Material sheet collecting mechanism, collecting method and semiconductor slicing device

Abstract

The invention belongs to the technical field of semiconductor processing, and discloses a material sheet collecting mechanism, a collecting method and a semiconductor slicing device. The material sheet collecting mechanism comprises a supporting piece, a collecting box and a door plate assembly. A discharging hole is formed in the supporting piece in the vertical direction in a penetrating mode. The collecting box is detachably connected with the supporting piece and provided with a collecting opening. The door plate assembly comprises a door plate and a driving assembly, the door plate is arranged at the discharging hole, and the driving assembly is connected with the door plate to drive the door plate to rotate between the opening position and the closing position. According to the material sheet collecting method, the material sheet collecting mechanism is adopted, falling material sheets make contact with the door plate firstly and are put into the collecting box along with opening of the door plate, the driving assembly and the door plate are matched to guarantee that only one material sheet falls into the collecting box each time, mutual collision in the material sheet falling process is avoided, and the material sheets are prevented from being damaged. The semiconductor slicing device comprises a cutting assembly, a feeding assembly and the material sheet collecting mechanism, linkage of slicing and collecting is achieved, and the production efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing technology, and in particular to a material sheet collecting mechanism, a collecting method and a semiconductor slicing device. Background Art

[0002] Semiconductors are used in many fields, such as integrated circuits and communication systems. Finished semiconductors are small in size and are usually obtained by cutting semi-finished semiconductors with a slicer. Existing automated semiconductor cutting devices can quickly cut uniform semiconductor wafers and throw them into a collection box. During the falling process, different semiconductor wafers collide with each other, causing damage to the semiconductor wafers, or the impact force generated by the collision causes the semiconductor wafers to fall outside the collection box, causing waste and increasing production costs. Summary of the invention

[0003] The object of the present invention is to provide a material sheet collecting mechanism, a collecting method and a semiconductor slicing device, which are used to solve the problem of collision between semiconductor slices, avoid damage to the semiconductor slices, and reduce production costs.

[0004] To achieve this object, the present invention adopts the following technical solutions:

[0005] A sheet collecting mechanism, comprising:

[0006] A support member, wherein a blanking hole is provided through the support member in a vertical direction;

[0007] A collecting box, which is detachably connected to the supporting member and has a collecting port, which is located directly below the dropping hole;

[0008] The door panel assembly includes a door panel and a driving component. The door panel is arranged at the drop hole. The driving component is connected to the door panel to drive the door panel to rotate between an open position and a closed position. The door panel rotates downward from the closed position to the open position to guide the material sheet to slide into the collection box.

[0009] The above-mentioned sheet collecting mechanism, wherein the driving assembly includes a motor and a rotating shaft, the rotating shaft is rotatably arranged on the support member, the motor is used to drive the rotating shaft to rotate, and the door panel is fixedly connected to the rotating shaft.

[0010] The above-mentioned sheet collecting mechanism, wherein the motor drives the rotating shaft to rotate unidirectionally, and when the rotating shaft drives the door panel to move from the closed position to the open position, the motor and the rotating shaft are disengaged from the transmission;

[0011] The driving assembly also includes an elastic reset member, which can drive the rotating shaft to reverse so that the door panel moves from the open position to the closed position.

[0012] The above-mentioned sheet collecting mechanism, wherein the driving assembly also includes an active lever and a driven lever, the active lever is connected to the motor shaft of the motor and extends radially along the motor shaft, the driven lever is fixedly arranged on the rotating shaft and is eccentric relative to the rotating shaft, and the motor shaft drives the active lever to rotate to push the driven lever to drive the rotating shaft to rotate.

[0013] The above-mentioned sheet collecting mechanism, wherein the driving assembly also includes a connecting disk, the connecting disk is fixedly connected to the rotating shaft, the driven lever is fixedly connected to one side of the connecting disk, and one end of the elastic reset member is fixedly connected to the other side of the connecting disk.

[0014] The above-mentioned sheet collecting mechanism, wherein the driving assembly also includes a complete gear and an incomplete gear, the incomplete gear is connected to the motor shaft of the motor, the complete gear is fixedly connected to the rotating shaft, and the complete gear can mesh with the incomplete gear.

[0015] The above-mentioned sheet collecting mechanism, wherein the collecting box includes a box body and a mounting frame arranged on the top of the box body, and the mounting frame can be plugged into the supporting member along the horizontal direction.

[0016] The above-mentioned sheet collecting mechanism, wherein a limiting member is arranged on the supporting member, further comprises a limiting member, one end of which is rotatably connected to the supporting member, and the other end of which can be clamped with the mounting frame.

[0017] A material sheet collection method adopts the material sheet collection mechanism as described above, comprising: S1: the material sheet falls under the action of its own gravity until it contacts the door panel, and at the same time, the driving component drives the door panel to rotate from a closed position to an open position, and the door panel rotates downward to guide the material sheet to fall into a collection box; S2: the driving component drives the door panel to rotate from an open position to a closed position; S3: repeating steps S1 and S2 to achieve stacking of multiple material sheets in the collection box along the vertical direction.

[0018] A semiconductor slicing device, comprising a cutting component, a feeding component and a sheet collecting mechanism as described above, wherein the feeding component is used to transport semiconductors to the cutting component, the cutting component is arranged above the support and is used to slice the semiconductor, and the semiconductor sheet can fall onto the door panel under the action of its own gravity.

[0019] Beneficial effects of the present invention:

[0020] The sheet collection mechanism provided by the present invention, when in use, the sheet falls under the action of its own gravity until it contacts the door panel, and at the same time, the driving component drives the door panel to rotate from the closed position to the open position, and the door panel rotates downward to guide the sheet to fall into the collection box; thereafter, the driving component drives the door panel to rotate from the open position to the closed position, waiting for the next sheet to fall, thereby realizing that multiple sheets are stacked in the collection box in the vertical direction for easy sorting. The falling sheet first contacts the door panel, and as the door panel opens, it falls into the collection box. The driving component and the door panel cooperate to ensure that only one sheet falls into the collection box each time, avoiding collision between the sheets during the falling process, and preventing the sheets from being damaged.

[0021] The sheet collecting method provided by the present invention ensures that at the moment when the falling sheet contacts the door panel, the driving component drives the door panel to rotate downward so that the sheet slides into the collection box, thereby buffering the sheet and preventing damage to the sheet.

[0022] The semiconductor slicing device provided by the present invention adopts the above-mentioned material slice collecting mechanism to realize the linkage of slicing and collecting, thereby improving the production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a first structural schematic diagram of a sheet collecting mechanism provided by an embodiment of the present invention;

[0024] Figure 2 is a second structural schematic diagram of the sheet collecting mechanism provided by an embodiment of the present invention;

[0025] Figure 3 is a cross-sectional view of a sheet collecting mechanism provided by an embodiment of the present invention;

[0026] Figure 4 is a schematic diagram of the structure of a collection box provided by an embodiment of the present invention;

[0027] Figure 5 is a schematic structural diagram of a door panel assembly provided by an embodiment of the present invention;

[0028] Figure 6 is a schematic structural diagram of a position limiting member provided in an embodiment of the present invention;

[0029] Figure 7 is a first structural schematic diagram of a semiconductor slicing device provided by an embodiment of the present invention;

[0030] Figure 8 It is a second structural schematic diagram of the semiconductor slicing device provided in an embodiment of the present invention.

[0031] In the figure:

[0032] 1. Supporting part; 11. Blanking hole;

[0033] 2. Collection box; 21. Box body; 211. Collection port; 22. Mounting frame; 221. Upper cardboard; 222. Lower cardboard; 223. Mounting plate;

[0034] 3. Door panel assembly; 31. Door panel; 32. Driving assembly; 321. Motor; 322. Rotating shaft; 323. Elastic reset member; 324. Active lever; 325; Driven lever; 326. Connecting plate;

[0035] 4. Limiting member; 41. Connecting portion; 42. Limiting portion;

[0036] 5. Support block;

[0037] 100. cutting assembly; 110. circular saw;

[0038] 200. Feeding assembly. DETAILED DESCRIPTION

[0039] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar parts or parts having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0040] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection, it can be a mechanical connection or an electrical connection, it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] In the description of the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include the first feature being in direct contact with the second feature, or may include the first feature being in contact with the second feature through another feature between them instead of being in direct contact. Moreover, a first feature being "above", "above" and "above" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0042] The technical solution of the present invention is further described below with reference to the accompanying drawings and through specific implementation methods.

[0043] The embodiment of the present invention provides a material slice collecting mechanism, which is used to solve the problem of collision between semiconductor slices, avoid damage to the semiconductor slices, and reduce production costs.

[0044] like Figures 1 to 6 As shown, the material sheet collecting mechanism includes a support member 1, a collection box 2 and a door panel assembly 3. A material drop hole 11 is provided on the support member 1 in a vertical direction; the collection box 2 is detachably connected to the support member 1, and the collection box 2 has a collection port 211, which is located directly below the material drop hole 11; the door panel assembly 3 includes a door panel 31 and a driving assembly 32, the door panel 31 is provided at the material drop hole 11, and the driving assembly 32 is connected to the door panel 31 to drive the door panel 31 to rotate between an open position and a closed position, and the door panel 31 rotates downward from the closed position to the open position to guide the material sheet to slide into the collection box 2.

[0045] When in use, the sheet falls under its own gravity until it contacts the door panel 31. At the same time, the driving assembly 32 drives the door panel 31 to rotate from the closed position to the open position. The door panel 31 rotates downward to guide the sheet to fall into the collection box 2. After that, the driving assembly 32 drives the door panel 31 to rotate from the open position to the closed position, waiting for the next sheet to fall, thereby realizing that multiple sheets are stacked in the vertical direction in the collection box 2 for easy sorting. The falling sheet first contacts the door panel 31, and as the door panel 31 opens, it falls into the collection box 2. The driving assembly 32 and the door panel 31 cooperate to ensure that only one sheet falls into the collection box 2 each time, avoiding collisions between the sheets during the falling process and preventing damage to the sheets.

[0046] The support member 1 is used to support the collection box 2 and the door panel assembly 3. The support member 1 can be plate-shaped or a frame. In this embodiment, the support member 1 is plate-shaped and extends in the horizontal direction, which can reduce the installation space and facilitate the setting of the drop hole 11.

[0047] The collecting port 211 of the collecting box 2 is located directly below the material drop hole 11, so that the material pieces can fall vertically and pass through the material drop hole 11 and the collecting port 211 in sequence and finally be stacked in the collecting box 2 in the vertical direction. The shapes of the material drop hole 11 and the collecting port 211 are not specifically limited, as long as the material pieces do not collide with the material drop hole 11 and / or the collecting port 211 during the falling process.

[0048] The collection box 2 is detachably connected to the support 1, and the collection box 2 and the support 1 can be separated to facilitate the removal of the sheets in the collection box 2. Exemplarily, the collection box 2 includes a box body 21 and a mounting frame 22 disposed on the top of the box body 21, and the mounting frame 22 is detachably connected to the support 1.

[0049] The box 21 can be a cube or a cylinder, as long as the box 21 can accommodate the tablet. The mounting frame 22 can be integrally formed with the box 21, or can be detachably connected, such as by snap connection, bolt connection or magnetic connection.

[0050] The mounting frame 22 and the support member 1 can be plugged, clamped, bolted or magnetically connected. In this embodiment, the mounting frame 22 can be plugged into the support member 1 in the horizontal direction. Specifically, one of the mounting frame 22 and the support member 1 is provided with a protrusion and the other is provided with a groove, and the protrusion is inserted into the groove. Exemplarily, the support member 1 is a flat plate, and the mounting frame 22 includes a groove, and the flat plate is inserted into the groove.

[0051] Specifically, see Figure 3 and Figure 4 The mounting frame 22 includes an upper card plate 221 and a lower card plate 222, and the upper card plate 221 and the lower card plate 222 are spaced apart so that a groove is formed therebetween. The distance between the upper card plate 221 and the lower card plate 222 is greater than the thickness of the support member 1, so as to ensure that the support member 1 can be inserted into the groove, so as to facilitate the fixing of the collection box 2 and the support member 1. The upper card plate 221 and the lower card plate 222 can be provided in one group, or in two or more groups. The mounting frame 22 also includes a mounting plate 223, and the upper card plate 221 and the lower card plate 222 are both provided on the mounting plate 223, and the mounting plate 223 plays a supporting role.

[0052] In order to improve the stability of the collection box 2 after being connected to the support member 1, the sheet collection mechanism further includes a limiter 4, one end of which is rotatably connected to the support member 1, and the other end of which can be clamped to the mounting frame 22. The limiter 4 is rotated so that the limiter 4 can move between the locking position and the release position. When the limiter 4 is in the locking position, the limiter 4 is clamped to the mounting frame 22, so that the connection between the mounting frame 22 and the support member 1 is more stable. The connection between the collection box 2 and the support member 1 can be improved by plugging the mounting frame 22 with the support member 1. Specifically, the limiter 4 is rotated downward so that the limiter 4 rotates from the release position to the locking position.

[0053] One end of the stopper 4 is rotatably connected to the support member 1, which can be achieved by the clearance fit between the pin and the hole. Specifically, the sheet collection mechanism also includes a support block 5, which is fixed to the support member 1, the stopper 4 is provided with a first mounting hole, the support block 5 is provided with a second mounting hole, and the pin passes through the first mounting hole and the second mounting hole in sequence. In order to prevent the pin from being separated from the first mounting hole and / or the second mounting hole when the stopper 4 rotates, a split pin can be provided at both ends of the pin to limit the pin.

[0054] The support block 5 is used to support the stopper 4, and its structure and quantity are not limited here. Exemplarily, two stoppers 4 are provided, and the two stoppers 4 are distributed on both sides of the blanking hole 11. Correspondingly, two support blocks 5 are provided, and each support block 5 is connected to a stopper 4.

[0055] The limiting member 4 may be an L-shaped structure, so that a hook-shaped limiting portion 42 is formed at one end of the limiting member 4. When the limiting member 4 rotates downward, the limiting portion 42 is clamped on the outer side of the mounting frame 22 to achieve limiting.

[0056] In order to make the limiting member 4 and the mounting frame 22 cooperate smoothly, optionally, see Figure 2 and Figure 6 The limiting member 4 includes a connecting portion 41 and a limiting portion 42. The connecting portion 41 is rotatably connected to the support block 5, and the limiting portion 42 is connected to the connecting portion 41 through an elastic member. When the limiting member 4 is rotated downward to lock the mounting frame 22, the limiting portion 42 can be stretched in a direction away from the connecting portion 41, so that the limiting portion 42 moves to the outside of the mounting frame 22. After the limiting portion 42 is released, the limiting portion 42 is pressed against the mounting frame 22 under the action of the elastic member. On the one hand, the limiting portion 42 is prevented from interfering with the mounting frame 22, and on the other hand, the clamping force of the limiting member 4 on the mounting frame 22 can be increased by means of the elastic member.

[0057] The door panel 31 can block or open the material drop hole 11. When the door panel 31 is in the closed position, the door panel 31 is parallel to the material drop hole 11; when the door panel 31 is in the open position, the door panel 31 is at a certain angle to the material drop hole 11, and the collection box 2 is connected to the material drop hole 11, which facilitates the material sheet to fall into the collection box 2.

[0058] The door panel 31 can be arranged above or below the blanking hole 11, or can be arranged inside the blanking hole 11. Exemplarily, the door panel 31 is arranged inside the blanking hole 11 to save space. In order to avoid interference, the door panel 31 is smaller than the blanking hole 11.

[0059] The driving assembly 32 drives the door panel 31 to rotate between the open position and the closed position. The driving assembly 32 includes a motor 321 and a rotating shaft 322. The rotating shaft 322 is rotatably arranged on the support member 1. The motor 321 is used to drive the rotating shaft 322 to rotate. The door panel 31 is fixedly connected to the rotating shaft 322. The motor 321 drives the door panel 31 to rotate through the rotating shaft 322, which is convenient for controlling the switching frequency of the door panel 31. In other embodiments, the door panel 31 can also be driven by other driving mechanisms, such as a cylinder and a crank slider structure.

[0060] The rotating shaft 322 can be inserted through the support member 1, or can be rotatably arranged above or below the support member 1, as long as the door panel 31 does not interfere with the support member 1 when the rotating shaft 322 drives the door panel 31 to rotate. Exemplarily, the rotating shaft 322 is rotatably inserted through the support member 1, and the rotating shaft 322 can rotate relative to the support member 1 to drive the door panel 31 to move between the closed position and the open position, and the support member 1 can support the rotating shaft 322, which can simplify the structure and save space. One end of the rotating shaft 322 protrudes from the support member 1, which is convenient for transmission connection with the motor 321.

[0061] The rotating shaft 322 can be arranged at the edge of the door panel 31 or at the center of the door panel 31, as long as the rotating shaft 322 drives the door panel 31 to move without interfering with the support member 1. Optionally, the rotating shaft 322 is arranged at the center of the door panel 31, so that the rotating shaft 322 is evenly stressed, thereby improving the stability of the transmission.

[0062] The rotating shaft 322 and the door panel 31 can be integrally formed, or fixed by welding or clamping. For example, the rotating shaft 322 and the door panel 31 are fixed by welding, which is firm and easy to operate.

[0063] The rotating shaft 322 can be arranged at one end of the door panel 31, or can be arranged through the door panel 31. When the rotating shaft 322 is arranged through the door panel 31, one end of the rotating shaft 322 is connected to the motor 321 by transmission, and the other end passes through the door panel 31 and is connected to the support member 1 by rotation. The support member 1 supports both ends of the rotating shaft 322 to improve the rotation stability. When the rotating shaft 322 is arranged at one end of the door panel 31, one end of the rotating shaft 322 is connected to the motor 321 by transmission, and the other end is fixed to the door panel 31. A support shaft is arranged coaxially with the rotating shaft 322 on the other side of the door panel 31, and the support shaft is fixed to the door panel 31 and is connected to the support member 1 by rotation.

[0064] In some embodiments, the motor 321 can drive the rotating shaft 322 to rotate forward, driving the door panel 31 to move from the closed position to the open position, and then drive the rotating shaft 322 to rotate reversely, driving the door panel 31 to move from the open position to the closed position.

[0065] In this embodiment, the motor 321 drives the rotating shaft 322 to rotate unidirectionally, and when the rotating shaft 322 drives the door panel 31 to move from the closed position to the open position, the motor 321 and the rotating shaft 322 are disengaged from the transmission; the driving assembly 32 also includes an elastic reset member 323, which can drive the rotating shaft 322 to reverse so that the door panel 31 moves from the open position to the closed position. When the motor 321 drives the rotating shaft 322 to rotate unidirectionally, so that the door panel 31 moves from the closed position to the open position, the elastic reset member 323 is deformed, and when the motor 321 and the rotating shaft 322 are disengaged from the transmission, the elastic reset member 323 returns to its original state and drives the rotating shaft 322 to rotate in the opposite direction so that the door panel 31 moves from the open position to the closed position. In this process, if the motor 321 continues to rotate unidirectionally, it can be connected to the rotating shaft 322 again, so that the door panel 31 can reciprocate between the closed position and the open position.

[0066] In this embodiment, see Figure 3The driving assembly 32 further includes an active lever 324 and a driven lever 325. The active lever 324 is connected to the motor shaft of the motor 321 and extends in the radial direction of the motor shaft. The driven lever 325 is fixedly arranged on the rotating shaft 322 and is eccentric relative to the rotating shaft 322. The motor shaft drives the active lever 324 to rotate so as to push the driven lever 325 to drive the rotating shaft 322 to rotate. The motor 321 drives the active lever 324 to rotate around the axis of the motor shaft. The active lever 324 abuts against the driven lever 325 and then pushes the driven lever 325 to rotate around the axis of the rotating shaft 322. The rotation direction of the active lever 324 is opposite to that of the driven lever 325. Therefore, the active lever 324 gradually loses contact with the driven lever 325. After the active lever 324 and the driven lever 325 are separated, the motor 321 and the rotating shaft 322 are separated from the transmission.

[0067] Specifically, the active lever 324 can be connected to the motor shaft through a rotating part, and the rotating part is connected to the motor shaft through an existing coupling. The active lever 324 extends in the radial direction of the motor shaft and can overlap the driven lever 325. The driven lever 325 is fixedly connected to the rotating shaft 322 and is eccentrically arranged relative to the rotating shaft 322. When the active lever 324 drives the driven lever 325 to move, the rotating shaft 322 can rotate. The eccentric arrangement allows the active lever 324 and the driven lever 325 to be disengaged after rotating a certain angle.

[0068] The driven lever 325 can be directly fixed to the rotating shaft 322, or can be indirectly fixed to the rotating shaft 322. Generally, the diameter of the rotating shaft 322 is small to reduce space occupation. In order to ensure the eccentric distance between the driven lever 325 and the rotating shaft 322, the driving assembly 32 also includes a connecting disk 326, the connecting disk 326 is fixedly connected to the rotating shaft 322, the driven lever 325 is fixedly connected to one side of the connecting disk 326, and one end of the elastic reset member 323 is fixedly connected to the other side of the connecting disk 326. The connecting disk 326 is fixedly connected to the rotating shaft 322, so as to facilitate the connection of the driven lever 325 and the elastic reset member 323 with the connecting disk 326.

[0069] Specifically, the driven lever 325 is fixedly connected to the side of the connecting disk 326 close to the motor 321. The driven lever 325 is arranged at the edge of the connecting disk 326 and extends along the axial direction of the rotating shaft 322, so as to contact the active lever 324. The elastic reset member 323 is an existing torsion spring, which is easy to obtain. The torsion spring is sleeved on the rotating shaft 322, and one end of the torsion spring is fixedly connected to the support member 1, and the other end is connected to the connecting disk 326, which is convenient to connect.

[0070] When the motor 321 is working, the motor shaft drives the active lever 324 to rotate. After the active lever 324 contacts the driven lever 325, it drives the driven lever 325 to move. Since the driven lever 325 and the connecting plate 326 are eccentrically arranged, the driven lever 325 can drive the connecting plate 326 to rotate, and then drive the rotating shaft 322 to rotate, so that the door panel 31 moves downward from the closed position. At the same time, the torsion spring will deform. When the door panel 31 moves to the open position, the active lever 324 is disengaged from the driven lever 325, causing the motor 321 and the rotating shaft 322 to disengage from the transmission. The torsion spring returns to its original state and then drives the connecting plate 326 to rotate in the opposite direction, so that the door panel 31 moves upward from the open position to the closed position. The active lever 324 continues to rotate under the drive of the motor 321, contacts the driven lever 325 again, drives the rotating shaft 322 to rotate, and realizes the reciprocating motion of the door panel 31 between the open position and the closed position.

[0071] In other embodiments, the driving assembly 32 further includes a complete gear and an incomplete gear, the incomplete gear is connected to the motor shaft of the motor 321, the complete gear is fixedly connected to the rotating shaft 322, and the complete gear can mesh with the incomplete gear. The incomplete gear and the motor shaft can be connected through an existing coupling, the motor 321 drives the incomplete gear to rotate, the incomplete gear meshes with the gear, and then drives the door panel 31 to move downward from the closed position to the open position. Afterwards, the incomplete gear is disengaged from the gear, and the torsion spring drives the rotating shaft 322 to reverse, so that the door panel 31 moves upward from the open position to the closed position. The incomplete gear just rotates one circle and meshes with the gear again, driving the rotating shaft 322 to rotate, thereby realizing the reciprocating motion of the door panel 31 between the open position and the closed position.

[0072] The present embodiment also provides a material sheet collection method, which adopts the above-mentioned material sheet collection mechanism, including: S1: the material sheet falls under the action of its own gravity until it contacts the door panel 31, and at the same time, the driving component 32 drives the door panel 31 to rotate from the closed position to the open position, and the door panel 31 rotates downward to guide the material sheet to fall into the collection box 2; S2: the driving component 32 drives the door panel 31 to rotate from the open position to the closed position; S3: repeat steps S1 and S2 to achieve stacking of multiple materials in the collection box 2 in the vertical direction.

[0073] In some embodiments, the falling frequency of the sheet and the rotation speed of the motor 321 are coordinated so that each time a sheet falls, the door panel 31 rotates from the closed position to the open position at the moment when the sheet contacts the door panel 31. In this process, the sheet can fall at a certain frequency, and the motor 321 is always in the on state and intermittently drives the transmission shaft to rotate, regardless of whether there is a sheet falling.

[0074] In some embodiments, the sheet collecting mechanism includes a sensor, which is arranged on the falling path of the sheet to detect the position of the sheet, and controls the opening timing of the door panel 31 according to the position of the sheet. For example, when the sensor detects the sheet, it sends a signal to the controller, and the controller sends a signal to control the motor 321 to start immediately or delay starting, so that the sheet just contacts the door panel 31 at the moment of driving the door panel 31 to rotate. In this process, when no sheet falls, the motor 321 can be in a closed state, waiting for the controller to send a signal again, and when a new sheet falls and is detected by the sensor, the motor 321 starts again.

[0075] See also Figure 7 and Figure 8 This embodiment also provides a semiconductor slicing device, including a cutting assembly 100, a feeding assembly 200 and the above-mentioned sheet collecting mechanism, wherein the feeding assembly 200 is used to convey semiconductors to the cutting assembly 100, and the cutting assembly 100 is arranged above the support member 1 and is used to slice semiconductors, and the semiconductor sheets can fall onto the door plate 31 under the action of their own gravity. When the feeding assembly 200 conveys the semiconductor to the cutting position, the cutting assembly 100 located above the semiconductor cuts the semiconductor, and the cut semiconductor sheets fall onto the door plate 31 under the action of their own gravity, and fall into the collection box 2 as the door plate 31 rotates downward.

[0076] The feeding assembly 200 can select an existing conveyor belt for easy installation. The feeding assembly 200 also includes a clamping member, which clamps the semiconductor to prevent the semiconductor from being dislocated during cutting, thereby improving cutting efficiency.

[0077] The cutting assembly 100 includes a lifting member, a driving member and a circular saw 110. The driving member is fixedly arranged on the lifting member, and the driving member is in transmission connection with the circular saw 110, and can drive the circular saw 110 to rotate. When the semiconductor is fixed at the cutting position by the clamping member, the driving member drives the circular saw 110 to rotate, and at the same time, the lifting member drives the circular saw 110 to descend to cut the semiconductor. After that, the lifting member drives the circular saw 110 to rise to the original position, and the conveyor belt transports the semiconductor forward to the cutting position again, and the cutting process is repeated to realize automatic cutting of the semiconductor. The semiconductor wafers cut by the semiconductor slicing device fall into the collection box 2 of the wafer collection mechanism, realizing the linkage between the cutting and collection of the semiconductor wafers, and improving the production efficiency.

[0078] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A sheet collecting mechanism, characterized in that: include: A support member (1), wherein a material drop hole (11) is provided through the support member (1) in a vertical direction; A collecting box (2), the collecting box (2) being detachably connected to the supporting member (1), the collecting box (2) having a collecting port (211), the collecting port (211) being located directly below the material dropping hole (11); The door panel assembly (3) comprises a door panel (31) and a driving assembly (32), wherein the door panel (31) is arranged at the material drop hole (11), and the driving assembly (32) is connected to the door panel (31) to drive the door panel (31) to rotate between an open position and a closed position, and the door panel (31) rotates downward from the closed position to the open position to guide the material sheet to slide into the collection box (2).

2. The sheet collecting mechanism according to claim 1, characterized in that: The driving assembly (32) comprises a motor (321) and a rotating shaft (322); the rotating shaft (322) is rotatably disposed on the support member (1); the motor (321) is used to drive the rotating shaft (322) to rotate; and the door panel (31) is fixedly connected to the rotating shaft (322).

3. The sheet collecting mechanism according to claim 2, characterized in that: The motor (321) drives the rotating shaft (322) to rotate in one direction, and when the rotating shaft (322) drives the door panel (31) to move from the closed position to the open position, the motor (321) and the rotating shaft (322) are disengaged from the transmission; The driving assembly (32) further comprises an elastic reset member (323), wherein the elastic reset member (323) can drive the rotating shaft (322) to reverse so as to move the door panel (31) from the open position to the closed position.

4. The sheet collecting mechanism according to claim 3, characterized in that: The driving assembly (32) further comprises an active lever (324) and a driven lever (325); the active lever (324) is connected to the motor shaft of the motor (321) and extends radially along the motor shaft; the driven lever (325) is fixedly arranged on the rotating shaft (322) and is eccentric relative to the rotating shaft (322); the motor shaft drives the active lever (324) to rotate so as to push the driven lever (325) to drive the rotating shaft (322) to rotate.

5. The sheet collecting mechanism according to claim 4, characterized in that: The driving assembly (32) further comprises a connecting disk (326), wherein the connecting disk (326) is fixedly connected to the rotating shaft (322), the driven lever (325) is fixedly connected to one side of the connecting disk (326), and one end of the elastic reset member (323) is fixedly connected to the other side of the connecting disk (326).

6. The sheet collecting mechanism according to claim 3, characterized in that: The driving assembly (32) further comprises a complete gear and an incomplete gear, wherein the incomplete gear is connected to the motor shaft of the motor (321), the complete gear is fixedly connected to the rotating shaft (322), and the complete gear can mesh with the incomplete gear.

7. The sheet collecting mechanism according to any one of claims 1 to 6, characterized in that: The collection box (2) comprises a box body (21) and a mounting frame (22) arranged on the top of the box body (21); the mounting frame (22) can be plugged into the support member (1) in a horizontal direction.

8. The sheet collecting mechanism according to claim 7, characterized in that: It also comprises a limiting member (4), one end of which is rotatably connected to the supporting member (1), and the other end of which can be clamped to the mounting frame (22).

9. A method for collecting sheets, characterized in that: The sheet collecting mechanism according to any one of claims 1 to 8 comprises: S1: the sheet falls down under the action of its own gravity until it contacts the door panel (31), and at the same time, the driving assembly (32) drives the door panel (31) to rotate from a closed position to an open position, and the door panel (31) rotates downward to guide the sheet to fall into the collection box (2); S2: the driving assembly (32) drives the door panel (31) to rotate from the open position to the closed position; S3: Repeat steps S1 and S2 to achieve stacking of multiple sheets in the collection box (2) along the vertical direction.

10. A semiconductor slicing device, characterized in that: It comprises a cutting assembly (100), a feeding assembly (200) and a sheet collecting mechanism as described in any one of claims 1 to 8, wherein the feeding assembly (200) is used to transport semiconductors to the cutting assembly (100), the cutting assembly (100) is arranged above the support member (1) and is used to slice the semiconductors, and the semiconductor sheets can fall onto the door panel (31) under the action of their own gravity.

Images