Magnet lens beam adjusting system and beam adjusting method for ion implanter

Abstract

The invention discloses a magnet lens beam adjusting system and method for an ion implanter. The beam adjusting system comprises an industrial personal computer, a control unit, a magnet coil power supply unit, a reversing unit and a magnet lens unit. The magnet lens unit comprises a plurality of groups of magnet coils, and the plurality of groups of magnet coils are sequentially arranged on the outer side of the beam cavity in the beam direction; the magnet coil power supply unit comprises a plurality of groups of coil power supplies which are connected with each group of magnet coils in a one-to-one correspondence manner; the commutation unit is located between the coil power supply and the magnet coil; the control unit is connected with the industrial personal computer, the magnet coil power supply unit and the reversing unit and used for controlling on-off of the magnet coil power supply unit and adjusting the size of a power supply according to instructions of the industrial personal computer, and meanwhile the direction of the power supply input to the magnet lens unit by the magnet coil power supply unit is adjusted through the reversing unit. According to the invention, the beam distribution position can be adjusted, the loss in the beam transmission process is reduced, and the low-energy beam utilization rate is improved.

Description

Technical Field

[0001] The present invention mainly relates to the technical field of ion implanters, and in particular to a magnet lens beam adjustment system and a beam adjustment method for an ion implanter. Background Art

[0002] Integrated circuit chip manufacturing is generally speaking the process of making components on extremely small semiconductor chips. Under normal circumstances, the manufacturing process of integrated circuit chips requires hundreds of processes of dozens of process equipment. A process line mainly includes exposure, etching, ion implantation, oxidation, coating and other processes, which are repeated many times. Compared with conventional hot doping processes, ion implantation technology has the advantages of high-precision dose uniformity and repeatability, small lateral diffusion, etc. Ion implantation overcomes the limitations of conventional processes, improves the integration, speed, yield and life of circuits, and reduces costs and power consumption. Therefore, ion implanters are widely used in doping processes. The working principle of ion implantation is to ionize the atoms of a certain element and accelerate them in an electric field. After obtaining a high speed, they are shot into the surface of the wafer to change the physical or chemical properties of the surface of the wafer material.

[0003] The ion implantation process consists of three stages: ion beam generation, ion beam screening, and ion beam detection. In the ion beam generation stage, the ion source arc chamber generates positively charged ions through electron collisions with atoms, and uses high-voltage electrodes to draw out the ions to form a beam. At this time, the ion beam is relatively diverse, with non-uniform charges, and is doped with various atoms and electrons, and is far from being in use. The electrons are screened out by suppressing the electric field, and the ions of the required charge are screened out by the magnetic field. At this time, the beam has reached the use state, and the machine can perform the implantation work after using the detection device to test important parameters such as beam energy and angle. The low-energy beam of the current ion implanter has a slow ion speed, severe beam divergence, and a large beam spot, which causes the center position of the beam to shift. Summary of the invention

[0004] In view of the technical problems existing in the prior art, the present invention provides an ion implanter magnet lens beam adjustment system and a beam adjustment method which can realize the function of adjusting the beam distribution position, reduce the loss during beam transmission, and improve the utilization rate of low-energy beam.

[0005] In order to solve the above technical problems, the technical solution proposed by the present invention is:

[0006] An ion implanter magnet lens beam adjustment system comprises an industrial computer, a control unit, a magnet coil power supply unit, a commutation unit and a magnet lens unit;

[0007] The magnet lens unit comprises a plurality of groups of magnet coils, which are sequentially arranged outside the beam cavity along the beam direction;

[0008] The magnet coil power supply unit includes multiple groups of coil power supplies, and is connected to each group of magnet coils in a one-to-one correspondence;

[0009] The commutation unit is located between the coil power supply and the magnet coil;

[0010] The control unit is connected to the industrial computer, the magnet coil power supply unit and the commutation unit respectively, and is used to control the opening and closing of the magnet coil power supply unit and adjust the power supply size according to the instructions of the industrial computer, and at the same time adjust the power direction of the magnet coil power supply unit input to the magnet lens unit through the commutation unit.

[0011] As a further improvement of the above technical solution:

[0012] It also includes a temperature detection unit for detecting the temperature of the magnet coil, and a switch of the temperature detection unit is connected in series in the control loop of the coil power supply.

[0013] The temperature detection unit is a magnet coil temperature sensor.

[0014] The industrial computer is connected to the control unit through a dual-loop optical fiber.

[0015] The magnet lens unit also includes a mounting support frame, and the magnet coil is welded to the mounting support frame.

[0016] The present invention also discloses a beam adjustment method based on the above-mentioned ion implanter magnet lens beam adjustment system, comprising the steps of:

[0017] The industrial computer outputs beam adjustment instructions to the control unit;

[0018] The control unit controls the opening and closing of the corresponding magnet coil power supply unit, and at the same time adjusts the power direction of the corresponding magnet coil power supply unit input to the magnet lens unit through the switching unit, thereby making the magnet lens unit in a beam vertical stretching mode, a beam vertical compression mode, a beam vertical upward movement mode or a beam vertical downward movement mode.

[0019] As a further improvement of the above technical solution:

[0020] When in the beam vertical stretching mode, the control unit controls the magnet coils at the upper, middle and lower parts of the beam cavity through the switching unit to output in the positive direction.

[0021] When in the beam vertical compression mode, the control unit controls the magnet coils at the upper, middle and lower parts of the beam cavity through the switching unit to output in reverse.

[0022] When in the beam vertical upward movement mode, the control unit controls the magnet coil at the upper part of the beam cavity to output in the forward direction, the magnet coil in the middle part to turn off, and the magnet coil at the lower part to output in the reverse direction through the switching unit.

[0023] When the beam is in the vertical downward movement mode, the control unit controls the magnet coil at the upper part of the beam cavity to output in the reverse direction, the magnet coil in the middle part to turn off, and the magnet coil at the lower part to output in the forward direction through the switching unit.

[0024] Compared with the prior art, the advantages of the present invention are:

[0025] The present invention realizes a beam vertical stretching mode, a beam vertical compression mode, a beam vertical upward movement mode, and a beam vertical downward movement mode by using a plurality of groups of magnetic coils in coordination. That is, a magnetic field lens can be used to accurately adjust the beam shape, realize the function of adjusting the beam distribution position, reduce the loss in the beam transmission process, and improve the utilization rate of the low-energy beam.

[0026] The beam modulation system of the present invention is installed in parallel with other control systems and operates independently; the overall structure of the system is simple, optical fiber communication can be realized, and the stability is high; the magnet lens structure is located in the optical path cavity, the volume is small, and it can be disassembled and assembled separately, which is convenient for maintenance; this system has hardware over-temperature interlock protection to prevent the system from overheating, and the safety is relatively high; when the machine adopts the low-energy mode, the beam utilization rate is relatively high; due to the short cavity, when this system is not working, it does not affect the beam transmission of the machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic structural diagram of the magnet lens beam adjustment system in an embodiment of the present invention.

[0028] Figure 2 It is a schematic diagram of the component layout of the commutator of the present invention in a specific application.

[0029] Figure 3 It is a schematic diagram of the front panel of the commutator of the present invention in a specific application.

[0030] Figure 4 It is a schematic diagram of the rear panel of the commutator of the present invention in a specific application.

[0031] Figure 5 The schematic diagram of the control system of the commutator of the present invention in a specific application.

[0032] Figure 6 It is a front view of the magnet lens structure of the present invention in a specific application.

[0033] Figure 7 It is a left view of the magnet lens structure of the present invention during specific application.

[0034] Figure 8 It is a right side view of the magnet lens structure of the present invention during specific application.

[0035] Fig. 9 This is a schematic diagram of the beam stretching mode of the present invention.

[0036] Fig.10 This is a schematic diagram of the beam compression mode of the present invention.

[0037] Fig.11 This is a schematic diagram of the beam upward movement mode of the present invention.

[0038] Fig.12 This is a schematic diagram of the beam downward movement mode of the present invention.

[0039] Legend: 1. Industrial computer; 2. ADIO controller; 3. Upper coil power supply; 4. Middle coil power supply; 5. Lower coil power supply; 6. Commutator; 13. Upper coil temperature sensor; 14. Lower coil temperature sensor; 101. First contactor; 102. Second contactor; 103. Third contactor; 104. Fourth contactor; 105. Fifth contactor; 106. Sixth contactor; 107. Control panel; 108. Upper coil forward indicator light; 109. Middle coil forward indicator light; 110. Lower coil forward indicator light; 111. Upper coil reverse indicator light; 112. Middle coil reverse indicator light; 113. Lower coil reverse indicator light; 114. Control port; 115. Input heavy load port; 116. Output heavy load port; 117. Grounding column; 201. Mounting support frame; 202. Upper left magnet coil; 203. Left middle magnet coil; 204. Upper magnet coil temperature sensor; 205. Lower left magnet coil; 206, water outlet port of left magnet coil; 208, optical path cavity; 209, cable fixing buckle; 210, temperature sensor of lower magnet coil; 211, positive terminal of upper left magnet coil; 212, negative terminal of upper left magnet coil; 213, positive terminal of left middle magnet coil; 214, negative terminal of left middle magnet coil; 215, positive terminal of lower left magnet coil; 216, negative terminal of lower left magnet coil; 217, negative terminal of upper right magnet coil ; 218, positive terminal of the upper right magnet coil; 219, negative terminal of the left middle magnet coil; 220, positive terminal of the left middle magnet coil; 221, negative terminal of the lower left magnet coil; 222, positive terminal of the lower left magnet coil; 223, cooling water inlet; 224, cooling water outlet; 225, water pipe at the upper end of the magnet; 226, water outlet port of the right magnet coil; 227, upper right magnet coil; 228, right middle magnet coil; 229, lower right magnet coil. DETAILED DESCRIPTION

[0040] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments.

[0041] like Figure 1As shown, the magnet lens beam adjustment system of the ion implanter of the embodiment of the present invention includes an industrial computer 1, a control unit, a magnet coil power supply unit, a commutation unit and a magnet lens unit; the magnet lens unit includes a plurality of groups of magnet coils, and the plurality of groups of magnet coils are sequentially arranged on the outside of the beam cavity along the beam direction; the magnet coil power supply unit includes a plurality of groups of coil power supplies, and is connected to each group of magnet coils in a one-to-one correspondence; the commutation unit is located between the coil power supply and the magnet coil; the control unit is respectively connected to the industrial computer 1, the magnet coil power supply unit and the commutation unit.

[0042] Specifically, the industrial computer 1 is connected to the control unit (such as ADIO controller 2) through an optical fiber, which is mainly used for system control; the ADIO controller 2 is used to control the magnet coil power supply and the commutation unit (such as commutator 6); the coil power supply is used to provide power output to enable the magnet coil to generate a magnetic field; the commutator 6 is used to change the direction of the output magnetic field current electrode and thus change the direction of the magnetic field; the magnet lens unit is located in the beam optical path, the magnetic field coil generates magnetic flux lines located in the beam cavity, the beam ions are positively charged, and the ions at the upper and lower ends of the cavity move vertically in the cavity magnetic field. The ions are affected by the Lorentz magnetic force, and the motion trajectory will change with the direction of the force, thereby realizing the magnet lens beam adjustment function.

[0043] System principle: The system is installed on the industrial computer 1, and the software bottom layer is configured with 0-76A power supply current setting and power supply current monitoring. It is connected to the ADIO controller 2 through optical fiber. The optical fiber communication is a dual loop, divided into main loop communication and auxiliary loop communication. The function is to prevent abnormal optical fiber communication from affecting the normal operation of the system. The ADIO controller 2 is connected to the upper coil power supply 3, the middle coil power supply 4, the lower coil power supply 5 and the commutator 6 through the control cable. The three coil power supplies are independently controlled, and the functions are:

[0044] 1. Control power supply enable;

[0045] 2. The controller sets the power supply current 0-76A signal to be converted into a 0-10VDC voltage signal and gives it to the upper coil power supply 3, the middle coil power supply 4 and the lower coil power supply 5;

[0046] 3. Convert the power supply current and voltage signals monitored by the upper coil power supply 3, the middle coil power supply 4, and the lower coil power supply 5 into analog quantities and send them to the industrial computer 1;

[0047] 4. The controller sets the digital quantity to make the commutator 6 realize the change of the output current direction of the commutator 6, thereby changing the current flowing into the magnet coil and reversing the direction of the magnetic flux lines generated by the magnet;

[0048] The upper coil power supply 3, the middle coil power supply 4 and the lower coil power supply 5 are connected to the heavy-load input port of the commutator 6 via output cables, and the upper coil power supply 3 is connected to the magnet coil temperature sensor 13 via a collection cable.

[0049] The commutator 6 has the following functions: 1. Change the direction of the output current of the magnet; 2. Change the direction of the magnetic flux lines inside the cavity; 3. Monitor the forward and reverse directions of each path in real time;

[0050] Function of magnet coil temperature sensor:

[0051] The upper coil temperature sensor 13 is connected to the upper coil power supply 3, and the lower coil temperature sensor 14 is connected to the lower coil power supply 5; the coil temperature sensor contacts are normally closed, and when the temperature reaches 60°C, the contacts change from normally closed to normally open, and the power control enable circuit is connected in series with the coil temperature sensor; when the coil temperature sensor contacts are disconnected, the corresponding power supply is turned off, and the power output is disconnected, realizing the system over-temperature hardware interlock to protect the safety of the equipment.

[0052] The heavy-load output of the commutator 6 is divided into three paths, which are respectively connected to the upper left magnet coil 202, the upper right magnet coil 227, the left middle magnet coil 203, the right middle magnet coil 228, the lower left magnet coil 205 and the lower right magnet coil 229.

[0053] Function of the magnet coil: The upper, middle and lower magnet coils are fixed in order on the outer ring of the optical path cavity. The cavity is the path of the beam movement. When the current is passed through the magnet coil, magnetic flux lines are generated inside the cavity. Positively charged ions move in the magnetic field. Under the action of the magnetic field force, the vertical movement direction of the ions will be changed, thereby realizing the adjustment of the beam position.

[0054] like Figure 2 As shown, the internal components of the commutator 6 include a first contactor 101, a second contactor 102, a third contactor 103, a fourth contactor 104, a fifth contactor 105, a sixth contactor 106 and a control board 107;

[0055] like Figure 3 As shown, the front panel of the commutator 6 includes an upper coil forward indicator light 108, a middle coil forward indicator light 109, a lower coil forward indicator light 110, an upper coil reverse indicator light 111, a middle coil reverse indicator light 112 and a lower coil reverse indicator light 113;

[0056] like Figure 4 As shown, the rear panel of the inverter 6 includes a control port 114 , an input heavy load port 115 , an output heavy load port 116 and a grounding post 117 .

[0057] like Figure 5 As shown, the commutator 6 includes three control circuits, namely, upper, middle and lower magnet coil control, wherein the upper magnet coil control circuit includes a first contactor 101, a second contactor 102, a control board 107, an upper coil forward indicator light 108 and an upper coil reverse indicator light 111; in the forward and reverse output states, when the first contactor 101 is working, the upper coil forward indicator light 108 is on, and when the second contactor 102 is working, the upper coil reverse indicator light 111 is on.

[0058] The middle magnet coil control circuit includes a third contactor 103, a fourth contactor 104, a control board 107, a middle coil forward indicator light 109 and a middle coil reverse indicator light 112; there are two output states, forward and reverse. When the third contactor 103 is working, the middle coil forward indicator light 109 is on, and when the fourth contactor 104 is working, the upper coil reverse indicator light 112 is on.

[0059] The lower magnet coil control circuit includes the fifth contactor 105, the sixth contactor 106, the control board 107, the lower coil forward indicator light 110, and the lower coil reverse indicator light 113, and has two output states: forward and reverse. When the fifth contactor 105 is working, the lower coil forward indicator light 110 is on; when the sixth contactor 106 is working, the lower coil reverse indicator light 113 is on.

[0060] like Figure 6-Figure 8 As shown, the magnet lens structure includes a mounting support frame 201, an upper left magnet coil 202, a left middle magnet coil 203, an upper magnet coil temperature sensor 204, a lower left magnet coil 205, a left magnet coil water outlet port 206, an optical path cavity 208, a cable fixing buckle 209, a lower magnet coil temperature sensor 210, an upper left magnet coil positive terminal 211, an upper left magnet coil negative terminal 212, a left middle magnet coil positive terminal 213, a left middle magnet coil negative terminal 214, and a lower left magnet coil positive terminal 215, negative terminal 216 of lower left magnet coil, negative terminal 217 of upper right magnet coil, positive terminal 218 of upper right magnet coil, negative terminal 219 of right middle magnet coil, positive terminal 220 of right middle magnet coil, negative terminal 221 of lower right magnet coil, positive terminal 222 of lower right magnet coil, cooling water inlet 223, cooling water outlet 224, water pipe 225 at upper end of magnet, water outlet port 226 of right magnet coil, upper right magnet coil 227, right middle magnet coil 228 and lower right magnet coil 229;

[0061] The mounting support frame 201 is composed of two parts, the optical path cavity 208 is placed in the center, the upper left magnet coil 202, the left middle magnet coil 203 and the lower left magnet coil 205 are distributed at the left end of the optical path cavity 208, and the three groups of magnet coils are welded and fixed; the upper right magnet coil 227, the right middle magnet coil 228 and the lower right magnet coil 229 are distributed at the right end, and the three groups of magnet coils are welded and fixed;

[0062] The magnet temperature sensor 204 is glued and fixed on the upper right magnet coil 227, and the magnet temperature sensor 210 is glued and fixed on the lower left magnet coil 205;

[0063] The upper left magnet coil positive terminal 211, the upper left magnet coil negative terminal 212, the left middle magnet coil positive terminal 213, the left middle magnet coil negative terminal 214, the lower left magnet coil positive terminal 215, the lower left magnet coil negative terminal 216, the upper right magnet coil negative terminal 217, the upper right magnet coil positive terminal 218, the right middle magnet coil negative terminal 219, the right middle magnet coil positive terminal 220, the lower right magnet coil negative terminal 221, and the lower right magnet coil positive terminal 222 are respectively welded and fixed to the corresponding upper left magnet coil 202, the left middle magnet coil 203, the lower left magnet coil 205, the upper right magnet coil 227, the right middle magnet coil 228, and the lower right magnet coil 229;

[0064] The upper left magnet coil 202, the middle left magnet coil 203, the lower left magnet coil 205, the upper right magnet coil 227, the middle right magnet coil 228 and the lower right magnet coil 229 are encapsulated with resin;

[0065] The cooling water inlet 223 and the cooling water outlet 224 are fixed to the lower end of the mounting support frame 201; the left magnet coil water outlet port 206 and the right magnet coil water outlet port 226 are fixed to the upper end of the mounting support frame 201; the magnet upper end water pipe 225 is connected to the left magnet coil water outlet port 206 and the right magnet coil water outlet port 226;

[0066] The cable fixing buckles 209 are fixed to the upper end of the mounting support frame 201 by means of screws, and there are 6 of them in total, which are used to fix the left and right magnet coil connection wires.

[0067] Working principle of magnet lens:

[0068] Magnet power supplies 3, 4, and 5 are used to set the current output to the magnet coil. When the corresponding current is passed through the coil, a magnetic field is generated according to the right-hand screw rule, and the beam cavity will pass through the magnetic flux lines generated by the corresponding magnet coil. Since the beam ions are positively charged, the ions at the upper and lower ends of the cavity move vertically in the cavity magnetic field. The ions are affected by the Lorentz magnetic force, and the movement trajectory will change with the force direction. The commutator 6 is used to change the direction of the input current of the magnet coil, change the direction of the magnetic field, and then change the direction of the magnetic flux lines of the cavity; when the ions enter the cavity magnetic field, the force direction will also change. The upper, middle, and lower magnet coils change the current input direction by controlling the commutator 6, forming a total of four working modes, namely, the beam vertical stretching mode, the beam vertical compression mode, the beam vertical upward movement mode, and the beam vertical downward movement mode.

[0069] Using the three sets of magnets together will change the beam operation state, realize the function of adjusting the beam distribution position, reduce the loss during beam transmission, and improve beam utilization.

[0070] The upper and lower magnet coils have a hardware temperature interlock. The upper magnet coil 8 and the lower magnet coil 11 are each provided with a temperature sensor. The upper magnet power supply 3 is set to a current of 0-20A, the middle magnet power supply 4 is set to a current of 0-50A, and the lower magnet power supply 5 is set to a current of 0-20A. The coils are output normally and generate heat. The magnets are equipped with a water cooling circuit to keep the magnet components below 40°C. When the temperature of the magnet coil exceeds 60°C, the temperature sensor changes from normally closed to normally open for a duration of 0.5S, the magnet power supply output is turned off, the signal is transmitted to the industrial computer 1, and the display pops up an alarm message. The system prohibits the magnet power supply and the commutator 6 from working. After the fault is eliminated, the magnet power supply can resume normal function after manually resetting the sensor. The purpose of this setting is to prevent the system from abnormalities, the temperature sensor is normally open and normally closed repeatedly, the magnet power supply is repeatedly turned on and off, the load is continuously in an abnormal state, and the power supply and magnet coil are easily damaged. This setting can realize the functions of protecting equipment safety, product safety, and personal safety.

[0071] Working principle of commutator 6:

[0072] The working principle of the commutator 6 of the magnet lens beam adjustment system is as follows Figure 5 As shown. By inputting a DC 24V voltage through the controller 2, the six contactors inside the commutator 6 and the control board 107 can be powered. After the commutator 6 power supply voltage is connected, the first contactor 01, the first contactor 03, and the first contactor 05 coils are energized, the contacts are closed, and the three-way commutator 6 realizes positive output. The coil positive indicator light 108, the middle coil positive indicator light 109, and the lower coil positive indicator light 110 on the front panel are lit; the control board 107 detects whether the contacts of the first contactor 01, the first contactor 03, and the first contactor 05 are conductive; if not, the controller signal is abnormal, the signal is transmitted to the industrial computer 1, the display pops up an alarm message, the system prohibits the magnet power supply and the commutator 6 from working, and returns to normal after the fault is eliminated; if yes, the three-way Normal conduction, normal signal, commutator 6 is given a reverse digital signal, the first contactor 02, the first contactor 04, and the first contactor 06 coils are energized, the contacts are closed, and the commutator 6 realizes reverse output in three ways. The coil forward indicator light 111, the middle coil forward indicator light 112, and the lower coil forward indicator light 113 on the front panel are lit. The control board 107 detects whether the first contactor 02, the first contactor 04, and the first contactor 06 contacts are conductive. No: the controller signal is abnormal, the signal is transmitted to the industrial computer 1, and an alarm message pops up on the display screen. The system prohibits the magnet power supply and commutator 6 from working. After the fault is eliminated, it returns to normal. Yes: the three ways are normally conducted, the signal is normal, the magnet power supply can output current, and the magnet lens works normally.

[0073] The embodiment of the present invention further discloses a beam adjustment method based on the magnet lens beam adjustment system of the ion implanter as described above, comprising the steps of:

[0074] The industrial computer 1 outputs a beam adjustment instruction to the control unit;

[0075] The control unit controls the opening and closing of the corresponding magnet coil power supply unit, and at the same time adjusts the power direction of the corresponding magnet coil power supply unit input to the magnet lens unit through the reversing unit, so that the magnet lens unit is in a beam vertical stretching mode, a beam vertical compression mode, a beam vertical upward movement mode or a beam vertical downward movement mode; the details are as follows:

[0076] (1) Beam vertical stretching mode, such as Fig. 9 As shown;

[0077] 1. The power supply, commutator 6 and magnet coil are connected;

[0078] 2. The upper coil magnet power supply 3 is set to a certain current, the commutator 6 controls the upper magnet coil to output in the forward direction, the upper magnet coil forward indicator light 108 is lit, and the upper magnet coil is supplied with current;

[0079] 3. According to the right-hand screw rule, the upper left magnet coil 202 generates a magnetic field, with an S pole at the bottom and an N pole at the top; the upper right magnet coil 227 generates a magnetic field, with an N pole at the bottom and an S pole at the top;

[0080] 4. The direction of the magnetic flux lines at the upper end of the cavity is from right to left;

[0081] 5. According to the left-hand rule, the beam ions carry positive charges, and the ions at the upper end of the cavity move vertically in the cavity magnetic field. The Lorentz magnetic force on the ions is directed upward, which has the effect of stretching the beam upward;

[0082] 6. The power supply 4 of the middle magnet coil is set to a certain current, the commutator 6 controls the forward output of the middle magnet coil, the forward indicator light 109 of the middle magnet coil is lit, and the coil is passed through current;

[0083] 7. According to the right-hand screw rule, the left middle magnet coil 203 generates a magnetic field, with an N pole at the bottom and an S pole at the top; the right middle magnet coil 228 generates a magnetic field, with an S pole at the bottom and an N pole at the top;

[0084] 8. The direction of the magnetic flux lines at the upper end of the cavity is from right to left, and the direction of the magnetic flux lines at the lower end of the cavity is from left to right;

[0085] 9. According to the left-hand rule, the beam ions carry positive charge, and the ions at the upper end of the cavity move vertically in the cavity magnetic field. The Lorentz magnetic force on the ions at the upper end of the cavity is directed upward, which has the effect of stretching the beam upward. The Lorentz magnetic force on the ions at the lower end of the cavity is directed downward, which has the effect of stretching the beam downward.

[0086] 10. The lower coil power supply 5 sets a certain current, the commutator 6 controls the lower magnet coil to output in the forward direction, the lower magnet coil forward indicator light 110 lights up, and the lower magnet coil is supplied with current;

[0087] 11. According to the right-hand screw rule, the lower left magnet coil 205 generates a magnetic field, with an S pole at the lower end and an N pole at the upper end; the lower right magnet coil 229 generates a magnetic field, with an N pole at the lower end and an S pole at the upper end;

[0088] 12. The direction of the magnetic flux lines at the lower end of the cavity is from left to right;

[0089] 13. According to the left-hand rule, the beam ions carry positive charge, and the ions at the lower end of the cavity move vertically in the cavity magnetic field. The Lorentz magnetic force on the ions is directed downward, which has the effect of stretching the beam downward.

[0090] 14. In this adjustment method, the direction of the magnetic flux lines generated by the magnetic field of the middle magnet coils 9 and 10 at the upper end of the cavity is consistent with the direction of the magnetic flux lines generated by the upper magnet coils 7 and 8, and the beam stretching effect is superimposed.

[0091] The direction of the magnetic flux lines generated by the magnetic field of the middle magnet coils 9 and 10 at the lower end of the cavity is consistent with the direction of the magnetic flux lines generated by the lower magnet coils 11 and 12, and the beam stretching effect is superimposed.

[0092] (2) Beam vertical compression mode, such as Fig.10 As shown;

[0093] 1. The power supply, commutator 6 and magnet coil are connected;

[0094] 2. The upper magnet coil power supply 3 is set to a certain current, the commutator 6 controls the upper magnet coil to output in the reverse direction, the upper magnet coil reverse indicator light 111 is lit, and the upper magnet coil is supplied with current;

[0095] 3. According to the right-hand screw rule, the upper left magnet coil 202 generates a magnetic field, with an N pole at the bottom and an S pole at the top; the upper right magnet coil 227 generates a magnetic field, with an S pole at the bottom and an N pole at the top;

[0096] 4. The direction of the magnetic flux lines at the upper end of the cavity is from left to right;

[0097] 5. According to the left-hand rule, the beam ions carry positive charge, and the ions at the upper end of the cavity move vertically in the cavity magnetic field. The Lorentz magnetic force on the ions is directed downward, which has the effect of compressing the beam downward.

[0098] 6. The middle coil power supply 4 sets a certain current, the middle coil of the commutator 6 outputs in the reverse direction, the middle coil reverse indicator light 112 lights up, and the coil is passed through the current;

[0099] 7. According to the right-hand screw rule, the left middle magnet coil 203 generates a magnetic field with an S pole at the lower end and an N pole at the upper end, and the right middle magnet coil 228 generates a magnetic field with an N pole at the lower end and an S pole at the upper end;

[0100] 8. The direction of the magnetic flux lines at the upper end of the cavity is from left to right, and the direction of the magnetic flux lines at the lower end of the cavity is from right to left;

[0101] 9. According to the left-hand rule, the beam ions carry positive charge, and the ions at the upper end of the cavity move vertically in the cavity magnetic field. The Lorentz magnetic force on the ions at the upper end of the cavity is directed downward, which has the effect of compressing the beam downward. The Lorentz magnetic force on the ions at the lower end of the cavity is directed upward, which has the effect of compressing the beam upward.

[0102] 10. The lower coil power supply 5 is set to a certain current, the commutator 6 outputs the lower coil in the reverse direction, the lower coil reverse indicator light 113 lights up, and the coil is supplied with current;

[0103] 11. According to the right-hand screw rule, the lower left magnet coil 205 generates a magnetic field with an N pole at the lower end and an S pole at the upper end, and the lower right magnet coil 229 generates a magnetic field with an S pole at the lower end and an N pole at the upper end;

[0104] 12. The direction of the magnetic flux lines at the lower end of the cavity is from right to left;

[0105] 13. According to the left-hand rule, the beam ions carry positive charge, and the ions at the lower end of the cavity move vertically in the cavity magnetic field. The Lorentz magnetic force on the ions is directed upward, which has the effect of compressing the beam upward.

[0106] 14. In this adjustment method, the direction of the magnetic flux lines generated by the magnetic field of the middle magnet coils 9 and 10 at the upper end of the cavity is consistent with the direction of the magnetic flux lines generated by the upper magnet coils 7 and 8, and the beam compression effect is superimposed. The direction of the magnetic flux lines generated by the magnetic field of the middle magnet coils 9 and 10 at the lower end of the cavity is consistent with the direction of the magnetic flux lines generated by the lower magnet coils 11 and 12, and the beam compression effect is superimposed.

[0107] (3) Beam vertical upward movement mode, such as Fig.11 As shown;

[0108] 1. The power supply, commutator 6 and magnet coil are connected;

[0109] 2. The upper coil power supply 3 is set to a certain current, the commutator 6 controls the upper magnet coil to output in the positive direction, the upper magnet coil positive indicator light 108 is lit, and the coil is passed through the current;

[0110] 3. According to the right-hand screw rule, the upper left magnet coil 202 generates a magnetic field, with an S pole at the bottom and an N pole at the top; the upper right magnet coil 227 generates a magnetic field, with an N pole at the bottom and an S pole at the top;

[0111] 4. The direction of the magnetic flux lines at the upper end of the cavity is from right to left;

[0112] 5. According to the left-hand rule, the beam ions carry positive charge, and the ions at the upper end of the cavity move vertically in the cavity magnetic field. The Lorentz magnetic force on the ions is directed upward, which has the effect of moving the beam upward.

[0113] 6. The power supply 4 of the middle magnet coil is turned off, there is no current output, and the middle magnet coil does not generate a magnetic field.

[0114] 7. The lower magnet coil power supply 5 is set to a certain current, the commutator 6 outputs the lower coil in the reverse direction, the lower magnet coil reverse indicator light 113 is lit, and the coil is passed through the current;

[0115] 8. According to the right-hand screw rule, the lower left magnet coil 205 generates a magnetic field with an N pole at the lower end and an S pole at the upper end, and the lower right magnet coil 229 generates a magnetic field with an S pole at the lower end and an N pole at the upper end;

[0116] 9. The direction of the magnetic flux lines at the lower end of the cavity is from right to left;

[0117] 10. According to the left-hand rule, the beam ions carry positive charge, and the ions at the lower end of the cavity move vertically in the cavity magnetic field. The Lorentz magnetic force on the ions is directed upward, which has the effect of moving the beam upward.

[0118] 11. In this adjustment method, the magnetic flux lines generated by the upper magnet coils 7 and 8 move the beam upward, and the magnetic flux lines generated by the lower magnet coils 11 and 12 move the beam upward. The two magnets have the same effect on the beam, realizing the overall upward movement of the beam.

[0119] (4) Beam vertical downward movement mode, such as Fig.12 As shown;

[0120] 1. The power supply, commutator 6 and magnet coil are connected;

[0121] 2. The upper coil power supply 3 is set to a certain current, the commutator 6 controls the upper magnet coil to output in the reverse direction, the upper magnet coil reverse indicator light 111 is lit, and the coil is supplied with current;

[0122] 3. According to the right-hand screw rule, the upper left magnet coil 202 generates a magnetic field, with an N pole at the bottom and an S pole at the top; the upper right magnet coil 227 generates a magnetic field, with an S pole at the bottom and an N pole at the top;

[0123] 4. The direction of the magnetic flux lines at the upper end of the cavity is from left to right;

[0124] 5. According to the left-hand rule, the beam ions carry positive charge, and the ions at the upper end of the cavity move vertically in the cavity magnetic field. The Lorentz magnetic force on the ions is directed downward, which has the effect of moving the beam downward;

[0125] 6. The middle coil power supply 4 is turned off, there is no current output, and the middle magnet coil does not generate a magnetic field;

[0126] 7. The lower magnet coil power supply 5 is set to a certain current, the commutator 6 controls the lower magnet coil to output in the forward direction, the lower coil forward indicator light 110 lights up, and the coil is supplied with current;

[0127] 8. According to the right-hand screw rule, the lower left magnet coil 205 generates a magnetic field with an S pole at the lower end and an N pole at the upper end; the lower right magnet coil 229 generates a magnetic field with an N pole at the lower end and an S pole at the upper end;

[0128] 9. The direction of the magnetic flux lines at the lower end of the cavity is from left to right;

[0129] 10. According to the left-hand rule, the beam ions carry positive charge, and the ions at the lower end of the cavity move vertically in the cavity magnetic field. The Lorentz magnetic force on the ions is directed downward, which has the effect of moving the beam downward.

[0130] 11. In this adjustment method, the magnetic flux lines generated by the upper magnet coils 7 and 8 move the beam downward, and the magnetic flux lines generated by the lower magnet coils 11 and 12 move the beam downward. The two magnets have the same effect on the beam, realizing the overall downward movement of the beam.

[0131] The present invention realizes a beam vertical stretching mode, a beam vertical compression mode, a beam vertical upward movement mode, and a beam vertical downward movement mode by using a plurality of groups of magnetic coils in coordination. That is, a magnetic field lens can be used to accurately adjust the beam shape, realize the function of adjusting the beam distribution position, reduce the loss in the beam transmission process, and improve the utilization rate of the low-energy beam.

[0132] The beam modulation system of the present invention is installed in parallel with other control systems and operates independently; the overall structure of the system is simple, optical fiber communication can be realized, and the stability is high; the magnet lens structure is located in the optical path cavity, the volume is small, and it can be disassembled and assembled separately, which is convenient for maintenance; this system has hardware over-temperature interlock protection to prevent the system from overheating, and the safety is relatively high; when the machine adopts the low-energy mode, the beam utilization rate is relatively high; due to the short cavity, when this system is not working, it does not affect the beam transmission of the machine.

[0133] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0134] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0135] In the present invention, unless otherwise clearly specified and limited, the terms "assemble", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0136] The above are only preferred embodiments of the present invention. The protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should be regarded as the protection scope of the present invention.

Claims

1. An ion implanter magnet lens beam adjustment system, characterized in that: It comprises an industrial computer (1), a control unit, a magnet coil power supply unit, a commutation unit and a magnet lens unit; The magnet lens unit comprises a plurality of groups of magnet coils, which are sequentially arranged outside the beam cavity along the beam direction; The magnet coil power supply unit includes multiple groups of coil power supplies, and is connected to each group of magnet coils in a one-to-one correspondence; The commutation unit is located between the coil power supply and the magnet coil; The control unit is respectively connected to the industrial computer (1), the magnet coil power supply unit and the reversing unit, and is used to control the opening and closing of the magnet coil power supply unit and adjust the power supply according to the instructions of the industrial computer (1), and at the same time adjust the power direction of the magnet coil power supply unit input to the magnet lens unit through the reversing unit.

2. The ion implanter magnet lens beam adjustment system according to claim 1, characterized in that: It also includes a temperature detection unit for detecting the temperature of the magnet coil, and a switch of the temperature detection unit is connected in series in the control loop of the coil power supply.

3. The ion implanter magnet lens beam adjustment system according to claim 2, characterized in that: The temperature detection unit is a magnet coil temperature sensor.

4. The ion implanter magnet lens beam adjustment system according to claim 1, 2 or 3, characterized in that: The industrial computer (1) is communicatively connected to the control unit via a dual-loop optical fiber.

5. The magnet lens beam adjustment system for an ion implanter according to claim 1, 2 or 3, characterized in that: The magnet lens unit also includes a mounting support frame (201), and the magnet coil is welded to the mounting support frame (201).

6. A beam adjustment method for an ion implanter magnet lens beam adjustment system according to any one of claims 1 to 5, characterized in that: Includes steps: The industrial computer (1) outputs a beam adjustment instruction to the control unit; The control unit controls the opening and closing of the corresponding magnet coil power supply unit, and at the same time adjusts the power direction of the corresponding magnet coil power supply unit input to the magnet lens unit through the switching unit, thereby making the magnet lens unit in a beam vertical stretching mode, a beam vertical compression mode, a beam vertical upward movement mode or a beam vertical downward movement mode.

7. The beam adjustment method according to claim 6, characterized in that: When in the beam vertical stretching mode, the control unit controls the magnet coils at the upper, middle and lower parts of the beam cavity through the switching unit to output in the positive direction.

8. The beam adjustment method according to claim 6, characterized in that: When in the beam vertical compression mode, the control unit controls the magnet coils at the upper, middle and lower parts of the beam cavity through the switching unit to output in the reverse direction.

9. The beam adjustment method according to claim 6, characterized in that: When in the beam vertical upward movement mode, the control unit controls the magnet coil at the upper part of the beam cavity to output in the forward direction, the magnet coil in the middle part to turn off, and the magnet coil at the lower part to output in the reverse direction through the switching unit.

10. The beam adjustment method according to claim 6, characterized in that: When the beam is in the vertical downward movement mode, the control unit controls the magnet coil at the upper part of the beam cavity to output in the reverse direction, the magnet coil in the middle part to turn off, and the magnet coil at the lower part to output in the forward direction through the switching unit.

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