Pre-piping installation system for semiconductor equipment

Abstract

The invention discloses a semiconductor equipment pre-piping installation system, and relates to the technical field of semiconductor equipment, the semiconductor equipment pre-piping installation system comprises a connecting structure, the connecting structure comprises a rotating ring, the rotating ring is elastically and rotatably connected to the interior of a connecting sleeve, and a plurality of receding grooves are distributed in the side, away from a first connecting pipe, of the rotating ring; clamping grooves are formed in the side faces of the receding grooves in a communicating mode, a plurality of L-shaped clamping blocks are distributed on the side, close to the first connecting pipe, of the circular ring in the circumferential direction, the L-shaped clamping blocks are connected with the corresponding clamping grooves in a clamped mode, a plurality of pressing blocks are distributed on the outer side of the curved surface of the rotating ring, and an arc-shaped plate is connected to the outer end of one pressing block. The first connecting pipe is provided with a limiting structure used for fixing the arc-shaped plate. The connecting assembly is arranged at the connecting position of the first connecting pipe and the second connecting pipe, so that the steps needed when the first connecting pipe and the second connecting pipe are disassembled and assembled are simplified, and less time and energy are consumed when the connected sealing gasket is replaced.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a semiconductor equipment pre-pipe installation system. Background Art

[0002] Semiconductor equipment pre-piping refers to a pre-configured piping system in semiconductor production equipment according to the requirements of the production process. It is mainly used to transport and control gases, liquids and other fluids required in the semiconductor production process to ensure the stability and reliability of the production process.

[0003] The existing two sections of pre-fitted pipes are connected by flanges and bolts, so that the gasket is sandwiched between the two flanges to achieve sealing. After long-term use, the gasket is prone to lose its original elasticity and sealing performance due to aging, corrosion or wear, resulting in leakage. Therefore, the gasket needs to be replaced regularly.

[0004] When replacing the gasket of the pre-arranged pipe, the process of disassembling and assembling the bolts needs to be repeated at least twice, and external tools are also needed to perform the process of disassembling and assembling the bolts, which makes it inconvenient to replace the gasket of the pre-arranged pipe and consumes more time and energy. Summary of the invention

[0005] The object of the present invention is to provide a semiconductor equipment pre-pipe installation system to solve the technical problem of inconvenient replacement of sealing gaskets at pipe connections in the prior art.

[0006] The technical problem to be solved by the present invention can be achieved by the following technical solutions:

[0007] A semiconductor equipment pre-pipe installation system, comprising a first connecting pipe and a second connecting pipe, wherein a connecting sleeve is provided at the end of the first connecting pipe, a sealing platform is provided at the bottom of the connecting sleeve, a circular ring is fixedly connected to the outer side of the second connecting pipe, and one end of the second connecting pipe cooperates with the sealing platform to achieve sealing, and further comprising:

[0008] The connecting structure comprises a rotating ring, which is elastically rotatably connected to the inside of the connecting sleeve, a sealing gasket is arranged on the end of the outer side of the connecting tube 2 close to the connecting tube 1, and an extrusion structure is also arranged inside the connecting sleeve. The rotation of the rotating ring can drive the extrusion structure to press the sealing gasket tightly, and a plurality of makeshift grooves are arranged on the side of the rotating ring away from the connecting tube 1, and the sides of the makeshift grooves are connected and provided with card grooves, and a plurality of L-shaped card blocks are circumferentially distributed on the side of the circular ring close to the connecting tube 1, and the L-shaped card blocks are engaged with the corresponding card grooves, and a plurality of pressure blocks are arranged on the outer side of the curved surface of the rotating ring, and a plurality of sliding grooves matching with the pressure blocks are arranged on the connecting sleeve, and the pressure blocks elastically slide in the corresponding sliding grooves, and an arc plate is connected to the outer end of one of the pressure blocks, and a limiting structure for fixing the arc plate is arranged on the connecting tube 1.

[0009] As a further solution of the present invention: the limiting structure includes a bolt, a fixing cylinder matching the arc plate is fixed on the outside of the connecting sleeve, the bolt passes through a side wall of the fixing cylinder and is threadedly connected to the fixing cylinder, and the end of the bolt is used to support the arc plate to fix it.

[0010] As a further solution of the present invention: the extrusion structure includes an extrusion rod and a return spring, a plurality of arc-shaped extrusion rods are provided, and are equidistantly distributed in a ring shape along the middle part of the fixed ring, the inner wall of the extrusion rod is provided with a rubber pad, and the outer wall of the extrusion rod is provided with a moving rod, the extrusion rod is slidably connected to the fixed ring along the radius of the fixed ring through the moving rod, and its end is circular and passes through the fixed ring, a plurality of limiting grooves are provided on the outer wall of the fixed ring, the return spring is arranged inside the limiting groove, and one end thereof is connected to the extrusion rod, and the other end is connected to the side wall of the limiting groove, and a water drop block for pressing the moving rod is fixed to the side wall of the rotating ring close to the moving rod.

[0011] As a further solution of the present invention: the outer wall of the arc-shaped plate is provided with a plurality of grooves distributed along its width direction, a triangular block is rotatably provided at one end of the bolt, the triangular block moves along the height direction, a cross bar for screwing the bolt is provided at the other end of the bolt, and the end of the triangular block cooperates with any one of the grooves.

[0012] As a further solution of the present invention: the water drop block is symmetrically cut into a water drop shape, and the curved surface side of the water drop block matches the moving rod.

[0013] As a further solution of the present invention: the arc plate is L-shaped, and the arc of a rod body and a connecting sleeve that cooperate with the arc plate and the fixing tube are the same.

[0014] As a further solution of the present invention: a holding spring is arranged between the side surface of the pressing block and the side wall of the sealing platform, one end of the holding spring is connected to the side surface of the pressing block, and the other end is connected to the side wall of the sealing platform.

[0015] As a further solution of the present invention: the length of the card slot is greater than the length of the transverse rod of the L-shaped card block.

[0016] Beneficial effects of the present invention:

[0017] 1. The present invention provides a connecting assembly at the connection between the connecting pipe 1 and the connecting pipe 2, thereby facilitating the disassembly and assembly of the connecting pipe 1 and the connecting pipe 2, so that the connecting pipe 1 and the connecting pipe 2 do not need to be disassembled with the aid of external tools, and at the same time simplifies the steps required for the disassembly and assembly of the connecting pipe 1 and the connecting pipe 2, and less time and energy are consumed when replacing the connecting sealing gasket.

[0018] 2. In the process of achieving connection through the connecting assembly, the present invention can drive several extrusion rods on the connecting sleeve to squeeze the sealing gasket at the same time, so that the sealing performance of connecting pipe 1 and connecting pipe 2 after connection is better, avoiding gas leakage from the connection between connecting pipe 1 and connecting pipe 2, and thus making the use of the pipeline more convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be further described below in conjunction with the accompanying drawings.

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 It is a structural schematic diagram of the rotating ring and the connecting sleeve of the present invention in cooperation with each other;

[0022] Figure 3 It is a schematic diagram of the structure of the L-shaped clamping block and the circular ring in the present invention;

[0023] Figure 4 It is a cross-sectional view of the movable rod and the fixed ring of the present invention in cooperation with each other;

[0024] Figure 5 For the present invention Figure 4 A schematic diagram of the enlarged structure at A in the middle;

[0025] Figure 6 It is a schematic diagram of the structure of the rotating ring and the clamping slot of the present invention.

[0026] In the figure: 1. Connecting pipe 1; 2. Connecting sleeve; 21. Sealing platform; 22. Slide groove; 3. Circular ring; 31. L-shaped clamping block; 4. Connecting pipe 2; 41. Sealing pad; 5. Rotating ring; 51. Pressing block; 52. Retaining spring; 53. Water drop block; 54. Displacement groove; 55. Clamping groove; 6. Fixed ring; 61. Moving rod; 62. Extrusion rod; 63. Reset spring; 64. Limiting groove; 7. Arc plate; 71. Groove; 72. Fixed cylinder; 73. Bolt; 74. Triangular block. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] like Figure 1-Figure 6As shown, a semiconductor equipment pre-pipe installation system includes a connecting pipe 1 and a connecting pipe 2 4, a connecting sleeve 2 is provided at the end of the connecting pipe 1, a sealing platform 21 is provided at the bottom of the connecting sleeve 2, a sealing ring is provided on the side of the sealing platform 21 away from the connecting pipe 1, a circular ring 3 is fixedly connected to the outer side of the connecting pipe 2 4, one end of the connecting pipe 2 4 is inserted into the interior of the connecting pipe 1, and the end is abutted against the sealing platform 21 to achieve sealing;

[0029] The installation system also includes a connection structure, which includes a rotating ring 5. The rotating ring 5 is elastically rotatably connected to the inside of the connecting sleeve 2. A sealing gasket 41 is arranged on the outer side of the connecting pipe 2 near the end of the connecting pipe 1. An extrusion structure is also arranged inside the connecting sleeve 2. The extrusion structure cooperates with the sealing gasket 41. The rotation of the rotating ring 5 can drive the extrusion structure to press the sealing gasket 41. A plurality of make-way grooves 54 are distributed on the side of the rotating ring 5 away from the connecting pipe 1. The sides of the make-way grooves 54 are connected to the card slots 55. The side of the ring 3 near the connecting pipe 1 is A plurality of L-shaped blocks 31 are fixedly distributed in the circumferential direction, and the card slots 55 are adapted to the L-shaped blocks 31, and the L-shaped blocks 31 are engaged with the corresponding card slots 55. A plurality of pressure blocks 51 are fixedly distributed on the outer side of the curved surface of the rotating ring 5, and a plurality of slide grooves 22 matching with the pressure blocks 51 are provided on the connecting sleeve 2, wherein the slide grooves 22 are through-opened, and the pressure blocks 51 slide elastically in the corresponding slide grooves 22, thereby ensuring the rotation stability of the rotating ring 5, and an arc plate 7 is connected to the outer end of one of the pressure blocks 51, and a limiting structure for fixing the arc plate 7 is provided on the connecting pipe 1;

[0030] After the L-shaped block 31 is aligned with the clearance groove 54, the connecting pipe 2 4 is moved to insert the L-shaped block 31 into the corresponding clearance groove 54, and the end of the connecting pipe 2 4 is inserted into the connecting pipe 1 1, abutting against the sealing ring on the sealing platform 21 to achieve sealing, and the rotating ring 5 is driven to rotate inside the connecting sleeve 2 by pushing the arc plate 7, so that the L-shaped block 31 is rotated and clamped into the inside of the clamping groove 55, and the rotated arc plate 7 is fixed using a limiting structure, thereby realizing the fixing process of the connecting pipe 1 and the connecting pipe 2 4 after connection, so that the material in the pipeline can circulate, and by simplifying the steps required for disassembly and assembly of the connecting pipe 1 and the connecting pipe 2 4, this clamping method is simple, fast and convenient for replacing the sealing ring.

[0031] In some specific embodiments, such as Figure 1 As shown, in order to facilitate the fixation of the arc plate 7, the limiting structure includes a bolt 73, and a fixing cylinder 72 matching the arc plate 7 is fixed on the outer side of the connecting sleeve 2. The bolt 73 passes through a side wall of the fixing cylinder 72 and is threadedly connected to the fixing cylinder 72. The end of the bolt 73 is used to abut the arc plate 7 to fix it. When the bolt 73 is rotated, the end of the bolt 73 is fed toward the arc plate 7 to abut the arc plate 7 to fix it, thereby preventing the rotating ring 5 from driving the arc plate 7 to rotate during the transmission process, causing the connecting pipe 1 and the connecting pipe 2 4 to loosen.

[0032] In some specific embodiments, such as Figure 3 or Figure 4 As shown, in order to further enhance the sealing performance of the connection between the connecting pipe 1 and the connecting sleeve 2, the extrusion structure includes an extrusion rod 62 and a return spring 63. A plurality of arc-shaped extrusion rods 62 are provided and are equidistantly distributed along the middle ring 6. The inner wall of the extrusion rod 62 is provided with a rubber pad, and the outer wall of the extrusion rod 62 is fixedly provided with a moving rod 61. The extrusion rod 62 is slidably connected to the fixing ring 6 along the radial direction of the fixing ring 6 through the moving rod 61, and its end is circular and penetrates the fixing ring 6. A plurality of limiting grooves 64 are fixedly provided on the outer wall of the fixing ring 6. The return spring 63 is arranged inside the limiting groove 64, and one end of the return spring 63 is connected to the extrusion rod 62, and the other end is connected to the inner wall of the limiting groove 64. A water drop block 53 for pressing the moving rod 61 is fixed to the side wall of the rotating ring 5 close to the moving rod 61.

[0033] When it is necessary to engage the L-shaped block 31 with the giving groove 54 by rotating the rotating ring 5, while the rotating ring 5 is rotating, the water drop block 53 on its inner wall can be used to push the moving rod 61 to drive the extrusion rod 62 to slide along the radius of the fixed ring 6, and the extrusion rod 62 can press the outer wall of the sealing gasket 41 so that the sealing gasket 41 can be deformed and fit with the inner wall of the connecting pipe 1 at the same time. The sealing gasket 41 is always in contact with the inner wall of the connecting pipe 1, so that the sealing effect of the pipeline connection after installation is better and a secondary seal is achieved. At the same time, the water drop block 53 on its inner wall can push the moving rod 61 and the extrusion rod 62 in real time to press the sealing gasket 41, so that the sealing effect of the exhaust pipe ring 3 after installation is better. Among them, the setting of the reset spring 63 can make it convenient for the extrusion rod 62 to be always in a state of being pulled outward when there is no external force pushing the moving rod 61, thereby ensuring that the connecting pipe 4 can be inserted into the inside of the connecting pipe 1.

[0034] In some specific embodiments, such as Figure 5As shown, in order to facilitate the adjustment of the pressing force of the extrusion rod 62 on the sealing gasket 41, the outer wall of the arc plate 7 is provided with a plurality of grooves 71 along its width direction. A triangular block 74 is rotatably provided at one end of the bolt 73. A limiting structure is provided on the side of the triangular block 74, so that the triangular block 74 can move up and down along the height of the fixing tube 72. A cross bar for screwing the bolt 73 is provided at the other end. The bolt 73 can be rotated without the aid of other tools. The end of the triangular block 74 is engaged with any one of the grooves 71, so that when the rotating ring 5 is rotated to the required angle, the bolt 73 can be engaged with one of the grooves 71 for fixing. The water drop block 53 is half of a water drop shape symmetrically cut. The surface side cooperates with the moving rod 61. In order to facilitate the control of the supporting force of the water drop block 53 on the moving rod 61 by rotating the angle of the rotating ring 5, the arc plate 7 is L-shaped, and the rod body of the arc plate 7 and the fixed cylinder 72 cooperate with the same curvature as the connecting sleeve 2. In order to facilitate the arc plate 7 to make a circular motion along the center point of the fixed ring 6, the arc plate 7 can still be inserted into the slot of the fixed cylinder 72. The length of the card slot 55 is greater than the length of the horizontal rod of the L-shaped card block 31. In order to adapt to the different rotation angles of the rotating ring 5, a variety of structures are set to cooperate with the adjustment of the pressing force of the extrusion rod 62 on the sealing gasket 41, which can be adjusted according to actual needs to avoid the leakage of materials in the pipeline due to different sealing gaskets.

[0035] In some specific embodiments, such as Figure 4 As shown, in order to facilitate the resetting of the rotating ring 5 in the absence of external force, a retaining spring 52 is provided between the side of the pressing block 51 and the side wall of the sealing platform 21, one end of the retaining spring 52 is connected to the side of the pressing block 51, and the other end is connected to the side wall of the sealing platform 21. When the rotating ring 5 is not acted upon by external force, due to the resilience of the sealing platform 21, the rotating ring 5 is automatically reset, so that the L-shaped clamping block 31 and the giving way groove 54 are released, thereby facilitating the disassembly of the connecting pipe 1 and the connecting pipe 2 4.

[0036] Several embodiments of the present invention are described in detail above, but the embodiments of the present invention are not limited thereto and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A semiconductor equipment pre-pipe installation system, comprising a connecting pipe 1 (1) and a connecting pipe 2 (4), wherein the end of the connecting pipe 1 (1) is provided with a connecting sleeve (2), the bottom of the connecting sleeve (2) is provided with a sealing platform (21), the outer side of the connecting pipe 2 (4) is fixedly connected with a circular ring (3), one end of the connecting pipe 2 (4) cooperates with the sealing platform (21) to achieve sealing, characterized in that: Also includes: A connection structure, the connection structure comprising a rotating ring (5), the rotating ring (5) being elastically rotatably connected inside a connection sleeve (2), a sealing gasket (41) being arranged on the outer side of the second connection pipe (4) near the end of the first connection pipe (1), an extrusion structure being arranged inside the connection sleeve (2), the rotating ring (5) being able to drive the extrusion structure to press the sealing gasket (41) when rotating, a plurality of clearance grooves (54) being arranged on the side of the rotating ring (5) away from the first connection pipe (1), the side surfaces of the clearance grooves (54) being connected and provided with a clamping groove (55), the circular ring (3) A plurality of L-shaped clamping blocks (31) are circumferentially distributed on one side close to the connecting pipe (1), and the L-shaped clamping blocks (31) are clamped with corresponding clamping grooves (55). A plurality of pressure blocks (51) are distributed on the outer side of the curved surface of the rotating ring (5), and a plurality of sliding grooves (22) matching with the pressure blocks (51) are provided on the connecting sleeve (2). The pressure blocks (51) slide elastically in the corresponding sliding grooves (22), and an arc-shaped plate (7) is connected to the outer end of one of the pressure blocks (51), and a limiting structure for fixing the arc-shaped plate (7) is provided on the connecting pipe (1).

2. A semiconductor equipment pre-piping installation system according to claim 1, characterized in that: The limiting structure comprises a bolt (73), a fixing cylinder (72) matched with the arc-shaped plate (7) is fixed on the outer side of the connecting sleeve (2), the bolt (73) passes through a side wall of the fixing cylinder (72) and is threadedly connected to the fixing cylinder (72), and the end of the bolt (73) is used to abut against the arc-shaped plate (7) to fix it.

3. A semiconductor equipment pre-piping installation system according to claim 1, characterized in that: The extrusion structure comprises an extrusion rod (62) and a return spring (63). A plurality of arc-shaped extrusion rods (62) are provided and are equidistantly distributed in a ring shape along the middle of the fixed ring (6). The inner wall of the extrusion rod (62) is provided with a rubber pad. The outer wall of the extrusion rod (62) is provided with a moving rod (61). The extrusion rod (62) is slidably connected to the fixed ring (6) along the radial direction of the fixed ring (6) through the moving rod (61), and its end is circular and penetrates the fixed ring (6). The outer wall of the fixed ring (6) is provided with a plurality of limiting grooves (64). The return spring (63) is arranged inside the limiting groove (64), and one end thereof is connected to the extrusion rod (62) and the other end is connected to the side wall of the limiting groove (64). A water drop block (53) for pressing the moving rod (61) is fixed to the side wall of one end of the rotating ring (5) close to the moving rod (61).

4. A semiconductor equipment pre-piping installation system according to claim 2, characterized in that: The outer wall of the arc-shaped plate (7) is provided with a plurality of grooves (71) distributed along its width direction; a triangular block (74) is rotatably provided at one end of the bolt (73); the triangular block (74) moves along the height direction of the fixing tube (72); a cross bar for screwing the bolt (73) is provided at the other end of the bolt (73); an end of the triangular block (74) matches with any one of the grooves (71).

5. A semiconductor equipment pre-pipe installation system according to claim 3, characterized in that: The water drop block (53) is symmetrically cut into a water drop shape, and the curved surface side of the water drop block (53) matches the moving rod (61).

6. A semiconductor equipment pre-pipe installation system according to claim 4, characterized in that: The arc plate (7) is L-shaped, and the arc angles of a rod body matched with the arc plate (7) and the fixing tube (72) are the same as those of the connecting sleeve (2).

7. A semiconductor equipment pre-pipe installation system according to claim 1, characterized in that: A holding spring (52) is provided between the side of the pressing block (51) and the side wall of the sealing platform (21); one end of the holding spring (52) is connected to the side of the pressing block (51), and the other end is connected to the side wall of the sealing platform (21).

8. A semiconductor equipment pre-pipe installation system according to claim 1, characterized in that: The length of the clamping slot (55) is greater than the length of the transverse rod of the L-shaped clamping block (31).

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