Sealed reversing valve

By using a retractable elastic guard in the reversing valve, the design of combining with the mounting plate and the mounting ring, the problem that traditional reversing valves are difficult to meet the strict sealing requirements when using highly toxic gases in the semiconductor industry is solved, and effective gas sealing and adaptive sealing performance are achieved.

CN119594209AActive Publication Date: 2025-03-11KUNSHAN KINGLAI HYGIENIC MATERIALS
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Patent Information

Application Number
CN202411744087.3
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-11-30
Publication Date
2025-03-11
Estimated Expiration
2044-11-30

AI Technical Summary

Technical Problem

Traditional reversing valves are difficult to meet the strict sealing requirements for highly toxic gases in the semiconductor industry, resulting in gas leakage problems.

Method used

A sealed reversing valve is adopted, which includes a retractable elastic guard pipe to cooperate with the mounting plate and the mounting ring to achieve an effective sealing of the valve cavity. This design not only avoids gas leakage, but also adapts to temperature changes and pressure fluctuations and maintains good sealing performance.

Benefits of technology

It realizes effective sealing of the valve chamber, avoids gas leakage, and maintains good sealing performance during temperature changes and pressure fluctuations, meeting the strict requirements of the semiconductor industry.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses a sealed reversing valve, and relates to the technical field of valves. The sealed reversing valve comprises a valve seat, a valve cavity, a valve rod, an execution assembly, a fluid inlet, a first fluid outlet and a second fluid outlet, the execution assembly comprises a driving shaft, a mounting disc is arranged on the driving shaft, a mounting ring is internally connected into the valve cavity, and a telescopic elastic protection pipe is arranged on the driving shaft in a sleeving mode; and one end of the elastic protective tube sleeves the mounting disc, and the other end of the elastic protective tube is inserted into the mounting ring. According to the reversing valve, the elastic protection pipe in the reversing valve can be matched with the mounting disc and the mounting ring to achieve effective sealing of the valve cavity, and gas in the valve cavity is prevented from leaking outwards; meanwhile, the telescopic elastic protection pipe cannot interfere with movement of the driving shaft, and can effectively adapt to temperature change and pressure fluctuation through the flexibility of the telescopic elastic protection pipe, so that good sealing performance is continuously kept in the using process of the reversing valve.
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Description

Technical Field

[0001] The present application relates to the field of valve technology, and in particular to a sealed reversing valve. Background Art

[0002] In the semiconductor industry, the application of reversing valves is both extensive and critical. They can change the flow path of fluid (gas or liquid) to achieve the switching of fluid between different channels, thereby ensuring the stability and consistency of gas supply.

[0003] However, since the special gases involved in the semiconductor industry are mostly highly toxic gases, they have extremely strict requirements on sealing performance, and traditional reversing valves are difficult to meet the above sealing requirements. Summary of the invention

[0004] In order to overcome the deficiencies of the prior art, the present application provides a sealed reversing valve with good sealing performance.

[0005] The sealed reversing valve provided in this application adopts the following technical solution: A sealed reversing valve comprises a valve seat, a valve cavity opened in the valve seat, a valve stem slidable in the valve cavity along its own axial direction, and an actuator component for driving the valve stem to slide, the valve seat is provided with a fluid inlet, a first fluid outlet, and a second fluid outlet connected to the valve cavity, the actuator component comprises a drive shaft inserted in the valve cavity, the drive shaft is coaxially connected to the valve stem, a mounting disk is provided on the drive shaft, the mounting disk is located in the valve cavity, a mounting ring is connected in the valve cavity, a retractable elastic protective tube is sleeved on the drive shaft, one end of the elastic protective tube is sleeved on the mounting disk, and the other end is inserted in the mounting ring.

[0006] By adopting the above technical solution, the elastic protective tube can cooperate with the mounting plate and the mounting ring to achieve effective sealing of the valve cavity and prevent the gas in the valve cavity from leaking outward; at the same time, the retractable elastic protective tube not only does not interfere with the movement of the drive shaft, but it can also effectively adapt to temperature changes and pressure fluctuations through its own resiliency, so as to continuously maintain good sealing performance during the use of the reversing valve.

[0007] Preferably, the elastic protective tube includes a corrugated tube body and a first connecting ring arranged at one end of the tube body, the first connecting ring is sleeved on the mounting plate, a first limiting ring is arranged on the mounting plate, the first limiting ring abuts against the outer end wall of the tube body, a first limiting groove is formed between the first limiting ring and the mounting plate, and the first connecting ring is embedded in the first limiting groove.

[0008] By adopting the above technical solution, not only the connection strength between the elastic protective tube and the mounting plate can be improved, but also the contact area between the mounting plate and the elastic protective tube is increased, thereby preventing the elastic protective tube from being damaged under the squeezing of the mounting plate; at the same time, embedding the first connecting ring in the first limiting groove can also prevent the elastic protective tube from twisting during the extension and retraction process and affecting its sealing effect.

[0009] Preferably, a second connecting ring is provided at the other end of the tube body, the second connecting ring is inserted in the mounting ring, a second limiting ring is provided inside the mounting ring, the second limiting ring abuts against the inner end wall of the tube body, a second limiting groove is formed between the second limiting ring and the mounting ring, and the second connecting ring is embedded in the second limiting groove.

[0010] By adopting the above technical solution, not only the connection strength between the elastic protective tube and the mounting ring can be improved, but also the contact area between the mounting ring and the elastic protective tube is increased, thereby preventing the elastic protective tube from being damaged under the squeezing of the mounting ring; at the same time, the second connecting ring is embedded in the second limiting groove, which can cooperate with the first limiting groove to prevent the elastic protective tube from twisting during the extension and retraction process and affecting its sealing effect.

[0011] Preferably, the sealed reversing valve also includes a valve core connected to the valve cavity, a valve slot opened in the valve core, the valve stem is slidably inserted into the valve slot, a guide ring is sleeved on the valve stem, and the outer wall of the guide ring is provided with at least one first guide plane, the first guide plane extends along the axial direction of the valve slot, and the two sides of the first guide plane respectively have first interference ends, and the two first interference ends both interfere with the slot wall of the valve slot.

[0012] By adopting the above technical solution, the valve stem can maintain relatively stable linear motion between the valve groove under the action of the first guide plane, avoiding shaking or deviation of the valve stem during movement, thereby improving the sealing performance and service life of the valve.

[0013] Preferably, at least one second guide plane is provided on the outer wall of one end of the drive shaft close to the valve stem, the second guide plane extends along the axial direction of the valve slot, the second guide plane is arranged at an angle to the first guide plane, and the two sides of the second guide plane respectively have second interference ends, and both of the two second interference ends interfere with the slot wall of the valve slot.

[0014] By adopting the above technical solution, the valve stem can maintain relatively stable linear motion between the valve groove with the cooperation of the first guide plane and the second guide plane, thereby preventing the valve stem from shaking or deflecting during movement, thereby improving the sealing performance and service life of the valve.

[0015] Preferably, the outer diameter of the guide ring gradually increases or decreases along the axial direction of the valve stem, and the inner wall of the valve groove is provided with a plurality of third limit grooves around its own circumference, and each of the third limit grooves is respectively provided with a retractable limit block, and the limit block has a limit surface on the side close to the valve stem, and the limit surface is inclined and matches and fits with the outer wall of the guide ring.

[0016] By adopting the above technical solution, the valve stem can maintain relatively stable linear motion with the cooperation of multiple limit blocks, further avoiding shaking or deviation of the valve stem during movement; at the same time, multiple limit blocks can also be supported on the circumferential side of the guide ring to improve the movement stability of the valve stem.

[0017] Preferably, the valve cavity includes a first chamber for accommodating the valve core, a second chamber located at one end of the first chamber, and a third chamber located at the other end of the first chamber, the elastic protective tube is arranged in the second chamber, the end of the valve slot close to the second chamber has a first notch for inserting the drive shaft, the end of the valve slot close to the third chamber has a second notch communicating with the third chamber, the fluid inlet and the first fluid outlet are both communicated with the third chamber, the second fluid outlet is communicated with the valve slot, the valve stem has a rod head passing through the second notch, and the rod head can block the second notch or detach from the second notch and block the first fluid outlet during the sliding stroke of the valve stem.

[0018] By adopting the above technical solution, the rod head can quickly and accurately switch the flow direction of the fluid between the first fluid outlet and the second fluid outlet during the movement of the valve stem.

[0019] Preferably, a first connecting port is provided on the groove wall of the valve groove, the second fluid outlet is connected to the first connecting port, and a second connecting port is provided on the valve stem along its radial direction, and when the rod head blocks the first fluid outlet, the second connecting port is positively connected with the first connecting port.

[0020] By adopting the above technical solution, the second communication port can be connected to the second fluid outlet only when the first fluid outlet is blocked, thereby avoiding the influence on the flow of gas caused by the simultaneous connection of the first fluid outlet and the second fluid outlet.

[0021] Preferably, a docking groove is further provided on the valve stem, and the docking groove coaxially surrounds the circumference of the second connecting port. A retractable docking tube is provided in the docking groove, and when the second connecting port is properly docked with the first connecting port, the docking tube is inserted into the first connecting port.

[0022] By adopting the above technical solution, the gas can directly enter the first connecting port through the butt joint pipe, thereby preventing the gas from escaping to the outside when flowing between the second connecting port and the first connecting port.

[0023] Preferably, the actuator assembly includes an actuator seat, an actuator chamber opened in the actuator seat, a piston slidable in the actuator chamber along the axial direction of the actuator chamber, and an air supply port opened on the actuator seat, the axial direction of the actuator chamber is consistent with the axial direction of the valve chamber, the end of the drive shaft away from the valve stem is coaxially connected to the piston, the actuator chamber includes a first cavity and a second cavity respectively located on both sides of the piston, an elastic member is provided in the first cavity, and the second cavity is connected to the air supply port.

[0024] By adopting the above technical solution, the piston can realize reciprocating motion under the cooperation of the gas delivery port and the spring to drive the valve stem to move, which can respond to the control signal quickly and accurately to realize instantaneous switching of the gas flow direction.

[0025] In summary, the present invention includes at least one of the following beneficial technical effects: 1. The elastic protective tube can cooperate with the mounting plate and the mounting ring to achieve effective sealing of the valve cavity and prevent the gas in the valve cavity from leaking out; 2. The retractable elastic protective tube will not interfere with the movement of the drive shaft, but can also effectively adapt to temperature changes and pressure fluctuations through its own elasticity, so as to maintain good sealing performance during the use of the reversing valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 Schematic diagram of the three-dimensional structure of the sealed reversing valve in the embodiment of the present application; Figure 2 It is a left side view of the sealed reversing valve in the embodiment of the present application; Figure 3 yes Figure 2 AA section diagram in; Figure 4 yes Figure 2 BB cross-section diagram in; Figure 5 yes Figure 3 The enlarged schematic diagram of point C in FIG. Figure 6 yes Figure 3 The enlarged schematic diagram of point D in FIG.

[0027] Markings in the accompanying drawings: 1. Valve seat; 2. Valve chamber; 2a. First chamber; 2b. Second chamber; 2c. Third chamber; 3. Valve stem; 3a. Stem head; 4, actuator; 4a, drive shaft; 4a1, second guide plane; 4a2, second abutment end; 4b, actuator seat; 4c, actuator chamber; 4c1, first chamber; 4c2, second chamber; 4d, piston; 4e, gas delivery port; 4f, elastic member; 5. Fluid inlet; 6. First fluid outlet; 7. Second fluid outlet; 8. Mounting plate; 9. Mounting ring; 10. Elastic protective tube; 10a. Tube body; 10b. First connecting ring; 10c. Second connecting ring; 11. first limiting ring; 12. first limiting groove; 13. second limiting ring; 14. second limiting groove; 15, valve core; 16, valve slot; 16a, first slot; 16b, second slot; 16c, first communication port; 17, guide ring; 17a, first guide plane; 17b, first abutment end; 18. third limiting groove; 19. limiting block; 19a. limiting surface; 20. Second connecting port; 21. Docking groove; 22. Docking tube; 23. First spring; 24. Second spring. DETAILED DESCRIPTION

[0028] The following is combined with Figure 1-6 The present invention is described in further detail.

[0029] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0030] See also Figure 1-6 As shown, a sealed reversing valve is shown, comprising an upright valve seat 1, a valve cavity 2 opened in the valve seat 1, a valve stem 3 slidable in the valve cavity 2 along its own axial direction, and an actuator 4 for driving the valve stem 3 to slide, wherein the actuator 4 is located at the upper end of the valve seat 1, and the valve seat 1 is provided with a fluid inlet 5 connected with the valve cavity 2, a first fluid outlet 6 and a second fluid outlet 7, the fluid inlet 5 is located on one side of the valve seat 1, and the first fluid outlet 6 and the second fluid outlet 7 are both located on the other side of the valve seat 1.

[0031] Combination Figure 3As shown, the actuator 4 includes a drive shaft 4a inserted into the valve cavity 2 from top to bottom, the drive shaft 4a is coaxially connected to the valve stem 3, a mounting plate 8 is provided on the drive shaft 4a, the mounting plate 8 is located in the valve cavity 2, a mounting ring 9 is connected in the valve cavity 2, the mounting plate 8 and the mounting ring 9 are arranged up and down, and a retractable elastic protective tube 10 is sleeved on the drive shaft 4a, one end of the elastic protective tube 10 is sleeved on the mounting plate 8, and the other end is inserted in the mounting ring 9. Among them, the elastic protective tube 10 is a bellows.

[0032] In this way, the elastic protective tube 10 acts as a barrier for the valve cavity 2, and it can cooperate with the mounting plate 8 and the mounting ring 9 to achieve effective sealing of the valve cavity 2, and prevent the gas in the valve cavity 2 from leaking outward; at the same time, the retractable elastic protective tube 10 will not only not interfere with the movement of the drive shaft 4a, but also can effectively adapt to temperature changes and pressure fluctuations through its own elasticity, so as to continuously maintain good sealing performance during the use of the reversing valve. In the semiconductor industry, when handling toxic, harmful or precious gases, the excellent sealing ability of the bellows can prevent environmental pollution, product quality degradation and economic losses caused by gas leakage, and ensure the safety and reliability of the production process; at the same time, the setting of the elastic protective tube 10 can extend the service life of the valve, and in the high-frequency and high-precision production environment of semiconductor manufacturing, it reduces the maintenance and replacement frequency of the valve, and reduces production costs and the risk of production interruption.

[0033] In this embodiment, the elastic protective tube 10 includes a corrugated tube body 10a, a first connecting ring 10b arranged at the upper end of the tube body 10a, and a second connecting ring 10c arranged at the lower end of the tube body 10a. The first connecting ring 10b is sleeved on the mounting plate 8. A first limiting ring 11 is arranged on the mounting plate 8. The first limiting ring 11 abuts against the outer end wall of the tube body 10a. A first limiting groove 12 is formed between the first limiting ring 11 and the mounting plate 8. The first connecting ring 10b is embedded in the first limiting groove 12; the second connecting ring 10c is inserted into the mounting ring 9. A second limiting ring 13 is arranged inside the mounting ring 9. The second limiting ring 13 abuts against the inner end wall of the tube body 10a. A second limiting groove 14 is formed between the second limiting ring 13 and the mounting ring 9. The second connecting ring 10c is embedded in the second limiting groove 14.

[0034] The first connecting ring 10b can be embedded in the first limiting groove 12 and conflict with the first limiting ring 11 and the mounting plate 8, which can not only improve the connection strength between the elastic protective tube 10 and the mounting plate 8, but also increase the contact area between the mounting plate 8 and the elastic protective tube 10, thereby preventing the elastic protective tube 10 from being damaged under the squeezing of the mounting plate 8; and the second connecting ring 10c can be embedded in the second limiting groove 14 and conflict with the second limiting ring 13 and the mounting ring 9, which can not only improve the connection strength between the elastic protective tube 10 and the mounting ring 9, but also increase the contact area between the mounting ring 9 and the elastic protective tube 10, thereby preventing the elastic protective tube 10 from being damaged under the squeezing of the mounting ring 9; at the same time, the first connecting ring 10b and the second connecting ring 10c are respectively embedded in the first limiting groove 12 and the second limiting groove 14, thereby preventing the elastic protective tube 10 from twisting during the expansion and contraction process and affecting its sealing effect.

[0035] Among them, horizontal interference rings are arranged at the ends of the first limiting ring 11 and the second limiting ring 13, which can further increase the contact area between the first limiting ring 11 and the second limiting ring 13 and the tube body 10a, and can also assist in promoting the extension and retraction of the elastic protective tube 10.

[0036] In this embodiment, combined with Figure 3-4 As shown, the sealed reversing valve also includes a valve core 15 coaxially connected to the valve cavity 2, a valve groove 16 opened in the valve core 15, and a valve stem 3 is slidably arranged in the valve groove 16. A guide ring 17 is sleeved on the valve stem 3, and first guide planes 17a are respectively arranged on the opposite side walls of the guide ring 17. The two first guide planes 17a extend along the axial direction of the valve groove 16, and each first guide plane 17a has a first contact end 17b on both sides, and the four first contact ends 17b are all in contact with the groove wall of the valve groove 16.

[0037] When the valve stem 3 moves, it can maintain relatively stable linear motion between the valve groove 16 under the action of the first guide plane 17a and the two first abutting ends 17b, avoiding shaking or deviation of the valve stem 3 during movement, thereby improving the sealing performance and service life of the valve.

[0038] Furthermore, two second guide planes 4a1 are provided on the outer wall of one end of the driving shaft 4a close to the valve stem 3, the two second guide planes 4a1 are arranged opposite to each other and both extend along the axial direction of the valve slot 16, and both sides of the second guide planes 4a1 have second abutting ends 4a2, and the four second abutting ends 4a2 all abut against the slot wall of the valve slot 16. Among them, the two second guide planes 4a1 correspond to the two first guide planes 17a one by one, and the corresponding second guide planes 4a1 are arranged at an angle to the first guide planes 17a.

[0039] When the drive shaft 4a moves, it can maintain a relatively stable linear motion between the valve slot 16 under the action of the second guide plane 4a1 and the two second abutment ends 4a2, avoiding its influence on the movement of the valve stem 3; at the same time, the valve stem 3 can also achieve further precise guidance under the misalignment cooperation of the first guide plane 17a and the second guide plane 4a1, completely avoiding the shaking or deviation of the valve stem 3 during the movement. In semiconductor manufacturing, this helps to maintain the stability of gas supply and the precise control of process parameters. For example, in the thin film deposition process, stable gas flow and pressure are crucial to the quality and uniformity of the deposited layer.

[0040] In this embodiment, combined with Figure 3 and Figure 5 As shown, the outer diameter of the guide ring 17 gradually decreases in the vertical downward direction, and the inner wall of the valve groove 16 is provided with four third limiting grooves 18 around its own circumference. A first spring 23 and a limiting block 19 installed on the first spring 23 are respectively arranged in each third limiting groove 18. The limiting block 19 has a limiting surface 19a on the side close to the valve stem 3. The limiting surface 19a is inclined in the vertical direction toward the direction close to the guide ring 17, and can match and fit with the outer wall of the guide ring 17. When the valve stem 3 moves downward, the guide ring 17 can gradually press the multiple limiting blocks 19 into the third limiting grooves 18 through its inclined outer wall. The multiple limiting blocks 19 can support and guide the guide ring 17 during the retraction process, so as to further improve the movement stability and reliability of the valve stem 3; and when the valve stem 3 moves upward, the guide ring 17 gradually separates from the multiple limiting blocks 19, and the multiple limiting blocks 19 extend and gradually support on the guide ring 17, so as to limit the valve stem 3.

[0041] In this embodiment, combined with Figure 3As shown, the valve chamber 2 includes a first chamber 2a for accommodating a valve core 15, a second chamber 2b located at the upper end of the first chamber 2a, and a third chamber 2c located at the lower end of the first chamber 2a. The elastic protective tube 10 is arranged in the second chamber 2b. The upper end of the valve groove 16 has a first notch 16a for inserting the drive shaft 4a, and the lower end of the valve groove 16 has a second notch 16b communicating with the third chamber 2c. The fluid inlet 5 is connected to the side of the third chamber 2c, the first fluid outlet 6 is connected to the lower end of the third chamber 2c, and the second fluid outlet 7 is connected to the side of the valve groove 16. The valve stem 3 has a rod head 3a passing through the second notch 16b. The rod head 3a is square and can be blocked on the second notch 16b or separated from the second notch 16b and blocked on the first fluid outlet 6 during the sliding stroke of the valve stem 3. When the rod head 3a blocks the second slot 16b, the fluid can flow along the direction of the fluid inlet 5 to the first fluid outlet 6; when the rod head 3a blocks the first fluid outlet 6, the fluid can flow along the direction of the fluid inlet 5 to the second slot 16b, and then enter the second fluid outlet 7 through the valve slot 16.

[0042] In this embodiment, a first communication port 16c is provided on the groove wall of the valve groove 16, and the second fluid outlet 7 is connected to the first communication port 16c. A second communication port 20 is provided on the valve stem 3 along its radial direction, and when the rod head 3a blocks the first fluid outlet 6, the second communication port 20 is positively connected with the first communication port 16c. In this way, the valve stem 3 can achieve synchronous switching of the first fluid outlet 6 and the second fluid outlet 7 through the second communication port 20 and the rod head 3a in a single stroke, and the switching efficiency is high; at the same time, the second communication port 20 can be connected to the second fluid outlet 7 only when the first fluid outlet 6 is blocked, so as to avoid affecting the flow of gas due to the simultaneous connection of the first fluid outlet 6 and the second fluid outlet 7.

[0043] In this embodiment, combined with Figure 3 and Figure 6 As shown, the valve stem 3 is also provided with a docking groove 21, which coaxially surrounds the circumference of the second communication port 20, and a second spring 24 is arranged in the docking groove 21, and a docking pipe 22 is installed on the second spring 24, and the docking pipe 22 is coaxially arranged with the docking groove 21. When the second communication port 20 is properly docked with the first communication port 16c, the docking pipe 22 is inserted into the first communication port 16c; and when the second communication port 20 is relatively misaligned with the first communication port 16c, the docking pipe 22 is pressed into the docking groove 21. When the second communication port 20 is properly docked with the first communication port 16c, the gas can directly enter the first communication port 16c through the docking pipe 22, so as to prevent the gas from escaping outward when flowing between the second communication port 20 and the first communication port 16c.

[0044] In this embodiment, combined with Figure 3As shown, the actuator assembly 4 includes an actuator seat 4b, an actuator chamber 4c provided in the actuator seat 4b, a piston 4d slidably provided in the actuator chamber 4c along the axial direction of the actuator chamber 4c, and a gas delivery port 4e provided on the actuator seat 4b. The axial direction of the actuator chamber 4c is consistent with the axial direction of the valve chamber 2. The end of the drive shaft 4a away from the valve stem 3 is coaxially connected to the piston 4d. The actuator chamber 4c includes a first cavity 4c1 and a second cavity 4c2 respectively located on the upper and lower sides of the piston 4d. An elastic member 4f is provided in the first cavity 4c1, and the second cavity 4c2 is connected to the gas delivery port 4e. Among them, the elastic member 4f is also a spring. Compressed air can be input into the second cavity 4c2 from the gas delivery port 4e, so that the piston 4d can realize reciprocating motion under the cooperation of the compressed air and the spring to drive the valve stem 3 to move. It can respond to the control signal quickly and accurately, realize the instantaneous switching of the gas flow direction, and is suitable for semiconductor manufacturing processes that have extremely high requirements for gas switching speed and precision. For example, during the chip etching process, it can ensure the timely and accurate supply of different etching gases.

[0045] Specifically, during ventilation, the gas acts on the piston 4d, and the piston 4d drives the valve stem 3 to move upward; after the ventilation stops, the elastic potential energy of the spring is released, pushing the valve stem 3 to move downward.

[0046] In this embodiment, the valve stem 3 is arranged in the valve seat 1, the actuator 4 is installed above the valve seat 1 and the drive shaft 4a is directly inserted into the valve cavity 2, so that the structure of the entire reversing valve is relatively compact, smaller in size and lighter in weight. This compact structure not only saves installation space, but also makes it easier to lay out and install in a complex pipeline system. In places with limited space and dense pipelines such as semiconductor factories, it can more flexibly adapt to the requirements of the installation location, improve the overall integration and aesthetics of the system, and also facilitate subsequent maintenance and repair work.

[0047] The implementation principle of the sealed reversing valve in the embodiment of the present application is: Compressed air is inputted into the second cavity 4c2 from the air delivery port 4e, and the compressed air pushes the piston 4d to move upward, and the piston 4d drives the valve stem 3 to move upward. During the upward movement of the valve stem 3, it is kept in linear motion in the valve groove 16 through the first guide plane 17a and the second guide plane 4a1, and a plurality of limit blocks 19 extend and gradually support the peripheral side of the guide ring 17. When the rod head 3a blocks the second notch 16b, the valve stem 3 stops moving, and at this time, the fluid can flow along the direction from the fluid inlet 5 to the first fluid outlet 6; After the gas supply is stopped, the elastic member 4f pushes the piston 4d to move downward, and the piston 4d drives the valve stem 3 to move downward. During the downward movement of the valve stem 3, it maintains the linear motion in the valve groove 16 through the first guide plane 17a and the second guide plane 4a1. The guide ring 17 squeezes the multiple limit blocks 19 and presses the multiple limit blocks 19 into the third limit groove 18. When the rod head 3a blocks the first fluid outlet 6, the valve stem 3 stops moving. At this time, the second connecting port 20 is connected to the first connecting port 16c, and the fluid can flow along the direction from the fluid inlet 5 to the second fluid outlet 7.

[0048] The embodiments of this specific implementation method are all preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention. Therefore, any equivalent changes made based on the structure, shape, and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A sealed reversing valve, comprising a valve seat (1), a valve cavity (2) provided in the valve seat (1), a valve stem (3) slidably provided in the valve cavity (2) along its own axial direction, and an actuator (4) for driving the valve stem (3) to slide, wherein the valve seat (1) is provided with a fluid inlet (5) communicating with the valve cavity (2), a first fluid outlet (6) and a second fluid outlet (7), and characterized in that: The actuator assembly (4) comprises a drive shaft (4a) inserted into the valve cavity (2), the drive shaft (4a) being coaxially connected to the valve stem (3), a mounting disk (8) being provided on the drive shaft (4a), the mounting disk (8) being located in the valve cavity (2), a mounting ring (9) being connected in the valve cavity (2), a retractable elastic protective tube (10) being sleeved on the drive shaft (4a), one end of the elastic protective tube (10) being sleeved on the mounting disk (8) and the other end being inserted into the mounting ring (9).

2. A sealed reversing valve according to claim 1, characterized in that: The elastic protective tube (10) comprises a corrugated tube body (10a), a first connecting ring (10b) arranged at one end of the tube body (10a), the first connecting ring (10b) being sleeved on the mounting plate (8), the mounting plate (8) being provided with a first limiting ring (11), the first limiting ring (11) being in contact with the outer end wall of the tube body (10a), a first limiting groove (12) being formed between the first limiting ring (11) and the mounting plate (8), the first connecting ring (10b) being embedded in the first limiting groove (12).

3. A sealed reversing valve according to claim 2, characterized in that: A second connecting ring (10c) is provided at the other end of the tube body (10a), and the second connecting ring (10c) is inserted into the mounting ring (9). A second limiting ring (13) is provided inside the mounting ring (9), and the second limiting ring (13) abuts against the inner end wall of the tube body (10a). A second limiting groove (14) is formed between the second limiting ring (13) and the mounting ring (9), and the second connecting ring (10c) is embedded in the second limiting groove (14).

4. A sealed reversing valve according to any one of claims 1 to 3, characterized in that: The sealed reversing valve also includes a valve core (15) connected to the valve cavity (2) and a valve groove (16) opened in the valve core (15). The valve stem (3) is slidably inserted into the valve groove (16). A guide ring (17) is sleeved on the valve stem (3). The outer wall of the guide ring (17) is provided with at least one first guide plane (17a). The first guide plane (17a) extends along the axial direction of the valve groove (16). Both sides of the first guide plane (17a) have first abutment ends (17b), and the two first abutment ends (17b) are in abutment with the groove wall of the valve groove (16).

5. A sealed reversing valve according to claim 4, characterized in that: At least one second guide plane (4a1) is provided on the outer wall of one end of the drive shaft (4a) close to the valve stem (3), and the second guide plane (4a1) extends along the axial direction of the valve groove (16). The second guide plane (4a1) is arranged at an angle with the first guide plane (17a), and the two sides of the second guide plane (4a1) respectively have second interference ends (4a2), and the two second interference ends (4a2) both interfere with the groove wall of the valve groove (16).

6. A sealed reversing valve according to claim 4, characterized in that: The outer diameter of the guide ring (17) gradually increases or decreases along the axial direction of the valve stem (3); the inner wall of the valve groove (16) is provided with a plurality of third limit grooves (18) around its own circumference; each of the third limit grooves (18) is provided with a retractable limit block (19); the limit block (19) has a limit surface (19a) on the side close to the valve stem (3); the limit surface (19a) is inclined and matches and fits with the outer wall of the guide ring (17).

7. A sealed reversing valve according to claim 4, characterized in that: The valve cavity (2) comprises a first chamber (2a) for accommodating the valve core (15), a second chamber (2b) located at one end of the first chamber (2a), and a third chamber (2c) located at the other end of the first chamber (2a); the elastic protective tube (10) is arranged in the second chamber (2b); the end of the valve groove (16) close to the second chamber (2b) has a first notch (16a) for inserting the drive shaft (4a); the end of the valve groove (16) close to the third chamber (2c) has a first notch (16a) for inserting the drive shaft (4a); The second slot (16b) connects the three chambers (2c), the fluid inlet (5) and the first fluid outlet (6) are both connected to the third chamber (2c), the second fluid outlet (7) is connected to the valve slot (16), the valve stem (3) has a rod head (3a) passing through the second slot (16b), and the rod head (3a) can be blocked on the second slot (16b) or detached from the second slot (16b) and block the first fluid outlet (6) during the sliding stroke of the valve stem (3).

8. A sealed reversing valve according to claim 7, characterized in that: A first communication port (16c) is provided on the groove wall of the valve groove (16), the second fluid outlet (7) is connected to the first communication port (16c), and a second communication port (20) is provided on the valve stem (3) along its radial direction. When the stem head (3a) blocks the first fluid outlet (6), the second communication port (20) is aligned with the first communication port (16c).

9. A sealed reversing valve according to claim 8, characterized in that: The valve stem (3) is also provided with a docking groove (21), which coaxially surrounds the circumference of the second connecting port (20). A retractable docking tube (22) is arranged in the docking groove (21). When the second connecting port (20) is properly docked with the first connecting port (16c), the docking tube (22) is inserted into the first connecting port (16c).

10. A sealed reversing valve according to any one of claims 1 to 3, characterized in that: The actuator assembly (4) comprises an actuator seat (4b), an actuator chamber (4c) provided in the actuator seat (4b), a piston (4d) provided in the actuator chamber (4c) and slidable along the axial direction of the actuator chamber (4c), and an air supply port (4e) provided on the actuator seat (4b); the axial direction of the actuator chamber (4c) is consistent with the axial direction of the valve chamber (2); the end of the drive shaft (4a) away from the valve stem (3) is coaxially connected to the piston (4d); the actuator chamber (4c) comprises a first chamber (4c1) and a second chamber (4c2) respectively located on both sides of the piston (4d); an elastic member (4f) is provided in the first chamber (4c1); and the second chamber (4c2) is communicated with the air supply port (4e).

Citation Information

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