Wind generating set array sensor electrode and preparation method thereof

Abstract

The invention relates to a wind generating set array sensor electrode and a preparation method thereof. The preparation method comprises the following steps: preparing a piezoelectric coating on the surface of a wind power generation bolt; preparing a bonding layer by adopting an arc ion plating method; preparing a hardened wear-resistant layer by adopting a radio frequency magnetron sputtering method; preparing a self-lubricating conductive layer by adopting a radio frequency magnetron sputtering method; after the self-lubricating conductive layer is prepared, the bonding layer, the hardened wear-resistant layer and the self-lubricating conductive layer form the multi-element high-entropy composite electrode; and obtaining the electrode of the ultrasonic array sensor through laser etching. According to the invention, the bonding layer is prepared by fully utilizing the arc ion plating technology, the wear resistance of the electrode is improved by utilizing the conductive ceramic material, the service life of the electrode is prolonged by utilizing the self-lubricating conductive layer, the complex electrode shape is etched by utilizing laser, the preparation of the array electrode is realized, and a basis is provided for the detection of the complex stress state of the wind power generation bolt; the health state of the bolt is monitored in real time, and the safety of the wind power generation bolt is powerfully guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of array sensors for wind generator sets, and more specifically to an array sensor electrode for a wind generator set and a preparation method thereof. Background Art

[0002] The installed capacity of wind turbines is constantly expanding, and global wind power generation is increasing, thanks to the continuous improvement of wind power technology. As a renewable energy source, wind power is widely regarded as an important part of future energy and is of great significance for mitigating global warming. With the application of Internet of Things and big data technology, wind power monitoring technology is developing in the direction of intelligence, which helps to improve the operating efficiency and reliability of wind power equipment. In general, wind power technology is constantly improving, costs are decreasing, environmental benefits are becoming more prominent, and intelligence and digitalization are developing. These factors make wind power an important part of the global energy transformation.

[0003] Wind turbines are expensive, and they are used in harsh environments and complex working conditions. During operation, they are subjected to the combined effects of various loads such as vibration, torsion, and shear for a long time, and the connecting fasteners between components will be damaged to varying degrees. Bolts in various parts, especially blade root bolts, often suffer from failures such as reduced bolt tightening or even bolt breakage. If the fault is not discovered in time, it will cause equipment accidents in wind turbines, resulting in huge economic losses, and serious personal injury accidents. According to statistics, serious equipment accidents such as tower collapse and blade shedding caused by loose and broken bolts occur every year. Wind turbine operation sites are usually near the coast and remote mountainous areas. On-site maintenance is difficult, time-consuming and labor-intensive, and even requires downtime for maintenance, resulting in high maintenance costs. Therefore, it is particularly important to be able to obtain the health status of bolts remotely and in real time.

[0004] Important components in wind turbines (such as blades, hubs, main shafts, nacelles, towers, etc.) are all connected with high-strength bolts. In addition to the connection function, high-strength bolts also have the function of transmitting force and torque. Insufficient bolt preload will cause the connection parts to loosen or the structure to slip, affecting the normal use of the parts. Excessive preload will increase the risk of bolt breakage and failure. Bolts bear shear force, axial force, bending stress, etc. Traditional bolt force measurement methods cannot fully meet the use requirements. At present, sputtering smart bolts have the characteristics of high precision and high weather resistance, do not change the overall structure of the bolts, and have good application prospects. However, the current processing of sputtering smart bolt electrode materials uses a relatively primitive method of sticking insulating film, which is not conducive to large-scale production and processing. Summary of the invention

[0005] The technical problem to be solved by the present invention is to provide a wind turbine generator array sensor electrode and a preparation method thereof in view of the problems existing in the prior art.

[0006] The technical solution adopted by the present invention to solve the technical problem is: construct a method for preparing a sensor electrode of a wind turbine generator array, comprising the following steps:

[0007] Preparation of piezoelectric coating on the surface of wind power bolts;

[0008] On the surface of the piezoelectric coating, a bonding layer is prepared by arc ion plating;

[0009] On the surface of the bonding layer, a hardened wear-resistant layer is prepared by radio frequency magnetron sputtering;

[0010] On the surface of the hardened wear-resistant layer, a self-lubricating conductive layer is prepared by the radio frequency magnetron sputtering method;

[0011] After the self-lubricating conductive layer is prepared, the bonding layer, the hardened wear-resistant layer and the self-lubricating conductive layer form a multi-element high-entropy composite electrode;

[0012] The multi-element high entropy composite electrode is etched by laser etching to obtain the electrode of the ultrasonic array sensor.

[0013] In the method for preparing the wind turbine array sensor electrode of the present invention, the preparation parameters of the arc ion plating method include: target current: 50-150A, coating bias: 10-50V, time: 3-120min.

[0014] In the method for preparing the wind turbine array sensor electrode of the present invention, the bonding layer is a hcp-Ti bonding layer.

[0015] In the method for preparing the wind turbine array sensor electrode of the present invention, the preparation parameters of the hardened wear-resistant layer prepared by the radio frequency magnetron sputtering method include: the target power density is 3-5w / cm 2 , the coating bias is 10-100V, and the time is 30-60min.

[0016] In the method for preparing a wind turbine array sensor electrode of the present invention, the hardened wear-resistant layer is a (CrAlTiSiAg)N ceramic layer.

[0017] In the method for preparing the wind turbine array sensor electrode of the present invention, the preparation parameters of the self-lubricating conductive layer prepared by the radio frequency magnetron sputtering method include: the target power density is 3-5w / cm 2 , the coating bias is 10-100V, and the time is 40-80min.

[0018] In the method for preparing the wind turbine array sensor electrode of the present invention, the self-lubricating conductive layer is: a CrAlTiSiAg self-lubricating conductive layer.

[0019] In the method for preparing the array sensor electrode of the wind turbine generator set of the present invention, the electrode of the ultrasonic array sensor includes: a square or a circle; the area of ​​the square is 1-25mm 2 , the diameter of the circle is 2-6mm;

[0020] The parameters of the laser etching method include: the wavelength of the laser light wave is 355nm, the pulse frequency of the laser is 100kHz, and the etching speed is: 500-1000mm / s.

[0021] The present invention further provides a wind turbine generator array sensor electrode, which is prepared by the above-mentioned method for preparing the wind turbine generator array sensor electrode, comprising:

[0022] A piezoelectric coating provided on the surface of a wind power generation bolt;

[0023] An arc ion plating method is used to prepare a bonding layer on the surface of the piezoelectric coating;

[0024] A radio frequency magnetron sputtering method is used to prepare a hardened wear-resistant layer on the surface of the bonding layer;

[0025] The self-lubricating conductive layer is prepared on the surface of the hardened wear-resistant layer by using the radio frequency magnetron sputtering method;

[0026] The bonding layer, the hardened wear-resistant layer and the self-lubricating conductive layer form a multi-element high-entropy composite electrode, and after the multi-element high-entropy composite electrode is etched by laser etching, an electrode of an ultrasonic array sensor is obtained.

[0027] In the wind turbine array sensor electrode of the present invention, the electrodes of the ultrasonic array sensor include: square or circular;

[0028] The area of ​​the square is 1-25 mm 2 , the diameter of the circle is 2-6mm.

[0029] The implementation of the wind turbine array sensor electrode and its preparation method of the present invention has the following beneficial effects: including the following steps: preparing a piezoelectric coating on the surface of a wind power bolt; preparing a bonding layer by arc ion plating; preparing a hardened wear-resistant layer by radio frequency magnetron sputtering; preparing a self-lubricating conductive layer by radio frequency magnetron sputtering; after the self-lubricating conductive layer is prepared, the bonding layer, the hardened wear-resistant layer and the self-lubricating conductive layer form a multi-element high-entropy composite electrode; and obtaining the electrode of the ultrasonic array sensor by laser etching. The present invention makes full use of arc ion plating technology to prepare a bonding layer, uses conductive ceramic materials to improve the wear resistance of the electrode, uses a self-lubricating conductive layer to improve the service life of the electrode, and uses laser etching to form a complex electrode shape to realize the preparation of an array electrode, providing a basis for the detection of complex stress states of wind power bolts, realizing real-time monitoring of the health status of the bolts, and effectively ensuring the safety of wind power bolts. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The present invention will be further described below with reference to the accompanying drawings and embodiments, in which:

[0031] Figure 1 is a cross-sectional schematic diagram of a wind turbine array sensor electrode provided by the present invention;

[0032] Figure 2 is a top view of the sensor electrode of the wind turbine array provided by the present invention;

[0033] Figure 3 It is a schematic flow chart of a method for preparing a wind turbine generator array sensor electrode according to the present invention. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] The present invention provides a wind turbine generator array sensor electrode and a preparation method thereof. The prepared array thin film ultrasonic sensor can meet the requirements of detecting and monitoring the complex stress state of wind power bolts.

[0036] In an embodiment of the present invention, the array sensor electrode of the wind turbine generator set includes: a piezoelectric coating 1 arranged on the surface of a wind power generation bolt; a bonding layer 2 on the surface of the piezoelectric coating 1 is prepared by an arc ion plating method; a hardened wear-resistant layer 3 on the surface of the bonding layer 2 is prepared by a radio frequency magnetron sputtering method; a self-lubricating conductive layer 4 on the surface of the hardened wear-resistant layer 3 is prepared by the radio frequency magnetron sputtering method; the bonding layer 2, the hardened wear-resistant layer 3 and the self-lubricating conductive layer 4 form a multi-element high-entropy composite electrode, and the multi-element high-entropy composite electrode is etched by a laser etching method to obtain an electrode of an ultrasonic array sensor.

[0037] refer to Figure 1 , Figure 1 The cross-sectional view of the sensor electrode of the wind turbine array provided by the present invention. Specifically, Figure 1 As shown, the wind turbine array sensor electrode, that is, the electrode of the ultrasonic array sensor, comprises, from top to bottom, a self-lubricating conductive layer 4, a hardened wear-resistant layer 3, a bonding layer 2, and a piezoelectric coating 1. Figure 1 It can be seen that the wind turbine array sensor electrode provided by the present invention has a reasonable structural design from the metal substrate to the piezoelectric coating 1, with a composition gradient and a hardness gradient, which ensures the long-term and reliable operation of the piezoelectric coating 1.

[0038] in, Figure 2 The top view of the sensor electrode of the wind turbine array provided by the present invention. Figure 2 As shown, by using laser etching to etch the multi-element high entropy composite electrode, a square or circular structure can be etched. The area of ​​the square is 1-25mm 2 , the diameter of the circle is 2-6mm. Figure 2 It can be seen that the array sensors are evenly distributed on the surface of the bolt, and can be circular or square. By adopting the array layout, the measurement of the axial force, shear force and bending stress of the bolt is achieved.

[0039] In the embodiment of the present invention, the array sensor electrode of the wind turbine generator set is first prepared by preparing an electrode for the array sensor to obtain an electrode film (i.e., a multi-element high entropy composite electrode), and then the electrode film is processed by laser etching, so that a circular or square electrode structure can be obtained on the surface of the wind power generation bolt. The specific preparation method can be referred to Figure 3 .

[0040] Specifically, Figure 3 As shown, the method for preparing the wind turbine generator array sensor electrode comprises the following steps:

[0041] Step S301: preparing a piezoelectric coating 1 on the surface of a wind power generation bolt.

[0042] The preparation process of the piezoelectric coating 1 may refer to conventional solutions, and the present invention does not specifically limit it. Optionally, in the embodiment of the present invention, the piezoelectric coating 1 is prepared by using ZnO material.

[0043] Step S302: preparing a bonding layer 2 on the surface of the piezoelectric coating 1 by using an arc ion plating method.

[0044] In the embodiment of the present invention, the preparation parameters of the arc ion plating method include: target current: 50-150A, coating bias: 10-50V, time: 3-120min. Optionally, the bonding layer 2 is a hcp-Ti bonding layer 2.

[0045] Specifically, the hcp-Ti bonding layer 2 is prepared on the surface of the wind power bolt prepared with ZnO, and arc ion plating is used for evaporation, with a target current of 50-150A, a coating bias of 10-50V, and a time of 3-20min.

[0046] Step S303: on the surface of the bonding layer 2, a hardened wear-resistant layer 3 is prepared by radio frequency magnetron sputtering.

[0047] In the embodiment of the present invention, the preparation parameters of the hardened wear-resistant layer 3 prepared by the radio frequency magnetron sputtering method include: the target power density is 3-5w / cm 2 , the coating bias voltage is 10-100V, and the time is 30-60min. Optionally, the hardened wear-resistant layer 3 is a (CrAlTiSiAg)N ceramic layer. By preparing the (CrAlTiSiAg)N ceramic layer, the purpose of increasing the hardness of the electrode can be achieved, the wear resistance of the electrode is improved, and the problem of poor wear resistance of the current electrode material can be solved.

[0048] Specifically, after the hcp-Ti bonding layer 2 is prepared, the (CrAlTiSiAg)N ceramic layer is prepared by radio frequency magnetron sputtering technology. The target power density is 3-5w / cm 2 , the coating bias is 10-100V, and the time is 30-60min.

[0049] Step S304: preparing a self-lubricating conductive layer 4 on the surface of the hardened wear-resistant layer 3 by adopting a radio frequency magnetron sputtering method.

[0050] In the embodiment of the present invention, the preparation parameters of the self-lubricating conductive layer 4 prepared by the radio frequency magnetron sputtering method include: the target power density is 3-5w / cm 2 , the coating bias voltage is 10-100V, and the time is 40-80min. Optionally, the self-lubricating conductive layer 4 is: CrAlTiSiAg self-lubricating conductive layer 4.

[0051] Specifically, after the (CrAlTiSiAg)N ceramic layer is prepared, the CrAlTiSiAg self-lubricating conductive layer 4 is prepared by radio frequency magnetron sputtering technology. The target power density is 3-5w / cm 2 , the coating bias is 10-100V, and the time is 40-80min.

[0052] Step S305: After the self-lubricating conductive layer 4 is prepared, the bonding layer 2, the hardened wear-resistant layer 3 and the self-lubricating conductive layer 4 form a multi-element high-entropy composite electrode (that is, the electrode material is a CrAlTiSiAg multi-element high-entropy composite electrode); the multi-element high-entropy composite electrode is etched by laser etching to obtain the electrode of the ultrasonic array sensor.

[0053] Optionally, in an embodiment of the present invention, the electrodes of the ultrasonic array sensor include: square or circular; the area of ​​the square is 1-25 mm 2 , the diameter of the circle is 2-6mm. The parameters of the laser etching method include: the wavelength of the laser light is 355nm, the pulse frequency of the laser is 100kHz, and the engraving speed is: 500-1000mm / s.

[0054] Specifically, after the preparation of the CrAlTiSiAg self-lubricating conductive layer 4 is completed, the composite electrode layer is etched into a square or circular structure by laser, the square area is 1-25mm2, and the circular diameter is 2-6mm; the laser light wavelength is 355nm, the laser pulse frequency is 100kHz, and the engraving speed is 500-1000mm / s; after the preparation is completed, the electrode of the ultrasonic array sensor is obtained.

[0055] The present invention applies CrAlTiSiAg self-lubricating conductive material to the surface of an axial force measurement sensor. Since the self-lubricating conductive material has the characteristics of high conductivity, high wear resistance, low friction, high temperature resistance and toughness, a synergistic effect of conductivity and lubrication performance is achieved, providing a new idea for the research and development of self-lubricating conductive materials; the (CrAlTiSiAg)N ceramic layer high entropy alloy is applied to the electrode, which improves the wear resistance of the electrode and changes the current problem of poor wear resistance of the electrode material; laser etching technology can be used to prepare complex electrode shapes, realize the preparation of array electrodes, and change the current situation where complex stresses of bolts cannot be tested; for the preparation of the arc evaporated hcp-Ti bonding layer 2, due to the high plasma density of the arc, good metallurgical bonding can be achieved, thereby improving the bonding force between the electrode and the piezoelectric coating 1.

[0056] The preparation method of the present invention is described in detail below through specific examples.

[0057] Example 1

[0058] (1) preparing the hcp-Ti bonding layer 2 on the surface of the wind power bolt on which the ZnO piezoelectric coating 1 was prepared, using arc ion plating for evaporation, with a target current of 50 A, a coating bias of 10 V, and a time of 3 min;

[0059] (2) After the hcp-Ti bonding layer 2 was prepared, the (CrAlTiSiAg)N ceramic layer was prepared by radio frequency magnetron sputtering technology with a target power density of 3w / cm 2 , coating bias voltage is 10V, time is 30min;

[0060] (3) After the (CrAlTiSiAg)N ceramic layer is prepared, the CrAlTiSiAg self-lubricating conductive layer 4 is prepared by radio frequency magnetron sputtering technology, and the target power density is 3w / cm 2 , coating bias voltage is 10V, time is 40min;

[0061] (4) After the CrAlTiSiAg self-lubricating conductive layer 4 is prepared, the composite electrode layer is etched into a square or circular structure using a laser, and the square area is 1 mm 2 The diameter of the circle is 2mm; the wavelength of the laser light wave is 355nm, the laser pulse frequency is 100kHz, and the engraving speed is 500mm / s; after the preparation is completed, the ultrasonic array sensor is obtained.

[0062] Example 2

[0063] (1) preparing the hcp-Ti bonding layer 2 on the surface of the wind power bolt prepared with ZnO, using arc ion plating for evaporation, with a target current of 150A, a coating bias of 50V, and a time of 20min;

[0064] (2) After the hcp-Ti bonding layer 2 was prepared, the (CrAlTiSiAg)N ceramic layer was prepared by radio frequency magnetron sputtering technology with a target power density of 5 w / cm 2 , coating bias voltage is 100V, time is 60min;

[0065] (3) After the (CrAlTiSiAg)N ceramic layer is prepared, the CrAlTiSiAg self-lubricating conductive layer 4 is prepared by radio frequency magnetron sputtering technology, with a target power density of 5w / cm 2 , coating bias voltage is 100V, time is 80min;

[0066] (4) After the CrAlTiSiAg self-lubricating conductive layer 4 is prepared, the composite electrode layer is etched into a square or circular structure using a laser, and the square area is 25 mm 2The diameter of the circle is 6mm; the wavelength of the laser light wave is 355nm, the laser pulse frequency is 100kHz, and the engraving speed is 1000mm / s; after the preparation is completed, the ultrasonic array sensor is obtained.

[0067] Example 3

[0068] (1) preparing the hcp-Ti bonding layer 2 on the surface of the wind power bolt prepared with ZnO, using arc ion plating for evaporation, with a target current of 100A, a coating bias of 40V, and a time of 10min;

[0069] (2) After the hcp-Ti bonding layer 2 was prepared, the (CrAlTiSiAg)N ceramic layer was prepared by radio frequency magnetron sputtering technology with a target power density of 4 w / cm 2 , coating bias voltage is 40V, time is 50min;

[0070] (3) After the (CrAlTiSiAg)N ceramic layer is prepared, the CrAlTiSiAg self-lubricating conductive layer 4 is prepared by radio frequency magnetron sputtering technology, and the target power density is 4w / cm 2 , coating bias voltage is 50V, time is 60min;

[0071] (4) After the CrAlTiSiAg self-lubricating conductive layer 4 is prepared, the composite electrode layer is etched into a square or circular structure using a laser, and the square area is 20 mm 2 The diameter of the circle is 5mm; the wavelength of the laser light wave is 355nm, the laser pulse frequency is 100kHz, and the engraving speed is 800mm / s; after the preparation is completed, an ultrasonic array sensor is obtained.

[0072] Example 4

[0073] (1) The hcp-Ti bonding layer 2 was prepared on the surface of the wind power bolt prepared with ZnO, and the evaporation was performed by arc ion plating, with a target current of 90A, a coating bias of 40V, and a time of 10min;

[0074] (2) After the hcp-Ti bonding layer 2 was prepared, the (CrAlTiSiAg)N ceramic layer was prepared by radio frequency magnetron sputtering technology with a target power density of 4 w / cm 2 , coating bias voltage is 50V, time is 40min;

[0075] (3) After the (CrAlTiSiAg)N ceramic layer is prepared, the CrAlTiSiAg self-lubricating conductive layer 4 is prepared by radio frequency magnetron sputtering technology, and the target power density is 3.5w / cm 2 , coating bias voltage is 60V, time is 70min;

[0076] (4) After the CrAlTiSiAg self-lubricating conductive layer 4 is prepared, the composite electrode layer is etched into a square or circular structure using a laser, and the square area is 18 mm 2 The diameter of the circle is 5mm; the wavelength of the laser light wave is 355nm, the laser pulse frequency is 100kHz, and the engraving speed is 600mm / s; after the preparation is completed, an ultrasonic array sensor is obtained.

[0077] Example 5

[0078] (1) The hcp-Ti bonding layer 2 was prepared on the surface of the wind power bolt prepared with ZnO, and the evaporation was performed by arc ion plating, with a target current of 70A, a coating bias of 30V, and a time of 16min;

[0079] (2) After the hcp-Ti bonding layer 2 was prepared, the (CrAlTiSiAg)N ceramic layer was prepared by radio frequency magnetron sputtering technology with a target power density of 5 w / cm 2 , coating bias voltage is 90V, time is 50min;

[0080] (3) After the (CrAlTiSiAg)N ceramic layer is prepared, the CrAlTiSiAg self-lubricating conductive layer 4 is prepared by radio frequency magnetron sputtering technology, with a target power density of 5 w / cm 2 , coating bias voltage is 80V, time is 70min;

[0081] (4) After the CrAlTiSiAg self-lubricating conductive layer 4 is prepared, the composite electrode layer is etched into a square or circular structure using a laser, and the square area is 20 mm 2 The diameter of the circle is 5mm; the wavelength of the laser light wave is 355nm, the laser pulse frequency is 100kHz, and the engraving speed is 600mm / s; after the preparation is completed, an ultrasonic array sensor is obtained.

[0082] Example 6

[0083] (1) The hcp-Ti bonding layer 2 was prepared on the surface of the wind power bolt prepared with ZnO, and the evaporation was performed by arc ion plating, with a target current of 80A, a coating bias of 40V, and a time of 15min;

[0084] (2) After the hcp-Ti bonding layer 2 was prepared, the (CrAlTiSiAg)N ceramic layer was prepared by radio frequency magnetron sputtering technology with a target power density of 5 w / cm 2 , coating bias voltage is 70V, time is 50min;

[0085] (3) After the (CrAlTiSiAg)N ceramic layer is prepared, the CrAlTiSiAg self-lubricating conductive layer 4 is prepared by radio frequency magnetron sputtering technology, and the target power density is 4w / cm 2 , coating bias voltage is 30V, time is 60min;

[0086] (4) After the CrAlTiSiAg self-lubricating conductive layer 4 is prepared, the composite electrode layer is etched into a square or circular structure using a laser, and the square area is 14 mm 2 , the circular area is 5mm in diameter; the laser light wavelength is 355nm, the laser pulse frequency is 100kHz, and the engraving speed is 700mm / s; after the preparation is completed, an ultrasonic array sensor is obtained.

[0087] The present invention makes full use of arc ion plating technology to prepare the bonding layer 2, uses conductive ceramic materials to improve the wear resistance of the electrode, uses the self-lubricating conductive layer to improve the service life of the electrode, and uses laser to etch complex electrode shapes to achieve the preparation of array electrodes. There are no related reports at home and abroad, which provides a new idea for the detection of complex stress states of wind power generation bolts. The health status of the bolts can be monitored in real time, which is of great value to ensure the safety of wind power generation bolts.

[0088] In this specification, each embodiment is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part.

[0089] Professionals may further appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of the two. In order to clearly illustrate the interchangeability of hardware and software, the composition and steps of each example have been generally described in the above description according to function. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professionals and technicians may use different methods to implement the described functions for each specific application, but such implementation should not be considered to be beyond the scope of the present invention.

[0090] The steps of the method or algorithm described in conjunction with the embodiments disclosed herein may be implemented directly using hardware, a software module executed by a processor, or a combination of the two. The software module may be placed in a random access memory (RAM), a memory, a read-only memory (ROM), an electrically programmable ROM, an electrically erasable programmable ROM, a register, a hard disk, a removable disk, a CD-ROM, or any other form of storage medium known in the art.

[0091] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with the technology to understand the content of the present invention and implement it accordingly, and they cannot limit the scope of protection of the present invention. All equivalent changes and modifications made to the scope of the claims of the present invention should fall within the scope of the claims of the present invention.

Claims

1. A method for preparing a wind turbine array sensor electrode, characterized in that: The following steps are involved: Preparation of piezoelectric coating on the surface of wind power bolts; On the surface of the piezoelectric coating, a bonding layer is prepared by arc ion plating; On the surface of the bonding layer, a hardened wear-resistant layer is prepared by radio frequency magnetron sputtering; On the surface of the hardened wear-resistant layer, a self-lubricating conductive layer is prepared by the radio frequency magnetron sputtering method; After the self-lubricating conductive layer is prepared, the bonding layer, the hardened wear-resistant layer and the self-lubricating conductive layer form a multi-element high-entropy composite electrode; The multi-element high entropy composite electrode is etched by laser etching to obtain the electrode of the ultrasonic array sensor.

2. The method for preparing a wind turbine array sensor electrode according to claim 1, characterized in that: The preparation parameters of the arc ion plating method include: target current: 50-150A, coating bias: 10-50V, time: 3-120min.

3. The method for preparing a wind turbine array sensor electrode according to claim 1, characterized in that: The bonding layer is a hcp-Ti bonding layer.

4. The method for preparing a wind turbine array sensor electrode according to claim 1, characterized in that: The preparation parameters of the hardened wear-resistant layer prepared by the radio frequency magnetron sputtering method include: the target power density is 3-5w / cm 2 , the coating bias is 10-100V, and the time is 30-60min.

5. The method for preparing a wind turbine array sensor electrode according to claim 1, characterized in that: The hardened wear-resistant layer is a (CrAlTiSiAg)N ceramic layer.

6. The method for preparing a wind turbine array sensor electrode according to claim 1, characterized in that: The preparation parameters of the self-lubricating conductive layer prepared by the radio frequency magnetron sputtering method include: the target power density is 3-5w / cm 2 , the coating bias is 10-100V, and the time is 40-80min.

7. The method for preparing a wind turbine array sensor electrode according to claim 1, characterized in that: The self-lubricating conductive layer is: CrAlTiSiAg self-lubricating conductive layer.

8. The method for preparing a wind turbine array sensor electrode according to claim 1, characterized in that: The electrodes of the ultrasonic array sensor include: square or circular; the area of ​​the square is 1-25mm 2 , the diameter of the circle is 2-6mm; The parameters of the laser etching method include: the wavelength of the laser light wave is 355nm, the pulse frequency of the laser is 100kHz, and the etching speed is: 500-1000mm / s.

9. A wind turbine generator array sensor electrode, prepared by the method for preparing a wind turbine generator array sensor electrode according to any one of claims 1 to 8, characterized in that: include: A piezoelectric coating provided on the surface of a wind power generation bolt; An arc ion plating method is used to prepare a bonding layer on the surface of the piezoelectric coating; A radio frequency magnetron sputtering method is used to prepare a hardened wear-resistant layer on the surface of the bonding layer; The self-lubricating conductive layer is prepared on the surface of the hardened wear-resistant layer by using the radio frequency magnetron sputtering method; The bonding layer, the hardened wear-resistant layer and the self-lubricating conductive layer form a multi-element high-entropy composite electrode, and after the multi-element high-entropy composite electrode is etched by laser etching, an electrode of an ultrasonic array sensor is obtained.

10. The wind turbine generator array sensor electrode according to claim 9, characterized in that: The electrodes of the ultrasonic array sensor include: square or circular; The area of ​​the square is 1-25 mm 2 , the diameter of the circle is 2-6mm.

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