] W1: First width

[0116] W2: Second width

[0117] W3: Third width

[0118] W4: Fourth width

[0119] W5: Fifth width

[0120] W6: Sixth Width

[0121] W7: Seventh Width DETAILED DESCRIPTION

[0122] Specific examples of components and configurations are described below to simplify the embodiments of the present disclosure. Of course, these embodiments are for illustration only and are not intended to limit the scope of the present disclosure. For example, in the description, the first component is formed on the second component, which may include an embodiment in which the first and second components are in direct contact, and may also include an embodiment in which additional components are formed between the first and second components so that the first and second components are not in direct contact. In addition, the embodiments of the present disclosure may repeat reference numbers and / or letters in many examples. The purpose of these repetitions is to simplify and clarify, and unless otherwise specified in the text, they do not themselves represent a specific relationship between the various embodiments and / or the configurations discussed.

[0123] Furthermore, for ease of description, spatially relative terms such as "beneath," "below," "lower," "above," "upper," etc. may be used herein to describe the relationship of one element or feature shown in the figures to another (other) element or feature. The spatially relative terms are intended to encompass different orientations of the elements in use or operation in addition to the orientation depicted in the figures. The device may have other orientations (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein may be interpreted accordingly.

[0124] Figure 1 is a schematic cross-sectional view illustrating a semiconductor device according to an embodiment of the present disclosure. Figure 2 1 is a schematic top view illustrating a portion of a semiconductor element (ie, a second dielectric layer and a metal layer of a lower electrode structure) according to an embodiment of the present disclosure. Figure 1 The cross-sectional view is along Figure 2 The section line A-A' is taken in FIG.

[0125] In some embodiments, the semiconductor device 100 includes a semiconductor substrate 101, a first dielectric layer 103 disposed on the semiconductor substrate 101, and a lower electrode structure 135 disposed on the first dielectric layer 103. In some embodiments, the lower electrode structure 135 includes a first metal layer 121, a second metal layer 123 disposed on the first metal layer 121, a third metal layer 125 disposed on the second metal layer 123, a fourth metal layer 127 disposed on the third metal layer 125, a fifth metal layer 129 disposed on the fourth metal layer 127, a sixth metal layer 131 disposed on the fifth metal layer 129, and a seventh metal layer 133 disposed on the sixth metal layer 131. In some embodiments, the first metal layer 121, the third metal layer 125, the fifth metal layer 129, and the seventh metal layer 133 include a first metal material, and the second metal layer 123, the fourth metal layer 127, and the sixth metal layer 131 include a second metal material, and the second metal material is different from the first metal material.

[0126] In some embodiments, semiconductor device 100 further includes a high-k dielectric structure 151' disposed above first dielectric layer 103 and on opposite sidewalls of lower electrode structure 135. In some embodiments, high-k dielectric structure 151' includes high-k dielectric portions 151a and 151b covering and directly contacting sidewalls 121S, 123S, 125S, 127S, 129S, 131S, and 133S of first metal layer 121, second metal layer 123, third metal layer 125, fourth metal layer 127, fifth metal layer 129, sixth metal layer 131, and seventh metal layer 133. In some embodiments, opposite sidewalls of lower electrode structure 135 (i.e., sidewalls 121S, 123S, 125S, 127S, 129S, 131S, and 133S) together form a stepped profile.

[0127] In some embodiments, the semiconductor device 100 further includes an upper electrode structure 157 that laterally surrounds the lower electrode structure 135 and is separated from the lower electrode structure 135 by the high-k dielectric structure 151'. In some embodiments, the upper electrode structure 157 includes seed portions 153a, 153b and conductive portions 155a, 155b. Figure 1 As shown, the conductive portions 155a and 155b are disposed above and surrounded by the seed portions 153a and 153b, respectively.

[0128] In addition, the semiconductor device 100 includes a second dielectric layer 105 disposed above the first dielectric layer 103 and surrounding the lower electrode structure 135, the high-k dielectric structure 151', and the upper electrode structure 157. In some embodiments, the first dielectric layer 103 is separated from the upper electrode structure 157 by the high-k dielectric structure 151'. In some embodiments, the second dielectric layer 105 is laterally separated from the upper electrode structure 157 by the high-k dielectric structure 151'. In some embodiments, the upper surface 105T of the second dielectric layer 105, the upper surface 133T of the lower electrode structure 135 (i.e., the upper surface 133T of the topmost metal layer in the lower electrode structure 135), the high-k dielectric structure 151', and the upper top surface 157T of the upper electrode structure 157 are substantially coplanar with each other. In the context of the present disclosure, the word "substantially" means preferably at least 90%, more preferably 95%, even more preferably 98%, and most preferably 99%.

[0129] In some embodiments, the semiconductor device 100 includes a third dielectric layer 159 disposed above the second dielectric layer 105 and covering the lower electrode structure 135, the high-k dielectric structure 151′, and the upper electrode structure 157. In some embodiments, a plurality of conductive plugs 163a, 163b, and 163c are disposed in the third dielectric layer 159, and a plurality of conductive pads 165a, 165b, and 165c are disposed above the upper surface 159T of the third dielectric layer 159. In some embodiments, the conductive pad 165a is electrically connected to the conductive portion 155a of the upper electrode structure 157 via the conductive plug 163a, the conductive pad 165b is electrically connected to the lower electrode structure 135 via the conductive plug 163b, and the conductive pad 165c is electrically connected to the conductive portion 155b of the upper electrode structure 157 via the conductive plug 163c.

[0130] Figure 2 1 is a top view illustrating the second dielectric layer 105 and the lower electrode structure 135 of the semiconductor device 100 according to some embodiments. In some embodiments, the sidewalls 121S, 123S, 125S, 127S, 129S, 131S, and 133S of the first metal layer 121, the second metal layer 123, the third metal layer 127, the fourth metal layer 129, the fifth metal layer 131, the sixth metal layer 133, and the seventh metal layer 135 are as shown in FIG. Figure 2 shown.

[0131] In addition, if Figure 2As shown, the first metal layer 121 has a first width W1, the second metal layer 123 has a second width W2, the third metal layer 125 has a third width W3, the fourth metal layer 127 has a fourth width W4, the fifth metal layer 129 has a fifth width W5, the sixth metal layer 131 has a sixth width W6, and the seventh metal layer 133 has a seventh width W7. In some embodiments, the first width W1 is greater than the third width W3, the third width W3 is greater than the fifth width W5, and the fifth width W5 is greater than the seventh width W7. In some embodiments, the second width W2 is greater than the fourth width W4, and the fourth width W4 is greater than the sixth width W6.

[0132] Additionally, according to some embodiments, the third width W3 is greater than the second width W2 , the fifth width W5 is greater than the fourth width W4 , and the seventh width W7 is greater than the sixth width W6 .

[0133] The present disclosure provides an embodiment of a semiconductor device 100 having a bottom electrode 135 with stepped sidewalls (i.e., sidewalls 121S, 123S, 125S, 127S, 129S, 131S, and 133S) and a method for manufacturing the same. Since the sidewalls of the bottom electrode structure 135 are stepped, the effective area of ​​the capacitor formed by the bottom electrode structure 135, the high-k dielectric structure 151', and the top electrode structure 157 can be increased within the same occupied area, and the capacitance per unit area can be increased. As a result, the performance of the semiconductor device 100 can be improved.

[0134] Figure 3 1 is a flow chart illustrating a method 10 for manufacturing a semiconductor device 100 according to some embodiments of the present disclosure, and the method 10 includes steps S11, S13, S15, S17, S19, S21, S23 and S25. Figure 3 Steps S11 to S25 are described in detail.

[0135] Figures 4 to 21 sectional view illustrating an intermediate stage during the formation of a semiconductor device 100 according to some embodiments. Figure 4 As shown, a semiconductor substrate 101 is provided. The semiconductor substrate 101 may be or may include a packaging substrate, an interposer, a printed circuit board (PCB) and / or other circuit carriers capable of carrying an integrated circuit (IC).

[0136] The semiconductor substrate 101 may include various passive and active microelectronic components, such as resistors, capacitors, inductors, diodes, p-type field effect transistors (pFETs), n-type field effect transistors (nFETs), metal oxide semiconductor field effect transistors (MOSFETs), complementary metal oxide semiconductor (CMOS) transistors, bipolar junction transistors (BJTs), laterally diffused MOS (LDMOS) transistors, high voltage transistors, high frequency transistors, fin field effect transistors (FinFETs), other appropriate integrated circuit (IC) components, or combinations thereof.

[0137] In addition, the semiconductor substrate 101 may include various material layers (e.g., dielectric layers, semiconductor layers, and / or conductive layers) configured to form IC features (e.g., doped regions, isolation features, gate features, source / drain features, interconnect features, other features, or combinations thereof). The semiconductor substrate 101 has been simplified for clarity. It should be noted that additional features may be added to the semiconductor substrate 101, and some of the features described below may be replaced, modified, or eliminated in other embodiments.

[0138] Please still refer to Figure 4 According to some embodiments, a first dielectric layer 103 and a second dielectric layer 105 are formed on the semiconductor substrate 101. Figure 3 As shown in steps S11 and S13 of the manufacturing method 10 shown in FIG. Then, a patterned mask 107 having an opening 110 is formed on the second dielectric layer 105 . In some embodiments, the upper surface 105T of the second dielectric layer 105 is exposed through the opening 110 .

[0139] In some embodiments, the first dielectric layer 103 includes silicon dioxide (SiO2), and the second dielectric layer 105 includes silicon nitride (SiN). However, these materials are merely exemplary. Any other suitable materials may be selectively used to form the first dielectric layer 103 and the second dielectric layer 105. In some embodiments, the second dielectric layer 105 and the patterned mask 107 include different materials so that the etching selectivity of the subsequent etching process can be different.

[0140] Next, according to some embodiments, an etching process is performed using the patterned mask 107 as a mask to form an opening 112 in the second dielectric layer 105, such as Figure 5 Each step is as shown. Figure 3As shown in step S15 of the preparation method 10 shown in FIG. 10 . In some embodiments, the opening 112 penetrates the second dielectric layer 105 so as to expose the upper surface 103T of the first dielectric layer 103 and the sidewall 105S of the second dielectric layer 105. In some embodiments, the etching process for forming the opening 112 includes a wet etching process, a dry etching process, or a combination thereof. After the opening 112 is formed, the patterned mask 107 can be removed.

[0141] Then, if Figure 6 As shown, according to some embodiments, a first metal layer 121, a second metal layer 123, a third metal layer 125, a fourth metal layer 127, a fifth metal layer 129, a sixth metal layer 131 and a seventh metal layer 133 are formed in the opening 112. Each step is as follows Figure 3 As shown in step S17 of the manufacturing method 10 . In some embodiments, the first metal layer 121 is in direct contact with the upper surface 103T of the first dielectric layer 103 .

[0142] Furthermore, in some embodiments, the first metal layer 121, the second metal layer 123, the third metal layer 125, the fourth metal layer 127, the fifth metal layer 129, the sixth metal layer 131, and the seventh metal layer 133 are adjacent to and directly contact the sidewall 105S of the second dielectric layer 105. In some embodiments, the upper surface 133T of the seventh metal layer 133 is substantially coplanar with the upper surface 105T of the second dielectric layer 105.

[0143] As described above, the first metal layer 121, the third metal layer 125, the fifth metal layer 129 and the seventh metal layer 133 include a first metal material, and the second metal layer 123, the fourth metal layer 127 and the sixth metal layer 131 include a second metal material, which is different from the first metal material. In some embodiments, the melting point of the second metal material is higher than the melting point of the first metal material. In some embodiments, the first metal material includes aluminum (Al) and the second metal material includes copper (Cu). However, these materials are merely illustrative. Any other suitable material may be optionally used to form the first metal layer 121, the second metal layer 123, the third metal layer 125, the fourth metal layer 127, the fifth metal layer 129, the sixth metal layer 131 and the seventh metal layer 133.

[0144] In some embodiments, the manufacturing technology of the first metal layer 121, the second metal layer 123, the third metal layer 125, the fourth metal layer 127, the fifth metal layer 129, the sixth metal layer 131 and the seventh metal layer 133 includes multiple deposition processes, such as a chemical vapor deposition (CVD) process, a physical vapor deposition (PVD) process, an atomic layer deposition (ALD) process, and a spin coating process. After performing the deposition process, a planarization process can be performed to remove the excess portion of the metal material disposed above the upper surface 105T of the second dielectric layer 105. The planarization process can be a chemical mechanical polishing (CMP) process.

[0145] It should be understood that although Figure 6 The first metal material shown has four layers (i.e., the first metal layer 121, the third metal layer 125, the fifth metal layer 129, and the seventh metal layer 133) and the second metal material has three layers (i.e., the first metal layer 121, the third metal layer 125, the fifth metal layer 129, and the seventh metal layer 133), but the number of layers of the first metal material and the number of layers of the second metal material are not limited here, but depend on the needs of the manufacturing process and the performance requirements. For example, according to some embodiments, the number of layers of the first metal material is three and the number of layers of the second metal material is two. That is, the sixth metal layer 131 and the seventh metal layer 133 can be omitted. In this case, the upper surface of the fifth metal layer 129 is roughly coplanar with the upper surface 105T of the second dielectric layer 105. In some other embodiments, the number of layers of the first metal material and the number of layers of the second metal material can also be more than that of the present embodiment.

[0146] Then, according to some embodiments, Figure 7 As shown, a patterned photoresist 141 is formed on the upper surface 133T of the seventh metal layer 133. In some embodiments, the upper surface 133T of the seventh metal layer 133 is partially exposed by the patterned photoresist 141.

[0147] Next, according to some embodiments, a dry etching process 210 is performed using the patterned photoresist 141 as a mask to partially remove the seventh metal material 135, such as Figure 8 As shown. In some embodiments, after performing the dry etching process 210, the sidewall 133S of the seventh metal layer 133 is exposed. In addition, since the material of the seventh metal layer 133 has an etching selectivity with respect to the material of the sixth metal layer 131 during the dry etching process, the sixth metal layer 131 is substantially intact. As a result, according to some embodiments, after performing the dry etching process 210, the upper surface 131T of the sixth metal layer 131 and the sidewall 105S of the second dielectric layer 105 are partially exposed.

[0148] Then, according to some embodiments, Fig. 9As shown, a wet etching process 310 is performed to partially remove the sixth metal layer 131. Since the material of the sixth metal layer 131 has an etching selectivity relative to the material of the seventh metal layer 133 and the fifth metal layer 129 during the wet etching process, the seventh metal layer 133 and the fifth metal layer 129 are substantially intact.

[0149] In some embodiments, after performing the wet etching process 310, the sidewall 131S of the sixth metal layer 131 is exposed. In addition, according to some embodiments, the lower surface 133B of the seventh metal layer 133 and the upper surface 129T of the fifth metal layer 129 are partially exposed after performing the wet etching process 310. After performing the wet etching process 310, the patterned photoresist 141 may be removed.

[0150] Then, according to some embodiments, Fig.10 As shown, a patterned photoresist 143 is formed on the upper surface 133T of the seventh metal layer 133. In some embodiments, the upper surface 133T of the seventh metal layer 133 is partially exposed by the patterned photoresist 143.

[0151] Next, according to some embodiments, a dry etching process 220 is performed using the patterned photoresist 143 as a mask to partially remove the seventh metal layer 133 and the fifth metal layer 129. Fig.11 As shown. In some embodiments, after performing the dry etching process 220, the sidewall 133S' of the seventh metal layer 133 and the sidewall 129S of the fifth metal layer 129 are exposed. In addition, since the materials of the seventh metal layer 133 and the fifth metal layer 129 have an etching selectivity relative to the materials of the sixth metal layer 131 and the fourth metal layer 127 during the dry etching process, the sixth metal layer 131 and the fourth metal layer 127 are substantially intact. As a result, according to some embodiments, after performing the dry etching process 220, the upper surface 127T of the fourth metal layer 127 is partially exposed.

[0152] Then, according to some embodiments, Fig.12 As shown, a wet etching process 320 is performed to partially remove the sixth metal layer 131 and the fourth metal layer 127. Since the materials of the sixth metal layer 131 and the fourth metal layer 127 have an etching selectivity relative to the materials of the seventh metal layer 133, the fifth metal layer 129 and the third metal layer 125 during the wet etching process, the seventh metal layer 133, the fifth metal layer 129 and the third metal layer 125 are substantially intact.

[0153] In some embodiments, after performing the wet etching process 320, the sidewall 131S' of the sixth metal layer 131 and the sidewall 127S of the fourth metal layer 127 are exposed. In addition, according to some embodiments, after performing the wet etching process 320, the lower surface 133B of the seventh metal layer 133, the lower surface 129B of the fifth metal layer 129, and the upper surface 125T of the third metal layer 125 are partially exposed. After performing the wet etching process 320, the patterned photoresist 143 may be removed.

[0154] Then, according to some embodiments, Fig.13 As shown, a patterned photoresist 145 is formed on the upper surface 133T of the seventh metal layer 133. In some embodiments, the upper surface 133T of the seventh metal layer 133 is partially exposed by the patterned photoresist 145.

[0155] Next, if Fig.14 As shown, according to some embodiments, a dry etching process 230 is performed using the patterned photoresist 145 as a mask to partially remove the seventh metal layer 133, the fifth metal layer 129, and the third metal layer 125. In some embodiments, after the dry etching process 230 is performed, the sidewall 133S" of the seventh metal layer 133, the sidewall 129S' of the fifth metal layer 129, and the sidewall 125S of the third metal layer 125 are exposed. In addition, since the materials of the seventh metal layer 133, the fifth metal layer 129, and the third metal layer 125 have an etching selectivity relative to the materials of the sixth metal layer 131, the fourth metal layer 127, and the second metal layer 123 during the dry etching process, the sixth metal layer 131, the fourth metal layer 127, and the second metal layer 123 are substantially intact. As a result, according to some embodiments, after the dry etching process 230 is performed, the upper surface 123T of the second metal layer 123 is partially exposed.

[0156] Then, according to some embodiments, Fig.15 As shown, a wet etching process 330 is performed to partially remove the sixth metal layer 131, the fourth metal layer 127, and the second metal layer 123. Since the materials of the sixth metal layer 131, the fourth metal layer 127, and the second metal layer 123 have an etching selectivity relative to the materials of the seventh metal layer 133, the fifth metal layer 129, the third metal layer 125, and the first metal layer 121 during the wet etching process, the seventh metal layer 133, the fifth metal layer 129, the third metal layer 125, and the first metal layer 121 are substantially intact.

[0157] In some embodiments, according to some embodiments, after performing the wet etching process 330, the sidewall 131S" of the sixth metal layer 131, the sidewall 127S' of the fourth metal layer 127, and the sidewall 123S of the second metal layer 123 are exposed. In addition, the lower surface 133B of the seventh metal layer 133, the lower surface 129B of the fifth metal layer 129, the lower surface 125B of the third metal layer 125, and the upper surface 121T of the first metal layer 121 are partially exposed after the above-mentioned treatment. After performing the wet etching process 330, the patterned photoresist 145 can be removed.

[0158] Then, according to some embodiments, Fig.16 As shown, a patterned photoresist 147 is formed on the upper surface 133T of the seventh metal layer 133. In some embodiments, the upper surface 133T of the seventh metal layer 133 is partially exposed by the patterned photoresist 147.

[0159] Next, according to some embodiments, Fig.17 As shown, a dry etching process 240 is performed using the patterned photoresist 147 as a mask to partially remove the seventh metal layer 133, the fifth metal layer 129, the third metal layer 125, and the first metal layer 121. In some embodiments, after performing the dry etching process 240, the sidewall 133S'' of the seventh metal layer 133, the sidewall 129S'' of the fifth metal layer 129, the sidewall 125S' of the third metal layer 125, and the sidewall 121S of the first metal layer 121 are exposed.

[0160] In addition, since during the dry etching process, the materials of the seventh metal layer 133, the fifth metal layer 129, the third metal layer 125, and the first metal layer 121 have an etching selectivity relative to the materials of the sixth metal layer 131, the fourth metal layer 127, and the second metal layer 123, the sixth metal layer 131, the fourth metal layer 127, and the second metal layer 123 are substantially intact. In some embodiments, according to some embodiments, after performing the dry etching process 240, the upper surface 103T of the first dielectric layer 103 is partially exposed.

[0161] After the dry etching process 240, a lower electrode structure 135 including the first metal layer 121, the second metal layer 123, the third metal layer 125, the fourth metal layer 127, the fifth metal layer 129, the sixth metal layer 131 and the seventh metal layer 133 is obtained. Figure 3 As shown in step S19 of the manufacturing method 10 shown in the figure. In some embodiments, the sidewall of the lower electrode structure 135 is stepped. After partially exposing the upper surface 103T of the first dielectric layer 103, the patterned photoresist 147 can be removed.

[0162] Then, according to some embodiments, Fig.18 As shown, a high-k dielectric layer 151 is conformally formed on Fig.17 In some embodiments, the lower electrode structure 135 is covered by a high-k dielectric layer 151. In addition, in some embodiments, the upper surface 103T of the first dielectric layer 103 and the sidewall 105S and the upper surface 105T of the second dielectric layer 105 are covered by and directly contact the high-k dielectric layer 151. Figure 3 As shown in step S21 of the preparation method 10 shown.

[0163] In some embodiments, the high-k dielectric layer 151 includes a high-k dielectric material, such as hafnium oxide, lanthanum oxide, aluminum oxide, zirconium oxide, or the like. In addition, the high-k dielectric layer 151 can be deposited by a conformal deposition process, such as a CVD process, an ALD process, a plasma enhanced CVD (PECVD) process, other suitable processes, or combinations thereof.

[0164] Then, according to some embodiments, Fig.19 As shown in FIG. 1 , a seed layer 153 and a conductive layer 155 are sequentially formed on the high-k dielectric layer 151. Figure 3 As shown in step S23 of the preparation method 10 shown. In some embodiments, the seed layer 153 includes an alloy of titanium (Ti) and copper (Cu), and its manufacturing technology may include a CVD process, a PVD process, a sputtering process, a plating process or other suitable processes. In some embodiments, the conductive layer 155 includes a low resistivity conductive material, such as copper (Cu). In some other embodiments, the conductive layer 155 includes tungsten (W), aluminum (Al), titanium (Ti), tantalum (Ta), gold (Au), silver (Ag), a combination thereof or other suitable conductive materials. The manufacturing technology of the conductive layer 155 may include a CVD process, a PVD process, a sputtering process, a plating process or other suitable processes.

[0165] According to some embodiments, Fig. 20 As shown, after forming the conductive layer 155, a planarization process is performed on the conductive layer 155, the seed layer 153 and the high-k dielectric layer 151 to form an upper electrode structure 157 and a high-k dielectric structure 151'. The planarization process may include a CMP process that removes excess portions of the conductive layer 155, the seed layer 153 and the high-k dielectric layer 151 above the upper surface 105T of the second dielectric layer 105.

[0166] In some embodiments, after performing the planarization process, the remaining portion of the high-k dielectric layer 151 is referred to as high-k dielectric portions 151a and 151b, the remaining portion of the seed layer 153 is referred to as seed portions 153a and 153b, and the remaining portion of the conductive layer 155 is referred to as conductive portions 155a and 155b. In some embodiments, the high-k dielectric portions 151a and 151b together form a high-k dielectric structure 151'. In some embodiments, the seed portions 153a, 153b and the conductive portions 155a, 155b together form an upper electrode structure 157.

[0167] In some embodiments, upper electrode structure 157 has a portion P1 extending between first metal layer 121 and third metal layer 125 of lower electrode structure 135. In some embodiments, upper electrode structure 157 has a portion P2 extending between third metal layer 125 and fifth metal layer 129 of lower electrode structure 135. In some embodiments, upper electrode structure 157 has a portion P3 extending between fifth metal layer 129 and seventh metal layer 133 of lower electrode structure 135.

[0168] The upper surface 133T of the seventh metal layer 133 is also referred to as the upper surface of the lower electrode structure 135. In some embodiments, after the planarization process is performed, the upper surface of the lower electrode structure 135 is exposed. In addition, according to some embodiments, the upper top surface of the lower electrode structure 135 (i.e., the upper top surface 133T), the upper surface 151T of the high-k dielectric structure 151', the upper surface 157T of the upper electrode structure 157, and the upper surface 105T of the second dielectric layer 105 are substantially coplanar with each other. Each step is as follows: Figure 3 As shown in step S25 of the preparation method 10 shown.

[0169] Next, according to some embodiments, Fig.21 As shown, a third dielectric layer 159 having a plurality of openings 160a, 160b and 160c is formed on Fig. 20 In some embodiments, the upper surface 157T of the upper electrode structure 157 is partially exposed through the openings 160a and 160c, and the upper surface 133T of the lower electrode structure 135 is partially exposed through the opening 160b. In some embodiments, the third dielectric layer 159 includes silicon oxide, silicon nitride, silicon oxynitride, or other suitable dielectric materials.

[0170] The formation of the third dielectric layer 159 having the openings 160a, 160b, and 160c may include depositing the third dielectric layer 159 to cover the second dielectric layer 105, the upper electrode structure 157, and the lower electrode structure 135, forming a patterned mask (not shown) over the third dielectric layer 159, using the patterned mask as an etching mask to perform an etching process on the third dielectric layer 159, and removing the patterned mask. In some embodiments, the etching process for forming the openings 160a, 160b, and 160c includes a dry etching process, a wet etching process, or a combination thereof.

[0171] Then, if Figure 1 As shown, according to some embodiments, conductive plugs 163a, 163b and 163c are formed in openings 160a, 160b and 160c, respectively, and conductive pads 165a, 165b and 165c are formed above the upper surface 159T of the third dielectric layer 159. In some embodiments, the conductive plugs 163a, 163b and 163c include a conductive material, such as copper (Cu), lithium (Li), aluminum (Al), tungsten (W), titanium (Ti), titanium nitride (TiN), tantalum (Ta), tantalum nitride (TaN) or other suitable materials. In some embodiments, the manufacturing technology of the conductive plugs 163a, 163b and 163c includes a deposition process and a subsequent planarization process. The deposition process may include a CVD process, a PVD process, an ALD process, other suitable processes or combinations thereof. The planarization process may include a CMP process.

[0172] Some materials used to form the conductive pads 165a, 165b and 165c are similar or identical to the materials used to form the conductive plugs 163a, 163b and 163c, and the details thereof are not repeated here. The formation of the conductive pads 165a, 165b and 165c may include depositing a conductive layer (not shown) above the third dielectric layer 159, forming a patterned mask (not shown) above the conductive layer, using the patterned mask as an etching mask to perform an etching process on the conductive layer, and removing the patterned mask. The etching process may include a dry etching process, a wet etching process or a combination thereof. After forming the conductive pads 165a, 165b and 165c, the semiconductor element 100 is obtained.

[0173] The present disclosure provides an embodiment of a semiconductor element 100 having a lower electrode structure 135 with a stepped sidewall and a method for preparing the same. The semiconductor element 100 includes a lower electrode structure 135, a high-k dielectric structure 151' disposed on the opposite sidewalls (i.e., sidewalls 121S, 123S, 125S, 127S, 129S, 131S, and 133S) of the lower electrode structure 135, and an upper electrode structure 157 that laterally surrounds the lower electrode structure 135 and is separated from the lower electrode structure 135 by the high-k dielectric structure 151'. In some embodiments, the opposite sidewalls of the lower electrode structure 135 are stepped. Therefore, within the same footprint, the effective area of ​​the capacitor formed by the lower electrode structure 135, the high-k dielectric structure 151', and the upper electrode structure 157 can be increased, and the capacitance value per unit area can be increased. As a result, the performance of the semiconductor element 100 can be improved.

[0174] One embodiment of the present disclosure provides a semiconductor element. The semiconductor element includes a lower electrode structure disposed above a semiconductor substrate. The lower electrode structure includes: a first metal layer; a second metal layer disposed above the first metal layer; a third metal layer disposed above the second metal layer; a fourth metal layer disposed above the third metal layer; and a fifth metal layer disposed above the fourth metal layer. The first metal layer, the third metal layer and the fifth metal layer include a first metal material, and the second metal layer and the fourth metal layer include a second metal material, which is different from the first metal material. The semiconductor element also includes a high-k dielectric structure disposed on the opposite side of the lower electrode structure. The opposite side of the lower electrode structure is stepped. The semiconductor element also includes an upper electrode structure that laterally surrounds the lower electrode structure and is separated from the lower electrode structure by the high-k dielectric structure.

[0175] Another embodiment of the present disclosure provides a semiconductor element. The semiconductor element includes a lower electrode structure disposed above a semiconductor substrate. The lower electrode structure includes a first metal layer; a second metal layer disposed above the first metal layer; a third metal layer disposed above the second metal layer; a fourth metal layer disposed above the third metal layer; and a fifth metal layer disposed above the fourth metal layer. The first metal layer, the third metal layer, and the fifth metal layer include a first metal material, and the second metal layer and the fourth metal layer include a second metal material, which is different from the first metal material. The first metal layer has a first width, the second metal layer has a second width, and the third metal layer has a third width, the first width is greater than the third width, and the third width is greater than the second width. The semiconductor element also includes a high-k dielectric structure disposed on opposite sidewalls of the lower electrode structure; and an upper electrode structure that laterally surrounds the lower electrode structure and is separated from the lower electrode structure by the high-k dielectric structure.

[0176] Another embodiment of the present disclosure provides a method for preparing a semiconductor element. The preparation method includes forming a lower electrode structure above a semiconductor substrate. The formation of the lower electrode structure includes forming a first metal layer above the semiconductor substrate; forming a second metal layer above the first metal layer; forming a third metal layer above the second metal layer; forming a fourth metal layer above the third metal layer; and forming a fifth metal layer above the fourth metal layer. The first metal layer, the third metal layer and the fifth metal layer include a first metal material, and the second metal layer and the fourth metal layer include a second metal material, which is different from the first metal material. The formation of the lower electrode structure also includes performing a first dry etching process to partially remove the fifth metal layer; and after performing the first dry etching process, performing a first wet etching process to partially remove the fourth metal layer. The preparation method also includes forming a high-k dielectric layer above the lower electrode structure; and forming a conductive layer above the high-k dielectric layer. The preparation method also includes performing a planarization process on the conductive layer and the high-k dielectric layer, so that an upper electrode structure and a high-k dielectric structure are formed around the lower electrode structure.

[0177] The embodiments of the present disclosure have some advantageous features. By forming a lower electrode structure having a stepped sidewall and an upper electrode structure surrounding the lower electrode structure, the effective area of ​​the capacitor formed by the lower electrode structure and the upper electrode structure can be increased within the same occupied area, and the capacitance value per unit area can be increased. As a result, the performance of the semiconductor element 100 can be improved.

[0178] Although the present disclosure and its advantages have been described in detail, it should be understood that various changes, substitutions and replacements can be made without departing from the spirit and scope of the present disclosure defined in the scope of the claims. For example, many of the above processes can be implemented in different ways, and other processes or combinations thereof can be used to replace many of the above processes.

[0179] Furthermore, the scope of the present application is not limited to the specific embodiments of the processes, machines, manufactures, material compositions, means, methods and steps described in the specification. The skilled person can understand from the disclosure of the present disclosure that existing or future developed processes, machines, manufactures, material compositions, means, methods, or steps that have the same functions or achieve substantially the same results as the corresponding embodiments described herein can be used according to the present disclosure. Accordingly, such processes, machines, manufactures, material compositions, means, methods, or steps are included in the scope of the patent application of the present application.

Claims

1. A semiconductor element, characterized in that: include: A lower electrode structure is disposed above a semiconductor substrate, wherein the lower electrode structure comprises: a first metal layer; a second metal layer disposed above the first metal layer; a third metal layer, disposed above the second metal layer; a fourth metal layer disposed above the third metal layer; and a fifth metal layer, disposed above the fourth metal layer; wherein the first metal layer, the third metal layer and the fifth metal layer comprise a first metal material, and the second metal layer and the fourth metal layer comprise a second metal material, and the second metal material is different from the first metal material; a high-k dielectric structure disposed on an opposite side of the lower electrode structure, wherein the opposite side of the lower electrode structure is stepped; and An upper electrode structure laterally surrounds the lower electrode structure and is separated from the lower electrode structure by the high-k dielectric structure.

2. The semiconductor device according to claim 1, wherein: The first metal layer has a first width, the second metal layer has a second width, the third metal layer has a third width, the fourth metal layer has a fourth width, and the fifth metal layer has a fifth width, wherein the first width is greater than the third width, and the third width is greater than the fifth width, and wherein the second width is greater than the fourth width.

3. The semiconductor device according to claim 2, wherein: The third width is greater than the second width, and the fifth width is greater than the fourth width.

4. The semiconductor device according to claim 1, wherein: A portion of the upper electrode structure extends between the first metal layer and the third metal layer.

5. The semiconductor device according to claim 4, wherein: Another portion of the upper electrode structure extends between the third metal layer and the fifth metal layer.

6. The semiconductor device according to claim 1, wherein: An upper surface of the lower electrode structure, an upper surface of the high-k dielectric structure, and an upper surface of the upper electrode structure are coplanar with each other.

7. The semiconductor device according to claim 1, wherein: The second metal material has a melting point higher than the first metal material.

8. The semiconductor device according to claim 1, wherein: Also includes: a first dielectric layer disposed between the semiconductor substrate and the first metal layer; as well as A second dielectric layer is disposed above the first dielectric layer and laterally surrounds the upper electrode structure.

9. The semiconductor device according to claim 8, wherein: The first dielectric layer is separated from the upper electrode structure by the high-k dielectric structure.

10. The semiconductor device according to claim 8, wherein The second dielectric layer is laterally separated from the upper electrode structure by the high-k dielectric structure.

11. A semiconductor element, characterized in that: include: A lower electrode structure is disposed above a semiconductor substrate, wherein the lower electrode structure comprises: a first metal layer; a second metal layer disposed above the first metal layer; a third metal layer, disposed above the second metal layer; a fourth metal layer, disposed above the third metal layer; a fifth metal layer, disposed above the fourth metal layer; wherein the first metal layer, the third metal layer and the fifth metal layer include a first metal material, and the second metal layer and the fourth metal layer include a second metal material, and the second metal material is different from the first metal material; and The first metal layer has a first width, the second metal layer has a second width, the third metal layer has a third width, the first width is greater than the third width, and the third width is greater than the second width; a high-k dielectric structure disposed on opposite sidewalls of the bottom electrode structure; and An upper electrode structure laterally surrounds the lower electrode structure and is separated from the lower electrode structure by the high-k dielectric structure.

12. The semiconductor device according to claim 11, wherein The second metal material has a melting point higher than the first metal material.

13. The semiconductor device according to claim 12, wherein: The first metal material is aluminum, and the second metal material is copper.

14. The semiconductor device according to claim 11, wherein An upper surface of the lower electrode structure is coplanar with an upper surface of the high-k dielectric structure.

15. The semiconductor device according to claim 14, wherein: An upper surface of the upper electrode structure is coplanar with the upper surface of the high-k dielectric structure.

16. The semiconductor device according to claim 11, wherein Also includes: A first dielectric layer is disposed between the semiconductor substrate and the lower electrode structure; as well as A second dielectric layer is disposed above the first dielectric layer and laterally surrounds the upper electrode structure, wherein an upper surface of the second dielectric layer is coplanar with an upper surface of the upper electrode structure.

17. The semiconductor device according to claim 16, wherein: The first dielectric layer and the second dielectric layer are separated from the upper electrode structure by the high-k dielectric structure.

18. The semiconductor device according to claim 11, wherein The fourth metal layer has a fourth width, the fifth metal layer has a fifth width, the third width of the third metal layer is greater than the fifth width, and the fifth width is greater than the fourth width.

19. The semiconductor device according to claim 18, wherein: The lower electrode structure further comprises: a sixth metal layer disposed above the fifth metal layer; and A seventh metal layer is disposed above the sixth metal layer, wherein the sixth metal layer includes the second metal material, and the seventh metal layer includes the first metal material.

20. The semiconductor device according to claim 19, wherein The sixth metal layer has a sixth width, and the seventh metal layer has a seventh width, wherein the fifth width of the fifth metal layer is greater than the seventh width, and the seventh width is greater than the sixth width.

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