Vacuum clamping mechanism

Abstract

The invention provides a vacuum clamping mechanism which comprises a base, a vacuum chuck and a flexible sleeve, the base is provided with a first air guide hole, and the first air guide hole is connected with a vacuum pump; the vacuum chuck is provided with a second air guide hole, the second air guide hole communicates with the first air guide hole, and the first end face of the vacuum chuck is used for clamping a plate-shaped part; the first end of the flexible sleeve is hermetically connected with the outer wall surface of the base, and the second end of the flexible sleeve is hermetically connected with the outer wall surface of the vacuum chuck; the vacuum clamping mechanism is configured as follows: before vacuumizing, the base is flexibly connected with the vacuum chuck through the flexible sleeve; after the wafer is clamped and vacuumized, the base is attached to the second end face of the vacuum chuck in a vacuum adsorption mode. According to the vacuum clamping mechanism provided by the invention, after vacuum is established, the vacuum clamping mechanism is changed into a rigid structure from a flexible structure, so that the position of the clamped part can be ensured not to deviate and swing in the handover or moving process of the clamped part, good position precision is kept, and the predictability of the position of the clamped part is improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a vacuum clamping mechanism. Background Art

[0002] In the semiconductor or flat panel display manufacturing industry, thin wafers or other flat parts are usually clamped by vacuum adsorption. Since thin flat parts are affected by gravity or processing technology, most of them have poor flatness, which makes it difficult to establish vacuum, insufficient hollowness or unreliable vacuum clamping.

[0003] In the prior art, in order to improve the clamping reliability of thin flat parts, a flexible structure is generally added to the contact area between the suction cup and the clamped part, so that the suction cup can adapt to the clamped part, make the suction cup and the clamped part fit well, and establish a good vacuum effect. In the prior art, the flexible structure is generally a flexible hinge or a rubber structure. When these two methods are used to clamp parts, after the vacuum is established, there are still the following deficiencies: the deformation of the flexible structure is difficult to predict, the offset is also difficult to predict, and it is even more difficult to compensate; the flexible structure causes the clamped part to swing during movement, and the position of the clamped part is poorly predictable and has low position accuracy. Summary of the invention

[0004] The present invention provides a vacuum clamping mechanism to solve the technical problem that the position predictability is poor and the position accuracy is low during the movement of the clamped part, which is caused by adding a flexible structure to the contact part between the suction cup and the clamped part in the prior art.

[0005] The present invention provides a vacuum clamping mechanism, comprising:

[0006] A base, wherein the base is provided with a first air guide hole, and the first air guide hole is connected to a vacuum pump;

[0007] A vacuum suction cup, wherein the vacuum suction cup has a second air guide hole, the second air guide hole is connected to the first air guide hole, and the first end surface of the vacuum suction cup is used for clamping a plate-shaped part;

[0008] A flexible sleeve, wherein the flexible sleeve has a first end and a second end along its axial direction, the first end of the flexible sleeve is sealedly connected to the outer wall surface of the base, and the second end of the flexible sleeve is sealedly connected to the outer wall surface of the vacuum suction cup;

[0009] The vacuum clamping mechanism is configured as follows: before vacuuming, the base is flexibly connected to the vacuum suction cup through the flexible sleeve; after vacuuming the wafer, the base is vacuum-adsorbed and bonded to the second end surface of the vacuum suction cup.

[0010] The vacuum clamping mechanism provided by the present invention, on the one hand, when the vacuum suction cup contacts the clamped part, due to the presence of the flexible sleeve, there is a gap between the vacuum suction cup and the base, and the gap can be adjusted according to the flatness or deformation of the clamped part, allowing the vacuum suction cup to have a certain tilt angle, thereby improving the fit between the vacuum suction cup and the clamped part; on the other hand, after the vacuum is established, the vacuum suction cup and the base are adsorbed and fitted, and the vacuum clamping mechanism is changed from a flexible structure to a rigid structure, thereby avoiding the deformation of the flexible sleeve caused by vacuum extraction, which causes the position of the clamped part to shift, and can ensure that the position of the clamped part does not shift or swing during the handover or movement of the clamped part, and even maintains good position accuracy after multiple handovers and movements, thereby improving the predictability of the position of the clamped part; in addition, when the vacuum suction cup of the vacuum clamping mechanism is processed, a certain tilt is allowed, which will not affect the clamping effect, and has good processability.

[0011] Furthermore, the flexible sleeve is a metal flexible sleeve made of metal material, which is convenient for sealing connection with the base and the vacuum suction cup. The connection method is simple and it has the dual functions of flexible deformation and sealing. The establishment of vacuum can be ensured without adding other auxiliary structures.

[0012] Furthermore, the wall thickness of the metal flexible sleeve is between 0.02 mm and 0.1 mm.

[0013] Furthermore, the material of the metal flexible sleeve is stainless steel, titanium alloy or copper alloy, which has the characteristics of elasticity and deformability and meets the requirements of corrosion resistance, fatigue resistance, impact resistance and high reliability.

[0014] Furthermore, the metal flexible sleeve is an integrally formed structure or a split structure.

[0015] Furthermore, the cross-sectional shape of the metal flexible sleeve is an arched structure or a U-shaped structure; or the metal flexible sleeve is a metal corrugated sleeve.

[0016] Further, the number of the first air guide holes is multiple, and / or the number of the second air guide holes is multiple.

[0017] The vacuum clamping mechanism provided by the present invention is provided with a plurality of first air guide holes for pumping air, establishing a vacuum, and improving the vacuum pumping efficiency, that is, improving the clamping efficiency of the clamped parts; a plurality of second air guide holes are provided to increase the contact area with the clamped parts and improve the clamping stability and reliability of the clamped parts.

[0018] Furthermore, the base has a first groove at one end close to the vacuum suction cup, and the first groove is located in the middle of the base; the first air guide hole and the second air guide hole are both connected to the first groove.

[0019] The vacuum clamping mechanism provided by the present invention provides a first groove in the middle of the base, and the edge of the base fits with the vacuum suction cup, thereby reducing the surface processing accuracy of the base and saving costs.

[0020] Furthermore, the vacuum suction cup has a protrusion, which extends outward along the second end surface of the vacuum suction cup, and the opening size of the protrusion decreases along the direction pointing to the base; the base has a recessed portion connected to the first groove, and the recessed portion is adapted to the shape and size of the protrusion for accommodating the protrusion.

[0021] The vacuum clamping mechanism provided by the present invention provides guidance for the fitting of the suction cup and the base to prevent the suction cup and the base from being misaligned by arranging mutually matching recessed portions and raised portions on the base and the raised portions changing from large to small along the direction pointing to the base.

[0022] Furthermore, the vacuum suction cup has a second groove at one end away from the base, the second groove is located in the middle of the vacuum suction cup, and the second groove is connected to the second air guide hole. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A schematic diagram of the structure of the vacuum clamping mechanism provided in an embodiment of the present invention Figure 1 ;

[0024] Figure 2 Schematic diagram of the use of the vacuum clamping mechanism provided by the embodiment of the present invention to clamp a plate-shaped part Figure 1 ;

[0025] Figure 3 Schematic diagram of the use of the vacuum clamping mechanism provided in the embodiment of the present invention to clamp a plate-shaped part Figure 2 ;

[0026] Figure 4 Schematic diagram of the vacuum clamping mechanism provided in the embodiment of the present invention Figure 2 ;

[0027] Description of reference numerals:

[0028] 100 - base; 110 - first air guide hole; 120 - first groove; 130 - recessed portion;

[0029] 200 - vacuum suction cup; 210 - second air guide hole; 220 - second groove; 230 - raised portion;

[0030] 300-flexible sleeve; DETAILED DESCRIPTION

[0031] In order to make the above-mentioned objects, features and advantages of the present invention more clearly understood, the following is a brief description of the present invention in conjunction with the attached drawings. Figure 1-4 The specific embodiments of the present invention are described in detail.

[0032] See attached Figure 1-Figure 3 The embodiment of the present invention provides a vacuum clamping mechanism, comprising: a base 100, a vacuum suction cup 200 and a flexible sleeve 300, wherein the base 100 is provided with a first air guide hole 110, and the first air guide hole 110 is connected to a vacuum pump; the vacuum suction cup 200 has a second air guide hole 210, and the second air guide hole 210 is connected to the first air guide hole 110, and the first end surface of the vacuum suction cup 200 is used to clamp a plate-like part; the flexible sleeve 300 has a first end and a second end along its axial direction, the first end of the flexible sleeve 300 is sealedly connected to the outer wall surface of the base 100, and the second end of the flexible sleeve 300 is sealedly connected to the outer wall surface of the vacuum suction cup 200; the vacuum clamping mechanism is configured as follows: before vacuuming, the base 100 and the vacuum suction cup 200 are flexibly connected through the flexible sleeve 300; after vacuuming the wafer, the base 100 and the second end surface of the vacuum suction cup 200 are vacuum-adsorbed and bonded.

[0033] The vacuum clamping mechanism provided by the embodiment of the present invention, on the one hand, when the vacuum suction cup 200 contacts the clamped part, due to the presence of the flexible sleeve 300, there is a gap between the vacuum suction cup 200 and the base 100, and the gap can be adjusted according to the flatness or deformation of the clamped part, allowing the vacuum suction cup 200 to have a certain tilt angle, thereby improving the fit between the vacuum suction cup 200 and the clamped part; on the other hand, after the vacuum is established, the vacuum suction cup 200 and the base 100 are adsorbed and fitted, and the vacuum clamping mechanism is changed from a flexible structure to a rigid structure, thereby avoiding the deformation of the flexible sleeve 300 caused by vacuum extraction, thereby causing the position of the clamped part to shift, and ensuring that the position of the clamped part does not shift or swing during the handover or movement of the clamped part, and even maintains good position accuracy after multiple handovers and movements, thereby improving the predictability of the position of the clamped part; in addition, when the vacuum suction cup of the vacuum clamping mechanism is processed, a certain tilt is allowed, which will not affect the clamping effect and has good processability.

[0034] The flexible sleeve 300 can be made of rubber or metal. Preferably, in an embodiment of the present invention, the flexible sleeve 300 is a metal flexible sleeve. The metal material is used to facilitate a sealed connection with the base 100 and the vacuum suction cup 200. The connection method is simple, and it has the dual functions of flexible deformation and sealing. The establishment of vacuum can be ensured without adding other auxiliary structures.

[0035] Specifically, the metal flexible sleeve, the base 100 and the vacuum suction cup 200 may be sealed and connected by welding.

[0036] In the embodiment of the present invention, the wall thickness of the metal flexible sleeve is between 0.02 mm and 0.1 mm, and the wall thickness of the metal flexible sleeve meets certain conditions to ensure the durability and elasticity of the metal flexible sleeve.

[0037] In the embodiment of the present invention, the material of the metal flexible sleeve is stainless steel, titanium alloy or copper alloy, which has the characteristics of elasticity and deformability and meets the requirements of corrosion resistance, fatigue resistance, impact resistance and high reliability.

[0038] In the embodiment of the present invention, the metal flexible sleeve is an integrally formed structure or a split structure. Specifically, the metal flexible sleeve may include a plurality of metal sheets welded together; the metal flexible sleeve may be an integrally formed structure.

[0039] In the embodiment of the present invention, the cross-sectional shape of the metal flexible sleeve is an arch-shaped structure or a U-shaped structure.

[0040] In the embodiment of the present invention, the metal flexible sleeve is a metal corrugated sleeve.

[0041] See attached Figure 1 In the embodiment of the present invention, the number of the first air guide holes 110 is multiple. In this way, the multiple first air guide holes 110 are used to evacuate air, establish a vacuum, and improve the vacuuming efficiency, that is, improve the clamping efficiency of the clamped parts.

[0042] See attached Figure 1 In the embodiment of the present invention, the number of the second air guide holes 210 is multiple. With such arrangement, the multiple second air guide holes 210 increase the contact area with the clamped parts and improve the clamping stability and reliability of the clamped parts.

[0043] In the embodiment of the present invention, the second air guide holes 210 are distributed along the radial direction of the vacuum suction cup 200 and along the circumferential direction of the vacuum suction cup.

[0044] In the embodiment of the present invention, the second air guide holes 210 are distributed at equal intervals along the radial direction of the vacuum suction cup 200 and are distributed at equal intervals along the circumferential direction of the vacuum suction cup.

[0045] See attached Figure 1 In the embodiment of the present invention, the end of the base 100 close to the vacuum suction cup 200 has a first groove 120, and the first groove 120 is located in the middle of the base 100; the first air guide hole 110 and the second air guide hole 210 are both connected to the first groove 120.

[0046] See attached Figure 1 The vacuum clamping mechanism provided by the embodiment of the present invention sets a first groove 120 in the middle of the base 100, and the edge of the base 100 fits with the vacuum suction cup 200, thereby reducing the surface processing accuracy of the base 100 and saving costs.

[0047] See attached Figure 4 In this embodiment of the present invention, the vacuum suction cup 200 has a protrusion 230, which extends outward along the second end surface of the vacuum suction cup 200, and the opening size of the protrusion 230 decreases along the direction pointing to the base 100; the base 100 has a recessed portion 130 connected to the first groove 120, and the recessed portion 130 is adapted to the shape and size of the protrusion 230 for accommodating the protrusion 230.

[0048] It should be noted that the cross-sectional shape of the protrusion 230 is a trapezoid.

[0049] The vacuum clamping mechanism provided in the embodiment of the present invention provides guidance for the fitting of the suction cup 200 and the base 100 by arranging mutually matching recessed portions 130 and raised portions 230 on the base 100 and the vacuum suction cup 200, and the raised portion 230 changes from large to small along the direction pointing to the base 100, thereby preventing the suction cup 200 and the base 100 from being misaligned.

[0050] See attached Figure 1 In the embodiment of the present invention, the end of the vacuum suction cup 200 away from the base 100 has a second groove 220 , the second groove 220 is located in the middle of the vacuum suction cup 200 , and the second groove 220 is connected to the second air guide hole 210 .

[0051] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A vacuum clamping mechanism, characterized in that: include: A base (100), wherein the base (100) is provided with a first air guide hole (110), and the first air guide hole (110) is connected to a vacuum pump; A vacuum suction cup (200), wherein the vacuum suction cup (200) has a second air guide hole (210), the second air guide hole (210) is connected to the first air guide hole (110), and the first end surface of the vacuum suction cup (200) is used for clamping a plate-shaped part; A flexible sleeve (300), wherein the flexible sleeve (300) has a first end and a second end along its axial direction, the first end of the flexible sleeve (300) is sealedly connected to the outer wall surface of the base (100), and the second end of the flexible sleeve (300) is sealedly connected to the outer wall surface of the vacuum suction cup (200); The vacuum clamping mechanism is configured such that: before vacuuming, the base (100) and the vacuum suction cup (200) are flexibly connected via the flexible sleeve (300); after vacuuming the wafer, the base (100) and the second end surface of the vacuum suction cup (200) are vacuum-adsorbed and bonded.

2. The vacuum clamping mechanism according to claim 1, characterized in that: The flexible sleeve (300) is a metal flexible sleeve.

3. The vacuum clamping mechanism according to claim 2, characterized in that: The wall thickness of the metal flexible sleeve is between 0.02 mm and 0.1 mm.

4. The vacuum clamping mechanism according to claim 2, characterized in that: The material of the metal flexible sleeve is stainless steel, titanium alloy or copper alloy.

5. The vacuum clamping mechanism according to claim 2, characterized in that: The metal flexible sleeve is an integrally formed structure or a split structure.

6. The vacuum clamping mechanism according to claim 2, characterized in that: The cross-sectional shape of the metal flexible sleeve is an arched structure or a U-shaped structure; or the metal flexible sleeve is a metal corrugated sleeve.

7. The vacuum clamping mechanism according to claim 1, characterized in that: The number of the first air guide holes (110) is plural, and / or the number of the second air guide holes (210) is plural.

8. The vacuum clamping mechanism according to claim 1, characterized in that: The base (100) has a first groove (120) at one end close to the vacuum suction cup (200), and the first groove (120) is located in the middle of the base (100); the first air guide hole (110) and the second air guide hole (210) are both connected to the first groove (120).

9. The vacuum clamping mechanism according to claim 8, characterized in that: The vacuum suction cup (200) has a protrusion (230), the protrusion (230) extends outwardly along the second end surface of the vacuum suction cup (200), and the opening size of the protrusion (230) decreases along the direction pointing to the base (100); the base (100) has a recessed portion (130) connected to the first groove (120), and the recessed portion (130) is adapted to the shape and size of the protrusion (230) and is used to accommodate the protrusion (230).

10. The vacuum clamping mechanism according to claim 1, characterized in that: The vacuum suction cup (200) has a second groove (220) at one end away from the base (100), the second groove (220) is located in the middle of the vacuum suction cup (200), and the second groove (220) is connected to the second air guide hole (210).

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