Magnetic control coating equipment for composite board processing

Abstract

The invention belongs to the technical field of magnetic control coating, and discloses magnetic control coating equipment for composite board processing, the magnetic control coating equipment comprises coating equipment, a fixed cover is hinged to one side of the coating equipment through a hinge, a feeding mechanism and a driver are arranged to drive a top block to rotate, and the top block can drive a sliding column in the top block to slide in the rotating process, so that the coating efficiency is improved; meanwhile, the reset spring can correspondingly move along with rotation of the ejector block, rotation of the sliding column can further drive the rotating block connected with the sliding column to rotate, rotation of the rotating block can sequentially drive the limiting block and the shifting plate to move up and down on the fixed column, and in the series of linkage processes, the limiting block is driven to move up and down. When the shifting plate moves on the sliding rod, the moving sleeve connected with the shifting plate correspondingly moves on the sliding rod, when the shifting plate moves to the side, away from the sliding plate, in the shifting groove, the driver continues to rotate, and relevant parts are driven to continuously move by means of tight connection and synergistic effect of all the parts.

Description

Technical Field

[0001] The invention belongs to the technical field of magnetron coating, in particular to a magnetron coating device for processing composite plates. Background Art

[0002] Magnetron coating equipment for composite board processing usually refers to the application equipment of magnetron sputtering coating equipment (PVD coating equipment) in the field of composite board processing. This is an advanced surface treatment technology equipment that uses the magnetic field to control the movement trajectory of the ion beam to achieve sputtering adhesion on the material surface, thereby obtaining a high-quality thin film coating.

[0003] Start the vacuum pump and evacuate the coating chamber to the required vacuum level to reduce the impact of residual gas on the coating process. Use a vacuum gauge to check the vacuum level to ensure that it meets the requirements. Apply a negative voltage (bias) to the sputtering target and introduce sputtering gas (such as argon). Adjust the parameters to generate plasma and perform pre-sputtering for a period of time to remove oxides and other contaminants on the surface of the target. Bias the substrate to the required negative value and apply a positive voltage to the target. Monitor the sputtering current and film thickness to control the coating process. Adjust the flow and pressure of the sputtering gas as needed to optimize the coating quality. According to the specific requirements and uses of the coating, post-treat the coating, such as annealing, etching or polishing, to improve the performance or appearance of the coating.

[0004] However, each time the coating work is carried out, manual operation is required to place a composite sheet inside the coating equipment. Only after the composite sheet is properly placed can the coating equipment be started to perform the coating process on it.

[0005] Since each time a composite board is placed separately before coating, it means that each time a coating operation is performed, the coating equipment must be re-vacuumed to ensure that the vacuum degree inside meets the process requirements before the coating of the composite board can be successfully completed. This operation method is relatively cumbersome, and multiple vacuum operations will also consume more time to a certain extent. It is not easy to transport a certain number of composite boards each time as needed, and it is not convenient to load a large amount of materials at one time, which can easily affect work efficiency. Summary of the invention

[0006] In order to solve the problems raised in the above background technology that it is not easy to transport a certain number of composite plates each time as required, and it is not convenient to load a large amount of materials at one time, which may easily lead to work efficiency problems, the present invention provides a magnetron coating device for composite plate processing.

[0007] To achieve the above object, the present invention provides the following technical solutions: A magnetron coating device for processing composite plates, comprising a coating device, one side of the coating device is hinged with a fixed cover by a hinge, and a feeding mechanism and a correction mechanism are respectively installed inside the coating device; The feeding mechanism includes a slide rod, a moving sleeve, a toggle plate, a limit block and an auxiliary moving part, wherein the outer wall of the slide rod is slidably connected to the inner wall of the moving sleeve, one side of the toggle plate is connected to one side of the limit block, and the auxiliary moving part is located on the other side of the limit block; The correction mechanism includes a bidirectional screw, two movable frames, a limiting block and a clamping block. The outer wall of the bidirectional screw is threadedly connected to the inner walls of the two movable frames, and the limiting block is fixedly connected to one side of the clamping block.

[0008] Preferably, a first top cover and a second top cover are respectively installed on the top of the coating device, a vacuum pump is fixedly installed on the top surface of the second top cover, and an input end of the vacuum pump is connected to the coating device.

[0009] Preferably, the front side of the coating equipment is respectively connected with an argon gas input pipe and an output pipe, and a control valve is fixedly installed at one end of the argon gas input pipe and the output pipe. The bottom surface of the coating equipment is provided with four supporting legs in a rectangular array, and the top surfaces of the four supporting legs are fixedly connected to the bottom surface of the coating equipment.

[0010] Preferably, a storage component is installed above the sliding rod, a straight rod is fixedly connected to the top surface of the storage component, the straight rod is connected to the inner wall of the coating equipment, a toggle groove is opened on the bottom surface of the storage component, and a sliding plate is installed on one side of the storage component.

[0011] Preferably, both ends of the slide rod are fixedly connected with stabilizing blocks, and there are two stabilizing blocks, and the top surfaces of the two stabilizing blocks are connected to one side of the bottom of the storage component.

[0012] Preferably, a protruding block is fixedly connected to the top of the toggle plate, and the toggle plate is located directly below the toggle groove.

[0013] Preferably, the auxiliary moving part includes a rotating block, a sliding column, a return spring and a top block, the rotating block is fixedly connected to the inside with a rotating shaft, the rotating block is rotatably connected to the limit block via the rotating shaft, the bottom surface of the sliding column is connected to the top surface of the rotating block, the top block is elastically connected to the rotating block via a return spring, the inner wall of the top block is slidably connected to the outer wall of the sliding column, and a driver is installed on one side of the top block.

[0014] Preferably, a conveyor belt body is arranged above the bidirectional screw rod, and stabilizing plates are fixedly connected to both sides of the outer surface of the conveyor belt body. The outer rings at both ends of the bidirectional screw rod are rotatably connected to the inner wall of the stabilizing plate through bearings, and a driving motor is fixedly installed on one side of the stabilizing plate, and the output end of the driving motor is spline-connected to one end of the bidirectional screw rod.

[0015] Preferably, one side of the limiting block is fixedly connected to one side of the movable frame, the surface of the limiting block is slidably connected to a guide rail, and the top surface of the guide rail is connected to the bottom surface of the conveyor belt body.

[0016] Preferably, the inner walls of the two movable racks are slidably connected with sliding cylinders, and the sliding cylinders are slidably connected to the limiting blocks.

[0017] Compared with the prior art, the present invention has the following beneficial effects: The present invention provides a feeding mechanism, and a driver drives the top block to rotate. During the rotation of the top block, the sliding column inside it will be driven to slide. At the same time, the return spring will also move accordingly with the rotation of the top block, and the rotation of the sliding column will further drive the rotating block connected thereto to rotate. The rotation of the rotating block will sequentially drive the limit block and the toggle plate to move up and down on the fixed column. During this series of linkage processes, the moving sleeve connected to the toggle plate will also move on the slide rod accordingly. When the toggle plate moves to the side of the toggle plate away from the sliding plate in the toggle groove, the driver continues to rotate, and relies on the close connection and synergy between the various components to drive the related components to continue to move, and finally enables the toggle plate to push the composite plate to move in the direction of the sliding plate, and then causes the composite plate to slide along the sliding plate onto the conveyor belt body. This intermittent feeding method can store the composite plate in advance, save time, and improve work efficiency. Intermittent feeding can convey a certain number of composite plates each time as needed, avoiding the situation of material accumulation and chaos on the conveyor belt body that may be caused by a large amount of feeding at one time.

[0018] The present invention sets a correction mechanism, and a driving motor drives the bidirectional lead screw to rotate. Since the bidirectional lead screw is threadedly connected to the inner walls of the two moving frames, when the bidirectional lead screw rotates, the two moving frames will move toward or oppositely along the bidirectional lead screw (determined by the screw thread rotation direction and the motor rotation direction), and the moving frame drives the limiting block to move, and the limiting block slides along the guide rail to ensure the stability of the moving direction. At the same time, the limiting block drives the clamping block to move, and the clamping block will clamp and correct the workpiece that falls on the conveyor belt body to ensure that the workpiece is in a suitable position and posture. After the workpiece falls from the storage part to the conveyor belt body through the feeding mechanism, the workpiece can be quickly adjusted to a suitable state through this efficient and precise correction mechanism, so that the feeding process and the subsequent coating process can be seamlessly connected, and the workpiece will not be affected by the normal development of the subsequent coating operation due to being in a disorderly position and posture on the conveyor belt, thereby ensuring the continuity of the entire production process and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0020] Figure 2It is a schematic diagram of the feeding mechanism of the present invention.

[0021] Figure 3 It is a schematic diagram of the correction mechanism of the present invention.

[0022] Figure 4 It is a schematic diagram of the correction mechanism and the feeding mechanism of the present invention.

[0023] Figure 5 It is a schematic diagram of the coordination relationship between the correction mechanism and the feeding mechanism of the present invention.

[0024] Figure 6 It is a schematic diagram of the local structure of the feeding mechanism of the present invention.

[0025] In the figure: 1. coating equipment; 101. first top cover; 102. vacuum pump; 103. argon gas input pipe; 104. second top cover; 2. fixed cover; 3. feeding mechanism; 31. sliding rod; 311. stabilizing block; 32. moving sleeve; 321. fixed column; 33. toggle plate; 34. limit block; 35. auxiliary moving part; 351. rotating block; 352. sliding column; 353. reset spring; 354. top block; 36. storage part; 361. straight rod; 362. toggle groove; 363. sliding plate; 4. correction mechanism; 41. bidirectional screw; 42. moving frame; 421. sliding cylinder; 43. limiting block; 44. clamping block; 45. guide rail; 5. conveyor belt body. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] like Figures 1 to 6 As shown, the present invention provides a magnetron coating device for composite plate processing, comprising a coating device 1, a fixed cover 2 is hingedly connected to one side of the coating device 1 through a hinge, and a feeding mechanism 3 and a correction mechanism 4 are respectively installed inside the coating device 1; The feeding mechanism 3 includes a slide bar 31, a moving sleeve 32, a toggle plate 33, a limit block 34 and an auxiliary moving member 35. The outer wall of the slide bar 31 is slidably connected to the inner wall of the moving sleeve 32, one side of the toggle plate 33 is connected to one side of the limit block 34, and the auxiliary moving member 35 is located on the other side of the limit block 34; The correction mechanism 4 includes a bidirectional screw rod 41 , two movable frames 42 , a limiting block 43 and a clamping block 44 . The outer wall of the bidirectional screw rod 41 is threadedly connected to the inner walls of the two movable frames 42 , and the limiting block 43 is fixedly connected to one side of the clamping block 44 .

[0028] The above scheme is adopted: the slide rod 31 provides a stable linear sliding track for the moving sleeve 32 to ensure that the moving sleeve 32 can move smoothly along the predetermined direction, and the moving sleeve 32 is used as a carrier to connect other components (such as the limit block 34, the toggle plate 33, etc.), and transmits power to subsequent components to realize the related actions of feeding. By setting the feeding mechanism 3, the driver drives the top block 354 to rotate. During the rotation of the top block 354, it will drive the sliding column 352 inside it to slide. At the same time, the reset spring 353 will also move accordingly with the rotation of the top block 354, and the rotation of the sliding column 352 will further drive the rotating block 351 connected thereto to rotate, and the rotation of the rotating block 351 will in turn drive the limit block 34 and the toggle plate 33 to move on the fixed column 321 The movable sleeve 32 connected to the toggle plate 33 will also move on the slide bar 31 accordingly during this series of linkage processes. When the toggle plate 33 moves to the side of the toggle groove 362 away from the sliding plate 363, the driver continues to rotate. Relying on the close connection and synergy between the various components, the related components are driven to continue to move, and finally the toggle plate 33 can push the composite sheet material to move in the direction of the sliding plate 363, and then the composite sheet material slides along the sliding plate 363 onto the conveyor belt body 5. This intermittent feeding method can store the composite sheet material in advance, saving time and improving work efficiency. Intermittent feeding can deliver a certain number of composite sheets each time as needed, avoiding the chaotic accumulation of materials on the conveyor belt body 5 which may be caused by a large amount of feeding at one time.

[0029] like Figures 1 to 6 As shown, the top of the coating device 1 is respectively installed with a first top cover 101 and a second top cover 104, a vacuum pump 102 is fixedly installed on the top surface of the second top cover 104, the input end of the vacuum pump 102 is connected to the coating device 1, and the front of the coating device 1 is respectively connected with an argon gas input pipe 103 and an output pipe 105, one end of the argon gas input pipe 103 and the output pipe 105 are fixedly installed with a control valve, and the bottom surface of the coating device 1 is distributed with four supporting legs in a rectangular array, and the top surfaces of the four supporting legs are It is fixedly connected to the bottom surface of the coating equipment 1, a storage component 36 is installed above the slide rod 31, a straight rod 361 is fixedly connected to the top surface of the storage component 36, the straight rod 361 is connected to the inner wall of the coating equipment 1, a toggle groove 362 is provided on the bottom surface of the storage component 36, a sliding plate 363 is installed on one side of the storage component 36, and both ends of the slide rod 31 are fixedly connected with stabilizing blocks 311, there are two stabilizing blocks 311, and the top surfaces of the two stabilizing blocks 311 are connected to one side of the bottom of the storage component 36.

[0030] The above scheme is adopted: the toggle plate 33 is connected with the limit block 34, and moves under the drive of the movable sleeve 32. The raised block on the top cooperates with the toggle groove 362 on the bottom surface of the storage member 36, and cleverly converts the linear motion of the movable sleeve 32 into the action of pushing the sliding plate 363 on the storage member 36, so that the workpiece can smoothly slide from the storage member 36 to the conveyor belt body 5, realizing the key step of loading. Through the setting of the correction mechanism 4, the driving motor drives the bidirectional screw rod 41 to rotate. Since the bidirectional screw rod 41 is threadedly connected to the inner walls of the two moving frames 42, when the bidirectional screw rod 41 rotates, the two moving frames 42 will move toward or oppositely along the bidirectional screw rod 41 (determined by the screw rod thread rotation direction and the motor rotation direction), and the moving The frame 42 drives the limiting block 43 to move, and the limiting block 43 slides along the guide rail 45 to ensure the stability of the moving direction. At the same time, the limiting block 43 drives the clamping block 44 to move, and the clamping block 44 will clamp and correct the workpiece that falls on the conveyor belt body 5 to ensure that the workpiece is in a suitable position and posture. After the workpiece falls from the storage part 36 to the conveyor belt body 5 through the feeding mechanism 3, the workpiece can be quickly adjusted to a suitable state through this efficient and precise correction mechanism, so that the feeding process and the subsequent coating process can be seamlessly connected, and the workpiece will not be affected by the normal development of the subsequent coating operation due to the disorderly position and posture of the workpiece on the conveyor belt, thereby ensuring the continuity of the entire production process and improving production efficiency.

[0031] like Figures 1 to 6 As shown, the bottom surface of the movable sleeve 32 is fixedly connected with a fixed column 321, the outer wall of the fixed column 321 is slidably connected to the inner wall of the limit block 34, the top of the toggle plate 33 is fixedly connected with a protruding block, and the toggle plate 33 is located directly below the toggle groove 362, the auxiliary movable member 35 includes a rotating block 351, a sliding column 352, a return spring 353 and a top block 354, the interior of the rotating block 351 is fixedly connected with a rotating shaft, the rotating block 351 is rotatably connected to the limit block 34 through the rotating shaft, the bottom surface of the sliding column 352 is connected to the top surface of the rotating block 351, the top block 354 is elastically connected to the rotating block 351 through the return spring 353, and the inner wall of the top block 354 is slidably connected to the outer wall of the sliding column 352 A driver is installed on one side of the top block 354, and a conveyor belt body 5 is arranged above the bidirectional screw rod 41. Stabilizing plates are fixedly connected to both sides of the outer surface of the conveyor belt body 5. The outer rings at both ends of the bidirectional screw rod 41 are rotatably connected to the inner wall of the stabilizing plate through bearings. A driving motor is fixedly installed on one side of the stabilizing plate, and the output end of the driving motor is spline-connected to one end of the bidirectional screw rod 41. One side of the limiting block 43 is fixedly connected to one side of the moving frame 42. The surface of the limiting block 43 is slidably connected to a guide rail 45, and the top surface of the guide rail 45 is connected to the bottom surface of the conveyor belt body 5. The inner walls of the two moving frames 42 are slidably connected to sliding cylinders 421, and the sliding cylinders 421 are slidably connected to the limiting block 43.

[0032] The above scheme is adopted: the argon gas input pipe 103 is used to introduce argon gas into the coating equipment 1. Argon gas is often used as a protective gas or a process gas participating in the reaction in many coating processes. It can improve the chemical environment of the coating and improve the quality and performance of the coating. The output pipe 105 is used to discharge the gas in the equipment. The control valve is installed at their ends. The amount of argon gas introduced, the time of introduction and the time of gas discharge can be accurately controlled to achieve precise regulation of the gas environment of the coating process.

[0033] The working principle and use process of the present invention are as follows: first, open the first top cover 101 on the top of the coating device 1, place the composite sheet to be coated prepared in advance in the storage part 36, the straight rod 361 can prevent the composite sheet from falling, start the vacuum pump 102, evacuate the inside of the coating device 1 to make the inside reach the set vacuum degree, open the control valve of the argon gas input pipe 103, and introduce argon gas into the coating device 1. After reaching the appropriate process gas environment requirements, close the control valve to meet the vacuum environment conditions for coating; When the driver is started, the driver drives the top block 354 to rotate. The rotation of the top block 354 drives the sliding column 352 to slide inside the top block 354, and drives the return spring 353 to move. The rotation of the sliding column 352 drives the rotating block 351 to rotate, thereby driving the limit block 34 and the toggle plate 33 to move up and down on the fixed column 321. At the same time, the moving sleeve 32 moves on the slide rod 31. When the toggle plate 33 moves to the side of the toggle slot 362 away from the sliding plate 363, the driver continues to rotate to drive the relevant components to move, so that the toggle plate 33 moves the composite plate toward the sliding plate 363, and then slides onto the conveyor belt body 5. More specifically, the driver drives the top block 354 to rotate, and the rotation of the top block 354 drives the sliding column 352 to rotate. The sliding column 352 slides inside the top block 354 when rotating, thereby compressing or stretching the return spring 353. When the sliding column 352 completely slides into the inside of the top block 354, the sliding column 352 drives the rotating block 351 to rotate to a position parallel to the slide rod 31. At this time, the movable sleeve 32 moves to the left end of the slide rod 31 due to the movement of the fixed column 321, and the driver continues to drive the top block 354 to rotate. The sliding column 352 will gradually extend out of the top block 354 while rotating, and the rotating block 351 will gradually rotate downward from the top block 354, thereby driving the moving sleeve 32 to move to the right on the sliding rod 31. At the same time, the rotating block 351 drives the limit block 34 and the toggle plate 33 to move up and down on the fixed column 321. When the toggle plate 33 moves to the left end of the toggle slot 362, the driver continues to rotate to drive the relevant components to move, so that the toggle plate 33 will push the composite plate toward the sliding plate 363, and then slide onto the conveyor belt body 5; Start the driving motor of the correction mechanism 4, and the driving motor drives the bidirectional screw 41 to rotate. Since the bidirectional screw 41 is threadedly connected to the inner walls of the two moving frames 42, when the bidirectional screw 41 rotates, the two moving frames 42 will move toward or oppositely along the bidirectional screw 41 (determined by the screw thread rotation direction and the motor rotation direction), and the moving frame 42 drives the limiting block 43 to move, and the limiting block 43 slides along the guide rail 45 to ensure the stability of the moving direction. At the same time, the limiting block 43 drives the clamping block 44 to move, and the clamping block 44 will clamp and correct the workpiece that falls on the conveyor belt body 5 to ensure that the workpiece is in a suitable position and posture to facilitate the subsequent coating process. During the correction process, the sliding cylinder 421 assists the moving frame 42 and the limiting block 43 to slide inside, plays a role in auxiliary guidance and stable movement, and further ensures the smooth and accurate correction action. After the coating is completed, the control valve of the output pipe 105 is opened to discharge the gas in the coating equipment 1 and restore it to normal pressure.

[0034] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0035] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A magnetron coating device for composite plate processing, comprising a coating device (1), characterized in that: A fixed cover (2) is hingedly connected to one side of the coating device (1) via a hinge, and a loading mechanism (3) and a correction mechanism (4) are respectively installed inside the coating device (1); The feeding mechanism (3) comprises a sliding rod (31), a moving sleeve (32), a toggle plate (33), a limit block (34) and an auxiliary moving member (35); the outer wall of the sliding rod (31) is slidably connected to the inner wall of the moving sleeve (32); a fixing column (321) is fixedly connected to the bottom surface of the moving sleeve (32); the outer wall of the fixing column (321) is slidably connected to the inner wall of the limit block (34); one side of the toggle plate (33) is connected to one side of the limit block (34); and the auxiliary moving member (35) is located on the other side of the limit block (34); The correction mechanism (4) comprises a bidirectional screw rod (41), two movable frames (42), a limiting block (43) and a clamping block (44); the outer wall of the bidirectional screw rod (41) is threadedly connected to the inner walls of the two movable frames (42); and the limiting block (43) is fixedly connected to one side of the clamping block (44).

2. The magnetron coating equipment for composite sheet processing according to claim 1, characterized in that: A first top cover (101) and a second top cover (104) are respectively installed on the top of the coating device (1); a vacuum pump (102) is fixedly installed on the top surface of the second top cover (104); and an input end of the vacuum pump (102) is connected to the coating device (1).

3. The magnetron coating equipment for composite sheet processing according to claim 1, characterized in that: The front side of the coating device (1) is respectively connected with an argon gas input pipe (103) and an output pipe (105), and one end of each of the argon gas input pipe (103) and the output pipe (105) is fixedly mounted with a control valve. The bottom side of the coating device (1) is provided with four supporting legs distributed in a rectangular array, and the top surfaces of the four supporting legs are fixedly connected to the bottom side of the coating device (1).

4. The magnetron coating equipment for composite sheet processing according to claim 1, characterized in that: A storage component (36) is installed above the sliding rod (31), a straight rod (361) is fixedly connected to the top surface of the storage component (36), the straight rod (361) is connected to the inner wall of the coating device (1), a toggle groove (362) is provided on the bottom surface of the storage component (36), and a sliding plate (363) is installed on one side of the storage component (36).

5. The magnetron coating equipment for composite sheet processing according to claim 1, characterized in that: Both ends of the slide bar (31) are fixedly connected with stabilizing blocks (311), and there are two stabilizing blocks (311), and the top surfaces of the two stabilizing blocks (311) are connected to one side of the bottom of the storage member (36).

6. The magnetron coating equipment for composite sheet processing according to claim 1, characterized in that: A protruding block is fixedly connected to the top of the toggle plate (33), and the toggle plate (33) is located directly below the toggle groove (362).

7. The magnetron coating equipment for composite sheet processing according to claim 1, characterized in that: The auxiliary moving member (35) comprises a rotating block (351), a sliding column (352), a return spring (353) and a top block (354); a rotating shaft is fixedly connected inside the rotating block (351); the rotating block (351) is rotatably connected to the limit block (34) via the rotating shaft; the bottom surface of the sliding column (352) is connected to the top surface of the rotating block (351); the top block (354) is elastically connected to the rotating block (351) via the return spring (353); the inner wall of the top block (354) is slidably connected to the outer wall of the sliding column (352); and a driver is installed on one side of the top block (354).

8. The magnetron coating equipment for composite sheet processing according to claim 1, characterized in that: A conveyor belt body (5) is arranged above the bidirectional screw rod (41), and stabilizing plates are fixedly connected to both sides of the outer surface of the conveyor belt body (5). The outer rings at both ends of the bidirectional screw rod (41) are rotatably connected to the inner wall of the stabilizing plate via bearings. A drive motor is fixedly mounted on one side of the stabilizing plate, and the output end of the drive motor is spline-connected to one end of the bidirectional screw rod (41).

9. The magnetron coating equipment for composite sheet processing according to claim 1, characterized in that: One side of the limiting block (43) is fixedly connected to one side of the movable frame (42); the surface of the limiting block (43) is slidably connected to a guide rail (45); and the top surface of the guide rail (45) is connected to the bottom surface of the conveyor belt body (5).

10. The magnetron coating equipment for composite sheet processing according to claim 1, characterized in that: The inner walls of the two movable frames (42) are both slidably connected to sliding cylinders (421), and the sliding cylinders (421) are slidably connected to the limiting blocks (43).

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